hetrojunction
TRANSCRIPT
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SEMICONDUCTOR HETEROJUNCTIONS
Nezih Pala [email protected] EEE 6397
Semiconductor Device Theor19
Ap-n junctionis formed when a p-type doped portion of the semiconductor is
d with an n-type doped portion. As a fundamental component for functionssuch as rectification, the p-n junction forms the basic unit of a bipolar transistor.
If both the p-type and the n-type regions are of the same semiconductor
material, the junction is called a homojunction.If the junction layers are made of
different semiconductor materials, it is a heterojunction.
As a matter of convention, if the n-type doped semiconductor material has
larger energy gap than the p-type doped material, it is denoted a p-N
heterojunction.
The use of capital and lowercase Ietters connotes the relative size
the energy gap. Conversely, if the p-type doped material has a larger energygap than the n-type material, the junction is referred to as a P-n heterojunction.
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Heterojunctions -2
20
When semiconductors of different band gaps, work
functions, and electron affinities are brought
together to form a junction, we expectdiscontinuities in the energy bands as the Fermi
levels line up at equilibrium . The discontinuities in
the conduction band ECand the valence band EV
accommodate the difference in band gap between
the two semiconductors Eg.
In an ideal case, ECwould be the difference in
electron affinities q(2- 1), and Evwould be found
from Eg- ECThis is known as theAnderson
affinity rule.
In practice, the band discontinuities are found experimentally for particular semiconductor
pairs.
VC
ggg
EE
EEE
21
Nezih Pala [email protected] EEE 6397
Semiconductor Device Theor
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Heterojunctions -4
21
To draw the band diagram, we need:
and
The electron affinity and work functionare
referenced to the vacuum level. The electron affinity
and work function are referenced to the vacuum
level.
dopingNOTmaterial,torsemiconducondepend
)(affinityelectron)(Egapband g
dopingANDmaterial
torsemiconducondepends
functionWork
The true vacuum level(or global vacuum level), Evac, is the potential energy reference when
an electron is taken out of the semiconductor to infinity, where it sees no forces. Hence, the
true vacuum level is a constant
Nezih Pala [email protected] EEE 6397
Semiconductor Device Theor
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Heterojunctions -5
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However, since the electron affinity is a
material parameter and therefore constant
we need to introduce the new concept ofthe local vacuum level, Evac(loc), which
varies along with and parallel to the
conduction band edge, thereby keeping the
electron affinity constant. The local vacuum
level tracks the potential energy of an
electron if it is moved just outside of the
semiconductor, but not far away.
The difference between the local and global vacuum levels is due to the electrical work doneagainst the fringing electric fields of the depletion region, and is equal to the potential energy
qV0due to the built-in contact potential V0in equilibrium. This potential energy can, of
course, be modified by an applied bias.
P-side n-side
Nezih Pala [email protected] EEE 6397
Semiconductor Device Theor
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Heterojunctions -6
23
To draw the band diagram for a heterojunction accurately, we must not only use the proper
values for the band discontinuities but also account for the band bending in the junction.
To do this, we must solve Poisson's equation across the heterojunction, taking into account
the details of doping and space charge, which generally requires a computer solution. We
can, however, sketch an approximate diagram without a detailed calculation. Given the
experimental band offsets EVand EC, we can proceed as follows:
1.Align the Fermi level with the two
semiconductor bands separated.
Leave space for the transition region.
Nezih Pala [email protected] EEE 6397
Semiconductor Device Theor
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Heterojunctions -7
24
2.The metallurgical junction (x = 0) is located
near the more heavily
doped side. At x = 0 put EVand EC, separated
by the appropriate
band gaps.
3. Connect the conduction band and valence
band regions, keeping t he
band gap constant in each material.
Steps 2 and 3 of this procedure are where the exact band bending is important and must be
obtained by solving Poisson's equation. In step 2 we must use the band offset values EVand
ECfor the specific pair of semiconductors in the heterojunction.
