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Consolidated Environmental Statement 2012of the Villach Site
bilduntertitel 8pt, line space 11pt, letter 0 pt
Issued by Inf ineon Technologies Austr ia AG Inco-operationwithInf ineonTechnologiesAG, Corporate Environmental Af fairs & Operations Suppor tResponsible for the contents: Dr. Adolf Biedermann, Dr. Ingrid LawickaConcept and design: KANZIAN ENGINEERING & CONSULTING GmbHGraphics and layout: atelier CREmsnerPaper: The Environmental Statement was printed on environmentally f r iendly paper
Verified enVironmental
management
Contents
1 Introduction by the IFAT Management Board 2 The Company 2.1 Company Profile of Infineon Technologies Austria AG 2.2 Site Description 2.3 Activities and Products
3 Company Policy: Environmental Protection, Safety and Health, and Energy Management 3.1 Integrated Management – a Comprehensive Approach 3.2 Organization of the Environmental Management System 3.3 Employee Involvement 3.4 Occupational Safety and Health 3.5 Observance of Legal Regulations Relevant to the Environment 3.6 Emergency Prevention and Management 4 Environmental Impacts – Data, Facts and Figures 4.1 Input/Output Analysis 4.2 Direct Environmental Aspects 4.3 Indirect Environmental Aspects 4.4 Environmental Aspects and Focal Points
5 Overview of Environmental Programs for 2009/10, 2010/11, 2011/12 and Environmental Goals for 2012/13 5.1 Implemented Measures 2009/10, 2010/11 and 2011/12 5.2 Planned Measures 2012/13 5.3SpecialEnvironmentalAchievements2009-2012 5.4 Important Changes since the Last Consolidated Environmental Statement 6 Annex 6.1 Validation 2012 6.2 Glossary 6.3 Date for Next Environmental Statement 6.4 Contact Persons
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Energy efficiency, mobility and security – these are the three key areas for which Infineon designs, manufactures
and markets products that deliver benefits to people in modern society. The challenges involved are significant,
and our semiconductors make an important contribution in numerous applications to successfully address those
challenges.
Semiconductors,usedbutgenerallynotseenintheend-product,havebecomeanindispensablepartofour
lives. They are the means to ever decreasing energy consumption coupled with the same or increasing
performance. This is true in automobiles, just as it is for applications powered by electricity. Infineon’s products
arekeyinautomotivehybrid-drivesystems,renewableenergy,cloudcomputing,anddigitalsecurity.
In the expansion of renewable energy sources, such as wind power and solar energy, components from Infineon
play a major role not only in the conversion of renewable energy into electricity but also in feeding that
electricity into the grid. In the area of electricity consumption, efficiency is a sustainable driver of growth
because rising electricity prices and CO2 emissions result in increasing public interest on the part of both,
private customers and companies in efficient and intelligent solutions for energy management.
For decades, semiconductors have been a significant factor in electric vehicles. Against the backdrop
of rising fuel prices and the need for reduced CO2 emissions, the growing demand for environmentally friendly
carswithlowfuelconsumptionisevident.High-performancesemiconductorsarecrucialcomponentsin
electric motors, making efficient use of energy stored in batteries.
Electronic transactions have revolutionized numerous areas of daily life, including, for example, banking, ticket
systems in public transportation, identity cards, access systems, and data processing. Given the increase in
attacks on data of this kind and the need for additive functions, microelectronics plays a pivotal role to
safeguard security in networked systems.
Our dedication to environmental protection, to which we have been committed since the Villach site was
establishedin1970,ismultifaceted:ourproductionfacilitiesareequippedwithstate-of-the-artenvironmental
and safety technology and the office buildings are supplied by geothermal or district heating. In 2011, we sent
outaclearsignalforafuturethatconservesboththeenvironmentandresourcesbyopeningane-charging
station for the Infineon staff at the Villach site.
1 Introduction by the Management Board of Infineon Austria
Introduction
In2012,wefollowedupwith“e-mobilitydays”,wherearound500membersof
ourstaffwereofferedtheopportunitytotest-driveelectricvehicles-fromb-bikes
toe-scooterstoelectriccars.
Infineon perceives itself as a High Performance Company that aspires to constantly
expand its own capacity to excel through innovation. In Austria, Infineon puts
this into practice through consistent quality and innovation management. In 2012,
the company’s commitment was recognized when it received the State Award for
Quality conferred by the Austrian Federal Ministry of Economics, Family and Youth
in cooperation with Quality Austria GmbH.
For the achievement of being the first company in the world to succeed in
producingpowerelectronicchipson300-millimeterthinwafersattheVillach
plant, we were honored with the State of Carinthia’s Research and Innovation
Award in 2012. Furthermore, for its commitment in the area of CSR (Corporate
Social Responsibility), Infineon Austria Technologies AG was awareded its fourth
TRIGOS Carinthia Award in 2012. This year, the focus was on environmental
achievments, highlightinhg for example the conversion to district heating fuelled
by a new Kelag biomass power plant at the Villach site. The plant also benefits
the inhabitants of Villach.
Finally, we should mention the net ecological benefits created by the Infineon
group. Our innovations and solutions in the areas of energy efficiency, mobility
and security are not only the means to Infineon’s ecologically sustainable
applications; they also contribute to the increased ecological efficiency of our end
products throughout their entire lifecycle. We calculate that Infineon has an
ecological footprint that translates to 1.1 million metric tons of CO2 per year.
Using Infineon products can save approximately 4.7 million metric tons of CO2
annually. The net benefit is therefore over 3.6 million metric tons of CO2 –
an ecological balance sheet we are proud of.
1 Introduction by the Management Board of Infineon AustriaMag. Dr. h.c. Monika KircherChief Executive Officer (CEO)
Dipl. Ing. Dr. Sabine Herlitschka, MBAChief Technology Officer (CTO)
Dipl. Ing. (FH) Oliver HeinrichChief Financial Officer (CFO)
Monika Kircher, CEO Sabine Herlitschka, CTOOliver Heinrich, CFO
4 Site
2.1 Company Profile of Infineon Technologies Austria AG
Infineon Technologies Austria AG, headquartered in Villach, is a subsidiary of
Infineon Technologies AG. Semiconductor and system solutions for the
automotive, industrial and security sectors as well as for computing and
consumer terminals are developed and manufactured at the Villach site.
Drawing on our technological expertise, we set trends and unfold our strengths
along the entire value chain. Our quest is to impress our customers by coming
upwithhigh-quality,pioneeringproductsinaninnovativeenvironment.
The number of employees working for Infineon Austria at the Villach, Klagenfurt,
Graz, Vienna and Linz sites exceeded 3,000 by the end of the fiscal year
(September 30, 2012). About 1,050 of them are engaged in research and
development (R&D).
2 The Company Infineon Technologies AG
Foralivablefuture,weneedinnovativetechnologiesformoreenergy-efficient
systems, flexible transport concepts and security solutions for digital data
exchange.High-performancesemiconductorsfromInfineonTechnologiesAG
provide the key elements for future growth markets.
Infineon Technologies AG offers semiconductor and system solutions addressing
three central challenges to modern society: energy efficiency, mobility and
security. In the 2012 fiscal year (ending September), the company reported sales
of Euro 3.9 billion, with approximately 26,700 employees worldwide.
The total site area, including roads and paths, is 188,270 m2 of which approximately 25 percent is occupied by buildings. Overall, 35,138 m2 are leased.
Site
In the fiscal year 2012, the company generated sales of approximately Euro 1.2 billion.
The volume of output was 15.5 billion chips. R&D expenditure came to Euro 219 million,
i.e. 20 percent of sales.
The confidence which Infineon Technologies places in the Austrian site is manifested by the
growingGroup-wideresponsibilitiesandbysignificantinvestment.InfineonAustriaholdsglobal
business responsibility for five product lines from three divisions.
2.2 Site Description
With almost 2,700 employees in Carinthia in the 2011/12 fiscal year, Infineon Austria is a major
privateemployerintheregion.Villachisregardedasthehigh-techhuboftheAlpe-Adriaregion
and offers international companies a very good business environment.
2,500 employees work in Villach. The Villach site, established in 1970, is characterized by the
combination of development, production and responsibility for business performance. Infineon
Austriahascommitteditselftoacross-divisionalinnovationdriveforgingevenclosertiesbetween
research, development and production.
Infineon’sVillachsiteislocatedintheindustryandbusinessparkonthecity’ssouth-eastern
periphery, in the immediate vicinity of the technology park which is also home to microelectronics
education and research establishments. Good transport connections are provided by the A2,
the link to the southbound rail line and Klagenfurt airport.
Designation Space in [m2]
Production space 20,767 m2
Support space 57,559 m2
Office space 25,570 m2
Laboratory space 5,189 m2
IT space 503 m2
The net utilizable floor space is as follows:
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2.3 Activities and Products
Semiconductor solutions for the automotive, industrial and security sectors –
for example, tire pressure measuring systems, engine management chips,
energy-efficiencychipsorcontactlesssecuritychipsforIDdocuments–arethe
focal areas to which Infineon devotes itself at the sites in Austria.
Villachishometoafront-endmicrochipfabmanufacturingchipsonwafersin
various technologies and complexities, in as many as 400 production steps.
The guiding principle of addressing markets of the future with trailblazing
innovations is particularly pertinent to microchip production.The breakthrough in
manufacturing technology announced in October 2011 is an excellent example of
high performance and innovation from Austria: Infineon was the first company in
theworldtosucceedinmanufacturingpowerelectronicchipson300-millimeter
thin wafers at the Villach plant.
ResearchanddevelopmentattheVillachsiteisfocusedonenergy-efficient
solutions for the automotive and industrial sectors, in Graz on contactless chip
technologies for security applications. Research and development on
semiconductor technologies for automotive applications is carried out in both
Graz and at DICE GmbH, the affiliate in Linz.
Investment
Along with the business responsibility for five product lines, global functions such
as marketing are also located in Villach. Along with the business responsibility for
five product lines, global functions such as marketing are also located in Villach.
Investment to Strengthen the Business Location Austria
In the past two fiscal years, Infineon Technologies invested Euro 453.7 million in
thebusinesslocationAustria.Thisinvestmentwentprimarilytowardsthe300-mm
thin-waferpilotlineforpowerelectronics,researchanddevelopment,and
infrastructure expansion.
Main items are the 2,000m2 additional cleanroom in production and the new
government-certified(“klima:aktiv:haus”)researchbuildingwithits7,500m2,
providing space for 400 workplaces and 40 measurement stations.
In the past two fiscal years, a total of almost 700 new jobs were created, the
majority of them in Carinthia. Currently, work is progressing on the expansion of
the Graz development center.
