high performance sealing solutions for the semiconductor ... · high performance sealing solutions...
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Advanced sealing solutions for critical applications
1041CSEALING SOLUTIONS
High performance sealing solutions for the
SEMICONDUCTOR INDUSTRY
PPE - Your GlobalSealing PartnerPPE operates globally through direct sales teams andalso has a network of regional distributors.
This ensures that PPE products and materials are available in allmajor device manufacturing regions, with global service back-upand world class technical support readily accessible.
PPE’s extensive customer base includes the most renownedcompanies and corporations within the semiconductor and relatedindustries. Many of the world’s leading OEMs, Fabs and researchestablishments have chosen PPE as their trusted sealing partner.
www.prepol.com
High Performance Sealing Solutionsfor Semiconductor, Photovoltaic andFlat Panel Display ApplicationsPrecision Polymer Engineering (PPE) operates at the forefront of elastomer technology,with optimized materials that have been proven to provide increased tool efficiency andreduced cost of ownership in critical semiconductor applications.
With over 30 years’ experience, PPE’s engineering and materials teams possess a thorough understanding ofthe processes used across chip, cell and display manufacturing industries. This technical know-how combinedwith PPE’s unique materials, ensures that the correct solution is delivered for every application.
▶ Unique leading edge materials
▶ Broad portfolio of products and custom design service
▶ Industry leading delivery times
▶ Expert technical support, pre and post sale
▶ Comprehensive testing and failure analysis service
SEALING SOLUTIONS
Investment and GrowthIn 2010 PPE became part of IDEX Corporation, a multi-billion dollar Fortune 1000company serving a wide variety of high growth specialized markets. IDEX investmentensures that PPE maintains the highest quality, state-of-the-art manufacturing andtest facilities, in order to serve the needs of the semiconductor industry.
Exceeding Your Expectations
PPE Engineers understand the complex relationship between materials, seal design and the demanding applications which challengeequipment manufacturers and end users. PPE recognises the sealing challenges faced by both “Moore” and “more than Moore”technologies leading to a broad range of requirements across multiple applications.
PPE serves diverse semiconductor market segments including:
▶ Logic and memory ▶ MEMS▶ HBLED ▶ Power devices▶ Photovoltaic cells ▶ Flat panel displays▶ Optoelectronics
Regardless of the application, you can be sure that PPE seals will continue to meet and exceed your expectations.
www.prepol.com
Innovative Materials Since the first high purity translucent Perlast�perfluoroelastomer was launched in 1999, PPE has ledthe field in material innovation.
With a proven track record spanning many years’, PPE continues to pushthe boundaries of elastomer technology and deliver the most technicallyadvanced elastomer materials available.
Polymers with varying fluorine content and multiple filler systemsincluding totally organic and filler free products can be provided.
Materials technology is at the core of PPE and innovation is a way of life. A continuous development program provides elastomers thatnot only keep pace with the current needs of the industry, but also looks to future requirements.
The Perlast® and Kimura® ranges of high performance materials offer unique properties such as high purity, excellent plasma resistance,low permeation and ultra-low out-gassing. These characteristics meet the specific requirements of thermal processing or annealing,plasma or atomic layer deposition, plasma etch, wet chemical or plasma cleaning systems.
PPE combines leading-edge material and expertise to provide process-enabling technology.
The advantages of usingPPE elastomer materials:
▶ Extended tool PreventativeMaintenance (PM) cycles
▶ Reduced process defects▶ Lower particle generation▶ Increased tool efficiency▶ Reduced cost of ownership
Case study Perlast® G67P delivered lower cost of consumables
Providing critical chamber seals using Perlast® G67P in a HDPCVD reactor (NF3 cleaning) extended the PM cyclefrom 10k wafers to 20k wafers. The incumbent FFKM material was experiencing cracking, resulting in severeparticulation which was affecting wafer yield.
SEALING SOLUTIONS
Manufactured to Your RequirementsTo ensure the highest levels of quality, PPE molds semiconductor components in a number of clean rooms locatedat its UK and US manufacturing facilities.
Design and Technical Support PPE offers a comprehensive design service to ensure maximum performance from your sealing products and materials.
An experienced Applications Engineering team is on hand to provide advice on hardware design and customization of seal shapeor type, based on mathematical and finite element analysis (FEA). A complete 3D CAD to CAM to tool production process, providesrapid prototype delivery and right-first-time designs, resulting in fast response to critical sealing needs.
The latest advanced manufacturing techniques and equipment are utilized in order to consistently produce high performance seals within theshortest lead-times, to satisfy the most precise requirements.
