lecture 6 tem
TRANSCRIPT
http://www.youtube.com/watch?v=yqLlgIaz1L0 see atoms by TEM
http://emalwww.engin.umich.edu/education_materials/microscopy.html
A Question from Last Year Final Exam Recommend an instrumental method that will provide information about the chemical composition and crystal symmetry of precipitates (small black dots of ~0.1m wide) in a polycrystalline sample with micrometer-sized grains as shown below. State your reasons. [10 marks]
Precipitates
Limits of OM, SEM, SPM and XRD
BTNN
BT
NN
EDS
G.B.
G.B.
BT-BaTiO3NN-NaNbO3G.B.-Grain boundaryM.G.J.-multiple grain
junction
•Lateral resolution: ~m•Details of microstructure: e.g., domain structure, chemical inhomogeneity phase distribution, grain boundaries, interfaces, precipitates, dislocations, etc.
NN/BT
M.G.J.0.2m
core
shell
Chemical analysis at a nanometer scale in a Transmission Electron Microscope
(TEM)
Why TEM?The uniqueness of TEM is the ability to obtain full morphological (grain size, grain boundary and interface, secondary phase and distribution, defects and their nature, etc.), crystallographic, atomic structural and microanalytical such as chemical composition (at nm scale), bonding (distance and angle), electronic structure, coordination number data from the sample.TEM is the most efficient and versatile technique for the characterization of materials.
http://www.youtube.com/watch?v=yqLlgIaz1L0 see atoms by TEM
Lecture-6 Transmission Electron Microscopy (TEM)Scanning Transmission Electron Microscopy (STEM)
• What is a TEM?• How it works - gun, lenses, specimen holder• Resolution • What can a TEM do?
• Imaging and diffraction Imaging-diffraction and phase contrast Diffraction-Selected area electron diffraction (SAED) and Convergent beam electron diffraction (CBED)• Chemical analysis EDS, Electron Energy Loss Spectroscopy (EELS) Energy Filtered Imaginghttp://emalwww.engin.umich.edu/education_materials/microscopy.html
http://www.youtube.com/watch?v=6fX1m2rImiM to~2:40 History & applications
Lecture-6 Transmission Electron Microscopy (TEM)Scanning Transmission Electron Microscopy (STEM)
• What is a TEM?• How it works - gun, lenses, specimen stage• Resolution
http://www.youtube.com/watch?v=fxEVsnZT8L8 ~2:20-2:40 fluorescence screen
What is TEM?
TEM is an microscopy technique that functions similar to a light microscope, which uses a beam of exited electrons as a light source to provide mophorlogical, compositional and crystallographic information of an ultra thin specimen.
The image is formed by the interaction of the electrons transmitted through the specimen, which is then magnified and focused on a fluorescence screen containing a layer of photographic film.
http://www.youtube.com/watch?v=C3uU8c376Aw&list=PLIRAzwu_npNcnPGi2sOk2aaNaS3vzU-N1Milestones of Science: Ernst Ruska and the Electron Microscope at~5:00-7:15 and ~9:03-9:23
Comparison of OM and TEM
Principal features of an optical microscope and a transmission electron microscope, drawn to emphasize the similarities of overall design.
Electron Gun
EDS DetectorCondenser Lens
Specimen HolderObjective Lens
Magnifying Lenses
CM200 (200kV)
SAD Aperture
TV MonitorViewing ChamberCamera
Chamber
Cost: $4,000,000
Column
Binocular
http://www.youtube.com/watch?v=6fX1m2rImiM at~2:40-4:40
Structure and Function of TEM
http://www.youtube.com/watch?v=2wEmsDh_l_A at~0:30
http://www.youtube.com/watch?v=fToTFjwUc5M
Vacuum The electron microscope is built like a series of vessels connected by pipes and valves separate all the vessels from each other.