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2.3 Tätigkeiten und Produkte
Halbleiterlösungen für Automobil, Industrie, Sicherheit – zum Beispiel Systeme
für die Reifendruckmessung, Chips zur Motorsteuerung, Energieeffizienzchips oder
kontaktlose Sicherheitsbausteine für Ausweise – sind die Schwerpunkte, denen
sich Infineon Technologies Austria AG an den Standorten in Österreich widmet.
InVillachbefindetsicheineFrontend-Mikrochipproduktion,inderChipsauf
Siliziumscheiben (Wafern) in unterschiedlichen Technologien und Komplexitäten in
bis zu 400 Fertigungsschritten erzeugt werden. Der Leitgedanke, mit Innovationen
Zukunftsmärkte frühzeitig zu adressieren, trifft in der Mikrochipproduktion im
hohen Maß zu. Als ein konkretes Beispiel für Höchstleistung und Innovation aus
Österreich sei der im Oktober 2011 bekannt gegebene Durchbruch in der
Fertigungstechnologie genannt: Infineon gelang es als erstem Unternehmen welt-
weit,imVillacherWerkLeistungselektronik-Chipsauf300Millimetergroßen
Dünnwafern zu fertigen.
Der Standort fokussiert im Beriech Forschung und Entwicklung insbesondere
auf energieeffiziente Lösungen für Auto und Industrie, in Graz auf kontaktlose
ChiptechnologienfürSicherheits-anwendungen.SowohlinGrazwieauchbeider
Linzer Beteiligungsgesellschaft DICE GmbH wird an Halbleitertechnologien für
automotive Anwendungen geforscht und entwickelt.
3 Unternehmenspolitik Arbeitssicherheit, Gesundheits-undUmweltschutz
3 Company Policy: Environmental Protection, Safety and Health, and Energy Management
For Infineon, a responsible environmental protection, safety and health, and
energy management policy is not limited to compliance with legal standards and
regulatory requirements. It is much rather a process of continuous improvement,
for instance of our products and of the way in which our plant and equipment
is operated.
3.1IntegratedManagement-aComprehensiveApproach
In 2005, Infineon combined safety and health, and environmental protection to
form IMPRES (Infineon Integrated Management Program for Environment, Safety
and Health), which covers all processes, strategies and corresponding goals in
the areas of safety, health and environmental protection worldwide.
Infineon Technologies has decided to integrate its energy management system
under IMPRES. Consequently, IMPRES now has a broader scope, standing for
Integrated Management System for Environment, Safety, Health and Energy.
Infineon Technologies holds a worldwide matrix certification according to the
ISO 14001 and OHSAS 18001 standards. Since the end of 2012 its European sites
are additionally certified according to ISO 50001.
The initial visit at Villach took place in September 2012 and the corresponding
audit in November 2012.
Integrated Management
Throughourday-to-dayactionsandwithour
innovations, we actively contribute to a sustainable
society. The measures we take for safety, accident
prevention and health are consistently aimed at
minimizing potential risks at all workplaces in order to
protectthehealthandwell-beingofouremployees.
By sustainable environmental protection we also mean
the efficient use of natural resources.
Potential environmental impacts are investigated at the
earliest possible moment and taken into consideration
in the development of products and processes. We try to
avoid impact to people and the environment and where
that is not entirely possible, we reduce it to a minimum.
Infineon Technologies AG manufactures semiconductors
in various countries and cultures. The responsibility for
people and the environment that arises from that fact
is an essential driver of how we act and it is reflected
in our processes. The resulting measures are an integral
component of corporate policy and are implemented
as such.
This is true of all aspects of the company, for purchasing,
or development and production, through to product
sales. Compliance with laws and regulatory requirements
is the foundation on which the actions of Infineon
Technologies are based.
update 2013
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Nut zen:Rendite, Gesellschaftliches Ansehen
Benef it :Return, Social Prestige
BASIS:Elementar ist das Erfüllen aller gesetzlichen Vorgaben
BASIS:Compliance with all statutory requirements is fundamental
Prozessoptimierte Projekte
Process-optimized Projects
Compliance with legal and regulatory requirements
is a matter of course for us.
Environmental protection, health, safety and
energy management is much more a process
of continuous improvement
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Rules and regulations concerning processes are only a beginning. Any strategy has to be lived
actively through its values in order for its goals to be achieved. Our actions are based on the
guiding principles presented below, which are taken from our IMPRES policy focusing on
environmental protection:
Throughourday-to-dayactions,ourinnovationsandourproducts,wesupportasustainable
globalsocietyandmakeenergy-efficientend-productsandapplicationspossible.
Wegobeyondcompliancewithregulatoryrequirements,workingcontinuouslyonboth-minimizingrisks
and impacts on people and the environment while also minimizing our consumption of energy and resources.
We strive to be a leader within our industry in the area of energy efficiency, now and in the future.
We contribute to climate protection by, for example, minimizing our emission of greenhouse gases
Weseeaccidentpreventionasaself-evidentobligation.Weseemotivatingouremployeesto
actively engage in health promotion as one of our responsibilities.
We ensure that our corporate environment, health, safety and energy management policy is
implemented effectively. The related technical and organizational processes required are regularly
reviewed and continuously improved.
We see supporting our goals in environment, health, safety and energy management through
responsible action as the responsibility of each and every employee. Broadening and promoting
awareness at all levels is the constant responsibility of management.
We challenge those with whom we do business to follow our guidelines. We work cooperatively
withpublicauthorities,associationsandnon-governmentalorganizations.
IMPRES
3.2 Organization of the Environmental Management System
Environmental protection is for us not a matter of paying lip service. We see it as a
corporate duty and as such it is part of Infineon’s social responsibility. To do justice to
the high standards in environmental protection, we in the Infineon Group have a
structured and detailed approach to this topic and have unambiguously defined the areas
of responsibility for the various tasks, based on our IMPRES.
IMPRES: Synergie zwischen Verantwortung für Mensch und Umwelt und
wirtschaftlichem Erfolg
Compliance with legal standards and regulatory requirements is a matter of course.
However, we all know that laws are often difficult to understand. For this reason, we have
created internal rules that verifiably convert our visions in the area of environmental
protection into concrete instructions for action for each and every individual.
Laws
Integrated management
system
Targets and IMPRES-policy within
framework of integrated management system
IMPRES related (support) processes and upstream (business) processes
IMPRES related recommendations, regulations and documentation
External Duties and Customer Requests
Company Visions
Internal Principles
Internal Workf low
Evidence Site
Cor
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Man
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Sta
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The diagram below gives an overview of how we meet our responsibilities in workplace safety,
health, environmental protection and energy management using as an example environmental
protection:
Figure: Simplified representation of the organizational structure based on the IMPRES manual
Infineon Management Board Business Continuity Environmental & Operational Affairs
Site Management
Management with Support Site Environment and Safety
Employees
Contractual Partners
Definition of policyResponsibility for system of managementStrategy and guidanceImplementation of superior documents and processes Audit and control etc.Overall communication etc.
Appraisal of requirements in the area of environmental protection, occupational safety and healthImplementationofdepartment-relevantIMPRES-targetsandinitiativesDefinition of responsibilitiesEncourage conscious action of employees, eg. trainings etc.
Provision of resources etc.ImplementationofIMPRES-PROGRAMProvisionofsite-agentsRegular control
AbidebytheIMPRES-relevantguidelinesandworkingplaceregulationsAwareness of environmental impacts and hazards / hazards in the area of occupational safety and healthParticipation in trainingsContribute ideas for continuous improvement of IMPRES
AbidebytherelevantIMPRES-concernsAssigned Department provides a coordinator who supervises environmental protection and occupational safety topics in external companies
•
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IFAG
IFAT
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Infineon Austria has been integrating environmental protection into corporate action for many
years and has been EMAS validated since 1997. The Villach site, which received the EMAS award
in 2009 for constantly combining environmental and economic objectives, was in 2010 furthermore
the first company in Austria assessed under the EMAS III Regulation (EG No. 1221/2009).
The documentation of Infineon‘s environmental, health, safety and energy management includes
notonlytheIMPRESmanualbutalsoallIMPRES-relatedprocessdescriptions,working
instructions and other documents relevant to IMPRES.
Within the framework of IMPRES, the integrated management system throughout the Villach site is
regularly subject to internal and external audits. For the purpose of continuous improvement and
verification of activities, regular evaluation of the status of the management system is performed
by upper management or site management as part of a management review.
EMPLOYEES
3.3 Employee Involvement
Some 2,500 staff at the Villach site contribute with their motivation, flexibility and
know-howtothelong-termcorporatesuccessofInfineonTechnologiesAustriaAG.
Apart from permanent exchange of knowledge within the Group, education and further
training play an important role in all areas.
Soon after joining the company, our employees are briefed in their first systematic
training session and at the end of the following quarter in the areas of environmental
protection, safety, health and energy. In addition, they are kept up to date with respect to
various environment issues by intranet publications addressing environmental protection
andenvironment-relatedaspects,bytheEnvironmentalStatementandthroughposters
displayed at the site.
A special exhibition was devoted to environmental protection and safety at the site during
the Innovation and Family Days held during the fall of 2010 and in May 2012.
InfineonAustriakick-startedthe“e-age”attheVillachsitewiththeopeningofthe
e-chargingstationinSeptember2011.InOctober2012,thecompanyhelditse-mobility
days. The purpose was to make electromobility accessible to our employees in a number
ofdifferentways.Inall10electriccarsofdifferentmakes,severale-scootersande-bikes,
aswellasavarietyofe-gadgetswereavailabletotest.
The potential of ideas is a valuable asset for Infineon and an important way of generating
continuous improvement. Our staff´s ideas and suggestions for improvement are rewarded
monetarilyandaremanagedthroughthe“YIP”(YourIdeaPays)platform,theInfineon-
wide Ideas Management Program.
Increasing employee workplace involvement in company activities through the company’s
suggestion scheme is discussed in more detail in the section titled Energy.
256 employees seized the opportunity to take an environmentally friendly tour from Villach around Lake Faak in an electric vehicle.
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3.4 Occupational Safety and Health
In consultation with the Management Board and the employee representation, the
Company Medical Service at the Villach site initiated a company health promotion project
backin2003.Theobjectiveofthe“HealthyandActive”projectwastopromoteand
support health awareness among staff through suitable measures. The topics addressed
by this project are holistic and encompass nutrition, exercise, preventive medical
check-ups,addictionpreventionandstressmanagement.
Since 2006, company health promotion has been an integral part of the corporate culture
at Infineon Technologies Austria AG. Various aspects of company health promotion are
prioritized and various exercise, health protection and relaxation activities are encouraged.
Infineon has received a number of awards for its strong commitment to sustainability.
Mostrecentlyitwasawardedthe“QualitySealforCorporateHealthPromotion2012-2014”
bytheorganizationFondsGesundesÖsterreichforits“HealthyandActive”program.
