introduction to vacuum systems for particle … to vacuum systems for particle accelerators ......
TRANSCRIPT
Introduction to Vacuum Systems
for Particle Accelerators
Dr. Oleg B. Malyshev,
ASTeC Vacuum Science Group,
STFC Daresbury Laboratory, UK
Particle Accelerator School - 2013
Oleg Malyshev CI PAS, October 2013 slide 2
Outline
• Introduction • Definition of vacuum
• Classification of vacuum ranges
• A few simple formulas for vacuum
• Vacuum for particle accelerators • What is Vacuum Science and Technology?
• Gas composition in the atmosphere and in vacuum
• Pumps
• Gauges and RGAs
• The interaction between charged particles and residual gas molecules
• Sources of gas in a vacuum system
• BIEM and ion induced pressure instability
• NEG coated vacuum chamber
• Vacuum chamber at low temperatures
• Rough Calculation and Design of Vacuum System
Oleg Malyshev CI PAS, October 2013 slide 3
• Vacuum (from Latin “vacua”) means empty
• this is an unreachable aim and dream
• this means that everybody who needs VACUUM is a dreamer!
• In practice, Vacuum is the gas state when P < Patm
• As soon as gas from a closed volume is pumped out all that
remains is called the vacuum
• this is the realistic approach
• or real science
• Vacuum is a problem for many applications and researchers and it is
a subject of
• Rarefied Gas Dynamics for studying gas flows, heat transfer, etc.
• Vacuum Science and Technology for applications and implimentation.
Introduction
Oleg Malyshev CI PAS, October 2013 slide 4
There’s nothing in it!
Vacuum
Particles/m3
Atmosphere 2.5 x 1025
Vacuum Cleaner 2 x 1025
Freeze dryer 1022
Light bulb 1020
Thermos flask 1019
TV Tube 1014
Low earth orbit (300km) 1014
SRS/Diamond 1013
Surface of Moon 1011
Interstellar space 105
Oleg Malyshev CI PAS, October 2013 slide 5
Classification of Vacuum Ranges
Vacuum Ranges
Criteria
Pressure (mbar) Gas density at RT (particles/cm3)
min max min max
Low (LV) ‹› << d 1 1000 ~1016 2.51019
Medium (MV) ‹› ~ d 10-3 1 ~1013 ~1016
High (HV) ‹› > d 10-6 10-3 ~1010 ~1013
Very High (VHV)
‹› >> d 10-9 10-6 ~107 ~1010
Ultra-High (UHV)
‹› >> d 10-12 10-9 ~104 ~107
Extreme Ultra-High (XHV)
‹› >> d < 110-12 < 104
‹› is the mean free path,
d is the effective size of a vacuum chamber (in many cases 0.5 cm d 50 cm)
Oleg Malyshev CI PAS, October 2013 slide 6
• SI pressure Unit – Pascal (1 N/m2)
• Pa is used by all metrology labs, in Asia and ex-USSR
countries
• In Europe – mbar (100 Pa)
• In USA/Asia – Torr (133.322 Pa)
• Atmosphere = 1 bar = 105 Pa = 103 mbar 750 Torr
• Gas density unit - particles/m3
P – pressure, n – gas density (number gas density),
kB – Boltzmann coefficient, T – temperature.
Vacuum Units
BP nk T
Oleg Malyshev CI PAS, October 2013 slide 7
Vacuum required in the particle accelerators
High energy particles collide with residual gas molecules that results in:
• loss of particles,
• loss of the beam quality.
Examples of vacuum specification for a high energy particle accelerator:
• 100 h vacuum life time at I = 560 mA after 100 Ah conditioning (for DLS);
• P(N2 eqv) = 10-8 mbar after bakeout and a week of pumping (for a buster);
• n(H2 eqv) = 1015 m-3 after 2 years conditioning (for the LHC); etc...
H2
H2
H2O
CO2
CH4
CO Beam
CO
CH4
CO2
Oleg Malyshev CI PAS, October 2013 slide 8
• The main reason is beam-gas interaction (e.g.
scattering)
• Single pass machines
• Increases beam size (emittance)
• Increases radiation hazard
• Encourages recombination
• Stored beam machines
• Increases beam size
• Reduces beam lifetime
• Increases radiation hazard
Vacuum in Accelerators
Oleg Malyshev CI PAS, October 2013 slide 9
Interaction between the Beam and Residual Gas Molecules
Interaction
Inelastic
Elastic
),( pX Z
The beam current I decays with time t as:
where is the total beam lifetime given by
the beam lifetime beam due to different
Quantum, Touschek, particle lifetime, etc,
and gas lifetime defined as:
)/exp(0 tII
nvgas /1
gasbeam
111
Critera for ‘good vacuum’ for the accelerator is
Beam quality shouldn’t be affected by residual gas beamgas
Bremsstrahlung (e+, e-)
Ionisation energy loss (all particles)
Electron capture (low energy X+, XZ+)
Electron loss (X+, X-, XZ+)
Nuclear reactions
Single Coulomb scattering (all particles)
Multiple Coulomb scattering
Oleg Malyshev CI PAS, October 2013 slide 10
• All need Vacuum to a greater or lesser extent e.g.:
• 10-5 – 10-6 mbar in small linacs, Van de Graafs
• 10-7 – 10-8 mbar in proton synchrotrons
• 10-9 – 10-10 mbar in synchrotron light sources
• 10-11 – 10-12 mbar in antiproton accumulation rings
Examples of required vacuum in accelerators
Oleg Malyshev CI PAS, October 2013 slide 11
• “So if vacuum science is the science about nothing,
what does vacuum scientist know?”
