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M a r S u r f
MarSurf LD 120. Two in OneHigh-precision contour and surface measuring system
NEW: now with MarSurf XC 20
MarSurf LD 120. Two in One
© by Mahr GmbH, Göttingen We reserve the right to modify our products, particularly with a view totechnical improvement and further development. All illustrations andnumbers etc. are therefore subject to change.Status: August, 30, 2004
Mahr GmbH GöttingenP.O. Box 1853, 37008 Göttingen, Germany Brauweg 38, 37073 Göttingen Phone +49-551-7073800, Fax +49-551-7073888, E-mail: [email protected]
Roughness and contour measurements inone? Of course - with MarSurf LD 120
Ladies and Gentlemen,
This presentation folder is intended to introduce you to
the new, universally usable, high-end surface measuring
system LD 120.
The combination of contour and roughness depth meas-
urements on radii, on slants or free-form surfaces requires
a measuring unit with a comparably large stroke as well
as a comparably high resolution. Measuring paths in mm
range are necessary for the contour measurements, the
roughness measurements in the µm range. In order to
realize both measuring tasks in only one measurement, a
highly precise measuring system is necessary, which
enables relatively large measuring strokes for the contour
as well as resolutions in the µm range for roughness
measurements.
The new 2D measuring unit LD 120 closes the gap be-
tween the roughness and contour measuring units in the
spectrum of Mahr surface products. The probe system
(z-axis) offers a measuring range of 10 mm with a resolu-
tion of 2 nm. The position of the probe system in the
direction of the drive unit (x-axis) is recorded over
120 mm by means of an integrated glass scale and a reso-
lution of 2 nm. These features allow measurement of the
finest contours. In addition, the electronically controlled
contacting combined with an almost frictionless support
of the probe, allows for finest contact forces down to
0.5 mN (standard for stylus instruments 0.7 mN), which
are held constant over the entire measuring range.
Together with the high probe resolution, this allows for a
roughness measurement according to standard specifica-
tions.
You start a contour measurement on your measuring
object and perform the desired contour evaluation with
the MarSurf XC 20 evaluation software. You can addition-
ally determine roughness parameters on random loca-
tions of the contour profile. This means that when
choos-
ing a probe arm with surface stylus, you can acquire
contour characteristics as well as roughness values in
one measurement.
MarSurf LD 120 is a highly precise 2D measuring unit, this
means that aside from the measurement, the probe tip
can be positioned in a two-dimensional room via the con-
trolled drives of the drive axis and probe axis. The highly
precise positioning allows not only insertion into even the
smallest bores but also fully automatic measuring runs.
You start a measuring program which approaches ran-
dom points on your workpiece, performs measurements
and then delivers fully automatically the desired evalua-
tions. With the touch of a button, you receive numerous
results. Since the values can also be tolerated, you can
directly see if your workpiece lies within the specifica-
tions.
An extensive range of probe arms is available in order to
optimally use the diverse application possibilities of this
surface measuring unit. The probe arms differ as to sur-
face and contour stylus tips as well as to their geometry,
which allows insertion into small bores, for example. The
probe arms are connected to the probe system by a
magnetic coupling. This allows for fast changing of the
probe arms, but also prevents damage of the probe bear-
ing. After calibration of each probe arm has been carried
out, the geometry data, stylus tip radii and form devia-
tion as well as weighing data are recorded in the soft-
ware.
Have fun with the Marsurf LD 120!
MarSurf LD 120
Product Description 4
MarSurf LD 120 Compact Measuring Station 4
MarSurf LD 120 with Measuring Stand 5
Your High-Precision Contour and Surface Measuring System 6
Technical Data 7
System Description 8
MarSurf LD 120 in Process 9
High-precision Contour Measurement 10
Roughness Measurement 12
Contour and Roughness Measurement 13
Calibration and Probe Compensetion 14
Probe Arm Exchange 15
Automatic Two-dimensional Positioning 16
Segmented Measurement 17
Automation 18
Application Software MarSurf XC 20 19
Practical Examples 26
Annex 32
Scope of Delivery 32
Services 34
Accessories 36
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Contents
MarSurf LD 120 Product Description
MarSurf LD 120 Compact Measuring Station
Mahr offers the MarSurf LD 120 in two basic meas-uring station variants.