The vacuum around the specimen is around 10-7 Torr. The vacuum in the gun depends on the type of gun, either around 10-7 Torr (the tungsten or LaB6 gun) or 10-9 Torr (for the Field Emission Gun).The pressure in the projection chamber is usually only 10-5 Torr (and often worse). This pressure is not very good because the projection chamber holds the negatives used to record images. Even though we dry the negatives before putting them in the microscope, they still will give off so many gases that the vacuum in the projection chamber never gets very good.
Condenser lenses(two)-control howstrongly beam is focused (condensed) onto specimen. At low Mag. spreadbeam to illuminate a large area, at highMag. strongly condense beam.
Objective lens-focus image (imageformation) and contribute most to the magnification and resolution of the image.
Four lenses form magnificationsystem-determine the magnificationof the microscope. Whenever themagnification is changed, the currentsthrough these lenses change.
B
http://www.youtube.com/watch?v=C3uU8c376Aw&list=PLIRAzwu_npNcnPGi2sOk2aaNaS3vzU-N1at~5:50-7:00
How it works? The Lenses in TEM
Running water
Cu coils
Magnetic material
http://www.youtube.com/watch?v=j2A6KeWrqeM&feature=relatedat~0:20-0:44
Schematic of the Optics of a TEM
Control brightness,
convergence
Control contrast
How it works? Image Formation in TEM
A disc of metal
under in over focus focus focus
http://www.youtube.com/watch?v=6fX1m2rImiM at~3:00-4:45
Why Electrons? Resolution
-wavelength, =[1.5/(V+10-6V2)]1/2 nmV-accelerating voltage, n-refractive index -aperture of objective lens, very small in TEM sin and so r=0.61/ ~0.1 radians
200kV Electrons~0.0025nmn~1 (vacuum)
r~0.02nm (0.2Å) 1/10th size of an atom!UNREALISTIC! WHY?
In expression for the resolution (Rayleigh’s Criterion)
r = 0.61/nsinGreen Light~400nmn~1.7 oil immersionr~150nm (0.15m)Electrons
0.1 radians ~ 5.5o-beam convergence
Resolution Limited by Lens Aberrations
point is imaged as a disk.
Spherical aberration is caused by the lens field acting inhomogeneously on the off-axis rays.
point is imaged
Chromatic aberration is caused by the variation of the electron energy and thus electrons are not monochromatic.
rmin0.91(Cs3)1/4
Practical resolution of microscope. Cs–coefficient of spherical aberration of lens (~mm)
as a disk.
Beam and Specimen Interaction
(EDS)
(EELS)SAED & CBED diffraction
BF DF HREMImaging
Scanning Transmission Electron Microscopy
In STEM, the electron beam is rastered (scan coil) across the surface of a sample in a similar manner to SEM, however, the sample is a thin TEM section and the diffraction contrast image is collected on a solid-state (ADF) detector.
JEOL 2000FX Analytical Electron Microscope
STEM detectoror EELS
HAADF Detector
HAADF-high angleannular dark-field
Scanning beam
specimen
BF ADFADF
BF
DF
(STEM)
http://en.wikipedia.org/wiki/Scanning_transmission_electron_microscopyhttp://www.youtube.com/watch?v=WJUL22UoCLI Scanning transmission electron holography microscope
Specimen Holder
a split polepieceobjective lens
holder
beam
Heating and strainingTwin specimen holder
Double tilt heating
Rotation, tilting, heating, cooling and straining
http://www.youtube.com/watch?v=j2A6KeWrqeM&feature=related at~0:56-1:42
Specimen Holder with Electrical Feedthroughs
http://www.youtube.com/watch?v=fxEVsnZT8L8 at~3:00-3:34
Specimen Preparation-DestructiveDispersing crystals or powders on a carbon film on a grid
3mm
Making a semiconductor specimen with a Focused Ion Beam (FIB)
1. a failure is located and a strip of Pt is placed as a protective cover.2. On one side of the strip a trench is milled out with the FIM.3. The same is done on the other side of the strip (visible structure).4. The strip is milled on both sides and then the sides connecting the
strip to the wafer are cut through.5. The strip is tilted, cut at the bottom and deposited on a TEM grid.