• Where does gas come from?
• Leaks and leak detection, outgassing, induced desorption...
• How to suppress the gas sources?
• Choice of materials, cleaning, baking, coatings, mechanical design, etc...
• How to remove the gas out of vacuum system?
• Different types of pumps based on very different physics principles.
• How to measure vacuum?
• Different types of gauges for different pressure ranges, RGAs, indirect
(non-gauge) measurements…
• Vacuum system design
• Gas dynamics, surface physics and chemistry, material properties, a lot of
measurements, a lot of engineering.
Vacuum Science and Technology
Oleg Malyshev CI PAS, October 2013 slide 12
Gas Composition in the Atmosphere and in Vacuum
Atmosphere
(at sea level)
Unbaked
vacuum
chamber
Baked
vacuum
chamber
NEG coated
vacuum
chamber
At cryogenic
temperatures
(1 to 80 K)
N2 (78.1%) H2 H2 H2 H2
O2 (20.9%) H2O CO CH4 CO
H2O (0.1-1.0%) CO CO2 CxHy CH4
Ar (0.93%) CO2 CH4 CO CO2
CO2 (0.033%) CH4 CxHy
Atmospheric air is a mixture of gases with over 99% of nitrogen and
oxygen, while the rest of gas in UHV consist mainly of hydrogen.
The gas composition is varied depending on many factors: choice of material,
cleaning, baking, pumping system design, type of pumps, temperature,
photon, electron or ion bombardment of the surface and many others.
Oleg Malyshev CI PAS, October 2013 slide 13
What are usual considerations for vacuum
Required pressure P is defined by gas
desorption Q in the vessel and effective
pumping speed Seff.
In a simple case it is
Q
Pump,
S (l/s)
P
U (l/s)
1 1
eff
QP Q
S S U
e e ion ionQ qA
Thermal, photon, electron and ion
stimulated desorption
Oleg Malyshev CI PAS, October 2013 slide 14
A Few Simple Formulas for Vacuum
Pressure in complicated vacuum system is always higher
because the vacuum conductance, U, of vacuum chamber
should be taken into account. For example, for a long
vacuum chamber:
u Q S
0 L x
1( ) ;
L x UP x Q u
S u L
Oleg Malyshev CI PAS, October 2013 slide 15
A Few Simple Formulas for Vacuum
21
2
2CxC
u
xqP
u S
0 x
Gas load q can be distributed along the vacuum
chamber, in this case:
In a complicated vacuum system it is very difficult or
sometimes impossible to describe pressure by a simple
function but it is always necessary to know the gas loads,
pumping speed and geometry of vacuum system.
Oleg Malyshev CI PAS, October 2013 slide 16
• Long tube with length L >> a, where a - transversal dimension
• Average pressure depends on vacuum conductance u(L,a) of
the beam vacuum chamber
Usual accelerator vacuum chamber
1
12 2B
eff
LP qL k T
u S
S S S S
P
z
L
Oleg Malyshev CI PAS, October 2013 slide 17
The pumps can be divided:
• into three groups depending upon the vacuum range
• Roughing
• HV and VHV
• UHV and XHV
• and into three groups depending upon the pumping mechanism
of the pump
• Positive Displacement Vacuum pumps
• Kinetic vacuum pumps (Molecular pumps)
• Capture Vacuum pumps
Pumps
Oleg Malyshev CI PAS, October 2013 slide 18
• Positive Displacement Vacuum pumps
• Oil Sealed pumps
• Liquid Ring pumps
• Dry Vacuum pumps*
• Kinetic Vacuum pumps (Molecular pumps)
• Diffusion pumps
• Drag and Turbomolecular* pumps
• Capture Vacuum pumps (no exhaust !)
• Chemisorption pumps and getters (TSP, NEG*)
• Sputter Ion pumps*
• Cryopumps
* 1st choice pumps for accelerators
Pumps
Oleg Malyshev CI PAS, October 2013 slide 19
Specification of vacuum pumps includes:
• Working pressure range
• Pumping speed
• Maximum start up pressure
• Minimum pressure
• Capacity and regeneration conditions (for getters and cryopumps)
• Pump orifice and flange type
• Overall dimensions
• Mass
• Operation conditions
• Cable length
• Power supply parameters
• Cost
• …..
