flexmod - specsgroup
TRANSCRIPT
Key Features
•FlexibleandModularSurfaceAnalysisSystemDesign
•OptimizedAnalysisModulesforSpectroscopy,MicroscopyandSamplePreparation
•Multi-MethodSystemCapabilities•EasyandCostEffectiveUpgradeOptions
FlexModFlExiblEMODUlArAnAlySiSSyStEM
FlexMod
innOvAtiOninSUrFACESPECtrOSCOPyAnDMiCrOSCOPySyStEMS
SPECS leads the way in state-of-the-art technology for surface analysis.
Packaging of a SPECS component after final testing
Final alignment of an UHV high precision sample manipulator
SPECSSurfacenanoAnalysisGmbH
SPECS has more than 130 employees at itsheadquarters in berlin and its subsidiaries inSwitzerland, the USA and China. the companyalso has liaison offices in Spain and benelux,supported by international sales channelsin sixteen countries. A team of scientistsand engineers is involved in developing andproducing scientific instruments for surfaceanalysis,materialsscienceandnanotechnology.
Since the company was founded in 1983,its success is based on a continuous gain inexperience.SPECSscientistsareinclosecontactwithalargenumberofcustomersandscientistsaroundtheworld.SPECSisyouressentialpartnerinscientificinstrumentationduetoourfocusoncustomer support, know-how and internationalcontacts.ScientistsallovertheworldcanrelyonSPECSproductqualityandbeinspiredbythecontinuousdevelopmentofnewproducts.
FlexModFlExiblEMODUlArAnAlySiSSyStEM
Content
FlexModConcept . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
FlexPS–SystemModuleforElectronSpectroscopy . . . . . . . . . . . . . . . . 6
FlexPM–SystemModuleforScanningProbeMicroscopy . . . . . . . . . . . . . .10
FlexPrep–SystemModuleforSamplePreparation . . . . . . . . . . . . . . . .14
Flexintro–SystemModuleforSampleintroduction. . . . . . . . . . . . . . . . 16
FlexAdd–FlexibleAdd-onModules . . . . . . . . . . . . . . . . . . . . .18
FlexMan–FlexibleSampleManipulation . . . . . . . . . . . . . . . . . . .20
Flexvac–FlexiblePumpingSystem . . . . . . . . . . . . . . . . . . . . .24
Flexbake–FlexiblebakeOutConcept . . . . . . . . . . . . . . . . . . . .26
FlexModConfigurations. . . . . . . . . . . . . . . . . . . . . . . . . 27
FlexMod
FlexModConceptFlExiblEMODUlArAnAlySiSSyStEM
Surface Nano Analysis tools combining uncompromised performance with an upgradeable, cost-effective system concept
Standard system solutions and stand-alonesystemsinmostcasesonlycananswerstandardquestions. the integration of several analyticaltechniques requires a more sophisticatedapproach. Such integration can include samplepreparation,thinfilmdeposition,surfaceanalysisinultrahighvacuum,andevenmethodsworkinginotherenvironmentsor in situanalysisunderworkingconditions.thus,advancedapplicationsin surface analysis and surface nano analysisrequire a significant degree of customizationregardingtheanalysissystemdesign.
thedilemmahere is, that customized solutionstakealongtimetoberealized,andaresignificantlymoreexpensive.Furthermore,normallytheyarenotflexibletolaterchanges,becausegeometriesand specifications are only optimized for thedefined purpose. later upgrades, if possibleatall,will lead toa systemconceptwithahighdegreeofcomplexityinoperation.
the way out of this maze would be amodularconcept,wellknowntomanyofusfromchildhooddays. transfer the pleasure of playing withbuildingblockstomodernresearch.Concentrateon solving scientificproblems, insteadofdivinginto the small details of complicated systemdesigns. Start from well-planned, well-specifiedand application-optimized building block typemodules for adedicated task.With allmoduleshaving equal form factors, immediate or latercombination of several of these optimizedmoduleshelptobuild-upamulti-methodsystem,exactlyoptimizedtotherecentapplicationandinfutureevengrowingwithextendedtasks.
the future of customization is available: SPECSFlexMod.
