LESS THAN

ONE DROP MEASUREMENT

AND CONTROL

Unique Cooling Method

Ultra Compact Design

High Speed Response (<2sec.to±2%F.S.)

Small Flow Range (0.02~100SCCM F.S.)

Ultra Clean (LF&LV-MO)

High Accuracy/Low Pressure Drop

Applicable for Various Kinds of Liquid(Including Low Boiling Point Liquids)

PAC-D1 PAC-D2

for LF-F for LV-F

Exclusive Control Unit

LF-FSeriesDigital Mass Flow Meter

LV-FSeriesDigital Mass Flow Controller

For Liquid Fine Flow Measurement & ControlFor Liquid Fine Flow Measurement & Control

The LF-F Series Mass Flow Meters are designed to measure liquid flow rates from 0.02 to 100 ccm. Its unique cooling method sensor (patent pending) developed byHORIBA STEC is the first of its kind in the world. The cooling method allows us to measure ultra low flow ratesof liquids with extreme accuracy and high stability, even inthe case of low boiling point liquids.

Any liquid can contain desolved gases that can cause cavitation and bubble generation when passed through aconventional heated sensor tube, but with the HORIBASTEC cooling element these problems are eliminated.

The LV-F series liquid Mass Flow Controller employs thecooling method sensor and the high performance HORIBASTEC piezo actuated metal diaphragm control valve. Thefield proven peizo valve is also an excellent component for use with low boiling point liquid, because there is virtually no heat generation, especially when compared tosolenoid valves.

Both the LF-F and LV-F are designed with minimized surface area, straight flow through (no bypass), and nodead volume for ultra clean liquid delivery.

WHEN USED WITH A LIQUID PUMP CONSTANT VOLUME OF LIQUID SOURCE

Alarm Output

SC-LV

AC100~230V

AC100~230V

MFC forCarrier

LiquidMFC

Vaporizer

PAC-D2

SC-LV

PAC-D1

Liquid

Stainless Capillary Tube Ts

Peltier Element(Electronic Cooling Element)

In Case of Flowing

In Case of No Flow

0%

100%

60%

30%

0%

100%

0%1sec

30sec

200mv

200mv

LV-F40

Plunger Pump

T

Tem

per

atur

e ºC

Temperature Distribution of Sensor Part

LF-F SERIES

SourceContainer

N2

Gas

Construction of LV-F Series

LV-F40 STEP RESPONSE (H2O 2ml/min.F.S.)

Stability comparison between LV-F40 and plunger pumpFlow Rate : 1ml/H20. Flow rate of plunger was measured with LF-F40 liquid MFM

CONSTANT FLOW RATIO CONTROL OF CHEMICALS CONSTANT FLOW VAPORIZATION OF LIQUID SOURCE

AC100~230V

AC100~230V

A Liquid

PAC-D2

SC-LV

LiquidMFC

Liquid

Gas

MFC forCarrier

LiquidSource

Vaporizer

Reactor

PAC-D2

MixedLiquid

Mixer

LV-F SERIES

B Liquid

C Liquid

Specifications

LF-F20M-A LF-F30M-A LF-F40M-A LF-F50M-A LF-F60M-A LV-F20(PO/MO) LV-F30(PO/MO) LV-F40(PO/MO) LV-F50(PO/MO) LV-F60(PO/MO)0.02/0.05/0.1 0.2/0.5 1/2/5 10/20 50/100 0.02/0.05/0.1 0.2/0.5 1/2/5 10/20 50/100

5 - 100% F.S.All liquids except those corrosive to stainless steel (ex, HCl and HF)

Max. 0.1 Pa·s (100cP) Max. 0.01 Pa·s (10cP)±1% F.S.±0.5% F.S.±0.5% F.S.

Less than 3sec (T98) Less than 2sec (T98) Less than 3sec (T98) Less than 2sec (T98)5 to 50°C (Accuracy Guaranteed 15 to 45°C)

± 0.1%F.S./°C max ± 1%Max. 5MPa (as flow meter) / 0.05 to 0.3MPa (with piezo control valve) 0.05 to 0.3 MPa

10MPa (as flow meter) 1MPaMax. 5kPa Max. 30kPa

Analog: 0 to 5 VDC Digital: RS485+15 V ± 5%, 200 mA -15 V ± 5%, 200 mA

5 x 10-12Pa·m3/s (He) PO Type: Less than 1 x 10-8Pa·m3/s (He) MO Type: Less than 5 x 10-12Pa·m3/s (He)SUS316L, Ni PO Type: SUS316L, Ni, PTFE, PFA MO Type: SUS316L,Ni

1/16" , 1/8" Swagelok, 1/8" 1/4" 1/16" , 1/8" Swagelok, 1/8" 1/4"1/8" VCR type Swagelok Swagelok 1/8" VCR type Swagelok Swagelok

1/8" 1/4" 1/8" 1/4"VCR type VCR type VCR type VCR type

Model NameFlow Range (g/min)Measurement RangeApplication LiquidViscosityAccuracyLinearityRepeatabilityResponse speedOperating TemperatureTemperature coefficiencyOperating PressurePressure ResistancePressure DropFlow Rate SignalPower SupplyLeak IntegrityWetted MaterialStandard Fittings

*1

*2

*3

*4

*5

*6

*7

*1 With the LF-F/LV-F Series, flow rate calibration is performed using one specified type of liquid. (Please indicate the type of liquid to be used when ordering the device.) - Liquids containing solid materials cannot bemeasured. - Please consult us in advance if you plan to use these devices with liquid mixture for which the mixture ratio may vary. - With the LV-F Series, if the liquid to be measured contains particle etc., pleaseinstall a 0.2 µm (Abs) filter on the primary side.

*2 The LV-F Type can be used with a maximum viscosity of 0.01Pa·s depending on the flow rate range. Please consult us in advance if you plan to use this device with high-viscosity liquids.

*3 Specification of accuracy, linearity and repeatability is guaranteed against calibrated liquid based on SEMI E56-1296.

*4 It is the specification which is adjusted by Auto-PID function with our piezo control valve.

*5 In order to ensure precise measurement, please maintain incoming liquid temperature to be within 10 deg.C lower or 3 deg.C higher than the ambient temperature.

*6 Specification of Operating Pressure is the pressure range when liquid viscosity is 0.001Pa·s.

*7 Specification of pressure drop is when liquid (with viscosity of 0.001Pa·s) is introduced at 100% F.S. of measurement point.

External Dimensions (Unit : mm)

LF-F20M / F30M / F40M / F50M / F60M

PAC-D1 Power Supply PAC-D2 Power Supply

Fitting to Fitting Sizes (W)

LV-F SeriesSWL VCR

118 –

130 125

136 137

1/16”

1/8”

1/4”

Exclusive Power Supply

PAC-D1 PAC-D2LF-F Series LV-F Series4 figures LED digital display (Desimal point, F.S. can be set)N.S. 0-5VDC

0-5VDC (switchable)Required AC 100-230V max. 50VA

ModelApplicable ForFlow DisplayFlow Set SignalFlow OutputPower Source

Connection Cable

SC - LV1m, 2m, 3m, 5, available

TypeLength

LF-F SeriesSWL VCR

87 –

99 94

105 106

1/16”

1/8”

1/4”

PTCACanada Analytical & Process Technologies16 Concourse Gate, Suite 400Ottawa, Ontario K2E 7S8 Tel: 613-226-1115 Fax: 613-226-5429 Toll Free: 866-384-3666

www.captcanada.com