Exposing a fl awin p-type GaN

VeecoA brighter future for LEDsMaking MOSFETs

for motoring

Shares: The good, bad and ugly

Nanoceramics keep LEDs cool

Instant imaging in the terahertz

News Review, News Analysis, Features, Research Review and much more.

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Volume 21 Issue IV 2015 @compoundsemi www.compoundsemiconductor.net

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contentsfeaturesCONNECTING THE COMPOUND SEMICONDUCTOR COMMUNITY Volume 21 Issue IV 2015

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24 Veeco: Taking and maintaining pole position Veeco’s share of MOCVD sales has soared during the last few years. What is the key to this success?

28 Compound semiconductor shares: The good, the bad and the ugly The last 12 months have produced mixed results for compound semiconductor shares.

32 LEDs: Keeping cool with nanoceramics Makers of solid-state lighting should turn to aluminium nanoceramics to cut the cost of thermal management

36 Instant imaging with terahertz lasers Wafer-bonding can create powerful terahertz lasers for real-time imaging of hidden weapons, illicit drugs and forms of cancer.

41 GaN: The logical successor to silicon? Stressor layers that crank up the speed of electrons are enabling a novel form of GaN-on-silicon transistor to offer a promising route to maintaining the march of Moore’s law.

46 Refined reactors trim chip costs Automated reactors that accommodate more wafers and in-situ cleaning drive down the cost of making wide bandgap devices for power electronics.

50 Throwing away LED efficiency Are parasitic currents in p-type layers holding back the efficiency of many commercial LEDs?

Change is Here. Propel into a Cleaner Future.

PowerGaN MOCVD

The Future of Electric Vehicles, Alternative Energy and More Change Driven by GaN Power DevicesAdvances in MOCVD technology are resulting in major breakthroughs for power IC R&D markets. Compound semiconductor based power electronic devices show enormous potential in delivering cost-effective and energy-efficient solutions for a broad range of applications, including automotive, solar and wind power, consumer electronics, power supplies and IT servers. Veeco is propelling these advancements with an entirely new MOCVD platform.

Veeco is Enabling Power Electronics With Excellent Yield and Superior Film QualityVeeco’s Propel™ PowerGaN™ MOCVD system, designed specifically to advance the power electronics industry, features a single-wafer reactor platform that is capable of processing six and eight-inch wafers. The Propel system deposits high-quality GaN films for the production of highly-effective power electronic devices.

Learn more at www.veeco.com/Propel.

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COVER STORY MOCVD

Q For many years, Aixtron was the leading supplier of MOCVD tools. Why do you think that you have eclipsed them?

A In 2010, we introduced a new generation of tool, the K465i. That product was more automated, it offered better uniformity, and it really made it easier to make high-quality LEDs in high-volume. That helped us gain a substantial amount of market share, and then just one year later we introduced the MaxBright, which was a cluster version of the K465i tool, bringing four reactors together on one platform. It was easy to move to the MaxBright from the K465i, and it further improved the customer’s cost-of-ownership, added more automation, and really helped us move up in market share. In 2010 and 2011 we just kept gaining market share, and got to the 60 percent level in 2012.

Q Since then, your market share has grown even larger. What does it stand at today?

A It has grown, and in Q1 of 2015, it was in the 65 percent range. That was attributed largely to the introduction of yet another new product, the EPIK 700, which is the largest and most productive system on the market. This is a great product that has been quickly accepted by our customer base, and I think customers really see the value. It makes further improvements in cost-of-ownership, uniformity and automation, and we think it is going to be a tremendous success.

Q Can you increase market share over the next few years?

A I think we have the potential to move higher, having invested very heavily in R&D during the downturn. The

Veeco

Taking and maintaining pole position

Veeco’s share of MOCVD sales has soared during the last few years, propelling it to market domination. What is the key to this

success? And how will the company stay at the top? To get some answers to these and other questions,

RICHARD STEVENSON QUIZZES VEECO’S CHAIRMAN AND CEO, JOHN PEELER.

TurboDisc architecture has some fundamental advantages over alternative approaches. It operates very cleanly, so it can run hundreds of runs between cleaning and maintenance cycles. That allows customers to put it in a high-volume manufacturing application, and it can run as a production workhorse without a lot of intervention by operators. It is extremely well suited for high-volume production, and we think it will continue to gain share.

