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  • 8/12/2019 Lost History of the Transistor

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    +SEMICONDUCTORS

    TRANSISTOR44 IEEE Spectrum | May 2004 | NA

    How, 50 years ago,Texas Instruments and Bell Labs pushed

    electronics into the silicon age BY MICHAEL RIORDAN

    THE LOST HISTORY OF THE

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    he speakers words were at once laconic and electrifying.

    Contrary to what my colleagues have told you about the

    bleak prospects for silicon transistors, he proclaimed in

    his matter-of-fact voice, I happen to have a few of them here

    in my pocket.

    Silicon transistors? Did he say silicon transistors?

    Yesamong the few in the world at that moment. It was

    10 May 1954.

    A long and till-then uneventful session on silicon devices had

    been winding down at the Institute of Radio Engineers (IRE)

    National Conference on Airborne Electronics, in Dayton, Ohio.

    There, a parade of engineers and scientists were lamenting the

    sobering challenges of developing and eventually manufactur-

    ing silicon transistors. Amid the torpor, scattered attendees were

    stifling yawns, glancing at watches, and nodding off. But that was

    before Gordon Teal of Texas Instruments Inc. made his surpris-

    ing announcementand jaws dropped in disbelief.

    Did you say you have silicon transistors in production?

    asked a stupefied listener about 10 rows back in the audience,

    which now began to perk up noticeably.

    Yes, we have three types of silicon transistors in production,

    Teal replied, pulling several out of his pocket to the general amaze-

    ment and envy of the crowd. Then, in a bit of quaint but effec-

    tive razzle-dazzle, he cranked up a record player, which began

    blaring out the swinging sounds of Artie Shaws big-band hit,

    Summit Ridge Drive. Amplified by germanium transistors, the

    music died out instantly as Teal dunked one into a beaker of

    hot oil. But when he repeated his demonstration immersing a sil-

    icon transistor instead, the music played on without faltering.

    As his talk ended, Teal mentioned that copies of his paper on

    the subject, innocuously titled Some Recent Developments in

    Silicon and Germanium Materials and Devices, were available

    near the rear door. A crowd stampeded back to get them, leaving

    the final speaker of the session without an audience. Minutes later,

    a Raytheon engineer was overheard in the lobby shouting into a

    telephone: Theyve got the silicon transistor down in Texas!

    May 2004 | IEEE Spectrum | NA 45

    T

    IN THE BEGINNING: Gordon Teal [left] directed the development of the silicon transistor atTexasInstruments. William Shockley [middle] led the team at Bell Telephone Laboratories thatdeveloped the very first transistor, which was made of germanium. TIs silicon device with itsthree long leads became famous, making the Texas upstart the sole supplier of silicon transistorsfor several years in the 1950s. Morris Tanenbaum [right] at Bell Labs actually made the first

    silicon transistor, but he felt it didnt look attractive from a manufacturing point of view.

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    At the time, the silicon transistor seemed to be one of the first

    major breakthroughs in transistor development not to occur at Bell

    Telephone Laboratories in Murray Hill, N.J., where physicists John

    Bardeen and Walter Brattain had invented the transistor in December

    1947. Their device featured two closely spaced metal points jabbed

    delicately into a germanium surfacehence its name, the point-

    contact transistor. They called one point the emitter and the other

    point the collector, while a third contact, known as the base,

    was applied to the back side of the germanium sliver. A positive elec-

    trical bias on the emitter enhanced the conductivity of the germa-

    nium just beneath the collector point, amplifying the output currentthat flowed to it from the base.

    Bell Labs achieved a long string of firsts

    in the years following that momentous

    invention, which it announced six months

    later at a 30 June 1948 press conference in

    New York City. Among its major advances

    was the so-called junction transistor, first

    conceived the previous January by William

    Shockley, who led the group that included

    Bardeen and Brattain. He figured that much

    better transistor performance and reliabil-

    ity could be realized by eliminating the frag-

    ile point contacts and instead forming theemitter, base, and collector as a single semi-

    conductor sandwich with three different layers [see sidebar,

    Transistors 101: The Junction Transistor]. Current flowing from

    emitter to collector in Shockleys device could be modulated by an

    input signal on the base.

