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Final Program of AEPSE2017

Monday, September 11, 2017 (Lotte Hotel Jeju)

08:30-18:00 Registration Registration Desk

Tutorials Tutorial Room TBA 09:30-12:00 Tutorial(1) Fundamentals of Gas Discharge and Plasma Control Holger Kersten University of Kiel, Germany 12:00-13:00 Lunch 13:00-15:00 Tutorial(2) Process Plasma Diagnostics for PECVD and Etching Masaru Hori University of Nagoya, Japan 15:00-15:10 Coffee Break 15:10-17:30 Tutorial(3) Advanced Surface Engineering for High Performance Multifunctional Coatings; How to Make Judicious Choices Ludvik Martinu EcolePolytechnique of Montreal, Canada 17:30-19:00 Welcome Reception ( Lotte Hotel Jeju ) 19:00-20:00 AJC-APSE Meeting( TBA )

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Tuesday Morning, September 12, 2017 (Lotte Hotel Jeju)

08:30-18:00 Registration Registration Desk 09:00-09:15 Conference Opening Room TBA 09:15-10:05 Plenary Session (1) Chair: Masaru Hori, Japan Room TBA Plasma Technology for Sub-10 nm Patterning Naoki Inagaki Tokyo Electron Ltd., Japan

Scientific and Technological Sessions and Topical Workshops

S1 Fundamental for Plasmas, Films and Coatings (1) Chairs: Holger Kersten, Germany and Masaharu Shiratani, Japan Room A 10:15-10:45 S1-IV01 Invited Spatial Structure of Interactions between Nanoparticles and Low Pressure Plasmas Masaharu Shiratani, Hyunwoong Seo, Naho Itagaki, and Kazunori Koga Kyushu University, Japan 10:45-11:00 S1-OR01 Regulated Plasmas as a Mean to Initiate the Free-Radical Polymerization of Vinylene Monomers – New Vapor-Phase Routes Towards Conventional Polymer Layers Nicolas D.Boscher, François Loyer and Patrick Choquet Luxembourg Institute of Science and Technology, Luxembourg 11:00-11:30 S1-IV02 Invited Thermal Plasma Characterization for Environmental Application Takayuki Watanabe*, Yutaro Ozeki, and Manabu Tanaka Kyushu University, Japan 11:30-11:45 S1-OR02 Adhesive Characteristics of TFT Display Using Atmospheric Pressure Nitrogen Plasma Treatment Hak Sun Kim and Youn-Jea Kim Sungkyunkwan University, Korea 11:45-12:00 S1-OR03 Synthesis of Carbon Nanowalls by Plasma-Enhanced CVD and their application for Gas Separation Membrane Myat Kyaw, Shinsuke Mori2, Nathaniel Dugos3, Susan Roces3, and Arnel Beltran3 1Department of Chemical Engineering, Mandalay Technological University, Myanmar2Department of Chemical Engineering, Tokyo Institute of Technology, Japan3 Chemical Engineering Department, De La Salle University, Philippines

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S4 Tribological and Protective Films and Coatings (1) Chairs: Jia-Hong Huang, Taiwan and Albano Cavaleiro, Portugal Room B 10:15-10:45 S4-IV01 Invited Hard Coatings for High Temperature Applications Albano Cavaleiro,F. Fernandes1,2, T. Danek3,4, and T. Polcar3,4,5 1SEG-CEMMPRE, University of Coimbra, 2LED&Mat - Instituto Pedro Nunes, Portugal,3FEL-CVUT,Czech Technical University, 4AdvaMat s.r.o. company, Czech Republic,5nCATS, University of Southampton, UK 10:45-11:00 S4-OR01 Wear Protection of Low Alloyed Steel by Plasma Boriding Peter Kaestner and G. Braeuer Institute for Surface Technology, IOT, Germany 11:00-11:30 S4-IV02 Invited Measurement of fracture toughness on TiN hard coatings using internal energy induced cracking method Jia-Hong Huang, An-Ni Wang, and Ge-Ping Yu Department of Engineering and System Science, National Tsing Hua University at Hsinchu, Taiwan 11:30-11:45 S4-OR02 Relationship between coating property and cutting performance of Al75Cr25N coating deposited by cathodic arc evaporation Hiroaki Niiand Kenji Yamamoto Kobe Steel Ltd., Japan 11:45-12:00 S4-OR03 Corrosion property evaluation of Fe-Zr- Nb thin films Yi-Jie Liao, Zhen-Yu Chen1, and Jyh-Wei Lee1,2,3,4 1Department of Materials Engineering, Ming Chi University of Technology, New Taipei City, Taiwan

S9 Plasma Biomedicine and Life Science (1) Chairs: Dheerawan, Thailand Room C 10:15-10:45 S9-IV01 Invited Coatings for biomedical applications: Needs and Challenges in orthopedics and surgical instruments Kerstin Thorwarth Empa, Switzerland 10:45-11:00 S9-OR01 Ozone and NOx Generation Control Mechanism in Array-type Dielectric Barrier Discharge at Atmospheric Pressure Sung-Young Yoon1, Changho Yi1, Sangheum Eom1, Seungil Park1, Seungmin Ryu1, Suk Jae Yoo1, and Seong Bong Kim1,* 1Plasma Technology Research Center of National Fusion Research Institute, Korea 11:00-11:15 S9-OR02 Anti bacterial property evaluation of boron contained ZrCuAlNi thin film metallic glasses Jhong-Bo Wang1, Yung-Chin Yang2, Bih-Show Lou3,and Jyh-Wei Lee 4, 5, 6 1Institute of Materials Science and Engineering, National Taipei University of Technology,2Department of Materials and Mineral Resources Engineering, National Taipei University of Technology,3Chemistry Division, Center of General Education, Chang Gung University, 4Department of Materials Engineering, Ming Chi University of Technology, 5Center for Thin Films Technologies and Applications, Ming Chi University of Technology, 6College of Engineering, Chang Gung University, Taiwan 11:15-11:30 S9-OR04

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Observation of intracellular-molecular changes in plasma-irradiated cells using multiplex coherent anti-Stokes Raman scattering microscopy T. Ohta1,*, R. Furuta2, N. Kurake2, K. Ishikawa2, K. Takeda1, H. Hashizume2, H. Kondo2, M. Ito1, and M. Hori2 1Department of electrical and electronic Engineering, Meijo University, 2Nagoya University, Japan 11:30-11:45 S9-OR05 Effect of Chondrocyte Cell on Pulse Magneton Carbon Thin Film Pongsawat Premphet1, Komgrit Leksakul1, Ratchadaporn Supruangnet2, Jin Xiang Piao3 and Su Bong Jin3 1Department of Industrial Engineering, Faculty of Engineering, Chiang Mai University,2Synchrotron Light, Chiang Mai University, Thailand, 3Center for Advanced Plasma Surface Technology, Sungkyunkwan University, Korea 12:00-13:00 Lunch

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Tuesday Afternoon, September 12, 2017 (Lotte Hotel Jeju)

13:00-13:50 Plenary Session (2) Chair: Jaroslav Vlcek, Czech Republic Lecture Room TBA On Recent Progress Using Infrared Absorption Techniques for Diagnostic and Control of Process Plasmas

Juergen Roepcke*, Stephan Hamann, Mario Hannemann, Norbert Lang, Andy Nave, and Jean-Pierre

van Helden,

Leibniz Institute for Plasma Science and Technology (INP), Germany

13:50-14:00 Coffee Break

Scientific and Technological Sessions and Topical Workshops

S1 Fundamental for Plasmas, Films and Coatings (2) Chairs: Nong Moon Hwang, Korea and Ján Lančok, Czech Republic Room A 14:00-14:30 S7-IV03 Invited Low Temperature Plasma Deposition Processes: From Amorphous Silicon to Nanowires and Epitaxial Growth Pere Rocai Cabarocas LPICM, CNRS – Ecole Polytechnique, France 14:30-14:45 S1-OR04 Improving of Mechanical Strength of Hydrophobic Coating on Glass Surfaces by Using Plasma Troch at Atmospheric Pressure Md. Mokter Hossain, Quang Hung Trinh, M.S.P. Shdhakaran, Lamia Sultana,and Young Sun Mok Department of Chemical and Biological Engineering, Jeju National University, Korea 14:45-15:15 S1-IV04 Invited Laser and magnetron hybrid deposition of nanostructured thin films Ján Lančok1*, Jiří Bulíř, Michal Novotný, Petr Pokorný and Jindřich Musil* 1Department of Analyses of Functional Materials, Institute of Physics of AS CR, Czech Republic 15:15-15:30 S1-OR05 Effects of Radio Frequency Power on the Atmospheric Pressure Plasma Chuan Li1,2*, J. H. Hsieh3, and C. T. Yu1 1Department of Biomedical Engineering, National Yang Ming University, Taiwan, 2Department of Mechanical Engineering, National Central University 15:30-15:45 S1-OR06 Energy dependent study on yttrium oxides thin film by magnetron sputtering Jinjiao Xia1, Wenping Liang1,*, Qiang Miao1 and Diederik Depla2 1Department of Materials Science and Engineering, Nanjing University of Aeronautics and Astronautics, China, 2Research Group DRAFT, Department of Solid State Sciences, Ghent University, Belgium 15:45-16:00 Coffee Break 16:00-16:30 S1-IV05 Invited Role of Charges in Thin Film Growth by Nanoparticles in PECVD Processes

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Nong-Moon Hwang Seoul National University, Korea 16:30-17:00 S1-IV06 Invited On the role of momentum and energy fluxes in plasma surface processing H. Kersten*, T. Trottenberg, A. Spethmann, F. Haase, S. Gauter, and T. Kewitz Institute for Experimental and Applied Physics, Kiel University, Germany 17:00-17:15 S1-OR07 Plasma assisted atomic layer deposition of nickel carbide films Qun Guo, Zhongwei Liu *, Zhengduo Wang, Lijun Sang, and Qiang Chen Laboratory of Plasma Physics and Materials, Beijing Institute of Graphic Communication, China 17:15-17:30 S1-OR08 Non-reactive sputter deposition of Mo- and W-oxide films from ceramic targets: Process conditions and thin film properties Hennrik Schmidt1,2,*, Judith Koestenbauer1

, Dominik Lorenz1, Harald Koestenbauer1, Enrico Franzke1, Julia Pachlhofer3, Robert Franz3, Christian Mitterer3, and Joerg Winkler1 1Plansee SE, Metallwerk-Plansee-Str. 71, Austria,2Plansee (Shanghai), China

S4 Tribological and Protective Films and Coatings (2) Chairs: Hiroyuki Kousaka, Japan and Holger Hoche, Germany Room B 14:00-14:30 S4-IV03 Invited Establishing PVD- Coatings for the Corrosion Protection of Mild Steel Substrates for Complex Tribological and Corrosive Stresses Holger Hoche, Casper Pusch, and Matthias Oechsner Center for Engineering Materials MPA-IfW, Technische Universität Darmstadt,Germany 14:30-14:45 S4-OR04 Functionalization of the DLC boundary surface due to wear mechanism in a dry sliding contact against aluminum Tim Abraham1,*, Svea Isensee2, Tom O’Donnell1, and Günter Bräuer1 1Fraunhofer-Institute for Surface Engineering and Thin Films,2Technical University Braunschweig, Institute for Surface Technology, Germany 14:45-15:00 S4-OR05 Structure formation of adaptive arc-PVD Ti-Al-Mo-N and Ti-Al-Mo-Ni-N coatings and their wear-resistance under various friction conditions V.S.Sergevnin1,*, I.V. Blinkov1, A.O. Volkhonskii1, and D.S. Belov1 1National University of Science and Technology MISiS, Russia 15:00-15:15 S4-OR06 Effect of target poisoning on the fabrication of TiN coatings using a superimposed HiPIMS and MF deposition system Yu-Wen Su1, Chi-Yu Lu1, and Jyh-Wei Lee1, 2, 3 Ming Chi University of Technology, Taiwan 15:15-15:30 S4-OR07 Influence of Tetrahedral Amorphous Carbon (ta-C) Top-coating on Mechanical Properties of CrZrN Coating HoeKun Kim1, JoungHyun La1, SangYul Lee1,*, JongKuk Kim2 and JunHee Hahn3 1Center for Surface Technology and Applications, Department of Materials Engineering,Korea Aerospace University,2Surface Engineering Department, Implementation Research Division, Korea Institute of Materials Science (KIMS),3Center for energy Materials Metrology, Division of Industrial Metrology, Korea Research Institute of Standard Science, Korea 15:30-15:45 S4-OR08 Fabrication of chromium carbide thin films through the high power impulse magnetron

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sputtering Zheng-Long Li1, Chaur-Jeng Wang1, Jyh-Wei Lee 2,3,4, and Wahyu Diyatmika2 1Department of Mechanical Engineering, National Taiwan University of Science and Technology,2Department of Materials Engineering, Ming Chi University of Technology, 3Center for Thin Films Technologies and Applications, Ming Chi University of Technology, 4College of Engineering, Chang Gung University, Taiwan 15:45-16:00 Coffee Break 16:00-16:30 S4-IV04 Invited Microwave-assisted ultra-high-speed coating of DLC for 1-by-1 coating (abstract not submitted) H. Kousaka Gifu University, Japan 16:30-16:45 S4-OR09 Mechanical property evaluation of Zr-Si-N films deposited by high power pulsed magnetron sputtering Qi-Lin Tang1, Yu-Chuan Wu2, and Jyh-Wei Lee3, 4, 5 1Institute of Materials Science and Engineering, 2Department of Materials and Mineral Resources Engineering, National Taipei University of Technology, 3Department of Materials Engineering, 4Center for Thin Films Technologies and Applications, Ming Chi University of Technology, 5College of Engineering, Chang Gung University, Taiwan 16:45-17:00 S4-OR10 High resolution investigation of the friction of diamond against diamond Thomas Chudoba1,* and Björn Matthey2 1ASMEC GmbH, 2Fraunhofer IKTS, Dresden, Germany 17:00-17:15 S4-OR11 Effect of Gradient Mg Content on Formability of Zn-Mg Coated Steels Myeon-Kyu Song1, Joung-Hyun La1, Sang-Yul Lee1,*, Woo-Sung Jung2, and Jun-Hee Hahn3 1Center for Surface Technology and Applications, Korea Aerospace University, 2POSCO, Korea

