g section us 1002
DESCRIPTION
Sensor Systems - MitutoyoTRANSCRIPT
G-1
Sensor Systems
INDEXSensor SystemsLinear GageLinear Gage / Display Selection Guide G-2,3Linear Gage LGB G-4Linear Gage LGK G-5Linear Gage LGF G-6Linear Gage LGF-Z G-7Linear Gage LGD G-8Linear Gage LGS G-9Laser Hologage LGH G-10Linear Gage LGB G-10Laser Hologage G-11Long Stroke Linear Gage LG/LGM G-12EC Counter G-13EB Counter G-14EG Counter G-15EH Counter G-16EV Counter G-17D-EV Display Unit G-18SENSORPAK G-18Litematic and Litematic Head G-19,20Laser Scan MicrometerLaser Scan Micrometer Selection Guide G-21,22Laser Scan Micrometer LSM-9506 G-23Laser Scan Micrometer LSM-902 / 6900 G-24Laser Scan Micrometer LSM-500S G-25Laser Scan Micrometer LSM-501S G-26Laser Scan Micrometer LSM-503S G-27Laser Scan Micrometer LSM-506S G-28Laser Scan Micrometer LSM-512S G-29Laser Scan Micrometer LSM-516S G-30LSM-5200 Display Unit G-31Optional Accessories for LSM G-32Laser Scan Micrometer Application Example G-33
Linear Gages
Laser Scan Micrometers
Linear Gage LGK
Laser Scan Micrometer LSM-500S
G
US-1002
G-2
Linear Gage / Display Selection Guide
LGF® 5μmLGF-525L-B
0.005mmNo/Nut
Page G-6 Page G-6
0.0005mm
LGF® 0.5μmLGF-0510ZL-B LGF-0525ZL-B
Origin Mark
Page G-6 Page G-6 Page G-6
0.001mm
LGF® 1μm LGF-110ZL-B LGF-125ZL-B
Origin Mark
Page G-6 Page G-6 Page G-6
0.01mm
LGD-1010L-B LGD-1025L-B
LGD® Digimatic
Page G-8 Page G-8 Page G-8
LGS-1012P
LGS Digimatic
Page G-9 Page G-9
Liner GageResolution 5mm 10mm 25mm
0.00001mmLGH 0.01μmLaser Hologage
LGH-110
Page G-11 LGH-110C Page G-10
0.0001mm
LGB®2((( Page G-4 LGB2-0105L LGK-0110 Page G-5 LGF-0125L-B
LGK Page G-5 LGF-0110L-B
LGF® 0.1μm Page G-6Page G-4
Page G-6 Page G-6
LGH 0.1μmLaser Hologage
LGH-1010
Page G-10 LGH-1010CC Page G-10
Motor Drive
Page G-12
0.0005mmLGK Page G-5 LGF-0510L-B Page G-6 LGF-0525L-B
LGF® 0.5μm Page G-6 LGK-0510
Page G-5 Page G-6
0.001mm
LGK Page G-5 LGK-110 Page G-5 LGF-125L-BLGF® 1μm LGF-110L-B
Page G-6 Page G-6 Page G-6
LGB® LGB-105L LGB-110 LGB-110S
φ8mm P399LGB-110H( LGB-110A( Page G-4
Page G-4 Page G-4 LGB-110-1( LGB-110AR( Motor Drive
Page G-12
LGB
No/Nut Page G-4
LGB2-105LPage G-4
LGB2-110LGB2-110H(LGB2-110-1(LGB2-110S(LGB2-110AR( Page G-4
US-1002
G-3
LGF-550L-B
EG-101Z
Page G-6
LGF-0550ZL-B EH-11ZR EV-16ZPage G-15
Page G-6
LGF-150ZL-B EB-11Z Page G-16 Page G-17
Page G-6 Page G-14
LGD-1050L-B EC-101D EH-102D EV-16D
Page G-13(
EG-101D
Page G-8
Page G-15
EB-11D
Page G-14 Page G-16 Page G-17
Linear Gage Display50mm 100mm Single Display Double Display Multigage System
EH-120S
Page G-11
EG-101P EH-102PLG-01100LG-01100C
LGM-01100LGM-01100C EH-101P
Page G-15Page G-12
Page G-16
Page G-12 Page G-16
LGF-0550L-B EG-101P EH-102P EV-16P
Page G-6
LGF-150L-B
Page G-6 Page G-15 Page G-16 Page G-17
LG-1100NLG-1100C
EB-11P
Page G-12
LGM-1100NPage G-12 Page G-14
EH-101P
Page G-16
US-1002
G-4
(HIROSE)RM12BPG-6P
Connecting cable (2m)
Connecting cable (2m)
30
82.7
20.4
ø9 18
ø9
ø14 ø9.5 75
6.3
15.9
25
.1
4.9
(thre
ad)
No.200365 Clamping nut
L
L=11.5 to 13.0
ø9
542-204MASS: 145g
542-244MASS: 160g 542-222, 542-222H
MASS: 140g542-262, 542-262H
MASS: 150g
542-230MASS: 165g
542-270MASS: 170g
18
ø9
ø8
9 24
.6
75
0 - 0.009
0 - 0.009
7.3
ø9.5
ø4.2
ø7.9
Knurl
ø12
ø14
113 20
.2
15.9
34
.9
4.9
(thre
ad)
No.200365
L
L=11.5 to 13.0
113
15.4
34
.9
ø8
7.3 60
.1
50.3
113 4.
5 15
.9
L
29.3
ø9.5
Applicable air hose (ID ø2.5)
(No.200365)
L=11.5 to 13.0
60.1
(3
9.3)
102 21
.2
15.4
23
.9
10.5
ø8
Stro
ke 1
0.5m
m
or lo
nger
Stro
ke 1
0.5m
m
or lo
nger
9.6
5
Air inlet (Applicable air hose: ID ø2.5)
542-230
4.9 9.2
0 - 0.009
0 - 0.009
Clamping nut
0 - 0.009
Clamping nut
Knurl
0 - 0.009
20.4 30
47
Dsub 15-pin
100
Linear Gage LGBSERIES 542 — 0.001mm Reading
542-204, 542-204H 542-222, 542-222H,542-224, 542-401
542-244542-262, 542-262H,542-264, 542-421
FEATURES•Extremelycompactdesign.Availablewithanoutsidediameterassmallas8mm.•Thesmallphotoelectriclinearencoderassureshighprecisionovertheentirestrokerange.
•Theballbearingsusedinthespindleunitensuresuperbdurability.
542-270
542-230, 542-223
DIMENSIONS AND MASS Unit: mm
Technical DataAccuracy: RefertothelistofspecificationsResolution: 1µmInchResolution:RefertotheapplicablecountersLengthstandard:PhotoelectriclinearencoderMax.responsespeed:900mm/sContactpoint: ø3mmcarbideStem: ø8mmorø9.5mmBearingtype: StrokeballbearingMeasuringforce:RefertothelistofspecificationsOutputsignal: 90°phasedifference,differentialsquare
wave(RS-422Aequivalent) (Sign-waveoutput:542-401, 542-424)
Signalpitch: 4µmCablelength: 80”/2mDust/Waterprotectionlevel:IP54
Optional Accessories238773: Rubberbootfor5mmLGB(spare)238772: Rubberbootfor10mmLGB(spare)902434: Extensioncable(5m)902433: Extensioncable(10m)902432: Extensioncable(20m)
Applicable CountersEHcounter(542-060A, 542-062A)EBcounter(542-092-2)EGcounter(542-015)EVcounter(542-063)
SPECIFICATIONSRange Order No. Resolution Accuracy Measuring force* Stemdia. Remarks5mm(.2”) 542-204 0.001mm 2µm 0.65N/0.6N/0.55N 8mm —5mm(.2”) 542-204H 0.001mm 1µm 0.65N/0.6N/0.55N 8mm —10mm(.4”) 542-222 0.001mm 2µm 0.8N/0.75N/0.7N 8mm —10mm(.4”) 542-222H 0.001mm 1µm 0.8N/0.75N/0.7N 8mm —10mm(.4”) 542-401 0.001mm 2µm 0.8N/0.75N/0.7N 8mm Sine-waveoutput10mm(.4”) 542-224 0.001mm 2µm 0.6N/0.55N/0.5N 8mm —10mm(.4”) 542-230 0.001mm 2µm 0.8N/0.75N/0.7N 8mm w/pneumaticcylinder10mm(.4”) 542-223 0.001mm 2µm 0.8N/0.75N/0.7N 8mm w/pneumaticcylinder5mm(.2”) 542-244 0.001mm 2µm 0.65N/0.6N/0.55N 9.5mm Lowmeasuringforce10mm(.4”) 542-262 0.001mm 2µm 0.8N/0.75N/0.7N 9.5mm —10mm(.4”) 542-262H 0.001mm 1µm 0.8N/0.75N/0.7N 9.5mm —10mm(.4”) 542-421 0.001mm 2µm 0.8N/0.75N/0.7N 9.5mm Sine-waveoutput10mm(.4”) 542-264 0.001mm 2µm 0.6N/0.55N/0.5N 9.5mm Lowmeasuringforce10mm(.4”) 542-270 0.001mm 2µm 0.8N/0.75N/0.7N 9.5mm w/pneumaticcylinder*Postureofgage:Upward()/Horizontal()/Downward()
US-1002
G-5
Technical DataAccuracy: Refertothelistofspecifications
(excludingquantizingerror)Resolution: 1µm,0.5µmor0.1µmInchResolution: RefertotheapplicablecountersLengthstandard:PhotoelectriclinearencoderMax.responsespeed:1500mm/s,400mm/s(542-158)Contactpoint: ø3mmcarbideStem: ø8mmBearingtype: StrokeballbearingMeasuringforce:RefertothelistofspecificationsOutputsignal: 90°phasedifference,differentialsquare
wave(RS-422Aequivalent)Signalpitch: 0.4µm(542-158),2µm(542-157),4µm
(542-156)Cablelength: 80”/2mDust/Waterprotectionlevel:IP66
Optional Accessories238772: Rubberboot(10mm)902434: Extensioncable(5m)902433: Extensioncable(10m)902432: Extensioncable(20m)02ADE230: Airdriveunit02ADB680: Thruststemset02ADB682: Clamping nut02ADB683: Wrench
Applicable CountersEHcounter(542-060A, 542-062A)EGcounter(542-015)EBcounter(542-092-2)*EVcounter(542-063)**Onlyapplicableforresolution0.0005mmand0.001mmLGK
Clamping nut for thrust stemM9.5X0.5
10.6
or
long
er (s
trok
e)
ø8-0.0090
146.
573
.1
ø12
125.
5
82.7
30 20.4
Connecting cable(2m)
(HIROSE)RM12BPE-6PH
DIMENSIONS AND MASS Unit: mm
MASS: 250g
Linear Gage LGKSERIES 542 — 0.1µm, 0.5µm or 1µm Reading
SPECIFICATIONSRange Order No. Resolution Accuracy* Measuring force** Stemdia. Remarks10mm(.4”) 542-156 0.001mm (1.5+L/50)µm 0.65N/0.6N/0.55N 8mm —10mm(.4”) 542-157 0.0005mm (1.5+L/50)µm 0.65N/0.6N/0.55N 8mm —10mm(.4”) 542-158 0.0001mm (0.8+L/50)µm 0.65N/0.6N/0.55N 8mm —*L=Measuredlength(mm)**Postureofgage:Upward()/Horizontal()/Downward()
542-158 542-157 542-156
FEATURES•Compactdesignwitha8mmstem
diameter•Excellentprotectionagainstdustandwatersplash(IP-66)inharshshop-floorenvironments.•Maximumpermissibleaccelerationvaluesforshockandimpact,11ms(IEC68-2-27)•Outputdifferentialsquarewavesignalsforawiderangeofapplications.
•Employslinearstrokebearingsonthespindlemovementfordurability•ThrustStemwithaclampingnutisoptional.•Interchangeablecontactpointsfordialindicatorscanbeused.
