Measurement of the index of refraction for uranium dioxide in the extreme ultraviolet and some other

stuff to make the name longer

Presented by Heidi Dumais

Some Background XUV: 1nm – 60nm

Borders molecular scale

Things like to absorb it… in particular air

Applications – Why We Might Care

Microelectronics

Astronomical imaging

Microscopy

Procedure Anatomy of a thin film

ALS beamline

Transmission measurements

Reflection measurements

Analysis Transmission data

gives alpha*thickness

Reflection data gives thickness

Together we get alpha → complex index of refraction

Reflection Analysis Reflection data fit to

Parratt recursive model – vary the index and the thickness

Transmission Analysis (1st Approx) Fit the “rocking

transmission” curves to a model to extract alpha*thickness

Divide out thickness from Reflection to get alpha

Alpha gives beta

Redo

Acknowledgments Dr. Turley and Dr. Allred

Zephne Larsen, Allison Wells, Keith Jackson

NASA

BYU

DOE and Eric Gullikson