S9 Plasma Biomedicine and Life Science (2) Chairs: Kerstin Thorwarth, Switzerland and Fabio Palumbo, Italy Room C 14:00-14:30 S9-IV02 Invited Aerosol assisted plasma deposition of drug containing polymer films Fabio Palumbo Institute of NanoTechnologies, CNR NANOTEC, Italy 14:30-14:45 S9-OR06 Oxygen radical treatment of Aspergillus flavus spores Yuta Tanaka1,*, Jun-Seok Oh1, Hiroshi Hashizume2, Masashi Kato3, Masaru Hori2, and Masafumi Ito1

1Faculty of Science and Technology, Meijo University, 2Institute of Innovation for Future Society, Nagoya University, 3Faculty of Agriculture, Meijo University, Japan

14:45-15:00 S9-OR07 Plasma Chemistry Model for Surface Microdischarge in Flowing Humid Air with Heat Deposition and Transfer Changho Yi1, Sung Young Yoon1, Seungil Park1, Seungmin Ryu1, Suk Jae Yoo1, and Seong Bong Kim1 1Plasma Technology Research Center, National Fusion Research Institute, Korea 15:00-15:15 S9-OR08 In-situ observation of molecular diffusion of supported lipid bilayer irradiated oxygen radicals Taisei Kondo1,*, Jun-Soek Oh1, Ryugo Tero2, Hiroshi Hashizume3, Hiroki Kondo3, Masaru Hori3,and Masafumi Ito1 1Fuculty of Science and Technology, Meijo University, 2Department of Environmental and Life

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Sciences, Toyohashi University of Technology, 3Institute of Innovation for Future Society, Nagoya University, Japan 15:15-15:30 S9-OR09 Porous-TaN/TaN/TaN-Ag multi-layered thin films for improved biocompatibility and antibacterial behaviors Chung-Chieh Hsu Ming Chi University Of Technology, Taiwan 15:30-15:45 S9-OR10 Characterization of atmospheric pressure plasma generated with Ar/He and Ar/He/H2O gas mixtures in a jet system Y. Z. Yang1,2, Y.J, Liu1,2,, and J. H. Hsieh1,2,* 1Dept. of Materials Engineering, Ming Chi University of Technology, 2Center for Thin Film Technologies and Applications, Ming Chi University of Technology, Taiwan 15:45-16:00 Coffee Break 16:00-16:30 S9-IV03 Invited Synthesis of Multi-functional Surfaces and Coatings Inspired from Carnivorous Pitcher Plants and Feathers Po-Yu Chen1,*, Wei-Chen Hung1, Zheng-Jun Shih1, Yu-Min Lin1, Ching-Yu Yang1, Shang-I Chuang1, Chang Liu1, and Jenq-Gong Duh1 1National Tsing Hua University, Taiwan 16:30-16:45 S9-OR11 Portable Cold Air Plasma Jet for Biomedical Applications Phuthidhorn Thana1, Apiwat Wijaikhum2, Pipath Poramapijitwat2, Sureeporn Sarapirom2, Athipong Ngamjarurojana1, and Dheerawan Boonyawan1 1Physics and Material Science, Chiang Mai University, 2Physics and Materials, Chiang Mai University, Thailand 16:45-17:15S9-IV04 Invited Analyses of cellular responses to Plasma-activated medium (PAM) and plasma-activated Ringer’s lactate solution (PAL) Hiromasa Tanaka1,* Masaaki Mizuno1, Kenji Ishikawa1, Keigo Takeda2, Hiroshi Hashizume1, Kae Nakamura1, Hiroaki Kajiyama1, Yasumasa Okazaki1, Shinya Toyokuni1, Fumitaka Kikkawa1, and Masaru Hori1 1Nagoya University, 2Meijo University, Japan 17:15-17:30S9-OR12 Effect of atmospheric pressure plasma jet on mitochondria Hyo-Chang Lee1,*,Min-Kyung Nam2,Young Joon Hong3,Ja-Young Jang4,Eun Ha Choi3,Chin-Wook Chung5,Seongho Jeon6,Jong-Man Kim6,Seongman Kang4, and Hyangshuk Rhim2 1Center for Vacuum Technology, Korea Research Institute of Standard and Science, 2Department of Biomedicine and Health Sciences, Department of Medical Life Sciences, College of Medicine, the Catholic University of Korea, 3Plasma Bioscience Research Center, Kwangwoon University,4Division of Life Sciences, College of Life Sciences and Biotechnology, Korea University, 5Department of Electrical Engineering,6Department of Chemical Engineering, Hanyang University, Korea

T3 Topical Workshop for Advanced Surface Engineering by Dry and Wet Processes Chairs: Christopher E.JCordonier, Japan and Sungmo Moon, Korea Room D 14:00-14:30 T3-IV01 Invited Plasma Electrolytic Technology for Surface Finishing of Metals in Liquid Electrolytes Sungmo Moon1,2,* 1Surface Technology Division, Korea Institute of Materials Science, Korea,2Advanced Materials Engineering, Korea University of Science and Technology, Korea

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14:30-15:00 T3-IV02 Invited A Novel Electromagnetic Wave Transmission Metal Coating "ELTRA" Using Wet and Dry Processes Ken Mishina1*, Naoki Takahashi2, Naoki Yoshioka1, Hiroyuki Ueyama2, Keiko Kitamura3, Yuzo Ono3 and Mitsuhiro Watanabe4 1Shimadzu Corporation, 2JCU CORPORATION,3Kimoto Co., Ltd., 4Materials and Surface Engineering Research Institute, Kanto Gakuin University, Japan 15:00-15:30 T3-IV03 Invited Enhancement of Heat Dissipation Characteristics via Plasma Electrolytic Oxidation on Al6061 Alloy Bongyoung Yoo1,*, Jung Woo Choi1, and Dong Hyuk Shin1 1Department of Materials Science and Engineering, Hanyang University, Ansan, Korea 15:30-16:00 T3-IV04 Invited Additive Plating Technology on Resin Surface by UV Reformation Hideki Kimura1*, Atsushi Kosuge1, Yousuke Iimori1, Mitsuhiro Watanabe2, Hideo Honma2 1Koto Electric Co., Ltd. 2Kanto Gakuin University, Japan 16:00-16:15 Coffee Break 16:15-16:45 T3-IV05 Invited Fabrication of Various Nanostructures and Functionalization on Polymer Surface using Linear Ion Beam Source Dokeun Kim Korea Institute of Materials & Science, Korea 16:45-17:15 T3-IV06 Invited Metallization of Glass Substrates via Solution Deposition and Plating Methods Christopher E.J. Cordonier, Kyohei Okabe, Takahiro Kagami, Yoshio Horiuchi, Yohei Suzuki and Hideo Honma Materials & Surface Engineering Research Institute, Kanto Gakuin University, Japan 17:15-17:45 T3-IV07 Invited Numerical Modeling of Plasma in a Finite Electrical Conductive Medium Junghoon Joo Department of Materials Science and Engineering, Kunsan National University, Korea 17:45-18:15 T3-IV08 Invited Flash Lamp Annealing Method for Electroless-plated Film on Resin Substrates Joo-Hyong Noh Kanto Gakuin University, Japan 18:00-19:00 AJC-EJC Joint Meeting Meeting Room TBA 19:00-21:00 Plenary/Invited Speaker Dinner Location TBA

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Wednesday Morning, September 13, 2017 (Lotte Hotel Jeju)

08:30-18:00 Registration Registration desk 09:00-09:50Plenary Session (3) Chair: Gunter Brauer, Germany Hall Room TBA Triboelectric Nanogenerators for Self-powered Systems and Large-scale Blue Energy Zhong-Lin Wang Georgia Institute of Technology, USA 09:50-10:00 Coffee Break

Scientific and Technological Sessions and Topical Workshops

S2 Plasma and Ion Sources, Processes (1) Chairs: Kazunori Koga, Japan and Fu-Hsing Lu, Taiwan Room A 10:00-10:30 S2-IV01 Invited Dynamics of Processes During the Deposition of Oxide Films by Reactive High-power Impulse Magnetron Sputtering - A Modelling Study Tomas Kozak and Jaroslav Vlcek University of West Bohemia, Czech Republic 10:30-11:00 S2-IV02 Invited Hysteresis in Plasma CVD: a new path for high quality film deposition Kazunori Koga Kyushu University, Japan 11:00-11:30 S2-IV03 Invited Air-based Sputtering Deposition of Titanium Oxynitride Thin Films Fu-Hsing Lu National Chung Hsing University, Taiwan 11:30-12:00 S2-IV04 Invited Measurements of reactive species and VUV radiators generated by AC excited atmospheric pressure Ar plasma jet in open air Keigo Takeda Meijo university, Japan

S4 Tribological and Protective Films and Coatings (3) Chairs: Jyh-Wei Lee, Taiwan and Jolanta Klember-Sapieha, Canada Room B 10:00-10:30 S4-IV05 Invited Solid Solution Hardening of Reactively Sputtered Nanolaminated ZrN-TiN Coatings Erika Herrera1, Avi Raveh2, Zbigniew Rożek3, Ludvik Martinu1, and J.E. Klemberg-Sapieha1 Polytechnique Montreal, Canada

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10:30-10:45 S4-OR13 Improvement of CrMoN/ SiNx Coatings on Mechanical and High Temperature Tribological Properties by Multilayered Architecture Design Li-Kai Yeh-Liu1, Hsien-Wei Chen1, and Jenq-Gong Duh*1

1Department of Materials Science and Engineering, National Tsing-Hua University, Taiwan 10:45-11:00 S4-OR14 Dependence of process parameters, edge quality and edge-related effects during Arc-PVD deposition process Tim Kruelle, Otmar Zimmer,and Christoph Leyens University of Technology Dresden (TU Dresden), Fraunhofer Institute of Materials and Beam Technology Dresden (Fh-IWS), Germany 11:00-11:30 S4-IV06 Invited Hard coatings and the industrial applications (abstract not submitted) A. Cavaleiro1,2, F. Fernandes1,2, T. Danek3,4, and T. Polcar3,4,5 1SEG-CEMMPRE – University of Coimbra, 2LED&Mat – Instituto Pedro Nunes, Portugal,3FEL-CVUT - Czech Technical University, 4AdvaMat s.r.o. company, Czech Republic,5nCATS - University of Southampton, UK 11:30-11:45 S4-OR15 Newly-developed CrAlMoSiN Nanocomposite Coating for Enhanced High-temperature Tribological Properties Heng Tao1, Hsien-Wei Chen1, and Jenq-Gong Duh1* National Tsing Hua University, Taiwan. 11:45-12:00 S4-OR16 Atomic layer deposition for corrosion protection of steel: durable protection by hybrid PVD/ALD coatings Jarmo Leppäniemi1,*, Perttu Sippola2, and Jari Koskinen1 1Aalto University School of Chemical Engineering, 2Aalto University School of Electrical Engineering, Finland

SA Student Award Session Chair: Eun Ha Choi, Korea Room C 10:00-10:10 SA-OR01 Energy dependent study on yttrium oxides thin film by magnetron sputtering Jinjiao Xia, Wenping Liang1,*, Qiang Miao1 and Diederik Depla2 1Department of Materials Science and Engineering, Nanjing University of Aeronautics and Astronautics, China, 2Research Group DRAFT, Department of Solid State Sciences, Ghent University, Belgium 10:10-10:20 SA-OR02 Fabrication of carbon thin films for highly conductivity and bio application by control of crystalline-orientation and surface chemistry Su B. Jin1.*, Piao Jinxiang, B.B. Sahu, and Jeon G. Han 1Korea NU-SKKU Joint Institute for Plasma Nano Materials (IPNM), Center for Advanced Plasma Surface Technology (CAPST), Department of Advanced Materials Science and Engineering, Sungkyunkwan University, Korea 10:20-10:30 SA-OR03 Structure formation of adaptive arc-PVD Ti-Al-Mo-N and Ti-Al-Mo-Ni-N coatings and their wear-resistance under various friction conditions V.S.Sergevnin1,*, I.V. Blinkov1, A.O. Volkhonskii1, and D.S. Belov1 1National University of Science and Technology MISiS, Russia 10:30-10:40 SA-OR04

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Characterisation of nanoparticle growth in a CCRF plasma by Langmuir probe measurements and particle extraction E. von Wahl1,*, Y.A. Ussenov2, Z. Marvi1, T.S. Ramazanov3, and H. Kersten1 1Institute of Experimental and Applied Physics, CAU Kiel, Germany, 2National Nanotechnology Laboratory of Open type, Al-Farabi KazNU Almaty, 3Institute of Experimental and Theoretical Physics, Al-Farabi KazNU Almaty, Kazakhstan 10:50-11:00 SA-OR05 Catalytic enhancement on polymer counter electrodes of dye-sensitized solar cells by iso-octylphenoxy-polyethoxyethanol addition Hakutatsu Chou1, Daisuke Sakamoto1, Daisuke Yamashita1, Hyunwoong Seo1, Naho Itagaki1, Kazunori Koga1, and Masaharu Shiratani1 1Kyushu University, Japan 11:00-11:10 SA-OR06 The Comparison of Plasma Activated Water Techniques for Bacteria Inactivation Tanitta Royintarat1,Dheerawan Boonyawan2, Phisit Seesuriyachan3 and Wassanai Wattanutchariya4,*

1,4Advanced Manufacturing Technology Research Center (AMTech), Department of Industrial Engineering, Faculty of Engineering, 2Department of Physics and Material, Faculty of Science, 3Faculty of Agro-Industry, Chiang Mai University, Thailand