US-1002
G-6
Linear Gage LGFSERIES 542 — 0.1µm, 0.5µm or 1µm Reading
SPECIFICATIONSRange Order No. Resolution Accuracy* Measuring force** Stemdia. Remarks10mm(.4”) 542-181 0.0001mm (0.8+L/50)µm 1.2N/1.1N/1.0N 8mm —10mm(.4”) 542-171 0.0005mm (1.5+L/50)µm 1.2N/1.1N/1.0N 8mm —10mm(.4”) 542-161 0.001mm (1.5+L/50)µm 1.2N/1.1N/1.0N 8mm —25mm(1”) 542-182 0.0001mm (0.8+L/50)µm 4.6N/4.3N/4.0N 15mm —25mm(1”) 542-172 0.0005mm (1.5+L/50)µm 4.6N/4.3N/4.0N 15mm —25mm(1”) 542-162 0.001mm (1.5+L/50)µm 4.6N/4.3N/4.0N 15mm —25mm(1”) 542-612 0.005mm (7.5+L/50)µm 4.6N/4.3N/4.0N 15mm50mm(2”) 542-173 0.0005mm (1.5+L/50)µm 5.7N/5.3N/4.9N 15mm —50mm(2”) 542-163 0.001mm (1.5+L/50)µm 5.7N/5.3N/4.9N 15mm —50mm(2”) 542-613 0.005mm (7.5+L/50)µm 5.7N/5.3N/4.9N 15mm*L=Measuredlength(mm)**Postureofgage:Upward()/Horizontal()/Downward()
542-161
DIMENSIONS AND MASS
Unit: mm
Optional Accessories238772: Rubberboot(10mm)962504: Rubberboot(25mm)962505: Rubberboot(50mm)902434: Extensioncable(5m*)902433: Extensioncable(10m*)902432: Extensioncable(20m*)02ADB680: Thruststemset(for10mmrangemodels)02ADB690: Thruststemset(for25,50mmrangemodels)02ADE230: Airliftingunits(10mmrange)02ADE250: Airliftingunits(25mmrange)02ADE270: Airliftingunits(50mmrange)*notavailablefor542-181 and 542-182
Technical DataAccuracy: RefertothelistofspecificationsResolution: 1µm,0.5µmor0.1µmInchResolution: RefertotheapplicablecountersLengthstandard:PhotoelectriclinearencoderMax.responsespeed:1500mm/s,(400mm/s:542-181,
542-182)Contactpoint: ø3mmcarbideStem: ø8mm or ø15mmBearingtype: StrokeballbearingMeasuringforce:RefertothelistofspecificationsOutputsignal: 90°phasedifference,differentialsquare
wave(RS-422Aequivalent)Signalpitch: 4µm(542-161, 542-162, 542-163),
2µm(542-171, 542-172, 542-173)or 0.4µm(542-181, 542-182)
Cablelength: 80”/2mDust/Waterprotectionlevel:IP66
Applicable CountersEHcounter(542-075A, 542-071A)EGcounter(542-015)EBcounter(542-092-2)EVcounter(542-063)
542-162 542-163
542-613
542-172542-173
542-171
M9.5×0.5
M9.5×0.5
02ADB682
02ADB681
12
(13.8)
φ9.5-0.015 0
414.5
9.5
6
17.3
φ8 -0.009 0
12.3
10.6
34
(12
9.5)
15.4 61.5
46.9
φ18
41
14.80.6
75.7
14
6.95
45.9
LGF-110L-B_03.ai
THRUST STEM
NUT
W /
THRU
ST S
TEM
STRO
KE
CABLE LENGTH=2m
M14×0.5
M18×1
02ADN371
02ADB692
21
(24.2)
φ18-0.018 0
5918.5
φ18
41
20.6
30.7
61.7
φ15 -0.015 0
13.8
26
(20
8.3)
34
8.6
93.6
114.
76.
522
200.6
4.5
84.1
LGF-125L-B_03.ai
THRUST STEM
NUT
CABLE LENGTH=2m
W/ T
HRUS
T ST
EM
STRO
KE
LGF-150L-B_03.ai
M18×1
02ADN371
02ADB692 M14×0.5
142
34
13.8
(31
6)
0.6
φ15-0.015 0
61.720.6
56.1
8.6
41
φ18
18.5
9 5
φ18-0.018 0
(24.2)
21
4.5
124.
9
174
629
.6
20
THRUST STEM
NUT
CABLE LENGTH=2m
W/ T
HRUS
T ST
EM
STRO
KE51
.5
542-181542-171542-161
542-182542-172542-162542-612
542-173542-163542-613
US-1002
G-7
Linear Gage LGF-Z with Origin Point MarkSERIES 542 — 0.5µm or 1µm Reading
SPECIFICATIONSRange Order No. Resolution Accuracy* Measuring force** Stemdia. Remarks10mm(.4”) 542-174 0.0005mm (1.5+L/50)µm 1.2N/1.1N/1.0N 8mm w/originpointmark10mm(.4”) 542-164 0.001mm (1.5+L/50)µm 1.2N/1.1N/1.0N 8mm w/originpointmark25mm(1”) 542-175 0.0005mm (1.5+L/50)µm 4.6N/4.3N/4.0N 15mm w/originpointmark25mm(1”) 542-165 0.001mm (1.5+L/50)µm 4.6N/4.3N/4.0N 15mm w/originpointmark50mm(2”) 542-176 0.0005mm (1.5+L/50)µm 5.7N/5.3N/4.9N 15mm w/originpointmark50mm(2”) 542-166 0.001mm (1.5+L/50)µm 5.7N/5.3N/4.9N 15mm w/originpointmark*L=Measuredlength(mm)**Postureofgage:Upward()/Horizontal()/Downward()
542-174 542-175 542-176
542-165 542-166
DIMENSIONS AND MASS Unit: mm
Optional Accessories238772: Rubberboot(10mm)962504: Rubberboot(25mm)962505: Rubberboot(50mm)02ADB680: Thruststemset(for10mmrangemodels)02ADB690: Thruststemset(for25,50mmrangemodels)02ADE230: Airliftingunits(10mmrange)02ADE250: Airliftingunits(25mmrange)02ADE270: Airliftingunits(50mmrange)
Technical DataAccuracy: RefertothelistofspecificationsResolution: 1µmor0.5µmInchResolution: RefertotheapplicablecountersLengthstandard:PhotoelectriclinearencoderMax.responsespeed:1500mm/sContactpoint: ø3mmcarbideStem: ø8mm or ø15mmBearingtype: StrokeballbearingMeasuringforce:RefertothelistofspecificationsOutputsignal: 90°phasedifference,differentialsquare
wave(RS-422Aequivalent)Signalpitch: 4µm(542-164, 542-165, 542-166)or
2µm(542-174, 542-175, 542-176)Cablelength: 80”/2mDust/Waterprotectionlevel:IP66
Applicable CountersEHcounter(542-073A)EBcounter(542-094-2)EGcounter(542-017)EVcounter(542-067)
542-164
542-174542-164
CABLE LENGTH=2m
M9.5×0.5
M9.5×0.5
02ADB682
02ADB681
6
17.3
φ8-0.009 0
12.310.6
34
(12
9.5)
61.5
46.9
15.4
φ16.7
34
12
(13.8)
φ9.5-0.015 0
414.5
9.5
14.80.6
75.7
14
6.95
45.9
LGF-110ZL-B_03.ai
THRUST STEM
W/ T
HRUS
T ST
EM
NUT
STRO
KE M14×0.5
02ADB692
02ADN371
M18×1
18.5
9 5
φ18-0.018 0
(24.2)
21
34
φ16.7
93.6
8.6
34
(20
8.3)
26
13.8
φ15-0.015 0
61.7
30.7
20.6
4.5
84.1
200.6
114.
76.
522
LGF-125ZL-B_03.ai
THRUST STEM
NUT
W/ T
HRUS
T ST
EM
CABLELENGTH=2m
STRO
KE
LGF-150ZL-B_03.ai
M14×0.5
M18×1
02ADN371
02ADN371
18.5
9 5
φ18-0.018 0
(24.2)
21
34
φ16.7
142
34
13.8
(31
6)
0.6
φ15-0.015 0
61.720.6
56.1
8.6
4.5
124.
9
174
629
.6
20
THRUST STEM
NUT
W/ T
HRUS
T ST
EM
STRO
KE 5
1.5
CABLELENGTH=2m
542-175542-165
542-176542-166
US-1002
G-8
Linear Gage LGD SERIES 575 — .0005” / 0.01mm Reading
575-326
575-328
575-327
TheLGDisanultra-compactABSLinearGagedesignedtofitintoverytightspaces.Itkeepstrackofitsoriginpointonceset.
FEATURES•Theuseofanabsolutescale* inthesensormakesitpossibletomaintaintheoriginsettingevenwhenthepowerisswitchedoff.
•Speciallinearballbearingsareusedforthespindleguidetoensurealongservicelife.
•OptionalthruststemandtighteningnutfacilitatesetupoftheLGDlineargageinholesofaplateorfixture.
DIMENSIONS AND MASS
Unit: mm
Technical DataAccuracy: RefertothelistofspecificationsResolution: 1µmor.0005”Lengthstandard:Capacitance-typeABSOLUTElinearencoderMax.responsespeed:UnlimitedContactpoint: ø3mmcarbideStem: ø8mm or ø15mmBearingtype: StrokeballbearingMeasuringforce:RefertothelistofspecificationsOutput signal: Digimatic outputExternalinput: Origin-settingsignal(Absoluteoriginposition
canbechangedexternally.)Cablelength: 80”/2mm
Optional Accessories238772: 10mmrubberboot(spare)962504: 25mmrubberboot(spare)962505: 50mmrubberboot(spare)02ADC730: ø9.5mmThruststemset(for10mmmodel)02ADC740: ø18mmThruststemset(for 25mm/50mm model)965275*: DigimaticPowerSupplyUnit02ADE230: Airliftingunits(10mmrange)02ADE250: Airliftingunits(25mmrange)02ADE270: Airliftingunits(50mmrange)* TodenoteyourAClinevoltageaddthefollowingsuffixestotheorderNo.(e.g.:965275A): A for UL/CSA, D for CEE, E for BS, F for SAA, DCforChina,K for EK, No suffixisrequiredforJIS/100V
Applicable CountersECcounter(542-007A)EBcounter(542-093-2)EGcounter(542-016)EVcounter(542-064)SPECIFICATIONS
Metric
Range Order No. Resolution Accuracy Measuring force* Stemdia. Remarks10mm 575-326 0.01mm 20µm 1.2N/1.1N/1.0N 8mm —25mm 575-327 0.01mm 20µm 4.6N/4.3N/4.0N 15mm —50mm 575-328 0.01mm 30µm 5.7N/5.3N/4.9N 15mm —
Inch
Range Order No. Resolution Accuracy Measuring force* Stemdia. Remarks.4” 575-336 .0005” .001” 1.2N/1.1N/1.0N 8mm —1” 575-337 .0005” .001” 4.6N/4.3N/4.0N 15mm —2” 575-338 .0005” .0012” 5.7N/5.3N/4.9N 15mm —
LGD
LGD
575-326575-336
02ADB681
02ADB682
M9.5×0.5
M9.5×0.5
46.9
61.515.4
(12
9.5)
34
10.6
12.3
φ8-0.009 0
17.3
20
37
8.6
6
9.5
14.5
4
φ9.5-0.015 0
(13.8)
12
545
.9
75.7
14
6.9
14.80.6
LGD-1010L-B_03.ai
THRUST STEM
W/ T
HRUS
T ST
EM
STRO
KE
CABLELENGTH=2m
NUT
M14×0.5
02ADB692
02ADN371
M18×1
18.5
9 5
φ18 -0.018 0
(24.2)
21
93.6
8.6
34
(20
8.3)
26
13.8
φ15 -0.015 0
20
37
8.6
61.7
30.7
20.6
4.5
84.1
200.6
114.
76.
522
LGD-1025L-B_03.ai
THRUST STEM
NUT
W/ T
HRUS
T ST
EM
STRO
KE
CABLELENGTH=2m
M14×0.5
M18×1
02ADN371
02ADB692
18.5
9 5
φ18 -0.018 0
(24.2)
21
142
34
13.8
51.5
(31
6)
0.6
φ15-0.015 0
37
208.6
61.720.6
56.1
8.6
4.5
124.
9
174
629
.6
20
LGD-1050L-B_03.ai
THRUST STEM
NUT
W/ T
HRUS
T ST
EM
STRO
KE
CABLELENGTH=2m
575-327575-337
575-328575-338
US-1002
G-9
37.3
17
5.9
65.9
25.9
146.
1
35 17.4
ø10.5
6.8
24.2
20 8.6
37
Linear Gage LGSSERIES 575 — .0005” / 0.01mm Reading
SPECIFICATIONSMetric
Range Order No. Resolution Accuracy Measuring force* Stemdia. Remarks12.7mm 575-303 0.01mm 0.015mm 2.0N/1.8N/1.6N 8mm —
575-303
Technical DataAccuracy: RefertothelistofspecificationsResolution: 0.01mmor.0005”Lengthstandard:Capacitance-typeABSOLUTElinearencoderMax.responsespeed:UnlimitedContactpoint: ø3mmcarbide(ø3mmsteel:575-313)Stem: ø8mmor3/8”DIABearingtype: Slide-bearingMeasuringforce:RefertothelistofspecificationsOutput signal: Digimatic outputCablelength: 80”/2mDust/Waterprotectionlevel:IP66
Optional Accessories238774: Sparerubberboot903594: AirDriveUnit(metric)903598 AirDriveUnit(inch)02ADF640: SPCcableextensionadapter02ADD950: Extensioncable(0.5m)936937: Extensioncable(1m)965014: Extensioncable(2m)––––––: EC Counter
Inch
Range Order No. Resolution Accuracy Measuring force* Stemdia. Remarks.5” 575-313 .0005” .0006” 2.0N/1.8N/1.6N 3/8 DIA —*Postureofgage:Upward()/Horizontal()/Downward()
TheLGSiscompactLinearGagedesignedtofitintotightspaces.
DIMENSIONS AND MASS Unit: mm
Applicable CountersECcounter(542-007A)EBcounter(542-093-2)EGcounter(542-016)EVcounter(542-064)
MASS: 190g
US-1002
G-10
Connecting cable (2m)
30
82.7
20.4
ø9
18
ø9
ø14ø9.5 0
- 0.00975
6.3
15.9
25.1
4.9
(thre
ad)
(HIROSE)RM12BPG-6P
Clamping nut (No.200365)
L
L=11.5~13.0
5 (Measuring range)
45.4
0.1m type with R1.5 carbide point
Connector for lifting cable
Stem dia
85
148.
3 (0
.1m
type
)
25
10 (M
easu
ring
rang
e)
1020
ø15h6
1840
0-0.011
ø9
18
ø9
ø14ø9.5 0
- 0.009756.
315
.925
.1
4.9
(thre
ad)
Clamping nut (No.200365)
L
L=11.5~13.0
5 (Measuring range)
Connecting cable (2m)
30
82.7
20.4
(HIROSE)RM12BPG-6P
Laser Hologage LGHSERIES 542 — 0.1µm Reading
Linear Gage LGBSERIES 542 — 0.1µm Reading
SPECIFICATIONSRange Order No. Resolution Accuracy Measuring force* Stemdia. Remarks10mm(.4”) 542-711-1 0.1µm 0.2µm 0.55N/0.45N/0.35N 15mm —10mm(.4”) 542-712-1 0.1µm 0.2µm 0.1N/—/— 15mm Lowmeasuringforce*Postureofgage:Upward()/Horizontal()/Downward()
542-711-1
542-246
Technical DataAccuracy: RefertothelistofspecificationsResolution: 0.1µmInchResolution:RefertotheapplicablecountersLengthstandard:Laser-hologrammeasurementsensorMax.responsespeed:250mm/sContactpoint: R1.5mmcarbideStem: ø15mmBearingtype: HighprecisionlinearballbearingMeasuringforce:RefertothelistofspecificationsOutputsignal: 90°phasedifference,differentialsquare
wave(RS-422Aequivalent)Signalpitch: 0.25µmCablelength: 80”/2m
Optional Accessories 902434: Extensioncable(5m)902433: Extensioncable(10m)902432: Extensioncable(20m)238773: Rubberboot
SPECIFICATIONSRange Order No. Resolution Accuracy Measuring force* Stemdia. Remarks5mm(.2”) 542-246 0.1µm 0.8µm 0.65N/0.60N/0.55N 9.5mm —*Postureofgage:Upward()/Horizontal()/Downward()
Theseareextra-highaccuracygagingheadsprovidedwithresolutionupto0.0001mm.Thecompactdimensionsalloweasyinstallationtoverytightspaces.TheLaserHologageemploysauniqueholographyscaleasthelengthstandard,ensuring excellent measuring accuracy and repeatability.Thededicateddisplayunit(EHCounter)isoptional.
FEATURES•Alinearballbearinginthespindleguideprovidesexcellentdurabilityforanextendedservicelife.•The0.0001mmreadingtypeLGBlineargage(542-246)comeswithaclampingnutonthestem.
DIMENSIONS AND MASS Unit: mm
DIMENSIONS AND MASS Unit: mm
Technical DataAccuracy: RefertothelistofspecificationsResolution: 0.1µmInchResolution:RefertotheapplicablecountersLengthstandard:PhotoelectriclinearencoderMax.responsespeed:380mm/sContactpoint: R1.5mmcarbideStem: ø9.5mmBearingtype: LinearballbearingMeasuringforce:RefertothelistofspecificationsOutputsignal: 90°phasedifference,differentialsquare
wave(RS-422Aequivalent)Signalpitch: 0.4µmCablelength: 80”/2mDust/Waterprotectionlevel:IP54
Optional Accessories238773: Rubberboot971751: Stemfixtureforfixingtotopsurface971752: Stemfixtureforfixingtobottomsurface971753: Spindleliftingcable971750: Laser Hologage stand
Applicable CountersEHcounter(542-075A, 542-071A)EGcounter(542-015)
Applicable CountersEHcounter(542-075A, 542-071A)EGcounter(542-015)
MASS: 200g
MASS: 160g
US-1002
G-11
Laser HologageSERIES 542 — 0.01µm / 1µin Reading
SPECIFICATIONSRange Order No. Resolution Accuracy Measuring force* Stemdia. Remarks10mm(.4”) 542-925A 0.01µm/1µinch 0.1µm 0.55N/0.45N/0.35N 15mm —10mm(.4”) 542-926A 0.01µm/1µinch 0.1µm 0.1N/—/— 15mm Lowmeasuringforce*Postureofgage:Upward()/Horizontal()/Downward()
Gage headEH-120S
Technical DataAccuracy: RefertothelistofspecificationsResolution: 0.01µmLengthstandard:Laser-hologrammeasurementsensorMax.responsespeed:250mm/sContactpoint: R5mmcarbideStem: ø15mmBearingtype: HighprecisionlinearballbearingMeasuringforce:RefertothelistofspecificationsOutputsignal: 90°phasedifference,two-phasesinewaveSignalpitch: 0.25µmCableLength: 80”/2m
Optional Accessories971751: Stemfixtureforfixingtotopsurface971752: Stemfixtureforfixingtobottomsurface971753: Spindleliftingcable971750: Laser Hologage stand
TheMitutoyoLaserHologageisahigh-enddigitalgagingsystemthatemploysdiffractedlaserbeaminterferencetomakehighlyaccurateandrepeatablemeasurements.Itfeaturesultra-finediffractiongratingswhichareholographicallyrecordedonthescale.TheLaserHologageissuitableformeasuringultra-highprecisionparts,especiallythoseinsemiconductorandrelatedindustries.
FEATURES•Highlyaccuratemeasurementduetoanultra-highresolutionof0.00001mm(0.01µm),whichisclosetotheperformanceoflaserinterferometers.•Excellentmeasuringstability—thedesignisalsohighlyresistanttounfavorableenvironmentalconditionssuchasairmovementandatmosphericpressurechanges.•High-precisionlinearballbearingsareusedintheguideforextremelysmoothmovementandexceptionaldurability.•Adisplayunitisprovided.
DIMENSIONS AND MASS
Unit: mm
68
72
27 5.1
68
Dimensions of opening (panel mounting)
Panel thickness: 1 to 3.2 mm
Rubber foot (provided)
138
Showing the AC adapter connection
11.2
10
+1+0.5
+0.
7+
0.3
Stand (provided)
(3.1
)
156.7
148.2144
137
138
137
45.4
85
146
(0.0
1m t
ype)
25
10 (M
easu
ring
rang
e)
1020
ø15h6
1840
0-0.011
100
107
235
8
5 13
Display Unit
Connector for lifting cable
(Stem dia.)
0.01mm type with R5 carbide point
MASS: 200g
MASS: 900g
US-1002
G-12
RM12
BPG
-6P
(HIR
OSE
)
Cab
le le
ngth
(2m
)
2-ø4
.5, ø
9 de
pth
5
33
34
1720
ø6
49
50
13
429
Stro
ke 1
02 o
r lon
ger
191.
56
736
243.
568
34
49 33
17
55
36 7
20
Stro
ke 1
02 o
r lon
ger
Rubb
er b
oot
67
236
243.
5
473.
5
6RM
12BP
G-6
P (H
IRO
SE)
11PR
H/1
2PRH
(A c
ount
er v
arie
s de
pend
ing
on th
e ga
ge)
Con
nect
ing
cabl
e (2
m)
2-ø4
.5, ø
9 de
pth
4
Out
put c
able
leng
th (2
m)
Driv
e un
it ca
ble
leng
th (2
m)
2-ø4
.5, 9
dep
th 5RM
12BP
G-6
P (H
IRO
SE)
HR1
0A-7
P-6P
(HIR
OSE
)
13
50
619
1.5
Stro
ke 1
02 o
r lon
ger ø6
429
17
34
49 33
736
243.
568 50
36 7
1720
34
33
Out
put c
able
leng
th (2
m)
Driv
e un
it ca
ble
leng
th (2
m)
2-ø4
.5, ø
9 de
pth
4RM12
BPG
-6P
(HIR
OSE
)
HR1
0A-7
P-6P
(HIR
OSE
)
Stro
ke 1
02 o
r lon
ger
Rubb
er b
oot23
6
6724
3.5
473.
5
11PR
H/1
2PRH
(A co
unte
r var
ies d
epen
ding
on
the
gage
)
Long Stroke Linear Gage LG/LGMSERIES 542 — 0.1 / 1µm Reading
DIMENSIONS AND MASS
542-312
Motor drive unit
542-313
Technical DataAccuracy: RefertothelistofspecificationsResolution: 1µmor0.1µmInchResolution:RefertotheapplicablecountersLengthstandard:PhotoelectriclinearencoderMax.responsespeed:400mm/s(800mm/s:motor-driventype)Contactpoint: ø3mmcarbideStem: ø20mmBearing type: Bearing guideMeasuringforce:RefertothelistofspecificationsOutputsignal: 90°phasedifference,differentialsquare
wave(RS-422Aequivalent)Cablelength: 80”/2mDust/Waterprotectionlevel:IP54
FEATURES•Therearethreetypesincludingthestandardmodel,lowmeasuringforcemodel,andrubberbootmodel(made-to-order)available.
Standard/Low measuring force type Rubber boot type Standard type (motor-driven type) Rubber boot type (motor-driven type)Unit: mm
Applicable CountersEHcounter(542-075A, 542-071A)EGcounter(542-015)EBcounter(542-092-2)*EVcounter(542-063)** Resolution 1µm LGM only
MASS: 750g MASS: 940g
MASS: 780g MASS: 970g
SPECIFICATIONSRange Order No. Resolution Accuracy* Measuring force** Stemdia. Remarks100mm(4”) 542-312 0.1µm (2+L/100)µm≤ 2.5µm 8.0N/6.5N/5.0N 20mm Standard100mm(4”) 542-316 0.1µm (2+L/100)µm≤ 2.5µm 3.0N/—/— 20mm Lowmeasuringforce100mm(4”) 542-314 0.1µm (2+L/100)µm≤ 2.5µm 8.0N/6.5N/5.0N 20mm w/rubberboot100mm(4”) 542-332 1µm (2.5+L/100)µm≤ 3µm 8.0N/6.5N/5.0N 20mm Standard100mm(4”) 542-336 1µm (2.5+L/100)µm≤ 3µm 3.0N/—/— 20mm Lowmeasuringforce100mm(4”) 542-334 1µm (2.5+L/100)µm≤ 3µm 8.0N/6.5N/5.0N 20mm w/rubberboot*L=Measuredlength(mm)**Postureofgage:Upward/Horizontal/Downward
Range Order No. Resolution Accuracy* Measuring force** Stemdia. Remarks100mm(4”) 542-313 0.1µm (2+L/100)µm≤ 2.5µm 3.0N/6.5N/9.5N 20mm Motor-drivenType100mm(4”) 542-315 0.1µm (2+L/100)µm≤ 2.5µm 4.5N/—/6.0N 20mm Motor-drivenType100mm(4”) 542-333 1µm (2.5+L/100)µm≤ 3µm 3.0N/6.5N/9.5N 20mm Motor-drivenType100mm(4”) 542-335 1µm (2.5+L/100)µm≤ 3µm 4.5N/—/6.0N 20mm Motor-drivenType*L=Measuredlength(mm)**Postureofgage:Upward()/Horizontal()/Downward()Withrubberboot:542-315, 542-335
US-1002
G-13
48
96 6.6 67 (8)
44.
4
91.4
44.
4
EC CounterSERIES 542 — Assembly Type Display Unit for LGD and LGS
DIMENSIONS AND MASS
Unit: mm
SPECIFICATIONSModel EC-101DOrder No. 542-007AApplicableinput Digimaticcode(SPC)Applicablegage LGD,LGD-L,LGD-ML,LGSandSPCoutputgages.Numberofgageinput 1Resolution .001”,.0005”,.0001”,.00005”/0.01mm,0.001mm
(Automaticallysetdependingonthegage.)Display 6-digitandanegative[-]signLED(Amber,Green,Red)
542-007
FEATURES•EmployedtheDINsize(96X48mm)andmount-on-panelconfiguration,whichgreatlyfacilitatestheincorporationintoasystem.•PossibletoproduceeithertolerancejudgmentoutputorDigimaticoutput(SPC).
FunctionZero setPreset, GO/±NG judgment
Output (selectable)Tolerance judgment:-NG,OK,+NG(open-collector)Data:Digimaticcode(SPC)
External control signal inputPreset,datahold
Power supplyViaACadaptor06AEG302JA(Standardaccessory)
Optional Accessories936937:SPCcable(40"/1m)965014:SPCcable(80"/1m)214938:PJ-2(DCPlug)C162-155:GO/±NGjudgementcable
MASS: 500g
US-1002
G-14
91.4
44.4
154.6
48
96
6.6 137 (11)
EB CounterSERIES 542 — Assembly Type Display Unit with Multiple Limit Setting
FEATURES•Possibletoproduce3-step/5-stepX7kindsoftoleranceoutputandlimitvalueoutputindependentlyforeachof7channels.•ProvidedwithserialBCDoutputcapability,whichmakestheconnectiontoaprogrammablecontrollerorpersonalcomputer,etc.possiblewiththeminimumcablingrequirement.
•Possibletoperformdynamicmeasurementwiththesimplifiedanalogoutput.•EmployedtheDINsize(96X48mm)andmount-on-panelconfiguration,whichgreatlyfacilitatestheincorporationintoasystem.
542-092
542-094
542-093
SPECIFICATIONSModel EB-11P EB-11Z EB-11DOrder No. 542-092-2 542-094-2 542-093-2Applicableinput Differentialsquare-wave Differentialsquare-wave
w/originpointmarkDigimaticcode(SPC)
Applicablegage LGK, LGF, LGB, LGE LGFwithoriginpointmark LGD, LGSNumberofgageinput 1Resolution .0005”,.0001”,.00005”,.000005”/ .0005”,.0001”,.00005”/
0.01mm,0.005mm,0.001mm,0.0005mm 0.01mm,0.001mmTolerancejudgmentdisplay LEDdisplay(3steps:Amber,Green,Red/5steps:Amber,Amberflash,Green,Redflash,Red)
FunctionPreset,tolerancejudgmentoutput(3/5-stepX7kinds),limitvalueoutput(2kindsindependentlyforeachofthe7channels),peak(maximum,minimum,runout)measurement,diversedataoutput(serialBCD,simplifiedanalog)
OutputTolerance judgment: L1 to L5, open-collectorControl:Normaloperationsignal(NORMAL),open-collector
External control signal inputPreset,displayhold,peakvalueclear,tolerancejudgmentBANKswitch,open-collectororno-voltagecontactsignal(with/withoutcontactpoint)
InterfaceSerial BCD: Bit-serial format, open-collectorAnalog output:2.5V+CountingvalueXvoltageresolution(25mV/2.5mV):Full-scale0to5VDigimatic input/output: •Connectingtotheexternalswitchbox(No.02ADF180)makesiteasytoentertolerancelimitsandpresetvalues.Note)Thiscannotbeusedwhenthegageisconnectedtoa Mitutoyo DP-1VR Digimatic Mini-Processor
•PossibletoconnectwithaMitutoyoDP-1VRDigimaticMini-Processor.
•NumberoftolerancestepscanbeexpandedbymakingasetofEB-Dcounters.
Quantization error±1 count
Maximum input frequency1.25MHz(Theresponsespeeddependsonthegagebeingused.)Theresponsespeeddependsonthegagebeingused.(542-093)
Power supply voltageDC+12to24V
Power consumption6W(500mA)orless(Securepowersupplymorethan1Aforeachunit.)
DIMENSIONS AND MASS Unit: mm
MASS: 400g
Optional Accessories02ADB440: I/O output connector02ADF180: 10-key unit936937: SPCcable(40”/1m)965014: SPCcable(80”/2m)02ADD930: Terminalblockconnectingcable 02ADN460: AC adapter02ZAA010: Powercable
02ADB440 02ADN460 02ZAA010
US-1002
G-15
154.6
48
96 6.6 137 (11)
91.4
44.4
EG CounterSERIES 542 — Assembly Type Display Unit
542-015
542-017
542-016
FEATURES•Possibletoproduce3-step/5-stepX3kindsoftoleranceoutputandBCDoutput.•Thesmoothingfunctioncanreducethefluctuationofdisplaydigits.
SPECIFICATIONSModel EG-101P EG-101Z EG-101DOrder No. 542-015 542-017 542-016Applicableinput Differentialsquare-wave Differentialsquare-wave
w/originpointmarkDigimaticcode(SPC)
Applicablegage LGK, LGF, LGB, LGE, LGM, LGH (excludingwithoriginpoint
andsignwavetypes)
LGFwithoriginpointmark LGD, LGS
Numberofgageinput 1Resolution(Dependingonthelineargagetypeconnected)
.001”,.0005”,.0001”,.00005”,.00001”,.000005”/0.01mm,0.005mm,0.001mm,0.0005mm,0.0001mm
.001”,.0005”,.0001”,.00005”/
0.01mm,0.001mmTolerancejudgmentdisplay LEDdisplay(3steps:Amber,Green,Red/5steps:Amber,Amberflash,Green,Redflash,Red)
•EmployedtheDINsize(96X48mm)andmount-on-panelconfiguration,whichgreatlyfacilitatestheincorporationintoasystem.
DIMENSIONS AND MASS Unit: mm
MASS: 400g
FunctionPreset,directionswitch,tolerancejudgment(3/5-step,3kinds).peak(max.,min.,runout)measurement,constantnumber,smoothing,errordisplay/output,protectionoverkeys
OutputTolerance judgment:L1toL5(Switchoverbetweenopen-collectoroutputandBCDoutputbymeansoftheparameter)Control:NOM(normalsignal)open-collectorBCD:6-digit(positive/negative-truelogic)open-collector(Switchoverbetweentolerancejudgmentoutputbymeansoftheparameter)
External control signal inputPreset,displayhold,peakvalueclear,tolerancejudgmentBANKswitch
Quantization error±1 count
Maximum input frequency1.25MHz(Theresponsespeeddependsonthegagebeingused.)
Power supply voltageDC+12to24V
Power consumption6W(500mA)orless(Securepowersupplymorethan1Aforeachunit.)
Optional Accessories02ADD930:Terminalconnectingcable02ADB440: I/O output connector 02ADN460: AC adapter02ZAA010: Powercable
02ADB440 02ADN460 02ZAA010
US-1002
G-16
68
72
27 5.1
68
Dimensions of opening (panel mounting)
Panel thickness: 1 to 3.2 mm
Rubber foot (provided)
138
Showing the AC adapter connection
11.2
10
+1+0.5
+0.
7+
0.3
Stand (provided)
(3.1
)
156.7
148.2144
137
138
137
EH CounterSERIES 542 — Multi-function Display Unit
FEATURES•DINcompatiblePanel-mountingtypeandDINsize(144x72mm).Itcanbeeasilyincorporatedintoeachsysteminstrument.•Thiscountercanbeusedonadesktopbymountingitonthesuppliedstandleg.•ThestandardRS-232CinterfaceallowseasycommunicationwithanexternalPC.•TheRSLinkfunctionpermitsmultipleEHcounters(6unitsmaximum)tobe
connectedwithdaisychainanddatatobeinput/outputfromonechanneloftheterminalRS-232Cinterface.•Themaximumvalue,minimumvalue,andTIR(runout)measurementsarepossible.•The2-gageinputtypecanperform2-axisdisplayandmakeadditionorsubtractioncalculationsbetween2gages.
542-075AEH-101P
FunctionZeroset,preset,limitsetting(3or5-step),GO/±NGjudgement,GO/±NGsignaloutput,MAX/MIN/TIR(runout)measurement,countingdirectionswitching,doublereading,mm/inchswitching,sum/differencecalculationof2gages(542-071A,542-073A,542-074A,542-072Aonly),outputmode selection
OutputI/O:Tolerancejudgmentoutput(3/5stages),normaloperationoutputRS-232CorDigimaticcode(selectable):Various measurement data
External ControlI/O:Preset,DataholdandErrorclearRS-232C:Displayedvalueoutput,MAX/MIN/TIRswitching,Zeroset,peakvalueclear,presetvalueinput,tolerancevalueinputanderrorclear
RS LinkUptosixEHcountersmaybeconnectedviaoneRS-232Cport.(daisychain)
Error display/outputPower-supplyvoltageerror,overspeederror,overflowerror,gage error, communication error, and tolerance setting error
Power supply: Standard accessoryViaACadaptor(12-24VDC,700mA(max)
DIMENSIONS Unit: mm
Model EH-101P EH-102P EH-102Z EH-102S EH-102DOrder No. 542-075A 542-071A 542-073A 542-074A 542-072AApplicableinput 2.5MHz(Differentialsquare-wave) 1MHzDifferential
sine-waveDigimatic code SPC
Applicablegage LGK, LGF withscaleorigin point mark, LGB,LGH(0.1um)
LGFwithscaleoriginpoint mark, LGF 5um
LGH(0.01um) LGD, LGS, ID
Numberofgageinput 1(Single-display) 2(Double-display)Resolution(Dependingonthelineargagetypeconnected)
.000005”,.00005”,.0005”/ 0.0001mm,0.0005mm,0.001mm,0.005mm,0.01mm
.000001”/0.1um,0.01um
.0005”/0.01mm
Mass 760g 800g 800g 900g 800gTolerancejudgmentdisplay LEDdisplay(3step:Amber,Green,Red/5step:Amber,Amberflash,Green,Redflash,Red)
SPECIFICATIONS
542-071AEH-102P
542-073AEH-102Z
542-074AEH-102S 542-072A
EH-102D
Optional Accessories02ADB440: I/O output connector02ADF180: 10-key unit936937: SPCcable(40”/1m)965014: SPCcable(80”/2m)02ADD930: Terminalblockconnectingcable 02ADN460: AC adapter02ZAA010: Powercable
02ADB440 02ADN460 02ZAA010
US-1002
G-17
144
6.54.
5
4 4136
672
5 5161
16 16139
InterconnectingEV counters
Affixing anEV counter
44
64
Linear gage
RS-232C output
Tolerance judgment output BCD output Segment output RS-232C output
D-EV Display unit
Programmable controller
Linear gage
PC system
EV Counter EF Counter
EV CounterSERIES 542 — For Multi-gage System
542-063 542-064 542-067
FEATURES•Uptosixgagescanbeconnectedtooneunit.•Abletoconnectupto10EVcounterstoonepersonalcomputerusingtheRSlinkfunctiontofacilitatetheconfigurationof a multi-point measurement system comprisingamaximumof60gages.•Arangeofoutputmodestochoosefrom;
I/O output for tolerance judgment and
segment output, BCD data output and RS-232outputareavailable.•Peak-holdmeasurementsarepossibleformaximumvalue,minimumvalue,runout(TIR),etc.•Abletocalculateasum,average,
maximum, minimum, maximum difference, etc.,betweengagesconnectedtothesameunit.
SPECIFICATIONSModel EV-16P EV-16Z EV-16DOrder No. 542-063 542-067 542-064Applicableinput Differentialsquare-wave Digimaticcode(SPC)Applicablegage LGB(ex.0.0001mmresolution),
LGF, LGE, LGLGFwithoriginpointmark LGD, LGD-M, LGS
Numberofgageinput 6Resolution(internal)-nodisplaycapability
.000005”,.00005”,.0005”/0.0005mm,0.001mm,0.005mm,0.01mm
.00005”*,.0005”/0.001mm*,0.01mm
Mass 910g 910g 830g*:WillnotbeindicatedwhencombinedwithaLGgage.
System Diagram
DIMENSIONS Unit: mm
FunctionGO/±NGjudgment,GO/±NGsignaloutput,MAX/MIN/TIR(runout)measurement,countingdirectionswitching,mm/inchswitching,calculationofsum,average,maximum,minimumandmaximumdifferencebetweenspecifiedaxes,andoutput-modeselection
OutputI/O:NormaloperationoutputandGO/±NGsignal(threesteps),measurementdata(BCDcode),or21-stagesegmentoutput(selectable)RS-232C:Variousmeasurementdata
External ControlI/O:Axisdesignation,preset,datahold,anderrorclearRS-232:Displayedvalueoutputcommand,MAX/MIN/TIRswitchingandpeakvalueclear,zeroset,presetvalueinput,tolerancevalueinput,errorclear,andcommandtooutputcalculatedvaluebetweenspecifiedaxes
RS LinkUpto10EVcountersmaybeconnectedviaasingleRS-232port.(daisychain)EVandEHcounterscanbemixed(inwhichcaseatotalofsixcounterscanbeconnected).
Error display/outputPower-supplyvoltageerror,overspeederror,overflowerror,gageerror, communication error, and tolerance setting error
Maximum input frequency1.25MHz(differentialsquare-wave):MaxcountingSpeed:5MHz
Power supplyTerminalblock(M3screws),DC+12to+24V,700mA(max.)
Optional Accessories02ADB440: I/O output connector02ADD400:D-EV(externaldisplayunit)936937:RSlinkconnectorcable(40"/1m)965014:RSlinkconnectorcable(80"/2m)357651:ACadapter(mustorder02ADD930and02AAA010)02ADD930:Terminalconnectingcable02ADN460: AC adapter02ZAA010: Powercable
02ADB440 02ADN460 02ZAA010
US-1002
G-18
91.467 (11)6.6
44.4
96
48
D-EV Display Unit
SENSORPAK
02ADD400
FEATURES•DisplayunitfortheEVcounter.•UsingthisdisplayallowsvarioussettingsfortheEVcounterwithoutapersonalcomputerorotherequipment.•AbletodisplayeachaxismeasurementvalueandGO/NGjudgmentresult,totalGO/NG judgment result for all axes, setting details,anderrors.
