globalfoundries used equipment€¦ · model su-3100 vintage 2011 serialno 530l00394a...

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Transaction Information ToolId DC08 ToolStatus Running Wafers Location East Fishkill, NY WaferSize 300 mm FabSection Clean General Product Information VendorSupplier SCREEN/DNS Model SU-3100 Vintage 2011 SerialNo 530L00394A AssetDescription SINGLE WAFER WET STATION SoftwareVersion NA CIM NA Process SP-SC1-SC2-HF

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Page 1: GLOBALFOUNDRIES USED EQUIPMENT€¦ · Model SU-3100 Vintage 2011 SerialNo 530L00394A AssetDescription SINGLE WAFER WET STATION SoftwareVersion NA CIM NA Process SP-SC1-SC2-HF SystemType

Transaction Information

ToolId DC08ToolStatus Running WafersLocation East Fishkill, NYWaferSize 300 mmFabSection Clean

General Product Information

VendorSupplier SCREEN/DNSModel SU-3100Vintage 2011SerialNo 530L00394AAssetDescription SINGLE WAFER WET STATIONSoftwareVersion NACIM NAProcess SP-SC1-SC2-HF

Page 2: GLOBALFOUNDRIES USED EQUIPMENT€¦ · Model SU-3100 Vintage 2011 SerialNo 530L00394A AssetDescription SINGLE WAFER WET STATION SoftwareVersion NA CIM NA Process SP-SC1-SC2-HF SystemType

Hardware Configuration (Fab)

SystemType Description Quantity StatusMain System 8 CHAMBER AQUASPIN OK Factory Interface FOUP 4 OK Handler System Yasakawa 1 OK Options System naOthers na

Hardware Configuration (Subfab / Auxilliary Units)

Description Quantity StatusCooling Unit 1 OK

Missing/Faulty Parts / Accesorries List

Description Quantitynone 1

Page 3: GLOBALFOUNDRIES USED EQUIPMENT€¦ · Model SU-3100 Vintage 2011 SerialNo 530L00394A AssetDescription SINGLE WAFER WET STATION SoftwareVersion NA CIM NA Process SP-SC1-SC2-HF SystemType

Tool Pictures

general Main Body

Page 4: GLOBALFOUNDRIES USED EQUIPMENT€¦ · Model SU-3100 Vintage 2011 SerialNo 530L00394A AssetDescription SINGLE WAFER WET STATION SoftwareVersion NA CIM NA Process SP-SC1-SC2-HF SystemType

manufactureserial S/N MFG Plate

Page 5: GLOBALFOUNDRIES USED EQUIPMENT€¦ · Model SU-3100 Vintage 2011 SerialNo 530L00394A AssetDescription SINGLE WAFER WET STATION SoftwareVersion NA CIM NA Process SP-SC1-SC2-HF SystemType

Additional Configuration Files

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