luxtron product flour optic technology fotfiber optic channels temperature range display digital...

Luxtron Product Flour Optic Technology FOT

2

Fluoroptic Thermometers

Key Benefits (Non-metallic)

• EMI Won’t Induce Temperature Errors

• Non Electrically Conductive – Safe in high voltage contact

• Won’t Distort MRI Images

• Chemically Inert – Safe in acids, chemicals, etc.

• Small – As small as 0.25mm (0.01”) in diameter

LumaSense Technologies 3

Where is it used?

• Medical: MRI, RF and Microwave Ablation, Benign Prostatic Hyperplasia (BPH), Brain and Cancer Research

• Intrinsically Safe Market: Defense, Safety,

• Industrial: Analytical Chemistry Microwaves, Electronics Manufacturing

• Food: Microwave food drying (medicinal herbs), Microwave packaging development, Microwave process control

• Research & Development

• Semiconductor: Backside Wafer, Electrostatic Chuck, Chamber Ceiling, “RF-Hot” Components

• Utility: Power Transformers, High-Voltage Equipment


Fluoroptic® Technology (FOT) Overview

• Measurement is Based on a Temperature Sensitive Phosphorescent Sensor Attached to the Probing End of a Fiber Optic Cable

• Electronics Measure the Decay Time of the Fluorescence that is Temperature Dependent

• A Single Optical Fiber Transmits Both the Excitation and the Fluorescence Signal


Time Dependant Measurement:

• Signal is auto-adjusted (AGC) to allowing

the system to remain accurate in the

event:

• Fiber optic coupling losses

• Bending & micro-cracks

• Dirt and scratches

• Phosphor Intensity change

• Method Independent of emissivity

Fluoroptic® Operating Principle

6

Fluoroptic Thermometers – Technology

• Phosphorescent Decay – Curve Shape varies with temperature


Phosphors & Phosphorescence I

A Phosphor is a substance that exhibits „Phosphorescence‟ (sustained glowing) when exposed to light (or particles).

• No P (Phosphorous) in Phosphor

• Transition Metals or Rare Earth Compounds.

• Host carrier (oxides, sulfides…)with activator (Bi, Cu, Cr) to extend lifetime

• Quantum mechanically forbidden transitions:

• Temperature Dependant Properties:

• Decay Time (ms)

• Intensity

• Color

• Charged by Light or Particles

Example Uses of Phosphors


• Many commercially available Phosphors.

• Few choices in the milli-second (10-3) range.

• Inexpensive

• LumaSense uses special YAG:Cr

• First Commercial System

• Special chemical additives

• Particle size is important

• Pastel green in-organic power.

• Stable, no Hysteresis

Phosphors & Phosphorescence II


Light Sent by

Luxtron

Instrument to

Excite Sensor

Light Emitted by

Sensor and

Detected by

Luxtron

Spectra

Thermo Sensitive Phosphorescent Ceramic


Method for Measuring

Fluorescent Decay Time

„Tau‟ (time for 1/e Intensity drop)

Time Dependant Measurement

Intensity is auto-adjusted to allow for:

• Fiber optic coupling losses

• Bending & micro-cracks

• Dirt and scratches

• Phosphor Intensity change I(T)

Fluoroptic® Operating Principle I


Temperature is determined by a lookup table of „Tau‟ verses Temperature.

Initial Calibration

• NIST traceable dry baths.

• Table varies for different probe types

• +/- 2C accuracy across complete range.

In-situ calibration:

• On Instrument calibration routine.

• +/- 0.2 C within 20C of calibration point.

Fluoroptic® Operating Principle II


• Long Term Stability (20+ years in field! WTS)

• Repeatable and Uniform Quantum Properties

• Chemically Inert

• No recalibration after initial calibration

Why is “Phosphor” a good sensor?

Fluoroptic® Technology


Summary: Benefits of the Technology

• Probes– Immune to EMI and RF Interference

– Electrically Non-conductive

– Minimal Heat Conduction

– Minimally Intrusive (As Small As 0.26 mm Total Diameter)

• Stable, Self-calibrating System– Not Dependent on Emissivity

• Measurement Independent of Optical Signal – Time Domain Measurement

• Flexible “Form Factor” allows simple integration.– Single Fiber

Equipment


ProductFiber Optic Channels

Temperature Range

DisplayDigital Output

Analog Output Probes

Available

Ind &

R&D

Luxtron 812 (formerly I652)

2 -25 to 295oC YES (2) RS-232 0-10V DCSTF, STS, STR,

STM (STB)

