low-temperature polymer deposition in ambient ... · low-temperature polymer deposition in ambient...

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LOW TEMPERATURE POLYMER DEPOSITION IN AMBIENT ENVIRONMENT LOW TEMPERATURE POLYMER DEPOSITION IN AMBIENT ENVIRONMENT LOW -TEMPERATURE POLYMER DEPOSITION IN AMBIENT ENVIRONMENT l ll LOW TEMPERATURE POLYMER DEPOSITION IN AMBIENT ENVIRONMENT Plasma Plasma Plasma Plasma Plasma Plasma CONDITIONS USING DIELECTRIC BARRIER DISCHARGE (DBD) JET Plasma Plasma Plasma CONDITIONS USING DIELECTRIC BARRIER DISCHARGE (DBD) JET E i i E i i E i i CONDITIONS USING DIELECTRIC BARRIER DISCHARGE (DBD) JET Engineering Engineering Engineering Engineering Engineering Engineering WITHAPPLICATIONS IN MEDICAL WOUND TREATMENT & STERILIZATION Engineering & Engineering & Engineering & WITHAPPLICATIONS IN MEDICAL WOUND TREATMENT & STERILIZATION Di ti & Di ti & Di ti & WITHAPPLICATIONS IN MEDICAL WOUND TREATMENT & STERILIZATION Diagnostics Diagnostics Diagnostics WITH APPLICATIONS IN MEDICAL WOUND TREATMENT & STERILIZATION Diagnostics Diagnostics Diagnostics Diagnostics b Diagnostics b Diagnostics b L b L b L b Lab Lab Lab T Ch “Cliff” T iJ Mi Ch Y Ki J dD id St k Lab Lab Lab Tsung-Chan “Cliff” Tsai Jae-Min Cho Young-Ki Jo and David Staack Tsung-Chan Cliff Tsai, Jae-Min Cho, Young-Ki Jo, and David Staack b Abstract Abstract l bi l d ii hi h b d l d i fl i l d di l i b i di h ( )j hi h h b k h h ili i A low-temperature ambient polymer deposition technique has been developed using a floating-electrode dielectric barrier discharge (DBD) jet which has been known to have the sterilization A low temperature ambient polymer deposition technique has been developed using a floating electrode dielectric barrier discharge (DBD) jet, which has been known to have the sterilization ability The purpose of this work is to study the sterilization films deposited by the DBD jet This work generally can be di vided into three categories: (1) analysis of deposited films including ability. The purpose of this work is to study the sterilization films deposited by the DBD jet. This work generally can be di vided into three categories: (1) analysis of deposited films, including deposition rates surface morphologies atomic compositions and chemical bond concentrations; (2) characterization of the physics behind the used DBD jet in the different operation modes deposition rates, surface morphologies, atomic compositions, and chemical bond concentrations; (2) characterization of the physics behind the used DBD jet in the different operation modes with various parameters; (3) applications of the ambient polymer deposition technique in medicine such as sterilization bonefixing wound sealing and tissue repairing with various parameters; (3) applications of the ambient polymer deposition technique in medicine, such as sterilization, bone fixing, wound sealing, and tissue repairing. l i l d A l i fd i d PMMA fil U DBD J t t Floating-electrode DBD Jet Analysis of deposited PMMA films Use DBD Jet to… Floating-electrode DBD Jet Analysis of deposited PMMA films St 0 St ili ti ( t tt f th ti lit t ) Use DBD Jet to… Step 0: Sterilization (current state of the art in literature) PMMA Deposition rate Images of PMMA films SEM and AFM Images of PMMA films RMS roughness Step 1: Polymer Deposition in Ambient Conditions Experimental parameters: PMMA Deposition rate Images of PMMA films SEM and AFM Images of PMMA films RMS roughness Step 1: Polymer Deposition in Ambient Conditions Experimental parameters: (1) Nozzle to substrate distance: 10 mm Transparent films Transparent film Step 2: Sterilization & Polymer Film Deposition on wound model (1) Nozzle-to-substrate distance: 10 mm (2) H li fl t 29 l surfaces (agar) (2) Helium flow rate: 2.9 slm surfaces (agar) (3) Helium flow rate to bubbler: 0.1 slm Step 3: Sterilization & Polymer Deposition on wounds/teeth etc… (4) Frequency: 28.5 kHz 0 444 Step 4: PECVD on people Final Destination!! (4) Frequency: 28.5 kHz (5) Preliminary deposited material: PMMA 0.444 nm Step 4: PECVD on people Final Destination!! (5) Preliminary deposited material: PMMA 10 mm 10 mm (High quality) MMA: C O H PMMA MMA: C 5 O 2 H 8 PMMA Diffuse mode (1 W) Concentrated mode (3.5 W) Sterilization 1 Opaque films Sterilization Features: CH 3 H H CH 3 Opaque film ability in a Features: C C CH 3 H C C 3 1 2 typical DBD (1) Atmospheric pressure C C C O H C C n (2) Low temperature typical DBD jt (3) Stability (Arc-free) C O H C O H 4 1 (4) High flexibility (Any objects can be treated) jet (3) Stability (Arc free) O C O H 2 355 nm (4) High flexibility (Any objects can be treated) Infected wound Treated by a DBD jet Sterilization O O 2 10 mm 10 mm 355 nm (Due to buckling effect) Infected wound Treated by a DBD jet Sterilization CH 3 CH 3 C t td d (7 7 W) C t td d (Due to buckling effect) D iti t t CH 3 Concentrated mode (7.7 W) Concentrated mode with short nozzle to Deposition system setup with short