Pumps
Pressure Ranges of Vacuum Pumps Pressure (mbar)
10-13 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 100 101 102
10-13 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 100 101 102
Rotary Piston Mechanical pump
Oil-Sealed Mechanical pump
Scroll pump
Roughing pumps
HV pumps
UHV pumps
Roots Blower, Booster
Liquid Nitrogen Trap
Cryopump
Diffusion pump
Turbomolecular pump
Titanium Sublimation pump
Ion Sputter pump
Non evaporable getter
Non evaporable getter
Sorption pump
Diaphragm pump
Cryogenic pump
Oleg Malyshev CI PAS, October 2013 slide 21
Commonly used gauges can be separated by the method of
measurement:
• Deformation transducer:
• Bourdon tube
• Membrane gauges
• Capacitance manometer
• Hydrostatic transducer (U-tube)
• Thermal transducer
• Viscosity transducer
• Ionisation gauges
• Hot cathode gauge ionisation gauge, Bayard-Alpert
• Extractor ionisation gauge
• Cold Cathode gauges
• Penning gauge
• Inverted Magnetron gauge (SRS main gauge in recent years)
Vacuum Gauges
Oleg Malyshev CI PAS, October 2013 slide 22
Seldom used techniques to measure vacuum:
• Radio isotope transducer
• Flash filament, adsorption/desorption method
• Scattering of neutral atoms from a molecular beam
• Beam lifetime (in accelerators)
• Recharge of beam particles (trapped or lost electron)
• Photocathode lifetime (in GaAs photocathode gun)
• Residual gas luminescence
• Photo-ionisation
Vacuum Gauges
Oleg Malyshev CI PAS, October 2013 slide 23
Pressure Ranges of Vacuum Gauges Pressure (mbar)
10-13 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 100 101 102
10-13 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 100 101 102
Bourdon gauge
U-tube
Diaphragm gauge
Pirani gauge, Thermocouple
McLeod gauge
Penning gauge
Spinning rotor gauge
Capacitance
Cold cathode Discharge gauge
Hot Cathode Ionisation gauge, Bayard-Alpert
Non evaporable getter
Extractor Ionisation gauge, Modified Bayard-Alpert
Thermistor
Oleg Malyshev CI PAS, October 2013 slide 24
Residual Gas Analysers
Total pressure measurements are
not sufficient to characterise
vacuum, for example:
If vacuum beam lifetime of N hrs
corresponds to 1·10-9 mbar in
nitrogen equivalent this will be
either 8·10-9 mbar for H2
or 1.4·10-9 mbar for CH4
or 1·10-9 mbar for CO
or 6.4·10-10 mbar for CO2
Generally, the heavier the gas
molecules are, the better the
vacuum is required.
There are a few methods to
analyse the gas composition
based on different behaviour of
ionised molecules in different
configurations of electric and
magnetic fields:
Magnetic Sector Spectrometer
Quadrupole Mass Analyser
Cycloidal Mass Spectrometer
Omegatron
or in kinetic properties:
Time-of-Flight Mass Analyser
Oleg Malyshev CI PAS, October 2013 slide 25
• Compatibility with the required vacuum range have to be always
checked for:
• Vacuum chamber and components (elbows, T-pieces, crosses, etc.)
• Flanges and gaskets (ISO, CF, KF...)
• Bellows
• Electrical feedthroughs
• Liquid feedthroughs for cooling water or LN2, or LHe
• Motion feedthroughs and manipulators
• Valves
• (All metal) right angle valves
• (All metal) gate valves
• Needle valves and UHV fine leak valves
• Other vacuum components to be considered
• Power supplies,
• Controllers for vacuum components
• Software for vacuum equipment
Other Vacuum Components
Oleg Malyshev CI PAS, October 2013 slide 26
Mechanisms Contributing to Outgassing
Atmosphere
Vacuum
Thermal
Desorption
Recombination
So to reduce outgassing,
we must inhibit or reduce
these processes
Vaporisation
Adsorption
Permeation
Surface Diffusion Bulk
Diffusion
Real Leaks
Virtual
Leaks
Back-
streaming
Oleg Malyshev CI PAS, October 2013 slide 27
• Leaks and leak detection
• Residual gas
• Thermal outgassing
• Choice of material for UHV system
• Vacuum components cleaning and pre-treatment
• Equilibrium vapour pressure
• Beam induced gas desorption
• Photon simulated desorption
• Electron simulated desorption and BIEM
• Ion simulated desorption and ion induced pressure instability
• Dust particles
• NEG coated vacuum chamber
• Cryogenic vacuum chamber: recycling and cracking
Sources of Gas in a Vacuum System
Oleg Malyshev CI PAS, October 2013 slide 28
The aim is building a vacuum-tight vessel, i.e. no gas
from atmosphere should be able to find its way into the vessel,
there must be no leaks to atmosphere.
Sources of Gas in a Vacuum System: Leaks
To minimise the possible leaks it is necessary:
• to engineer an appropriate design (both mechanical and vacuum)
• to use vacuum-tight components (checked by vacuum support)
• to perform quality welding and careful assembly of components
• to use tested types of valves and flanges, only new gaskets
After the production of the vacuum vessel,
assembly of components and installation, a
leak detection is needed to locate possible
leaks and to guarantee the required pressure
will be reached.
Oleg Malyshev CI PAS, October 2013 slide 29
Thermal desorption
(or thermal outgassing) means:
• Molecules diffusing through the bulk
material of the vacuum chamber,
entering the surface and desorbing
from it
• Molecules adsorbed on the surface
(initially or after the air venting) and
desorbing when vacuum chamber is
pumped
Outgassing rate depends on many
factors: choice of material,
cleaning procedure, pumping
time, etc...
Sources of Gas in a Vacuum System: Thermal Desorption
Air Vacuum
Oleg Malyshev CI PAS, October 2013 slide 30
The cleaning procedure may include the following operations:
• Degreasing
• Washing
• Mechanical or electrical polishing
• Chemical cleaning/etching/passivation
• Pre-baking or Vacuum oven firing
• Argon discharge cleaning
• Surface coating
• In-situ baking
The exact procedure depends upon the material, its history,
required vacuum, contaminant(s), cost, availability of certain
facilities and cleaning agents.
Cleaning and Pre-Treatment of Vacuum Components
Oleg Malyshev CI PAS, October 2013 slide 31
Choice of Material for UHV System
Material t [mbar l/(scm2)]
Aluminium (fresh ) 910-9
Aluminium (20h at 150C) 510-13
Cupper (24h at 150C) 610-12
Stainless steel (304) 210-8
Stainless steel (304, electropolished) 610-9
Stainless steel (304, mechanically polished) 210-9
Stainless steel (304, electropolished, 30h at 250C ) 410-12
Perbunan 510-6
Pyrex 110-8
Teflon 810-8
Viton A (fresh) 210-6
The outgassing rates may vary in order of magnitudes depending on factors:
choice of material, cleaning procedure, history of material, pumping time, etc...
Not all materials are compatible with UHV and XHV system!
The example of the outgassing rates after one hour pumping:
Oleg Malyshev CI PAS, October 2013 slide 32
Could an Accelerator Be Built in Space?
A 1-m and 10-m long circular beam
‘vacuum’ chamber with a diameter d
somewhere in space where the pressure is
10-12 mbar (i.e. 2.5107 molecules/cm3).
For thermal desorption only:
t = 10-11 mbarl/(scm2).
To fulfil the vacuum
requirements for circular
accelerators would be not an
easy task even in Space!!!
Oleg Malyshev CI PAS, October 2013 slide 33
Equilibrium Vapour Pressure.
When liquid, condensed gas or a very porous material is present in a
vacuum chamber the pressure is limited by the equilibrium vapour pressure:
Sources of Gas in a Vacuum System:
Material Temperature, K Equilibrium pressure, mbar
Mercury 293 210-3
Pump oil 293 10-6 to 10-8
Water 293 20
H2 4.2 810-7
CO2 77.8 210-8
Oleg Malyshev CI PAS, October 2013 slide 34
• Leaks and leak detection
• Residual gas
• Thermal outgassing
• Choice of material for UHV system
• Vacuum components cleaning and pre-treatment
• Equilibrium vapour pressure
• Beam induced gas desorption
• Photon simulated desorption
• Electron simulated desorption and BIEM
• Ion simulated desorption and ion induced pressure
instability
• Dust particles
• NEG coated vacuum chamber
• Cryogenic vacuum chamber: recycling and cracking
Sources of gas in a vacuum system
Oleg Malyshev CI PAS, October 2013 slide 35
Sources of Gas in a Vacuum System: PSD
e- H2
H2
H2O
CO2
CH4
CO
Photon stimulated desorption (PSD) is
one of the most important sources of gas
in the presence of SR.
Gas molecules may desorb from a
surface when and where photoelectrons
leave and arrive at a surface
e-
The same as thermal
desorption, PSD
depends on:
• Choice of material
• Cleaning procedure
• History of material
• Pumping time
Additionally it depends
on
• Energy of photons
• Photon flux
• Integral photon dose
• Temperature
Oleg Malyshev CI PAS, October 2013 slide 36
Sources of Gas in a Vacuum System: PSD
Photodesorption yields, (molecules/photon), as a function of
accumulated photon dose, D, for different materials measured up to
certain doses, these results are extrapolated for use in the design
of new machines
PSD yield for CO for prebaked and in-situ baked stainless steel vacuum chambers.
Yields for doses higher then 1023 photons/m (1 to 10 Amphrs for diamond) are extrapolations.