Intheareaofphysicalhealth,onefocalareaistokeepa“healthyback”.Apartfromthe
well-attendedtrainingsessionsinthefitnesscenter,wealsoofferin-house,instructor-led
Pilates,yoga-gyrokinesis,lifekineticsandFeldenkraisexerciseprograms,designed
specifically for employees who work seated at video display terminals or microscopes
or in laboratories. Jogging, Nordic Walking, mountain biking, full body workouts and the
activities of the company sports communities are also promoted.
In the area of prevention with regard to mental health, the program offered to employees
includesstressmanagementseminars,bio-feedbackstresstests,burn-outpreventionand
other measures, such asmediation and coaching. Regular relaxation training programs are
available on site: autogenic training, muscle relaxation based on Jakobson's techniques,
breathing techniques.
In addition, employees have the option to select at least one healthy menu from the range
of dishes offered by the company canteen that meets defined nutritional criteria.
Occupational Safety
40
35
30
25
20
15
10
5
0
Betriebsunfälle IFAT im Verhältnis zu vergleichbaren Betrieben Österreichs
anerkannte Betriebsunfälle (von AUVA anerkannt)
Quelle: AUVA Statistik
Page 1 Copyright © Infineon Technologies 2011. All rights reserved. 05.06.2012
Indust
rial
acc
iden
ts
* Forecast for 2012 / An AUVA report for 2012 is not available (as at February 2013), and therefore no current industry figures are available.
Source: AUVA
2005 2006 2007 2008 2009 2010 2011 2012
Infineon Technologies Astria AG 9 5 8 5 8 7 10 7*
Austriamicrosystems AG 9 12 9 3 8 7 6
EPCOS OHG 27 30 21 13 13 27 12
Industry figures 36 32 28 35 25 26 22
Theaimofoccupationalmedicineistopreventwork-relatedillnessesandoccupationaldiseases.
Knowledge about workplaces, work processes, work equipment and working materials is the prerequisite
for such work. Workplaces are evaluated by safety experts and specialists in occupational medicine regularly
and as circumstances require. Workplaces are continuously improved, technically and ergonomically.
Occupational safety has been an integral part of the company ever since the workplaces at the Villach
factorycameintobeing,notonlyonalegalbasisbutalsoonthebasisofthein-houserules,anditis
constantly developed further. This is also evident from the very low rate of accidents at work at the Villach
site, in relation to standard figures from the electronics industry in Austria.
Incidence of occupational accidents in industrial enterprises (per 1000 employees)
AUVA recognised
16
3.5 Observance of Legal Regulations Relevant to the Environment
Legal regulations and other relevant regulatory requirements (decisions) are rigorously
observed by the company. The company also takes into account conditions arising from
approvals or, if applicable, from orders issued by public authorities, as well as matters of
insurance law. Current legal regulations relevant to the site in the fields of environmental
protection (including energy), safety and health are listed in a law directory. This applies
correspondinglytoself-regulatorycommitments,conditionsarisingfromapprovalsand
orders issued by public authorities, etc. The responsible departments are precisely defined
at the Villach site. The law directory is regularly checked and, if necessary, adapted.
It provides, for example, the basis for process descriptions and other workplace regulations
in the areas of workplace safety, health, environmental protection and energy.
Figure:Display of the legal regulations relevant to occupational safety, health, the environment and energy in the law database
Legal Regulations
Employees at the Villach site need to be aware of any risks their work may pose to people or the
environment. To this end, company rules determine employees’ responsibilities at the workplace.
Members of management staff are required to identify any hazardous areas or sources of danger in their
areas of work or their areas of responsibility, or to have them identified by others, that could result in
dangertoemployees,non-employeesortheenvironment.
Further, it is also within the duties of management staff to take measures to prevent damage, and to
check the effectiveness of those measures on a regular basis. Where checks reveal deficiencies, the cause
must be identified and appropriate corrective measures must be taken.
Consolidation of Plant Approvals
The Environmental Management Act (§ 22 UMG) gives companies that employ an environmental
management system in accordance with EMAS the opportunity to combine all federal law approvals for a
plant in a single certificate.
Figure:Excerpt from approvals documentation
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The process of consolidation of approvals, which is undertaken on a voluntary basis
beyond what is required by law, was successfully completed by Infineon Technologies
Austria AG in May 2005.
The process resulted in a summary of the approvals granted for operating the
manufacturing plant of the Villach site. This met the documentation and monitoring
requirements in terms of legal certainty in accordance with the latest laws in effect at
that time. The decision was renewed in January 2010 and is due to be updated again in
the 2014/15 fiscal year.
In addition to a simplification of administrative procedures, both in government agency
activities and in regulatory management, consolidation has provided additional advantages
for the Villach site:
• Legal certainty as a result of the review by the authorities of the
consolidated approval
• Simplification of future revision procedures on the basis of the
consolidation approval
• Summary of all national approvals in a uniform consolidation approval
• Clear approvals structure
• Reduced bureaucracy and fewer procedures requiring involvement of
public authorities
Emergency Management
3.6 Emergency Prevention and Management
Protection of people and the environment is given priority at Infineon. This is why the company has set up
a professional emergency management system. In collaboration with the respective emergency and rescue
services, all required safety and precaution measures have been taken to prevent any conceivable incident
or limit its consequences as far as possible. In addition, all vital processes relevant to the environment are
monitored via the control system and by carrying out continuous measurements.
In the last fiscal year, 58 rescue exercises and training sessions took place in connection with fire
protection, chemicals, technical assistance and preventive fire protection.
Handling Hazardous Materials
At the Villach site, required hazardous materials are stored, transported and used in a safe manner in
accordance with the hazardous properties of the materials. Delivery to the site takes place by the use of
specially licensed vehicles and containers. Specially coated leakage and retention basins are present on site
sothatanyaccidentalleakageoffluidscanbereliablyprevented.In-planttransport,forexamplefrom
chemicals or gas storage to the supply systems serving production, is carried out in accordance with strict
safetymeasures.Deliverytotheproductionfacilitiesbydouble-walledpipesismonitoredbysensorsfor
leaks.Ourproductionfacilitiesareequippedwithcomprehensivesafetyandemergencyshut-offsystems
operated by the control room, which is manned 24 hours a day, seven days a week. In the event of an
incident, the immediate measures necessary are speedily initiated from the control room.
Source: Information folder for neighbors and local residents 2005
Raising the alarm
ACCIdEnt / MAjOR InCIdEnt
Emergency force and assistants
technical Off icer-. in-charge (fire brigade, police, Red Cross, etc.) onsite
disaster preparedness organization
necessity for official measuresUse of private companies
Official authority leadership
Consult independent
experts
Involvement of the Carinthian
Government
Private companiesOther
Public Relations
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0 0 1 0 1 0 1 11 0 0 1 1 1 0 01 0 1 0 0 1 0 11 0 0 0 0 1 0 00 1 1 0 1 0 1 10 0 0 1 0 0 1 0
1 0 0 1 1 0 1 11 1 0 1 0 1 0 00 0 0 0 0 1 0 11 0 1 0 0 1 1 00 0 1 0 1 1 1 11 0 1 1 0 0 1 0
0 0 0 0 1 0 1 01 0 0 0 0 0 0 11 0 1 0 0 0 0 10 0 1 1 0 1 1 00 1 1 0 1 1 1 10 0 0 0 0 0 1 1
4 Environmental ImpactsData, Facts and Figures
Environmental impact is every positive or negative change to the environment
that occurs entirely or partly as a result of the activities, products or services
of an organization. Infineon is aware of the presence of various environmental
impacts and is pledged to identify new aspects and to take corresponding action
where necessary.
4.1 Input/Output Analysis
In order to minimize the environmental impacts of the Villach site, processes are
optimized on the basis of systematic recording and evaluation of energy and
material flows. In particular, resources are used as efficiently as possible by
means of targeted treatment and recycling.
Environmental Impacts
Activities monitoring the efficiency of the specific policies and regulations for
minimizing direct and indirect environmental aspects include those of the
in-plantDisasterPreventionOrganization(DPO),strategicandpractical
exercises involving the company’s action force, as well as audits and site
inspections.
However, special importance is attributed to direct environmental aspects given
their potential impact on the environment. The sections below report on the
direct environmental aspects applying to the Villach site, such as the energy,
fresh air, water, chemicals and other materials required, and the lost heat,
waste gases, waste water and other waste produced.
Source: Consolidated Environmental Statement 2009 (revised)
Recycling of Chemicals
Waterrecycling
Internal Recycling
Recycling of Metals
Waste Water disposal
Waste Water
Waste Water Purif ication
Waste Separation
WasteRecycling of Waste
Waste disposal
Wafer with
Chips
FROntEnd-PROdUCtIOn
noise Protection Activities
noiseEmissions
Emissionsto the Air
Exhaust Air treatment
Heat Recycling
Rec
ircu
lating
Air
Raw Wafers
Energy
Fresh/Recirculationg Air
Water
Gases &Chemicals
OtherMaterials
22
Raw materials and supplies 2009/10 2010/11 2011/12
Wafers 72.07 97.38 102.93 t
Gases 56,457.66 61,315.87 73,304.29 t
Wet chemicals 3,407.94 4,289.67 4,854.91 t
Photo chemicals 1,134.95 1,350.63 1,213.16 t
CMP chemicals and slurries 192.16 140.95 147.90 t
Other chemicals 1.66 2.73 2.75 t
Chemicals for facilities 3,575.91 4,020.10 4,580.67 t
Metals (in products) 33.35 39.07 32.03 t
Water 4,159,420 4,621,470 4,516,175 m3
Ultrapure water 1) 1,344,829 1,440,200 1,471,703 m3
Air 10.40 12.48 12.93 Nkm3
Circulating air 47.40 49.77 59.83 Nkm3
Energy
Primary and secondary energy 776,875 825,282 905,432.651 GJ
Self-produced energy 2) 229,784 226,170 228,830.581 GJ
INPUT der Geschäf tsjahre 2009/10, 2010/11....
Production waste 3) 2009/10 2010/11 2011/12
Non-hazardous waste 2,477.64 3,210.91 3,523.20 t
Volume of which for recovery 195.73 411.11 486.50 t
Hazardous waste 1) 1,054.56 1,231.82 1,805.95 t
Volume of which for recovery 1) 815.82 1,024.19 1,602.46 t
Solvent recycling residues 146.99 185.51 156,93 t
Emissions to the air
Total emissions to the air 10.45 12.53 12.99 Nkm3
of which point-sourced emissions 2) 8.88 10.65 11.04 Nkm3
…with PFC contamination 0.01 0.01 0.01 Nkm3
Waste water
Total waste water 4,048,490 4,500,819 4,466,187 m3
Production waste water requiring treatment
1,615,337 1,871,731 2,072,449 m3
OUTPUT der Geschäf tsjahre 2009/10, 2010/11.....
