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    SEMICONDUCTOR HETEROJUNCTIONS

    Nezih Pala [email protected] EEE 6397

    Semiconductor Device Theor19

    Ap-n junctionis formed when a p-type doped portion of the semiconductor is

    d with an n-type doped portion. As a fundamental component for functionssuch as rectification, the p-n junction forms the basic unit of a bipolar transistor.

    If both the p-type and the n-type regions are of the same semiconductor

    material, the junction is called a homojunction.If the junction layers are made of

    different semiconductor materials, it is a heterojunction.

    As a matter of convention, if the n-type doped semiconductor material has

    larger energy gap than the p-type doped material, it is denoted a p-N

    heterojunction.

    The use of capital and lowercase Ietters connotes the relative size

    the energy gap. Conversely, if the p-type doped material has a larger energygap than the n-type material, the junction is referred to as a P-n heterojunction.

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    Heterojunctions -2

    20

    When semiconductors of different band gaps, work

    functions, and electron affinities are brought

    together to form a junction, we expectdiscontinuities in the energy bands as the Fermi

    levels line up at equilibrium . The discontinuities in

    the conduction band ECand the valence band EV

    accommodate the difference in band gap between

    the two semiconductors Eg.

    In an ideal case, ECwould be the difference in

    electron affinities q(2- 1), and Evwould be found

    from Eg- ECThis is known as theAnderson

    affinity rule.

    In practice, the band discontinuities are found experimentally for particular semiconductor

    pairs.

    VC

    ggg

    EE

    EEE

    21

    Nezih Pala [email protected] EEE 6397

    Semiconductor Device Theor

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    Heterojunctions -4

    21

    To draw the band diagram, we need:

    and

    The electron affinity and work functionare

    referenced to the vacuum level. The electron affinity

    and work function are referenced to the vacuum

    level.

    dopingNOTmaterial,torsemiconducondepend

    )(affinityelectron)(Egapband g

    dopingANDmaterial

    torsemiconducondepends

    functionWork

    The true vacuum level(or global vacuum level), Evac, is the potential energy reference when

    an electron is taken out of the semiconductor to infinity, where it sees no forces. Hence, the

    true vacuum level is a constant

    Nezih Pala [email protected] EEE 6397

    Semiconductor Device Theor

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    Heterojunctions -5

    22

    However, since the electron affinity is a

    material parameter and therefore constant

    we need to introduce the new concept ofthe local vacuum level, Evac(loc), which

    varies along with and parallel to the

    conduction band edge, thereby keeping the

    electron affinity constant. The local vacuum

    level tracks the potential energy of an

    electron if it is moved just outside of the

    semiconductor, but not far away.

    The difference between the local and global vacuum levels is due to the electrical work doneagainst the fringing electric fields of the depletion region, and is equal to the potential energy

    qV0due to the built-in contact potential V0in equilibrium. This potential energy can, of

    course, be modified by an applied bias.

    P-side n-side

    Nezih Pala [email protected] EEE 6397

    Semiconductor Device Theor

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    Heterojunctions -6

    23

    To draw the band diagram for a heterojunction accurately, we must not only use the proper

    values for the band discontinuities but also account for the band bending in the junction.

    To do this, we must solve Poisson's equation across the heterojunction, taking into account

    the details of doping and space charge, which generally requires a computer solution. We

    can, however, sketch an approximate diagram without a detailed calculation. Given the

    experimental band offsets EVand EC, we can proceed as follows:

    1.Align the Fermi level with the two

    semiconductor bands separated.

    Leave space for the transition region.

    Nezih Pala [email protected] EEE 6397

    Semiconductor Device Theor

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    Heterojunctions -7

    24

    2.The metallurgical junction (x = 0) is located

    near the more heavily

    doped side. At x = 0 put EVand EC, separated

    by the appropriate

    band gaps.

    3. Connect the conduction band and valence

    band regions, keeping t he

    band gap constant in each material.

    Steps 2 and 3 of this procedure are where the exact band bending is important and must be

    obtained by solving Poisson's equation. In step 2 we must use the band offset values EVand

    ECfor the specific pair of semiconductors in the heterojunction.