165.0,00
D
D
Photodesorption yield as
function of accumulated photon
dose can be described as:
Oleg Malyshev CI PAS, October 2013 slide 37
Sources of Gas in a Vacuum System: PSD
Photodesorption yields, (molecules/photon), as a function
of accumulated photon dose for different materials for
vacuum chamber (data from A. Mathewson, CERN):
Oleg Malyshev CI PAS, October 2013 slide 38
PSD as a function of critical photon energy
O.B. Malyshev et al. J. Vac. Sci. Technol. A 25 (2007) 791
Oleg Malyshev CI PAS, October 2013 slide 39
Sources of Gas in a Vacuum System: ESD
Electron stimulated desorption (ESD) can be a
significant gas source in a vacuum system in a number
of cases when the electrons bombard the surface.
The same as thermal
desorption and PSD,
ESD depends on:
• Choice of material
• Cleaning procedure
• History of material
• Pumping time
Additionally it depends on:
• Energy of electrons
impacting the surface
• Electron flux to the
surface
• Integral electron dose
• Temperature O.B. Malyshev, C Naran. Vacuum 86 (2012) 1363
Oleg Malyshev CI PAS, October 2013 slide 40
ESD as a function of electron energy
O.B. Malyshev et al. J. Vac. Sci. Technol. A 28 (2010) 1215
10 100 1 103
1 104
1 106
1 105
1 104
1 103
0.01
0.1
H2
CH4
CO
CO2
H2 fit
CH4 fit-1
CH4 fit-2
CO fit
CO2 fit
Energy [eV]
Yie
ld [
Mo
lecu
les/
elec
tro
n]
Oleg Malyshev CI PAS, October 2013 slide 41
Sources of Gas in a Vacuum System: ESD and BIEM
H2
H2O
CO2
CH4
CO
Beam induced electron multipacting (BIEM) and build up of electron cloud (e-
cloud) are significant problems in a vacuum chamber with a positive charged
beam: • a free electron is accelerated towards the first positively charged bunch;
• when the bunch passes the accelerated electron moves with accumulated energy up to
hundreds of eV towards the opposite wall and strikes it, this causes: • ESD, which results in a pressure rise
• Secondary electrons are then accelerated by the next bunch
• An electron cloud space charge can increase the beam emmitance
+
e-
e-
+ +
e- e-
e-
e- e-
e- e-
e- e- e- e-
e-
e-
Oleg Malyshev CI PAS, October 2013 slide 42
Ion stimulated desorption (ISD) can be a significant gas source in a
vacuum system where the ion beam bombards the surface. There is
very little data, most work has been done at CERN.
The same as thermal desorption, PSD and ESD, the ISD depends on:
choice of material, cleaning procedure, history of material and
pumping time.
It is also depends on:
• Mass, charge and energy of ions impacting the surface
• Ion flux to the surface
• Integral ion dose
• Temperature
Sources of Gas in a Vacuum System: ISD
Oleg Malyshev CI PAS, October 2013 slide 43
Ion Induced Pressure Instability
H2+
COH2
CH4
CO2
+
where
Q = gas desorption,
Seff = effective pumping speed,
= ion induced desorption yield
= ionisation cross section,
I = beam current.
IIe
Q
e
IS
Qn
ceff
e
ISeff
eSI
eff
c
When I Ic (or )
then gas density (pressure) increases
dramatically!
When the positive charged beam particles
colliding with residual gas molecules ionise
them, these ions are accelerated towards the
vacuum chamber wall. This causes ion
induced gas desorption, the pressure rises
and more molecules will be ionised,
accelerated and bombard the wall…
Oleg Malyshev CI PAS, October 2013 slide 44
Heavy Ion Induced Pressure Instability
The heavy ion beam particles colliding with residual gas molecules may
lose or trap an electron and be lost in the bending magnet. These very high
energy ions or neutrals bombard the vacuum chamber wall which results in
a very high desorption yield (up to a few thousands molecules per ion). This
causes further gas desorption, resulting in a pressure rise and more lost
beam particles bombarding the wall…
H2
H2O
CO
A+ Ao
A+
A+
< --- Dipole --- > | < --------------------- Straight ----------------------------- >
Oleg Malyshev CI PAS, October 2013 slide 45
Dust Particles in a Vacuum Chamber
The dust micro-particle in the beam vacuum chamber
might be ionised by photons or photoelectrons and then
be trapped by the beam electric field. This may cause the
significant loss of the beam.
Potential sources of the dust micro-particles:
• Dust from the atmosphere during storage,
installation or venting
• Dust from moving parts: manipulators,
bellows, valves, etc
• Micro-particles from getters, cryosorbers
• Micro-particles from working Ion Pumps.