1) ca. 90% des Reinstwassers - Erzeugung durch Rückgewinnung aus Kühlwasser2) Energie aus Wärmepumpen und Abwärme
3) ohne notif izierte und extern recycelte Lösungsmittel 4) Unter diese Angaben fallen die Abluftvolumenströme aus Reinraumbereichen und gefasste Abluftvolumenströme aus anderen Standortbereichen
INPUT
OUTPUT
Raw materials and supplies 2009/10 2010/11 2011/12
Wafers 72.07 97.38 102.93 t
Gases 56,457.66 61,315.87 73,304.29 t
Wet chemicals 3,407.94 4,289.67 4,854.91 t
Photo chemicals 1,134.95 1,350.63 1,213.16 t
CMP chemicals and slurries 192.16 140.95 147.90 t
Other chemicals 1.66 2.73 2.75 t
Chemicals for facilities 3,575.91 4,020.10 4,580.67 t
Metals (in products) 33.35 39.07 32.03 t
Water 4,159,420 4,621,470 4,516,175 m3
Ultrapure water 1) 1,344,829 1,440,200 1,471,703 m3
Air 10.40 12.48 12.93 Nkm3
Circulating air 47.40 49.77 59.83 Nkm3
Energy
Primary and secondary energy 776,875 825,282 905,432.651 GJ
Self-produced energy 2) 229,784 226,170 228,830.581 GJ
INPUT der Geschäf tsjahre 2009/10, 2010/11....
Production waste 3) 2009/10 2010/11 2011/12
Non-hazardous waste 2,477.64 3,210.91 3,523.20 t
Volume of which for recovery 195.73 411.11 486.50 t
Hazardous waste 1) 1,054.56 1,231.82 1,805.95 t
Volume of which for recovery 1) 815.82 1,024.19 1,602.46 t
Solvent recycling residues 146.99 185.51 156,93 t
Emissions to the air
Total emissions to the air 10.45 12.53 12.99 Nkm3
of which point-sourced emissions 2) 8.88 10.65 11.04 Nkm3
…with PFC contamination 0.01 0.01 0.01 Nkm3
Waste water
Total waste water 4,048,490 4,500,819 4,466,187 m3
Production waste water requiring treatment
1,615,337 1,871,731 2,072,449 m3
OUTPUT der Geschäf tsjahre 2009/10, 2010/11.....
1) ca. 90% des Reinstwassers - Erzeugung durch Rückgewinnung aus Kühlwasser2) Energie aus Wärmepumpen und Abwärme
3) ohne notif izierte und extern recycelte Lösungsmittel 4) Unter diese Angaben fallen die Abluftvolumenströme aus Reinraumbereichen und gefasste Abluftvolumenströme aus anderen Standortbereichen
INPUT 2009/10, 2010/11 and 2011/12 fiscal years
1) Approx. 90% of ultrapure water production by recovery from cooling water2) Energy from heat pumps and lost heat
OUTPUT 2009/10, 2010/11 and 2011/12 fiscal years
1) Without notif ied and externally recycled solvents2) Including the volume of waste gas from cleanroom areas and the volume of waste gas collected from other site areas 3) For waste gas statistics, see page 34 (Waste gas)
Input-Output
In this Consolidated Environmental Statement, the data in the input and output
tables have again been presented across three years.
Compared with the previous year, the significant increase in the total input of
resources and the associated rise in the specific consumption (consumption
normalized to cm2 manufactured silicon) for the 2011/12 fiscal year result mainly
from the expansion of the site (Hall 16A, additional 2,000 m2 of floor space),
relatedshiftsintechnologyandunder-utilizationofthenewlyavailablecapacity
due to market conditions. Furthermore, Building 7 added approximately
8,000 m2 of office floor space to the site.
Based on the optimization measures introduced during the last phase of
under-utilization,particularlyintheareaofenergy,theincreaseinspecific
consumption of resources was however kept to a lower level.
Also in the area of emissions, the rigorous continuation of the CO2 reduction
program allowed the specific emission of CO2 equivalents essentially to be held
constant last fiscal year. See section Exhaust Air.
With a view to render data comparable and enable benchmarking within the
framework of the guiding principles of the EMAS III Regulation, data reported in
the2009/10fiscalyearwasarea-normalized,i.e.reportingisbasedonthe
specific consumption of resources per cm2 of silicon wafer manufactured.
4.2 Direct Environmental Aspects
Direct environmental aspects are under the company’s immediate control and are
directly linked with the activities, products and services.
Examination of legal regulations and material flows are used for identification of
environmental aspects. The most obvious direct environmental aspects are
emissions into the air and into water, waste and use of resources and energy.
The environmental aspects of our products are described in the section
concerning indirect environmental aspects.1) Without notif ied and externally recycled solvents2) Including the volume of waste gas from cleanroom areas and the volume of waste gas collected from other site areas 3) For waste gas statistics, see page 34 (Waste gas)
24
Energy
Energy and saving energy is taken very seriously at Infineon Technologies Austria. Alongside the
focus on adequate management of greenhouse gas emissions, much emphasis is put on a
responsibleuseofenergyin-house.Theprocessesareoptimizedbysystemicallyrecordingand
evaluating energy and material flows, so as to implement measures targeted at maximizing the
efficiency of consumption.
Our „Energy Efficiency Project“In order to maximize efficiency in energy and resource input and to learn lessons from the times
ofunder-utilization,asite-wide“EnergyEfficientProject”,whichalsodealswithinnovative
approaches to resource optimization, was launched in the 2008/2009 fiscal year. The project
headed by a Strategic Energy Manager continued last fiscal year with a focus on innovation.
Inviewofrisingenergyprices,thegoaloftheprojectisenergy-efficientproductionofourproducts,
withemphasisonsustainableenergysavingsandespeciallyresource-andenergy-optimizedplant
utilization(seesectionThe“BreathingFactory”).Intheinterestofanintegratedapproach,all
consumption and all the costs of energy and resources, above all for electricity, chemicals, gases,
heat, water and waste, are to be reduced. The Energy Efficiency Project has so far produced
numerous subprojects that are described at the end of this Environmental Statement in the table of
implemented measures.
Employee Motivation Program
Withaviewtoensuringcontinuousparticipation,thein-houseideamanagement(YIP)callsupon
its employees to submit ideas that contribute to the overall reduction of energy consumption.
In the last fiscal year, approximately 7% of the ideas and proposals submitted related to energy,
environmental protection, safety and health. Proposals relating to energy, accounted for the
largest proportion at almost 3% of the total ideas submitted.
Environmental Aspects
Current Developments
A consumption target for the site’s specific electricity consumption for the 2011/12
fiscal year was stipulated, based on the measures set forth in the environmental
program and on the planned utilization of production capacity. As a result of
the technology innovations already discussed and the expansion of site facilities
undertaken, we view even a linear development in electricity consumption as a
challenging goal.
As discussed below, in semiconductor manufacturing, electricity and media con-
sumption in particular are to a large degree (in the case of energy typically
50 percent) independent of the number of units produced but are required in order
to maintain the operational plant and the installed production capacity in addition
to cleanroom quality. In other words, all equipment, systems and subsystems
need almost as much energy in standby mode as they do when in full operation.
This illustrates the necessity of a sustainable strategy for resource reduction.
The “Breathing Factory”
The graphs below show energy consumption as a function of capacity utilization
for wafer production. The consumption of electrical energy in semiconductor
manufacturing is (see graph for energy consumption – schematic) typically almost
constant despite significant variations in wafer production (capacity utilization).
Since extreme variations in demand and capacity utilization occur especially in
thesemiconductorindustry,itisvitallyimportanttoprepareanenergy-and
cost-optimizedsleepmodeorcoldsteelscenariofortheproductionplantfor
phasesofunder-utilization.
Oneofthegoalsofthe“EnergyEfficiencyProjects”istokeepproduction
equipmentreadyforproductionoperationsduringphasesofunder-utilization
of capacity but, at the same time, to reduce the consumption of resources and
energy to a minimum or to power down entirely.
26
In the course of our “Energy Efficiency Projects“, we have already seen our first significant successes
(seegraphforon-siteenergyconsumptionandcapacityutilizationbelow).Numerousmeasureshave
beentakenunderthecentralthemeofa“breathingfactory”withthegoalofreducingenergycon-
sumption in periods of lower utilization of production capacity.
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Ener
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Energieverbrauch einer Halbleiterfertigung bei unterschiedlichen Auslastung (schematischer Verlauf)
normierter Energieverbrauch normierte Kapazitätsauslastung K
apaz
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ausl
astu
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Ene
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rauc
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Zeitachse
Energieverbrauch und Kapazitätsauslastung am Standort
normierter Energieverbrauch normierte Kapazitätsauslastung
Kap
azitä
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Ene
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Zeitachse
Energieverbrauch und Kapazitätsauslastung am Standort
normierter Energieverbrauch normierte Kapazitätsauslastung
Kap
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Ene
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Energieverbrauch und Kapazitätsauslastung am Standort
normierter Energieverbrauch normierte Kapazitätsauslastung
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7
1 2 3 4
Ener
giev
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Energieverbrauch einer Halbleiterfertigung bei unterschiedlichen Auslastung (schematischer Verlauf)
normierter Energieverbrauch normierte Kapazitätsauslastung
0
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1 2 3 4
Ener
giev
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Energieverbrauch einer Halbleiterfertigung bei unterschiedlichen Auslastung (schematischer Verlauf)
normierter Energieverbrauch normierte Kapazitätsauslastung
The graph below shows the utilization of production capacity (blue) and the associated energy
requirement (red), and illustrates very well that energy requirements now fall significantly with lower
production levels.
Timeline
Timeline
Schematic representation of energy consumption in semiconductor
manufacture for varying capacity utilization
Corresponding energy demandCapacity utilization
Energy consumption and capacity utilization at the site
Ener
gy c
onsu
mpt
ion
Capa
city
utiliz
atio
n
Corresponding energy demand Capacity utilization
Ener
gy c
onsu
mpt
ion
Energieeffizienz
Switch to district heatingExpanding on earlier sustainability measures, such as the use of geothermal
energy for the provision of air conditioning in B06, we switched from natural gas
tobiomass(wood)-fireddistrictheatinginApril2011,cateringforheatingand
air-conditioningneeds.Usinglocalrenewablebioresourcesnotonlypermits
optimization of the site’s carbon footprint, but also achieves greater
independence from the international gas market and hence increased security of
supply. A regional and regenerative heat supply has been implemented by the
regional energy provider Kelag by means of a new biomass power plant in Villach
with an output of 16 MW and an expansion of the existing heating network by
13 km in the south of the city. We have therefore been able to replace
approximately 70 percent to 80 percent of the gas consumption by district
heating, as planned.