    Nezih Pala [email protected] EEE 6397

    Semiconductor Device Theor

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    Heterojunctions -8

    25

    As a result, electrons collect on the GaAs side of the heterojunction and move the Fermi

    level above the conduction band in the GaAs near the interface. These electrons are

    confined in a narrow potential well in the- GaAs conduction band. If we construct a device

    in which conduction occurs parallel to the interface, the electrons in such a potential well

    form a two-dimensional electron gas with very negligible impurity scattering in the GaAs

    well, and very high mobility controlled almost entirely by lattice scattering (phonons).

    Consider heavily n-type AlGaAs is grown

    on lightly doped GaAs where the

    discontinuity in the conduction bandallows electrons to spill over from the N+-

    AlGaAs into the GaAs, where they become

    trapped in the potential well.

    Nezih Pala [email protected] EEE 6397

    Semiconductor Device Theor

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    p+-N Heterojunction under equilibrium -1

    Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 26

    Consider, for example, a p-N heterojunction formed with a p-type GaAs layer doped at

    3x1019

    cm-3

    and an N-type AIGaAs layer doped at 1x1016

    cm-3

    The band diagrams of individual layers are shown in the figure side by side with their

    vacuum levels aligned to illustrate the difference in the Fermi levels in the charge-

    neutral condition .

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    p+-N Heterojunction under equilibrium -2

    Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 27

    When the two regions are brought into contact, the Fermi level on the N side is

    initially higher than that on the p-side. Therefore, the electrons in a p-N junction lend toflow from regions of higher Fermi level (N regions) to regions or lower Fermi levels (p

    regions).

    On the other hand, the holes flow from the region with a lower Fermi level toward the

    region with a higher Fermi level. Therefore, the holes flow from the p- type layer toward

    the N-type layerconsistent with the fact that there are more holes in the p-typeregion and they tend to diffuse to the region with less holes.

    As these mobile carriers move toward the other sides, they leave behind the

    uncompensated dopant atoms near the junction. In the p-type region, the

    uncompensated acceptors are negative ions.In the N-type region, the uncompensated

    donors are positive ions.Therefore, the carrier diffusion results in a electric field pointingfrom the N-type region to the p-type region. This electric field retards further electron

    diffusion from the N-type toward the p-type as well as hole diffusion in the opposite

    direction. Hence, there is a natural negative feedback mechanism such that the more

    carrier movement takes place, the larger the electric field becomes and the tendency of

    the carrier movement is reduced.

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    p+-N Heterojunction under equilibrium -3

    Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 28

    Eventually, an equilibrium condition sets in and the tendency of the carrier diffusion isexactly counterbalanced by the electric field that impedes the carrier movement.

    At this precise movement, the Fermi levelsat the two regions are aligned.The above

    exchange of carriers occurs on a very short time scale. So the whole process can be

    thought of as instantaneous.

    The two side immediately adjacent to the junction where the dopants become

    uncompensated are called the depletion region, meaning that they are depleted of

    mobile carriers. (Another name for the depletion region is the space-charge region).

    At the two extreme ends away from the actual junction, carrier movement has never

    occurred. Their dopant atoms are still compensated by their respective electronsor holes. These are called the neutral regions because the net charge concentrations

    there are zero.

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    p+-N Heterojunction under equilibrium -3

    Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 29

    Fermi level during thermal

    equilibrium lines up throughout

    the entire semiconductor.

    At regions far away from the

    junction where the semiconductor

    remains neutral, the relative

    positions of Efwith respect to

    Ec and to Ev are unmodified fromthose prior to the joining of the

    two sides.

    The conduction and valence band

    edges at the sides are not at the

    same level, since it is the Fermilevel that must be aligned.

    The conduction and valence band edges across

    the depletion region must be connected

    somehow to form continuous curves.

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    p+-N Heterojunction under equilibrium -4

    Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 30

    The Poisson equation must be solved to ascertain the manner in which the conduction and

    valence band edges are connected across the depletion region:

    )( adS

    NNnpq

    dx

    d

    Considering that, in the p-side depletion region, the net charge concentration is the negative

    acceptor density and in the N-side depletion region the net charge concentration

    is the donor density (depletion approximation). Therefore, the last equation simplifies to

    Let us define that x = 0 correspond to the junction boundary, with the p side in the

    -x direction and the N side in the + x direction. Moreover, x = - Xpo is the boundary separating

    the neutral and the depletion regions on the p side, and XN0the boundary on the N side. The

    subscript 0 emphasizes that we are considering the thermal equilibriumcondition.

