follow up of carbonitriding process by rf gdoes · carbonitriding is a metallurgical surface...

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GDOES 6 12.0 carbon C 193.091 I 247.856 I 199.362 I < 3 7 14.0 nitrogen N 14 28.0 Si 15 30.9 P Patrick Chapon, HORIBA Scientific, 16 rue du Canal, 91160 Longjumeau, France Introduction Carbonitriding is a metallurgical surface modification technique that is used to increase the surface hardness of a metal, thereby reducing wear. During the process, atoms of carbon and nitrogen diffuse interstitially into the metal increasing the hardness and modulus near the surface. Calibration GD is a comparative technique. Calibration curves are established for all elements of interest by running reference samples. Plasma cleaning can be applied during calibrations and analysis to minimize surface contaminations Below is shown the calibration of Carbon. The Sputtering Rate mode is used allowing mixing within a single program, materials of different matrices. A similar calibration is done for N. The following graphs show the full calibration curve (we will further comment the high point value) and a zoom on the low concentrations indicating the sensitivity of the instrument in the UV/VUV range. Abstract RF GDOES is suitable for fast and accurate measurements of carbonitrided samples allowing to follow C and N depth profiles. Key words Carbonitriding, thick layers, C & N Follow up of carbonitriding process by RF GDOES Application Note Metallurgy GD25

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Page 1: Follow up of carbonitriding process by RF GDOES · Carbonitriding is a metallurgical surface modification technique that is used to increase the surface hardness of a metal, thereby

GDOES

32 72.6

germaniumGe

265.118 I209.426 I164.919 II < 1

33 74.9

arsenicAs

189.042 I193.696 I159.360 I < 3

34 78.9

seleniumSe

196.026 I203.985 I206.279 I < 3

35 79.9

bromineBr

154.064 I163.340 I153.174 I < 3

36 83.8

kryptonKr

50 118.7

tinSn

189.989 II235.484 I242.949 I < 3

51 118.7

antimonySb

217.581 I206.833 I231.147 I < 3

52 127.6

telluriumTe

214.281 I170.158 I225.902 I < 3

53 126.9

iodineI

178.218 I179.847 I142.548 I < 3

54 131.3

xenonXe

8 16.0

oxygenO

9 19.0

�uorineF

156.078 I156.104 I

10 20.1

neonNe

6 12.0

carbonC

193.091 I247.856 I199.362 I < 3

7 14.0

nitrogenN

14 28.0

siliconSi

251.611 I288.412 I212.412 I < 3

15 30.9

phosphorusP

177.495 I178.284 I213.608 I < 3

16 32.0

sulfurS

180.731 I182.625 I166.660 I < 3

17 35.4

chlorineCl

137.724 I136.345 I133.573 I < 3

18 39.9

argonAr

416.416 I356.434 II317.296 I

82 207.2

leadPb

220.353 II168.215 II182.205 II < 3

83 209.0

bismuthBi

223.061 I306.772 I222.825 I < 3

84 209.0

poloniumPo

84 (210)

astatineAt

86 (222)

radonRn

Patrick Chapon, HORIBA Scientific, 16 rue du Canal, 91160 Longjumeau, France

Introduction

Carbonitriding is a metallurgical surface modification technique that is used to increase the surface hardness of a metal, thereby reducing wear. During the process, atoms of carbon and nitrogen diffuse interstitially into the metal increasing the hardness and modulus near the surface.

Calibration

GD is a comparative technique. Calibration curves are established for all elements of interest by running reference samples. Plasma cleaning can be applied during calibrations and analysis to minimize surface contaminations

Below is shown the calibration of Carbon. The Sputtering Rate mode is used allowing mixing within a single program, materials of different matrices.

A similar calibration is done for N. The following graphs show the full calibration curve (we will further comment the high point value) and a zoom on the low concentrations indicating the sensitivity of the instrument in the UV/VUV range.

AbstractRF GDOES is suitable for fast and accurate measurements of carbonitrided samples allowing to follow C and N depth profiles.

Key wordsCarbonitriding, thick layers, C & N

Follow up of carbonitridingprocess by RF GDOES

Application Note

MetallurgyGD25

Page 2: Follow up of carbonitriding process by RF GDOES · Carbonitriding is a metallurgical surface modification technique that is used to increase the surface hardness of a metal, thereby

Comment on N calibrationStandard bulk CRMs, usually, have low contents in N (max is 1.49% for the most used JK49). However the samples to measure will contain layers with up to 10% or more in N. Though the calibrations in GD are quite linear, using some higher points in calibration is better for accuracy. This is possible as the HJY software allows to use coated samples as well as bulk ones within a single calibration curve. Here a FeN coating on steel is used and the principle is shown below.

The entire depth profile is recorded and the zone of interest (plateau region of the FeN) is selected for N calibration.

Principle of use of a coated sample in a calibration

Example of measurement

A first example is shown here.

Depth profile of a carbonitrided sample with zoom on N

The second example below features a nitrided sample with post oxidation on the surface.

Several other results can also be found in the references below. One should finally note the recent presentation of Luc Pichon at the 7th GD day (Reims June 2014) on “Nitrogen incorporation in metallic alloys by plasma immersion surface treatments at moderate temperature”. All the presentations of the GD days are available on request.

References : 1) “Microstructure and properties of the compound layer obtained by pulsed plasma nitriding in steel gears” by E.A. Ochoa, D. Wisnivesky, T. Minea, M. Ganciu, C. Olivero, P. Chapon, F. Alvarez. Surf. Coat. Technol. (2008), doi:10.1016/j.surfcoat.2008.11.025

2) M Lovonyak “GDOES for Knowledge Based Surface Design of Tool Steels”, presentation at the 5th GD day

3) G. Mancuso “Heat Treatment Process Control with GD-OES”, presentation at the 5th GD day.

4) “Study of the effects of E x B fields as mechanism to carbon-nitrogen plasma immersion ion implantation on stainless steel samples” E.J.D.M. Pillaca M. Ueda R.M. Oliveira L. Pichon, Applied Surface Science, doi:10.1016/j.apsusc.2014.04.003

[email protected] www.horiba.com/scientificUSA: +1 732 494 8660 France: +33 (0)1 69 74 72 00 Germany: +49 (0)89 4623 17-0UK: +44 (0)20 8204 8142 Italy: +39 2 5760 3050 Japan: +81 (0)3 6206 4721China: +86 (0)21 6289 6060 Brazil: +55 (0)11 2923 5400 Other: +33 (0)1 69 74 72 00 Th

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