Nezih Pala [email protected] EEE 6397
Semiconductor Device Theor
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Heterojunctions -8
25
As a result, electrons collect on the GaAs side of the heterojunction and move the Fermi
level above the conduction band in the GaAs near the interface. These electrons are
confined in a narrow potential well in the- GaAs conduction band. If we construct a device
in which conduction occurs parallel to the interface, the electrons in such a potential well
form a two-dimensional electron gas with very negligible impurity scattering in the GaAs
well, and very high mobility controlled almost entirely by lattice scattering (phonons).
Consider heavily n-type AlGaAs is grown
on lightly doped GaAs where the
discontinuity in the conduction bandallows electrons to spill over from the N+-
AlGaAs into the GaAs, where they become
trapped in the potential well.
Nezih Pala [email protected] EEE 6397
Semiconductor Device Theor
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p+-N Heterojunction under equilibrium -1
Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 26
Consider, for example, a p-N heterojunction formed with a p-type GaAs layer doped at
3x1019
cm-3
and an N-type AIGaAs layer doped at 1x1016
cm-3
The band diagrams of individual layers are shown in the figure side by side with their
vacuum levels aligned to illustrate the difference in the Fermi levels in the charge-
neutral condition .
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p+-N Heterojunction under equilibrium -2
Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 27
When the two regions are brought into contact, the Fermi level on the N side is
initially higher than that on the p-side. Therefore, the electrons in a p-N junction lend toflow from regions of higher Fermi level (N regions) to regions or lower Fermi levels (p
regions).
On the other hand, the holes flow from the region with a lower Fermi level toward the
region with a higher Fermi level. Therefore, the holes flow from the p- type layer toward
the N-type layerconsistent with the fact that there are more holes in the p-typeregion and they tend to diffuse to the region with less holes.
As these mobile carriers move toward the other sides, they leave behind the
uncompensated dopant atoms near the junction. In the p-type region, the
uncompensated acceptors are negative ions.In the N-type region, the uncompensated
donors are positive ions.Therefore, the carrier diffusion results in a electric field pointingfrom the N-type region to the p-type region. This electric field retards further electron
diffusion from the N-type toward the p-type as well as hole diffusion in the opposite
direction. Hence, there is a natural negative feedback mechanism such that the more
carrier movement takes place, the larger the electric field becomes and the tendency of
the carrier movement is reduced.
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p+-N Heterojunction under equilibrium -3
Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 28
Eventually, an equilibrium condition sets in and the tendency of the carrier diffusion isexactly counterbalanced by the electric field that impedes the carrier movement.
At this precise movement, the Fermi levelsat the two regions are aligned.The above
exchange of carriers occurs on a very short time scale. So the whole process can be
thought of as instantaneous.
The two side immediately adjacent to the junction where the dopants become
uncompensated are called the depletion region, meaning that they are depleted of
mobile carriers. (Another name for the depletion region is the space-charge region).
At the two extreme ends away from the actual junction, carrier movement has never
occurred. Their dopant atoms are still compensated by their respective electronsor holes. These are called the neutral regions because the net charge concentrations
there are zero.
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p+-N Heterojunction under equilibrium -3
Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 29
Fermi level during thermal
equilibrium lines up throughout
the entire semiconductor.
At regions far away from the
junction where the semiconductor
remains neutral, the relative
positions of Efwith respect to
Ec and to Ev are unmodified fromthose prior to the joining of the
two sides.
The conduction and valence band
edges at the sides are not at the
same level, since it is the Fermilevel that must be aligned.
The conduction and valence band edges across
the depletion region must be connected
somehow to form continuous curves.
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p+-N Heterojunction under equilibrium -4
Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 30
The Poisson equation must be solved to ascertain the manner in which the conduction and
valence band edges are connected across the depletion region:
)( adS
NNnpq
dx
d
Considering that, in the p-side depletion region, the net charge concentration is the negative
acceptor density and in the N-side depletion region the net charge concentration
is the donor density (depletion approximation). Therefore, the last equation simplifies to
Let us define that x = 0 correspond to the junction boundary, with the p side in the
-x direction and the N side in the + x direction. Moreover, x = - Xpo is the boundary separating
the neutral and the depletion regions on the p side, and XN0the boundary on the N side. The
subscript 0 emphasizes that we are considering the thermal equilibriumcondition.