The "compact" version is designed for smaller measuringobjects and higher accuracy, since vibrations are optimal-ly supressed by the stiff compact stand with small meas-uring loop.This variant is therefore especially well-suited for areasclose to the production site. Mounting devices canadvantageously be integrated in the set-up for auto-matic measurements on serial parts.
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Product Description MarSurf LD 120
MarSurf LD 120 with Measuring Stand
• A calibration method for ensuring the very highest accuracy gives you the assurance that your results will be correct.
• Measuring forces from 0.5 mN to 30 mN whose set-tings can be varied via software and which remain constant over the entire measuring stroke deliver flexibility and reliability. You can select the optimum measuring force to match the material characteristics of the testpiece and the pick-up of your choice.
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MarSurf LD 120 with Measuring Stand
Resolutions in the nm range are achieved in a combina-tion consisting of the XC 20 with high-precision driveand tracing system LD 120 and measuring stand ST 500 / ST 750.
"Two in One" enables the contour and roughness depthto measured in a single measuring run.10 mm measuring stroke for 2 nm resolution and a measuring length of 120 mm are the dimensions withinwhich the contour and roughness depth parameters aremeasured and evaluated with the highest accuracy.
• The magnetic pick-up mount guarantees flexibility in the diversity of pick-ups and exchangeability while maintaining the same high level of reliability.
• Guaranteed positioning accuracy when exchanging pick-ups in the µm range and collision protection, rigidity and stability of the pick-ups are essential for resolutions in the nm range.
• Roughness and contour in a single strokeYou need only half the time and your work is faster, more reliable and more efficient. With just onemeasurement, you have all the results for roughness and contour characteristics at a glance. So you have more time for other things!
• State-of-the-art laser technology for small tolerancesThe integrated special laser interferometer provides pinpoint accuracy over a large measuring range and at maximum resolution. You can process jobs with low tolerances and thus tackle new challenges head-on.
• Proven user interface and handling conceptThe user concept of this high-precision contour and roughness measuring system is identical with the other well-known PC-controlled surface measuring systems of Mahr. Thus, you are joining a contemporaneous high-end generation of surface metrology and at the same time increase process safety at lower training costs.
• Innovative tracing arm concept for maximum stabilityThe tracing arms, which have been designed using bridge-building techniques, ensure maximum rigidity,low-oscillation measurements and unwavering precision. So you can build your own bridges - to new dimensions of flexibility!
• Probes with magnetic mountingThe magnetic mounting facilitates probe change within seconds and ensures a high degree of system and collision protection as well as longevity.
• Market conformityThere is no better solution for high-precision contour and roughness measurement.
• Customer serviceOver 65 years of expertise in surface measurement: more than six decades of experience in combination with state-of-the-art, future-orientated technology. And in case of questions there is always a Mahr subsidiary or representative nearby.
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Your High-precision Contour and Surface Measuring System
MarSurf LD 120 Product Description
Product Description MarSurf LD 120
Technical Data
7
• MarSurf LD 120 with standard probe LD A14-10-2 under low vibration conditions
• Recommended working temperature: 20 °C
In order to reach the stated accuracy at highest resolu-tion, the probe system is produced by highly qualifiedpersonnel in clean rooms which have been especially de-signed for this purpose.
Integrating these conditions in the available productionprocesses is what makes a competent precision metrologyproducer.
Production of MarSurf LD 120
The stated technical data is valid for the following con-ditions:
Measuring system special laser interferometerTraversing length 0.1 mm to 120 mm Probe measuring range 10 mm to 20 mmStandard probe LD A14-10-2, diamond 2 µm, 90 °Resolution in z 2 nmHorizontal measuring axis Glass scaleMeasuring point distance in x 0.05 µm to 1 µmContacting force 0.5 mN to 30 mN, adjustable via software Measuring speed 0.1 mm/s to 2.0 mm/s in 0.1 mm steps
for contour masurements,0.1 mm/s and 0.5 mm/s for roughness measurements
Return speed and positioning speed in x direction up to 4 mm/s
Straightness deviation with correction 0.12 µm/20 mm0.25 µm/60 mm0.4 µm/120 mm
Angle measurement U95 < 0.5'Radius measurement ± 0.01% of nominal value at R12.5 1
Distance measurement ± (1+L/100) µm
General DataOperating temperature 15 °C up to 30 °CRecommended working temperature 20 °C ± 2 KStorage/transport temperature 0 °C up to 40 °C (in transport package)
1 Measured on a calibration standard within an angle segment of ± 35° relative to the horizontal axis.
For different applications probes can be changed quickly.Probe arm mounting is realized by means of magnetic clickpoint. This type of construction permits high degree ofprobe protection by unintended mechanical effects.