On the basis of the sustainable energy concept, the Villach site of Infineon
Technologies Austria thereby has become the region’s largest customer for
heatingwithanannualdemandofapproximately12.5millionkilowatt-hours,
constituting extra regional value added. Moreover, as a result of Infineon’s heat
supply contract and the associated expansion of district heating in Villach by the
regional energy provider, safe and environmentally friendly district heat can be
offered to new potential customers.
Energy-efficient expansion of the siteThe new office and laboratory annex, Building 07, is also supplied by sustainable
energyandhasstate-of-the-artLEDlightingtechnology.Inadditiontoensuring
high-qualitythermalmanagementandcontrolled,optimizedutilizationofsolar
irradiation, the energy concept of the new building employs
the locally available, largely biogenic and regenerative district heating as its
energy carrier.
District Heating
28
The building can be assigned to efficiency class A according to OIB (Austrian Institution of
Construction Engineering) guideline No. 6. The specific heat demand is approximately 30 percent
below the level currently required. Particular attention was paid to the glazing due to the high
proportion of window area. The glazing system used with thermal insulation and solar shading was
optimized to reduce heat loss, minimize solar heat gain during the cooling period, provide sufficient
daylight to avoid artificial lighting and to use the solar irradiation during the heating period.
Asolarthermalsystemhasbeeninstalledontherooftoheatwater.Thefullyair-conditioned
building is equipped with a mechanical ventilation system with heat recovery and ≥ 65 percent
efficiency. The ceilings with integrated cooling system/cooling panels in the common rooms are an
additionalmeasuredesignedtoenhancethermalcomfortandemployeewell-being.
Thenewbuildingisgovernment-certified(“klima:aktiv:haus”).
Energy Statistics
Overall Achievement 2500 Pieces mounted 589,050 KWh (saved power)
Savings compared to conventional lighting systems => - 64%
Changeoverduringmaintenanceandramp-up
The graphic below presents an overview of current LED use at the Villach site
Electric charging station for electromobilityAsdiscussedabove,ane-chargingstationwasbuiltonthepremisesofInfineonTechnologies
Austria AG in August 2011 as a joint project with the regional energy provider Kelag.
The opening sent out a clear signal for environmentally friendly and resource efficient mobility.
Meeting room Hall 16 Floor area
Floor area, toilets
Entrance cleanroom floor area
Emegency lighting
Office space
Cleanroom 650m2
EnergieeffizienzEnergy Statistics
Intended for use by customers and employees, the facilities allow charging as
manyasfourelectriccars,fivee-scootersand20e-bikesatatime.
A photovoltaic system mounted on a carport with an output of 3.8kWp supplies
theelectricity.Inaddition,acompany-ownede-carisavailableforshortbusiness
trips.
The pilot station is also used to collect data on the electrical performance of the
photovoltaic system and vehicles that are charged. In that way, data is supplied
for research and development in the field of energy efficiency and charging
technology. Our semiconductor products support an intelligent infrastructure as
they enable energy to be generated, transmitted and fed into batteries as well as
back into smart grids for environmentally friendly, sustainable electromobility.
This again highlights that innovative semiconductor solutions play a central role
inpromotingthebreakthroughoffuture-orientedmobilityconceptsandpavethe
wayforcommerciallyviableandcost-effectiveelectromobility.
A more detailed discussion of this topic is presented in the section “Indirect
EnvironmentalAspects”.
Site Energy Statistics
For objective presentation of the trend in energy consumption and the impact of
under-utilizationontheenergyconsumption,thefiguresarereportedina
ten-yearview.
30
bilduntertitel 8pt, line space 11pt, letter 0 pt
As the above diagram of externally sourced energy shows, the positive reduction trend of recent
years did not continue into fiscal year 2011/12. The specific electricity consumption of 0.35 kWh/cm2
was slightly above the target of 0.32 kWh/cm2 set for the 2011/12 fiscal year.
A consumption target for the site’s specific electricity consumption for the 2012/13 fiscal year was
stipulated, based on the measures set forth in the environmental program and the planned
utilization of production capacity. As a result of the technology innovations already discussed and
the expansion of site facilities undertaken, we view even a linear development in electricity
consumption as a challenging goal.
0,00
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0,08
0,0
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0,6
0,8
02/03 03/04 04/05 05/06 06/07 07/08 08/09 09/10 10/11 11/12 Ziel 12/13 Geschäftsjahr
Energieverbrauch in kWh/cm² Siliziumfläche normiert je Geschäftsjahr
Energie gesamt Strom Erdgas Fernwärme Erdöl EL
[kWh/cm²] [kWh/cm²] Energie gesamt,
Strom, Erdgas, Fernwäme
Erdöl EL
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Energieverbrauch in kWh/cm² Siliziumfläche normiert je Geschäftsjahr
Energie gesamt Strom Erdgas Fernwärme Erdöl EL
[kWh/cm²] [kWh/cm²] Energie gesamt,
Strom, Erdgas, Fernwäme
Erdöl EL
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Energieverbrauch in kWh/cm² Siliziumfläche normiert je Geschäftsjahr
Energie gesamt Strom Erdgas Fernwärme Erdöl EL
[kWh/cm²] [kWh/cm²] Energie gesamt,
Strom, Erdgas, Fernwäme
Erdöl EL
0,00
0,02
0,04
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0,08
0,0
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02/03 03/04 04/05 05/06 06/07 07/08 08/09 09/10 10/11 11/12 Ziel 12/13 Geschäftsjahr
Energieverbrauch in kWh/cm² Siliziumfläche normiert je Geschäftsjahr
Energie gesamt Strom Erdgas Fernwärme Erdöl EL
[kWh/cm²] [kWh/cm²] Energie gesamt,
Strom, Erdgas, Fernwäme
Erdöl EL
0,00
0,02
0,04
0,06
0,08
0,0
0,2
0,4
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0,8
02/03 03/04 04/05 05/06 06/07 07/08 08/09 09/10 10/11 11/12 Ziel 12/13 Geschäftsjahr
Energieverbrauch in kWh/cm² Siliziumfläche normiert je Geschäftsjahr
Energie gesamt Strom Erdgas Fernwärme Erdöl EL
[kWh/cm²] [kWh/cm²] Energie gesamt,
Strom, Erdgas, Fernwäme
Erdöl EL
Energy consumption in kWh/cm2 silicon area normalized per fiscal year with target for 2012/13
Petroleumextra-lightElectricity, Natural Gas, Total Energy Consumption
0,00
0,02
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01/02 02/03 03/04 04/05 05/06 06/07 07/08 08/09 09/10 10/11 Ziele 11/12
Geschäftsjahr
Energieverbrauch in kWh/cm² Siliziumfläche normiert je Geschäftsjahr mit Ziel für 2011/12
Energie gesamt
Strom
Erdgas
Erdöl EL
[kWh/cm²] [kWh/cm²] Strom, Erdgas Energie gesamt Erdöl EL
0,00
0,02
0,04
0,06
0,08
0,0
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0,8
01/02 02/03 03/04 04/05 05/06 06/07 07/08 08/09 09/10 10/11 Ziele 11/12
Geschäftsjahr
Energieverbrauch in kWh/cm² Siliziumfläche normiert je Geschäftsjahr mit Ziel für 2011/12
Energie gesamt
Strom
Erdgas
Erdöl EL
[kWh/cm²] [kWh/cm²] Strom, Erdgas Energie gesamt Erdöl EL
0,00
0,02
0,04
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Geschäftsjahr
Energieverbrauch in kWh/cm² Siliziumfläche normiert je Geschäftsjahr mit Ziel für 2011/12
Energie gesamt
Strom
Erdgas
Erdöl EL
[kWh/cm²] [kWh/cm²] Strom, Erdgas Energie gesamt Erdöl EL
0,00
0,02
0,04
0,06
0,08
0,0
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0,8
01/02 02/03 03/04 04/05 05/06 06/07 07/08 08/09 09/10 10/11 Ziele 11/12
Geschäftsjahr
Energieverbrauch in kWh/cm² Siliziumfläche normiert je Geschäftsjahr mit Ziel für 2011/12
Energie gesamt
Strom
Erdgas
Erdöl EL
[kWh/cm²] [kWh/cm²] Strom, Erdgas Energie gesamt Erdöl EL
Total Energy Consumption Electricity Natural Gas Petroleumextra-light
Fiscal YearTargets 12/13
Energy Statistics
If the site energy statistics are analyzed in detail, a positive point worthy of
mention is that a percentage (about 20%) of the total energy requirement in the
2011/12 fiscal year was again met internally through use of lost heat, heat recovery
and lost heat of electrical devices. The change in the method of providing heating,
i.e. the switch to district heating, resulted as planned in a significant reduction in
gas consumption from 7.9 to 2.4 percent of total use. The remaining amount of
natural gas is needed in the cleaning of exhaust air. This means that natural gas
consumption for the 2011/12 fiscal year was reduced by approximately 76 percent
due to the use of district heating, producing a CO2 saving of 3,566 t.
Theconsumptionofextra-light(EL)heatingoil,whichisneededfortheemergency
diesel generator, was again very low in the period under consideration.
Energy from heat pumps and thermal recovery (calculated)
20,2%
Natural Gas 2,4%
Petroleum 0,0%District Heating 7,8%
Electricity 69,6%
Distribution of energy demand at the Infineon Villach site
w
Waste Management32
Chemicals and Gases
In the area of chemicals and gases, it was not possible in the 2011/12 fiscal year to maintain the
goodlevelofspecificconsumptionachievedinthe2010/11fiscalyearduetotheunder-utilizationof
capacity addressed above. In particular, the consumption of elemental gases, inorganic chemicals and
infrastructure chemicals rose significantly.
The significant increase in elemental gases, particularly nitrogen, is a result of production equipment
being placed in standby mode. The increase in the specific use of inorganic chemicals (mineral acids),
due to technology shifts towards thin wafers, resulted in increased demand for infrastructure
chemicals in the area of waste water treatment and specifically in neutralization.
Waste Management
Based on the requirements of the EMAS III Regulation Annex IV (Item C.2.c.iv), this Consolidated
Environmental Statement provides an extended waste management account.
The total amount of waste and also the quantitatively relevant fractions (contributors) listed below
increased significantly last fiscal year as a result of the site expansion and the vast amount of
construction work performed. It was not possible to reduce the specific waste amounts per
manufactured silicon area.
Theriseindomesticandcommercialwasteisduetothelargerheadcountandincreasedon-site
reconstruction work by outside firms. The significant rise in commercial scrap is the result of the
reconstruction and development of steel structures, plant and equipment. The additional waste from
building sites and demolition wood also comes from the construction work mentioned, e.g. wood
from wooden packaging and nonreturnable pallets.
