fp6 noe: multi-material micro manufacture: technologies and applications (4m) general overview

FP6 NoE:FP6 NoE: Multi-Material Multi-Material Micro Manufacture: Micro Manufacture: Technologies and Technologies and Applications (4M)Applications (4M)

General OverviewGeneral Overview

September 2003September 2003

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MEC, Cardiff University

4M Partnership4M PartnershipCo-ordinator: Co-ordinator: Cardiff University Cardiff University

(UK)(UK)

BelgiumBelgium: KU : KU Leuven;Leuven;

Spain:Spain: TEKNIKER; TEKNIKER;

Netherlands:Netherlands: TNO; TNO;

Germany:Germany: IMTEK, IMTEK, IZM, FZK, IPT, IBMT, IZM, FZK, IPT, IBMT, IMM, ErlangenIMM, Erlangen

France:France: CEA; CEA;

Sweden:Sweden: IVF and IVF and KTH;KTH;

UK:UK: Cardiff, Cardiff, Cranfield,Cranfield,RALRAL

16 Core Partners16 Core Partners Bulgaria:Bulgaria: BAS BAS

Germany:Germany: IZFM, IZFM, HSG-IMAT and BLZHSG-IMAT and BLZ

France:France: LPMO LPMO

Denmark:Denmark: DTU DTU

Greece:Greece: Patras; Patras;

Hungary:Hungary: BUTE; BUTE;

14 Associate 14 Associate PartnersPartners

Rumania:Rumania: IMT; IMT;

Italy:Italy: Naples; Naples;

Slovenia:Slovenia: Ljubliana; Ljubliana;

Sweden:Sweden: IMEGO; IMEGO;

UK:UK: Bath and SCU; Bath and SCU;14 14 CountriesCountries

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4M Scope:4M Scope: Establishment of Capabilities Establishment of Capabilities for 4Mfor 4M

Capabilities for Capabilities for Multi-Material Multi-Material Micro Micro Manufacture:Manufacture:

MiniaturisationMiniaturisation

Serial ProductionSerial Production

Rapid Rapid PrototypingPrototyping

Future Product Future Product PlatformsPlatforms

Capabilities for Capabilities for Multi-Material Multi-Material Micro Micro Manufacture:Manufacture:

MiniaturisationMiniaturisation

Serial ProductionSerial Production

Rapid Rapid PrototypingPrototyping

Future Product Future Product PlatformsPlatforms

Component Micro- Component Micro- Technologies:Technologies:

Micromachining:Micromachining: Micro-EDM, Laser Micro-EDM, Laser Ablation, Micro-Ablation, Micro-Milling, Micro LIGA, Milling, Micro LIGA, Diamond Turning and Diamond Turning and Grinding, Dry Etching, Grinding, Dry Etching, Polishing, Micro-and Polishing, Micro-and micro-ECM.micro-ECM.

Microfabrication:Microfabrication: Embossing/Coining, Embossing/Coining, Injection Moulding, Injection Moulding, UV & X-ray UV & X-ray Lithography in Lithography in Combination with Combination with Electroforming, Electroforming, Blanking/Punching, Blanking/Punching, UV-casting, UV-casting, Stereolithography Stereolithography

MetrologyMetrology

Packaging & Packaging & AssemblyAssembly

Component Micro- Component Micro- Technologies:Technologies:

Micromachining:Micromachining: Micro-EDM, Laser Micro-EDM, Laser Ablation, Micro-Ablation, Micro-Milling, Micro LIGA, Milling, Micro LIGA, Diamond Turning and Diamond Turning and Grinding, Dry Etching, Grinding, Dry Etching, Polishing, Micro-and Polishing, Micro-and micro-ECM.micro-ECM.

Microfabrication:Microfabrication: Embossing/Coining, Embossing/Coining, Injection Moulding, Injection Moulding, UV & X-ray UV & X-ray Lithography in Lithography in Combination with Combination with Electroforming, Electroforming, Blanking/Punching, Blanking/Punching, UV-casting, UV-casting, Stereolithography Stereolithography

MetrologyMetrology

Packaging & Packaging & AssemblyAssembly

Innovative Innovative Integration Integration and and Development Development of Hybrid of Hybrid TechnologiesTechnologies

DriversDrivers

Manufacturing Manufacturing capabilitiescapabilities – performance, reliability, customisation/agility

Product Product competitivenesscompetitiveness – performance, customisation, reliability, functionality

Legislation and Legislation and environmentenvironment

CostCost

Quality and Quality and conformanceconformance

Resource Resource exploitationexploitation

DriversDrivers

Manufacturing Manufacturing capabilitiescapabilities – performance, reliability, customisation/agility

Product Product competitivenesscompetitiveness – performance, customisation, reliability, functionality

Legislation and Legislation and environmentenvironment

CostCost

Quality and Quality and conformanceconformance

Resource Resource exploitationexploitation

Business Business Needs and Needs and RequirementsRequirements

ApplicationsApplications

Micro-fluidicsMicro-fluidics: biological, medical, pharmaceutical and chemical engineering applications

Micro-OpticsMicro-Optics:telecommunication, biotechnological, instrumentation and medical applications

Micro-sensorsMicro-sensors and actuators:applications in medicine, biomedical field, health and safety, environment and process control.

ApplicationsApplications

Micro-fluidicsMicro-fluidics: biological, medical, pharmaceutical and chemical engineering applications

Micro-OpticsMicro-Optics:telecommunication, biotechnological, instrumentation and medical applications

Micro-sensorsMicro-sensors and actuators:applications in medicine, biomedical field, health and safety, environment and process control.