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the FlexMod system concept provides thescientistwithanoptimized,butstillcustomizablesolution, for a variety of surface sciencetechniques.thesystemallowsyou tostartwitha basic configuration and expandwith upgradeoptions towards improved performance orexpansion to more additional methods. thismeans the system can growwith you and yourneeds.
the individual modules are optimized infunctionality for thechosenmethod.Within themoduleitispossibletoselectfromalargenumberofcomponentsforanalysis.inaddition,weoffer
several choices for pumping configuration andsamplemanipulationwhichallowyoutoadaptthesystemtoyourneeds.individualmodulescanbeoperatedasstand-alonesystemsorbecombinedfrommulti-methodsystemconfigurations.thesystemconfigurationcanalsoberearrangedto adapt to new experimental requirements.Accompanied by comprehensive automation,FlexMod is the perfect solution for multi-userenvironments aswell. Convince yourself of thisconcept and start to adapt the surface nanoanalysis system to your research, instead oflimitingyourresearchbytheequipmentavailableinyourlab.
FlexMod
FlexPSSyStEMMODUlEFOrElECtrOnSPECtrOSCOPy
The specially designed UHV chamber provides an optimized geometry for all electron spectroscopy applications. It allows a combination of XPS, UPS, AES and ISS methods with full performance for each method.
FlexPS System – Standard UHV System Module with optional components for electron spectroscopy
the heart of the FlexPS UHv systemmodule isthe specially designed analysis chamber. it isoptimizedtofulfillthegeometricalrequirementsfor all common electron- and ion spectroscopyapplications.thechamberismadeofµ-metalinorder to optimizemagnetic shielding and allowthehighestenergy resolution.For less sensitiveapplications, a stainless steel chamber is alsoavailable. the system base can be equppedwith a variety of pumping configurations to
meet specified gas load and base pressurerequirements. thanks to the unique design,componentscaneasilybeadded,upgradedandexchanged. Within the flexible system concept,differentsamplehandlingoptionscanbechosenwith respect to sample size, temperature rangeandmanipulation possibilities. the FlexMod PSallowssamplesizesupto2”usingmanipulationpossibilitieswithupto6degreesof freedom.itoffers fitting solutions for all standard heating
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Hemispherical Analyzer PHOIBOS
Twin Anode X-Ray Source XR 50
ConfigurationOptionsforElectronSpectroscopyCenterpiece for electron spectroscopy isthe hemispherical analyzer PHOibOS. it is ahighly flexible electron analyzer with availableconfigurations for ESCA, xPS, ArxPS, ArPES,UPS, AES, SAM, iSS, snap shot data acquistionand2Ddetectionmodes.Specialdetectorswithextended dynamic range offer high count rateswhile the special analyzer design results in thebestenergyresolutiondownto2mevinUPSandlateralresolutiontobelow50µminxPS.
Monochromatic X-Ray source FOCUS 500
High Performance UV source UVS 300
Dependingontheapplication,suitableexcitationsources can be chosen from a wide range ofoptions:
•x-raysourcesforxPS/ESCAincludingtwinanodex-raysourcexr50andmonochromaticx-raysourceFOCUS500andthesmallspotµ-FOCUSmonochromatorsources
•ElectronsourceEQ22forAESandelectronsourcesforSEM/SAMdownto100nmlateralresolution
•UvsourcesforUPS:UvS10/35,UvS300andUvlSwithoptionalmonochromatororpolarizer
•FloodGunFG15/40forchargecompensation
•ionsourcesforsamplepreparation,depthprofilingandiSS:iQE11/35,iQE12/38orgasclusterionsources
•Samplemanipulatorwithupto6axis,samplesizeupto2”andheatingandcoolingfacilities
and cooling operations, thus covering a broadtemperature range. Additional sample storageslotscanbeimplementedtoincreasethesystem’sefficencyortoupgradeformulti-useroperation.