nozzle-to- substrate distance (3 mm) Deposition system setup substrate distance (3 mm) Infected XPS l i lt wound XPS analysis results XPS analysis results Atomic compositions ( C:O ratio and N composition) Concentrations of different bonds Deconvolution of C 1s peak So we can Compared to Transparent film So we can typical PMMA, Transparent film achieve additional bonds PECVD on achieve (C-O-C and C=O) infected are observed in wound our deposited PMMA films!! C 1 Case 1: Different Eth /l hl Sterilized positions Ether/alcohol wound with Opaque film positions protective Opaque film coating Ch t i ti f th DBD j t Characterization of the DBD jet Characterization of the DBD jet T ii C d d Diff d T ii C d d Diff d Transition Concentrated mode Diffuse mode FTIR results( various powers) Summarized results: Transition Concentrated mode Diffuse mode FTIR results( various powers) Concentrations of different bonds Atomic compositions ( C:O ratio and N composition) Summarized results: Concentrations of different bonds Atomic compositions ( C:O ratio and N composition) (a) High deposition rate (22 nm/s) can be achieved ith di h f35W t l 39 °C 3 k with discharge power of 3.5 W at merely 39 C deposition temperature 3 peaks (b) deposition temperature Opaque films with wrinkled microstructures can (b) Opaque films with wrinkled microstructures can be obtained by using the concentrated-mode DBD 1 peak () jet with relatively high-power operation. Concentrated Concentrated Case 2: (c) Similar functional groups are observed among the PMMA d th fil d it d t diff t Different pure PMMA and the films deposited at different powers by using FTIR Transition Transition 2 peaks Different powers (d) powers by using FTIR. Higher power operation leads to higher C:O ratio Transition 2 peaks powers Higher power operation leads to higher C:O ratio in the films, the less retention of ester groups and Diffuse Diffuse 1 peak () the higher concentration of the –CH n groups. Th it f th /l hl i th C 1P H DBD j t i th t td d Diffuse (e) The existence of ether/alcohol groups in the deposited films are also proven by both XPS and Case 1: Pure He DBD jet in the concentrated mode deposited films are also proven by both XPS and FTIR results Anode Cathode FTIR results. Anode Cathode A B C D E F G H I J K L M N O P Q Sterilization & Protective Polymer Films Sterilization & Protective Polymer Films Sterilization & Protective Polymer Films T t t ith diff d T t t ith t td d I fE li d PMMA fil Cathode Anode The idea Treatment with diffuse mode Treatment with concentrated mode Images of E-coli and PMMA films C 2 / j i h diff d ih2 k ( d l ) Treatment time: 60 sec E-coli on silicon PMMA on silicon PMMA/E-coli on silicon E-coli on silicon Case 2: He/MMA DBD jet in the diffuse mode with 2 peaks (Pseudoglow) 1 Pure He (3 slpm) with plasma 2 He (2 9 slpm) + MMA (0 1 slpm) with plasma 1. Pure He (3 slpm) with plasma 2. He (2.9 slpm) + MMA (0.1 slpm) with plasma (a) Prepare Agar (e) Drop bacteria (a) Prepare Agar (f) Drop bacteria A (a) Prepare Agar (e) Drop bacteria on the treated area A (a) Prepare Agar (f) Drop bacteria on the treated area Agar on the treated area Bacteria Agar on the treated area Bacteria Hi h di i (b) Plate bacteria Bacteria (b) Plate bacteria Bacteria Spot 1: Lower power Spot 1: 60 sec treatment and one drop after one day 1 mm 1 mm 1 mm High speed imaging (b) Plate bacteria B t i Agar (b) Plate bacteria B t i Agar Spot 2: Higher power Spot 3: Higher power and one drop after treatment Spot 1: 60 sec treatment, and one drop after one day Spot 2: 60 sec treatment, followed by one drop 1 mm 1 mm 1 mm Bacteria Bacteria Spot 3: Higher power, and one drop after treatment Spot 4: Higher power and one drop after one day Spot 3: 5 min treatment, and one drop after one day Agar (f) Bacteria growth Agar () b i h E li t tdbH DBD BGt tdb H DBD Spot 4: Higher power, and one drop after one day Spot 4: 5 min treatment, followed by one drop E-coli Agar on the treated area Agar (g) No bacteria growth E-coli treated by He DBD B. G. treated by He DBD E-coli control B. G. control 5 m 5 m images Series of two ionization (c) Treat by DBD jet on the treated area (c) Treat by DBD jet on the treated area 5 m 5 m Series of two ionization (l b ll t ) Agar Preliminary test: 60 sec, E-coli only waves (plasma bullets) Plasma Agar Plasma Agar He w/o DBD He+MMA w/o DBD are observed!! Case 3: He/MMA DBD jet in the concentrated mode with 3 peaks (Pseudoglow) A A He w/o DBD He+MMA w/o DBD Case 3: He/MMA DBD jet in the concentrated mode with 3 peaks (Pseudoglow) Agar Agar (d) Bacteria growth (d) Polymer Forming E-coli treated by He+MMA DBD B. G. treated by He+MMA DBD E coli treated by He+MMA DBD B G treated by He+MMA DBD (d) Bacteria growth Bacteria colony (d) Polymer Forming Polymer film E-coli treated by He+MMA DBD B. G. treated by He+MMA DBD Bacteria colony Polymer film Agar Agar Agar Agar He w/ DBD He+MMA w/ DBD (e) Bacteria growth Bacteria colony Agar

