October 15, 2018 14:45-16:15 IB012

Hiroshi Amanoamano@nuee.nagoya-u.ac.jp

Semiconductor Devices 1st

Future automotive systems

At urban area

On the freeway

EV?

NIKKEI ELECTRONICS 12-23 2013

２０２XAutonomous driving

Wirelesscharging

Automotive Engineering Graduate Program

http://www.echo.nuee.nagoya-u.ac.jp/~amano/H30/G30/index.html

1/54

What do you learn ? Fundamentals of Automotive electronicsAutomotive electronics are any electrically-generated systems used in road vehicles, such as: carputers(Computers in a Car), telematics(=Telecommunication + Informatics), in-car entertainment systems, etc.

Automotive electronics originated from the need to control engines. The first electronic pieces were used to control engine functions and were referred to as engine control units (ECU). As electronic controls began to be used for more automotive applications, the acronym ECU took on the more general meaning of "electronic control unit", and then specific ECU's were developed. Now, ECU's are modular. Two types include engine control modules (ECM) or transmission control modules (TCM).A modern car may have up to 100 ECU's and a commercial vehicle up to 40.Automotive electronics or automotive embedded systems are distributed systems, and according to different domains in the automotive field, they can be classified into:1.Engine electronics2.Transmission electronics3.Chassis electronics4.Active safety5.Driver assistance6.Passenger comfort7.Entertainment systems2/54

Text book

PaperbackSemiconductor Devices: Physics and Technology, 3rd Edition International Student VersionISBN : 978-0-470-87367-0592 pagesAugust 2012, ©2011$236.95

Simon Min Sze Ming-Kwei Lee

3/54

Additional Reading Physics of low dimensional semiconductors, J. H. Davis (Springer) The Physics of Semiconductors, Marius Grundmann (Springer) Basic Semiconductor Physics, C. Hamaguchi (Springer)

¥11,419 ¥13,767 ￥10,715

4/54

2018 G30 Automotive Engineering Graduate ProgramNo. Date Lecturer Topic1 Oct. 15 Amano Introduction and fundamental physics2 Oct. 22 Amano Energy bands and carrier concentration3 Oct. 29 Amano Carrier transport phenomena4 Nov. 5 Amano p-n junction5 Nov. 12 Ohno Bipolar transistors6 Nov. 19 Ohno MOS capacitor and MOSFETs I7 Nov. 26 Amano Exam / Laboratory tour- Nov. 29 - -8 Dec. 3 Ohno MOS capacitors and MOSFETs II9 Dec. 10 Ohno Power devices and mircrowave devices10 Dec. 17 Ohno Exam / Laboratory tour- Dec. 26 - -11 Jan. 8 Kondo Light emitting diodes and lasers12 Jan. 21

It may change to Dec.26Kondo Photodetectors and solar cells

13 Jan. 28 Kondo Fabrication processes14 Feb. 4 Kondo Exam / Laboratory tour

Amano Ohno Kondo5/54

Grading:

Reports or Examination(or Paper test) ＝ 100%

S:100-90 points, A:89-80 points, B:79-70 points, C:69-60 points, F:

7/54

What will you learn in this lecture? iPhone X

Copyright © 2018 Apple Inc. All rights reserved.

8/54

VCSEL in iPhone X

https://www.eetimes.com/document.asp?doc_id=1332530

WHAT is VCSEL?

Facial recognition = Face ID

VCSEL: Vertical Cavity Surface Emitting Laser

9/54

テキスト What is VCSEL?

【EE Times Japan】

VCSEL array

10/54

Detailed structure of VCSEL

25 November 2014, SPIE Newsroom. DOI: 10.1117/2.1201411.005689

DBR: Distributed Bragg Reflector

Short cavity

11/54

Who invented VCSEL?

Professor Kenichi IgaJapanese Journal of Applied PhysicsVol. 47, No. 1, 2008, pp. 1–10©2008 The Japan Society of Applied Physics

12/54

What will you learn in this lecture?

We will not discuss details of the process technology of LED, EEL, VCSEL, but will discuss1. Fundamental physics in active area, such as bandgap, pn junction, doping, double

heterostructure, quantum wells, optical process such as radiative and non radiativerecombination, gain, etc.