    Teal (then working at Bell Labs) and his fellow physical chemist

    Morgan Sparks successfully fabricated the first working junc-

    tion transistor from a germanium crystal in April 1950. Butpartly

    because the frequency response of early junction transistors was

    inferior to that of point-contact devicesBell Labs held off

    announcing this achievement for over a year, until 4 July 1951. Five

    years later, Bardeen, Brattain, and Shockley shared the Nobel Prize

    for inventing this revolutionary solid-state amplifier.

    Their brilliant pioneering work has overshadowed much of the

    subsequent development years of the transistor, including the

    crucial change from germanium to silicon in the mid-1950s. That

    shift in semiconductor material proved essential to the devices

    glorious future as the fundamental building block of virtually all

    of todays integrated circuits. For germanium, to put it simply, was

    just not up to the task.

    The material does have advantages: it is far less reactive than

    silicon and much easier to work with because of its lower melting

    temperature. And current carrierselectrons and holesflow through

    germanium more rapidly than through silicon, which leads to higher

    frequency response. But germanium also has serious limitations. For

    example, it has a low band gap (0.67 electron volts versus 1.12 eV for

    silicon), the energy required to knock electrons out of atoms into the

    conduction band. So transistors made of this silvery element have

    much higher leakage currents: as the temperature increases, their del-

    icately balanced junctions become literally drowned in a swarming

    sea of free electrons. Above about 75 C, germanium transistors quit

    working altogether. These limitations proved bothersome to radio

    manufacturers and especially the armed services, which needed sta-

    ble, reliable equipment that would perform in extreme conditions.

    Nowhere were these concerns appreciated more than at Bell Labs,

    which led the way into silicon semiconductor research during the

    early 1950s. Working in its chemical physics department with tech-

    nician Ernie Buehler, Teal grew single crystals of silicon and dopedthem with tiny impurities to make solid-state diodes in

    February 1951, publishing the results a year later. He added specific

    impurity atoms to the molten silicon to alter the electrical prop-

    erties of crystals drawn from it. Elements from the fifth column

    of the periodic tablearsenic or antimony, for examplecreate an

    excess of electrons in the tetrahedral crystal structure, yielding

    n-type silicon. Elements from the third column, such as boron or

    gallium, create a deficit of electrons (usually regarded as an excess

    of holes), yielding p-type silicon. By adding first one kind of impu-

    rity and then the other to the molten silicon from which they slowly

    withdrew the crystal, Teal and Buehler formed transition regions

    called pnjunctions between the two types of silicon. Small bars cutacross these junctions act as diodes when

    a potential is applied across them through

    electrical contacts on the two ends.

    Meanwhile, Calvin Fuller was beginning

    experiments in an adjacent lab on diffus-

    ing impurity atoms from hot gases into the

    germanium or silicon surfaceone of the

    major technology milestones on the road to

    the integrated circuit. By December 1953

    Fuller was so successful that Shockley

    started building a new research team to

    attempt to fabricate silicon transistors using

    the technique. And early in 1954, Fuller andGerald Pearson formed pnjunctions by dif-

    fusing a thin layer of boron atoms into a wafer of n-type silicon, mak-

    ing a hole-rich p-layer on its surface. These large-area diodes gen-

    erated substantial current when sunlight fell on them. On 25 April,

    Bell Labs trumpeted this achievement as the solar battery, the

    first photovoltaic cell operating at efficiencies near 10 percent.

    + + +

    By then TI had made its first silicon transistorunder Teals

    general direction. Back at Bell Labs, he had become homesick for his

    native Texas, where he had grown up a devout Baptist in South Dallas

    and pursued his undergraduate studies in mathematics and chem-

    istry at Baylor University, in Waco. Restless in Murray Hill, N.J., and

    looking for more responsibility, Teal responded to an ad in The

    New York Times for a research director at TI. He met with TI vice

    president Pat Haggerty, who offered him the position. He began there

    on 1 January 1953, bringing with him his vast expertise in growing

    and doping semiconductor crystals.

