extended nijboer-zernike (enz) based imaging into an image ... · 2 years ago at eos ait in lille...
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Extended Nijboer-Zernike (ENZ) based imaging into an image region containing a layered configuration
1S. van Haver, 1J.J.M. Braat, 2A.J.E.M. Janssen, 1S.F. Pereira 1TUDelft, TNW-IST Optics Research Group, Lorentzweg 1, 2628CJ Delft, the Netherlands
2Philips Research Europe, HTC 36, 5656AE Eindhoven, the NetherlandsContact: [email protected]
EOS AIT Jena, June 10th 2009, 18:00-18:20.
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Simplified transmittive
mask object
Computed near-field
when illuminated by an x-polarized plane wave
Extended Nijboer-Zernike imaging
•
2 years ago at EOS AIT in Lille we have given a proof of concept on ENZ-based imaging
![Page 3: Extended Nijboer-Zernike (ENZ) based imaging into an image ... · 2 years ago at EOS AIT in Lille we have given a proof of concept on ENZ-based imaging. Electric field in the exit](https://reader033.vdocuments.site/reader033/viewer/2022050204/5f579faa5acd8979f669c045/html5/thumbnails/3.jpg)
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Extended Nijboer-Zernike imaging
•
2 years ago at EOS AIT in Lille we have given a proof of concept on ENZ-based imaging
Electric field in the
exit pupil
Through-focus image of the mask computed with
ENZ-imaging algorithm (NA =0.95)
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Entrance
pupil
Extended Nijboer-Zernike imaging
•
ENZ-imaging model vs common Fourier based imaging
complex transmission
function
complex transmission
function
+
low-pass filter
FT FT-1
ENZ
Fourier
ENZ computes the image directly from
the Zernike expansion of the
complex exit pupil distribution
Image is obtained by inverse Fourier transforming the filtered spectrum
ENZ
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Extended Nijboer-Zernike imaging
•
ENZ-imaging model vs. common Fourier based imaging
ENZ-imaging:• Novel method
• Isolated objects
• Potentially fast using tabulation
• Highly accurate#
•
Current work to include image formation in stratified media
Fourier-imaging:• Established widespread method
• periodic objects
• Fast using FFT
•
Some concern about accuracy (applied approx.)
#
S. van Haver et al., J. Opt. Soc. Am. A 26, 1221-1234 (2009).
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Multilayer ENZ-imaging
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Schematic representation of the configuration under consideration:
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Multilayer ENZ-imaging
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Effective pupil: Homogeneous imaging
pupildistribution
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Multilayer ENZ-imaging
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Effective pupils: half-space imaging
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Multilayer ENZ-imaging
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Effective pupils: 3-layer image space
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Multilayer ENZ-imaging
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Insert effective backward and forward propagating distributions into Debye Diffraction integral
•
Apply ENZ semi-analytic solution!
Forward propagating
Backward propagating
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Multilayer ENZ-imaging example 1:
•
Three models to represent a lithographic stack
(water immersion lithography; λ=193nm, NA=1.368)
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Multilayer ENZ-imaging example 1:
•
Single water-photoresist interface
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Multilayer ENZ-imaging example 1:
•
Simple stack including highly reflective substrate
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Multilayer ENZ-imaging example 1:
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Advanced lithographic stack with ARC
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Multilayer ENZ-imaging example 2:•
High-capacity optical data storage with Solid Immersion Lens:
air-gap
SIL
SIL
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Conclusions & Discussion
•
ENZ Image formation in stratified media is possible by using layer dependent pupil distributions
•
Accurate semi-analytic image formation•
Tabulated basic functions:•
Layer configuration changes do not require a new full simulation
•
Efficient optimization of multilayer stacks•
Zernike expansion of the pupil contains valuable information on layer induced aberrations, without calculating the actual image
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Questions?
Visit:http://www.nijboerzernike.nl
Acknowledgements: