© znt GmbH 2010 M3.0.03 1

Increasing Production Effectiveness

with Integrated Engineering-Solutions

PrTitle: znt-Richter en

Munich

Burghausen

Singapore

Malaysia

Dresden / Freiberg

Villach

© znt GmbH 2010 M3.0.03 2

znt Profile

• MES and EES Solutions• Vertical integration• Shop Floor Automation• ERP (SAP) integration

Totally integratedmanufacturing solutions

ERP Integration

Control layer (Equipment Integration)

ConsultingServices

On-SiteSupportServices

Analysis DesignCustomizingDevelopment

InstallationIntegration

Semiconductor & Solar Automotive Chemistry

Se&So: IT-Solutions for Production

Munich

DresdenVillach

Burghausen

Singapore

Malaysia

© znt GmbH 2010 M3.0.03 3

Domains of FAB IT Systems

Manufacturing ExecutionManufacturing Execution

WIPWIPkeep your production runningkeep your production running

EngineeringEngineering

Yield & Quality & ThroughputYield & Quality & ThroughputContinuous improvementContinuous improvement

Communication & IntegrationCommunication & IntegrationSeamless information Flow Seamless information Flow

Integration PlatformIntegration Platform

MESMESManfacturing ExecutionManfacturing Execution

SystemsSystems

EESEESEquipment Engineering Equipment Engineering

SystemsSystems

© znt GmbH 2010 M3.0.03 4

Loosely coupled System Landscape

Se&So: FAB Automation Solution Scope (Elipse) en

ERPERP

MESMES

RTD / RTSRTD / RTS

Equ IntEqu Int

SPCSPCFDCFDC

OEEOEEEPTEPT

RMSRMS

ProcessProcessdatabasedatabase

MaintenanceMaintenance

Run2RunRun2Run Equ IntEqu Int

SPCSPCFDCFDC

OEEOEEEPTEPT

RMSRMS

ProcessProcessdatabasedatabase

MaintenanceMaintenance

Run2RunRun2Run

EES domain

AMHSAMHS

© znt GmbH 2010 M3.0.03 5

Cost / Yield Drivers

� Analyse processes

Yield - CostInspection efforts

Process stability

Scrap Throughput,material-supply

Equ-downtime

Maintenancecost

Quality

Electrical characteristics

� Transparency� central database for analysis� Create models

� flexible detection algorithms� Online calculation and

rule checks in real time

� Analyse processes� Detect deviations and bottlenecks

� central interdiction management� automatic control algorithms� Manual corrective actions

� Analyse processes� Detect deviations and bottlenecks� Control of processes within

close limits

© znt GmbH 2010 M3.0.03 6

Optimization potential of EES

PCSPCSProcess Analysis & ControlProcess Analysis & Control� SPC� FDC Fault detection

& Classification� R2R Run to Run Control� Virtual Metrology

�� EPTEPTEquipment performancetracking

�� OEEOEEoverall equipmenteffectiveness

MaintenanceMaintenance� Time based� Condition based� Preventive � Predictive

Yield CostInspection

efforts

Process stability

Scrap Throughput,material-supply

Equ-downtime

Maintenancecost

Quality

Electrical characteristics

© znt GmbH 2010 M3.0.03 7 Se&So: BISTEL Equipment Engineering System (EES)

BISTEL EES Suite

Equipment

SECS / GEMEDA /

Interface ATDI OPC other

PeakPerformance ™ Framework

Central EE DBSECS / GEM EDA /

Interface ATDI OPC other..

eRMS eMPA ePMM

PCS

eFDC eSPC eR2R eVMS

Central control and analysis Modules

© znt GmbH 2010 M3.0.03 8

SECS

Equipment

Interface A

Integration of Context Data

Manufacturing ExecutionManufacturing Execution

MESMESEngineering SystemsEngineering Systems

EESEESContext

Context

© znt GmbH 2010 M3.0.03 9

AMHSAMHS

RTDRTDEqu Equ IntInt

ERPERP

Fully integrated Solutions

Se&So: FAB Automation Solution Scope (Elipse) en

zEDA

zsecs

zpoints

zfactoryConnect

APCAPCPPMPPMEPTEPT

RMSRMS

OEEOEE

EESEES

MESMES

© znt GmbH 2010 M3.0.03 10

Your contact at znt:

znt Zentren für Neue Technologien GmbH

Mautnerstr. 268D-84489 Burghausen

Hans MayerOffice: +49 8677 9880-44 Mobil: +49 170 922 56 19Mail: H.Mayer@znt.de

Gerald RampfMobil: +49 170 922 56 05Mail: G.Rampf@znt.de

Web: www.znt-Richter.com

Thank you for your AttentionThank you for your Thank you for your AttentionAttention

End: ? hMa+Ajo en

Booth 4.226, Halle 4