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Page 1: LOW-TEMPERATURE POLYMER DEPOSITION IN AMBIENT ... · low-temperature polymer deposition in ambient environmenttemperature polymer deposition in ambient environment pllasma conditions

LOW TEMPERATURE POLYMER DEPOSITION IN AMBIENT ENVIRONMENTLOW TEMPERATURE POLYMER DEPOSITION IN AMBIENT ENVIRONMENTLOW-TEMPERATURE POLYMER DEPOSITION IN AMBIENT ENVIRONMENT lllLOW TEMPERATURE POLYMER DEPOSITION IN AMBIENT ENVIRONMENT PlasmaPlasmaPlasmaPlasmaPlasmaPlasmaCONDITIONS USING DIELECTRIC BARRIER DISCHARGE (DBD) JET PlasmaPlasmaPlasmaCONDITIONS USING DIELECTRIC BARRIER DISCHARGE (DBD) JET E i iE i iE i iCONDITIONS USING DIELECTRIC BARRIER DISCHARGE (DBD) JET EngineeringEngineeringEngineering( ) EngineeringEngineeringEngineeringWITH APPLICATIONS IN MEDICAL WOUND TREATMENT & STERILIZATION

Engineering&

Engineering&

Engineering&WITH APPLICATIONS IN MEDICAL WOUND TREATMENT & STERILIZATION

g gDi ti&g g

Di ti&g g

Di ti&WITH APPLICATIONS IN MEDICAL WOUND TREATMENT & STERILIZATION DiagnosticsDiagnosticsDiagnosticsWITH APPLICATIONS IN MEDICAL WOUND TREATMENT & STERILIZATION DiagnosticsDiagnosticsDiagnosticsDiagnosticsb

Diagnosticsb

Diagnosticsb

gL bgL bgL bLabLabLabT Ch “Cliff” T i J Mi Ch Y Ki J d D id St k LabLabLabTsung-Chan “Cliff” Tsai Jae-Min Cho Young-Ki Jo and David StaackTsung-Chan Cliff Tsai, Jae-Min Cho, Young-Ki Jo, and David Staacksu g C a C sa , Jae C o, ou g Jo, a d a d Staac

bAbstractAbstractl bi l d i i h i h b d l d i fl i l d di l i b i di h ( ) j hi h h b k h h ili iA low-temperature ambient polymer deposition technique has been developed using a floating-electrode dielectric barrier discharge (DBD) jet which has been known to have the sterilizationA low temperature ambient polymer deposition technique has been developed using a floating electrode dielectric barrier discharge (DBD) jet, which has been known to have the sterilization

