from plasma to design of novel steels

MATERIALS CHEMISTRY

From Plasma to Design of

Novel Steels

Denis Music

Materials Chemistry, RWTH Aachen University

[email protected]

Outline

• Classification of Plasma

• Magnetic Confinement and Magnetrons

• Design of Magnetrons at MCh

• Design of Novel Steels

1 SFB761, May 2013

Denis Music, MATERIALS CHEMISTRY

What is plasma? 2 SFB761, May 2013


SOLID LIQUID GAS PLASMA

Cold Warm Hot Super hot

+ -

Classification of Plasma

• Density

• Temperature

• Confinement

3 SFB761, May 2013


Plasma Density and Temperature 4 SFB761, May 2013


Aurora Borealis 5 SFB761, May 2013


Lightning 6 SFB761, May 2013


Means of Plasma Confinement

Type Application

Solid walls Low T plasma (Ne

lights)

Gravity Stellar plasma

Laser/ion beams Inertial confinement

Magnetic fields Fusion reactors,

magnetrons

7 SFB761, May 2013


Neon Lights 8 SFB761, May 2013


Solar Corona 9 SFB761, May 2013


Inertial Confinement 10 SFB761, May 2013


An inertial confinement fusion

implosion in Nova

The Joint European Torus 11 SFB761, May 2013


Sputtering 12 SFB761, May 2013


Plasma Thrusters 13 SFB761, May 2013


Outline





14 SFB761, May 2013


Magnetic Confinement 15 SFB761, May 2013


magnetic

mirror

magnetic

cusp

B

B

B

B

I I

I I

N S N S

N S N S

Chapman, Glow Discharge Processes, Wiley

Basic Magnetron Geometries 16 SFB761, May 2013


cylindrical

planar

Cross-Section of a Planar Magnetron 17 SFB761, May 2013



argon

+

electron +

+

-

Balanced Magnetrons 18 SFB761, May 2013


target

substrate

N N N


F = q (E + v×B)

Drift: E x B

Unbalanced Magnetrons 19 SFB761, May 2013


N

N N N N N

Type I Type II

Window et al., J. Vac. Sci. Technol. A 4, 196 (1986)

Arnell et al., Surf. Coat. Technol. 112, 170 (1999)

Tunable Unbalanced Magnetrons 20 SFB761, May 2013


B

B

substrate

magnetrons

external magnets

Ti target

Petrov et al., J. Vac. Sci. Technol. A 10, 3283 (1992)

Target Utilization 21 SFB761, May 2013


25% 34%

57% 67%

De Bosscher et al., Thin Solid Films 351, 15 (1999)

Rotating Cylindrical Magnetrons 22 SFB761, May 2013


Angstrom Sciences

Double Ring Magnetrons 23 SFB761, May 2013


Fraunhofer

Magnetic Targets 24 SFB761, May 2013


Solutions: operation above transition temperature, thin targets, quadrature

target

N N N

target

N N N

target

N N N

target

N N N

Multiple Sources 25 SFB761, May 2013


Gencoa Ltd.

Closed field configuration Open field configuration

Large Magnetron Sputtering Systems 26 SFB761, May 2013


Applied ATON PVD 5.7,

substrates 5.7m2 in area

PIA|nova®

Outline





27 SFB761, May 2013


Design of Magnetrons at MCh 28 SFB761, May 2013


50 W 100 W 200 W

Target: Cu (3 mm thick) Ar pressure: 5 mTorr



Courtesy of T. Takahashi

1 Gauss = 10-4 T



Courtesy of T. Takahashi

Outline





33 SFB761, May 2013


Combinatorial Approach 34 SFB761, May 2013


Chemical

composition

Elastic properties

Crystal structure

Synthesis

Gebhardt et al., Thin Solid Films. 520, 5491 (2012)

Fe-Mn Alloys 35 SFB761, May 2013


1Music et al., Appl. Phys. Lett. 91, 191904 (2007) 2Cankurtaran et al., Phys. Rev. B 47, 3161 (1993)

Gebhardt et al., Acta Mater. 59, 1493 (2011)

Fe-Mn-C Alloys 36 SFB761, May 2013


Reeh et al., Acta Mater. 60, 6025 (2012)

Fe-Mn-Cu Alloys 37 SFB761, May 2013


Reeh et al., accepted in J. Phys.: Condens. Matter

Summary

• Plasma confinement: solid walls, gravity,

laser beams, magnetic fields

• Balanced and unbalanced magnetrons

• Open and closed field configurations

• Elastic properties of high-Mn steels can

be designed

38 SFB761, May 2013


39 SFB761, May 2013


from plasma to design of novel steels

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