1 2 3 4 5
http://www.youtube.com/watch?v=F0ZNUykXovk Preparing specimen
Specimen Preparation-2Ion-milling a ceramic
3mm
Ultrasonic cut grind Dimple center part
of disk to ~5-10mion-mill until a hole appears in disk
Ar (4-6keV, 1mm A)
Jet-polishing metal
Drill a 3mm cylinder
Cut into disks and grind
A disk is mounted in a jet-polishing machine and is electropolished until a small hole is made.
a thin stream of acid
+-
Ultramicrotomy-using a (diamond) knife blade Mainly for sectioning biological materials.To avoid ion-milling damage ultramicrotome can also be usedto prepare ceramic TEM specimens.
http://www.ims.uconn.edu/~micro/Dimple%20Grinding2.pdf TEM specimen preparation
What can a TEM do? Imaging
BF and DF imaging
HREM
Objective Aperture
(OA)BF - Bright Field DF - Dark Field
BF & DF Imaging – Diffraction Contrast
Objective aperture
C-filmamorphous
crystal
D
TBF image
C-filmcrystal
DT
C-filmcrystal
DF image
Diffraction + mass-thickness Contrast
Objective aperture
DDF CDFBeam
tilt
T-transmittedD-diffracted
Hole in OA
OA OA
http://micro.magnet.fsu.edu/primer/virtual/virtualzoo/index.html
Diffraction, Thickness and Mass Contrast
Disk specimen
thickness
thinnerthicker
1
2
3
45
6
78
G.B.
. ... . . . .. . .. ... .... .... .. High mass
Lowmass
T TS SS
Bright Dark
Strongdiffraction
Weak diffraction
8 grains are in different orientationsor different diffraction conditions
thicknessfringes
BF images
BF and DF Imaging
Incident beam
specimen
transmitted beam
diffracted beam
objective aperture
hole in objectiveaperture(10-100m)
BF imaging-only transmitted beam is allowed to pass objective aperture to form images.mass-thicknesscontrast
BF
DF
DF
DF imagingonly diffractedbeams areallowed to passthe aperture toform images.
Particles in Al-CuAlloy.thin platelets ll eVertical, darkParticles e.
Phase Contrast Imaging High Resolution Electron
Microscopy (HREM)
Use a large objectiveaperture. Phases and intensities of diffracted andtransmitted beams are combined to form a phase contrast image.
TD
SiObjective aperture
Electron diffraction pattern recordedFrom both BN film on Si substrate.
BN
Electron Diffraction
Specimen foil
T D
e-
L 2
r
dhkl
[hkl] SAED pattern
L -camera lengthr -distance between T and D spots1/d -reciprocal of interplanar distance(Å-1)SAED –selected area electron diffraction
Geometry fore-diffraction Bragg’s Law: =2dhklsinhkl
=0.037Å (at 100kV)=0.26o if d=4Å
= 2dr/L=sin2as 0r/L = 2
r/L = /d or
r = Lx 1d
hkl
Reciprocal lattice
http://www.matter.org.uk/diffraction/electron/electron_diffraction.htm
X-ray crystalpolycrystal
=[1.5/(V+10-6V2)]1/2 nm
e-beam is almostparallel to {hkl}
e-beamZone axis of crystal
sample
http://www.youtube.com/watch?v=fxEVsnZT8L8 at~3:00-3:34
Reciprocal LatticeA reciprocal lattice is another way of view a crystal lattice and is used to understand diffraction patterns. A dimension of 1/d (Å-1) is used in reciprocal lattices.
g – reciprocal lattice vector
2-D Reciprocal LatticesReal space:Unit cell vectors: a,b d-spacing directiona d10 [10]b d01 [01]
Reciprocal space:Unit cell vectors: a*,b* magnitude directiona* 1/d10 b
b* 1/d01 a
A reciprocal lattice can be built using reciprocal vectors. Both the real and reciprocal construc-tions show the same lattice, using different but equivalent descriptions.