+0.8 0
+0.8 0
•DINcompatiblecompactpanel-mounting-cutout dimensions 45 x 92•TherequiredpowersupplyisDC+12to+24V,200mA(357651+02AAA010)at theterminalblock(02ADD930).
Thissoftwarefacilitatestheloadingofmeasurement data from a linear gage counterwiththeRS-232Cinterfaceintouser’spersonalcomputer.
FEATURES•Maximum60channelsofmeasuringpointscanbeprocessed.•Possibletoperformarithmeticalcalculationandmaximumwidthcalculationusingthemeasurementdata.•PossibletoexportthemeasurementdataintoMS-Excel.•Diversegraphicfunctions(numericvaluedisplay,meterdisplay,bar-graphdisplay,overalljudgmentdisplay)•Frequencyofdataloading:Max.9999times(60ch)to60000times(6CH)
DIMENSIONS AND MASS Unit: mm
MASS: 150g
SPECIFICATIONSModel D-EVOrder No. 02ADD400
SPECIFICATIONSOrder No. Description54SAA622 Sensorpak
PLC
I/O cable
License key RS-Link
GO/NO-GO signal
External trigger signal
SENSORPAK
CPU: 2GH or faster OS: Windows 2000 or XP Memory: 256MB or more
RS232C cable (option)
CD-ROM
Linear gage / EH, EV counter (max. 10 pcs.)
Technical DataNumberofconnectableunits:Onedisplayunitallows external display and setting for one EV counter.Displayeddigits:Itusesasinglesignplussixdigits(EV counteroperatesoneight-digitdata internallybutdisplaysonlythelastsixdigits).LEDdisplay: Channeldisplay(alsofordisplayofjudgment result):3(three-colorLED)Measurement modedisplay(current,maximum,minimum, runout):2Statusdisplay:1(two-color)Operatingswitches:4Switchesandtheirfunctions:Channelswitching, measurementmodeswitching(current value,maximumvalue,minimumvalue andrunout),parametersetting,preset,and tolerance settingInput/output: RSLinkconnectors:1inand1out.Errordisplay: Overspeed,gageerrorandothers.Powersupply: Terminalblock(M3screws),DC+12to +24V,200mA
Optional Accessories527428A: ACadapter(mustorder02ADD930)357651: AC adapter (mustorder02ADD930and02AAA010)02ADD930: Terminalconnectingcable02ADN460: AC adapter02ZAA010: Powercable
02ADB440 02ADN460 02ZAA010
US-1002
G-19
Litematic and Litematic HeadSERIES 318 — High-resolution Measuring Unit
FEATURES•TheLitematicisdesignedformeasuringeasily-deformedworkpiecesandhigh-precisionpartssuchaspingages,thin-wallbearings,plasticparts,andsprings.•Extra-lowmeasuringforceof0.01N(1gf).•SuperLitematicemploysauniqueLaserHoloscaleasthelengthstandard,ensuringexcellent measuring accuracy and repeatability.
•Ceramicanvilisfreefromcorrosionandeasytomaintain(Litematic).•Themeasuringunitcanbemountedontofixturesoranoptionalstandtoallowgreatflexibilityofuse(LitematicHead).•IncludesSPCoutput.
SPECIFICATIONSRange Order No. Resolution Accuracy(at20°C±1°C)** Remarks
0 - 50mm
318-221A
0.01µm,0.1µm,1µm,0.5µinch,5µinch,50µinchswitchable
(0.5+L/100)µm L=Measuredlength(mm)
1 piece unitw/ø100mmgroovedceramicanvil318-222A
318-223A318-226A
Seperate Type318-227A318-228A
318-226ALitematic Head
DP-1VR Input tool
Applications
*Digimaticoutputistosixsignificantfigures.
318-221ALitematic
Technical DataAccuracy: Refertothelistofspecifications.
(excludingquantizingerror)Resolution: Refertothelistofspecifications.Repeatability: s=0.05µmDisplayunit: 8digitsand14mmcharacterheightStroke: 51.2mm(usingstandardcontactpoint)Measuring force: 0.01N:318-221A 0.15N:318-222A 1N: 318-223A 0.01N:318-226A 0.15N:318-227A 1N: 318-228ASpindle feed speed: 2mm/s, 4mm/s, 8mm/sLengthstandard:PhotoelectriclinearencoderContactpoint: ø3mmcarbideballPowersupply: 85-264VAC
Optional Accessories936937: SPCcable(1mm)965014: SPCcable(2mm)957460: 300x250mmgranitestandwithbracket
for Litematic Head101118: Contactpoint,Shell120066: Contactpoint,ø0.45mmneedle(carbide)120059: Contactpoint,ø7.0mmspherical(carbide)120060: Contactpoint,ø10.5mmspherical(carbide)937179T: Footswitch264-504-5A: Digimatic Mini-processor DP-1VR264-012-10: Inputtool(forUSBport)02ADM260-2: SENSORPAK (datacapturesoftwarew/I/Ocable)
Shownwithoptionalgranitestand
US-1002
G-20
202 300
103.2
56
Unit: mm
380
.2
Measuring table ø100Clamp screw
for Measuringtable
Contact point
Display
Operation switch
85 150
170
82.9
5
ø32
12.5
29 80 14.8
172
186.4 50.2
80.2
(11)
56
Measuring unit
Litematic Head VL-50S-B
318-2226A
318-2227A
318-2228A
Optional stand for VL-50S-B: 957460
Litematic VL-50-B
318-221A
318-222A
318-223A
Litematic VL-50AH
318-217A
Display unit Connecting cable 2m
4-M4x0.7 depth 10 1
5
80
2
70
ø50
300
48 80
56
157
Clamp
365
Column
Feed nut Base
Bracket
Hexagon socket head cap screw
(4-M4x0.7)
Litematic head
10
SR2.5
ø5
7 3
ø0.4
5
Material: CarbideFlatness: 3µm
Material: Hardened steel
Material: Carbide
10 1.7
øD
SR
ød
Measuring force 0.03N 0.06N
D ø7.5
ø10.5
d ø6.5 ø9.5
SR 7
10
Order No. 101118
Measuring force 0.02N
Order.No. 120059 120060
Order No. 120066
Measuring force 0.01N
Interchangeable contact points
(11°)
ø60
Worktable ø26
80.2
50.2
172
186.4 42 286
128.
2
202
103.2
397.
8
DIMENSIONS
Unit: mm
US-1002
G-21
Laser Scan Micrometer Selection GuideMEASURING UNITSAppearance Model Laser
ClassificationMeasuringrange
Resolution(Selectable)
LSM-902* Visible(650nm),IEC Class 2/FDA Class II
0.1-25mm(.004"-1.0")
0.01µm-10µm(.000001"-.0005")
LSM-500S Visible(650nm),IEC Class 2/FDA Class II
0.005-2mm(.0002"-.08")
0.01µm-10µm(.000001"-.0005")
LSM-501S Visible(650nm),IEC Class 2/FDA Class II
0.05-10mm(.002"-.4")
0.01µm-10µm(.000001"-.0005")
LSM-503S Visible(650nm),IEC Class 2/FDA Class II
0.3-30mm(.012"-1.18")
0.02µm-100µm(.000001"-.005")
LSM-506S Visible(650nm),IEC Class 2/FDA Class II
1 - 60mm(.04"-2.36")
0.05µm-100µm(.000002"-.005")
LSM-512S Visible(650nm),IEC Class 2/FDA Class II
1 - 120mm(.04"-4.72")
0.1µm-100µm(.000005"-.005")
LSM-516S Visible(650nm),IEC Class 2/FDA Class II
1 - 160mm(.04"-6.30")
0.1µm-100µm(.000005"-.005")
Withdisplayunit
LSM-9506
Measuring unit - display unit one-piece structureforbench-top use only
Visible(650nm),IEC Class 2/FDA Class II
0.5-60mm(.02"-2.36")
0.05µm-100µm(.000002"-.005")
DISPLAY UNITSAppearance Model Type Application Interface units
equippedLSM-6200LSM-6900*
Multi-function type Bench-topuse •RS-232C•I/O•Analogoutput
LSM-5100** Compact type(Lowcost)
Assembly/bench-topuse(DINsize)
•RS-232C•I/O•Analogoutput
*LSM-902andLSM-6900arefactory-setpackage.**WhenconnectingwiththeLSM-500Sseries,thescanningspeedbecomes1600scans/sec.
US-1002
G-22
Laser Scan Micrometer
Enamelwire(Coatedwire)CableSpringwireTungstenwirePressurehose
Pins located in parallel Gap of rollers RubberrollerRollerbearingMotorshaft
Blade*Using offset function
TapeBeltBracketcable
OpticalfiberGlasstube*OnlysegmentNos.1and2canbeused.
*Using offset function
Diametermeasurement
Intervalmeasurement
Intervalmeasurement
Out of roundness(T.I.R)
Heightmeasure-ment*
Transparent partmeasurement*
Tape widthmeasurement
Linearitymeasure-ment*
Scanning
Reference edge
Reference edge
Reference edge
Dual-Unit Measurement: Byusinganoptionaldual-typeaddonunit(02AGP150),onedisplayunitcanprocessthemeasurementdatafromtwomeasuringunits.e.g.)Twomeasurementswithasingledisplayunit
e.g.)XYmeasurementwithadisplayunit[X–Yor(X+Y)/2]
e.g.)Twolaserunitsusedtomeasurelargediameterworkpieces
PROG.0(segmentNo.2isON.)andPROG.5(segmentNo.4isON.)
Dual-Program Measurement:Twomeasurementprogramswithdifferentconditionsareset,andcanbeperformedatthesametime.e.g.)Measurementoftwodimensions
US-1002
G-23
382 180 85
172 13.5
150 10100
647
2540 52.5365 100 100 82
50
22
1011 8
120
1152
8
98
180
8021
3
60
202
11
100
1060
83 97
ø3.1 (Measurement position)
Measuringregion
Cab
lesp
ace
12-M3
Laser Scan Micrometer LSM-9506SERIES 544 — Bench Top Type Non-contact Measuring System
LSM-9506
Optional Accessories02AGD170: CalibrationgagesetforLSM-950602AGD600B: Thermalprinter(w/120VACadapter)
DIMENSIONS AND MASS
SPECIFICATIONSModel LSM-9506Order No. 544-116-1AMeasuring range .02-2.36”(0.5-60mm)Measuring area .02x2.36”(5x60mm)(*1)Scanning Rate 1600/secResolution .000002to.005"(0.00005to0.1mm)[Selectable]Repeatability ±.00003"(±0.6µm)(±2σ measuringrate:0.32s)Accuracy Linearity(*2)
±.0001"(±2.5µm)Theopticalaxisdirection±.0001"(±2.5µm)Thescanningdirection±(.00008+L/10000)"[L:inch](*3)±(2.0+L/10)µm[L:mm](*3)
Laser type VisiblesemiconductorlaserWavelengths:670nmScanningspeed:8900”/s(226m/s)
Display
Measuring function
Fluorescentdisplay16-digit+11-digit,guidanceLEDsSegmentdesignation:1to7(1to3forTransparent)10Programstorage(PROG.0toPROG.9)255EdgeDesignationscanbedetectedMultiLimitGO/±NGToleranceJudgment(upto7intervals)Dual-Axis LED Display
Offset Setting and MasteringReference Value SettingAutomatic Workpiece DetectionDual-GageCalibrationInch/mmConversionAbnormalDataEliminationDual Program MeasurementStatistical ProcessingWorkpiece Position displayFoot-switchConnector
Data output standard RS-232C, I/O Analog Interface, SPCPowerSupplyPowerCordPowerSwitchOperating Environment
AC100V-240V±10%50/60Hz40VA930966Keyswitchuse32~104°F(0~40°C),35-85%RH(withoutcondensation)
(*1):Theareagivenby[measuringrangeontheopticalaxis]x [Measuringrangeinthescanningdirection].(*2):Specifiedatthecenterofthemeasurementregion.(*3):L=Deviationbetweenthecenterofworkpieceandtheopticalaxis.(Seefig.1)
Unit: mm
MASS: 13kg
US-1002
G-24
Laser Scan Micrometer LSM-902 / 6900SERIES 544 — Ultra-high Accuracy Non-contact Measuring System
LSM-902 measuring unit
LSM-6900 display unit
DIMENSIONS AND MASSUnit: mm
544-496A
SPECIFICATIONSLSM-902Measuring range .004-1.0”(0.1-25mm)Resolution .000001to.0005”(0.00001to0.01mm)[Selectable]Repeatability*1 ±.000002”(±0.05µm)*2
Linearity*1 Wholerange ±.00002”(±0.5µm)*3
Small range ±(.000012+.0001 D)”[ D:inch]*3 *4±(0.3+0.1 D)µm[ D:mm]*3 *4
Positional error*1 *5 ±.000020"(±0.5µm)Measuring region ±.6x1.0"(±1.5x25mm)*6
Numberofscans 800/secLaserwavelength 650nm[VisibleLD],1.5mW(peak)Laser scanning speed 2240"/sec(56m/sec)LSM-6900Display Fluorescentdisplay16-digit+11digit,GuidanceLEDs
Measuring function*7
Segment designation 1to7(1to3forTransparentmaterial)Edge designation 1 to 255Averagingmethod Simpleaveraging1to2048Movingaveraging:32to2048
Tolerancejudgement(GO,±NG);Multi-limitjudgement(7classes);Off-set/Zero-set;Abnormaldataelimination;Automaticworkpiecedetection;Referencevaluesetting;Dataoutputcondition; Laserpowerdeterioration;Samplemeasurement;Statistical processing;Dual-programmeasurement;Automaticmeasurementusingedgemode;Workpiecepositiondisplay;Transparentobjectmeasuring;Key-lockfunction;mm/inchchangeover; Dual-gagecalibration;Selectionofresolution;Judgementinreadystate;Displayofacommatomarkthethousandthsposition;Mastering;None-displayunnecessarydigits;Groupjudgement
Scanning signal monitor connector Providedasstandard(withtheplug)Remote interlock connector Providedasstandard(withtheplug)Powerswitch KeyswitchusedBuilt-in interface RS-232C;Footswitchconnector;I/OanaloginterfaceOptional interface DCU slot Digimaticcodeoutputunit(2-ch)
Expansionslot(1-slot) 2ndI/OanalogI/F;BCDI/F;GP-IBI/F;Powersupply AC100V-240V±10%,50/60Hz,40VA*1 Accuracyinspectionenvironment/Temperature20°C±1°C,Humidity:50%±10%.*2 Therepeatabilityisdeterminedbythevaluefor±2o-atthemeasurementintervalof1.28sec.*3 Specifiedatthecenterofthemeasurementregion.*4 D:Diameterdifferencetomastergage.*5 Anerrorduetoworkpieceshifteitherintheopticalaxisdirectionorinthescanningdirection.*6 Theareagivenby[measuringrangeontheopticalaxis]x[measuringrangeinthescanningdirection.]*7 Thecombinationoffunctionsislimited,detailsaredescribedintheuser’smanual.