11:10-11:20 SA-OR07 In-situ observation of molecular diffusion of supported lipid bilayer irradiated oxygen radicals Taisei Kondo1,*, Jun-Soek Oh1, Ryugo Tero2, Hiroshi Hashizume3, Hiroki Kondo3, Masaru Hori3,and Masafumi Ito1 1Fuculty of Science and Technology, Meijo University, 2Department of Environmental and Life Sciences, Toyohashi University of Technology, 3Institute of Innovation for Future Society, Nagoya University, Japan 11:20-11:30 SA-OR08 Improvement of CrMoN/ SiNx Coatings on Mechanical and High Temperature Tribological Properties by Multilayered Architecture Design Li-Kai Yeh-Liu1, Hsien-Wei Chen1, and Jenq-Gong Duh*1

1Department of Materials Science and Engineering, National Tsing-Hua University, Taiwan 11:30-12:00 Committee Discussion

T4 Topical Workshop for Plasma Farming (1) Chairs: Suk Jae Yoo, Korea Room D 10:00-10:30 T4-IV01 Invited Design and Development of Compact High-Voltage Pulsed Power Plasma Devices for Agriculture and Aquaculture Applications Koichi Takaki Iwate University, Japan. 10:30-11:00 T4-IV02 Invited R&D status and issues of plasma farming in plasma technology research center, NFRI Seong Bong Kim, Seungmin Ryu1, Jaesung Oh1, and Suk Jae Yoo1, Plasma Technology Research Center, NFRI, Korea 11:00-11:30 T4-IV03 Invited Applications of plasma technology in agriculture and food security: Thailand case study Komgrit Leksakul Faculty of Industrial Engineering, Chiangmai University, Thailand 11:30-12:00 T4-IV04 Invited Application of non-thermal plasma to agriculture: now and future

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Young-Ki Jo Department of Plant Pathology & Microbiology, Texas A&M University, USA 12:00-13:00 Lunch

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Wednesday Afternoon, September 13, 2017 (Lotte Hotel Jeju)

13:00-13:50 Plenary Session (4) Chair: Jenq Gong Duh Hall Room TBA Energetic Process for Optical Interference Coatings from DUV to NIR by Using Plasma Technology Cheng-Chung Lee National Central University, Taiwan 13:50-14:00 Coffee Break

Scientific and Technological Sessions and Topical Workshops

S2 Plasma and Ion Sources, Processes (2) Chairs: Dang Mau Chien, Vietnam and Miran Mozetic, Slovenia Room A 14:00-14:30 S2-IV05 Invited Neutral Reactive Gaseous Species in Reactors Suitable for Plasma Surface Engineering Gregor Primc1,2 and Miran Mozetic1,* 1Jozef Stefan Institute, 2Plasmadis Ltd, Slovenia 14:30-15:00 S2-IV06 Invited Advanced ICP-Enhanced Plasma Systems for Meters-Scale Large-Area Processes Akinori Ebe1, Kazuaki Nishisaka1, Kazuto Okazaki2, Atsushi Osawa2, Kosuke Takenaka3, and Yuichi Setsuhara3 1EMD Corporation,2SCREEN Finetech Solutions Co., Ltd.,3Joining and Welding Research Institute, Osaka University, Japan 15:00-15:15 S2-OR02 A handheld mobile multi-frequency plasma source for disinfection applications Anirut Chaijaruwanich and Ho Khoi Nguyen Department of Industrial Engineering, Chiang Mai University, Thailand 15:15-15:45 S2-IV07 Invited Effect of Inert Gases in Rapid Thermal Annealing Process to Create Gold Nanoparticles Dang Mau Chien Vietnam National University, Vietnam 15:45-16:15 S2-IV08 Invited Micoplasma in close proximity to liquid and its applications in engineering of nanostructures Xiao-Xia Zhong State Key Laboratory of Advanced Optical Communication, Systems and Networks, Key Laboratory for Laser Plasmas (Ministry of Education), Department of Physics and Astronomy, Shanghai Jiao Tong University, China 16:15-16:30 S2-OR03 Experimental Investigation of Generation DC Discharge Plasma in Air Micro-bubbles Water Mixture. Chanchai Dechthummarong1, 1Electrical Engineering Department, Faculty of Engineering, Rajamangala University of Technology Lanna, Chiang Mai, Thailand

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16:30-16:45 S2-OR04 Pulsed Plasma Ion Source for the Incorporation of Nitrogen into Zinc Oxide Layer Seong Ling Yap1,*, Siew Kien Ngoi1, Chang Fu, Dee2, Hun Seng Poh1, Reeson Kek1, Eng Liang Lim2, Chi Chin Yap2, and Seong Shan Yap3 1Plasma Technology Research Centre, Department of Physics, Faculty of Science, University of Malaysia, 2Institute of Microengineering and Nanoelectronics (IMEN), University Kebangsaan Malaysia (UKM), 3Faculty of Engineering, Multimedia University, Malaysia 16:45-17:00 S2-OR05 Study on the Transition Behavior of High Current Vacuum Arc Plasma under Transverse Magnetic Field (TMF) Shixin Xiu, Dingyu Feng*, Ting Wang, Zixi Liu, and Junfei Yang Xi’an Jiaotong University, China 17:00-17:15 S2-OR06 Silicon nitride cover layer prepared by silane-free plasma chemical vapor deposition for high quality surface passivation of silicon solar cells Hsin-Yu Wu1, Chia-Hsun Hsu2, Ting-Xuan Liu3, Yun-Shao Cho2, Yu-Chih Ou3, Shui-Yang Lien2,* and Yeu-Long Jiang1 1Department of Electrical Engineering, National Chung Hsing University, 2Department of Materials Science and Engineering, Da-Yeh University, 3Department of Electrical Engineering, Da-Yeh University, Taiwan

S11 Industrial Technology and New Applications Chairs: Subroto Mukherejee, India and Ronghua Wei, USA Room B 14:00-14:30 S11-IV01 Invited Status of Funding of Materials Research in Germany Ralf Fellenberg VDI Technologiezentrum GmbH, Germany. 14:30-14:45 S11-OR01 Ablation aspects of Silver Nanoparticle Film Laser Scanning Ablation Using Nanosecond Pulsed Laser Hee Lak Lee1,2, Yoon-Jae Moon1,2, Jun-Young Hwang2, and Seung-Jae Moon1 1Department of Mechanical Engineering, Hanyang University, 2Korea Institute of Industrial Technology, Korea 14:45-15:00 S11-OR02 Fabrication of Nickel Oxide by Parallel-Serial Electrode Configurations in Liquid-Phase Pulsed Discharge Plasma Jason Hsiao Chun Yang1, Hong-Jie Chen2, Shinn-Dar Wu3 and Chao-Chen Yang2 1Feng Chia University, 2National Yunlin University of Science and Technology,3Ming Dao University, Taiwan 15:00-15:30 S11-IV03 Invited Large-scaled Plasma Immersion Ion Deposition (PIID) of Diamond-like Carbon (DLC) Coatings for Industrial Applications Ronghua Wei

Southwest Research Institute, USA 15:30-16:00 S11-IV04 Invited Environment Friendly Plasma Surface Engineering - Developments at Institute for Plasma Research in India Subroto Mukherjee and FCIPT Team Institute for Plasma Research, India 16:00-16:15 S11-OR03 High Rate Deposition of Protective Coatings with a Microwave Plasma Source

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Stefan Merli1*, Andreas Schulz1, Matthias Walker1, Ulrich Stroth2, and Thomas Hirth3 1Plasma Technology, IGVP, University of Stuttgart, Germany 16:15-16-30 S11-OR05 Plasma Treated Thermoplastic for 3D-Composites Petr Špatenka*, Vojtěch Nováček, Taťána Vacková, and Zdenka Jeníková Czech Technical University, Czech Republic

T1 Topical Workshop for Recent Progress and Industrial Application of HiPIMS Chairs: Wojciech Gajewski, Poland and A. P. Ehiasarian, United Kingdom Room C 14:00-14:45 T1-IV01 Invited Advances in the development of application tailored coatings by HIPIMS G. Brauer and A. P. Ehiasarian Joint Fraunhofer- Sheffield Hallam University, HIPIMS Technology Centre, UK 14:45-15:15 T1-IV02 Invited HIPIMS Coatings Enable Electronics from Flexible to Stretchable Ju-Liang He Feng Chia University, Taiwan 15:15-15:45 T1-IV03 Invited Carbon coatings deposited by HIPIMS technology Dave Doerwald1, Ruud Jacobs1, Roel Tietema1, Arutiun P. Ehiasarian2, and Papken Eh. Hovsepian2 1IHI Hauzer Techno Coating B.V., 2Sheffield Hallam University 15:45-16:15 T1-IV04 Invited Deposition of hard coatings by a superimposed high power impulse and mid-frequency magnetron sputtering system Jyh-Wei Lee Ming Chi University of Technology, Taiwan 16:15-16:30 Coffee Break 16:30-17:00 T1-IV05 Invited High-rate reactive HiPIMS deposition of stoichiometric oxides and oxynitrides with tunable composition Jaroslav Vlcek University of West Bohemia, Czech Republic 17:00-17:30 T1-IV06 Invited Fabrication of Mo microcones for vacuum electron emitters using HPPMS Takeo Nakano1, Kei Oya1, Masayoshi Nagao2, Hisashi Ohsaki2

1Department of Materials and Life Science, Seikei University, 2National Institute of Advanced Industrial Science and Technology (AIST), Japan 17:30-18:00 T1-IV07 Invited High Power Impulse Plasma Magnetron Sputtering: Review of Critical Parameters Ensuring Successful Industrialization Wojciech Gajewski, Piotr Różański, Paweł Lesiuk, and Paweł Ozimek TRUMPF Huettinger, Poland 18:00-18:30 T1-IV08 Invited HiPIMS with 2 µm/hour Deposition Rate – The Trend in Coatings for Premium Cutting Tools T. Leyendecker and A. Marxer CemeCon, Germany.

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T4 Topical Workshop for Plasma Farming (2) Chairs: Won Ho Choe, Korea Room D 14:00-14:30 T4-IV05 Invited Bioactive red perilla leaf extract manufactured by atmospheric pressure plasma Cheorun Jo Seoul National University, Korea 14:30-15:00 T4-IV06 Invited Plasma treatment of seeds - an alternative to chemical dressing Petr Špatenka Czech Technical University, Czech Republic 15:00-15:30 T4-IV07 Invited Characteristics of atmospheric-pressure plasma jet in a humid ambient air Se Youn Moon Chunbuk National University, Korea 15:30-16:00 T4-IV08 Invited Application of surface barrier discharge for ozone treatment of soil in agriculture Fumiaki Mitsugi Kumamoto University, Japan 16:00-16:30 T4-IV09 Invited Oxidation process of organic molecules in air plasma-activated water Zhihua Qi, Xueyang Wang, Yao Zhao, Ying Song, Dongping Liu* School of Physics and Materials Engineering, Dalian Nationalities University, China 16:45-18:30Poster Session (1) Exhibition Room TBA 18:30-19:00 Break and Transportation 19:00-21:00 Global Network Evening Place:Roof Top Garden ofHidden Cliff Hotel and Nature

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Wednesday Afternoon, September 13, 2017 (Lotte Hotel Jeju)

Poster Session

16:45-18:30 Poster Session (1) Exhibition Room TBA

S1 Fundamentals for Plasmas, Films and Coatings S1-PO01 Calorimetric measurements on a high voltage pulsed substrate (PBII) in a HiPIMS process S. Gauter1, M. Fröhlich2, M. Polak2 and H. Kersten1 1Institute of Experimental and Applied Physics, CAU Kiel, Germany, 2Leibniz Institute for Plasma Science and Technology, Greifswald

S1-PO02 Effect of post annealing on electrochromic properties of New layer-by-layer electrochromic distinct arrangements (WO3+Ag+Au) Siamak Hosseinzadeh1, Ramin Ghasemiasl2, Ali Bahari3, and Amir Houshang Ramezani4 1Department of Mechanical Engineering, Islamic Azad University, West Tehran Branch, 4Department of Physics, West Tehran Branch, Iran

S1-PO03 Structural, Optical and Electronic Properties of Mn doped Zinc Oxide thin films Manish Kumar1,* and H. H. Lee Pohang Accelerator Laboratory, POSTECH, Korea S1-PO05 Weakening of Bond Strength by Charge Jeong Woo Yang1,*, Jong Hwan Park1, Hee Chae Choi2, Byung Deok Yu3, Kwang-Ryeol Lee2 and Nong Moon Hwang1 1Department of Materials Science and Engineering, Seoul National University,2Computational Science Center, Korea Institute of Science and Technology, 3Department of Physics, University of Seoul, Korea S1-PO06 Antibacterial Silver-Copper Coatings Deposited using Asymmetric Bipolar High Power Impulse Magnetron Sputtering Technique Yu-Hsuan Hsu and Wan-Yu Wu* Materials Science and Engineering, Da-Yeh University Taiwan, Taiwan S1-PO07 The Growth of Organic-Inorganic Hybrid Perovskite Thin Film Using Automatically Co-Solvent Evaporation Jia-Yi Wang1, Hao-Yu Chen2, Chih-Chien Chu2 and Vincent K. S. Hsiao1 1Department of Applied Materials and Optoelectronic Engineering, National Chi Nan University, 2School of Applied Chemistry, Chung Shan Medical University, Taiwan S1-PO08 Taguchi Design of Experiment Method and Its Application on Process Optimization of Zr-Cu-Ni-Al-N TFMG Coating in Pursuit of Enhanced Mechanical Properties Joseph Lee, Hsien-Wei Chen, and Jenq-Gong Duh Department of Materials Science and Engineering, National Tsing-Hua University, Taiwan S1-PO09 Fabrication of carbon thin films for highly conductivity and bio application by control of