How to avoid:
• Proper cleaning and storing of components
• Positioning of potential dust sources in regard to the
beam
• Clean environment when vacuum chamber is open
• Clean gas for venting (for example, boil-off nitrogen)
Oleg Malyshev CI PAS, October 2013 slide 46
Two concepts of the ideal vacuum chamber
Traditional:
• surface which outgasses as little as
possible (‘nil’ ideally)
• surface which does not pump
otherwise that surface is
contaminated over time
Results in
• Surface cleaning, conditioning,
coatings
• Vacuum firing, ex-situ baling
• Baking in-situ to up to 300C
• Separate pumps
‘New’ (C. Benvenuti, CERN, ~1998):
surface which outgasses as little as
possible (‘nil’ ideally)
a surface which does pump,
however, will not be contaminated
due to a very low outgassing rate
Results in
NEG coated surface
There should be no un-coated parts
Activating (baking) in-situ at 150-
180C
Small pumps for CxHy and noble
gases
Oleg Malyshev CI PAS, October 2013 slide 47
NEG coated vacuum chamber under SR
Dynamic pressure rise for the Stainless Steel (baked at 300C for 24 hrs)
and TiZrV coated vacuum chambers (activated at 190C for 24 hrs)
Oleg Malyshev CI PAS, October 2013 slide 48
• Reduces gas desorption:
• A pure metal film ~1-m thick
without contaminants.
• A barrier for molecules from
the bulk of vacuum chamber.
• Increases distributed pumping
speed, S:
• A sorbing surface on whole
vacuum chamber surface
S = Av/4; where – sticking probability,
A – surface area,
v – mean molecular velocity
What the NEG coating does
Vacuum NEG Subsurface Bulk
Coating Layers
Oleg Malyshev CI PAS, October 2013 slide 49
• A and B are
vacuum
chamber
without a liner
Vacuum Chamber at Low Temperature: PSD and Recycling
C and D are
experiments
with a liner with
pumping holes
E is the beam
lifetime limit
SR
SR
Low temperature does not
necessary provides good
vacuum in a vacuum chamber!
Oleg Malyshev CI PAS, October 2013 slide 50
Vacuum Chamber at Low Temperature
Average removal coefficient
as a function of surface
coating
10 -6
10 -5
10 -4
10 -3
10 -2
10 18 10 19 10 20 10 21 10 22
Yie
ld (
mo
lec
ule
s/p
ho
ton
)
Dose (p hotons/m)
H2
CO
CO 2
CH 4
Photodesorption yield at 77
K as a function of photon
dose
Primary photodesorption Secondary photodesorption:
recycling and cracking
Oleg Malyshev CI PAS, October 2013 slide 51
Vacuum Chamber at Low Temperature:
Molecular Cracking There are four main photodesorbed gases in a cryogenic
vacuum chamber: H2, CH4, CO and CO2, and two of them
(CH4 and CO2) can be cracked by photons, : ~
24 2~ HCCH 22 2~2 OCOCO
The additional amount of H2, CO and O2 appears in a
vacuum chamber due to photo-cracking of CH4 and CO2.
The efficiency of photo-cracking of CH4 and CO2 is about
10 times higher then CH4 and CO2 desorption from their
cryosorbant!
and
Oleg Malyshev CI PAS, October 2013 slide 52
Vacuum Chamber at Low Temperature: P and n!
• Pressure and gas density :
• Two vessels at temperatures T1 and T2: T1 > T2
TnkP B
and
21
2
121 PP
T
TPP
21
1
221 nn
T
Tnn
T1
P1
n1
T2
P2
n2
Molecular regime:
21
1
22121 nn
T
TnnPP Viscous regime:
2211 vnvn
Oleg Malyshev CI PAS, October 2013 slide 53
Tools:
• Kinetic Theory of Gases
• Gas Flow Through Tubes and Orifices
• Results of Dedicated Experiments
• Specially performed experiments
• Analytical Approximations
• Numerical Methods
• PC
• Our Brains
• … and Our Experience
Calculation and Design of Vacuum System
Oleg Malyshev CI PAS, October 2013 slide 54
“Vacuum is not exact science”
A.G. Mathewson
• Desorption yields may differ (factor 2 or even more) for
vacuum components made of the same material after exactly
the same cleaning procedure and treatments
• Mechanical tolerances may result in a difference between
estimated and real vacuum conductance
• Results of Experiments: 10-20% accuracy for all gauges at
UHV
• Approximations: extending of experimental results on a few
order of magnitude, - it is just a reasonable guess!
• Pumping speed is also approximation: up to +60% of nominal
pumping speed after baking but -30% to -50% at UHV
Uncertainties in Calculation of Vacuum System
Oleg Malyshev CI PAS, October 2013 slide 55
Diamond LS:
• Thermal and Photon
Stimulated Desorption
• Conductance limited
pumping
• High photon intensity on
crotch absorbers
• No in-situ baking: use of
photons scrubbing,
conditioning for 100 A·hrs.
