interpretation of gas delivery diagrams. gas delivery diagram symbolsgas panel 1 right side
TRANSCRIPT
Interpretation of Gas Delivery Diagrams
Gas delivery diagram symbols—gas panel 1 right side
Gas delivery diagram interpretation—gas panel 3
Gas delivery diagram interpretation—gas panel 2
First work out the I/Os;Then work out the mainprocess gas flow routeincluding the choking valves;See next slide for results
ChamberPump
Gas delivery diagram interpretation
Process chamber
V5
MFC 2
V20V22 Hand valve
Gas 2 supply
MFC 4
V40V42 Hand valve
Gas4 supply
V4
PSH3
Gas delivery diagram interpretation—gas panel 2
Now we will deal with theside branches. But we willMap it out more symmetricallyAround the I/Os. See nextSlide
ChamberPump
Gas delivery diagram interpretation—gas panel 2
MFC
N2pump
V4 V1
V2 V3
V85
outlet inlet
V42 V41
PSH9PSH2
Forward purging: V4 and V1 open, V41, V42 open, all others closed.Reverse purging: V2 and V3 open, V41, V42 open, all others closed, V85 is the pump ballast valve—dummy load for the pump when chamber iso valve is closed.