for motion, think newport psm2 · the psm2 provides high-speed, sub-microradian resolution, tip,...
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PSM2U L T R A - F A S T P I E Z O S T E E R I N G M I R R O R
The PSM2 provides high-speed, sub-microradian resolution, tip, tilt, and z motion for mirrors,gratings and other optics. Equipped with a direct piezo actuation system without lever armtransmission, the PSM2 is ideally suited for high bandwidth laser beam steering, switching andstabilization, beam scanning, image stabilization, and laser cavity tuning.
Fast and reliable motion is supplied by three multi-layer, low-voltage piezo stacks (PZT) in atriangle configuration. The length of each piezo stack can be controlled individually. Applying avoltage to one stack, results in a rotation. Changing the length of all three stacks simultaneously,results in a linear z-displacement.
For simple operation the three piezo stack of the PSM2 are arranged in a right-angled triangleconfiguration. This results in orthogonal rotation axis with no need for coordinatetransformations as required with alternative designs where the piezo stacks are placed in 120°intervals.
The parallel motion design of the PSM2 has also the advantage of being fully temperaturecompensated, i.e. changes in the environmental temperature do not affect the tilting angle.PSM2 units are also maintenance-free and are not subject to wear.
The PSM2 is available as an open-loop (no position feedback) or a closed-loop device withintegrated position feedback. The open-loop version is ideal for applications where the positionis controlled by an external sensor, e.g. a lateral effect diode, quad cell, photodiode, CCDcamera, etc.
The closed-loop version PSM2SG provides absolute position control, high linearity, and highrepeatability based on internal strain-gauge position sensors. The position feedbackcompensates also for actuator creep. For highest position stability and highest temperatureinsensitive performance, the sensors are built in a full Wheatstone bridge design. The PSM2SGcan be operated in either open or closed-loop control.
The PSM2 models are internally preloaded and can be mounted in any orientation. The PSM2supports mirrors up to 50 mm diameter and can be glued directly to the top plate.
PSM2 PSM2SGOpen Loop Closed Loop
Active Axes Θx, Θy, ZAngular Range, Θx, Θy (± 10%) (mrad) 2 (1, 4) 1.6 (1, 2, 4)
Travel Range, Z (± 10%) (mm) 16 (1, 4) 12 (1, 2, 4)
Resolution, Θx, Θy (mrad) 0.004 (3) 0.04 (2)
Resolution, Z (nm) 0.03 (3) –Typ. Repeatability, Θx, Θy (mrad) – 1.3 (2)
Capacitance (± 20%) (mF) 1.8Resonant frequency, unloaded (Hz) 5400Stiffness in Z (N/mm) 65Max load (N) 1Weight (g) 851) Typical value measured with NPC3 and NPC3SG, (-20 V to +130 VDC range).2) Applies to PSM2SG in closed-loop control only.3) Equal to rms noise value measured with NPC3 and NPC3SG controller.4) Linear travel and angular travel are interdependent. The values provided here are for pure linear or pure angular motion.
Specifications
F o r M o t i o n , T h i n k N e w p o r t ™
• Ultra-fast, two-axis rotation and linear z-motion for up to50 mm diameter optics
• 2 mrad angular range and 16 μm linear range
• Direct piezo design provide high-bandwidth control
• Ultra-compact
RoHSCompliant
Newport Corporation, Irvine, California and Franklin, Massachusetts; Evry and Beaune-La-Rolande, France and Wuxi, China have all been certified compliant with ISO 9001 by the British Standards Institution. Santa Clara, California is DNV certified.
Complete listings for all global office locations are available online at www.newport.com/contact
www.newport.comNewport Corporation, Global Headquarters1791 Deere Avenue, Irvine, CA 92606, USA
PHONE: 1-800-222-6440 1-949-863-3144 FAX: 1-949-253-1680 EMAIL: [email protected]
PHONE EMAILBelgium +32-(0)0800-11 257 [email protected] +86-10-6267-0065 [email protected] +33-(0)1-60-91-68-68 [email protected] +81-3-3794-5511 [email protected] +886 -(0)2-2508-4977 [email protected]
PHONE EMAILIrvine, CA, USA +1-800-222-6440 [email protected] +31-(0)30 6592111 [email protected] Kingdom +44-1235-432-710 [email protected] / Austria / Switzerland +49-(0)6151-708-0 [email protected]
Newport Corporation, Irvine, California and Franklin, Massachusetts; Evry and Beaune-La-Rolande, France and Wuxi, China have all been certified compliant with ISO 9001 by the British Standards Institution. Santa Clara, California is DNV certified.
Complete listings for all global office locations are available online at www.newport.com/contact
www.newport.comNewport Corporation, Global Headquarters1791 Deere Avenue, Irvine, CA 92606, USA
PHONE: 1-800-222-6440 1-949-863-3144 FAX: 1-949-253-1680 EMAIL: [email protected]
PHONE EMAILBelgium +32-(0)0800-11 257 [email protected] +86-10-6267-0065 [email protected] +33-(0)1-60-91-68-68 [email protected] +81-3-3794-5511 [email protected] +886 -(0)2-2508-4977 [email protected]
PHONE EMAILIrvine, CA, USA +1-800-222-6440 [email protected] +31-(0)30 6592111 [email protected] Kingdom +44-1235-432-710 [email protected] / Austria / Switzerland +49-(0)6151-708-0 [email protected]
PSM
2_DS
E (1
2/12
)
Dimensions
1.30(33)
SQR .79(20)
Z*
Y*X*
* NOTE: ROTATION AXES
.20 (5)
TILTING PLATE
4 HOLES M3 THDUSABLE DEPTH: .16 (4)
2 HOLES M2 THDUSABLE DEPTH: .08 (2)
2 HOLES M3 THDC’BORED ø.16 (4)
4 HOLES ø.08 (2)USABLE DEPTH: .20 (5)
SQR .98(25)
DIMENSIONS IN INCHES (AND MILLIMETERS)
PSM2(SG):3 CABLES AND3 SUB-D15 CONNECTORS PSM2(SG)-D:3 CABLES AND3 SUB-D25 CONNECTORSCABLE LENGTHPSM2(-D): 3.3 FT (1 M)PSM2SG(-D): 3.9 FT (1.2 M)
– TOP PLATE –
– BOTTOM PLATE –
Ordering Information
Model DescriptionPSM2 Piezo steering mirror, 2 mrad x 2 mrad x 16 µm, open-loopPSM2SG Piezo steering mirror, 2 mrad x 2 mrad x 16 µm, with strain gauge sensors