2. Fundamental physics in waveguide structures and mirrors

Royal Swedish Academy of Sciences25 November 2014, SPIE Newsroom. DOI: 10.1117/2.1201411.005689

©2018 Photonics Media, 100 West St., Pittsfield, MA, 01201 USA

http://bazyd.com/continue-to-the-previous-section-is-iphone-x-hurting-your-eyes/

beam divergenceEmission spectrum

According to CARB(California Air Resources Board) ’s baseline scenario, in 2020, 3 percent of sales will be plug-in hybrids (PHEV) and 1 percent will be battery electric vehicles (BEV). Conventional hybrids (HEV) completely phase out in 2040. Electric cars and fuel cell vehicles (FCV) take over in 2050.

California’s Green Car Roadmap to 2050

13/54

http://priuschat.com/threads/time-to-come-clean-about-hydrogen-fuel-cell-vehicles.141737/

California’s Green Car Roadmap to 2050Well (Oil, Natural gas)

14/54

http://www.electronicproducts.com/Digital_ICs/Microprocessors_Microcontrollers_DSPs/Google_s_driverless_car_to_boost_revenue_for_semiconductors.aspx#.U6_ttYmKDb0

By Luca De Ambroggi and Akhilesh Kona, IHS Technology

Autonomous Driving

15/54

Automotive semiconductors in today’s vehicle

Intelligent power device

16/54

http://articles.sae.org/9503/

MCU : multipoint control unit

ASIC : application-specific integrated circuit

MUXING : Multiplexing

Market revenue

17/54

Automotive sensors in today’s vehicle

(Copyright 2012 IHS Inc.)

The number of automotive sensors in a single vehicle has been steadily rising over time. According to the MEMS Journal, each new automobile has 60-100 sensors on-board measuring a very broad range of parameters, including temperature, humidity, light, pressure, fluid levels, positioning, engine combustion/detonation, acceleration, speed, lamp status, oxygen flow and compass direction (geomagnetic).

http://www.chipestimate.jp/tech-talks/2013/12/03/271-Optimizing-Sensor-Performance-with-1T-OTP-Trimming

MEMS: Micro Electro Mechanical Systems

18/54

Automotive sensors in today’s vehicle

19/54

Daytime running lamp （Europe and Japan）

Side turn lamp

・Side protection foot lamp

・Door mirror foot lamp

High mount stop lamp

・Stop lamp

・Tail lamp

・Rear turn lamp

・Back lamp

・Rear fog lamp

・Head lamp

・Position lamp

・Fog lamp

・Cornering lamp

License lamp

Automotive lightings in today’s vehicle - exterior -

20/54

Automotive lightings in today’s vehicle - interior -

Map lamp & Seat spot lamp

Reading lamp & seat spot lamp

Courtesy lamp

Luggage lamp

Vanity lamp

Foot lamp Front & Rear

Seat belt buckle lampGlove box lamp

Inside handle lamp

Steering lamp

Instrument panel

Car navigation

21/54

Tail lamp 　　　０．５ 　　　１０ 　　　９．５ ０．３３ ３Stop lamp 　　　８．６ 　　　４２ 　　３３．４　 ０．２７ ９

　　　２．９ 　　　２１ 　　１８．１　 ０．２７ ５　　　４．３ 　　　４２ 　　３７．７　 ０．２７ １０　

Rear Turnlamp 　　　８．６ 　　　４２ 　　３３．４　 ０．１０ ３Backlamp 　　１２．０ 　　　４２ 　　３０．０　 ０．０２ 1License lamp 　　　０．４ 　　　１０ 　　　９．６　 ０．３３ ３Rear Foglamp 　　１０．１ 　　　２１ 　　１０．９　 ０．０１ ０Side Turnlamp 　　　２．９ 　　　１０ 　　　７．１　 ０．１０ １ Fotlamp 　　　１．４ 　　　１０ 　　　８．６　 ０．０１ ０Headlamp（Halogen Hi　　４５．０ 　　１２０ 　　７５．０　 ０．０２ ２Headlamp（Halogen Lo 　　４５．０ 　　１１０ 　　６５．０　 ０．２０ １３　Headlamp（ＨＩＤ） 　　８０．０ 　　　７０ 　－１０．０　 ０．２０ －２　Daytime Runninglamp 　　２６．０ 　　１００ 　　７４．０ ０．６６ ４９　Front Foglamp 　　３５．０ 　　１１０ 　　７５．０ ０．０１ １Positionlamp 　　　０．４ 　　　１０ 　　　９．６ ０．３３ ３Front Turnlamp 　　２８．８ 　　　４２ 　　１３．２ ０．１０ １Roomlamp 　　　０．７ 　　　　８ 　　　７．３ ０．０３ ０