    Under Haggertys leadership, TI was moving aggressively into

    military electronics, then burgeoning with the Cold War in full

    swing. The Dallas company had been founded during the 1930s as

    Geophysical Services Inc., developing and producing reflection

    seismographs for the oil industry. During World War II, it snagged

    a U.S. Navy contract to supply airborne submarine-detection

    equipment; afterward it continued to expand its activities in mil-

    itary electronics, reorganizing itself as Texas Instruments Inc. in

    1951. By the time Teal arrived, the firm had almost 1800 employ-

    ees and was generating about US $25 million in annual sales.

    The company was also beginning to manufacture what were called

    grown-junction germanium transistors under the direction of engi-

    neer Mark Shepherd. He had attended a 1951 Bell Labs symposium on

    transistor technology with Haggerty, where he listened to a Teal work-

    shop on growing semiconductor crystals. In early 1952, after much

    wheedling and cajoling by Haggerty, TI purchased a patent license

    to produce transistors from Western Electric Co., AT&Ts manu-

    facturing arm, for $25 000. By the end of that year, it was already man-

    ufacturing and selling them under Shepherds leadership.Early the next year, Teal was back in Dallas organizing TIs

    Theyve gotthe silicontransistor

    down in Texas!

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    To understand how a transistor works, first consider the lowlydiode. It is a simple union of the two most fundamental kinds ofsemiconductor, known as n-type andp-type. Both conductcurrent, but the n-type does it with electrons, while thep-typedepends on electron deficiencies, better known as holes.Joining these two types of semiconductors forms what isknown as apnjunction at their boundary. This is the core of a

    semiconductor diode, which conducts current in one direction.Connect a batterys positive terminal to the n-type material

    [figure A, top] and electrons are attracted to that terminal, whileholes in thep-type material move toward the negative terminal. Inother words, charge carriers stream away from the junction,expanding a barren volume, aptly called the depletion region. Thediode is said to be reverse-biased, and hardly any current flows.

    Now reverse the battery connections [figure A, bottom].Electrons in the n-type material move toward the junction and areconstantly replenished by the battery. Meanwhile, holes in the

    p-type material stream toward the junction, repelled by the posi-tive battery terminal. The depletion region shrinks tremendouslyas holes and electrons combine at the junction, neutralizing one

    another, as more stream in on either side from the battery. Thediode is said to be forward-biased; current flows easily. Thus, adiode can control the direction of current, but not how large it is.

    A transistor, on the other hand, can control how much currentgoes through it and also act as an amplifier. The simplest transis-tor has three parts: an emitter, a base, and a collector. Think ofthe transistor as a sandwich of twopnjunctions back to back[figure B] in either npnorpnporder; they operate similarly.

    In an npn transistor, for example, the n-type emitter hasmany extra electrons, the relatively thinp-type base has a smallnumber of holes, and the n-type collector has a moderate num-ber of electrons. (Junction transistors are also known as bipolardevices because, in the emitter, holes and electrons flow inopposite directions.) A transistor amplifier takes a small, varyingvoltagean input signalbetween the base and the emitter, anduses it to control a larger current flowing from the emitter to thecollector. Thats the output. The key agents in this amplificationare the depletion regions. With twopnjunctions in the device,there are two depletion regions: one between the emitter and thebase, the other between the base and the collector.

    First, the emitter-base diode is forward-biased by a voltagesource [left in figure B]. Electrons flow from the emitter into thebase. The base-collector diode, on the other hand, is reverse-biased, so that holes will not flow into the base, which wouldintercept any electrons coming across from the emitter andtherefore block current from flowing through the device.

    With this setup, the current through the transistor, from emit-ter to collector, is controlled by the depletion region around theemitter-base junction. When it is thick, the current is choked off;when it is thin, lots of current flows through the device. But holdonwhen it is thin, and electrons shoot across the emitter-base

    junction, arent they blocked by the fat depletion region aroundthe base-collector junction? Nothe base is narrow, so themomentum of the electrons pouring in from the emitter bringsthem close to that junction. From there, the positive voltage at the

    junction then sweeps most of the electrons into the collector.Only a few are lost in the base as they move into the vacant holes.