For the most frequent applications, probe arm LD A14-10-2 is included in the scope of the MarSurf LD 120 Set. Thefan form of the probe ensures a high degree of stiffnessand leads to high precision and reliability.
For different measuring tasks, various probe and tip geo-metries are available. According to the measuring task, youcan use diamond tips with 2 µm radius for roughness meas-urements, carbide tips with 25 µm radius for contour measurements as well as ruby balls. By means of an ade-quate selection of the stylus tip, short-wave and long-waveprofile components can be recorded and evaluated in onemeasuring run.
Functional Principle
MarSurf LD 120 Product Description
Measuring station componentsMarSurf LD 120 Drive Unit
MarSurf LD 120 drive unit facilitates traversing lengthsfrom 0.1 mm up to 120 mm with drive speeds between0.1 and 2 mm/s. Due to a glass scale in x-direction, auto-matic positioning is possible.
Functional principle of the probe system
The probe principle is based on a rocker system with astylus tip on one and a diffraction grid on the other sideof the rotary axis.
The light of a diode is focused on the diffraction gridbringing out an interference image. Moving up anddown the diffraction grid leads to changes of the inter-ference image on the receptor side which is registered byphoto diodes. From this image, an electronic evalutationcircuit determines the position of the grid and conse-quently the stylus tip.
A moving coil motor is used for probe positioning in z- direction and tip force control.
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Scanning Grid
Photo Diode
Center of Rotation
Stylus tip Evaluation
Diode with Optical System
9
In Process MarSurf LD 120
Measuring with MarSurf LD 120
Processing machine
The simple, faster, more dependable way
From testpiece to measurement and final result:
Measurement
Result
Testpiece
High-precision Contour Measurement
MarSurf LD 120 In Process
MarSurf LD 120 is a highly precise contour measuringinstrument, that means radii, angles, flatness or dis-tances can be exactly measured down to the sub-micrometer range. The basis for this is due to the lasercalibrated axes with a resolution of up to 2 nm.
Highly precisely manufactured balls allow the residualerror referring to the radius measurement to beappar-ent.
The decisive factor is a high repeatability of the meas-uring results as reached with MarSurf LD 120.
Example: Acceptance measurements on ball
Example: Acceptance measurement of flatness on a highly flat opti-cal glass plate
Normal/ Standard
Bez./ Description Kalibrierkugel/Calibration sphereNummer/ Number B 1883Istwert/ Actual value. 12,49645
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Example: Repeatability measurements on ball
1 6 11 16 21
12,4964 12,4964 12,4964 12,4964 12,496412,4965 12,4965 12,4965 12,4964 12,496412,4965 12,4964 12,4964 12,4965 12,496412,4964 12,4964 12,4965 12,4964 12,496412,4965 12,4965 12,4965 12,4963 12,4964
The high accuracy at high resolution allows also forthe measurement of even the smallest structures suchas microstructures on a silicon wafer:
High-precision Contour Measurement
In Process MarSurf LD 120
Enhanced Accuracy with MarSurf XC 20 due toMorphological Filtering
During a contour measurement, the probe records themovement of the tracing element's center. In reality, thecontact point of the tracing element and the sur-face isto be determined in order to enable high-precision con-tour measurements. This contact point can be calculatedfrom the radius and the known form deviations of thetracing element. Normally, a numerical differentiationmethod is used for this calculation. For sharp edges orvery small radii, however, this method often producesmeasuring points which do not correspond to the actualprofile (see Figure).
For the very first time, the MarSurf XC 20 software usesa method based on morphological filtering for recon-structing contour profiles. This enables correct reproduc-tion of the profile even for very sharp edges
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Z
zn
-nz
nx
R
x
V meas (X)
Original profileProfile of mean pointsNumerical differentiationmethodMorphological filtering
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Roughness Measurement
MarSurf LD 120 In Process
Roughness measurements with large measuringrange
A further field of application is roughness measurement.For this purpose, the probe system features a resolutionof 2 nm. In addition, there is the possibility to activatecontacting forces lower than 1 mN, which is purposefulwhen using 2 µm standard stylus tips. Combined withthe large measuring range of 10 mm, you can determi-ne the roughness of surfaces in contours, such as ballbearing paths, for example. Using the MarSurf XC 20evaluation software, any area in your measured contourcan be selected for roughness evaluation.