FlexMod
applications
ESCA/xPS/ArxPS UPS/ArPES
The high resolution capability of the PHOIBOS analyzer combined with the FOCUS 500 monochromator and the flood gun FG 15/40 has been demonstrated by XPS measurements on a PET (polyethylene terephthalate) surface. In the analysis of polymeric surfaces, monochromatic sources offer a significant advantage over non-monochromatic sources due to the improved resolution. This allows to distinguish even small energy shifts which are caused by different bonding. When using monochromatic X-rays however, spectra can be difficult to obtain due to surface charging effects when analyzing non conducting organic materials. In order to record high quality data under these circumstances, it is necessary to neutralize surface charging carefully. The FG 15/40 is a compact, easy to handle, reliable flood gun for charge neutralization. The C1s spectrum above shows the ability to distinguish carbon atoms 1, 2 and 3 with a FWHM of 0.8 eV.
Angle resolved UV photoelectron spectroscopy is an important tool for band structure analysis of crystalline surfaces and low dimensional structures. The band structure of crystalline graphite layers on the (0001) surface of SiC was measured by high-resolution angle-resolved photoelectron spectroscopy. The surface was analyzed using a PHOIBOS 100 analyzer with a 2D CCD detector which allows snap shot mode analysis of band structures using a special wide angle lens mode. This results in extremely fast data acquisition of less then one minute for the full image. The experiments were performed using a SPECS UV source UVS 10/35, which has a line width of < 2 meV and a spot size of about 0.6 mm in diameter. The photon energy for all measurements shown here were 40.81 eV (He II). Data courtesy T. Balasubramanian (MAX-Lab, Sweden) and R. Uhrberg (Linköping University, Sweden).
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AES/SEM/SAM DepthProfilingandiSS/lEiS
Depth profiling of 100nm SiO2 layer on Si (standard sample for depth calibration) based on XPS signal during ion sputtering. Shown is the atomic concentration for silicon and oxygen elements calculated from the XPS intensity of the Si 2p and the O 1s element lines. The interface between the SiO2 layer and the Si wafer substrate is visible as a sharp edge with a width of 7 nm (20 % to 80 %).
Secondary Electron Microscopy (SEM) images of Sn balls on graphite. Size 5 nm -30 µm
Secondary Electron Microscopy (SEM) image of copper square mesh G300.300 lines/inch, 25 µm bar width, 58 µm hole width Ion Scattering Spectroscopy (ISS) measurement of He
ion scattering on Ag surface with analyzer PHOIBOS. The ISS method is extremely surface sensitive and can give important additional information to the electron spectroscopic methods.
S - B = 1.4FWHM =
FlexMod
FlexPMSyStEMMODUlEFOrSCAnninGPrObEMiCrOSCOPy
SPECS engineers have developed a dedicated chamber module design for atomically resolved STM and AFM in UHV or under Near Ambient Pressure (NAP) conditions.
the FlexPM systemmodule integrates a varietyof in situ sample preparation techniqueswith outstanding atomically resolved SPMperformance in onededicated chamber design.DuetothespecialSPECSSPM150Aarhusdesign,theconfiguration is very smallandflexible.theextreme stability of the SPM150Aarhus allowsa variety of different pumping configurations,including the option of using turbo pumps for
FlexPM System – Standard UHV system module with optional components for Scanning Probe Microscopy
high gas loads. Even in noisy surroundings,atomic resolution is achieved without externalvibrational damping. the system includes portsfor in situ tip and sample preparationwith ionsources and evaporators. A sample storage canbe added for convenient sample loading whileviewportsareincludedasstandardconfigurationforeasysamplehandling.
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UHV Scanning Probe Microscopy Head SPM Aarhus 150
KolibriSensor for parallel STM and AFM data acquisition with highest stability
Ion Source for in situ tip preparation
Sample storage and heating stage for sample preparation
ConfigurationOptionsforScanningProbeMicroscopytheScanningProbeMicroscopyModuleisbasedaroundthehighstabilitySPM150AarhusSeries.theSeries includesconfigurationsforpureStMand for StM/AFM combinations. For AFM, thespecialKolibriSensorisusedwhichhasauniquecrosstalkfreeparallelperformanceforStMandAFM.inallconfigurations,in situtippreparationforoptimumresolutioninSPMisauniquefeatureof the Aarhus design. Fastest StM electronicsas well as high flexibility nanonis electronicsfor SPMcanbe chosen. the temperature rangefor SPM can be chosen from liquid nitrogen orheliumtohightemperaturesupto1300K.
Depending on the application, suitableaccessories for sample preparation can bechosenfromalargerangeofoptions:
•ionsourceiQE11/35forsamplepreparationandtippreparation
•E-beamevaporatorsinsinglepocket,EbE-1,ormultipocket,EbE-4,configurationforthinfilmdeposition
•Samplestoragewithheatingstageforsamplepreparationthroughdirectcurrentheatingupto1400K
FlexMod
stM applications
DefectmobilityonO(2x1)-ru(0001) Grapheneonru(0001)imagedat700°Cwithatomic-resolution
Instrument: SPM 150 Aarhus with KolibriSensorImaging parameters: Constant current STM images I = 0.57 nA, U = 1.473 V Image size: 20 nm x 20 nm, 12 nm x 12 nm, 4 nm x 4 nm Temperature: room temperatureImages taken at SPECS laboratoryThe O(2x1)-Ru(0001) surface consists of different domains rotated by 120° with respect to each other. At room temperature mobility of point defects imaged as dark spots on top of the bright rows is observed.
Instrument: SPM 150 Aarhus HT with W-STM tipImaging parameters: Constant current STM images I = 0.37 nA, U = 0.013 V Image size: 150 nm x 150 nm, 12 nm x 12 nm, 4 nm x 4 nm Temperature: 700 °CImages taken at SPECS laboratoryThe graphene was grown by chemical vapor deposition of ethylene on the hot Ru(0001) sample inside the microscope. The sample was heated by radiation from a hot filament to 700°C throughout preparation and imaging.
13aFM applications
Grapheneonru(0001) WaterlayeronKbr(001)
Graphene on Ru(0001)Instrument: SPM 150 Aarhus with KolibriSensorImaging parameters: Constant detuning NC-AFM imageDf = -0.08 Hz, U = -0.16 V, fres = 999,154 Hz, A = 300 pm, Q= 29600Image size: 150 nm x 150 nm, 30 nm x 30 nm, 9 nm x 9 nm Temperature: room temperatureImages taken at SPECS laboratory
The graphene was grown by chemical vapor deposition of ethylene on Ru(0001). At low coverages the growth of monolayers and isolated islands was observed.
Instrument: SPM 150 Aarhus with KolibriSensorImaging parameters: Constant detuning NC-AFM imageDf = -0.3 Hz, fres = 996,581 Hz, Q= 3500, A = 500 pmImage size: 200 nm x 200 nm Temperature: 130 KImage taken at SPECS laboratoryAt low temperatures the formation of a water wetting layer is observed on the KBr(001) surface. The wetting layer nucleates preferentially at step edges
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FlexMod
the FlexPrep module is designed to integratea variety of in situ preparation techniquesincluding ion etching, e-beam deposition, aswell as lEED and rHEED analysis. SPECS alsoprovides the corresponding components andaccessories.theFlexPrepmoduleisanextensionof the FlexPSand FlexPMmodules for separatebut in situ sample preparation. this allowsthe highest purity level in analysis combinedwith the required flexibility for preparation.
the pumping configuration can be selected tomeetgas loadandbasepressurerequirements.Within the flexible system concept, samplehandling offers standard choices regardingsamplesize,temperaturerangeandmanipulationpossibility, to meet the optimum experimentalrequirements. it includes solutions up to 2”samplesizewithupto5degreesoffreedomandextendedsampleheatingandcoolingfeatures.inaddition,samplestoragefacilitiescanbeadded.
FlexPrepSyStEMMODUlEFOrSAMPlEPrEPArAtiOn
For in situ sample preparation SPECS offers an optimized and versatile chamber module solution.
FlexPrep System – Standard UHV System Module with optional components for sample preparation
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LEED Optics ErLEED 150
E-Beam Evaporator EBE-4
RHEED package RHD 30 for in situ analysis
Plasma source PCS ECR for sample preparation
ConfigurationOptionsforSamplePreparationDepending on the application, suitableaccessories for sample preparation can bechosenfromawiderangeofoptions:
•ionsourceiQE11/35forsamplecleaning
•PlasmasourcesPCS-ECr,MPS-ECrorPCS-rFforsamplepreparationwithreactivegases,e.g.