    The transistor is designed so that the flow of electrons from

    emitter to collector is very sensitive to the current into the base.This is done by making the base very thin (so electrons dont

    have far to go before reaching the collector) and using low dop-ing (electrons cannot easily find vacant holes to fill). The voltageacross the base-emitter junction provides the electric field thatdrives electrons from the base into the collector.

    With the emitter-base junction forward-biased, a varying volt-age put on top of itan input signalvaries the depletion region,which in turn varies a relatively large current flowing through the

    device. Add a load resistor in the collector circuit, and that smallvarying input produces a much larger varying collector voltage:the transistor amplifies the signal at the base. Depending on thecircuit, the result will be current, voltage, or power amplification.

    Although bipolar junction transistors have been surpassedfor many applications by various forms of field-effect transistors,bipolars remain popular for applications involving high-frequency signals. Theyre found in countless modern electronicdevices, including broadband Internet modems, set-topboxes, DVD players, and CD-ROMs. Alfred Rosenblatt

    TRANSISTORS 101: THE JUNCTION TRANSISTOR

    May 2004 | IEEE Spectrum | NA 47

    FIGURE A

    FIGURE B

    n materialp material

    Wide depletion region

    n material

    p material

    Narrow depletion region

    Very low current flow

    Electrons

    Holes

    -+

    +-

    Reverse-biasedpnjunction

    Forward-biasedpnjunction

    n material

    p material

    n material

    Collector

    Base

    Emitter

    C

    E

    B

    C

    E

    B

    +

    +

    +

    -

    -

    -

    lB

    lE

    lE

    l

    l

    V

    V

    V

    V1

    Electronflow

    Holeflow

    Electronflow

    Holeflow

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    research department. Haggerty had hired him to build a team of

    scientists and engineers that could generate enough ideas and tech-

    nologies to keep the firm poised at the leading edge of the explod-

    ing semiconductor industry. Teal was up to the challenge. He was

    introverted and difficult to work with, but also smart and stubborn.

    These qualities had served him well at Bell Labs, where he pur-

    sued his crystal-growing research in the late 1940s, working doggedly

    after hours with almost no support from management. Perhaps

    most important, this pioneering research had made him a minor

    celebrity in the fledgling industry, which would prove crucial in hir-

    ing bright young people for a group he had to create from scratch.We could never have attracted the stable of people that we did

    without him, Shepherd admitted in a 1993 interview. And we got

    some really outstanding scientists in those days.

    Among his new hires was Willis Adcock, like Teal a physical

    chemist with a Ph.D. from Brown University, in Providence, R.I. He

    had been working for a natural gas company

    in Oklahoma and joined TI early in 1953.

    Adcock began leading a small research group

    focused on the task of fabricating grown-

    junction silicon single-crystal and small-

    signal transistors that would meet military

    environmental conditions, according to Teal,

    who viewed this as the principal short-termgoal for his new research department.

    It was no easy task at the time. Because

    of a high melting temperature of 1415 C

    and its great reactivity, the molten silicon

    from which crystals are drawn interacts

    with just about any crucible that can con-

    tain it. Even fused quartz slowly reacts

    with the melt, contaminating it with oxy-

    gen and other impurities that subse-

    quently find their way into the silicon crystal, degrading its elec-

    trical performance. And most of the silicon samples then

    available from suppliers came with substantial impurities.