Measuring force
The MarSurf LD 120 allows the adjustment of meas-uring forces which can be held over the entire meas-uring range.
Due to practically frictionless support and precisely con-trollable traverse, contacting forces of down to 0.5 mN (standard for stylus instruments 0.7 mN) arepossible. In this way, optimum contacting forces can beapplied for all combinations of styli and surfaces.
Measuring point density
The minimum measuring point spacing is 0.25 µm - ascommon in roughness measurement - which means120,000 data points over a traversing length of 30 mm.
Roughness and Contour Measurement
In Process MarSurf LD 120
MarSurf LD 120 makes roughness and contour meas-urement possible with a single stroke!
The same measuring task can be solved under theseconditions as follows:
1. Fixing and positioning of the testpiece: In this case slanted, to reach the measuring locationZenith searchContacting the starting pointSetting the measuring conditions
2. Start and run of the measurement followed by automatic evaluation
Time is money! This is also true for the pre-cision metrology with MarSurf LD 120!
In the daily life of dimensional metrology, you needroughness and contour measurements in order to checkyour testpiece. When working sequentially - meaning first the rough-ness and then the contour measurement - a testpiece ismeasured by a proficient operator in the followingsteps:
Roughness:1. Selection of the roughness measuring station
configuration
2. Fixing and positioning of the testpiece: zenith search / setting the measuring conditions
3. Determining the starting point of the measurement: Always trial measurements in the front limit switch position to avoid exceeding the measuring range
4. Start and run of the measurement
Contour:1. Move stylus out of the testpiece range after
roughness measurement. Selection of the contour measuring station configuration. Reference point run of the drive unit
2. Fixing and positioning of the testpiece: zenith search / contacting the starting point. Setting the measuring conditions. Start and run ofthe measurement
3. Evaluation of the measurement: radius dimensioning
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ConclusionFor a roughness and contour measurement, MarSurfLD 120 saves you 75% of your time and money! Youhave capacities for tasks of higher value and yourcosts are reduced at the same time!
Your quantum leaps are our incentive - just contact us!
Apart from the roughness evaluation in your contour,you can of course also perform your contour evalua-tion with the LD 120, so that with only one measure-ment, you receive all desired results represented in thesame format.
Conventional
Calibration and Probe Compensation
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An optimized calibration and adjustment system ena-bles your measuring tasks to be performed within theindicated accuracy range. For MarSurf LD 120 this isrealized by a strictly separated acquisition of calibra-tion data for all single axes and all geometry parame-ters of the probes.
Main steps are:
1. LD 120 factory calibrationAt Mahr factory calibration data are determined for the complete system, except for probe- dependent parameters. This means that drive and probe axes are calibrated by a laser interferome-ter under climatically stable conditions. Furthermore, the flatness deviation of the x axis guiding - although low due to existing high-pre-cision system - is determined and compensated, as well.
2. Calibration of weighing dataPermanently complying the user-selected measur-ing force ensures essential advantages of cine-matic stableness between stylus tip and testpiece. For each probe weighing tables are calculated in an automatic measuring process.
3. Determination of probe geometryThe probe system is based on an ex factory laser-calibrated angle measurement system. For determination of the stylus tip position in relation to the center of rotation of angle measuring system and x axis, the geometry data of the probe are required, meaning that this data is calibrated for each MarSurf LD 120 probe.
The principleIn an automatic process, a measurement over a roundnessstandard is carried out. Afterwards, the geometry param-eters are adjusted such that the radius evaluation is thesame on both sides of the maximum. The absolute radiusof the standard is irrelevant for this type of procedure.The correct radius evaluation is assured by the traceabilityto the laser-calibrated x axis.
Additionally, form deviations and tip radius can be deter-mined using the roundness standard.
The acquired geometry data are saved individually foreach probe, so that after changing a probe or restartingthe complete system measuring can go on without further calibration.
MarSurf LD 120 In Process
Weighing procedure
Probe Arm Exchange
Im Prozess MarSurf LD 120
Probe arm change without new calibration
If the probe arm needs to be changed due to specialgeometrical demands or certain contour applications,this is easily done within seconds. The probe arms aremagnetically connected, so that they can easily be takenoff and attached. On their support, they automaticallyslide into the correct position. Since the calibration datais saved for each arm, you can continue to measurepractically at once without having to calibrate.
The magnetic attachment also protects the probe sup-port in case of collisions.
