EX100HReliable High pow

er UV Excimer Laser

The laser is an all metal/ceramic device and uses the most advanced design of a n y c o m m e r c i a l excimer laser.

Long gas lifetime Corona PreIonization On-Board Vacuum Pump Long life optics

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EX100H

GAM LASER, INC GAM LASER, INC Hard ScienceHard Science

High Power and High stability

The EX100H excimer laser is designed to provide high power industrial laser performance in a low cost, high reliability system. The unique linear design of GAM LASER products allows power scaling to be achieved at low incremental cost. The EX100H provides the first cost effective high power excimer laser. The EX100H gives repetition rates to 500Hz with all excimer gases and F2 at 157nm: lower repetition rate versions are also available. The laser gives up to 65W output power with KrF, and 35W with ArF. Exceptional dynamic and static gas lifetime is obtained from the total metal/ceramic design and corona preionization system with over 18 million pulses to 50% energy on KrF and 8 weeks static gas lifetime.An industrial version gives longer gas lifetime. The laser is an all metal/ceramic device and uses the most advanced design of any commercial excimer laser. The laser of course includes standard features such as active thermal stabilization, constant power and energy control, automatic refill and automatic gas control. The laser can be completely controlled from a Windows 95/98/2000/XP software package. A 32 bit DLL is available for those wishing to write custom software for the laser, or to incorporate the laser into a larger software routine. The enhanced industrial software control package is standard with the EX100H laser. Low cost of Ownership

The EX100H is designed for simple, low cost refurbishing and replacement of the laser chamber. This minimizes down time and maintains a low cost of ownership.

High efficiency discharge

Several models of the EX100H laser are available. The EX100H is available in 60Hz, 125Hz, 250Hz, and 500Hz models. The 60Hz model is air cooled. The EX100H laser is designed to give high electri-cal to optical conversion efficeiency. The high dis-charge efficiency reduces the load on the heat trans-fer system and allows air cooled operation at up to 60Hz. A special high energy 157nm version is also available. Economical Operation

The EX100H is designed to allow simple and low cost replacement and refurbishment of the laser chamber. This gives minimal downtime for scien-tific and Industrial applications

Automatic Gas Handling

The EX100H uses one small cylinder of gas for up to 2 years of operation. No solid state Fluorine generators, no high temperatures, the EX100H operates for 109 pulses as supplied with one small tank of premix gas. When a gas refill is required the autofill software option replaces the gas fill in under 1 minute using the internal vacuum pump and halogen filter.

The EX100 causing AIR BREAKDOWN at 40mJ, 193nm, with a stable Resonator

Reliable High power UV Excim

er Laser

O p t i o n s

♦ Clean Room Package

♦ Unstable Resonator Optics

♦ EX100HF Version 15mJ @ 157nm

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PARAMETER F2 ArF KrF XeCl XeF

Wavelength nm 157 193 248 308 351

Energy Max. mJ 10/15 100 150 80 90

Average Power @ 60 Hz , Air cooled 0.4/0.7 5 10 4.5 4.5

Average Power @ 125 Hz 0.75/1.4 10 18 9 9

Average Power @ 250 Hz 1.5/2.5 18 35 17 17

Dynamic gas lifetime Pulses to 50% energy 10E7 15E6 18E6 25E6 20E6

Industrial Version 50E7 200E6 500E6 100E6 100E6

Shelf life approx. to 50% energy 15 days 60 days 90 days 1 year 90 days

Pulse Length 18-23 nS b

Beam Size 11 X 6/7 mm

Stability < 2% Standard Deviation c

Divergence 1.2 X 1.8mRad d

Cooling Air / Water

Dimensions and electrical service

The EX100H gives high performance in a compact package. The laser is 120cm long. The entire laser is packaged in one computer controlled table top unit.

Dimensions: 120 X 44 X 30cm (L X W X H) Power Requirements: 125/250/500 Hz 95-240 VAC,8/15A,47/63Hz 1000 Hz 208-240 VAC 30A 47/63 Hz Weight 65kg

GAM LASER INC. 6901 TPC Drive #300 ORLANDO, FL 32822 Phone : 407-851-8999 Fax : 407-850-0700

Email : Sales@ gamlaser.com Web : www.gamlaser.com

MADE IN USA

Copyright © 2005 GAM Laser Inc.,

Specifications

♦ A powerful high repetition rate system in a compact package.

♦ Low divergence output

♦ Excellent Pulse to Pulse stability

♦ Low Jitter