    0

    0

    0for

    0for

    Nd

    N

    pa

    p

    XxNq

    dx

    d

    x-XNq

    dx

    d

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    p+-N Heterojunction under equilibrium -5

    Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 31

    After integrating and applying the boundary conditions that the electric fields at Xp0and at

    XN0are zero, the electric field within the depletion region can be found as

    00

    00

    0forx)-()(

    0for)(x)(

    NNd

    N

    ppa

    p

    XxXNq

    x

    x-XXNq

    x

    In the p-side, thepotential profileis obtained by integrating (x)

    0forCx)2

    x()()( 00

    2

    x-XXNq

    dxxxV ppap

    Since it is the relative value or potentials rather than their absolute values that is of

    importance, we arbitrarily define the zero potential at a convenient location, namely,

    at x =-Xpo.With the boundary condition that V(- Xpo) = 0, V(x) is written as

    0for)2

    Xx

    2

    x()( 0

    2

    p0

    0

    2

    x-XXNq

    xV ppap

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    p+-N Heterojunction under equilibrium -6

    Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 32

    The built-in potential on the p side (p0 ) is the difference in the potentials at x=0 and x=-Xp0. It

    is readily verified that

    X2

    2

    p00 a

    p

    p Nq

    where p0is a positive number. The band diagram, being an energy diagram for the

    negatively charged electron, shows that the electron energy decreases with the associated

    increase in V(x).Similarly the potential profile on the N side can be obtained by integrating the appropriate

    electric profile. Taking the boundary condition that V(0) = p0,

    0p0

    2

    0 0for2

    x-x)( NNd

    N

    XxXNq

    xV

    The built-in potential on the N side ( N0 ) is the difference in the potentials at

    x = 0 and x = XN0. V(XN0) - V(0) is then equal to

    X2

    2

    N00 d

    N

    N Nq

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    p+-N Heterojunction under equilibrium -7

    Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 33

    The overall built-in junction potential (bi) is the potential difference from the neutral region

    on one side the neutral region on the other. It is equal to

    X2

    X2

    2

    p0

    2

    N000 a

    p

    d

    N

    pNbi Nq

    Nq

    Xp0and XN0 can be determined by solving two linearly independent equations relating these

    two variables. One of the required equations is obtained by enforcing the continuity of the

    electric flux density D =in the absence of an interfacial charge density at the junction:

    XX p0N0 ad NN

    The equality ensures that charge neutrality exists in the overall p-N junction. The second

    equation relating Xp0and XN0is found by taking the ratio of the built in potentials on the N

    side to those on the p side:

    2

    p0

    2

    N0

    0

    0

    X

    X

    aN

    dp

    p

    N

    N

    N

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    p+-N Heterojunction under equilibrium -8

    Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 34

    Substituting the charge conservation relationship into the above equation, we rewrite the

    ratio as

    dN

    ap

    p

    N

    NN

    0

    0

    From this equation, the built-in potential of the junction is

    000

    0

    11 pdN

    ap

    pp

    N

    bi N

    N

    Alternatively, from an examination

    of the band diagram biis equal to

    q

    EE Npcgpbi

    where Egpis the energy gap of the p-side

    material

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    p+-N Heterojunction under equilibrium -9

    Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 35

    p and Nrepresent the differences of the Fermi levels with respect to the valence band edge

    and the conduction band edge, respectively, in the neutral regions. That is,

    xfcN

    xvfp

    EE

    EE

    |

    |

    Both p and Nare calculated from the equilibrium statistics equations given in

    Once the doping levels are specified,

    bifor the heterojunction is readily

    calculated.