Common RequirementsCommon Requirements:: High- High-Aspect-Ratio Structures, Enhanced-Aspect-Ratio Structures, Enhanced-Forced Microactuation, Improved Forced Microactuation, Improved Environment Resistance, High Environment Resistance, High Precision Microcomponents, and Precision Microcomponents, and Unification and StandardisationUnification and Standardisation


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Vertical IntegrationVertical Integration

MappingMapping

‘‘Design for Design for Manufacture and Manufacture and

Assembly’ Assembly’ Database & SoftwareDatabase & Software

4M Design for Manufacture Approach4M Design for Manufacture Approach

Horizontal Integration Horizontal Integration (Application Driven)(Application Driven)

Application typeApplication type Micro-fluidicsMicro-fluidics

Micro-OpticsMicro-Optics

Micro-sensors and actuatorsMicro-sensors and actuators:

Application typeApplication type Micro-fluidicsMicro-fluidics

Micro-OpticsMicro-Optics

Micro-sensors and actuatorsMicro-sensors and actuators:

Common Requirements:Common Requirements: e.g. e.g.

High aspect ratio structuresHigh aspect ratio structures

Unification and standardsUnification and standards

Design/Functional FeaturesDesign/Functional Features

Assembly FeaturesAssembly Features

Inspection FeaturesInspection Features

Design/Functional FeaturesDesign/Functional Features

Assembly FeaturesAssembly Features

Inspection FeaturesInspection Features

User Specification/User Specification/RequirementsRequirements

User Specification/User Specification/RequirementsRequirements

Horizontal Integration Horizontal Integration (Technology Driven)(Technology Driven)

Manufacturing Features Manufacturing Features

Assembly Features Assembly Features

Measurement FeaturesMeasurement Features

Process Process SimulationSimulation Tools Tools

Manufacturing Features Manufacturing Features

Assembly Features Assembly Features

Measurement FeaturesMeasurement Features

Process Process SimulationSimulation Tools Tools

Innovative Integration Innovative Integration and Development of and Development of Hybrid TechnologiesHybrid Technologies

Comp. Micro- TechnologiesComp. Micro- Technologies:: Micromachining, Microfabrication, Micromachining, Microfabrication, Metrology, Packaging & AssemblyMetrology, Packaging & Assembly

Comp. Micro- TechnologiesComp. Micro- Technologies:: Micromachining, Microfabrication, Micromachining, Microfabrication, Metrology, Packaging & AssemblyMetrology, Packaging & Assembly

Non-Silicon MaterialsNon-Silicon Materials:: metals, metals, plastics, ceramics, glass, etc.plastics, ceramics, glass, etc.

Non-Silicon MaterialsNon-Silicon Materials:: metals, metals, plastics, ceramics, glass, etc.plastics, ceramics, glass, etc.

New Materials and New Materials and ProcessesProcesses

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The Interdependencies and the Logical The Interdependencies and the Logical Links between WorkpackagesLinks between Workpackages

WP 1 Network ManagementWP 1 Network Management

WP 2: Divisional Operational StructureWP 2: Divisional Operational Structure

WP 3: Cross-Divisional ActivitiesWP 3: Cross-Divisional Activities

(Horizontal & Vertical Integration)(Horizontal & Vertical Integration)

WP 4: Polymer ProcessingWP 4: Polymer Processing

WP 5: MetrologyWP 5: Metrology

WP 6: Assembly & PackagingWP 6: Assembly & Packaging

WP 7: Processing of MetalsWP 7: Processing of Metals

WP 8: Processing of CeramicsWP 8: Processing of Ceramics

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Vertical Integration Vertical Integration (Application Divisions)(Application Divisions)

WP 12: Spreading of ExcellenceWP 12: Spreading of Excellence

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MEC, Cardiff University20 decembrie 2004


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MEC, Cardiff University20 decembrie 2004


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IMT expertise and involvement in 4MIMT expertise and involvement in 4MCeramics processing

micro-fluidics – micro-manufacture platforms for high pressure & high temperature applications; micro-fluidic manufacturing operations: compatible tooling and machining processes micro-optics – manufacturing of micro-moulds with free form surfaces in different kind of materials; assembly and testing of micro-optical systems micro-sensors and actuators – simulation and design (COVENTOR), micromachining, thin layers deposition, photolithography, masks fabrication, SEM, AFM, electrical characterization, packaging micro-components produced in different materials including IC-compatible ones

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Clean Room of IMT

CHEMFET Sensor for pH, K+, Na+, Mg +2, Ca+2 determination

Simulation (Coventor) of a differential pressure

sensor (deflection at 0,1 atm)

Microprobe for recording of cells and tissues electrical activity

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Laboratory of Microsystems for Biomedical and Environmental

Applications CALORIMETRIC SENSORS

Z-axis Displacement at 10.5 Volts (also showing deformation)

Thermal distribution at 10.5 Volts

Calorimetric sensor detects the heat that is a result of a burning reaction. The reaction takes place inside the ceramic pellet impregnated with the catalyst

(heated at 300-500oC) and involves oxygen and a flammable gas. The resulting heat is detected as an imbalance of the bridge in which the sensor is connected

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Laboratory of Microsystems for Biomedical and Environmental

Applications

Design aspectsThe gas sensor was designed to have an uniform temperature distribution. The rounded shape of the heating resistor gives an uniform temperature distribution, with the maximum temperature in the center of the circle.

Full layout Temperature distribution for the heater at 8V

NEXT PROJECT: Micromachined Gas sensor on ceramics substrate

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4M workshop in ROMANIA,

October 6, 2005 , Sinaia

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fp6 noe: multi-material micro manufacture: technologies and applications (4m) general overview

Documents

micro milling

actuators microsensors

assembly packaging wp

metrology wp

sensors actuators wp

workpackages wp

microfluidics wp

processing of metals