　　　０．５ 　　　　８ 　　　７．５ ０．０１ ０　　　０．２ 　　　　５ 　　　７．８ ０．０１ ０

Vanitylamp 　　　０．２ 　　　　８ 　　　７．８ ０．０３ ０Assumption Red ＬＥＤ ２９ｌｍ/W

Amber ＬＥＤ ２５ｌｍ/WWhite ＬＥＤ ７０ｌｍ/WＤＣ－ＤＣ Converter Efficiency ８０％ in White LED

Position Lamp

RearHighmount Stoplamp

Side

Front

Interior Maplamp

ReductionIndex

ＬＥＤ（W) Bulb（W）Power

Reduction（W)Frequency

Automotive lightings in today’s vehicle - advantage of using LED -

22/54

Laser headlight

https://clubmini.jp/15478

BMW i8

23/54

https://clubmini.jp/15478

http://www.gistrategies.com/what-can-smart-cars-learn-from-smart-phones/

Automotive electronics cost

24/54

What should you learn ?

1. What is semiconductor?2. How to make semiconductor devices?3. How to use semiconductor devices?

25/54

26/54 http://www.sciencegeek.net/tables/tables.shtml

What is semiconductors?

27/54

What is semiconductors?

28/54

http://www.sei.co.jp/newsletter/2009/07/3a.htmlM. Kasuu、NTT Technical Journal 2004.1、p.66

Diamond crystal

Even diamond is semiconductor

What is semiconductors?

http://hyperphysics.phy-astr.gsu.edu/hbase/chemical/eleorb.htmlhttp://surf.ml.seikei.ac.jp/~nakano/diary/?0401

http://hyperphysics.phy-astr.gsu.edu/hbase/solids/sili.html

Outermost shell is fully filled.Inert gas

Outermost shell is half filled.Si crystal structure

Periodic table of the elements

Si

What is covalent bond?

29/54

30/54

Concept : Total valence electrons are eight.

Compound semiconductors

31/54

CIGS is also semiconductor with eight valence electrons

CuInGaSe２

http://www.honda.co.jp/soltec/module/?from=rcount

Cu 2＝-2In 3＝-1Ga 3＝-1Se 6＝+2 (×2）

32/54

Crystal Structure

Zinc Blende Wurtzite Diamond

Si GaAs InP GaN CuInGaS Ge

Charcopyrite

Introduction to quantum mechanics -electron as a wave-Hydrogen atom

a

Proton

Electron

Niels Bohr de Broglie

deBrogliehp

)Bohrnnhpdq

λ=

⋅⋅⋅⋅==∫ ,3,2,1(　　　

p:momentumq:integral pathh:Planck’s constantλ: wavelength of electron wave

Q: Confirm that the Bohr’s condition andde Broglie’s assumption mean theformation of standing wave of electron.

na

nhhaappdq

πλ

λππ

2

22

=

===∫ 　　　

Define wavenumber k and angularfrequency ω

πνωλπ

2

2

=

=k

ν: frequency of electron wave33/54

Introduction to quantum mechanics -light as a particle (photon)-

Photoelectric effecthttp://wanda.fiu.edu/teaching/courses/Modern_lab_manual/pho

to_effect.html

http://swcphysics30.wordpress.com/2013/01/16/generating-electricity-by-photoelectric-effect/

h:6.626E-34 J・se:1.602E-19 Cm0:9.108E-31 kg

Q: Confirm the maximum velocity of electrons run out from K(potassium) by irradiating green and violet light.

W.F. of K 2.0 eV

]/[522.631108.9

19602.1)0.21.3(2)..(221..