    Other quantities such as N0and

    V(x) are then obtained from the

    Equations derived above.

    kTEE

    c

    cf

    eNn

    kTEE

    v

    fv

    eNp

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    p+-N Heterojunction under equilibrium -10

    Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 36

    EXAMPLE

    Let us draw a band diagram for a (p) GaAs/(N) AI0.35Ga0.65As. As heterojunction at thermal

    equilibrium. The doping level and relevant material parameters are

    Egap(GaAs) =1.42 eV Egap(AlAs) =2.16 eV

    Nd=1x1016cm-3 Na=3x10

    19cm-3

    eV

    N

    pA

    N

    pA

    N

    pA

    N

    pA

    N

    p

    kT

    EE

    VVVVV

    fv

    p 103.0ln

    4

    4

    3

    3

    2

    21

    eVN

    nkTEEeNn

    d

    cfn

    kT

    EE

    C

    cf

    093.0101

    1072.3ln0259.0ln

    16

    17

    With A1=3.53x10-1, A2=-4.95x10

    -3, A3=1.48x10-4, A4=-4.42x10

    -6 Nv=4.7x1018cm-3

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    p+-N Heterojunction under equilibrium -11

    Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 37

    eVxx

    xxAsGaAlE xxg 86.1

    0.45for x143.0125.090.1

    45.00for247.1424.1)(

    21

    Energy gap of the AlxGa1-xAs material is determined by the valley at x0.45. The energy gap (in eV) is given as:

    The energy gap difference (Eg) in an AlxGa1-xAs/GaAs heterojunction is shared between the

    conduction band and the valence band. That is Eg= Ec+ Evwhere Ec is the conductionband discontinuity and Evis the valence band discontinuity. The amount of Evis linearly

    dependent on the aluminum mole fraction (x) for all values of x. Evand Ec in an AlxGa1-

    xAs/GaAs heterojunction are therefore given by

    xxEv 55.0)(

    0.45 x143.0)55.0125.0(476.0

    0.45x055.0247.1

    )( 2xx

    x

    xEc

    E0. is 0.244 eV. Egp the energy gap of the narrower gap material (GaAs), is 1.424 eV.

    Therefore, the built-in voltage is found

    eVbi 678.1093.0)103.0(244.0424.1

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    p+-N Heterojunction under equilibrium -12

    Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 38

    The relative dielectric constants are 13.18 for GaAs and 12.09 for Al0.35Ga0.65As. p0can be

    found as

    V

    N

    N

    N

    N

    dN

    ap

    bipp

    dN

    ap

    bi

    4

    16

    19

    00

    1013.5)101(09.12

    )103(18.131/678.1

    1/1

    N0which is equal to bi- p0 is 1.678 - 5. 13 x 10-41.6775 V. It is clear from this calculation

    that if one side is significantly more heavily doped than the other practically all of the built -

    in potential drops across the depletion region of the lightly doped side. Once N0and p0 are

    determined, XN0 and Xp0are calculated from

    cm104.74677.1)101)(106.1(

    )1085.8)(09.12(22XX2

    5-

    1619

    14

    0N0

    2

    N00

    N

    d

    Nd

    N

    NqN

    Nq

    cm101.581013.5)103)(106.1(

    )1085.8)(18.13(2

    2XX

    2

    8-4

    1919

    14

    0p0

    2

    p00

    p

    a

    p

    a

    p

    pqN

    Nq

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    p+-N Heterojunction under equilibrium -13

    Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 39

    The depiction thickness of the heavily

    doped side is merely 1.58 which is

    practically zero. With the calculatedparameters, the band diagram is drawn as

    shown in the figure.

    The band profiles vary parabolically with

    position as given by equations:

    p0

    2

    0 2

    x-x)(

    Nd

    N

    XNq

    xV

    )2

    Xx2x()(

    2

    p00

    2

    pap

    XNqxV

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    Semiconductor Heterojunctions

    Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 40

    To construct a band diagram for an abrupt p-n heterojunction, we proceed in the same

    manner as for the p-n homojunction. We begin with two separate materials. Since thematerials have different bandgaps, there must exist a discontinuity in the conduction band

    (Ec) and/or the valence band (Ev) at the interface . The difference in the bandgap between

    the two materials is equal to the sum of the conduction band and valence band discontinuities

    N-type p-type

    vcggg EEEEE 21

    Abrupt p-n heterojunction

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    Graded p-n heterojunction

    Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 41

    Although the abrupt p-n heterostructure discussed in the previous section did result in an

    increase in the barrier to hole injection, the notch in the conduction band at the interfacealso caused an undesirable increase in the barrier to electron injection. While the net effect

    was still an increase in the ratio In/Ip, eliminating this notch further increases In/Ipto a value

    Tk

    E

    LND

    LND

    I

    I

    B

    g

    nap

    pdn

    hetp

    n exp

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    Graded p-n heterojunction -2

    Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 42

    In order to reduce this notch, the bandgap of the

    p material can be graded upwards from thejunction, as shown in the figure. For example, in

    an n-AlGaAs/p-GaAs graded heterostructure, the

    n material is GaAs at the junction and is graded to

    the final AlGaAs composition over a short

    distance. The final shape of the notch depends on

    the length and profile of the grade; longer gradingtypically gives a smaller notch. However, it is

    important that the grade is contained well within

    the depletion region. If the grade ends outside the

    depletion region, then the barrier seen by holes

    decreases, thus reducing the benefits of the

    heterojunction. Note that the barrier to holes inboth abrupt and graded heterojunctions is the

    same. It is just the barrier for electron flow that is

    reduced in the graded structures, allowing for the

    increased ratio of In/Ip.

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    Example: Designing a p-n heterojunction grade

    Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 43

    Consider four different n-p+Al0.3Ga0.7As/GaAs heterojunctions with ND= 1017and

    NA= 5 1018. The AlGaAs in these junctions is graded from x = 0 to x = 0.3 over

    XGrade= 0(abrupt), XGrade = 100A, XGrade= 300A, and XGrade= 1. Calculate and plot the energyband diagrams for the above four cases.

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    Example: Designing a p-n heterojunction grade

    Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 44

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    Quasi-electric fields

    Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 45

    In a homogeneous semiconductor, the

    separation between the conduction and

    valence bands is everywhere equal to thesemiconductor bandgap. Any electric field

    applied to the material therefore results in an

    equal slope in the conduction and valence

    bands, as indicated in the figure.

    When a hole or electron is placed in this

    structure, a force of magnitude eE will act on

    the particle.

    The magnitude of the force is equal to the

    slope of the bands and is the same for both

    electrons and holes. However, the direction of

    the force is opposite for the two particles.

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    Quasi-electric fields -2

    Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 46

    An interesting phenomenon arises in

    semiconductors with graded bandgaps, such as

    the bipolar transistor emitter-base structureshown at the top figure .

    In the graded region, the bandgap is not constant,

    so the slopes in the conduction and valence bands

    are no longer equal. Hence the forces acting on

    electrons and holes in this region are no longerequal in magnitude.

    It is in general possible for a force to act on only

    one type of carrier, as shown in the top figure, or

    for forces to act in the same direction for both

    electrons and holes, as in the bottom figure. Suchbehavior cannot be achieved by pure electric

    fields in homogeneous materials. These fields,

    which were first described by Herbert Kroemer in

    1957, are therefore referred to as quasi-electric

    fields.

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    Quasi-electric fields -3

    Nezih Pala [email protected] EEE 6397Semiconductor Device Theory 47

    In a given material, the total field acting on a hole or an electron is always the sum of the

    applied field and the quasi field, or

    The applied field, which results from applying a voltage difference between the ends of the

    material, will always be the same for both electrons and holes, but the quasi field could be

    different for both. The band profiles in figures in the last slide can therefore be achieved in a

    number of different ways. For example, the profile in top figure could be achieved in the

    following two ways:

    quasieapptote ,, quasihapptoth ,,

    1. An undoped (intrinsic) material with a graded composition and zero applied electric field

    typically results in the profile in the lower figure. If an electric field app= e,quasiis then

    applied to this material, the resulting profile will be the one shown in the upper figure.

    2. A uniformly doped n-type material with a graded composition and zero applied electric

    field will also result in the profile in the upper figure. In this case, the doping ensures that

    the separation between the conduction band and the Fermi level remains approximately

    constant. Notice that the resulting quasi-electric field in this structure acts only on minority

    carriers.

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    Quasi-electric fields -4

    Quasi-electric fields provide engineers with additional tools that can beexploited in device design. They have proven to be very useful in decreasing

    transit times in devices that rely on minority carrier transport.

    For example, in bipolar technology, a highly doped graded base layer is often

    used to speed up the transport of minority carriers from the emitter to the

    collector. For a base with uniform bandgap, minority carriers injected from the

    emitter must diffuse across the base, a process that is generally slow. By using a

    highly doped graded base to generate a quasi-electric field, such as was

    described in the second example above, minority carriers can be swept across

    much more quickly, thus reducing the base transit time and improving the

    device RF performance.