0
0
0for
0for
Nd
N
pa
p
XxNq
dx
d
x-XNq
dx
d
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p+-N Heterojunction under equilibrium -5
Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 31
After integrating and applying the boundary conditions that the electric fields at Xp0and at
XN0are zero, the electric field within the depletion region can be found as
00
00
0forx)-()(
0for)(x)(
NNd
N
ppa
p
XxXNq
x
x-XXNq
x
In the p-side, thepotential profileis obtained by integrating (x)
0forCx)2
x()()( 00
2
x-XXNq
dxxxV ppap
Since it is the relative value or potentials rather than their absolute values that is of
importance, we arbitrarily define the zero potential at a convenient location, namely,
at x =-Xpo.With the boundary condition that V(- Xpo) = 0, V(x) is written as
0for)2
Xx
2
x()( 0
2
p0
0
2
x-XXNq
xV ppap
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p+-N Heterojunction under equilibrium -6
Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 32
The built-in potential on the p side (p0 ) is the difference in the potentials at x=0 and x=-Xp0. It
is readily verified that
X2
2
p00 a
p
p Nq
where p0is a positive number. The band diagram, being an energy diagram for the
negatively charged electron, shows that the electron energy decreases with the associated
increase in V(x).Similarly the potential profile on the N side can be obtained by integrating the appropriate
electric profile. Taking the boundary condition that V(0) = p0,
0p0
2
0 0for2
x-x)( NNd
N
XxXNq
xV
The built-in potential on the N side ( N0 ) is the difference in the potentials at
x = 0 and x = XN0. V(XN0) - V(0) is then equal to
X2
2
N00 d
N
N Nq
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p+-N Heterojunction under equilibrium -7
Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 33
The overall built-in junction potential (bi) is the potential difference from the neutral region
on one side the neutral region on the other. It is equal to
X2
X2
2
p0
2
N000 a
p
d
N
pNbi Nq
Nq
Xp0and XN0 can be determined by solving two linearly independent equations relating these
two variables. One of the required equations is obtained by enforcing the continuity of the
electric flux density D =in the absence of an interfacial charge density at the junction:
XX p0N0 ad NN
The equality ensures that charge neutrality exists in the overall p-N junction. The second
equation relating Xp0and XN0is found by taking the ratio of the built in potentials on the N
side to those on the p side:
2
p0
2
N0
0
0
X
X
aN
dp
p
N
N
N
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p+-N Heterojunction under equilibrium -8
Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 34
Substituting the charge conservation relationship into the above equation, we rewrite the
ratio as
dN
ap
p
N
NN
0
0
From this equation, the built-in potential of the junction is
000
0
11 pdN
ap
pp
N
bi N
N
Alternatively, from an examination
of the band diagram biis equal to
q
EE Npcgpbi
where Egpis the energy gap of the p-side
material
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p+-N Heterojunction under equilibrium -9
Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 35
p and Nrepresent the differences of the Fermi levels with respect to the valence band edge
and the conduction band edge, respectively, in the neutral regions. That is,
xfcN
xvfp
EE
EE
|
|
Both p and Nare calculated from the equilibrium statistics equations given in
Once the doping levels are specified,
bifor the heterojunction is readily
calculated.