0,000
0,005
0,010
0,015
0,020
0,00
0,05
0,10
0,15
0,20
02/03 03/04 04/05 05/06 06/07 07/08 08/09 09/10 10/11 11/12
Geschäftsjahr
Verbrauch Chemikalien und Gase in kg/cm² Siliziumfläche normiert je Geschäftsjahr
Grundgase
Infrastruktur Chemikalien
anorganische Chemikalien
Lösemittel
Prozessgase
[kg/cm²] [kg/cm²] Grundgase Infrastr. Chem., anorg. Chem.,
Lösemittel, Spezialgase
0,000
0,005
0,010
0,015
0,020
0,00
0,05
0,10
0,15
0,20
01/02 02/03 03/04 04/05 05/06 06/07 07/08 08/09 09/10 10/11
Geschäftsjahr
Verbrauch Chemikalien und Gase in kg/cm² Siliziumfläche normiert je Geschäftsjahr
Grundgase
Infrastruktur Chemikalien
anorganische Chemikalien
Lösemittel
Prozessgase
[kg/cm²] [kg/cm²] Grundgase Infrastr. Chem., anorg. Chem.,
Lösemittel, Spezialgase
0,000
0,005
0,010
0,015
0,020
0,00
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0,10
0,15
0,20
01/02 02/03 03/04 04/05 05/06 06/07 07/08 08/09 09/10 10/11
Geschäftsjahr
Verbrauch Chemikalien und Gase in kg/cm² Siliziumfläche normiert je Geschäftsjahr
Grundgase
Infrastruktur Chemikalien
anorganische Chemikalien
Lösemittel
Prozessgase
[kg/cm²] [kg/cm²] Grundgase Infrastr. Chem., anorg. Chem.,
Lösemittel, Spezialgase
Consumption of chemicals and gases in kg/cm2 silicon area normalized per fiscal year
Basic gases Infrastr. chem., inorg. chem., solvents, special gases
0,000
0,005
0,010
0,015
0,020
0,00
0,05
0,10
0,15
0,20
01/02 02/03 03/04 04/05 05/06 06/07 07/08 08/09 09/10 10/11
Geschäftsjahr
Verbrauch Chemikalien und Gase in kg/cm² Siliziumfläche normiert je Geschäftsjahr
Grundgase
Infrastruktur Chemikalien
anorganische Chemikalien
Lösemittel
Prozessgase
[kg/cm²] [kg/cm²] Grundgase Infrastr. Chem., anorg. Chem.,
Lösemittel, Spezialgase
0,000
0,005
0,010
0,015
0,020
0,00
0,05
0,10
0,15
0,20
01/02 02/03 03/04 04/05 05/06 06/07 07/08 08/09 09/10 10/11
Geschäftsjahr
Verbrauch Chemikalien und Gase in kg/cm² Siliziumfläche normiert je Geschäftsjahr
Grundgase
Infrastruktur Chemikalien
anorganische Chemikalien
Lösemittel
Prozessgase
[kg/cm²] [kg/cm²] Grundgase Infrastr. Chem., anorg. Chem.,
Lösemittel, Spezialgase
Infrastructure chemicals
0,000
0,005
0,010
0,015
0,020
0,00
0,05
0,10
0,15
0,20
01/02 02/03 03/04 04/05 05/06 06/07 07/08 08/09 09/10 10/11
Geschäftsjahr
Verbrauch Chemikalien und Gase in kg/cm² Siliziumfläche normiert je Geschäftsjahr
Grundgase
Infrastruktur Chemikalien
anorganische Chemikalien
Lösemittel
Prozessgase
[kg/cm²] [kg/cm²] Grundgase Infrastr. Chem., anorg. Chem.,
Lösemittel, Spezialgase
Inorganic chemicals
0,000
0,005
0,010
0,015
0,020
0,00
0,05
0,10
0,15
0,20
01/02 02/03 03/04 04/05 05/06 06/07 07/08 08/09 09/10 10/11
Geschäftsjahr
Verbrauch Chemikalien und Gase in kg/cm² Siliziumfläche normiert je Geschäftsjahr
Grundgase
Infrastruktur Chemikalien
anorganische Chemikalien
Lösemittel
Prozessgase
[kg/cm²] [kg/cm²] Grundgase Infrastr. Chem., anorg. Chem.,
Lösemittel, Spezialgase
Solvents
0,000
0,005
0,010
0,015
0,020
0,00
0,05
0,10
0,15
0,20
01/02 02/03 03/04 04/05 05/06 06/07 07/08 08/09 09/10 10/11
Geschäftsjahr
Verbrauch Chemikalien und Gase in kg/cm² Siliziumfläche normiert je Geschäftsjahr
Grundgase
Infrastruktur Chemikalien
anorganische Chemikalien
Lösemittel
Prozessgase
[kg/cm²] [kg/cm²] Grundgase Infrastr. Chem., anorg. Chem.,
Lösemittel, Spezialgase
Process gasesBasic gases
Fiscal Year
w
Waste Management
Theriseinspecificvolumesofnon-hazardouswasteisexplainedmainlybythe
production-relatedincreaseinmineralacidsused,thesebeingneutralizedbyway
of a neutralization reaction with calcium hydroxide (slurries from the waste water
plant).
In the interest of thorough waste management practiced by all the employees,
InfineonAustriaattachesgreatimportancetoin-houserecoverynetworks.
To illustrate the point, all employees are encouraged to reduce the volume of
residual waste by collecting and segregating waste and recyclable fractions.
For example, 9 metric tons of waste wood were passed on to employees free
of charge. In the area of hazardous waste, concentrated sulfuric acid and spent
solvents in particular increased.
The higher level of spent solvents was due to increased technical and logistical
requirements in the area of spent solvent recycling. The increased quantities of
spent solvents were channelled to material and thermal recycling. Spent sulfuric
acid channelled to disposal is also processed by material recycling.
Intheareaofnon-hazardouswaste,slurriesfromthewastewaterplantwill,
as a result of targeted recycling activities, no longer go to landfill as from the
middle of the 2010/11 fiscal year but are reused in the cement industry.
w w
34
2009/10 2010/11 2011/12
Slurries from the waste water plant 2,268 2,784 3,020 t
Domestic and commercial waste 335 460 570 t
Contents of grease separators (kitchen) 147 124 136 t
Iron and steel waste (industrial scrap) 38 219 258 t
Waste paper 132 179 171 t
Biogenic waste 138 138 138 t
Construction timber and demolition waste wood 53 103 132 t
Waste wood 59 165 269 t
Production waste 2009/10 2010/11 2011/12 Unit
Totalofnon-hazardouswaste 2477.64 3210.91 3523.20 t
of which recycling of material (not thermal) 116.85 300.34 382.74 t
of which thermal recycling 78.88 110.78 103.77 t
of which disposal 2281.91 2799.80 3036.70 t
Non-hazardous Waste
Thefollowingisanoverviewofthenon-hazardouswasteofthesite,dividedintothe main contributors and their recycling flows.
Packaging
Totalofnon-hazardouswaste 185.64 344.37 442.38 t
of which recycling of material (not thermal) 125.79 179.05 170.90 t
of which thermal recycling 59.85 165.32 271.48 t
of which disposal - - - t
Totalofnon-hazardouswaste 781.10 917.71 1069.28 t
of which recycling of material (not thermal) 335.72 313.01 324.98 t
of which thermal recycling 34.78 30.14 29.68 t
of which disposal 410.60 574.57 714.63 t
Production waste – other site (e.g. periphery, facilities, offices)
Thenon-hazardouswasteinthe2009/10,2010/11and2011/12fiscalyearswassubstantially made up of the following components:
w w
Waste
Hazardous Waste
The increase in hazardous waste in the 2011/12 fiscal year was attributable primarily to an increased fraction of spent sulfuric acid resulting from dilution andanincreasedproductionofnon-distillablespentsolventmixtures.
Production waste 2009/10 2010/11 2011/12 Unit
Total of hazardous waste 1054.56 1231.82 1805.95 t
of which recycling of material (not thermal) 465.83 532.15 841.07 t
of which thermal recycling 349.99 492.04 761.39 t
of which disposal 238.74 207.64 203.49 t
Verpackungen
Total of hazardous waste 71.20 88.50 125.74 t
of which recycling of material (not thermal) 26.58 32.32 35.04 t
of which thermal recycling 42.62 54.12 88.44 t
of which disposal 2.001 2.05 2.28 t
Packaging
Total of hazardous waste 15.79 20.16 22.58 t
of which recycling of material (not thermal) 1.92 4.09 4.59 t
of which thermal recycling 13.87 16.08 17.96 t
of which disposal - - - t
Production waste – other site (periphery, facilities…)
The hazardous waste of the site is substantially made up of the following components:
2009/10 2010/11 2011/12
Solvent mixtures1) 340 480 745 t
Spent acids (sulfuric acid) 462 527 837 t
Other aqueous concentrates 238 207 203 t
1) without notified and recycled spent solvents
36
Due to detailed monitoring and rigorous use of recycling, the contribution (revenues)
in waste management was increased in the most recent three years from 3% to 10%.
Intheareaofon-siterecyclingofthespentsolventmixtures,technicalproblems
in the distillation meant that the amount of recycling of DMF and PGMEA fell from
approximately30toapproximately15percent.Sinceon-sitetreatmentofPGMEAis
nolongerpossibleduetotechnology-relatedadmixtures,thesolventwillinfuturebe
recycled externally.
For several years, the solvents cyclopentanone and NMP have been processed
externally at recycling rates ranging from 50 to 65 percent. To avoid duplicate
reporting of spent solvent mixtures, such notified waste/material fractions are not
reflectedintheabove-shownwastereports.
Furthermore, it should be noted that our spent solvent mixtures are thus not only
valuable energy carriers in the area of thermal reutilization, but also a source of
secondary raw materials.
0,000
0,003
0,006
0,009
0,012
0,015
0,018
02/03 03/04 04/05 05/06 06/07 07/08 08/09 09/10 10/11 11/12
Geschäftsjahr
Abfälle in kg/cm² Siliziumfläche normiert je Geschäftsjahr
Summe Abfälle
Nicht gefährliche Abfälle
Gefährliche Abfälle mit Schwefelsäure
Gefährliche Abfälle ohne Schwefelsäure
[kg/cm²]
0,000
0,003
0,006
0,009
0,012
0,015
0,018
01/02 02/03 03/04 04/05 05/06 06/07 07/08 08/09 09/10 10/11
Geschäftsjahr
Abfälle in kg/cm² Siliziumfläche normiert je Geschäftsjahr
Summe Abfälle
Ungefährliche Abfälle
Gefährliche Abfälle mit Schwefelsäure
Gefährliche Abfälle ohne Schwefelsäure
[kg/cm²]
0,000
0,003
0,006
0,009
0,012
0,015
0,018
01/02 02/03 03/04 04/05 05/06 06/07 07/08 08/09 09/10 10/11
Geschäftsjahr
Abfälle in kg/cm² Siliziumfläche normiert je Geschäftsjahr
Summe Abfälle
Ungefährliche Abfälle
Gefährliche Abfälle mit Schwefelsäure
Gefährliche Abfälle ohne Schwefelsäure
[kg/cm²]
0,000
0,003
0,006
0,009
0,012
0,015
0,018
01/02 02/03 03/04 04/05 05/06 06/07 07/08 08/09 09/10 10/11
Geschäftsjahr
Abfälle in kg/cm² Siliziumfläche normiert je Geschäftsjahr
Summe Abfälle
Ungefährliche Abfälle
Gefährliche Abfälle mit Schwefelsäure
Gefährliche Abfälle ohne Schwefelsäure
[kg/cm²]
0,000
0,003
0,006
0,009
0,012
0,015
0,018
01/02 02/03 03/04 04/05 05/06 06/07 07/08 08/09 09/10 10/11
Geschäftsjahr
Abfälle in kg/cm² Siliziumfläche normiert je Geschäftsjahr
Summe Abfälle
Ungefährliche Abfälle
Gefährliche Abfälle mit Schwefelsäure
Gefährliche Abfälle ohne Schwefelsäure
[kg/cm²]
0,000
0,003
0,006
0,009
0,012
0,015
0,018
01/02 02/03 03/04 04/05 05/06 06/07 07/08 08/09 09/10 10/11
Geschäftsjahr
Abfälle in kg/cm² Siliziumfläche normiert je Geschäftsjahr
Summe Abfälle
Ungefährliche Abfälle
Gefährliche Abfälle mit Schwefelsäure
Gefährliche Abfälle ohne Schwefelsäure
[kg/cm²]
Waste in kg/cm2 silicon area normalized per fiscal year
Total waste Non-hazardouswaste
Hazardous waste containing sulfuric acid Hazardous waste containing no sulfuric acid
Fiscal Year
Water
Water and Waste Water Treatment
TheVillachsitecoversmostofitswaterdemandfromitsownwells.Aboutonethirdofthissite-produced
water is purified using special treatment plants to obtain ultra pure water for use in production. The water
required for cooling production and infrastructure installations is made available on site, while the drinking
water and the water for sanitary installations is obtained from the local public utility.
In the 2011/12 fiscal year, despite increased production capacity, both the specific water consumption and
thespecificvolumeofpumpedwaterwereagainslightlyreducedthroughin-houseprocessoptimizationand
logistics. This also resulted in a further reduction in the specific waste water volume.
The target set for specified water consumption of 7.3 l/cm2 manufactured silicon was achieved.
Theproduction-specificwastewaterwaswithinthetargetrangeat3.3l/cm2 manufactured silicon.
Ambitious consumption targets were again set for the 2012/13 fiscal year based on the expansion of
production capacity. The water consumption of the new intermediate building (Hall 16A) was included in the
chart above.
0,000
0,005
0,010
0,015
0,020
02/03 03/04 04/05 05/06 06/07 07/08 08/09 09/10 10/11 11/12 Ziel 12/13
Geschäftsjahr
Wasserverbrauch und Abwassermenge aus der Produktion in m³/cm² Siliziumfläche normiert je Geschäftsjahr
Wasserverbrauch m3/cm2
Abwasser aus der Produktion m3/cm2
[m3/cm²]
0,000
0,005
0,010
0,015
0,020
01/02 02/03 03/04 04/05 05/06 06/07 07/08 08/09 09/10 10/11 Ziele 11/12
Geschäftsjahr
Wasserverbrauch und Abwassermenge aus der Produktion in m³/cm² Siliziumfläche normiert je Geschäftsjahr mit Ziel für 2011/12
Wasserverbrauch m³/cm²
Abwasser aus der Produktion m³/cm²
[m3/cm²]
Wasserverbrauch und Abwassermenge aus der Produktion in m³/cm² Siliziumfläche normiert je Geschäftsjahr mit Zielen für 2010/11
0,000
0,005
0,010
0,015
0,020
00/01 01/02 02/03 03/04 04/05 05/06 06/07 07/08 08/09 09/10 10/11
Geschäftsjahr
Wasserverbrauch in m³/cm²
Abwasser aus der Produktionin m³/cm²
[m3/cm²]
Wasserverbrauch und Abwassermenge aus der Produktion in m³/cm² Siliziumfläche normiert je Geschäftsjahr mit Zielen für 2010/11
0,000
0,005
0,010
0,015
0,020
00/01 01/02 02/03 03/04 04/05 05/06 06/07 07/08 08/09 09/10 10/11
Geschäftsjahr
Wasserverbrauch in m³/cm²
Abwasser aus der Produktionin m³/cm²
[m3/cm²]
Water consumption m3/cm2 Waste water from production m3/cm2
Water consumption and amount of waste water from production
in m3/cm2 silicon area normalized per fiscal year with target for 2012/13
Fiscal Year
Target 12/13
38
Sampling container OWWE semiconductors indirect discharge – external monitoring
The general increase in values and loads results from the increased production output and the
associated need for mineral acids.
Anewin-housewastewatertreatmentplant,equippedwithstate-of-the-artautomaticonline
analysis and a suitable retention basin, purifies polluted waste water from production.
A reduced specific waste water volume was derived from the above stated reduction target of
site-specificwaterconsumptionasatargetforthe2012/13fiscalyear.
Typical values for direct and indirect discharge of our waste water can be found in the following
tables. As can be seen from these tables, they comply with the prescribed limit values for both
directandindirectdischargeforthethree-yearperiod.Inmostcasesthevaluesarefarbelowthe
limits, with the exception of with the exception of fluoride and nitrogen (Nges and N(NH4))
or ammonia.
Owing to the expansion of production capacity in recent years and the resultant requirement of
higher limit values for waste water load, an application was filed with the relevant authorities in
FY 2008/09 for increases in limit values for fluoride, phosphorus, phosphate and nitrogen, and
ammonium-N.Anyvaluesabovethelimitvaluesindicatedinthesetablesarereportedtothe
authorities on an ongoing basis.
Substance Maximum Permissible Value
Measured value 09/10
Measured value 10/11
Measured value 11/12
Filterable substances mg/l 250 41 86.0 21.0
Ammonium-N(NH4) kg/d 240 88.2 93.6 179.4
Fluoride (F) mg/l 50.0 49.0 60.0 1) 49.0
Phosphorus (P total) kg/d 60 14.4 48.3 49.2
Nitrogen (N total) kg/d 250 178.8 247.6 390.4
Sulfate (SO4) mg/l 400 140 146.0 152.0
AOX 2) mg/l 0.5 0.11 0.06 0.03
Copper (Cu ) mg/l 0.10 <0.01 0.06 0.03
Molybdenum (Mo) mg/l 1,00 0.41 <0.05 <0.01
Nickel (Ni) mg/l 0.30 0.02 0.11 0.12
Zinc (Zn) mg/l 2.00 0.05 <0.18 0.06
Boron (B) mg/l 1.00 0.11 0.11 <0.1
HC total 3) mg/l 3.00 <0.01 <0.1 <0.06
POX 4) mg/l 0.05 <0.01 <0.01 <0.01
1) Owing to the higher utilization of production capacity and the resultant requirement of higher limit values for waste water load, an application was filed with the authorities in FY 2008/09 for increases in limit values.2) Adsorbable organically bound halogens3) Hydrocarbons4) Purgeable organically bound halogens
Waste Water
Sampling container OWWE semiconductors direct discharge – external monitoring
1) Total organically bound carbon 2) Chemical oxygen demand3) Adsorbable organically bound halogens 4) Hydrocarbons5) Purgeable organically bound halogens6) Sum of volatile aromatic hydrocarbons
Substance Maximum Permissible Value
Measured value 09/10
Measured value 10/11
Measured value 11/12
pH value 6.5-8.5 7.2 7.2 <7.7
Filterable substances mg/l 50 <10 <10 <10
Ammonium-N(NH4) mg/l 20 1.5 2.1 0.9
Fluoride (F) mg/l 50 2.5 2.4 1.6
Phosphorus (P total) mg/l 2 0.31 1.9 0.2
TOC 1) mg/l 30 0.79 2.10 <0.5
CSB 2) mg/l 120 <15 <15 <15
AOX 3) mg/l 0.5 <0.010 <0.010 <0.010
Antimony (Sb) mg/l 0.10 <0.01 <0.02 <0.01
Arsenic (As) mg/l 0.10 <0.01 <0.07 <0.01
Lead (Pb) mg/l 0.10 <0.01 <0.03 <0.01
Cadmium (Cd) mg/l 0.05 <0.001 <0.001 <0.001
Chromium (Cr) mg/l 0.10 <0.01 0.02 0.01
Copper (Cu ) mg/l 0.20 0.02 0.05 0.07
Molybdenum (Mo) mg/l 0.10 <0.01 <0.05 <0.01
Nickel (Ni) mg/l 0.30 <0.01 <0.04 <0.01
Selenium (Se) mg/l 0.10 <0.01 <0.06 <0.01
Zinc (Zn) mg/l 1.00 <0.02 <0.018 0.04
Tin (Sn) mg/l 1.00 <0.01 <0.06 0.01
Boron (B) mg/l 1.00 <0.1 <0.05 <0.1
HC 4) total mg/l 1.00 0.21 <0.1 <0.1
POX 5) mg/l 0.10 <0.010 <0.010 <0.010
Anionic surfactants mg/l 2.00 0.72 <0.05 <0.05
BTXE 6) mg/l 0.10 <0.005 <0.005 <0.005
Non-ionicsurfactants mg/l 1.00 <0.10 <0.10 <0.5
Source:Inhouseandexternalmonitoringofwastewaterplant-BDLZTGmbH2012
40
Exhaust Air
For the fresh air supply of cleanrooms, large volumes of air from the outside are
sucked in, cleaned to remove particles, and, after several recirculation cycles
(multiplecirculation),filteredandreleasedintotheenvironment.Process-related
impurities of the exhaust air are removed from the exhaust air, if necessary,
by using purification plants. The values achieved by these plants are distinctly
below the limit values stipulated by the authorities. The classes of substances
that are environmentally relevant in the exhaust air sector are collected in defined
exhaust air flows based on their chemical properties.
In the area of acid/alkaline exhaust air (process exhaust air), wet scrubbers are
used,theorganiccomponentsarepurifiedbymeansofafter-combustionplants,
while perfluorinated compounds (PFCs) from the field of semiconductor production
arecombustedinahigh-temperatureprocessandsubsequentlycleanedbya
wet chemical method.
The company’s first extended reporting on the exhaust air situation in the
expanded facilities of Halls 13 and 16A is included in this Consolidated
Environmental Statement.