The purity of PPE seals is paramount. All manufactured components undergo a multi-stage cleaning and packaging process, including the useof proprietary cleaning agents, ultrasonic cleaning tanks combined with de-ionized water and filtered drying procedures to minimize anypossible particle contamination.
Case study Perlast® G67P delivered increased yield
A white FFKM material used in a MESC compliant flange in a HDPCVD system (NF3 clean), was causing particulation and reducedyield as a result of cracks appearing in the seal after 7500 wafers. The material was replaced with Perlast® G67P eliminating thecracking/particulation issue.
www.prepol.com
ProductsPPE offers an extensive portfolio of products used withinsemiconductor and related manufacturing industries.
O-ringsFully molded O-rings can be manufacturedin any size or quantity ranging from 0.030”to 96” (0.8mm to 2.4m) internal diameterand 0.030” to 0.470” (0.8mm to 12mm)cross section, allowing PPE O-rings to bespecified in all locations. StandardAS/metric sizes, international and customnon-standard sizes available.
Centering RingsAluminium or stainless steel centeringrings can be combined with any PPEelastomer material and are available invarious sizes from the NW, KF and ISOstandard ranges.
Slit Valve DoorsPPE offers a range of materials and profilesthat maximize sealing integrity and lifeexpectancy for bonded and non-bonded slitvalve doors and MONOVAT® gates. Theseare available in various sizes and designsfor 150mm, 200mm, 300mm and 450mmprocess equipment.
Wafer HandlingComponentsPPE end effector pads provide low contactforce and electrostatically dissipativesolutions for wafer handling applications.PPE’s range of materials offers both low andhigh coefficients of friction to allow tailoringof wafer retention force. Custom designs ofend effector pads can also be manufactured.
Lip Seals
Lip seals can be used to provide sealing ofwider gaps requiring large amounts ofdeflection where limited contact force isavailable. Typical applications includesealing against quartz where largetolerances must be accommodated.
Custom Shapes andCross-SectionsSeals can be designed and manufacturedto customer-specific requirements, moldedin almost infinite shapes, sizes and profile.
Registered trade marks:MONOVAT® - VAT Vacuumventile AG
SEALING SOLUTIONS
Testing and AnalysisWith state-of-the-art Material Characterization Centers located in the UK and USA, PPE provides a comprehensiverange of services for the development, characterization, testing and analysis of polymeric materials.
With a team of highly qualified polymer technologists and chemical engineers at your disposal, PPE can provide a complete consultancyservice including advice and assistance in material selection, material testing, sample analysis, post-use analysis and problem-solving onany sealing matter.
Testing capabilities include chemical compatibility, failure analysis andthermo-mechanical evaluation using the following analytical equipment:
▶ FTIR (Infrared Spectroscopy) for material identification and fingerprinting
▶ DSC (Differential Scanning Calorimetry) for predicting thermal characteristics
▶ TGA (Thermogravimetric Analysis) for compositional analysis
▶ TMA (Thermomechanical Analysis) for coefficient of thermal expansion measurement
▶ Wet chemical analysis for assessing fluid compatibility
▶ Mechanical property & thermal ageing capabilities from -100ºC to +300ºC (-148ºF to +572ºF)
▶ Plasma exposure testing in oxygen up to 250ºC (482ºF)
The ultimate perfluoroelastomers for sealingapplications where chemical resistance and hightemperature performance are critical.
A unique range of fully organic elastomers forsemiconductor sealing applications which demandextreme plasma and abrasion resistance.
Advanced sealing solutions for critical applications
1041CSEALING SOLUTIONS
Europe, Middle East & AfricaPrecision Polymer Engineering LtdHead OfficeGreenbank RoadBlackburn BB1 3EAEngland
T: +44 1254 295400F: +44 1254 680182E: [email protected]
AmericasPrecision Polymer Engineering LLC1754 Technology DriveSuite 244San Jose CA 95110USA
T: +1 408 441 2043F: +1 408 441 1042E: [email protected]
PPE LLC4702 North Sam Houston Parkway WestSuite 100Houston TX 77086USA
T: +1 713 482 0123F: +1 713 623 2332E: [email protected]
Asia Pacific Precision Polymer Engineering LLC Rm3502-3504, Zhao Feng PlazaNo. 1027 Chang Ning RoadShanghai 200050China
T: +86 21 5241 5599 - 113F: +86 21 5241 8339E: [email protected]
Perlast® and Kimura® are trademarks of Precision Polymer Engineering.
Local PPE sales agent:
www.prepol.com
Block 7, Kallang Place, #05-11/12, Singapore 339153Tel: (+65) 6392.2208 Fax: (+65) 6392.0809
Silicon Connection Pte Ltd