FOT Lab Kit 4 -100 to 295oC None RS-2320-10V DC

4-20 mA

STF, STS, STR, STM (STB)

Med

BioMed Lab Kit 40 to 120oC

None RS-232 0-10V DC STB

FocalPoint 4 0 to 120oC YES (4) RS-232 No MedFP

Product Line Overview


• 2-Channels

• Includes:

– Instrument

– Universal P/S

– RS-232 Cable

– Manual

Product Details

Luxtron 812 (formerly I652)


FOT Lab KitLaboratory & Industrial R&D

• 4 Channels, no display

• Range: -100 to 330 oC

• Flexible configuration for R&D

• Interface to PC via RS232

• Analog output, 0-10VDC or 4-20mA

• Six standard probe styles (sold separately)

• PC Data Software (sold separately)

Product Details


M3300 Biomedical Lab KitMedical R&D

• 4 Channel, no display

• Range: 0 to 120 oC

• Narrower range around human body enables tighter accuracy in calibrated mode

• USA FDA 510(k) cleared

• Flexible configuration for R&D

• Interface to PC via RS232

• Analog output, 0-10VDC

• Standard probe is non-cytotoxic and bio-inert

• STB Probe sold separately

• Requires FOC-ST extension


Fluoroptic® Medical Products

m3300 Biomed Lab Kit

• 4 channels

• FDA “cleared” medical device

• Does not carry medical CE Mark (yet)

• Standard, minimally invasive probe, 0.5mm diameter

Focal Point

• Designed for RF Ablation

• Medical CE Mark pending

m3300 OEM Module

• Lower cost module for OEMs

• 1 to 4 channels

• Custom probe development

NEW: LUXTRON MicroProbe

• Incredibly **TINY** temperature sensor !!

• 0.25 mm Outer Diameter

• -10 to +120 °C measurement range

• Outer protective layer is black polyester tubing

• 1 m probe standard length



FOT Lab Kit Probes

Probe Description Temp. RangeFOT Lab Kit

ProbeSimilar 700 Series Probe

General Purpose, Chemical Resistant Immersion Probe

-25 to 250 C STM SFW

Fast Response Immersion Probe 0 to 300 C STF SFF

High Temperature Immersion Probe -- N/A SIH

Surface Temperature Probe -25 to 200 C STS SELR

Remote Measurement Kit -25 to 330 C STR SPM

Blank Polished-Tip Probe -25 to 330 STP SSP

Medical Style Probe (for use with Biomed Lab Kit)

0 to 125 C STB SSM


Silica Core & Cladding

Buffer

Reflective Coating

Phosphor Sensing Material

Typical Probe Construction

Typical Industrial Probe

Typical Medical Probe


STF Probe

Description:

An immersion probe with a lower mass tip that allows a faster response time compared to the STM probe. The STF tip has less protection than the STM tip and is therefore less suited to rugged environments.

Application Examples:

• Taped to top surface of a semiconductor wafer during plasma etching process for R&D

• Measuring a small sample which is being RF heated

(SHOW INFO IN PRICE LIST)


STM Probe

Description:

A general purpose probe designed to be inserted into either solid or liquid mediums. The tip is twice encapsulated making it suitable for dirty environments.


• Wood pulp during microwave drying process

• Chemistry solutions during microwave processing


STS Probe

Description:

The STS probe is designed for surface measurements.


• Running CPU package during heat tests

• Live electrical connections in high power PCB assembly


STR Probe Kit

Description:

The STR probe measures objects in a remote (or non-contact) configuration. This is ideal for samples that move/vibrate and for the ultimate response time in surface measurements.


• Semiconductor wafers for R&D.

• Measurements of samples on a rotating turntable in a microwave


Standard Extensions for FOT Lab Kit

DescriptionStandard Lab Kit

ExtensionSimilar 700 Series

Extension

General Purpose Fiber Optic Extension Cable SST SEA

Heavy Duty Fiber optic Extension Cable HST SEC


Medical STB Probe and Extension Cable

Applications

30

Fluoroptic Thermometers – Applications Summary

• Medical RF Ablation Device – R & D, Verification, Validation

• Ferromagnetic Hyperthermia – R & D

• MRI Safety Studies – Implantable Medical Device MRI Compatibility Verification

• Missile Silos – Intrinsically Safe

• Semiconductor Plasma Etch - Immune to RFI & high voltage electrostatic chuck.