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crystalline-orientation and surface chemistry Su B. Jin1.*, Piao Jinxiang, B.B. Sahu, and Jeon G. Han 1Korea NU-SKKU Joint Institute for Plasma Nano Materials (IPNM), Center for Advanced Plasma Surface Technology (CAPST), Department of Advanced Materials Science and Engineering, Sungkyunkwan University, Korea S1-PO10 Synthesis of TFMG from Single Target with high GFA Hae Won Yoon1, Gyung Bae Bang1, Han Chan Lee1, and Kyoung Il Moon1† 1Heat Treatment Technology R&BD Group, Korea Institute of Industrial Technology, Korea S1-PO11 Oriented Si3N4 crystallites formed by plasma nitriding of SiO2/Si (111) substrate Chang Hua Yu*, Lin Lung Wei, Kun An Chiu, and Li Chang* Department of Materials Science and Engineering, National Chiao Tung University, Taiwan S1-PO12 Development of Transparent Conductive Material for a high thermal reliability Hye Su Kang, Chan-Hwa Hong, Jeong-Jin Park, Chang-Ho Lee, Joon-Min Lee and Woo-Seok Cheong Electronics and Telecommunications Research Institute, Korea S1-PO13 Fatigue Characteristics of Austenitic Stainless Steel Treated by Active Screen Plasma Nitriding Yasuhiro Hoshiyama1,*, Rei Takatera2 and Hidekazu Miyake1 1Department of Chemistry and Materials Engineering, Kansai University, Japan Graduate School of Science and Engineering, Japan S1-PO14 Narrow gap RF magnetron sputtering deposition of gallium doped ZnO thin films Yoshinobu Matsuda1, Naoki Matsuo1, Kohei Sakamoto1, Masanori Shinohara2, Tomohiro Furusato1, and Takahiko Yamashita1 1Graduate School of Engineering, Nagasaki University, 2Sasebo National College of Technology, Japan S1-PO15 Thin film transistor based on plasma-polymerized gate dielectrics Hyeon Jin Seo1, Ki-Hwan Hwang1,2, Jung-Hoon Yu1, Dong In Kim1, Ji Won Lee1,2, Hyeeun Yang1, Rak Hyun Jeong1,2, Antony Ananth1, Sang-Hun Nam1,2 and Jin-Hyo Boo1,2,* 1Sungkyunkwan University, 1,2,Department of Chemistry, Sungkyunkwan University, Korea S1-PO16 O2 Plasma Treated Substrate With Enhanced Surface Bastian Waduge Naveen Harindu Hemasiri, Jae-Kwan Kim, and Ji-Myon Lee Sunchon National University, Korea S1-PO17 Plasma Induced Dewetting Behavior Soon-Won Park1*, Nong-Moon Hwang1 Department of Materials Science and Engineering, Seoul National University, Korea

S1-PO18 Diamond-like Amorphous Carbon Layer Films Deposited by Inductively Coupled Plasma System for the Hard Mask of the High Aspect Ratio Contact Hole Se Jun Park1, Dohyung Kim2, Seungmoo Lee3, Yongjun Ha4, Mingyoo Lim5andKangsoo Kim6 Memory Thin Film Technology Team. Giheung Hwaseong Complex, Samsung Electronics, Korea

S1-PO19 Electric wind driven by the electrohydrodynamic force in a weakly ionized atmospheric-pressure plasma jet

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Sanghoo Park and Wonho Choe KoreaAdvanced Institute of Science and Technology, Korea S2 Plasma and Ion Sources, Processes S2-PO01 Titanium Oxide Coatings Deposition via Atmospheric Pressure RF-Plasma Enhanced CVD Rodolphe Mauchauffé1, Seongchan Kang1, and Se Youn Moon1,2* Chonbuk National University, Korea S2-PO03 A Plasma Sprayed Indium Zinc Oxide Coating on PET Applications Tanapoj Chaikeeree1, Nat Kasayapanand1, Mati Hororathum2, Pakpoom Chansri3, and Narong Mungkung3 1Division of Energy Technology, School of Energy, King’s Mongkut University of Technology Thonburi, Thailand S2-PO04 DC and Pulsed Discharge Characteristics of Magnetron Sputtering with Gas-Feeding from the Center of aSputter Target Kingo Azuma1,*, Kuniaki Miyoshi1, Yoshihiro Oka1, Shin-ichi Honda1 and Takashi Kimura2 1University of Hyogo, Japan, 2Nagoya Institute of Technology, Japan S2-PO05 Experimental study of standing surface wave occurred in atmospheric-pressure microwave plasma discharge column Shou-Zhe Li1,2 and Chuan-Jie Chen1,2 1Key Laboratory of Materials Modification by Laser, Ion, Electron Beams, 2School of Physics, Dalian University of Technology, China S2-PO06 Development of an atmospheric pressure very-high-frequency plasma jet Giichiro Uchida, Taiki Ito, Kosuke Takenaka, Jun-ichiro Ikeda, and Yuichi Setsuhara Osaka University, Japan S2-PO07 Improvement of wafer uniformity through RF phase difference optimization of semiconductor plasma equipment Joonghyun Jeon1, Sejin Oh1, Hyunju Lee1, Dougyong Sung2 and Taekyun Kang1 1Samsung Electronics, Korea S2-PO08 Dense Plasma Focus Based Deutron Beam Source Seong Ling Yap1,*, Lian Kuang Lim1, Ming Chuan Lee and Seong Shan Yap2 1Plasma Technology Research Centre, Department of Physics, Faculty of Science, University of Malaya, Malaysia S2-PO09 Oxygen Negative Ion Flux Evaluation in DC and DC-VHF Magnetron Plasmas through Directional Heat Flux Measurement Hirotaka Toyoda*, Kou Udagawa, Haruka Suzuki, Taku Suyama and Hansin Bae *Department of Electronics, Nagoya University, Japan S2-PO10 A study on the characteristics of hollow cathode discharge for the development of VUV lamp Deoggyun Cho1 , Duksun Han1 and Se Youn Moon1,2,* 1Department of Applied Plasma Engineering, 2Department of Quantum System Engineering, Chonbuk National University, Korea

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S4 Tribological and Protective Films and Coatings S4-PO01 Preparation and In-situ Nanoscopic Plastic Deformation of Al-Cu-Fe-based Quasicrystal/V Multilayered Coatings Shou-Yi Chang1, Bo-Jien Chen1, Ding-Shiang Wang2, Tai-Sheng Chen2, and Hong-Jen Lai2 1Department of Materials Science and Engineering, National Tsing Hua University, 2Material and Chemical Research Laboratories, Industrial Technology Research Institute, Taiwan S4-PO02 Exploration of High Temperature Tribological Characteristics of CrMoSiN Nanocomposite via Silicon doping Yu-Chu Lu, Li-Kai Ye-Liu, and Jenq-Gong Duh National Tsing Hua University, Material Science Engineering, Taiwan S4-PO03 Low Temperature Plasma Nitriding of 2205 Duplex Stainless Steel by Carbon Addition Insup Lee and Hojun Kim Dongeui University, Advanced Materials Enginnering, Korea S4-PO04 Optimization of Ti-based coating layer with various deposition time by Physical Vapor Deposition Young Hoon Lee Sejong University, Korea S4-PO05 Evaluation on of microstructure and mechanical properties multicomponent film by DC magnetron sputtering Young Seok Kim Sejong University, Korea S4-PO06 The effects of Al2O3 additive on the Manganese Phosphating of carbon steel Young Tai Noh KCL Inc., Korea S4-PO07 Cavitation Erosion Characteristics of Electroless Ni-P Plating after Heat Treatment Il-Cho Park Mokpo Maritime University, Korea S4-PO08 Structural-phase formations of arc-PVD coatings Tin coatings Aleksei Chernogor NUST MISiS, Russian Federation S4-PO09 In-situ Combination of Plasma Nitriding and Nitrocarburizing Treatment of AISI630 Martensitic Precipitation Hardening Stainless Steel Insup Lee Dongeui University, Advanced Materials Engineering, Korea S4-PO10 Solid Solution Hardening of Reactively Sputtered Nanolaminate ZrN-TiN Coatings Erika Herrera1, Avi Raveh2, Zbigniew Rożek3, Ludvik Martinu1, and Jolanta Klemberg-Sapieha1 1Polytechnique Montreal, Department of Engineering Physics, Canada S4-PO11 Single Element Transition Metal Nitride Heterostructural Multilayer Protective Coatings

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Fan-Bean Wu National United University, Materials Science and Engineering, Taiwan S4-PO12 Fretting behaviors of diamond-like carbon under oil-lubricated conditions Xiaoqiang Fan1 and Minhao Zhu2,* 1Key Laboratory of Advanced Technologies of Materials (Ministry of Education), School of Materials Science and Engineering, Southwest Jiaotong University,2Tribology Research Institute, State Key Laboratory of Traction Power,Southwest Jiaotong University, China S4-PO13 Effect of pH of Electroless Ni-P Plating Bath on Corrosion and Cavitation Erosion Behavior Il-Cho Park, Ye-Jin Yang, and Seong-Jong Kim Mokpo Maritime University, Korea S4-PO14 Plasma Based Nitrogen Ion Implantation to Hydrogenated Diamond-like carbon films T. Kimura1, H.Yanai1, S. Nakao2 and K.Azuma3 1Nagoya Institute of Technology, 2National Institute of Advanced Industrial Science and Technology, 3Iniversity of Hyogo, Japan

S4-PO015 Corrosion Behaviors of Mg Thin Films Formed by PVD Method at Various Corrosion Circumstance Sung-Hwa Hwang1, Jae-Hyuck Park1, Soon-Ho Kim1, Kyung-Man Mun2, Jae-In Jeong3, Ji Hoon Yang3

and Myeong-Hoon Lee1* 1Dept. of Marine Engineering, Korea Maritime and Ocean University Busan,2Dept. of Marine Equipment Engineering, Korea Maritime and Ocean University Busan, 3Hybrid Materials Research Department, Research Institute of industrial science & Technology, Korea S4-PO16 The Physical Properties of Al-Cu-Fe Coatings by Thermal Spraying Process Ming-Sheng Leu*, Tai-Sheng Chen, and Wu-Han Liu Materials and Chemical Laboratory, Industrial Technology Research Institute, Taiwan S4-PO17 Microstructure and Mechanical Property of Plasma-Nitrided CoCrFeMnNi High-Entropy Alloys Akio Nishimoto1,*, Takahiro Fukube2, and Toru Maruyama1 1Department of Chemistry and Materials Engineering, Kansai University, 2Graduate School of Science and Engineering, Kansai University, Japan S4-PO18 The Deposition of Ti-Cu Thin Films Using Asymmetric Bipolar High Power Impulse Magnetron Sputtering Technique Ying-Chai Chen1, Yi-Cheng Lin1, and Wan-Yu Wu 2* 1Department of Mechatronics Engineering, National Changhua University of Education, 2Materials Science and Engineering, Da-Yeh University, Taiwan

S10 Analysis and Evaluation of Films and Coatings S10-PO01 He depth profile measurements within W coatings by using GDOES (Glow Discharge Optical Emission Spectrometry) Eduard Grigore National Institute for Laser, Plasma and Radiation, Romania

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S10-PO02 Design and simulation of cell-pattern on capacitive touch screen panel for using the high sensitivity passive-type stylus pen ChangHo Lee Chung-ang University, Korea S10-PO03 Effect of target composites on the microstructural, mechanical and corrosion properties of TiAlN thin films deposited by high power impulse magnetron sputtering Chi-Lung Chang Ming Chi University of Technology, Department of Materials Engineering, China S10-PO04 Spatial Dose Distribution of Electron Beam Irradiated uPVC-film Sang Yoon Lee KAIST, Nuclear and Quantum Engineering, Korea S10-PO05 Post-annealing Effects on RF-sputtered Thermochromic VO2 Thin Films for Optimizing Optical Properties Jung-Hoon Yu Sungkyunkwan University, Department of Chemistry, Korea S10-PO06 Mechanism for Mitigating Filler-Induced Reliability Degradation in Semiconductor Devices Assembled Utilizing an LOC Package Technique Seong-Min Lee Incheon National University, Materials Science & Engineering, Korea S10-PO07 Electrochemical behavior of Manganese oxide / Carbon nanowalls nanocompositethin films Fatemeh Bohlooli Tokyo Institute of Technology, Japan, Department of Chemical Science and Engineering, Japan

S11 Industrial Technology and New Applications S11-PO01 Electron impact cross sections of fluorocarbons for industrial and plasma applications Dhanoj Gupta National Fusion Research Institute,Plasma Technology Research Center, Korea S11-PO02 The study of micro DBD plasma with seedling growth and transition of metabolme in Panix ginseng C.A, Meyer Sang Hye Ji, Seong Bong Kim, Seok Jae Yoo, and Jaesung Oh Plasma Technology Research Center, NFRI, Korea S11-PO03 Technological landscape of barrier film coating technologies Minwoo Lee Sungkyunkwan University, Korea S11-PO04 Plasma modification of wood veneers for plywood production Georg Avramidis HAWK, Faculty of Natural Sciences and Technology, Germany S11-PO05 Development of Oxide/Ag-alloy/Oxide Transparent Heaters

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Joon Min Lee University of Science and Technology, Korea S11-PO06 Development of defogging sensor using surface capacitive method for auto defogging system Hoyeol Choi University of Science and Technology, Korea S11-PO07 A Study on Microplasma Discharge Characteristics for Future Plasma Thruster Application Choon-Sang Park Kyungpook National University, School of Electronics Engineering, College of IT E, Korea S11-PO08 Novel method for graphene synthesis using PVC & PVDC through low energy electron beam irradiation Naeun Lee KAIST, Nuclear and Quantum Engineering, Korea S11-PO09 Characteristics of porous-discharge plasma jet in water and its water treatment applications Sukhwal Ma Chonbuk National University, Department of Applied Plasma Engineering, Korea S11-PO10 Effect of cooling methods and annealing temperature on the corrosion properties of super duplex stainless steel UNS S 32750 Byung-Hyun Shin Pusan National University, School of Material Science Engineering, Korea S11-PO11 Mobility improvement and densification of coarse ceramic powders by a microwave plasma torch Semin Chun National Fusion Research Institute, Plasma Technology Research Center, Korea S11-PO12 Various Changes to Polymer from Irradiation HyungSan Lim KASIT, Korea S11-PO13 Synthesis and Electrochemical Properties of Li1.1Al0.9O2 Prepared by the Reflux Method YangSoo Kim Korea Basic Science Institute, Korea