Optional Accessories02AGD180: CalibrationgagesetforLSM-902/690002AGD270: Workstage02AGD280: Adjustableworkstage02AGD600B:Thermalprinter(w/120VACadapter)
LSM-902 LSM-6900MASS: 5kgMASS:6.5kg
US-1002
G-25
Optional Accessories for LSM-500S02AGD110: Calibrationgageset(ø0.1mm,ø2.0mm)02AGD200: Wire guiding pulley02AGD220: Airblowcover957608: Aircleanerforairblowcover02AGN780A: Extensionsignalcable5m02AGN780B: Extensionsignalcable10m02AGN780C: Extensionsignalcable15m
Laser Scan Micrometer LSM-500SSERIES 544 — High Accuracy Non-contact Measuring System
544-532
ø3.1 hole, depth 6(Measuring position)
42 6453
10.5
15.5
20
84
104
57.5
10
18.5 9.5
14.5
6M3 (x8)
50
22
15040
230
123 68100 max.
39
8 8
34 34
4
157 73BaseEmission
Unit
Relaycable
70 min.
Reception Unit
Measuring position
Measuring region
40
40
40.5
38.5
30
M4, depth 8 (x3)
ø3.1 hole, depth 6
ø3.1 hole, depth 6
110
M4, depth 8 (x3)
To Reception Unit(Cable length: 0.6m)
A: Bottom view(Main unit detached
from base)
Cable space
9.5
9.5
Signal cable(Cablelength: 5m)
A
A
A
70 min.Cable space
Working distance
Measuring region
LSM-500S
LSM-501S
LSM-503S
Measuring position
M4, depth 8 (x3)
ø3.1 hole, depth 6
M3, depth 6 (x4)
ø3.1 hole, depth 6(Measuring position)
9029
.5
181
126
103 46
34
32
55
1111
84
32.5
25
2
15.5
40
17.5
10.5 14.5 9.5
1
Signal cable(Cable length: 5m)
A : Bottom view
ø3.1,depth 6(Referencehole)
(Reference hole)
M4, depth 8 (x3)For mounting base
Measuring region
ø3.1 (.12") hole
(Measuring position)
805.
5
18.5
10.5
15.5
9.59.5
14.5 9.5
12 11
09020
30
53 6842
57.5
70 min.
Cable space
Emission Unit
Base
Reception Unit
M4, depth 8, ø3.3 through hole (x2)For mounting side plate (Same in the back)
ø3.1, depth 6
M4, depth 8 (x3)For mounting base
A: Bottom view(Main unit detached
from base)
Measuring position
50
22 6M3 (x8)
48
202 5
48
170
130350 max.
55
8108
5080
355
95.5 65.5
250
84.5 46
105
54.5
42
150 To
ReceptionUnit(Cablelength:1.4m)
M4, depth 8, ø3.3 through hole (x3)
For mounting side plate (Same in the back)
9057
41
Relaycable
Signal cable(Cable length: 5m)
DIMENSIONS AND MASSUnit: mm
SPECIFICATIONSModel LSM-500SOrder No. 544-532Applicabledisplayunit LSM-6200Laser Scanning Range inch(mm) Upto.49”(12.5mm)
(Detectingregionsarelimitedtoabout.4”(10mm)approx.)Measuring range inch(mm) .0002to.08”(0.005to2mm).004to.08”(0.1to2mm)[*1]Resolution inch(mm) .000001to.0005"(0.00001to0.01mm)[Selectable]Repeatability[*2] inch(µm) ±.0000012"(±0.03µm)[*3]Linearity[*2] inch(µm) ±.000012"(±0.3µm)[*4]Positionalerror[*2][*5] inch(µm) ±.000016"(±0.4µm)Measuring region inch(mm) .04x.08"(1x2mm)[OpticalaxisdirectionxScanningdirection]Numberofscansforaveraging
scan 16to2048[*6]
Laserclassification Class2(Max.Output:1.3mWwithascanninglaser, semiconductorlaser:wavelength650nm)
Numberoflaserscans /sec 3200Laser scanning rate inch/sec(m/sec) 2992”/sec(76m/sec)Protectionlevel IP64Operationenvironment Temperature 0˚C to 40˚C
Humidity 35%RHto85%RH[withoutcondensation]Altitude 2000m or less
Storageenvironment Temperature -15˚C to 55˚CHumidity 35%RHto85%RH[withoutcondensation]
[*1]:Measuringrangeavailablewhensetto"Noextra-finewiremeasurement”or"Edgespecification”inthebasicsetupmode.[*2]:Environmentforaccuracyvalidation:20˚C±1˚Ctemperature;50%±10%humidity.[*3]:Thevalueof±2o witha2mm-diametergagehasbeenmeasuredfortwominuteswithameasurementintervalof 0.32seconds,where isthestandarddeviation.[*4]:Thevalueofmeasurementsinthecenterofthemeasurementregion.[*5]:Errorduetothepositionalshiftoftheworkpieceintheopticalaxisdirectionorscanningdirection[*6]:Averagingscansbetween1and8timescanbemadeif"Noextra-finewiremeasurement”isspecifiedinthebasicsetupmode. Themeasuringrange,however,islimitedto0.1mmto2mminthiscase.
MASS:1.5kg
US-1002
G-26
Optional Accessories for LSM-501S02AGD120: Calibrationgageset(ø0.1mm,ø10mm)02AGD210: Wire guiding pulley02AGD400: Adjustableworkstage02AGD440: Center support*02AGD450: AdjustableV-block*02AGD230: Airblowcover957608: Aircleanerforairblowcover02AGC150A: Extensionrelaycable1m02AGN780A: Extensionsignalcable5m02AGN780B: Extensionsignalcable10m02AGN780C: Extensionsignalcable15m*Usewithanadjustableworkstage.
544-534
Laser Scan Micrometer LSM-501SSERIES 544 — High Accuracy Non-contact Measuring System
ø3.1 hole, depth 6(Measuring position)
42 6453
10.5
15.5
20
84
104
57.5
10
18.5 9.5
14.5
6M3 (x8)
50
22
15040
230
123 68100 max.
39
8 8
34 34
4
157 73BaseEmission
Unit
Relaycable
70 min.
Reception Unit
Measuring position
Measuring region
40
40
40.5
38.5
30
M4, depth 8 (x3)
ø3.1 hole, depth 6
ø3.1 hole, depth 6
110
M4, depth 8 (x3)
To Reception Unit(Cable length: 0.6m)
A: Bottom view(Main unit detached
from base)
Cable space
9.5
9.5
Signal cable(Cablelength: 5m)
A
A
A
70 min.Cable space
Working distance
Measuring region
LSM-500S
LSM-501S
LSM-503S
Measuring position
M4, depth 8 (x3)
ø3.1 hole, depth 6
M3, depth 6 (x4)
ø3.1 hole, depth 6(Measuring position)
9029
.5
181
126
103 46
34
32
55
1111
84
32.5
25
2
15.5
40
17.5
10.5 14.5 9.5
1
Signal cable(Cable length: 5m)
A : Bottom view
ø3.1,depth 6(Referencehole)
(Reference hole)
M4, depth 8 (x3)For mounting base
Measuring region
ø3.1 (.12") hole
(Measuring position)
805.
5
18.5
10.5
15.5
9.59.5
14.5 9.5
12 11
09020
30
53 6842
57.5
70 min.
Cable space
Emission Unit
Base
Reception Unit
M4, depth 8, ø3.3 through hole (x2)For mounting side plate (Same in the back)
ø3.1, depth 6
M4, depth 8 (x3)For mounting base
A: Bottom view(Main unit detached
from base)
Measuring position
50
22 6M3 (x8)
48
202 5
48
170
130350 max.
55
8108
5080
355
95.5 65.5
250
84.5 46
105
54.5
42
150 To
ReceptionUnit(Cablelength:1.4m)
M4, depth 8, ø3.3 through hole (x3)
For mounting side plate (Same in the back)
9057
41
Relaycable
Signal cable(Cable length: 5m)
DIMENSIONS AND MASSUnit: mm
SPECIFICATIONSModel LSM-501SOrder No. 544-534Applicabledisplayunit LSM-6200Laser Scanning Range inch(mm) Upto.74”(19mm)Measuring range inch(mm) .002to.4”(0.05to10mm)Resolution inch(mm) .000001to.0005"(0.00001to0.01mm)[Selectable]Repeatability[*1] inch(µm) ±.0000016"(±0.04µm)[*2]Linearity[*1] Wholerange inch(µm) ±.00002"(±0.5µm)[*3]
Narrowmeasuring range
µm ±(0.3+0.1 D)[*3][*4]
inch ±(.000012"+.000004" D)Positionalerror[*1][*5] inch(µm) ±.00002"(±0.5µm)Measuring region inch(mm) .08×.4”(2×10mm)(Measuringregion:.002to.004”(0.05to0.1mm))
.16×.4”(4×10mm)(Measuringregion:.004to.4”(0.1to10mm))[Opticalaxisdirection×Scanningdirection]
Numberofscansforaveraging scan 1 to 2048Laserclassification Class2(Max.Output:1.3mWwithascanninglaser,
semiconductorlaser:wavelength650nm)Numberoflaserscans /sec 3200Laser scanning rate inch/sec(m/sec) 4449”/sec(113m/sec)Protectionlevel IP64Distancebetweenthelaseremission unit and reception unit
inch(mm) Standard2.68”(68mm)Max.3.93”(100mm)[*6]
Operationenvironment Temperature 0˚C to 40˚CHumidity 35%RHto85%RH[withoutcondensation]Altitude 2000m or less
Storageenvironment Temperature -15˚C to 55˚CHumidity 35%RHto85%RH[withoutcondensation]
[*1] Environmentforaccuracyvalidation:20°C±1°Ctemperature;50%±10%humidity.[*2] Avalueof±2witha10mm-diametergagehasbeenmeasuredfortwominuteswithameasurementintervalof0.32seconds,where isthestandarddeviation.[*3] Thevalueofmeasurementsinthecenterofthemeasurementregion.[*4] Disthedifferenceindiameteroftheworkpieceandthemastergage.[*5] Errorduetothepositionalshiftofworkpieceinopticalaxisdirectionorscanningdirection.[*6] Thedistancebetweenthelaseremissionunitandreceptionunitotherthanthestandard,mayaffecttheaccuracy.
MASS:1.9kg
US-1002
G-27
ø3.1 hole, depth 6(Measuring position)
42 6453
10.5
15.5
20
84
104
57.5
10
18.5 9.5
14.5
6M3 (x8)
50
22
15040
230
123 68100 max.
39
8 8
34 34
4
157 73BaseEmission
Unit
Relaycable
70 min.