    Unlike germanium, which could be purified using zone-refining

    techniques so that impurities could be reduced to about one part

    per billion, the purest silicon available in those days had much higher

    levels. And while silicon pnjunctions had been fabricated for more

    than a decade, ever since Russell Ohl first achieved this feat at

    Bell Labs in 1940, making a successful npn or pnpjunction transis-

    tor from this semiconductor material was far more difficult. [See

    The Origins of the pnJunction,IEEE Spectrum, June 1997.] The

    main problem was the extinction of so-called minority carriers

    (electrons in p-type or holes in n-type layers) due to impurities in

    the base layer. Electrons will easily recombine with holes at any

    impurity centers within the base. Consequently, too few of these

    minority carriers could survive while crossing this daunting bridge

    between emitter and collector to achieve sufficient current gain, or

    amplification, in silicon. The only solution to this problem, other

    than struggling to purify the silicon, was to make the base layer

    extremely thin so that the minority carriers would have some chance

    of making it from one side to the other.Adcock, Teal, and their team wrestled with these problems for

    over a year. Then, in April 1954, using a special, high-purity silicon

    purchased from DuPont at $500 a pound, they managed to grow a

    suitable npn structure with an emitter region carefully doped to

    enhance current gain and a p-type base layer about 1-mil (25 micro-

    meters) thick. Cutting a half-inch (1.27-centi-

    meter) bar from this crystal and attaching

    electrical contacts on the morning of

    14 April, Adcocks group prepared to test

    it. Soon Haggerty got an excited call from

    Teal urging him to come see a demonstra-

    tion. A few minutes later, I was observing

    transistor action in that first grown-junctiontransistor, Haggerty recalled at TIs

    25th-anniversary celebrations in 1979. It was

    a defining moment for the budding semi-

    conductor company. Realizing that another

    company might well achieve the same break-

    through, Teal hurriedly wrote a paper for

    presentation at the Dayton conference. And

    held his breath after Bell Labs announced

    the silicon solar battery later that month.

    + + +

    Another company, in fact, had already fabricated a working sili-

    con transistor a few months earlier. In January 1954, Morris

    Tanenbaum made one while working as a member of Shockleys

    research group at Bell Labs. But the worlds dominant semi-

    conductor company kept this achievement under wraps, while the

    Texas upstart rushed to announce it.

    Tanenbaum had come to Bell Labs in June 1952 after earning degrees

    Smart, stub-

    born, and intro-verted, GordonTeal was up tothe challenge

    TRANSISTOR FIRSTS: Bell Labs junction transistor, of germanium, was fabricated in 1950 [left]. Texas Instruments commercial silicon transistor came four years later.

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    in chemistry and physical chemistry at Johns Hopkins University,

    in Baltimore, and Princeton University, in New Jersey. He started outin the chemical physics department, growing large single crystals of

    various semiconductors and testing their properties. In late 1953

    Shockley invited him to join the team being formed to push toward

    silicon transistors. Tanenbaum continued working with Buehler, Teals

    former technician, whom he describes as a master craftsman in

    building apparatus and growing semiconductor crystals.

    Buehler was working on a technique known as rate growing. The

    rate at which impurity atoms (such as gallium and antimony) are

    incorporated from the melt into the crystal depends to a great extent

    on the crystals growth rateon how rapidly it is being pulled from

    the melt. Both impurities are present in the melt simultaneously,

    but the rate at which either one crystallizes out depends on the

    pulling speed. This process enabled the team to make much nar-

    rower base layers, just 13 to 25 micrometers (m) thick, which proved

    to be crucial in limiting the extinction of minority carriers.

    Tanenbaum cut a half-inch bar from one high-purity silicon crys-

    tal that Buehler had grown using special samples from DuPont; then

    he attached an aluminum lead to the narrow base layer and carefully

    reheated the silicon to restore the layers p-type behavior. On

    26 January 1954, according to his logbook, he achieved sufficiently

    high electron current and hence amplification in annpn silicon tran-

    sistor. I believe these were the first silicon transistors ever fabri-

    cated, says Tanenbaum, savoring the moment in an interview nearly

    half a century later.

    When we made these first [silicon] transistors, he contin-

    ues, we thought about patenting the process but determined

    for two reasons that it wasnt worth the effort. For one, others

    had developed and used similar techniques. And he really did not

    like the rate-growing process, which had already been patented

    by General Electric Co. It just wasnt controllable, he adds. From

    a manufacturing point of view, it just didnt look attractive.