Calculation and Design of Vacuum System:
Examples
Oleg Malyshev CI PAS, October 2013 slide 56
LHC (CERN):
Vacuum chamber at 1.9K, 4.5K,
78K, 300K, transitions at the ends,
beam screen at 5K to 20K.
Vacuum problems:
1st year: PSD (to reduce SEM)
2nd year: PSD + ESD (due to BIEM)
3rd year: normal operation
Vacuum system designed with
consideration to avoid Ion Induced
Pressure Instability
Calculation and Design of Vacuum System:
Examples The H2 equivalent average gas density in the vacuum chamber of the IR1&5.
<neff> (mol/m3),
1st year 2nd year 3rd yearElement L, (m) beginning
I = 0.2 In,
We=0
after 70 days
I = 0.2 In,
We=0
beginning
I ~ 0.3 In,
We=0.2W/m
+10 days
I ~ 0.3 In,
We=0.2W/m
+90 days
I = In,
We=40mW/m
Intercon 0.83 1.51014
21013
21015
21014
11014
Q1 7.70 21013
31012
51013
81012
61012
Intercon. 1.40 21013
31012
31015
31014
1.51014
Q2 12.58 21013
31012
31013
51012
31012
Intercon. 1.90 21013
31012
31015
31014
1.51014
Q3 8.40 21013
31012
51013
81012
61012
DFBX 3.23 21013
31012
31015
31014
1.51014
D1 (RT) ~25 11015
21013
61016
61014
51012
Conus'(RT)
~57 ~1012
~1012
~1012
~1012
~1012
TAN (RT) 4.9 11016
11014
91016
81014
71012
Ring 1. The beam from MB to IP.
VC (RT) 7.50 31014
11013
71016
61014
51012
D2 11.67 <1012
<1012
61015
31014
1.51014
Q4 8.65 31012
91011
61014
41013
21013
VC (RT) 19.38 11015 ~10
12610
16610
14510
12
Q5 8.25 61012
1.21012
51014
41013
21013
VC (RT) 24.76 21015
21013
61016
61014
51012
Q6 8.25 1.51013
21012
41014
41013
21013
VC (RT) 17.73 41015
2.51013
61016
61014
51012
DFBA 8.58 71013
71013
61014
31014
1.51014
Q7 9.00 1.51014
1.21013
1.81013
1.61013
21013
DS&Arcs 21014
11013
1.51014
31013
41012
Ring 2. The beam from IP to MB.
VC (RT) 7.50 <1012
<1012
71016
61014
51012
D2 11.67 <1012
<1012
61015
31014
1.51014
Q4 8.65 <1012
<1012
61014
41013
21013
VC (RT) 19.38 11015 ~10
12610
16610
14510
12
Q5 8.25 31012
1.21012
51014
41013
21013
VC (RT) 24.76 81014
11013
61016
61014
51012
Q6 8.25 21012
11012
51014
41013
21013
VC (RT) 17.73 51014
11013
61016
61014
51012
DFBA 8.58 21012
11012
61014
31014
1.51014
Q7 9.00 21012
11012
1.81013
1.61013
21013
Oleg Malyshev CI PAS, October 2013 slide 57
• It is a very hard job: to do nothing, i.e. vacuum
• It requires :
• Comprehensive knowledge of Gas Dynamics, Surface
Physics and Chemistry
• Skilled experimental scientists
• Experience to deal with real problems in a working machine
• Knowledge of operational principles of all vacuum equipment
• Expertise of new equipment
• A lot of engineering and drawings
• Lease closely with numerous groups
• Strong muscles to lift pumps and to bolt flanges!
Conclusions
Oleg Malyshev CI PAS, October 2013 slide 58
Select Bibliography
• CERN 99-05: CAS - CERN Accelerator School: Vacuum Technology, Snekersten, Denmark, 1999, (http://cas.web.cern.ch/cas/CAS_Proceedings-DB.html)
• CAS - CERN Accelerator School : Vacuum in Accelerators, Platja d'Aro, Spain, 2006, to be published (http://cas.web.cern.ch/cas/Spain-2006/Spain-lectures.htm)
• Handbook of Vacuum Technology, Edited by K Jousten, Wiley-VCH, 2008, ISBN 978-3-527-40723-1
• Basic Vacuum Technology (2nd Edn), A Chambers, R K Fitch, B S Halliday, IoP Publishing, 1998, ISBN 0-7503-0495-2
• A User’s Guide to Vacuum Technology (3rd Edn), J F O’Hanlon, Wiley- Interscience, 2003. ISBN 0-471-27052-0
• Modern Vacuum Physics, A Chambers, Chapman & Hall/CRC, 2004, ISBN 0-8493-2438-6
• The Physical Basis of Ultrahigh Vacuum, P A Redhead, J P Hobson, E V Kornelsen, AIP, 1993, ISBN 1-56396-122-9
• Vacuum Science and Technology, Pioneers of the 20th Century, AIP, 1994, ISBN 1-56396-248-9
Oleg Malyshev CI PAS, October 2013 slide 59
First considerations for vacuum design
• Lattice design
• Location and required space for key components:
• Magnets, collimators,
• Detectors,
• SR absorbers
• Beamlines
• Choice of materials and coatings
• Electric and magnetic properties
• Vacuum chamber wall thickness
• Beam size (close orbit) => Apertures (lower limit)
• Magnet design => Apertures (upper limit)
• Preliminary mechanical layout
• Specific components
• E-gun; gas target, etc.