Reception Unit
Measuring position
Measuring region
40
40
40.5
38.5
30
M4, depth 8 (x3)
ø3.1 hole, depth 6
ø3.1 hole, depth 6
110
M4, depth 8 (x3)
To Reception Unit(Cable length: 0.6m)
A: Bottom view(Main unit detached
from base)
Cable space
9.5
9.5
Signal cable(Cablelength: 5m)
A
A
A
70 min.Cable space
Working distance
Measuring region
LSM-500S
LSM-501S
LSM-503S
Measuring position
M4, depth 8 (x3)
ø3.1 hole, depth 6
M3, depth 6 (x4)
ø3.1 hole, depth 6(Measuring position)
9029
.5
181
126
103 46
34
32
55
1111
84
32.5
25
2
15.5
40
17.5
10.5 14.5 9.5
1
Signal cable(Cable length: 5m)
A : Bottom view
ø3.1,depth 6(Referencehole)
(Reference hole)
M4, depth 8 (x3)For mounting base
Measuring region
ø3.1 (.12") hole
(Measuring position)
805.
5
18.5
10.5
15.5
9.59.5
14.5 9.5
12 11
09020
30
53 6842
57.5
70 min.
Cable space
Emission Unit
Base
Reception Unit
M4, depth 8, ø3.3 through hole (x2)For mounting side plate (Same in the back)
ø3.1, depth 6
M4, depth 8 (x3)For mounting base
A: Bottom view(Main unit detached
from base)
Measuring position
50
22 6M3 (x8)
48
202 5
48
170
130350 max.
55
8108
5080
355
95.5 65.5
250
84.5 46
105
54.5
42
150 To
ReceptionUnit(Cablelength:1.4m)
M4, depth 8, ø3.3 through hole (x3)
For mounting side plate (Same in the back)
9057
41
Relaycable
Signal cable(Cable length: 5m)
Optional Accessories for LSM-503S02AGD130: Calibrationgageset (ø1mm,ø30mm)02AGD490: Adjustableworkstage02AGD440: Center support*02AGD450: AdjustableV-block*02AGD240: Airblowcover957608: Aircleanerforairblowcover02AGC150A: Extensionrelaycable1m02AGC150B: Extensionrelaycable3m02AGC150C: Extensionrelaycable5m02AGN780A: Extensionsignalcable5m02AGN780B: Extensionsignalcable10m02AGN780C: Extensionsignalcable15m02AGN780D: Extensionsignalcable20m*Usewithanadjustableworkstage.
Laser Scan Micrometer LSM-503SSERIES 544 — High Accuracy Non-contact Measuring System
544-536
DIMENSIONS AND MASS
SPECIFICATIONSModel LSM-503SOrder No. 544-536Applicabledisplayunit LSM-6200Laser Scanning Range inch(mm) Upto1.3”(34mm)Measuring range inch(mm) .012to1.18”(0.3to30mm)Resolution inch(mm) .000001to.005"(0.00002to0.1mm)[Selectable]Repeatability[*1] inch(µm) ±.0000044"(±0.11µm)[*2]Linearity[*1] Wholerange inch(µm) ±.00004"(±1.0µm)[*3]
Narrowmeasuringrange
µm ±(0.6+0.1 D)[*3][*4]
inch ±(.000024"+.000004" D)Positionalerror[*1][*5] inch(µm) ±.00006"(±1.5µm)Measuring region inch(mm) .08×.4”(2×10mm)(Measuringregion:.002to.004”(0.05to0.1mm))
.16×.4”(4×10mm)(Measuringregion:.004to.4”(0.1to10mm))[Opticalaxisdirection×Scanningdirection]
Numberofscansforaveraging scan 1 to 2048Laserclassification Class2(Max.Output:1.3mWwithascanninglaser,
semiconductorlaser:wavelength650nm)Numberoflaserscans /sec 3200Laser scanning rate inch(m/sec) 4449”/sec(113m/sec)Protectionlevel IP64Distancebetweenthelaseremission unit and reception unit
inch(mm) Standard5.12”(130mm)Max.13”(350mm)[*6]
Operationenvironment Temperature 0˚C to 40˚CHumidity 35%RHto85%RH[withoutcondensation]Altitude 2000m or less
Storageenvironment Temperature -15˚C to 55˚CHumidity 35%RHto85%RH[withoutcondensation]
[*1] Environmentforaccuracyvalidation:20°C±1°Ctemperature;50%±10%humidity.[*2] Avalueof±2witha10mm-diametergagehasbeenmeasuredfortwominuteswithameasurementintervalof 0.32seconds,where isthestandarddeviation.[*3] Thevalueofmeasurementsinthecenterofthemeasurementregion.[*4] Disthedifferenceindiameteroftheworkpieceandthemastergage.[*5] Errorduetothepositionalshiftofworkpieceinopticalaxisdirectionorscanningdirection.[*6] Thedistancebetweenthelaseremissionunitandreceptionunitotherthanthestandard,mayaffecttheaccuracy.
MASS:2.7kg
US-1002
G-28
ø3.1 hole(Measuring position)
7
30
9
For mounting side plate (Same in the back)
146
146
9
8068
18.5
48
162
3019
2
84
19 8
198
120
M4 (x8)200
100
150312
40088
150
Signal cable(Cable length: 5m)
700272 321 107
700 max.
190 1319 Measuring
region
Emission Unit 9
70 min.
Cablespace
Relaycable
96 96Base
263
462
M6, depth 12, ø5 through hole (x3)
For mounting side plate (Same in the back)
M6, depth 12, ø5 through hole (x3)
137
238
52
Reception Unit
48
To Reception Unit(Cable length: 1.4m)
192
256
Measuring position
M6, depth 12 (x3)For mounting base
144
85 M6, depth 12 (x3)For mounting base
ø3.1 hole, depth 6(Reference hole)
ø3.1 hole, depth 6(Reference hole)
A: Bottom view (Main unit detached
from base)
819
(Measuring position)
7
9090
Emission Unit
9.5
15.5
10.5
66
60
42
18.5
58 70
2011
0
130
12
97
14.5 9.5
9.5
Measuring region
Reception Unit
ø3.1 hole
M3 (x12)7
102258
360
185
87
Base
87
348
168.5
M5, depth 10, ø4.2 through hole (x3)M5, depth 10, ø4.2 through hole (x2)For mounting side plate (Same in the back)
For mounting side plate (Same in the back)
115.5 71
192
42
82
20
540
273700 max.
163 110
10
50
22
Measuring position
162
174.
512
163
To Reception Unit(Cable length: 1.4m)
M5, depth 10 (x3)For mounting base
M5, depth 10 (x3)For mounting base
ø3.1, depth 6(Reference hole)
ø3.1, depth 6(Reference hole)
A: Bottom view (Main unit detached
from base)
Cablespace
70 min.
Relay cable
88
Signal cable(Cable length: 5m)
3-M6, depth 12, ø5 through holeFor mounting side plate (Same in the back)
3-M6, depth 12, ø5 through holeFor mounting side plate (Same in the back)
ø3.1 hole (Measuring position)
8-M4
170 110600
350 2509
200
100
880
320Cablespace
160
10
10
41
Measuringposition
8
41
ø3 hole, depth 6(Reference hole)
M6, depth 12 (x3)For mounting base
8
400
8.7
200
Measuringregion
200
8.7
206 87.5
360520
306107100
40
200
400
1313
688
218
M6, depth12 (x3)For mountingbase
70 min.
LSM-516S
LSM-512S
LSM-506S
A: Bottom view (Main unit detached
from base)
25
99
224
208
160
208
249
120
100
74
20.5
378
A
A
A
Optional Accessories for LSM-506S02AGD140: Calibrationgageset(ø1mm,ø60mm)02AGD520: Adjustableworkstage02AGD580: Center support*02AGD590: AdjustableV-block*02AGD250: Airblowcover957608: Aircleanerforairblowcover02AGC150A: Extensionrelaycable1m02AGC150B: Extensionrelaycable3m02AGC150C: Extensionrelaycable5m02AGN780A: Extensionsignalcable5m02AGN780B: Extensionsignalcable10m02AGN780C: Extensionsignalcable15m02AGN780D: Extensionsignalcable20m*Usewithanadjustableworkstage.
Laser Scan Micrometer LSM-506SSERIES 544 — High Accuracy Non-contact Measuring System
544-538
DIMENSIONS AND MASS
Unit: mm
SPECIFICATIONSModel LSM-506SOrder No. 544-538Applicabledisplayunit LSM-6200Laser Scanning Range inch(mm) Upto2.6”(66mm)Measuring range inch(mm) .04to2.36”(1to60mm)Resolution inch(mm) .000002to.005"(0.00005to0.1mm)[Selectable]Repeatability[*1] inch(µm) ±.000014"(±0.36µm)[*2]Linearity[*1] Wholerange inch(µm) ±.00012"(±3.0µm)[*3]
Narrowmeasuringrange
µm ±(1.5+0.5 D)[*3][*4]
inch ±(.00012"+.00002" D)Positionalerror[*1][*5] inch(µm) ±.00016"(±4.0µm)Measuring region inch(mm) .8x2.36"(20x60)[Opticalaxisdirection×Scanningdirection]Numberofscansforaveraging scan 1 to 2048Laserclassification Class2(Max.Output:1.3mWwithascanninglaser,
semiconductorlaser:wavelength650nm)Numberoflaserscans /sec 3200Laser scanning rate inch/sec(m/sec) 17795”/sec(452m/sec)Protectionlevel IP64Distance between the laseremission unit and reception unit
inch(mm) Standard10.75”(273mm)Max.27”(700mm)[*6]
Operationenvironment Temperature 0˚C to 40˚CHumidity 35%RHto85%RH[withoutcondensation]Altitude 2000m or less
Storageenvironment Temperature -15˚C to 55˚CHumidity 35%RHto85%RH[withoutcondensation]
[*1] Environmentforaccuracyvalidation:20°C±1°Ctemperature;50%±10%humidity.[*2] Avalueof±2 witha60mm-diametergagehasbeenmeasuredfortwominuteswithameasurementintervalof 0.32seconds,where isthestandarddeviation.[*3] Thevalueofmeasurementsinthecenterofthemeasurementregion.[*4] Disthedifferenceindiameteroftheworkpieceandthemastergage.[*5] Errorduetothepositionalshiftofworkpieceinopticalaxisdirectionorscanningdirection.[*6] Thedistancebetweenthelaseremissionunitandreceptionunitotherthanthestandard,mayaffecttheaccuracy.
MASS:3.5kg
US-1002
G-29
ø3.1 hole(Measuring position)
7
30
9
For mounting side plate (Same in the back)
146
146
9
8068
18.5
48
162
3019
2
84
19 8
198
120
M4 (x8)200
100
150312
40088
150
Signal cable(Cable length: 5m)
700272 321 107
700 max.
190 1319 Measuring
region
Emission Unit 9
70 min.
Cablespace
Relaycable
96 96Base
263
462
M6, depth 12, ø5 through hole (x3)
For mounting side plate (Same in the back)
M6, depth 12, ø5 through hole (x3)
137
238
52
Reception Unit
48
To Reception Unit(Cable length: 1.4m)
192
256
Measuring position
M6, depth 12 (x3)For mounting base
144
85 M6, depth 12 (x3)For mounting base
ø3.1 hole, depth 6(Reference hole)
ø3.1 hole, depth 6(Reference hole)
A: Bottom view (Main unit detached
from base)
819
(Measuring position)
7
9090
Emission Unit
9.5
15.5
10.5
66
60
42
18.5
58 70
2011
0
130
12
97
14.5 9.5
9.5
Measuring region
Reception Unit
ø3.1 hole
M3 (x12)7
102258
360
185
87
Base
87
348
168.5
M5, depth 10, ø4.2 through hole (x3)M5, depth 10, ø4.2 through hole (x2)For mounting side plate (Same in the back)
For mounting side plate (Same in the back)
115.5 71
192
42
82
20
540
273700 max.
163 110
10
50
22
Measuring position
162
174.
512
163
To Reception Unit(Cable length: 1.4m)
M5, depth 10 (x3)For mounting base
M5, depth 10 (x3)For mounting base
ø3.1, depth 6(Reference hole)
ø3.1, depth 6(Reference hole)
A: Bottom view (Main unit detached
from base)
Cablespace
70 min.
Relay cable
88
Signal cable(Cable length: 5m)
3-M6, depth 12, ø5 through holeFor mounting side plate (Same in the back)
3-M6, depth 12, ø5 through holeFor mounting side plate (Same in the back)
ø3.1 hole (Measuring position)
8-M4
170 110600
350 2509
200
100
880
320Cablespace
160
10
10
41
Measuringposition
8
41
ø3 hole, depth 6(Reference hole)
M6, depth 12 (x3)For mounting base
8
400
8.7
200
Measuringregion
200
8.7
206 87.5
360520
306107100
40
200
400
1313
688
218
M6, depth12 (x3)For mountingbase
70 min.