0

20

smEE

Em

FWhv

vmFWh

K

K

=−

−⋅−⋅=

−=

=−

ν

ν

Violet case

34/54

Introduction to quantum mechanics

Describe electron using wavefunction )}(exp{),( trkiAtr ωψ −⋅=

Define momentum operator and energy operator

Let us assume one dimensional case )}(exp{),( txkiAtx ωψ −⋅=

∇−= ip

),,(zyx ∂∂

∂∂

∂∂

=∇ xip∂∂

−= One dimensional Q: Operate momentum operator

to wavefunction.

ψψψ kx

ip =∂∂

−=π2h

=

　t

iE∂∂

=

Q: Operate energy operator to wavefunction.

ωψψψ =∂∂

=t

iÊ

35/54

Introduction to quantum mechanics

ψψ kp = ωψψ =ÊMeaning of following equation

phhk ==⋅=λλ

ππ

22

νπνπ

ω ⋅=⋅= hh 22

Momentum Energy

Total energy of particle with a mass m moving with a constant speed of v in a potential field V(x).

)(2

)(2

)(

)(21

2

2

2

rVm

p

rVmvm

rVmvE

+=

+⋅

=

+=

Newtonian mechanics Quantum mechanics

)(2

)(2

)(

22

2

rVm

rVm

iE

+∇−=

+∇−

=

36/54

Introduction to quantum mechanics

tjE

Vm

H

EH

∂∂

=

+∇−=

=

22

2

ψψSchrödinger equation

)()()](exp[),( tTxtxkjAtx ⋅=−⋅⋅= ϕωψSeparation of variables

)tan()()()2

()

)()()()2

)((

)()()()()2

(

22

22

22

tconsEttTj

T(t)1xV

mx(

(x)T(t)ttTjxxV

mtT

ttTxjtTxV

m

=∂

∂=+∇−

÷∂

∂=+∇−

∂∂

=+∇−

ϕϕ

ϕ

ϕϕ

ϕϕ

１

Only position dependent Only time dependent

)exp()(

))()2

( 22

tEiAtT

x(ExVm

−⋅′=

=+∇−

＊

＊ ϕϕ

Hamiltonian

37/54

Introduction to quantum mechanics

x

ｙ

ｚ

θ

φ

Proton

Electron

+e

-e

Hydrogen atom

)()()42

( 20

22

0

2

rErr

em

ϕϕπε

=−∇−

Polar coordinates

Time independent Schrödinger equation for hydrogen atom

][16.13

),,,3,2,1(132

2

2220

2

40

eVn

nn

emEn

−≅

=−=επ

38/54

Introduction to quantum mechanics

abbbaa rq

rq

rq

rq

rq

rq

mmH

0

2

120

2

20

2

10

2

20

2

10

22

2

22

1

2

44444422ˆ

πεπεπεπεπεπε++−−−−∇−∇−=

１

a ｂ

２Electron

Electron

Proton Proton

Q: Derive the Hamiltonian of hydrogen molecule. You can neglect kinetic energy of proton because mass of proton is more than 1600 times larger than that of electrons and thus you can assume that protons do not move.

39/54

Introduction to quantum mechanics

rab(proton-proton distance)E-

E+

Pote

ntia

l ene

rgy

E

Wavefunction for E-

rab

Wavefunction for E+rab

Covalent bond

Anti bonding state

Bonding state

-4.5eV

0.74Å

Opposite spin

Mor

e st

able

40/54

Introduction to quantum mechanicsElectron energy in Si crystal

Electron occupation in Si atom Si:(1s)2(2s)2(2P)6(3s)2(3p)2

1s

2s

3s

2p

3p

Ener

gy E

1s

2s

(3sp3)

2p

Ener

ygE

3sp3 mixed orbital

http://upload.wikimedia.org/wikipedia/commons/thumb/9/9f/Sp3-Orbital.svg/200px-Sp3-Orbital.svg.png

Outermost orbital Outermost orbital

41/54

Introduction to quantum mechanics4 (3sp3) electrons at each Si

Pote

ntia

l ene

rgy

E

4 bonding states

4 antibonding state

rsi-si

42/54

Why valence electrons in a solid form band structure ?