ability The purpose of this work is to study the sterilization films deposited by the DBD jet This work generally can be divided into three categories: (1) analysis of deposited films includingability. The purpose of this work is to study the sterilization films deposited by the DBD jet. This work generally can be divided into three categories: (1) analysis of deposited films, including deposition rates surface morphologies atomic compositions and chemical bond concentrations; (2) characterization of the physics behind the used DBD jet in the different operation modesdeposition rates, surface morphologies, atomic compositions, and chemical bond concentrations; (2) characterization of the physics behind the used DBD jet in the different operation modes p , p g , p , ; ( ) p y j p

with various parameters; (3) applications of the ambient polymer deposition technique in medicine such as sterilization bone fixing wound sealing and tissue repairingwith various parameters; (3) applications of the ambient polymer deposition technique in medicine, such as sterilization, bone fixing, wound sealing, and tissue repairing.p ; ( ) pp p y p q , , g, g, p g

l i l d A l i f d i d PMMA filU DBD J t tFloating-electrode DBD Jet Analysis of deposited PMMA filmsUse DBD Jet to…Floating-electrode DBD Jet Analysis of deposited PMMA filmsSt 0 St ili ti ( t t t f th t i lit t )

Use DBD Jet to…g y pStep 0: Sterilization (current state of the art in literature)

PMMA Deposition rate Images of PMMA films SEM and AFM Images of PMMA films RMS roughnessStep 1: Polymer Deposition in Ambient ConditionsExperimental parameters:

PMMA Deposition rate Images of PMMA films SEM and AFM Images of PMMA films RMS roughnessStep 1: Polymer Deposition in Ambient ConditionsExperimental parameters: (1) Nozzle to substrate distance: 10 mm

Transparent films Transparent filmStep 2: Sterilization & Polymer Film Deposition on wound model (1) Nozzle-to-substrate distance: 10 mm(2) H li fl t 2 9 l

p y psurfaces (agar) (2) Helium flow rate: 2.9 slmsurfaces (agar)

(3) Helium flow rate to bubbler: 0.1 slmStep 3: Sterilization & Polymer Deposition on wounds/teeth etc… ( )(4) Frequency: 28.5 kHz 0 444

p y pStep 4: PECVD on people Final Destination!! (4) Frequency: 28.5 kHz

(5) Preliminary deposited material: PMMA0.444 nmStep 4: PECVD on people Final Destination!!

(5) Preliminary deposited material: PMMA 10 mm 10 mm (High quality)MMA: C O H PMMA

( g q y)MMA: C5O2H8 PMMA Diffuse mode (1 W) Concentrated mode (3.5 W)

Sterilization 1 Opaque filmsSterilization

Features: CH3H H CH3

p qOpaque filmability in a Features:

C CCH3H

C C3

1 2y

typical DBD(1) Atmospheric pressure C CC OH

C C n(2) Low temperature typical DBD j t

( ) p p(3) Stability (Arc-free)

C OH C OH4 1

( ) p(4) High flexibility (Any objects can be treated) jet(3) Stability (Arc free)

OC OH

2 355 nm(4) High flexibility (Any objects can be treated)

Infected wound Treated by a DBD jet Sterilization OO

210 mm 10 mm 355 nm

(Due to buckling effect)Infected wound Treated by a DBD jet Sterilization

CH3 CH3

C t t d d (7 7 W) C t t d d(Due to buckling effect)

D iti t tCH3 Concentrated mode (7.7 W) Concentrated mode

with short nozzle toDeposition system setup with short nozzle-to-substrate distance (3 mm)Deposition system setup substrate distance (3 mm)

Infectedp y pXPS l i ltwound XPS analysis resultsXPS analysis results

Atomic compositions ( C:O ratio and N composition) Concentrations of different bondsDeconvolution of C 1s peakp ( p ) pSo we can

Compared to Transparent filmSo we can

ptypical PMMA,

Transparent film

achieve yp ,additional bonds PECVD on achieve(C-O-C and C=O) infected are observed in woundour deposited PMMA films!!

C 1Case 1: Different Eth / l h l

Sterilized

positionsEther/alcoholwound with

Opaque filmpositions

protective Opaque filmcoating

Ch t i ti f th DBD j tCharacterization of the DBD jetCharacterization of the DBD jet

T i i C d dDiff d T i i C d dDiff d Transition Concentrated modeDiffuse mode FTIR results( various powers) Summarized results:Transition Concentrated modeDiffuse mode FTIR results( various powers)Concentrations of different bondsAtomic compositions ( C:O ratio and N composition)

Summarized results:Concentrations of different bondsAtomic compositions ( C:O ratio and N composition) (a) High deposition rate (22 nm/s) can be achieved

ith di h f 3 5 W t l 39 °C3 k

with discharge power of 3.5 W at merely 39 C deposition temperature3 peaks

(b)deposition temperatureOpaque films with wrinkled microstructures can(b) Opaque films with wrinkled microstructures can be obtained by using the concentrated-mode DBD

1 peak( )

y gjet with relatively high-power operation.