Other quantities such as N0and
V(x) are then obtained from the
Equations derived above.
kTEE
c
cf
eNn
kTEE
v
fv
eNp
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p+-N Heterojunction under equilibrium -10
Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 36
EXAMPLE
Let us draw a band diagram for a (p) GaAs/(N) AI0.35Ga0.65As. As heterojunction at thermal
equilibrium. The doping level and relevant material parameters are
Egap(GaAs) =1.42 eV Egap(AlAs) =2.16 eV
Nd=1x1016cm-3 Na=3x10
19cm-3
eV
N
pA
N
pA
N
pA
N
pA
N
p
kT
EE
VVVVV
fv
p 103.0ln
4
4
3
3
2
21
eVN
nkTEEeNn
d
cfn
kT
EE
C
cf
093.0101
1072.3ln0259.0ln
16
17
With A1=3.53x10-1, A2=-4.95x10
-3, A3=1.48x10-4, A4=-4.42x10
-6 Nv=4.7x1018cm-3
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p+-N Heterojunction under equilibrium -11
Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 37
eVxx
xxAsGaAlE xxg 86.1
0.45for x143.0125.090.1
45.00for247.1424.1)(
21
Energy gap of the AlxGa1-xAs material is determined by the valley at x0.45. The energy gap (in eV) is given as:
The energy gap difference (Eg) in an AlxGa1-xAs/GaAs heterojunction is shared between the
conduction band and the valence band. That is Eg= Ec+ Evwhere Ec is the conductionband discontinuity and Evis the valence band discontinuity. The amount of Evis linearly
dependent on the aluminum mole fraction (x) for all values of x. Evand Ec in an AlxGa1-
xAs/GaAs heterojunction are therefore given by
xxEv 55.0)(
0.45 x143.0)55.0125.0(476.0
0.45x055.0247.1
)( 2xx
x
xEc
E0. is 0.244 eV. Egp the energy gap of the narrower gap material (GaAs), is 1.424 eV.
Therefore, the built-in voltage is found
eVbi 678.1093.0)103.0(244.0424.1
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p+-N Heterojunction under equilibrium -12
Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 38
The relative dielectric constants are 13.18 for GaAs and 12.09 for Al0.35Ga0.65As. p0can be
found as
V
N
N
N
N
dN
ap
bipp
dN
ap
bi
4
16
19
00
1013.5)101(09.12
)103(18.131/678.1
1/1
N0which is equal to bi- p0 is 1.678 - 5. 13 x 10-41.6775 V. It is clear from this calculation
that if one side is significantly more heavily doped than the other practically all of the built -
in potential drops across the depletion region of the lightly doped side. Once N0and p0 are
determined, XN0 and Xp0are calculated from
cm104.74677.1)101)(106.1(
)1085.8)(09.12(22XX2
5-
1619
14
0N0
2
N00
N
d
Nd
N
NqN
Nq
cm101.581013.5)103)(106.1(
)1085.8)(18.13(2
2XX
2
8-4
1919
14
0p0
2
p00
p
a
p
a
p
pqN
Nq
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p+-N Heterojunction under equilibrium -13
Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 39
The depiction thickness of the heavily
doped side is merely 1.58 which is
practically zero. With the calculatedparameters, the band diagram is drawn as
shown in the figure.
The band profiles vary parabolically with
position as given by equations:
p0
2
0 2
x-x)(
Nd
N
XNq
xV
)2
Xx2x()(
2
p00
2
pap
XNqxV
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Semiconductor Heterojunctions
Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 40
To construct a band diagram for an abrupt p-n heterojunction, we proceed in the same
manner as for the p-n homojunction. We begin with two separate materials. Since thematerials have different bandgaps, there must exist a discontinuity in the conduction band
(Ec) and/or the valence band (Ev) at the interface . The difference in the bandgap between
the two materials is equal to the sum of the conduction band and valence band discontinuities
N-type p-type
vcggg EEEEE 21
Abrupt p-n heterojunction
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Graded p-n heterojunction
Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 41
Although the abrupt p-n heterostructure discussed in the previous section did result in an
increase in the barrier to hole injection, the notch in the conduction band at the interfacealso caused an undesirable increase in the barrier to electron injection. While the net effect
was still an increase in the ratio In/Ip, eliminating this notch further increases In/Ipto a value
Tk
E
LND
LND
I
I
B
g
nap
pdn
hetp
n exp
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Graded p-n heterojunction -2
Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 42
In order to reduce this notch, the bandgap of the
p material can be graded upwards from thejunction, as shown in the figure. For example, in
an n-AlGaAs/p-GaAs graded heterostructure, the
n material is GaAs at the junction and is graded to
the final AlGaAs composition over a short
distance. The final shape of the notch depends on
the length and profile of the grade; longer gradingtypically gives a smaller notch. However, it is
important that the grade is contained well within
the depletion region. If the grade ends outside the
depletion region, then the barrier seen by holes
decreases, thus reducing the benefits of the
heterojunction. Note that the barrier to holes inboth abrupt and graded heterojunctions is the
same. It is just the barrier for electron flow that is
reduced in the graded structures, allowing for the
increased ratio of In/Ip.