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Thursday Morning, September 14, 2017 08:00-12:00 Excursion Excursion in the Jungmun and Seogwipo area in Jeju Island ( Departure place and excursion program will be notified in the web site ) 12:00-13:00 Lunch

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Thursday Afternoon, September 14, 2017 (Jeju International Convention Center)

13:00-14:00 Opening Ceremony of Plasma Life Fair Exhibition Room TBA 13:00-14:30 Poster Session (2) Exhibition Room TBA

Scientific and Technological Sessions and Topical Workshops

S5 Functional Plasma Surface Treatment and Coatings (1) Chairs: Mirko Cernak, Czech Republic and Jang-Hsing Hsieh, Taiwan Room A 14:30-15:00 S5-IV01 Invited Innovative development of thin film structures and possible applications Jang-Hsing Hsieh Ming Chi University of Technology, Taiwan 15:00-15:15 S5-OR01 Fast, one-step and low temperature deposition of a composite anti-fog and photocatalytic thin films with an atmospheric pressure blowing arc plasma torch. Jean-Baptiste Chemin1,Nicolas Boscher1, Simon Bulou1, and Patrick Choquet1,* 1Luxembourg Institute of Science and Technology (LIST), Luxembourg 15:15-15:45 S5-IV02 Invited Atmospheric pressure dielectric barrier discharges for a large variety of surface processes Dusan Kovacik, Tomas Homola, Richard Krumpolec, Jakub Kelar, and M. Cernak* Department of Physical Electronics, Masaryk University, Brno, Czech Republic

15:45-16:00 S5-OR02 Cleaning, activation, coating and disinfection by means of AP-Plasma Markus Prinz and Christian Buske (CEO) Plasmatreat GmbH, Germany 16:00-16:30 S5-IV03 Invited Efficient Grafting of Pseudo-zwitterionic Anti-fouling Polymer by Atmospheric Pressure Plasma Discharge Ta-Chin Wei Department of Chemical Engineering, Chung Yuan Christian University, Taiwan 16:30-16:45 S5-OR03 Self-Organized Nanostructures on Polymers by means of Ion Beam Irradiation Seunghun Lee, Eunyeon Byon, Won-Min Ahn, Sunghun Jung, and Do-Geun Kim Plasma processing laboratory, Division of surface technology, Korea institute of materials science Changwon, Korea

S7 Nano Materials and Devices Chairs: Jyh-Ming Ting, Taiwan and Jae Young Choi, Korea Room B 14:30-15:00 S7-IV01 Invited Future Research Direction of Graphene for Real Industrial Applications: Large-Area Single Crystalline Graphene

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Jae-Young Choi1,2,* 1School of Advanced Institute of Nanotechnology (SAINT), 2School of Advanced Materials Science and Engineering Sungkyunkwan University (SKKU), Korea 15:00-15:15 S7-OR01 Elucidation of electrochemical and polarization characteristics of Pt-nanoparticles supported carbon nanowalls for fuel cell application Shun Imai1, Kenichi Naito1, Hiroki Kondo1, Hyungjun Cho1, Hiroyuki Kano2, Kenji Ishikawa1, Makoto Sekine1, Mineo Hiramatsu3, and Masaru Hori4 1Guraduate school of engineering, Nagoya University, 2Nu Eco Engineering, Co., LTD., 3Faculty of Science and Technology, Meijo University, 4Institute of innovation for future society research and development center of human and mobility society, Nagoya University, Japan 15:15-15:30 S7-OR02 Destruction of PFCs gas using microwave plasma operating at a low pressure Davoud Dorranian Laser Lab., Plasma Physics Research Center, Science, Iran 15:30-16:00 S7-IV02 Invited MoS2 Nanostructures and Its Composites for Supercapacitors Jyh-Ming Ting Department of Materials Science and Engineering, National Cheng Kung University, Taiwan 16:00-16:15 S7-OR03 A Novel Controlling Method of differentiation of Cultured Cells on Carbon Nanowalls Scaffold with an Electric Stimulation Tomonori Ichikawa1,Suiki Tanaka1, Hiroki Kondo1, Kenji Ishikawa1, Hiroshi Hasizume2, Hiromasa Tanaka2 and Masaru Hori2* 1Graduate School of Engineering, Nagoya University, 2Nagoya Univ. Inst. Innovation Society, Japan 16:15-16:30 S7-OR04 Trapping and extracting charged dust nanoparticles in a low pressure acetylene plasma reactor Zahra Marvi*, Erik von Wahl, and Holger Kersten Institute of Experimental and Applied Physics, CAU Kiel, Germany 16:30-16:45 S7-OR05 Effects of Structure on the Resistive Switching Properties of Random Access Memory Based on Yttria-stabilized Zirconia S.L. Chao and J.S. Cherng* Department of Materials Engineering, Ming Chi University of Technology, Taiwan

S9 Plasma Biomedicine and Life Science (3) Chairs: Masafumi Ito, Japan and Endre Szili, Australia Room C 14:30-15:00 S9-IV05 Invited Dynamic changes in oxidation, oxygenation and de-oxygenation during plasma jet treatment of tissue fluid and tissue Endre Szili University of South Australia, Australia 15:00-15:15 S9-OR13 Fullerenol-addition effects on Plasma-Activated Medium Daiki Kanno1,*, Hiromasa Tanaka1, Kenji Ishikawa1, Hiroshi Hashizume1, Hiroki Kondo1, Makoto Sekine1 and Masaru Hori1 1Nagoya Univ., Japan 15:15-15:45 S9-IV06 Invited Endocytosis : the dominant processes in plasma gene transfection

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Masafumi Jinno1,*, Yoshihisa Ikeda1, Hideki Motomura1, Yugo Kido1,2, and Susumu Satoh1,3 1Ehime University, 2Pearl Kogyo Co., Ltd., 3Y’s Corporation, Japan 15:45-16:00 S9-OR14 Effects of plasma jet-generated RONS on dividing cells Sung-Ha Hong,1 Endre J. Szili,1 Michael Fenech,2 Nishtha Gaur1, and Robert D. Short 1, 3 1Future Industries Institute, University of South Australia, 2CSIRO Health Sciences and Nutrition, Australia, 3Materials Science Institute, The University of Lancaster, City of Lancaster, UK 16:00-16:30 S9-IV07 Invited Effects of atmospheric pressure plasma-induced NO on the metabolism and immune activities of macrophages Chae Bok Lee, Il Hwan Seo, Myoung-Won Chae, Jae Woo Park, Eun Ha Choi, Han Sup Uhm, Byoungchoo Park, and Ku Youn Baik Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea 16:30-16:45 S9-OR15 Effects of Cold Plasma Treatment on Cartilage Cancer Cells Survival Rate in 2D and 3D Cells Structure Kittiya Thunsiri1,2, Kochakon Moonsub2, Dheerawan Boonyawan3and Wassanai Wattanutchariya1,2,* 1Biomedical Engineering Center (BMEC), Chiang Mai University, 2Advanced Manufacturing Technology Research Center (AMTech), Department of Industrial Engineering, Faculty of Engineering, Chiang Mai University, 3Department of Physics and Material Science, Faculty of Science, Chiang Mai University, Thailand

T4 Topical Workshop for Plasma Farming (3) Chair: Petr Špatenka, Czech Republic Room D 14:30-15:00 T4-IV10 Invited Can plasma affect the growth of chicken? Jiao Jiao Zhang1, Jin Oh Jo2, Do Luong Huynh1, Nam Eun Kim1, Taeho Kwon1, Mrinmoy Ghosh1, Sang Baek Lee2, Young Sun Mok2, *, and Dong Kee Jeong1, * 1Department of Animal Biotechnology and Advance Next Generation Convergence Technology, Jeju National University, 2Department of Chemical and Biological Engineering, Jeju National University, Korea 15:00-15:30 T4-IV11 Invited Disinfection of fungal spores on citrus by atmospheric pressure dielectric barrier discharge for agricultural applications Yoshihito Yagyu1,*, Mitsuhiro Yamaguchi1, Akikazu Sakudo2, Nobuya Hayashi3, Takeshi Ihara1, Tamiko Ohshima1, and Hiroharu Kawasaki1 1National Institute of Technology, Sasebo College, 2University of Ryukyus, 3Kyushu University, Japan 15:30-16:00 T4-IV12 Invited Trend of food preservation technologies by plasma Seungmin Ryu1, Hyeongwon Jeon1, Sangheum Eom1, Jungwoo Yoon1, Minho Kang2, Suk Jae You1 and Seong Bong Kim1

1Plasma Technology Research Center, National Fusion Research Institute, Korea. 2Department of Electrical and Biological Physics, Kwangwoon University, Korea. 16:00-16:30 T4-IV13 Invited Effects of atmospheric pressure plasma on microorganisms Jin-Sung Park1, Kijung Kim2, Do Kyung Kim1, Jinseung Choung1, Wonho Choe2, and Jennifer H. Shin1,* 1Department of Mechanical Engineering, KAIST, 2Department of Physics, KAIST, Korea 16:45-17:00 Coffee Break

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17:00-17:50 Special Lecture of K-T Rie Award Winner Chair: Jeon Geon Han Hall Room TBA Thin Films through Four Decades – How They Changed The World Günter Bräuer Fraunhofer Institut für Schicht, Germany 17:50-18:00 Break 18:00-19:50 AESE2017 Banquet Location TBA 20:00-22:00 AEPSE2017 & Plasma Life Fair Festival Location TBA

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Thursday Afternoon, September 14, 2017 (Jeju International Convention Center)

Poster Session

13:00-14:30 Poster Session (2) Exhibition Room TBA

S3 Semiconductor, Digital Electronics and Electronics S3-PO01 Efficient Barrier Performance of Flexible Silicon Jun S. Lee, B. B. Sahu, Su B. Jin, and Jeon G. Han NU-SKKU Joint Institute for Plasma-Nano Materials, Center for Advanced Plasma Surface and Technology, Sungkyunkwan University, Korea S3-PO02 Preparation of ZnO by High power impulse magnetron sputtering Yan Yuan, Lizhen Yang*, Zhengduo Wang, Zhongwei Liu and Qiang Chen Lab of Plasma Physics and Materials, Beijing Institute of Graphic Communication, China S3-PO03 Low-Temperature Formation of High-Mobility IGZO Thin Film Transistors for Flexible Electronics with ICP-Enhanced Reactive Plasma Processes Kosuke Takenaka1*, Yuichi Setsuhara1, Masashi Endo1, Giichiro Uchida1, and Akinori Ebe2 1Osaka University, 2EMD Corporation, Japan S3-PO04 The research of H2O O2 plasma process immediately Hao Qu, Dongdong Wang and Qiang Chen, Lab of Plasma Physics and Materials, China S3-PO05 Properties of transparent oxides thin film by change of confined magnetic field Keon Yuep Shin1, Sangmo Kim1, Youngha Park1, Min Jong Keum2, and Kyung Hwan Kim1* 1Department of Electrical Engineering, Gachon University, 2Jusung Engineering Ltd, Korea S3-PO06 Effect of oxygen partial pressure on electrical properties of p-type SnO thin film transistor Jeong-Jin Park1,2, Ho-Yeol Choi1, Chan-Hwa Hong1, Chang-Ho Lee1, Hye Su Kang1, Joon-Min Lee1, Byeong-Kwon Ju2* and Woo-Seok Chung1* 1Electronics and Telecommunications Research Institute, 2Display and Nanosystem Laboratory College of Engineering, Korea University, Korea S3-PO07 Ultra-Thin Transparent ITO Films Prepared by Advanced 3D Confined Magnetron Sputtering Long Wen, Su B. Jin, B. B. Sahu, and Jeon-Geon Han* NU-SKKU Joint Institute for Plasma-Nano Materials, Center for Advanced Plasma Surface and Technology, Sungkyunkwan University, Korea S3-PO08 p-type conductive NiOx:Cu thin films with high carrier mobility produced by ion beam assisted deposition Sin-Yi Huang1, Hui Sun2, Sheng-Chi Chen1,3,*, Pei-Jie Chen1, Sin-Liang Ou4, and Cheng-Yi Liu5 1Department of Materials Engineering and Center for Thin Film Technologies and Applications, Ming Chi University of Technology, Taiwan, 2Institute of Materials Science and Engineering, Ocean University of China, China, 3Department of Electronic Engineering, Chang Gung University,

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4Department of Materials Science and Engineering, Da-Yeh University, 5Department of Chemical and Materials Engineering, National Central University, Taiwan S3-PO09 Large area SiOx thin film with improved barrier performance and excellent mechanical properties using the pilot scale R2R PECVD Tae-Yeon Cho1and Seong-Keun Cho1,* 1Chemical Materials Solution Center, Korea Research Institute of Chemical Technology Yuseong, Korea S3-PO10 Growth of 2D Chalcogenide Thin Films by Sputtering and Electron Beam Irradiation Young Joon Yoon1, Bong Ho Kim1, and Hyun Ho Gu1 1Korea Institute of Ceramic Engineering and Technology, Korea S3-PO11 Long-term Environmental Interfacial Adhesion Degradation Mechanism of Screen-Printed Ag / Polyimide for Flexible Device Interconnects Kirak Son, Gahee Kim, Jina Lee, and Young-Bae Park* School of Materials Science and Engineering, Andong National University, Korea S3-PO12 Study on surface kinetic modeling for silicon dioxide etch process in fluorocarbon plasmas. Won-Seok Chang1 , Deuk-Chul Kwon1 , Mi-Young Song1 , Dea-Chul Kim1 , Jong-Sik Kim1 , Young-Woo Kim1 , Jung-Sik Yoon1 , Dong-Hun Yu2 , Yeong-Geun Yook3 , and Yeon-ho Im3 1Plasma Technology Research Center, National Fusion Research Institute, 2Kyungwon Tech Inc. 3School of Semiconductor and Chemical Engineering, Chonbuk National University, Korea