•nitriding(Gan,Aln,innandSin),doping(ZnSe),alloying(GalnnAs,GaAlAsn)
•Oxygen:HtCsuperconductors,opticalcoatings,dielectrics,reactivesputtering,laserablationandceramicgrowth(Al2O3)
•0xygencleaningandoxidationkinetics,postgrowthoxidation/lowtemperatureSiO2
•Hydrogen:Cleaning,growthenhancement/surfactant
•Chlorine:in-situetchingmethane(carbon):SiCfilmgrowth
•E-beamevaporatorsinsinglepocket,EbE-1,ormultipocket,EbE-4,configurationsforthinfilmdepositon
•lEEDopticsErlEEDwithAugeroptionandSafiresoftwarepackageforimageacquisitionandevaluation
•rHEEDrHD-30packagewithSafiresoftwareoptionandelevatedpressureoption
•Samplemanipulatorwithupto6axis,samplesizeupto2”andheatingandcoolingpossibilities
FlexMod
loadlockModuleFlexintro
Special fast sample introduction module withminimizedvolumeforfastpumpdown.Pumpingoptions include an independent turbo pumpstation or a cost efficient bypass solution. thesystem is designed for sample handling andloading of the SPECS SH2/12 sample plates forsamplesizesupto10mmx10mm
loadlockModuleFlexintroPlus
Advanced multipurpose module system withupgradepathsforsamplepreparationandrotarysample distribution. the system has extendedsamplehandlingcapabilitiesforupto2”samplesizes, sample storage possibilities and rotarysampledistribution.Optimizedportsforsamplepreparation options, like heating for degassing,ionsputteringanddepositionare included.the
Sample Introduction Systems for FlexMod System Moduls: FlexIntro and FlexIntro Plus
FlexintroSyStEMMODUlEFOrSAMPlEintrODUCtiOn
Load lock systems with fast access sample loading door for easy and fast sample loading without system venting. The systems have minimized volumes for fast pumping down.
17pumpingconfigurationcanbechosentosuitthedesired base pressure, pump down speed andgasloads.
ConfigurationOptionsforFlexintro
•Samplestorageforupto8samples
ConfigurationOptionsforFlexintroPlus
•Samplestorageforupto8samples
•radialsampledistributionwithsamplecarouselforupto8samplesandconnectionofupto5satellitechambers
•Samplepreparation:ionSourceiQE11/35,HydrogenCrackerSourcetGC-H,e-beamevaporators,EbE-1orEbE-4orPlasmaSources
Rotary sample storage and distribution for 6 samples plates type SH 2/12 with z-retract
Linear sample storage for 6 SH 2/12 type samples plates, double sided for compact design
FlexMod
FlexModAdd-OnOptions
the idea of FlexMod concept is maximumflexibilitycombinedwithdedicatedsolutionsforsurfacescience.FlexAddmodulesallowextensionofdedicatedFlexModsystemsinacompactandcosteffectiveway.Existingframesandpumpingsystems can be used and the capability of thesystem extended by just adding an additionalchamberforspecificmethods.
SPECS offers flexible customized add-onmodules,forexampleforirAS,ellipsometry,etc.as well as dedicated standard add-on modulesforscanningprobemicroscopy,preparationandhighpressurereactionexperiments.
standard Flexadd Modules
FlexPMbolt-OnModule
SPM extension for standard FlexPS or FlexPrepSystem Modules. the main chamber pumpingsystemcanbeusedifanionpumpisfitted.Canbemountedtoanexistingframe.
FlexAddFlExiblEADD-OnMODUlES
Compact and cost efficient bolt-on stations for FlexMod System Modules. SPECS systems can be upgraded with different compact add-on chambers.
FlexPrepbolt-OnModule
Preparation extension for standard FlexPS orFlexPM System Modules. Pumping system ofmainchambercanbeused.Canbemountedtotheexistingframe.