Q What are you doing to remain in pole position in the MOCVD reactor market?

A We are continuing to do further work on these particular products. On the EPIK 700, we will develop new upgrades and

Veeco’s TurboDisc EPIK 700 GaN MOCVD System is claimed to be the industry’s highest productivity and lowest cost-of-ownership platform for high-volume LED manufacturing today.

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COVER STORY MOCVD

enhancements to the product that will take it to even higher levels of performance in the future. One of the things that our customers have come to know us for is introducing a product and then really staying with the product to provide additional features and enhancements that can make it better over time.

Q Shipments of MOCVD tools are very volatile. How can you run a business where shipments of tools may have to double in a few quarters, and then pull back just as hard afterwards?

A We work with a couple of different outsourcing manufacturing partners that we have worked with for many, many years. They can bring additional people to our product line when needed.

It is really important that we have a lot of variable costs and not too much fixed cost in our manufacturing. When you have a lot of fixed cost, you carry all this overhead and the down cycles just destroy you. We do this in manufacturing and some other areas of the company where we will use contractors, and variable labour that we can ramp up or down.

Q What are the factors that matter to customers? Is it all about reducing chip costs, or do they still need to improve the uniformity and the quality of their epiwafers?

A It is really all of those. Customers are looking for better epitaxial performance; better uniformity wafer-to-wafer, as well as within the wafer; they are looking for run-to-run repeatability,

and really excellent uniformity and tight binning; and all of that in a very economical manner.

Our customers are in a very competitive environment, and our goal is to give them a tool that can lower their cost of making very-high-quality LEDs, and in essence give them a competitive advantage in the market place. That approach from us has really paid off for our customers.

We have also designed our system so that it is very easy for customers to change wafer sizes, and as the industry moves up from 2-inch to 4-inch to 6-inch, that’s very easy to do and does not require any hardware retrofits. That’s been a big success for both us and our customers.

Q There is overcapacity in the LED market, but chipmakers are still buying your tools. What are the compelling reasons for making these purchases?

A Well actually, the capacity levels are pretty high. In most of the regions, they are either in the upper 80 percent utilization, or even into the 90 percent. Those are typically levels where LED manufacturers start to order more tools, especially when the lead times are the normal five-to-six month levels.

We are seeing orders from most regions of the world. We have orders for new products from China and Taiwan and other regions, because of the compelling advantage of the products − as well as the continuing increase in LED demand for lighting. LED makers are bringing on new, larger tools to be able to keep

The Veeco EPIK 700 system’s automated robot loads 31-4 inch sapphire wafers into the MOCVD reactor.

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COVER STORY MOCVD

up with the demand over the coming years. They need to allow for a lead-time and a little bit of time for installation, and they want to make sure that they don’t lose market share.

Q You recently launched the EPIK 700. How does that compare to the K465i and the MaxBright tools?

A The EPIK 700 is the industry’s highest productivity and lowest cost-of-ownership MOCVD production system today. It includes two chambers, each twice the size of previous generations. It gives a 20 percent cost-per-wafer reduction, exceptional uniformity and repeatability, a high level of automation, and it maintains the very long run campaigns that our products have been known for. It also has about twice the footprint efficiency, so if you are looking to bring more capacity into your fab, you can bring in a lot of capacity without tying up too much room.

Q What do you believe can set an LED chipmaker apart from the crowd? Is it superior IP, better engineers and recipes or more capable growth tools?

A To be successful, they have to have exceptional engineers and have developed very good recipes for making LEDs that have high brightness and good characteristics, in order to be able to cost-effectively compete. If you combine the design and the IP with superior tools and an effective organisation to do the back-end processing, you have a real recipe for success.

Q A lot of your success has come from China. Why have you been able to do so well in that market?

A Well, we focused on making tools that were high-throughput, relatively easy to use, very reliable, very

dependable, and suited to high-volume mass production. China has brought on tremendous-sized fabs with many tools, and it is in a high-volume production mode. Our products are really superior in that case.

I would add that we have also built a very strong service and support infrastructure in China. We saw it as a strategic region and we actually moved very early in the 2010 up-cycle to build a training facility there. We have trained tremendous numbers of staff in China on how to use our products effectively, and how to help our customers get a lot of benefit out of the products.