S6 Opto-electronics S6-PO01 Development of anti-spy privacy films with controlled viewing angle for transparent display So Won Kim and Hee Chul Lee Department of Advanced Materials Engineering, Korea polytechnic University, Korea S6-PO02 Synthesis and Characterization of Electrochemiluminescence Cell Using Nb:ZnO Nanoparticles Electrode Noritsugu Kamata, Somchai Arunrungrusmi, Pakpoom Chansri, and Narong Mungkung Plasma and Electrical Discharge Laboratory, King’s Mongkut University of Technology Thonburi, Thailand

S8 Green Energy and Environment S8-PO01 Using High Power Impulse Sputtering Deposited TiO2 Thin Films as the Compact Layer in Dye-sensitized Solar Cells Hsin-Yin Lin and Wan-Yu Wu Da-Yeh University Materials Science and Engineering, Taiwan S8-PO02 Catalytic enhancement on polymer counter electrodes of dye-sensitized solar cells by iso-octylphenoxy-polyethoxyethanol addition Hakutatsu Chou1, Daisuke Sakamoto1, Daisuke Yamashita1, Hyunwoong Seo1, Naho Itagaki1, Kazunori Koga1, and Masaharu Shiratani1 1Kyushu University, Japan S8-PO03 Destruction of PFCs gas using microwave plasma operating at a low pressure Dong Hun Shin

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National Fusion Research Institute, Plasma Technology Research Center, NFRI,Korea S8-PO04 Application of Liquid Phase Plasma Method for Hydrogen Production of Methanol/Water over Ag-loaded TiO2 Photocatalysts Won-June Lee1, Sangmin Jeong1, Heon Lee1, Kyong-Hwan Chung1, Ki-Joon Jeon2, Young-Kwon Park3, and Sang-Chul Jung1,* 1Sunchon National University, 2Inha University, 3University of Seoul, Korea S8-PO05 Application of Solution Plasma Process for Hydrolysis and Solubilisation of Particulate Organics in Sludge Waste Soogwan Lee1,2and Young Haeng Lee1,2,* 1Center for Water Resource Cycle Research, Korea Institute of Science and Technology, 2Department of Energy and Environmental Engineering, Korea University of Science and Technology, Korea S8-PO07 Investigation of Electrochemical Properties of Bio-inspired SiOx/PI Multilayered Thin Film Anode for Lithium Ion Batteries Guan-Ting Ye1, Hsien-Wei Chen1, and Jeng-Gong Duh1* 1Department of Materials Science and Engineering, National Tsing-Hua University, Taiwan S8-PO08 Fabrication and Characterization of Visible Light-Activated Nitrogen-doped TiO2-SiO2 Thin Film by Plasma Surface Modification Ya-Chen Chang1,2, Wei-Bo Liao1,2, Chien-Cheng Kuo1,2, Cheng-Chung Lee1,2, and Hung-Sen Wei1,2 1Thin Film Technology Center, National Central University, 2Department of Optics and Photonics, National Central University, Taiwan S8-PO09 Structural and Mechanical Properties Dependence on Evolution of N2 Concentration in Thin WNX films Synthesized by HFCVD Amir hoshang Ramezani Department of physics, West Tehran Branch,Islamic, Physics, Iran.

S9 Plasma Biomedicine and Life Science

S9-PO01 ESR analysis of free radical formation in rice grain induced by low-pressure argon plasma Somsak Dangtip Mahidol University, Department of Physics, Faculty of Science, Thailand S9-PO02 Transport effect of reactive oxygen radicals in inactivation of Escherichia coli with atmospheric pressure plasma jet H. Matsuura1,T.Fujiyama1,Y.Matsui1,J.Sakamoto1,T.Tsuchido1,M.Furuta1, and Y.Takemura2 Osaka Prefecture University, Japan P

S9-PO03 Improvement of wafer uniformity through RF phase difference optimization of semiconductor plasma equipment Joonghyun Jeon1,Sejin Oh1,Hyunju Lee1,Dougyong Sung2, and Taekyun Kang1 1Samsung Electronics Co., Korea S9-PO05 Comparative analysis of the therapeutic significance of reactive oxygen and nitrogen species in plasma treated water JooyoungPark,SanghooPark,andWonho Choe KoreaAdvancedInstituteofScienceandTechnology, Korea

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S9-PO06 Enhancing the Biocompatibility of PET and ETFE via Atmospheric Dielectric Barrier Discharge Surface Modification Yen-Ting Liao1, Hsien-Wei Chen1, Joseph Lee1, and Jenq-Gong Duh1* 1Department of Materials Science and Engineering, National Tsing-Hua University, Taiwan S9-PO08 The effects of nitric oxide and nitrogen dioxide produced by atmospheric pressure plasma on Panax ginseng Kyoung Suk Oh*, Sang Hye Ji, Jin-Hwan Kim, Jaesung Oh, Jong-Seok Song, Sunkyung Jung, Seong Yong Yoon, Seong Bong Kim, and Suk Jae Yoo Plasma Technology Research Center, National Fusion Research Institute, Korea S9-PO09 Measurement of a Capillary Discharge Plasma Shock Waves in Sea Water Yong-Seong Byeon1, Eun Jeong Hong1, Jung-Hyun Lim1, Seong Bong Kim1, Suk Jae Yoo1, and Seungmin Ryu1,* 1Plasma Technology Research Center, National Fusion Research Institute, Korea S9-PO10 Visible light absorption spectrometry of aqueous extract of raw horse meat irradiated with oxygen radicals. Yuto Kitada1*, Toshiya Hayashi1, Kenji Ishikawa2, Masaru Hori2, and Masafumi Ito1 1Meijo University, 2Nagoya University, Japan S9-PO11 Study on activation of plant growth-promoting bacteria (PGPB) within rice plant by atmospheric non thermal plasma treatment Sang Hye Ji1†, Jaesung Oh2, Seong Bong Kim2, Suk Jae Yoo2, Eun Ha Choi1 and Gyungsoon Park1* 1Plasma Bioscience Research Center, Kwangwoon University, 2Plasma Technology Research Center, National Fusion Research Institute, Korea S9-PO12 The Application of Surface DBD Plasma to Increase Sanitation of Cereal Grains Min Ho Kang Kwangwoon University, Departement of Electrobiological Physics, Korea S9-PO13 Disinfection of Aspergillus niger by Surface Dielectric Barrier Discharge Jungwoo Yoon, Sangheum Eom, Hyeongwon Jeon, Seong Bong Kim, Suk Jae You, and Seungmin Ryu* Plasma Technology Research Center, National Fusion Research Institute, Korea S9-PO14 Analysis of Plasma Characteristics of Tubular Electrodes for Improvement of Storage Period of Crop Hyeongwon Jeon, Sangheum Eom, Jungwoo Yoon, Seong Bong Kim, Suk Jae You and Seungmin Ryu* Plasma Technology Research Center, National Fusion Research Institute,Korea S9-PO15 Effects of oxygen radical treatment on purple photosynthetic bacteria Masakazu Takeno1*, Jun-Seok Oh1, Hiroshi Hashizume2, Masaru Hori2, and Masafumi Ito1 1Faculty of Science and Technology, Meijo University, 2Institute of Innovation for Future Society, Nagoya University, Japan S9-PO16 Investigation of atmospheric pressure plasma on germination and early growth of Arabidopsis thaliana under high salinity Jong-Seok Song, Sang Hye Ji, Kyoung Suk Oh, Sunkyung Jung, Jin-Hwan Kim, Sung-Young Yoon,

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Seong Bong Kim, Suk Jae Yoo, and Jaesung Oh* Plasma Technology Research Center, National Fusion Research Institute, Korea S9-PO17 The effect of atmospheric pressure plasma gas treatment on seed germination of Trifolium incarnatum. Jin-Hwan Kim*, Sunkyung Jung, Jaesung Oh, Seong Bong Kim, and Suk Jae Yoo Plasma Technology Research Center, National Fusion Research Institute, Republic ofKorea S9-PO18 Observation of electrical characteristics of atmospheric pressure plasma Gi Won Shin Kwangwoon univ, Electrical and biological physics, Korea S9-PO19 Plasma Controlled Antibacterial Nanostructured Copper Coatings Prepared by pulsed DC Magnetron Sputtering Hye R. Kim,* Jin X. Piao, Seok Y. Yoon, B. B. Sahu and Jeon G. Han 1NU-SKKU Joint Institute for Plasma-Nano Materials, Center for Advanced Plasma Surface and Technology, Sungkyunkwan University, Korea S9-PO20 The study of water characteristics on Hybrid water-surface/underwater plasma Eun jeong Hong1, Jung-Hyun Lim1, Yong-Seong Byeon1, Suk Jae Yoo1, Seong-Bong Kim1, and Seungmin Ryu1,* 1Plasma Technology Research Center of National Fusion Research Institute, Republic of Korea S9-PO21 Deriving the Discharge Driving Guidelines of Surface Barrier Discharge for the Enhancement of Food Preserving Efficiency Sangheum Eom, Hyeongwon Jeon, Jungwoo Yoon, Seong Bong Kim, Suk Jae You, and Seungmin Ryu* Plasma Technology Research Center, National Fusion Research Institute,Korea S9-PO23 Sterilisation of Spice Powders with a Dielectric Barrier Discharge Stefan Merli*, Andreas Schulz, Matthias Walker, and Günter Tovar Interfacial Process Engineering and Plasma Technology IGVP, University of Stuttgart, Germany S9-PO24 Using ‘Activated water’ generated from Gliding Arc discharge: Plasma Application to growth of Bean-Sprouts Da-Eun Kim1,2 and Yong Cheol Hong,1,3,* 1Plasma Technology Research Center, National Fusion Research Institute, 2Chonbuk National University, Engineering of Environment, 3NPAC Venture Company,Korea S9-PO25 Bio Anctive Titanium Surface Prepared by Electroch Doohun Kim Korea Electrotechnology Research Institute, Korea S9-PO26 Cu Nanoparticle Decorated Porous Membrane for Effective Antibacterial Water Treatment Application Shaislamov Ulugbek and Heon-Ju Lee* 1Department of Energy Engineering, Jeju National University, Korea S9-PO27 Effects of Plasma on Chlorpyrifos Residues of Chinese Kale Leaves Tanachai Pankasemsuk1* and Sirorat Kheinman1

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1Department of Horticulture, Faculty of Agriculture, Chiang Mai University, Thailand S9-PO29 Plasma technology application to increase of ginsenoside Rg3 from the ginseng Sunkyung Jung, Yong-Seong Byeon, Seong Bong Kim, Suk Jae Yoo, and Jaesung Oh* 1Plasma Technology Research Center, National Fusion Research Institute, Korea S9-PO30 Planar plasma patterns on quartz and their optical emission analyses C. K. Chung1,2, H. T. Lin1,2, and J. H. Hsieh1,2,* 1Dept. of Materials Engineering, Ming Chi University of Technology,2Center for Thin Film Technologies and Applications, Ming Chi University of Technology,Taiwan S9-PO31 Removal of Microorganisms in artificial waste brine using AC pulse underwater plasma: The effect of post-discharge periods and the presence of organic materials Junghyun Lim1, Yong-Seong Byeon1, Eun Jeong Hong1, Seungmin Ryu1, Suk Jae Yoo1 and Seong Bong Kim1,* 1Plasma Technology Research Center, National Fusion Research Institute, Korea S9-PO32 Apoptosis induction of melanoma cells treated with oxygen radical-irradiated medium Takayoshi Koizumi1*, Tomiyasu Murata2, Masaru Hori3, and Masafumi Ito1 1Faculty of Science & Technology, Meijo University, 2Faculty of Pharmacy, Meijo University,3Insititute

of Innovation for Future Society, Nagoya University, Japan

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Friday Morning, September 15, 2017 (Jeju International Convention Center)

08:30-18:00 Registration Registration desk 09:00-09:50 Plenary Session (5) Chair: Jin Hyo Boo, Korea Hall Room TBA Simple One-step Biological Functionalisation of Surfaces and Interfaces Enabled by Plasma Processing: Fundamentals and Applications Marcela Bilek University of Sydney, Australia 09:50-10:00 Coffee Break

Scientific and Technological Sessions and Topical Workshops

S5 Functional Plasma Surface Treatment and Coatings (2) Chairs: Jin Hyo Boo, Korea and Seong- Woo Kim, Japan Room A 10:00-10:30 S5-IV04 Invited High Efficiency Surface Planarization of Single Crystal Diamond Substrate by Plasma Fusion Chemical Mechanical Polishing Seong-Woo Kim1,2, Hideo Aida2,3, Hidetoshi Takeda1,2, Toshiro Doi2, Yasuhisa Sano4, and Syuhei Kurokawa5 1Namiki Precision Jewel Co. Ltd., 2Kyushu University, 3Nagaoka University of Technology, 4Osaka University, 5Kyushu University, Japan 10:30-10:45 S5-OR4 The Comparison of Plasma Activated Water Techniques for Bacteria Inactivation Tanitta Royintarat1,Dheerawan Boonyawan2, Phisit Seesuriyachan3 and Wassanai Wattanutchariya4,*

1,4Advanced Manufacturing Technology Research Center (AMTech), Department of Industrial Engineering, Faculty of Engineering, 2Department of Physics and Material, Faculty of Science, 3Faculty of Agro-Industry, Chiang Mai University, Thailand

10:45-11:00 S5-OR05 Microstructural, mechanical and corrosion behaviors of plasma electrolytic oxidation coating on titanium in aluminate-phosphate electrolyte Kai-Wen Cheng1 and Chuan-Ming Tseng1,2,* 1Department of Materials Engineering, Ming Chi University of Technology, 2Center for Thin Film Technologies and Applications, Ming Chi University of Technology, Taiwan 11:00-11:15 S5-OR06 High rate deposition of efficient flame retardant thin films on polycarbonate and polyamide-6 substrates by AP-PECVD Florian Hilt1,2,3, Nicolas Gherardi2,3, David Duday1, and Patrick Choquet1 1Luxembourg Institute of Science and Technology, Luxembourg, 2Université de Toulouse, UPS, INPT, CNRS, LAPLACE, France 11:15-11:30 S5-OR08 Polymer Nanowire Bundles Fabricated by Plasma Nanotexturing with Enhanced Antiwetting to