LSM-516S
LSM-512S
LSM-506S
A: Bottom view (Main unit detached
from base)
25
99
224
208
160
208
249
120
100
74
20.5
378
A
A
A
DIMENSIONS AND MASSUnit: mm
Optional Accessories for LSM-512S02AGD150: Calibrationgageset(ø20mm,ø120mm)02AGD260: Airblowcover957608: Aircleanerforairblowcover02AGC150A: Extensionrelaycable1m02AGC150B: Extensionrelaycable3m02AGC150C: Extensionrelaycable5m02AGN780A: Extensionsignalcable5m02AGN780B: Extensionsignalcable10m02AGN780C: Extensionsignalcable15m02AGN780D: Extensionsignalcable20m
Laser Scan Micrometer LSM-512SSERIES 544 — High Accuracy Non-contact Measuring System
544-540
SPECIFICATIONSModel LSM-512SOrder No. 544-540Applicabledisplayunit LSM-6200Laser Scanning Range inch(mm) Upto5.0”(126mm)Measuring range inch(mm) .04to4.72”(1to120mm)Resolution inch(mm) .000005to.005"(0.0001to0.1mm)[Selectable]Repeatability[*1] inch(µm) ±.000033"(±0.85µm)[*2]Linearity[*1] Wholerange inch(µm) ±.00024"(±6.0µm)[*3]
Narrowmeasuringrange
µm ±(4.0+0.5 D)[*3][*4]
inch ±(.00016"+.00002" D)Positionalerror[*1][*5] inch(µm) ±.0003"(±8.0µm)Measuring region inch(mm) 1.2x4.72"(30x120)[Opticalaxisdirection×Scanningdirection]Numberofscansforaveraging scan 1 to 2048Laserclassification Class2(Max.Output:1.3mWwithascanninglaser,
semiconductorlaser:wavelength650nm)Numberoflaserscans /sec 3200Laser scanning rate inch/sec(m/sec) 35590”/sec(904m/sec)Protectionlevel IP64Distancebetweenthelaseremission unit and reception unit
inch(mm) Standard12.64”(321mm)Max.27”(700mm)[*6]
Operationenvironment Temperature 0˚C to 40˚CHumidity 35%RHto85%RH[withoutcondensation]Altitude 2000m or less
Storageenvironment Temperature -15˚C to 55˚CHumidity 35%RHto85%RH[withoutcondensation]
[*1] Environmentforaccuracyvalidation:20°C±1°Ctemperature;50%±10%humidity.[*2] Avalueof±2 witha120mm-diametergagehasbeenmeasuredfortwominuteswithameasurementintervalof 0.32seconds,where isthestandarddeviation.[*3] Thevalueofmeasurementsinthecenterofthemeasurementregion.[*4] Disthedifferenceindiameteroftheworkpieceandthemastergage.[*5] Errorduetothepositionalshiftofworkpieceinopticalaxisdirectionorscanningdirection.[*6] Thedistancebetweenthelaseremissionunitandreceptionunitotherthanthestandard,mayaffecttheaccuracy.
MASS:6.5kg
US-1002
G-30
ø3.1 hole, depth 6(Measuring position)
42 6453
10.5
15.5
20
84
104
57.5
10
18.5 9.5
14.5
6M3 (x8)
50
22
15040
230
123 68100 max.
39
8 8
34 34
4
157 73BaseEmission
Unit
Relaycable
70 min.
Reception Unit
Measuring position
Measuring region
40
40
40.5
38.5
30
M4, depth 8 (x3)
ø3.1 hole, depth 6
ø3.1 hole, depth 6
110
M4, depth 8 (x3)
To Reception Unit(Cable length: 0.6m)
A: Bottom view(Main unit detached
from base)
Cable space
9.5
9.5
Signal cable(Cablelength: 5m)
A
A
A
70 min.Cable space
Working distance
Measuring region
LSM-500S
LSM-501S
LSM-503S
Measuring position
M4, depth 8 (x3)
ø3.1 hole, depth 6
M3, depth 6 (x4)
ø3.1 hole, depth 6(Measuring position)
9029
.5
181
126
103 46
34
32
55
1111
84
32.5
25
2
15.5
40
17.5
10.5 14.5 9.5
1
Signal cable(Cable length: 5m)
A : Bottom view
ø3.1,depth 6(Referencehole)
(Reference hole)
M4, depth 8 (x3)For mounting base
Measuring region
ø3.1 (.12") hole
(Measuring position)
805.
5
18.5
10.5
15.5
9.59.5
14.5 9.5
12 11
09020
30
53 6842
57.5
70 min.
Cable space
Emission Unit
Base
Reception Unit
M4, depth 8, ø3.3 through hole (x2)For mounting side plate (Same in the back)
ø3.1, depth 6
M4, depth 8 (x3)For mounting base
A: Bottom view(Main unit detached
from base)
Measuring position
50
22 6M3 (x8)
48
202 5
48
170
130350 max.
55
8108
5080
355
95.5 65.5
250
84.5 46
105
54.5
42
150 To
ReceptionUnit(Cablelength:1.4m)
M4, depth 8, ø3.3 through hole (x3)
For mounting side plate (Same in the back)
9057
41
Relaycable
Signal cable(Cable length: 5m)
Unit: mm
DIMENSIONS AND MASS
Optional Accessories for LSM-516S002AGM300: Calibrationgageset(ø20mm,ø160mm)02AGC150A: Extensionrelaycable1m02AGC150B: Extensionrelaycable3m02AGC150C: Extensionrelaycable5m02AGN780A: Extensionsignalcable5m02AGN780B: Extensionsignalcable10m02AGN780C: Extensionsignalcable15m02AGN780D: Extensionsignalcable20m
544-542
Laser Scan Micrometer LSM-516SSERIES 544 — High Accuracy Non-contact Measuring System
SPECIFICATIONSModel LSM-516SOrder No. 544-542Applicabledisplayunit LSM-6200Laser Scanning Range inch(mm) Upto6.7”(170mm)Measuring range inch(mm) .04to6.3”(1to160mm)Resolution inch(mm) .000005to.005"(0.0001to0.1mm)[Selectable]Repeatability[*1] inch(µm) ±.000055"(±1.4µm)[*2]Linearity[*1] Wholerange inch(µm) ±.00028"(±7.0µm)[*3]
Narrowmeasuringrange
µm ±(4.0+2.0 D)[*3][*4]
inch ±(.00016"+.000079" D)Positionalerror[*1][*5] inch(µm) ±.0003"(±8.0µm)Measuring region inch(mm) 1.57x6.3"(40x160)[Opticalaxisdirection×Scanningdirection]Numberofscansforaveraging scan 1 to 2048Laserclassification Class2(Max.Output:1.3mWwithascanninglaser,
semiconductorlaser:wavelength650nm)Numberoflaserscans /sec 3200Laser scanning rate inch/sec(m/sec) 47480”/sec(1206m/sec)Protectionlevel IP64Distancebetweenthelaseremission unit and reception unit
inch(mm) Standard15.74”(400mm)Max.32.72”(800mm)[*6]
Operationenvironment Temperature 0˚C to 40˚CHumidity 35%RHto85%RH[withoutcondensation]Altitude 2000m or less
Storageenvironment Temperature -15˚C to 55˚CHumidity 35%RHto85%RH[withoutcondensation]
[*1] Environmentforaccuracyvalidation:20°C±1°Ctemperature;50%±10%humidity.[*2] Avalueof±2 witha160mm-diametergagehasbeenmeasuredfortwominuteswithameasurementintervalof 0.32seconds,where isthestandarddeviation.[*3] Thevalueofmeasurementsinthecenterofthemeasurementregion.[*4] Disthedifferenceindiameteroftheworkpieceandthemastergage.[*5] Errorduetothepositionalshiftofworkpieceinopticalaxisdirectionorscanningdirection.[*6] Thedistancebetweenthelaseremissionunitandreceptionunitotherthanthestandard,mayaffecttheaccuracy.
US-1002
G-31
125
134
335 80 (Cable space)
1312
1
8.2 250
App
rox.
12
276.4
LSM-6200 Display UnitSERIES 544 — Standard Display Unit for Laser Scan Micrometer
FEATURES•Withadual-displaydesignsetupvaluescanbecontinuouslymonitored.Also,twomeasurementvalueitemscanbedisplayedonthesub-displaywiththesimultaneousmeasurementfunction.•Eitherthesegmentmeasurement (7segmentsmax.)oredgemeasurement (1to255edges)canbeselected.
544-072A(Inch/Metric)
Technical DataMain display: 16-digitfluorescenttubeInterfaceunitsequipped: RS-232C, Analog I/O, FootswitchPowersupply: 100-240VAC±10%,40VA,50/60Hz
Function of Display UnitZero-setting, Presetting, GO/±NG judgment, Multi-limit judgment, Offsetvaluesetting,Sample measurement, Statistical calculation, Group judgment, Data output, Workpiecepositiondisplay,mm/inchswitching,Dual-gage calibration,Transparentobjectmeasurement,Dual-unit measurement(optional),Automatic measurement, Abnormaldata eliminating
DIMENSIONS AND MASS
QUICKTOOLQUICKTOOLisafreesoftwareprogramthatmakesprogrammingtheLSM-6200quickandeasy. PleasecontactyourMitutoyoofficeformoreinformation.
Unit: mm
MASS: 5kg
•TheRS-232CinterfaceandtheI/Oandanaloginterfaceareprovidedasstandard.•A statistical calculation function and abnormaldataeliminatingfunctionareprovided.
SPECIFICATIONSModel LSM-6200Order No. 544-072A
LSM-5200 Display UnitSERIES 544 — Compact Display Unit for Real-time Multi-channel Measurement
FEATURES•Panel-mounttype(withdimensionsconformingtoDINstandards)allowseasysystemintegration.•Capableofcalculatingmean,maximum,minimum,andrange(maximum-minimum).•Eitherthesegmentmeasurement (7segmentsmax.)oredgemeasurement(1to255edges)canbeselected.•TheRS-232CinterfaceandtheI/Oandanaloginterfaceareprovidedasstandard.
Technical DataMain display: 9-digit LEDInterfaceunitsequipped: RS-232C, Analog I/O, FootswitchPowersupply: +24VDC±10%,1A
Function of Display UnitZero-setting, presetting, GO/±NG judgment, Offset valuesetting, Sample measurement, Statistical calculation, Data output, Workpiece position display, mm/inch switching,Dual-gagecalibration,Transparentobjectmeasurement,Automatic measurement, Abnormaldataeliminating
544-047DIMENSIONS
Unit: mm
•Thearithmeticalaverageormovingaveragecanbeselected.•GO/±NGjudgmentfunction.
138 0+1
72
144
Front view
Bottom view
Side view Rear view
140.
4
Support for mounting plate
*t=Thickness of panel
68
138197.1 20.5
68+0
.7 0
Dimensions of panel mounting slot (DIN 43 700-144×76)
Thickness of panel 1.6mm ≤ t ≤ 6mm*240.3+(t-0.6)4.4
US-1002
G-32
Optional Accessories for LSM
Appearance Order No. Description Application02AGD11002AGD12002AGD18002AGD13002AGD14002AGD15002AGM30002AGD170
CalibrationgagesetCalibrationgagesetCalibrationgagesetCalibrationgagesetCalibrationgagesetCalibrationgagesetCalibrationgagesetCalibrationgageset
LSM-500SLSM-501SLSM-902LSM-503SLSM-506SLSM-512SLSM-516SLSM-9506
02AGP150 Dual-type add-on unit LSM-6200
02AGC84002AGC88002AGC91002AGC940
Digimatic(SPC)codeoutunit2nd I/O & analog interface unitBCD interface unitGP-IB interface unit
LSM-6200/6900LSM-6200/6900LSM-6200/6900LSM-6200/6900
02AGN780A02AGN780B02AGN780C02AGN780D
Extensionsignalcable(5m)Extensionsignalcable(10m)Extensionsignalcable(15m)Extensionsignalcable(20m)
Any model of LSM*Any model of LSM*Any model of LSM*Any model of LSM*
02AGC150A02AGC150B02AGC150C
Extensionrelaycable(1m)Extensionrelaycable(3m)Extensionrelaycable(5m)
Any model of LSM**Any model of LSM**Any model of LSM**
936937 SPCcable(1m) LSM-6200/6900/9506
937179T Footswitch LSM-6200/6900/9506
02AGD27002AGD40002AGD28002AGD49002AGD52002AGD37002AGD68002AGD44002AGD58002AGD45002AGD590
Work stageAdjustableworkstageAdjustableworkstageAdjustableworkstageAdjustableworkstageAdjustableworkstageAdjustableworkstageCenter supportCenter supportAdjustableV-blockAdjustableV-block
LSM-501S/503S/902LSM-501SLSM-902LSM-503SLSM-506SLSM-9506LSM-9506LSM-501S/503S/902LSM-506S/9506LSM-501S/503S/902LSM-506S/9506
02AGD20002AGD210
Wire guiding pulleyWire guiding pulley
LSM-500SLSM-501S
02AGD22002AGD23002AGD24002AGD25002AGD260957608
AirblowcoverAirblowcoverAirblowcoverAirblowcoverAirblowcoverAir cleaner
LSM-500SLSM-501SLSM-503SLSM-506SLSM-512SAny model of LSM
02AGD600B Thermalprinter(120VAC) Any model of LSM
* Except for LSM-902 ** Except LSM-500S/902
02AGC840
Extensionsignalcable
02AGC940
Extensionrelaycable
US-1002
G-33
Laser Scan Micrometer
Application Example•Drill/Endmill(Odd-numberteeth)
outer-diameter standard function at LSM-6200 Display Unit
US-1002
G-34
US-1002