Mahr, with many years of experience in design and pro-duction of probe systems, naturally offers differentprobe arm variants for the MarSurf LD 120 just like forall the other surface and contour measuring systems.The standard probe arms have been optimized for stiff-ness by means of FEM simulations. They are availablewith diamond tips for roughness measurements but alsowith the usual probe balls and probe edges for specialcontour applications. Special solutions ac-cording tocustomer's needs are also possible.
Magnetic connection
Probe arms
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Automatic Two-dimensional Positioning
MarSurf LD 120 In Process
The traverse axis as well as the probe are both equippedwith a high-precision drive necessary for adjustment ofthe position speeds and probe force which furthermoreenables arbitrary two-dimensional positioning. The driveunit is operated via corresponding "positioning" buttonsin the "measuring station view" or by entering targetpositions.
Positioning speeds are freely selectable which is impor-tant to reach hardly accessible measuring points withcorresponding precaution.
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Segmented Measurement
In Process MarSurf LD 120
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Application:
• Obstructed areas, sections which cannot be measured due to potential tip damage.
• Radii with bores
Example: Detail measurement with low measuring speed andhigh positioning speed
Two-dimensional positioning and segmented measurement
Two-dimensional positioning in conjunction with"Segmented Measurement" allows the measuring pro-cess to be divided into different sections. The profile issegmented into measuring and positioning ranges. Foreach segment, different measuring parameters can bedefined.
Segment table with settings for two segments. Roughness evalution
Time saving due to segmented measurement:
Measuring of details with low measuring speed (0.1 to 0.5 mm/s) + quick positioning (4 mm/s) for sec-tions which are NOT measured.
Example: Radii with bore
Example: Measuring object with obstacle (partly not measurable) Example: R1, R2 = 1 mm, a = 53 mm
Without the option of segmented measurement:Traversing length = 56 mm / 0.2 mm/s = 280 s
With segmented measurement:Traversing length 1 = 3 mm/0.2 mm/s = 15 s
+ Positioning distance = 50 mm/4 mm/s = 12.5 s+ Traversing length 2 = 3 mm/0.2 mm/s = 15 s
= 42.5 sTime Saving = 240 s
= 85%^
Automation
MarSurf LD 120 In Process
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Two-dimensional positioning plus MarSurfXC 20 = Automation
MarSurf XC 20 enables saving and loading of tasksdecribing a measuring procedure:
1. Measuring tasks including automatic position-ing (only possible due to two-dimensional pos. facility of MarSurf LD 120), optional with auto-matic operation of measuring stand ST 750 CNC)
2. Evaluation
3. Individual forms
4. Automatic procedures for printing and saving purposes
These four items can be combined completely or partlyto compose a measuring task.
Result:= Time saving and safe operation (protected processand comparable evaluations)
An automatic measuring procedure in practice:
4. Measuring record printed, data saved
3. Starting of measuring program
1. Clamping of testpiece
2. Zenith adjustment
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The simple, reliable gateway to the XC 20
Password-protected user loginYou can define which operator is to have which rightson the instrument, e.g.
• Administrator• Only start programs via function keys
Application Software MarSurf XC 20 MarSurf LD 120
Application Software MarSurf XC 20
The easy way to fast measurementThe start• All axes of measuring stand, drive unit and pick-up
can be controlled directly• Functions such as start to end point measurement
(with operator prompting via text tips) enable the user to perform correct measurements in interactive mode with practically no setup time
Entering into the XC 20 WorldFor measuring and evaluating contours, the newMarSurf XC 20 software is available. Decades of expe-rience in contour and roughness measurement - fromwhich resulted already the well-known predecessing"Perthometer Concept" system - and numerous wishesand hints from our customers have shaped this newsystem generation. Just in combination with theMarSurf LD 120 drive unit, the new software can fullydemonstrate its strong points: enhanced accuracy dueto morphological filtering, reduced measuring point spa-cing, improved calibration and evaluation routines aswell as versatile, complex evaluation possibilities whichoptimally combine contour and roughness measure-ment.
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MarSurf LD 120 Application Software MarSurf XC 20
The Evaluation
Logically structured icons speak all languages andneed no translation!
Use of the Quick & Easy function:Setting up and saving an automatic program run withoutprogramming knowledge, "learning by doing".
Plausibility check for automatic programruns
Operating sequence list with programoptimization• Jumps, loops • Interactive user intervention in the case of
automatic evaluation
Additionally, formerPerthometerConcept users canselect display of thefamiliar PerthometerConcept icons!