FlexPrep Bolt-On Module added to FlexPS System Module with equipment options
19HighPressureCellFlexHPC20
Special bolt-On solution for SPECS SystemModulesforin situanalysisofcatalyticreactions.Specialized design with minimized reactionvolume and chamber in chamber design withwatercooled innerchamberandspecialsealingmechanism for operation up to 20 bar. SPECShas implemented a special heating mechanismby halogen lamp which only heats the reactive
sample area and therefore prevents reactionsatothersurfacesandallowsheating inreactionconditions up to 800°C. the high pressure cellworks with a wide range of gases includingO2, CO2, n2, H2, and all inert gases. the samplehandling is designed for SPECS type SH 2/12sampleplatesforupto10mmx10mmsamplesize.
FlexMod
5 axis UHV sample manipulator with full motorization and SH 2/12 sample stage with additional sample storage possibility
Specifications
•x-,y-translations:+/-12mm
•precision:+/-10µm
Z translation:
•selectablefor4axismanipulator:200mm,300mm,500mm,700mm,900mm
•selectablefor5axismanipulatorwithazimuthalrotation:200mm,300mm,500mm
•selectablefor5axismanipulatorwithcontinuousazimuthalrotation:200mm,500mm
•selectablefor5axismanipulatorwithtilt:500mm
•precision:+/-50µm•polarrotation:+/-180°•precision:+/-0.1°
selectable second rotation:
•azimuthalrotation(inplane):+/-90°
•continuousazimuthalrotation(withoutcoolingoption)
•outofplanesampletilt:+/-30°
•liquidnitrogencoolingpossibilitydownto90Kincludedforallconfigurations,besidesthecontinuousrotationoption.
•optionalHecooling•sampleheatingpossibilitywithe-beam
heatingupto800°Ccontinuousandupto1200°Cflashheating,optionalpowersupplywithPiDcontroller
FlexManFlExiblESAMPlEMAniPUlAtiOntyPESH2/12
Flexible configuration with up to 5 degrees of freedom for sample manipulation and selection of Z-travel, including heating, cooling and optional motorization.
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Sample holder stage with SH 2/12 sample plate inside FlexPS module in front of electron spectroscopy equipment
SPECSSampleHoldertypeSH2/12
•Formountingofsampleswithsizesupto12 mmx12 mm
•Minimumsamplethicknessof0.5mm,maximumthickness4mm,
•Optionalsampleholderfor1”sampleplates
•Samplebiasconnectionincluded
•Filamentandconnectionsfore-beamheatingupto800 °Ccontinuousheatingandupto1200 °Cshorttimeheatingincluded
•liquidnitrogencoolingdownto90 Kincludedforallmodelsexceptthe5axiscontinuousrotationversion
•thermocouplefixedtosamplestage
Sampletransfer
For sample mounting, a variety of transferablesample plates are available. Samples aremounted directly to the sample plates, offeringflexible operation. Heating and cooling optionsare integrated in the manipulator stage. thesample plates are transferred with a specialtransfer tool with sample locking mechanismmountedtoamagneticallycoupledtransferrod.
Transfer of sample plate with transferable thermocouple connections to heatable and coolable sample stage
FlexMod
Standard stainless steel SH 2/12 sample plate with 4 threaded holes for sample mounting
SamplePlatesforSPECSSampleHoldertypeSH2/12
•varietyofdifferentsampleplatesavailablefordirectcurrentheating,e-beamheating,powdersamples,etc.
•Differentmaterialsavailableincludingstainlesssteel,taandMo.