• Microwave Food – R & D

• Industrial Process Microwave Ovens

• Microwave Materials Processing – R & D

• Satelites – RF Circuit R & D


Medical Applications

Medical Applications

• Monitoring patient temperature during MRI examinations

• Design validation of implanted medical devices

• Measurement and closed-loop control of tissue temperature during microwave therapy treatment

• Monitoring tissue during RF Ablation procedure

• R&D

Medical Product Details

• LUXTRON compliant with GMP, ISO 9001 and has FDA 510(k) Class II cleared device

• License agreement with Johnson & Johnson

• Over 650 systems installed

• Used in Human Therapies Daily Worldwide


RF Ablation Needs

• Two RF ablation companies (ValleyLab and Boston Scientific) monitor tissue impedance and time to determine success of tumor destruction, but different tumors and tissue have different thermal and electrical properties.

• RITA Medical have shielded thermocouples within their RF ablation needles.

• No current way to measure the edge of the tumor to assure destruction of the entire tumor. Currently, equipment destroys healthy cells to assure all tumor cells are destroyed.

• Monitor the progress of RF ablation and prevent charring of the tissue.

• Similar to implant lead testing in MRI environments, they need to profile the thermal gradients of new RF ablation tools during research.


Luxtron’s Position in RF Ablation Market

Luxtron Message to RF industry

• Luxtron is the gold standard in fiber optic medical temperature sensors (cite and list MRI, ablation, and other medical papers)

• Technology is field proven everyday in medical procedures

• FDA 510 (k) and California DHS certification – we know medical

• Stable company perfecting fiber optic thermometers for over 25 years.

• Accepted by doctors worldwide for accurate, repeatable temperature measurement


RF Ablation Treatments

Current medical conditions treated with RF Ablation

• Non reselectable (cannot be remove by surgery) liver tumors

• Tumors metastasized or spread to bone

• Internal kidney tumors

• Adrenal tumors

• Prostate tumors

• Benign prostatic hyperplasia (prostate enlargement)

• Painful or abnormal neural tissue

• Painful soft tissue or bone masses

* Sources NIH, RITA medical 2004 annual report


Controlling RF Ablation Treatment


• Semiconductor Applications

– Backside wafer temperature in PECVD.

– Electrostatic chuck (ESC) temperature in Plasma Etch.

– Shower head in Plasma Etch.

– Chamber ceiling temperature in CVD processes

– Wafer temperature in Asher tools

– R&D

• Semiconductor Installed Base

– 1000s chambers cathode plate temperature

– Now integrated into 2 of 3 Top Plasma Etch OEM‟s chambers

– Every major OEM using FOT for R&D and tool/process

characterization

Semiconductor Applications


Solution Requirements:

Modular

Electrically Non-conductive

Field Assembly / Disassembly

Robust for Field Use

Heat Transfer Considerations

Challenge: In-situ Measurement and Control of

Electrostatic Chuck (ESC) Temperature

AccuDisc™ System


Wafer

Electrostatic Chuck

Remote

Phosphor

Optics

Sensor

Fiber Optic

Extension

Small Threaded

Disc Coated

With Phosphor

Optics / Electronics

Luxtron FOT Instrument

AccuDisc™ System


Energy Market Applications

Utility Applications:

• Power transformers winding “hot spot” temperature and control of cooling equipment

• High voltage switches

• High voltage cables

• R&D

Utility Installed Base:

• Over 500 Systems installed worldwide (most systems with 4-channels each)

• Systems in operation for over 20 years (Diablo Nuclear Plant in California)


Electronics Testing

Solution:

STS Probe with I652 or FOT Lab Kit

Why:

Safe to touch “live” electrical circuits


Microwave Applications

Industrial Applications:

• Analytical chemistry microwaves

• Industrial microwave dryers (next slide)

• Microwave food development and packaging research

• Wood Drying (later slide)

• R&D

Industrial Installed base:

• Over 1000 systems installed in analytical chemistry microwaves used in labs worldwide


Food and Pharmaceutical Processing

Primary Benefits:

• Safe and accurate for microwave processes

• Durable and easy to clean (Teflon coated) and sanitize

• Can be easily integrated into process control equipment (PLCs and temperature controllers) via analog outputs.


Wood and Paper Processing

Primary Benefits:

• Safe and accurate in microwave

• Compatible with chemicals often used in treatment of wood (these chemicals typically degrade metal sensors)

• Easy to integrate into pressurized chambers (process ovens)

luxtron product flour optic technology fotfiber optic channels temperature range display digital...

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