Energy band structure

k

E

0aπ

aπ

−aπ2

aπ2

−

Valence band

Conduction band

Bandgap

Si

Detailed calculation

Horizontal axis : crystal momentumVertical axis : energy

Electrons in a solid

43/54

How to make semiconductor devices by doping impurities ?In an intrinsic semiconductors,

conduction band electron density=valence band hole density.

How to realize n-type and p-type semiconductors ?

(3s)2(3p)3

SiSi

SiSiP＋

One electronrest

Outermost electrons in P

44/54

How to make semiconductor devices?

][156.1318 22220

4

eVnnh

meEn −≅−= εn ： principal quantum number

Energy eigen value of hydrogen

P+Si －

DielectricConstant ε=εrε0

This electron acts as a conduction band electron.→

Effective mass m=me=mrm0

][156.132

eVmEr

rD

−≅

ε

In case of Si,me=0.25m0，εr=12

ED=－13.56×0.25×(1/12)2= －0.024[eV]

Please check what is dielectric constant !45/54

How to make semiconductor devices?

Wavenumber k

Energy E

Valenceband

Conductionband

Band gapEg

Eg=1.11eV∆ED=0.024eV

∆ED

Energy E

∆EA

][156.132

0

eVmmE

r

hA

≅

ε

Donor for n-type Acceptor for p-type46/54

How to make semiconductor devices?

TkEE

cB

fC

eNn−

−

⋅=

TkEE

vB

Vf

eNp−

−

⋅=

−=

h

eB

gf m

mTkE

E ln43

2

Electron conc.In conduction band

Hole conc. invalence band

Fermi energy～ center of the bandgap

−−⋅=

TkEE

NnB

fCC

nexp

−−⋅=

TkEE

NpB

VfV

pexp

Efn

Efp

EC

EV

n-type p-type

After p-n junction formation, Fermi energy levels of both type become the same.

47/54

How to make semiconductor devices?p-type

－－ －－－

－－

－

－

－

－

－

－

－－

n-type

＋

＋

＋ ＋

＋ ＋

＋

＋ ＋ ＋

＋

＋＋

＋

＋

Electron

Hole

Negative fixed charge layer Positive fixed charge layer

48/54

Fermi energy EfDonor level ED

n-type p-type

Vacuum level

Depletion region

Diffusion potential qVD(Diffusion voltage VD)

ECp

EVp

Acceptor level EA

Negatively charged acceptor

Electron affinity χ

－－ －－－－

＋＋＋＋＋＋

－

Positively charged donor

ーー

＋＋

EVn

ECn

How to make semiconductor devices?

49/54

pn junction diode

Diode

I-V characteristic

Q: Which terminal is which ?

50/54

How to use semiconductor devices?

http://www.electronics-tutorials.ws/diode/diode_6.html

Full wave rectifier circuit.

AC ⇒ DCRole of pn junction diode

Load

51/54

How to use semiconductor devices?

http://www.radartutorial.eu/21.semiconductors/hl19.en.html

How to amplify signal ?⇒Use transistor.

52/54

How to use semiconductor devices?How to make logic circuit ?⇒Use CMOS. Complimentary Metal-Oxide-SemiconductorField Effect Transistor

http://www.piclist.com/images/www/hobby_elec/e_ckt30_6.htm53/54

Questions? Comments? Requests?

Next class : October 22, 2018

54/54

スライド番号 1スライド番号 2スライド番号 3スライド番号 4スライド番号 5スライド番号 6スライド番号 7スライド番号 8スライド番号 9スライド番号 10スライド番号 11スライド番号 12スライド番号 13スライド番号 14スライド番号 15スライド番号 16スライド番号 17スライド番号 18スライド番号 19スライド番号 20スライド番号 21スライド番号 22スライド番号 23スライド番号 24スライド番号 25スライド番号 26スライド番号 27スライド番号 28スライド番号 29スライド番号 30スライド番号 31スライド番号 32スライド番号 33スライド番号 34スライド番号 35スライド番号 36スライド番号 37スライド番号 38スライド番号 39スライド番号 40スライド番号 41スライド番号 42スライド番号 43スライド番号 44スライド番号 45スライド番号 46スライド番号 47スライド番号 48スライド番号 49スライド番号 50スライド番号 51スライド番号 52スライド番号 53スライド番号 54