[01]
[10] (10)
(01)
Note: each point in the reciprocal lattice represents a set of planes.
a*b*
0102
1011
1220
21 22
For every real lattice there is an equivalent reciprocal lattice.
http://www.youtube.com/watch?v=iC15RHX4gpQ
http://www.matter.org.uk/diffraction/geometry/2d_reciprocal_lattices.htm
3-D Reciprocal LatticeReal space:Unit cell vectors: a,b,c magnitude directiona d100 [100]b d010 [010]c d001 [001]
Reciprocal space:Unit cell vectors: a*,b* magnitude directiona* 1/d100 b and c
b* 1/d010 a and c
c* 1/d001 a and bNote: as volume of unit cell in real space increases the volume of unit cell in reciprocal space decreases, and vice versa. a*,b* and c* are parallel to corresponding a,b and c, and this is only true for the unit cells of cubic, tetragonal and orthorhmbic crystal systems.
Orthorhombic
http://www.matter.org.uk/diffraction/geometry/3d_reciprocal_lattices.htmhttp://www.matter.org.uk/diffraction/geometry/reciprocal_lattice_exercises.htm
Lattice VectorsReal space lattice vectorcorresponds to directions in crystal and it can be defined as:
r=ua+vb+wca,b and c are unit cell vectors,u,v and w are components ofthe direction index [uvw].
A reciprocal lattice vectorcan be written as:
g*=ha*+kb*+lc*a*,b* and c* are reciprocal unit vectors, and h,k and l are the Miller indices of the plane (hkl).
Effect of Spacing of planes in Real Space on Length of Reciprocal Vector, g
In a crystal of any structure, ghkl is normal to the (hkl)plane and has a length inversely proportional to the interplanar spacing of the planes.
(111)-d111-
[111]-
http://www.matter.org.uk/diffraction/geometry/reciprocal_vector_g.htm
Why are there so many spots?Ewald Sphere and Diffraction Pattern
SAED pattern XRD patternReciprocal Latticek – wave vector
lkl = 1/ – wavelength of electron
k – wave vectorlkl = 1/ – wavelength of electron
The Ewald Sphere and Diffraction PatternEwald Sphere Construction
Bragg’s Law
http://www.matter.org.uk/diffraction/geometry/ewald_sphere_diffraction_patterns.htm
1/
T D
Reciprocal Lattice
A set of real lattice planes
XRDRR=1/
R R=1/SAED
Why there are so many diffraction spots in ED?
SAED
A TEM technique to reduce both the area and intensity of the beam contributing to a diffraction pattern by the insertion of an aperture into the image plane of the objective lens. This produces a virtual diaphragm in the plane of the specimen.
SADaperture
Virtualaperture
specimen
Objectivelens
Diffractionpattern
Back focalplane
Selected Area Electron Diffraction
parallel beam
Focusing SAED Pattern at Fixed Screenby changing magnetic lens strength
specimen lensscreen
Transmitted beamDiffracted beam
Spot patternSAED gives 2-D information
http://www.matter.org.uk/diffraction/electron/electron_diffraction.htm
SAED Patterns of Single Crystal, Polycrystalline and Amorphous Samples
a b c
a. Single crystal Fe (BCC) thin film-[001]b. Polycrystalline thin film of Pd2Sic. Amorphous thin film of Pd2Si. The diffuse
halo is indicative of scattering from anamorphous material.
r1 r2200
020110
Diffraction Spot IntensitySpot intensity: Ihkl lFhkll2
Fhkl - Structure Factor
Fhkl = fj exp[2i(hu+kv+lw)]N
j=1
fj – atomic scattering factor
fj Z, sin/h,k,l are Miller indices and u,v,w fractional coordinates
200
131 (311)?
_
[013]_
SAED
the table SAED
dhkl = L/rhkl
50nm
SAED Patterns
TEMConvergent beam electron diffraction (CBED)Chemical analysisEDS, Electron Energy Loss Spectroscopy (EELS)Energy Filtered Imaging
Secondary Ion Mass Spectroscopy (SIMS)
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