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Water Y.P.Li, X.Y. Li, M. Iqbal, and M.K. Lei Dalian University of Technology, China 11:30-11:45 S5-OR09 Simulation study of the transport and coating of nanopowders in plasma discharges with presence of an additional electric field Nima Pourali1,*, Zahra Marvi2, and Holger Kersten2 1Department of Physics, University of Mohaghegh Ardabili, Ardabil,2Institute of Experimental and Applied Physics, Iran

T2 Topical Workshop for Recent Advance in Flexible Electronics Chair: Seonkuk Kim, Korea Room B 10:00-10:30 T2-IV01 Invited A Patch-type Temperature Sensor for Wearable Device Applications Sungho Lee1,*, Mingoo Lee1 and Sunkook Kim2 1Korea Electronics Technology Institute, 2Sungkyunkwan University, Korea 10:30-11:00 T2-IV02 Invited Octopus-Inspired Micro-Architectures for Versatile Applications Changhyun Pang1-3,* 1School of Chemical Engineering, Sungkyunkwan University (SKKU), 2Advanced Institute of Nanotechnology (SAINT), SKKU, 3Samsung Advanced Institute for Health Sciences and Technology (SAIHST), SKKU, Korea 11:00-11:30 T2-IV03 Invited Fabrication of Microscale Fingerprint on Microparticle Wook Park Kyung Hee University, Korea 11:30-12:00 T2-IV04 Invited Next Generation Electronics with Pulsed Laser Processing Hyuk-Jun Kwon Daegu Gyeongbuk Institute of Science and Technology, Korea

S9 Plasma Biomedicine and Life Science (4) Chairs: Sun Jung Kim, Korea and Deborah O’Connell, United Kingdom Room C 10:00-10:30 S9-IV08 Invited Mechanisms of cell death post plasma treatment in normal and malignant primary prostate cancer cells J. Packer1, A M Hirst1,4, F M Frame1, M S Simms2,3, V M Mann2,3, D O’Connell4, *, N J Maitland1

1YCR Cancer Research Unit, Department of Biology, University of York, 2Department of Urology, Castle Hill Hospital, 3Hull York Medical School, University of Hull, 4York Plasma Institute, Department of Physics, University of York,UK 10:30-10:45 S9-OR16 Plasma coating of biodegradable nanofibers to generate smart antibacterial surfaces Anton Manakhov1, Dmitry Shtansky1, Irina Sukhorukova1, Eva Kedronova2,3, and Lenka Zajickova2,3 1National University of Science and Technology “MISiS”, Russia,2RG Plasma Technologies, CEITEC – Masaryk University, 3Department of Physical Electronics, Masaryk University, Czech Republic

10:45-11:00 S9-OR17 Ambient control during preparations of the plasma-activated medium (PAM) for antitumor effects

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Yugo Hosoi*, Kenji Ishikawa, Hiroshi Hashizume, Hiromasa Tanaka, Hiroki Kondo,Makoto Sekine, and Masaru Hori Nagoya University, Japan 11:00-11:30 S9-IV09 Invited Overcoming chemotherapy drug resistance of the breast cancer cell by cold atmospheric plasma Seungyeon Lee1, Dawoon Jeong 1, Juyeon Ham1, Sungbin Park1, Eun Ha Choi2, and Sun Jung Kim1,** 1Department of Life Science, Dongguk University-Seoul, Korea, 2Plasma Bioscience Research Center, Kwangwoon University, Korea 11:30-11:45 S9-OR18 Sterilizing Bacteria Enterococcus faecalis by using Atmospheric Plasma Jet Taweesuk Asuphon1, Choncharoen Sawangrat2,*,Dheerawan Boonyawan3, and Phumisak Louwakul4 1BioMedical Engineering Center, Chiang Mai University, 2Department of Industrial Engineering, Faculty of Engineering, Chiang Mai University, 3Department of Physics and Materials Science, Faculty of Science,Chiang Mai University, 4Department of Esthetic Restorative and Periodontology, Faculty of Dentistry, Chiang Mai University, Thailand 11:45-12:00 S9-OR19 Spatially-resolved ozone density measurement by two-beam UV-LED absorption spectroscopy of compact coaxial air plasma jet for biomedical applications A. Wijaikhum1,*, P. Thana1, S. Sarapirom2, A. Ngamjarurojana1, and D. Boonyawan1 1Department of Physics and Materials Science, Faculty of Science, Chiang Mai University, 2Department of Physics, Faculty of Science, Maejo University, Thailand

T4 Topical Workshop for Plasma Farming (4) Chair: Koichi Takaki, Japan Room D 10:00-10:30 T4-IV14 Invited Plasma application to microbial issues Gyungsoon Park Department of Electrical and Biological Physics, Kwangwoon University, Plasma Bioscience Research Center, Kwangwoon University, Korea 10:30-11:00 T4-IV15 Invited Application of plasma technology to the seed germination and growth Jaesung Oh1*, Jin-Hwan Kim1, Jong-Seok Song1, Sang Hye Ji1, Kyoung Suk Oh1, Sunkyung Jung1, Seong Bong Kim1, and Suk Jae Yoo1, Plasma Technology Research Center, NFRI, Korea 11:00-11:30 T4-IV16 Invited Effects of Plasma on Pepper Seed quality and Eliminated of Colletotrichum sp. Contamination Sa-nguansak Thanapornpoonpong1,* Aungkhana Sobbong1, On-Uma Ruangwong2,Thapanee Sarakonsri3, Choncharoen Sawangrat4, Dheerawan Boonyawan5, and Jeon Geon Han6 1Department of Plant Science and Soil Science, Faculty of Agriculture, Chiang Mai University, 2Department of Entomology and Plant Pathology, Faculty of Agriculture, Chiang Mai University, 3Department of Chemistry, Faculty of Science, Chiang Mai University, 4Department of Industrial Engineering, Faculty of Engineering, Chiang Mai University, 5Department of Physics, Faculty of Science, Chiang Mai University, Thailand6School of Advanced Materials Science and Engineering, Sungkyunkwan University, Korea 11:30-11:45 T4-OR01 Proliferative effects of budding yeast cells irradiated with nitric oxide radicals and oxygen radicals Masashi Okachi1,*, Jun-Seok Oh1, Hiroshi Hashizume2, Masaru Hori2, and Masafumi Ito1 1Meijo University, 2Nagoya University, Japan

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11:45-12:00 T4-OR02 ESR analysis of free radical formation in rice grain induced by low-pressure argon plasma P. Rintarak1,2, B. Pattanasiri3, S. Anupong4, S. Ninlaphruk5, and S. Dangtip1,2,6* 1Dept of Physics &2NANOTEC CoE, Faculty of Science, Mahidol University, 3Kasetsart University, Kamphaeng Saen Campus, 4Dept of Chemistry, Faculty of Science, Mahidol University, 5Office of Atoms for Peace, 6ThEP Center, Commission for Higher Education, Thailand 12:00-13:00 Lunch

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Friday Afternoon, September 15, 2017 (Jeju International Convention Center)

Scientific and Technological Sessions and Topical Workshops

S8 Green Energy and Environment Chairs: Young Dok Kim, Korea and Takayuki Watanabe, Japan Room A 13:00-13:30 S8-IV01 Invited Atomic layer deposition for the synthesis of nanocatalysts Young Dok Kim Sungkyunkwan University, Korea 13:30-14:00 S8-IV02 Invited Enhanced cyclability with plasma sprayed Si-M nanocomposite anode for lithium ion batteries Makoto Kambara1,*, Tomoaki Tohara1 and Ryoshi Ohta1 1Department of Materials Engineering, University of Tokyo, Japan 14:00-14:15 S8-OR02 Surface treatment of hole transport layer by oxygen-plasma for Perovskite solar cell Dong In Kim1, Ki-Hwan Hwang1,2, Hyeon Jin Seo1, Jung-Hoon Yu1, Ji Won Lee2, Rak Hyun Jeong2, Hyeeun Yang1, Sang-Hun Nam2 and Jin-Hyo Boo1,2* 1Department of Chemistry, Sungkyunkwan University, Republic of Korea 14:15-14:30 S8-OR03 Suppression of Si-H2 bond formation at P/I interface in a-Si:H solar cells fabricated by plasma CVD Kazuma Tanaka1,*, Takashi Kojima1, Susumu Toko1, Daisuke Yamashita1,Hyunwoong Seo1, Naho Itagaki1, Kazunori Koga1, and Masaharu Shiratani1 1Kyushu University, Japan 14:30-15:00 S8-IV03 Invited Measurement of Nitrogen Dioxide and Nitric Oxide Densities by using Cavity Enhanced Absortion Spectroscopy in Non-thermal Atmospheric Pressure Plasma Jet Young June Hong Kwangwoon University, Korea 15:00-15:30 S8-IV04 Invited Durable smart and multifunctional optical coatings for energy saving and anti-counterfeiting - New opportunities for pulsed plasmas Ludvik Martinu, B. Baloukas, F. Blanchard, and S. Loquai Functional Coating and Surface Engineering Laboratory, Department of Engineering Physics, Polytechnique Montreal, Canada

T2 Topical Workshop for Recent Advance in Flexible Electronics & S6 Opto-electronics Chair: Seonkuk Kim, Korea Room C 13:00-13:30 T2-IV05 Invited Considerations of 2D Materials for Electronic Device Applications Gyuchull Han1and Youngki Yoon1,* 1Department of Electrical and Computer Engineering & Waterloo Institute for Nanotechnology, University of Waterloo, Canada

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13:30-14:00 T2-IV06 Invited Development and Commercialization of InGaN-Based Light-Emitting Diodes on Large Si Substrate Jaekyun Kim Hanyang University, Korea 14:00-14:30 S6-IV01 Invited Photophysics in organic photovoltaic bulk heterojunctions Xiao-Tao Hao School of Physics, State Key Laboratory of Crystal Materials, Shandong University, China 14:30-14:45 S6-OR02 Effects of Different Additives for High Performance Perovskite Solar Cells Chung-Lin Chung and Chih-Ping Chen* Ming Chi University of Technology, Department of Materials Engineering, Taiwan 14:45-15:00 S6-OR03 Simple Structured Polyetheramines, as Electron Transporting Modified Layers for Efficient Organic Photovoltaics Yao-Yu Tsai, Bing-Huang Jian, and Chih-Ping Chen* The Department of Materials Engineering, Ming Chi University of Technology, Taiwan 15:00-15:15 S6-OR04 0-dimensional Carbon Dot as Efficient Cathode Interfacial Layers for Organic Photovoltaics Providing Power Conversion Efficiencies up to 9.5% Jui-Chih Kao and Chih-Ping Chen* The Department of Materials Engineering, Ming Chi University of Technology, Taiwan 15:30-17:00 Poster Session (3) Exhibition Room TBA 17:00-18:00 Conference Closing Hall Room TBA

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Friday Afternoon, September 15, 2017 (Jeju International Convention Center)

Poster Session

15:30-17:00 Poster Session (3) Exhibition Room TBA

S5 Functional Plasma Surface Treatment & Coatings S5-PO01 Effectiveness of Plasma and Radical Control for Highly Transparent and Wide-bandgap SiNx:H films prepared by RF/Microwave Dual Frequency PECVD B. B. Sahu,1 Y. Y. Yin, 1 J. S. Lee,1 Jeon G. Han,1,*S. Koga,2 H. Toyoda,2 and M. Hori2 1Center for Advanced Surface Technology, Syngkyunkwan Unviersity, Korea, 2SPlasma Nanotechnology Research Center, Nagoya University, Japan S5-PO02 Plasma Enhanced Chemical Vapor Deposition of Conjugated Polymer Coatings For Possible Gas Sensing Applications Antony Ananth*, Hyeon-Jin Seo, and Jin-Hyo Boo Department of Chemistry, Sungkyunkwan University, Korea S5-PO03 Atmospheric pressure dielectric barrier discharges for a large variety of surface processes Dusan Kovacik, Tomas Homola, Richard Krumpolec, Jakub Kelar, and M. Cernak Department of Physical Electronics, Masaryk University, Czech Republic S5-PO04 Surface Alloying in Ta/Steel Coating Substrate System Using Compression Plasma Flow Amir Hossein Hossein Sari Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Iran S5-PO05 Electrochemical Characteristics of RF-sputtered Zn and Si Coatings on PEO-treated Ti-6Al-4V In-Jo Hwangand Han-Cheol Choe Department of Dental Materials, College of Dentistry, Chosun University, Korea S5-PO06 Synthesis and Characterization of Photocatalytic Titanium Oxide Thin Film deposited on Glass by Atmospheric Pressure Plasma CVD Seongchan Kang1, Rodolphe Mauchauffé1, and Se Youn Moon1,2 1Plasma Experiment and Device Application Lab, Department of Applied Plasma Engineering, Chonbuk National University, 2Department of Quantum System Engineering, Chonbuk National University, Korea S5-PO07 Effect of operating conditions on adhesion strength of Al/AlN laminate Kyu-Bong Jang1,2, Sung-Chul Lim2, Young-Sik Song2, Kyoung Il Moon2, Do-Won Min2 and Sungwook Mhin2 1School of Materials Science and Engineering, Inha University, 2Korea Institute of Industrial Technology, Korea S5-PO08 Effects of electrolyte composition on the properties of ceramic oxide coatings produced by plasma electrolysis