Category icons
Application MarSurf XC 20 MarSurf LD 120
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Sections• Details can be shown separately
By creating sections, individual results groups canbe made error-free.
Angles
Radii
Examples:
The Evaluation
Distances
22
MarSurf LD 120 Application Software MarSurf XC 20
The Evaluation
Nominal / actual comparison
Up to five evaluation ranges can be selectedIn many cases, profile comparisons are also performedwith testpieces that are subject to heavy wear. The abili-ty to select certain evaluation ranges offers the distinctadvantage of being able to determine the fit-in rangesthat are not subject to wear or deformation. This canbe useful for optimum profile matching.
Methods for performing fit-in
• Minimum line form deviation• Least squares (Best Fit)
Generating the nominal profile
• Using master profile measurement, • DXF import or • Entering nominal geometries
Tolerances zones can be selected in any areas in thenominal profile (XC 20 only)
Nominal profile with tolerances zones
Nominal profile with tolerances zones fitted in
Example: Fit-in by selecting ranges
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Application Software MarSurf XC 20 MarSurf LD 120
The Evaluation
Graphic display of the results(enlarged deviation display)
Bar chart display
Zoom, maximum 25 steps
• Display with non-proportional zoom• Zoom area can be moved in the overview field• Zoom area can be anchored to the profile
Contour displayWith roughness evaluation
Associative elementsChanging reference contours immediately results in achange in the measured value, e.g. increasing or reduc-ing a radius segment using the mouse directly changesthe dependent variables such as radius, line form devia-tion, distances to the coordinate system, etc.
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MarSurf LD 120 Application Software MarSurf XC 20
MarSurf XC 20. Online Help
When performing a programmed, automatic measuringrun, it is important for subsequent measurements thatthe evaluation created earlier is adapted accordingly.MarSurf XC 20 guarantees correct evaluation even if thetestpiece is moved in x- and z-direction and for inclina-tions in x/z of up to 15°.
Do you have any questions? If so, click
• Detailed operating instructions in the system, complete with sample applications
• Help mode (context-sensitive help)
Example:Measuring station view Help clickHelp text for measuring station view is displayed
Info boxWhen selecting an evaluation function, a short tip auto-matically appears for the action in question.
• You save time, since you significantly reduce your setup time.
• The time required for the evaluation drops to virtually zero.
• You can be sure that your results will be correct.
• Guaranteed reproducibility, no erroneous results.
Automatic Coordinate System
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Many Reasons for the new Generation of Surface Measurement Devices
Application Software MarSurf XC 20 MarSurf LD 120
You are assured fast measuring results and save valuable time that you can devote to other tasks
• Self-explanatory user interface supported by graphic elements
• Easy programming in Teach-in mode, "learning by doing"
• Permanent online help in every programming step• Fast measurement thanks to start/end point function
You can be sure that your measuring results will be correct
• Excellent calibration procedure thanks to many years of experience, i.e. including geometry calibration, measuring force calibration, compensation of the deflection, etc.
• Stability and rigidity of the pick-ups• The drive units are very smooth in operation and are
highly stable and accurate• The MarSurf ST 500 / ST 750 measuring stand
ensures optimum measuring conditions• Plausibility tips ensure that the correct measuring
strategy with the specified framework conditions is maintained.
• User access rights using password protection rules out the possibility of incorrect operator input.
When you use MarSurf XC 20, you're among the best, since you're using the best possible Mahr contour metrology
• Measurement using the "twin stylus" for the upper and lower contours
• Creation of profile sections, evaluation of different parameters per section
• Associative elements. Immediate changes to the parameters as a function of reference elements when changes are made
• Rapid measurement since setup times are avoided through start/stop function
• Automatic measurement in Q & E (Quick and Easy) mode. Rapid, simple programming in Teach-in mode
• When conducting series of measurements or repeat measurements, the coordinate system required for evaluation is created automatically at the correct position, even if the testpiece is moved in x and z directions and the inclination of X to Z is tilted by up to 15°.
• XC 20 measuring stations can be upgraded to the XCR 20 version, i.e. they can also be used as combined measuring stations for contour and roughness
• All Perthometer Concept users can import measure-ments of nominal contours and profiles in MarSurf XC 20
• The user interface layout can also be changed over to the Perthometer Concept icons
Practical Examples
MarSurf LD 120 Practice
Simultaneous measuring and evaluation of contour androughness in tracks of ball bearings.