• Specific problems
• Electron cloud; ion instability, ion induced pressure instability
• High power loss, high radiation damage, etc.
Possible locations of pumps,
distance between pumps
Vacuum chamber
cross section
Oleg Malyshev CI PAS, October 2013 slide 60
First considerations for vacuum design
• For the storage ring Lattice design
• Location and required space for key components:
• Magnets, collimators,
• Detectors,
• SR absorbers
• Beamlines
• Choice of materials and coatings
• Electric and magnetic properties
• Beam size (close orbit) => Apertures (lower limit)
• Magnet design => Apertures (upper limit)
• Preliminary mechanical layout
• Specific components
• E-gun; gas target, etc.
• Specific problems
• Electron cloud; ion instability, ion induced pressure instability
• High power loss, high radiation damage, etc.
Oleg Malyshev CI PAS, October 2013 slide 61
Vacuum chamber cross sections
Beam pipe
Circular or elliptical
4 mm d, a, b 200 mm
Vacuum chamber with an antechamber
for larger vacuum conductance, U,
and for SR and the SR absorber
Distributed pumping In dipole magnetic field With NEG strips
(LEP in CERN)
d a
b
Oleg Malyshev CI PAS, October 2013 slide 62
Initial rough calculations
• Roughly estimate an internal surface area
• A (m2) =
• Assume an achievable outgassing rate
• qth (mbarl/(sm2)) • for 316LN qth = 10-15 mbarl/(sm2)
• Determine total required pumping speed, S (l/s) to
reach the base pressure, PB
• typical specification for a storage ring is 10-9 mbar
• Since conductance was not considered here, this a
lower limit estimate of total required pumping speed.
th th
B B
Aq QS
P P
Oleg Malyshev CI PAS, October 2013 slide 63
Initial rough calculations
• Work out the significance of any stimulated desorption
• Location
• Direct
• Scattered
• Intensity
• Desorption coefficients
• This will result in a dynamic gas load, Qd (integrated
along the machine)
• If Qd << Qth, it may be ignored and Pd~PB.
• Otherwise, the minimum total required pumping speed,
Sd, calculated from d th
d
d
Q QS
P
Oleg Malyshev CI PAS, October 2013 slide 64
Initial Rough Design
• Determine type of pumps to
use
• Sputter Ion pump (SIP)
• Lumped
• Distributed
• TSP
• NEG
• Lumped
• Distributed
• Coatings
• Turbo-molecular pump (TMP)
• Cryo-pumping
• Lumped
• Distributed
• From a knowledge of what
is available, work out how
many pumps of each type
will be required overall.
• Then, using the preliminary
mechanical layout, draw up
a rough vacuum design
layout.
Oleg Malyshev CI PAS, October 2013 slide 65
• Long tube with length L >> a, where a - transversal dimension
• Average pressure depends on specific vacuum conductance
u(L,a) of the beam vacuum chamber
Average pressure calculations
23; 121
12 eff
qL qLP u d
u S
P
z
L
Oleg Malyshev CI PAS, October 2013 slide 66
Towards the final design
• If stimulated desorption is important, then it is
necessary to calculate the conditioning behaviour of
the machine.
• Calculate the SR critical energy
• Calculate photon flux
Oleg Malyshev CI PAS, October 2013 slide 67
SR from a dipole magnet
=> This is for an ideal orbit and is very sensitive to the real beam position
Oleg Malyshev CI PAS, October 2013 slide 68
Example: photon stimulated desorption (PSD)
PSD yields, (molecules/photon), as a function of accumulated photon
dose, D, for different materials measured up to certain doses, these results
are extrapolated for use in the design of new machines
PSD yield at room temperature as
function of accumulated photon
dose can be described as:
165.0,00
D
D
PSD yield for CO for prebaked and in-situ baked stainless steel vacuum chambers.
Yields for doses higher then 1023 photons/m (1 to 10 Amphrs for Diamond LS) are extrapolations.
=> Input data for a gas dynamic model are very approximate
Oleg Malyshev CI PAS, October 2013 slide 69
PSD yield and flux as a function of distance from a dipole magnet
=> These data for each gas can be used in the gas dynamics model.
=> Uncertainty in desorption flux is less than in photon flux and desorption yield
Oleg Malyshev CI PAS, October 2013 slide 70
• These results, formulae and data are sufficient for the first
rough estimations of average pressure for your design.
Average pressure calculations