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Example: Designing a p-n heterojunction grade
Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 43
Consider four different n-p+Al0.3Ga0.7As/GaAs heterojunctions with ND= 1017and
NA= 5 1018. The AlGaAs in these junctions is graded from x = 0 to x = 0.3 over
XGrade= 0(abrupt), XGrade = 100A, XGrade= 300A, and XGrade= 1. Calculate and plot the energyband diagrams for the above four cases.
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Example: Designing a p-n heterojunction grade
Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 44
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Quasi-electric fields
Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 45
In a homogeneous semiconductor, the
separation between the conduction and
valence bands is everywhere equal to thesemiconductor bandgap. Any electric field
applied to the material therefore results in an
equal slope in the conduction and valence
bands, as indicated in the figure.
When a hole or electron is placed in this
structure, a force of magnitude eE will act on
the particle.
The magnitude of the force is equal to the
slope of the bands and is the same for both
electrons and holes. However, the direction of
the force is opposite for the two particles.
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Quasi-electric fields -2
Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 46
An interesting phenomenon arises in
semiconductors with graded bandgaps, such as
the bipolar transistor emitter-base structureshown at the top figure .
In the graded region, the bandgap is not constant,
so the slopes in the conduction and valence bands
are no longer equal. Hence the forces acting on
electrons and holes in this region are no longerequal in magnitude.
It is in general possible for a force to act on only
one type of carrier, as shown in the top figure, or
for forces to act in the same direction for both
electrons and holes, as in the bottom figure. Suchbehavior cannot be achieved by pure electric
fields in homogeneous materials. These fields,
which were first described by Herbert Kroemer in
1957, are therefore referred to as quasi-electric
fields.
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Quasi-electric fields -3
Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 47
In a given material, the total field acting on a hole or an electron is always the sum of the
applied field and the quasi field, or
The applied field, which results from applying a voltage difference between the ends of the
material, will always be the same for both electrons and holes, but the quasi field could be
different for both. The band profiles in figures in the last slide can therefore be achieved in a
number of different ways. For example, the profile in top figure could be achieved in the
following two ways:
quasieapptote ,, quasihapptoth ,,
1. An undoped (intrinsic) material with a graded composition and zero applied electric field
typically results in the profile in the lower figure. If an electric field app= e,quasiis then
applied to this material, the resulting profile will be the one shown in the upper figure.
2. A uniformly doped n-type material with a graded composition and zero applied electric
field will also result in the profile in the upper figure. In this case, the doping ensures that
the separation between the conduction band and the Fermi level remains approximately
constant. Notice that the resulting quasi-electric field in this structure acts only on minority
carriers.
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Quasi-electric fields -4
Quasi-electric fields provide engineers with additional tools that can beexploited in device design. They have proven to be very useful in decreasing
transit times in devices that rely on minority carrier transport.
For example, in bipolar technology, a highly doped graded base layer is often
used to speed up the transport of minority carriers from the emitter to the
collector. For a base with uniform bandgap, minority carriers injected from the
emitter must diffuse across the base, a process that is generally slow. By using a
highly doped graded base to generate a quasi-electric field, such as was
described in the second example above, minority carriers can be swept across
much more quickly, thus reducing the base transit time and improving the
device RF performance.