Q It looks like China could dominate LED chipmaking by the end of this decade. Is that what you are expecting?

A They are certainly making large investments, and the Chinese government continues to offer subsidies to the top LED companies in China. They are building tremendous capacity to make high-quality LEDs. There was a time, four or five years ago, where some people predicted that wouldn’t happen. But it has happened, and they will be the industry leader.

Q Why has China failed to produce its own MOCVD toolmaker that can rival the leading players in this field?

A MOCVD tools are very complex. To do a really good job you need to understand the process for making LEDs and have deep background knowledge. In our case, we have decades of experience in this area, and we have funded tremendous levels of R&D every year for many, many years. So we have stayed ahead.

It’s been very, very difficult for outsiders to break into this market. Aside from the Chinese toolmakers not being successful, it was also true of other US companies, as they tried to break into this market back in 2009 and 2010. They couldn’t do it.

Q Not all MOCVD reactors are used to make LEDs. Some are used to make power electronic devices. Do you expect shipments in this sector to soon be a significant proportion of your MOCVD sales?

Veeco’s EPIK 700 IsoFlange technology within the reactor provides a homogeneous laminar flow across the entire wafer. This improves wavelength uniformity, and drives higher yields in a tighter bin.

The recently launched Veeco Propel PowerGaN MOCVD system enables the development of highly-efficient GaN-based power electronic devices.

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COVER STORY MOCVD

A We’ve been selling tools in R&D applications for GaN power electronics for a number of years. Our customers gave us feedback that they needed better ability to make very-high-quality films with very high levels of uniformity, and in order to address that, we designed a unit specifically for that market. It is a single-wafer reactor, which enables it to have really superior performance in terms of film characteristics and uniformity, and since it also has the TurboDisc technology, it produces wafers with very few defects.

About six months ago we started to sell that product, the Propel PowerGaN MOCVD system, to enable the development of highly efficient GaN-based power electronic devices. Customers are using it in R&D and pilot lines to perfect their recipes.

We named it Propel because we think it is going to help to propel this market to the inflection point. I think it is going to take a couple more years where the market is nearing an inflection, and two or three years from now I think it will be a very significant part of our revenue stream. We are sowing the seeds now, and the reception from customers has been outstanding.

Q There is the possibility that III-Vs could be used for making the channels of next-generation transistors for microprocessors. Are you preparing for that?

A We are. It is an opportunity that we are investigating and evaluating, and doing early research. We have worked with

some of the industry leaders in this area, and we will continue to prepare. We think it is way out on the roadmap, and as we get closer we will have the right platforms to address the technology.

Q For many years, makers and developers of multi-junction cells have hoped that the concentrating photovoltaic market might take off. Do you see an opportunity there?

A We continue to sell MOCVD systems into those multi-junction markets. Our systems have a real throughput advantage in those applications. We sell some units every year, and we see some new potential there.

It always comes down to whether someone can make the economics work and get a system that can be widely deployed and have an attractive cost-per-Watt. We are selling into that market, and we hope that it will hit the inflection point with the right company.

The single-wafer reactor of the Propel PowerGaN MOCVD system delivers high quality films with very high uniformity for the GaN-based power market.

Since joining Veeco in 2007, Chairman and CEO John Peeler has led the transformation of the company into a high growth, technology leader in LED, Solar and Data Storage Process Equipment markets.

SUBSTRATES & MATERIALS AWARD

Element SixGaN-on-Diamond Wafers

DEVICE DESIGN & PACKAGING AWARD

Cree, Inc C2M0025120D

R & D CHIP DEVELOPMENT AWARD

DARPA Terahertz Electronics program

INNOVATION AWARD

Veeco Instruments Inc TurboDisc EPIK700 GaN MOCVD System

METROLOGY, TEST & MEASUREMENT AWARD

KLA-Tencor Corporation Candela CS920

WINNERS ANNOUNCEDThe CS Industry Awards recognise success and development along the entire value chain of the compound semiconductor industry from research to completed device, focusing on the people,

processes and products that drive the industry forward. The CS Industry Awards remind us what is good about the industry - the people who drive it with their technical expertise and

customer orientated perspectives.

The winners are:

The winners were presented at the CS International Conference, Frankfurt, Germany, on March 11th 2015For more information: www.csawards.net

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