Geometric characteristics and friction performance havealways been the most decisive quality attributes in thebearing industry. The contour evaluation of the trackincluding roughness and gothic profiles predestine use ofMarSurf LD 120 in that case.
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Compact measuring station
Compact measuring station with bearing
Evaluation of a bearing
Practical Examples
Practice MarSurf LD 120
Precision dual pistons and their micro teeth structurecan be extremely critical due to potential leakage risks.MarSurf LD 120 samples named structure at a very highdegree of accuracy and provides the basis for a clear andunique testpiece evaluation.
Costs are reduced due to the the reduced measuringtime, which already includes roughness evaluation.
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Measuring station for a dual piston
Detail view of a dual piston
Evaluation of a dual piston
Practical Examples
MarSurf LD 120 Practice
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Synchronizing rings:Synchronizing rings for control gears make highdemands on dimensional metrology. The tracing of theroof slant's contour including roughness parameterssustainably defines functionality with regards to gearchanging forces, improvement of wear behaviour andreduced noise level. The synergies of MarSurf LD 120 -high accuracy contour and surface texture measure-ment - are to the best advantage of this system.
Valve tappets:Longevity and lowest possible fuel consumption arenowadays taken for granted in the field of motor engi-neering, but still represent a highly technical challenge. Toensure the adequate parameters from quality's point ofview, the simultaneous acquisition of contour and surfaceis required: an excellent precondition for MarSurf LD 120.
Evaluation of a synchronizing ringMeasurement on synchronizing ring
Evaluation of a valve tappetMeasurement on a valve tappet
Practical Examples
Practice MarSurf LD 120
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Measurement on a pin roller
Measurement on a halogen lamp reflector
Measurement on a ball pivot
Practical Examples
MarSurf LD 120 Practice
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Artificial hip socket, ceramics Evaluation of an artificial hip socket
Artificial hip ball, ceramics Evaluation of an artificial hip ball
Artificial hip joints must bear approximately 20 millionload changes under double or triple weight. The wearbetween ball and socket of around 1 µm per year givesinformation about the level of accuracy and quality whichmust be defined for contour and roughness of bothparts.
Practical Examples
Practice MarSurf LD 120
31
Artificial hip balls, bears and eye lenses:There are three main aspects for implants in medical tech-nology: good compatibility for the human body, longevityand highest precision. To ensure these material character-istics MarSurf LD 120 enables high-precision measurementin the nanometer range so that everything really fits: fora lifetime!
Evaluation of an artificial hip joint implant
Measurement on an optical glass
Eye lense implant
Evaluation of an optical glass
Artificial hip joint implant
Scope of Delivery
MarSurf LD 120 Annex
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MarSurf LD 120 Compact Measuring Station MarSurf LD 120 drive unit with integrated tracingsystem
• Traversing lengths: up to 120 mm• Vertical measuring range: 10 mm• Resolution in z-direction: 2 nm• Probe LD A14-10-2, with diamond tip 2 µm, 90°• Operating Manual
MarSurf LD 120 with XC 20 evaluation computer • Measuring and evaluation license MarSurf XC 20• Integrated Mahr data acquisition board (PCI)• Operating Manual and Online Help• Operating system licence for Microsoft Windows,
incl. operating manual and installation CD
MarSurf LD 120 roundness standard• High-precision measuring sphere to check the meas-
uring spindle accuracy, diameter approx. 50 mm• Roundness deviation 0.04 µm with Mahr certificate
MarSurf LD 120 compact measuring stand• Measuring stand to fix drive unit LD 120 • Base plate (25 mm drilling template and M6 thread)
included
MarSurf LD 120 XY-table• Testpiece positioning table, appropriate for
mounting fixing elements with M6 thread• Positioning range in z: 12.5 mm• Positioning range in y: 25 mm• Angle adjustment range in xy layer: ± 2.5°• Inclination adjustment in y or x layer: -4° up to +7°
MarSurf LD 120 granite plate 650 mm x 450 mm• For mounting the MarSurf LD 120 compact
measuring stand• Incl. pneumatic damping elements, 4 items
15" TFT flat screen monitor
Printer • Incl. connection cable printer to computer
Scope of Delivery
Annex MarSurf LD 120
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MarSurf LD 120 with Measuring Stand MarSurf LD 120 drive unit with integrated tracingsystem