SampleManipulationOptions
•PowersupplyEbH-150withPiDcontrollerfortemperatureregulationincludinginterfaceforPCcontrol
•transferablethermocoupleconnectionforprecisetemperaturemeasurementatthesamplesurface,forexamplefortemperatureprogrammeddesorptionstudies
•Samplestorageforuptothreesamplesmountedtomanipulator
•MotorizationofindividualmanipulatoraxisorallaxisandPCcontrolpossibility
Special SH 2/12 sample plate for direct current heating, e. g. for heating of semiconductors like Si up to 1400 °C
Special SH 2/12 high temperature sample plate for high temperature e-beam heating up to 1400 °C
Special SH 2/12 sample plate for “hat”-shaped crystals
23SampleHolderPlateDimensions
“1” Sample Holder Plate for sample size up to 1”
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SH 2/12 Sample Holder Plate for sample size up to 1/2”
Adapter for 2” Sample Holder Plate to SH 2/12 sample plate»
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“2” Sample Holder Plate for sample size up to 2”
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FlexMod
the FlexMod concept offers highflexibility, andthis also applies to the pumping system. it ispossibletostartwithabasicpumpconfigurationforUHvgenerationandupgradetomoreadvancedsystems for higher gas load or lower pressureslater.theframeandpumpingportsarepreparedtoaccomodatedifferentconfigurationsincludingdifferentturbopumpsizes,iongetterpumpsandtitanium sublimation pumps. Generally, SPECSimplementsoil freepumps toachieveoptimumvacuumconditions.Specialoilfreescrollpumpsareusedasroughingpumps.
FlexvacFlExiblEPUMPinGSyStEM
The FlexMod system frame is designed to allow for a variety of pumping configurations depending on your requirements.
FlexModsystemsarealsoalwaysequippedwiththe necessary pressuremeasurement packagesconsistingofbayard-Alpert iongauges,PenningcoldcathodegaugesandPiranigaugesdependingon the vacuum range of the corresponingFlexModmodule.
the system frame also allows upgrades forvibrationaldampingandattachmentofadditionalframemodules.
25PumpingConfigurationOptionsforFlexPS,FlexPMandFlexPrep
Final Base Pressure
Pump configuration
Small < 9x10-10mbarturbopump260l/sn2,titaniumsublimationpump,scrollpump
Medium < 5x10-10mbarturbopump685l/sn2,titaniumsublimationpump,scrollpump
large < 2x10-10mbar
turbopump260l/sn2,ionpump240l/sn2,titaniumsublimationpump,scrollpump
ion < 5x10-10mbarionpump240l/sn2,titaniumsublimationpump
AdditionalOptions
•Gatevalves,pneumaticormanual
•Pressuremeasurementwithsoftwarecontrol
PumpingConfigurationsforFlexintro
Final Base Pressure
Pump configuration
Small 9x10-8mbarbypasstomainsystemmodule(onlywithturbopumpasmainchamber)
Medium 5x10-8mbar turbopump71l/sn2,Scrollpump
large 2x10-8mbar turbopump260l/sn2,Scrollpump
Pressure and pump control by software package SpecsLab Prodigy
FlexMod
toachievepurestvacuumconditionsallFlexModModules are complemented by an easy to usebakeout system. it uses a well establishedoven like principle to ensure a homogeneoustemperature distribution throughout the bakeoutprocess.thebakeouttentismadeofaheatresistant insulation layer supported by rigidmetalframewhichincludestheheatingunitsandfans.insulationlayerandframearecomposedofsimplemodular parts. this ensures compliancewiththeFlexModconceptasthebakeouttentcan
FlexbakeFlExiblEbAKEOUtCOnCEPt
To achieve optimum UHV conditions the FlexMod system module is equipped with a specially designed bakeout tent. The tent consists of a flexible and easy to handle cover and a rigid form.
easilygrowwith thesystem.Moreover itallowsaconvenientsingleuserinstallationandreducesthenecessary storagespace toaminimum.Forautomatedoperationthecontrolunitisequippedwithaprogrammabletemperaturecontrolandatimerfunction.
FlexPS & FlexPrep & FlexIntro Classic
FlexModConfigurationstHEMODUlArCOnCEPt
The FlexMod system concept allows a wide range of combinations, particularly reconfiguration and expansion schemes. Examples of the FlexMod System Concept are shown. Inspired by the examples? Please contact us for your specific configuration and design.
FlexPS & FlexPrep & FlexSTM & FlexIntro Classic with linear distribution
FlexPS & FlexPrep & FlexSTM & FlexIntro Classic
FlexSTM & FlexPrep & FlexIntro Classic
Electron Spectroscopy System consisting of FlexPS and FlexIntro Classic
sPeCsSurfacenanoAnalysisGmbHvoltastrasse513355berlin / Germanywww.specs.com
Version02.03