Concentratedp

Concentrated Case 2: (c) Similar functional groups are observed among the PMMA d th fil d it d t diff t

Differentpure PMMA and the films deposited at different powers by using FTIR

Transition Transition 2 peaks

Different powers (d)

powers by using FTIR.Higher power operation leads to higher C:O ratioTransition Transition 2 peaks powers ( ) Higher power operation leads to higher C:O ratio in the films, the less retention of ester groups and

Diffuse Diffuse 1 peak( )

the higher concentration of the –CHn groups. Th i t f th / l h l i th

C 1 P H DBD j t i th t t d dDiffuse (e) The existence of ether/alcohol groups in the

deposited films are also proven by both XPS andCase 1: Pure He DBD jet in the concentrated mode deposited films are also proven by both XPS and FTIR results

Anode CathodeFTIR results.

Anode Cathode

A B C D E F G H I J K L M N O P Q

Sterilization & Protective Polymer FilmsSterilization & Protective Polymer FilmsSterilization & Protective Polymer FilmsT t t ith diff d T t t ith t t d dI f E li d PMMA filCathode Anode The idea Treatment with diffuse mode Treatment with concentrated modeImages of E-coli and PMMA films

C 2 / j i h diff d i h 2 k ( d l )

e deaTreatment time: 60 secE-coli on silicon PMMA on silicon PMMA/E-coli on siliconE-coli on silicon

Case 2: He/MMA DBD jet in the diffuse mode with 2 peaks (Pseudoglow) 1 Pure He (3 slpm) with plasma 2 He (2 9 slpm) + MMA (0 1 slpm) with plasma/

/ j p ( g ) 1. Pure He (3 slpm) with plasma 2. He (2.9 slpm) + MMA (0.1 slpm) with plasma

(a) Prepare Agar (e) Drop bacteria (a) Prepare Agar (f) Drop bacteriaA

(a) Prepare Agar (e) Drop bacteriaon the treated area A

(a) Prepare Agar (f) Drop bacteriaon the treated areaAgar on the treated area

BacteriaAgar on the treated area

Bacteria

Hi h d i i (b) Plate bacteriaBacteria

(b) Plate bacteriaBacteria

Spot 1: Lower powerSpot 1: 60 sec treatment and one drop after one day1 mm 1 mm 1 mm

High speed imaging (b) Plate bacteriaB t i

Agar (b) Plate bacteriaB t i Agar Spot 2: Higher power

Spot 3: Higher power and one drop after treatment

Spot 1: 60 sec treatment, and one drop after one day Spot 2: 60 sec treatment, followed by one drop

1 mm 1 mm 1 mm

Bacteria Bacteria g Spot 3: Higher power, and one drop after treatmentSpot 4: Higher power and one drop after one day

p , y pSpot 3: 5 min treatment, and one drop after one day

Agar (f) Bacteria growth Agar ( ) b i h E li t t d b H DBD B G t t d b H DBD

Spot 4: Higher power, and one drop after one daySpot 4: 5 min treatment, followed by one dropE-coli Agar ( ) g

on the treated areaAgar (g) No bacteria growth E-coli treated by He DBD B. G. treated by He DBD E-coli control B. G. control

5 m 5 mimages

Series of two ionization (c) Treat by DBD jeton the treated area

(c) Treat by DBD jet on the treated area 5 m 5 mSeries of two ionization ( l b ll t )

( ) y jAgar

( ) y jPreliminary test: 60 sec, E-coli onlywaves (plasma bullets)

PlasmaAgar

Plasma Agar He w/o DBD

y , yHe+MMA w/o DBDare observed!!

Case 3: He/MMA DBD jet in the concentrated mode with 3 peaks (Pseudoglow) A A

g He w/o DBD He+MMA w/o DBD

Case 3: He/MMA DBD jet in the concentrated mode with 3 peaks (Pseudoglow) Agar Agar

(d) Bacteria growth (d) Polymer Forming E-coli treated by He+MMA DBD B. G. treated by He+MMA DBD E coli treated by He+MMA DBD B G treated by He+MMA DBD(d) Bacteria growthBacteria colony

(d) Polymer FormingPolymer film

y y E-coli treated by He+MMA DBD B. G. treated by He+MMA DBDBacteria colony Polymer film

Agar AgarAgar AgarHe w/ DBD He+MMA w/ DBD

(e) Bacteria growth( ) gBacteria colonyy

Agar