• Traversing lengths: up to 120 mm• Vertical measuring range: 10 mm• Resolution in z-direction: 2 nm• Probe LD A14-10-2, with diamond tip 2 µm, 90°• Operating Manual
MarSurf LD 120 with XC 20 evaluation computer • Measuring and evaluation license MarSurf XC 20• Integrated Mahr data acquisition board (PCI)• Operating Manual and Online Help• Operating system licence for Microsoft
Windows, incl. operating manual and installation CD
MarSurf LD 120 roundness standard• High-precision measuring sphere to check the meas-
uring spindle accuracy, diameter approx. 50 mm• Roundness deviation 0.04 µm with Mahr certificate
MarSurf ST 500 measuring stand• Measuring stand to fix MarSurf LD 120 drive unit,
with granite platte 700 mm x 550 mm • Including pneumatic damping elements, 4 items
MarSurf LD 120 XY-table• Testpiece positioning table
15" TFT flat screen monitor
Printer • Incl. connection cable printer to computer
Required with each supply:
Commissioning of MarSurf LD 1201.5 working days on site by Mahr ServiceCenter, including:
• Mounting and connecting of delivered measuring station components
• Function test of system using probe LD A14-10-2 included in the MarSurf LD 120 set
• System configuration by means of MarSurf LD 120 measuring standard including inspection sheet (calibration certificates can be ordered separately)
• Short introduction (2 hours) to basic operation of measuring system MarSurf LD 120; assumed existing MS Windows knowledge
Required with first supply:
Basic training for MarSurf LD 1201.5 working days by Mahr ServiceCenter
• Introduction to MarSurf LD 120 operation and handling
• Roughness measurements with MarSurf LD 120 and standard probe LD A14-10-2
• Evaluation of roughness measurements and creation of forms and records
• Creation of task folders and measurement tasks
• Contour measurements with MarSurf LD 120 and standard probe LD A14-10-2
• Manual evaluation of contour measurement
• Creation of an automatic contour evaluation program on the basis of a standard example
• File saving and documentation of measuring results
• Checking and calibration of measuring station using standard probe LD A14-10-2
Services
MarSurf LD 120 Annex
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Optional Services (upon request, dending on complexity and expenditure of time)
Application training I for MarSurf LD 120 (at Mahr or at the customer’s premises) (basic training required)
It is recommended to send corresponding testpiece(s) and description of measuring tasks to Mahr Göttingen at least10 working days in advance.
• Testing facilities of measuring station and calibration of probes
• Roughness measurement with LD 120 on customer’s testpieces including explanations concerning evaluation facilities
• Contour measurement with LD 120 on customer’s testpieces including explanations concerning evaluation facilities
• Introduction to creation of measuring programs for automatically solving customer-specific measuring tasks
• Treatment of customer’s requirements and tasks
Application training II for MarSurf LD 120 (Basic training required)Contents, duration and location as well as functionality of measuring programs are coordinated with the customerand charged accordingly. The below mentioned items shall be considered as an example for a training guideline.
• Roughness measurements with MarSurf LD 120 on customer-specific testpieces including explanations concerning evaluation facilities
• Evaluation facilities by means of program package "profile analysis" (when ordering)
• Contour measurement with MarSurf LD 120 on customer’s testpieces including explanations on evaluation facilities
• Multiple measurements on contour
• Introduction in creation of measuring programs
• Creation of measuring programs for customer-specific measuring tasks
• Explanations of issued measuring programs
• Treatment of customer-specific requirements and tasks
• Calibration of further probes
Calibration of MarSurf LD 120• with Mahr calibration certificate, traceable to standards
Reproducibility of measuring results• according to separate agreement
Services
Annex MarSurf LD 120
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MarSurf LD 120 Accessories
Probes
MarSurf LD 120 probe LD A14-10-2
included in LD 120 standard kit
stylus tip 2 µm, 90°, L = 10 mm
dimensions acc. to drawing
OT5005-0212.000A04
MarSurf LD 120 probe LD A14-10-2/60°
OT5005-0214.000A04
MarSurf LD 120 probe LD A14-10-500
stylus tip ruby ball R = 500 µm, L = 10 mm
dimensions acc. to drawing
OT5005-0212.000A04
MarSurf LD 120 probe LD B4-10-2/90°
stylus tip 2 µm, 90°, L = 1.0 mm
dimensions acc. to drawing:
OT5005-0311.000A03
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LD C 25-20-500
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