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Jung-Hyung Lee1 and Seong-Jong Kim2, 1Korea Institute of Industrial Technology, 2Mokpo National Martime University, Korea S5-PO09 Selective functionalization of mesh membrane Yong Sung You1, Sung Chan Kang2, Duksun Han2, and Se Youn Moon1,2,3* 1Department of Quantum System Engineering, Chonbuk National University, 2 1Department of Plasma Applied Engineering, Chonbuk National University, 3 1Department of Plasma Applied Engineering, Chonbuk National University, Korea S5-PO10 Effect of Electrolyte Composition on The Formation Behavior of Plasma Electrolytic Oxidation Films on Al1050 Alloy Juseok Kim1,2, Sungmo Moon1,* and Myunghoon Oh2 1Surface Technology Division, Korea Institute of Materials Science, 2School of Material Science and Engineering, Kumoh Institute of Technology, Korea S5-PO12 Surface functionalization on porous metallic glass compacts via hydrothermal synthesis Hae Jin Park and Ki Buem Kim Sejong University, Korea S5-PO13 Mechanical properties of fully crystallized Zr based amorphous materials Gyung Bae Bang1, 2, Han Chan Lee1, Hae Won Yoon1, and Kyoung Il Moon1* 1Korea Institute of Industrial Technology, Heat Treatment R&D Group, 2School of Materials Science and Engineering, Inha University, Korea S5-PO14 Effect of Inductively Coupled Plasma on the multi-layer electrodes for flexible single-layer capacitive touch sensor Chan-Hwa Hong, Chang-Ho Lee, Joon-Min Lee, Jeong-Jin Park, Ho-Yeol Choi, and Woo-Seok Cheong* Electronics and TelecommunicationsResearch Institute, Korea S5-PO16 The properties of Ti-Al-V-N coating synthesized by magnetron sputtering process with single alloying targets Han-Chan Lee1, Hye-Won Yoon, Gyung-Bae Bang, Hyun-Jun Park, Gi-Hoon Kwon, and Kyoung-Il Moon1* 1Korea Institute of Industrial Technology, Heat Treatment R&D Group, Korea S5-PO17 A study of the wear properties of FeS layer Hyun-Jun Park,Gi-Hoon Kwon, and Kyoung-Il Moon 1Korea Institute of Industrial Technology, Heat Treatment R&D Group, Korea S5-PO18 Effects of NaOH concentration on the formation of plasma electrolytic oxidation films on AZ31 Mg alloy in CO32- ion containing solution Yeajin Kim1,2,Heon-Cheol Shin2, and Sungmo Moon1,3,* 1Korea Institute of Materials Science, Surface Technology Division, 2Pusan National University, 3Koera University of Science and Technology, Korea S5-PO19 Study of Plasma Electrolytic Oxidation Ceramic-like Coatings on Aluminum Composites Svetlana Savushkina1,*, Leonid Agureev1, Boris Ivanov1, Artem Ashmarin1, Anatoly Borisov2, Andrey Apelfeld2, Kirill Anikin2, Nikita Tkachenko3, and Vladimir Vostrikov3 1Keldysh Research Center, 2MAI, 3SINP MSU, Russia

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S5-PO20 Mass and Energy Spectrometry for Plasma / Surface J.A. Rees, C. Greenwood, andC. Williams Hiden Analytical Ltd., United Kingdom S5-PO21 Fabrication of Plasma Electrolytic Oxidation Coatings on Magnesium Casting Alloys by Environment Friendly Plasma Anodization Lee Sung Hyung1, Kure-Chu Song-Zhu2, Kim Hyo JIn1, Li Xiaopei2, Hitoshi Yashiro2,and Sungjin Kim3 1GEO Nation Co. Ltd.,2Department of Chemistry and Bioengineering, Iwate University, Japan, 3Kumooh National Institute of Technology, School of Advanced Materials and Engineering T222, Korea S5-PO22 O2 plasma treated substrate with Enhanced Surface Free Energy for continuous growth of ITO via aqueous sol-gel approaches and the synthesis of graphene/ITO bi-film Bastian Waduge Naveen Harindu Hemasiri, Jae-Kwan Kim, and Ji-Myon Lee* *Department of Printed Electronics Engineering, Sunchon National University, South Korea S5-PO23 Nucleation and Growth of Bone-like Apatite on the Ti-6Al-4V after PEO-Treatment in Electrolytes Containing Bioactive Elements Sang-Gyu Lim and Han-Cheol Choe* Department of Dental Materials & Research Center of Nano-Interface Activation for Biomaterials, College of Dentistry, Chosun University, Korea S5-PO24 The Characteristics analysis of Copper Nanoparticles Coating on Polymer Film using Underwater Plasma Kangil Kim1, Jin Young Huh2, Suk Hwal Ma3, and Yong Cheol Hong1,4,* 1Plasma Technology Research Center, National Fusion Research Institute, 2Department of Electrical and Biological Physics, Kwangwoon University, 3Department of Applied Plasma Engineering,

Chonbuk National University, 4NPAC, Korea S5-PO25 The effect of glow discharge plasma on a compensation of charging effect for SIMS analysis Sang Ju Lee, Jung-Hwan Kim, Chang Min Choi, Eun Ji Park, Ji Young Baek, and Myoung Choul Choi* Mass Spectrometry & Advanced Instrument Group, Korea Basic Science Institute, Ochang Center, Korea S5-PO26 Cell Proliferation on the Functional Element Containing-HA Surface Formed Plasma Electrolytic Oxidation Ji-Min Yu and Han-Cheol Choe* Department of Dental Materials & Research Center of Nano-Interface Activation for Biomaterials, College of Dentistry, Chosun University, South Korea S5-PO27 Effects of Carbon Coating on LiNi0.5Mn1.5O4 Cathode Material for Lithium Ion Batteries using an Atmospheric Microwave Plasma Torch Dong Jin Ku1,2, Min Koo2, Sang Ju Lee3, Jae Ho Lee2, and Bong Ju Lee1,2* 1Handong Global University,2Green Science Co., Ltd., 3Korea Basic Science Institute, Korea S5-PO28 Antibacterial properties and biocompatibility of F-containing TaCxNy thin films Jang-Hsing Hsieh1,2,3,* and H. T. Lin1,2 1Ming Chi University of Technology, Dept. of Materials Engineering, 2Ming Chi University of Technology, Center for Thin Film Technologies and Applications, 3Chang Gung University, Department of Electronic Engineering, Taiwan

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S5-PO29 Corrosion Behaviors of Bioactive Element Coatings on PEO-treated Ti-6Al-4V Alloy Min-Gyu Park and Han-Cheol Choe* Department of Dental Materials & Research Center of Nano-Interface Activation for Biomaterials, College of Dentistry, Chosun University, Korea S5-PO30 Research of High Transmittance Diamond-like Carbon thin films Wei-Bo Liao1, Ya-Chen Chang1, Cheng-Chung Lee1, Yan-Yu Liao2, and Chien-Cheng Kuo1,* 1Department of Optics and Photonic/Thin Film Technology Centers, National Central University, 2Department of Mechanical Engineering/Thin Film Technology Centers, National Central University, Taiwan.

S7 Nano Materials and Devices S7-PO01 Characterisation of nanoparticle growth in a CCRF plasma by Langmuir probe measurements and particle extraction E. von Wahl1,*, Y.A. Ussenov2, Z. Marvi1, T.S. Ramazanov3, and H. Kersten1 1Institute of Experimental and Applied Physics, CAU Kiel, Germany, 2National Nanotechnology Laboratory of Open type, Al-Farabi KazNU Almaty, 3Institute of Experimental and Theoretical Physics, Al-Farabi KazNU Almaty, Kazakhstan. S7-PO02 Nanometer Thickness Graphite Film Growth on Textured Ni(111) Surface Seul-Gi Kim1 and Ji-Beom Yoo1,2,* 1SKKU Advanced Institute of Nanotechnology (SAINT) and Center for Human Interface Nano Technology (HINT), Sungkyunkwan University, 2School of Advanced Materials Science and Engineering (BK21), Sungkyunkwan University, Korea S7-PO03 Fabrications of copper oxide based heterojunction solar cell by using sputtering Sangmo Kim1, Yu sup Jung2, and Kyung Hwan Kim1* 1Department of Electrical Engineering, Gachon University, Korea, 2R&D Center, CNI Technology, Inc. S7-PO04 Thermal cut-off properties of W doped VO2 and their application for smart windows Eadi Sunil Babu1, Sengeragchaa, Bolortuya1, Min Ji Hong1, Azimov Farkhod1, Yong Sik Kim1, Hee Jun Kim1, Ngo Hoang Ngoc1, and Sungjin Kim1 School of Advanced Materials & Engineering, Kumoh National Institute of Technology 61, Korea S7-PO05 Preparation of silver nanoparticles by nanosecond pulsed discharge in water Chuhyun Cho and Yun Sik Jin Korea Electrotechnology Research Institute (KERI), Korea S7-PO06 Facile Synthesis of Undoped ZnO Nanostructures by Solution Plasma Process Soo-Whan Kim1,Myung-Hwa Jung1,*, Ahmad Nauman Shah Saqib2, and Young Haeng Lee2 1Department of Physics, Sogang University, 2Center for Water Resource Cycle Research, Institute of Science and Technology, Korea S7-PO08 Hybrid nanostructure of MWCNT:Cu/CdS nanobelt for high performing Schottky photodetector Dong Jin Lee1, P. Ilanchezhiyan1,*, S. R. Ryu2, Tae Won Kang1 and Deuk Young Kim1 1Quantum-Functional Semiconductor Research Center, Dongguk University, Republic of Korea S7-PO09 Fabrication of heater-embedded MEMS gas sensors with improved gas response performance

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Hyeongkwan Kim and Hee Chul Lee Department of Advanced Materials Engineering, Korea polytechnic University, Korea S7-PO10 Synthesis and Characterization of Cu2ZnSnSe4 (CZTSe) Thin Film for Solar Cell Absorber layer Gizachew Gizachew Zeleke1, Kwang-Soo Lim1, Seong-Man Yu1, and Ji-Beom Yoo1,2 Sungkyunkwan University, Korea S7-PO11 Control of Graphene Layers by Nickel Diffusion in a Cu-Ni Alloy Foil Ki-bong Nam1 and Ji-Beom Yoo,1,2,* 1SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, 2School of Advanced Materials Science and Engineering, Sungkyunkwan University, Korea S7-PO12 Growth of Nanometer-thickness Graphite Film by Controlling Seed Formation Qicheng Hu1 and Jiboom Yoo1 Sungkyunkwan University, Korea S7-PO13 Effect of the membrane structure on the deformation of membrane for desalination of sea water Gil-Seon Kang1 and Ji-Beom Yoo* Sungkyunkwan University, Korea S7-PO14 Effect of plasma etching on formation of nanopores in CVD graphene on Cu foil Siying Li1 and Ji-Beom Yoo1,* Sungkyunkwan University, Korea S7-PO15 Effect of Ge layer on properties of Cu2Zn(Sn1-xGex)S4 thin film for solar cell application Kwang-Soo Lim1 and Ji-Beom Yoo1.2 1SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Korea S7-PO16 Hydrogenation of TiO2 synthesized by a sol-gel method using an underwater discharge Jin Young Huh1,2, Ha-Rim An3, So Young Park3, Hyeran Kim3, Hyun Uk Lee3, Young-Chul Lee4, Young Boo Lee5, and Yong Cheol Hong2,6,* 1Department of Electrical Biological Physics, Kwangwoon University, 2Plasma Technology Research Center, National Fusion Research Institute, 3Advanced Nano-surface Research Group, Korea Basic Science Institute, 4Department of BioNano Technology, Gachon University, 5Jeonju Center, Korea Basic Science Institute, 6NPAC, Korea S7-PO17 A transfer-free freestanding nanometer thickness graphite film Tae Sung Kim1, Seul-Gi Kim1, Mun Ja Kim2, and Ji-Beom Yoo1,* 1SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University,2Mask development team, Semiconductor R&D center, SAMSUNG ELECTRONICS CO., Ltd., Korea. S7-PO18 Stretchable and Transparent Capacitive Touch/Force Sensor as a Multi-functional Input Device for Wearable Electronics Byeong-Ung Hwang1, Yeoung-In Choi1, Ju Hyun Kim1, and Nae-Eung Lee1,2,3* 1Department of Advanced Materials Science & Engineering, Sungkyunkwan University, Korea S7-PO19 Selected Growth of HfO2 and Al2O3 Through PA-ALD and Its Application Lizhen Yang1, Delin Kong1, Yumeng Wang1, de Hu1, Lijun Sang1, Jianming Xue2, and Qiang Chen1*

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1Beijing Institute of Graphic Communication, 2Peking University, China S7-PO20 Synthesis of continuous films of monolayer and multilayer graphene on plasma modified Cu surface. M. D. S. L., Jae-Kwan Kim, and Ji-Myon Lee* Sunchon National University. S7-PO21 Preparation of Diamond Nanoparticles for Single Photon Emission Hwan-Young KIM1*, Byung-Kwan Song1, Kun-Su Kim1, and Nong-Moon Hwang1 1Seoul National University, Korea S7-PO22 Synthesis of copper oxide nanoparticles using gas-liquid interface plasma reduction Akira Ito1,*, Takayuki Ohta1, and Masaru Hori2 1Department of Electrical and Electronic Engineering, Meijo University, 2Institute of Innovation for Future Society, Nagoya University, Japan S7-PO23 Novel laser desorption / ionization method using carbon nanowalls for mass spectrometry Hironori Ito1, Takayuki Ohta1, Kenji Ishikawa2, Hiroki Kondo2, Mineo Hiramatsu1 and Masaru Hori2 1Department of Electrical and Electronic Engineering, Meijo University, 2Nagoya University, Japan S7-PO24 Defect-Free Transfer of CVD Graphene via Thin Adhesive Layer Chan Kim1,2, Min-Ah Yoon1,2, Hyun-Jun Jung3, Jae-Hyun Kim1,2, and Kwang-Seop Kim1,2* 1Department of Nano-Mechatronics, Korea University of Science & Technology (UST), 2Department of Nanomechanics, Nano-Convergence Mechanical Systems Research Division, Korea Institute of Machinery & Materials (KIMM), 3Center for Advanced Meta-Materials, Korea.