    At the time, Shockleys group was concentrating on adapting

    the new diffusion process pioneered by Fuller to the fabrication

    of germanium and silicon transistors. Diffusion seemed much

    more promisingas indeed it proved to bebecause it was sub-

    stantially more controllable and could yield much narrower base

    layers, just micrometers thick, and hence transistors that work at

    higher frequencies. In July 1954 Charles Lee made a successful ger-manium transistor at Bell Labs using diffusion techniques, oper-

    ating it at up to 500 megahertz. Tanenbaum spearheaded the effort

    to duplicate this device in silicon, succeeding on 17 March 1955,

    with an npn transistor that worked at up to 120 MHz.

    Thus, there was little enthusiasm for the rate-grown silicon

    transistors that he had developed, and Bell Labs made no effort to

    publicize the achievement. Tanenbaum presented his results at the

    IRE Solid-State Device Research Conference in June 1954. During

    the question-and-answer session afterward, he recalls, Teal men-

    tioned similar work that had been done at TIbut was cagey about

    specifics. Later that year Tanenbaum submitted a paper about his

    research on rate-grown silicon transistors to theJournal of AppliedPhysics, where it was finally published in June 1955.

    By then the semiconductor industry was on the verge of yet

    another fundamental shift. At the 1955 Solid-State Device Research

    Conference held that same month, few people mentioned rate-

    grown transistors. Everyone there was talking excitedly about the

    newest breakthrough: diffusion. And Shockley was getting ready to

    leave Bell Labs to start his own semiconductor company focused

    on silicon transistors.

    + + +

    It is hardly surprising that the silicon transistor was invented

    twice, in two seemingly independent achievements just months apart.By 1954 the crucial underlying technologies of silicon purification and

    crystal growth were at a point where the silicon transistor was per-

    haps inevitable, given the market demandswhich were quite dif-

    ferent for the two companies. TI was focused on military markets for

    transistors as replacements for the bulkier and far more fragile vac-

    uum tubes. The U.S. armed services, among its biggest customers,

    were willing to pay a big premium for transistors that performed uni-

    formly and flawlessly over a wide range of conditions. Bell Labs largest

    customer was AT&Ts Bell Telephone System, which needed rugged,

    long-lived semiconductor switches that were truly off when they

    were supposed to be off. Because of high leakage currents, espe-

    cially at elevated temperatures, germanium transistors simply could

    not satisfy either of these important customers.

    It is also obvious that the two achievements had common tech-

    nological roots reaching back to the pioneering crystal-growth

    research of Teal and Buehler at Bell Labs from 1949 to 1952. Teal

    brought this expertise with him to TI, although perhaps not the

    rate-growing techniques developed a bit later by Buehler. The two

    groups both benefited from the fact that DuPont saw a growing

    market for high-purity, semiconductor-grade silicon and was

    beginning to supply small samples of the stuff in 1954. In both

    cases, the road to the silicon transistor had to cross a narrow, high-

    purity bridge made of the element.

    Amidst all else that was happening at Bell Labs in the early 1950s,

    the first silicon transistor may not have seemed important enough

    to merit the same public attention given earlier transistors and the

    solar cell. At the time, the managers were likely looking ahead eagerly

    to what they considered the real breakthrough: transistors fabricated

    using diffusion that operated at over 100 MHz. And overconfidence

    may have played a role, too. Bell Labs had habitually kept mum for

    months after its earlier breakthroughs, thereby permitting its sci-

    entists and engineers to work out most of the patentable ramifica-

    tions before going public.

    Whatever the case, the delay allowed fledgling Texas Instruments

    to leap forward and claim victory in this race. And it stood alone as

    the first company to manufacture silicon transistors in volume. Thanks

    to its foresight and aggressiveness, TI had the silicon transistor mar-

    ket essentially to itself for the next few yearsand started down theroad to becoming the international giant we know today.

    SILICON PRECURSOR: Gordon Teal (then at Bell Labs) [left] and fellow physical chemist MorganSparks successfully fabricated the first working junction transistor from a germanium crystal.