0 0 1 0 1 0 1 11 0 0 1 1 1 0 01 0 1 0 0 1 0 11 0 0 0 0 1 0 00 1 1 0 1 0 1 10 0 0 1 0 0 1 0
1 0 0 1 1 0 1 11 1 0 1 0 1 0 00 0 0 0 0 1 0 11 0 1 0 0 1 1 00 0 1 0 1 1 1 11 0 1 1 0 0 1 0
0 0 0 0 1 0 1 01 0 0 0 0 0 0 11 0 1 0 0 0 0 10 0 1 1 0 1 1 00 1 1 0 1 1 1 10 0 0 0 0 0 1 1
HALL 14 Maximum Permissible Value 1)
2009/10 2010/11 2011/12
Hydrogen chloride ( HCl ) 30 mg/m3 ≤ 0.30 mg/m3 ≤ 0.30 mg/m3 0.48 mg/m3
Hydrogen fluoride ( HF ) 3 mg/m3 0.7 mg/m3 0.7 mg/m3 0.95 mg/m3
Chlorine ( Cl2 ) 3 mg/m3 ≤ 0.50 mg/m3 ≤ 0.50 mg/m3 ≤ 0.50 mg/m3
Nitrogen oxides as nitrogen dioxide ( NO2 ) 200 mg/m3 4.9 mg/m3 9.54 mg/m3 9.03 mg/m3
Ammonia ( NH3 ) 30 mg/m3 ≤ 0.70 mg/m3 ≤ 0.70 mg/m3 0.99 mg/m3
Hydrogen bromide ( HBr ) 3 mg/m3 ≤ 0.67 mg/m3 ≤ 0.67 mg/m3 ≤ 0.67 mg/m3
Arsine ( AsH3 ) 0.5 mg/m3 ≤ 0.017 mg/m3 ≤ 0.017 mg/m3 ≤ 0.017 mg/m3
Phosphine ( PH3 ) 0.5 mg/m3 0.029 mg/m3 0.027 mg/m3 0.036 mg/m3
Organic carbon 30 mg/m3 10.63 mg/m3 17.46 mg/m3 4.94 mg/m3
Carbon monoxide ( CO ) 100 mg/m3 ≤ 9.28 mg/m3 9.96 mg/m3 11.12 mg/m3
HALL 16 Maximum Permissible Value 1)
2009/10 2010/11 2011/12
Hydrogen chloride ( HCl ) 30 mg/m3 0.30 mg/m3 ≤ 0.30 mg/m3 ≤ 0.30 mg/m3
Hydrogen fluoride ( HF ) Hall 16 2) 1 mg/m3 ≤ 0.24 mg/m3 ≤ 0.24 mg/m30.25 mg/m3
Chlorine ( Cl2 ) 1 mg/m3 ≤ 0.50 mg/m3 ≤ 0.50 mg/m3 ≤ 0.50 mg/m3
Nitrogen oxides as nitrogen dioxide ( NO2 ) 200 mg/m3 5.53 mg/m3 6.74 mg/m3 5.39 mg/m3
Ammonia ( NH3 ) 30 mg/m3 ≤ 0.70 mg/m3 ≤ 0.70 mg/m3 0.69 mg/m3
Hydrogen bromide ( HBr ) 3 mg/m3 ≤ 0.67 mg/m3 ≤ 0.67 mg/m3 ≤ 0.67 mg/m3
Arsine ( AsH3 ) 0.5 mg/m3 0.029 mg/m3 0.036 mg/m3 0.017 mg/m3
Phosphine ( PH3 ) 0.5 mg/m3 0.086 mg/m3 0.142 mg/m3 0.081 mg/m3
Organic carbon 30 mg/m3 10.92 mg/m3 17.47 mg/m3 5.22 mg/m3
Carbon monoxide ( CO ) 100 mg/m3 ≤ 9.28 mg/m3 12.6 mg/m3 14.50 mg/m3
HALL 15 Maximum Permissible Value 1)
2009/10 2010/11 2011/12
Hydrogen chloride ( HCl ) 30 mg/m3 ≤ 0.30 mg/m3 ≤ 0.30 mg/m3 0.44 mg/m3
Hydrogen fluoride ( HF ) 3 mg/m3 ≤ 0.24 mg/m3 ≤ 0.24 mg/m3 ≤ 0.24 mg/m3
Chlorine ( Cl2 ) 3 mg/m3 ≤ 0.50 mg/m3 ≤ 0.50 mg/m3 ≤ 0.50 mg/m3
Nitrogen oxides as nitrogen dioxide ( NO2 ) 200 mg/m3 ≤ 0.82 mg/m3 ≤ 0.82 mg/m3 1.05 mg/m3
Ammonia ( NH3 ) 30 mg/m3 ≤ 0.70 mg/m3 ≤ 0.70 mg/m3 0.77 mg/m3
Hydrogen bromide ( HBr ) 3 mg/m3 ≤ 0.67 mg/m3 ≤ 0.67 mg/m3 ≤ 0.67 mg/m3
Arsine ( AsH3 ) 0.5 mg/m3 n.a. n.a. n.a.
Phosphine ( PH3 ) 0.5 mg/m3 ≤ 0.007mg/m3 ≤ 0.007 mg/m3 ≤ 0.007 mg/m3
Organic carbon 30 mg/m3 7.45 mg/m3 7.69 mg/m3 10.70 mg/m3
Carbon monoxide ( CO ) 100 mg/m3 ≤ 9.28 mg/m3 ≤ 9.28 mg/m3 ≤ 9.28 mg/m3
Exhaust Air1) According to official stipulations2) The HF limit value for Hall 16 was established by ruling of the Federal Ministry of Economic Affairs of Sept. 8, 1998, item318.956/3-III/A/2a/98,at1mg/m3
n.a. not applicable
Measured values (average values)
AiremissionvaluesHall14-Measuredvaluesinthe2009/10,2010/11und2011/2012fiscalyears
AiremissionvaluesHall16-Measuredvaluesinthe2009/10,2010/11und2011/2012fiscalyears
AiremissionvaluesHall15-Measuredvaluesinthe2009/10,2010/11und2011/2012fiscalyears
Measured values (average values)
Measured values (average values)
The increase in some exhaust air volumes, which are still distinctly below the limit, is due to technology shifts and increased production space.
42
w
Based on the expansion of the production areas, the recently constructed Hall 16A and the air emissions
for the expanded productions areas of Hall 13 are now also included in the company’s environmental
reporting starting with the 2011/12 fiscal year.
Air emission values Hall 13 and Hall 16 A – Measured values in the 2011/2012 fiscal year:
Maximum Permissible Value 2011/12
Limit value Hall 13 Hall 16A
Hydrogen chloride ( HCl ) 30 mg/m3 ≤ 0.30 mg/m3 ≤ 0.30 mg/m3
Hydrogen fluoride ( HF ) Hall 16 1 mg/m3 n.a. ≤ 0.24 mg/m3
Nitrogen oxides as nitrogen dioxide ( NO2 ) 200 mg/m3 0.82 mg/m3 0.82 mg/m3
Ammonia ( NH3 ) 30 mg/m3 1.45 mg/m3 ≤ 0.70 mg/m3
Arsine ( AsH3 ) 0.5 mg/m3 n.a. ≤ 0.017 mg/m3
Organic carbon 30 mg/m3 11.70 mg/m3 n.a.
Based on the requirements of the EMAS III Regulation, the NOX (nitrogen oxide), SO2 (sulfur dioxide)
and dust emissions are also reported in this Environmental Statement.
The NOX emissions of the site arising from production in the fiscal year 2011/12 are approximately
15,300 kg, the amount from fossil fuels used after the conversion to district heating is only
approximately 2 kg. The emissions from the production areas were evaluated using an assessment of
the loads of the exhaust air streams and their NOX contamination (values below the measurement limit
of detection of 0.2 mg were not taken into account).
The NOX emissions from the heating mix used were calculated on the basis of the last annual emission
declaration for boiler plants 2011 (Federal Gazette II No. 292/2007).
The SO2 emission of the site following the conversion of heating from gas to district heating is less than
0.1 kg. This value was determined stoichiometrically based on the quantity of emergency diesel power
used (approximately 100l) and maintenance operations including peak load support of the boiler plant
by the energy provider KELAG (ca. 3,170 m3 natural gas).
As for dust emissions, an expert conducts an annual review with reference to the regulatory
requirements (max. 5 mg/Nm3) as part of the relevant check system at representative measuring points.
The measured values for the last fiscal year are between 0.1 und 2mg/Nm3.
The assessment of site dust emissions for the last fiscal year is approx. 2.4 t and again results from an
assessment of the load of the exhaust air streams.
w
Emission
Air emission values Hall 13 and Hall 16 A – Measured values in the 2011/2012 fiscal year:
For many years, we have devoted particular attention to reducing the emissions
of perfluorinated compounds (PFCs). These are used especially for etching and
deposition processes. The contribution of PFCs to the greenhouse effect exceeds
by far that of carbon dioxide.
Within the terms of the Kyoto Protocol, Infineon voluntarily committed in 1998 to
reduce the emission of PFC gases – calculated in CO2 equivalents – at relevant
production sites to the level of 1995 less 10 percent. This commitment on the
part of the German semiconductor industry contained a pledge to reduce PFC
emissions by 8 percent, calculated in CO2 equivalents, compared with 1995’s
level by 2010.
To reduce the climate impact of the emissions and to reach this ambitious goal,
special attention was paid to sustainable reduction measures particularly in the
area of the cleaning of exhaust air and the use of sulfur hexafluoride (SF6)
in testing and the use of CO2-relevantprocessgasesinproduction.
The result is further evidence of the success of our efforts. With new approaches
to cleaning exhaust gas, fewer gases that are detrimental to the climate and
more efficient processes, Infineon Technologies AG had already met its own goals
within the voluntary commitment in 2007. Consequently, we are making a
significant contribution to the realization of the German and European voluntary
commitment. We see ourselves as taking a leading role in protecting the
environment and as a reliable partner.
0
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1995 1996 1997 1998 1999 2000 2001 2002 2003 2004 2005 2006 2007 2008 2009 2010 2011
CO
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quiv
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te in
[%]
Europäische PFC-Emissionen in Prozent auf Basis des Ausgangswertes (100%) im Jahr
geschätzte Emissionen (Volumenwachstum 15% pro Jahr) Infineons Emissionen EU-weit Ziel basiert auf den freiwilligen Vereinbarungen der Industrie
PFC Emissions in the EU*
CO2
equi
vale
nts
[%]
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1995 1996 1997 1998 1999 2000 2001 2002 2003 2004 2005 2006 2007 2008 2009 2010 2011
CO
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te in
[%]
Europäische PFC-Emissionen in Prozent auf Basis des Ausgangswertes (100%) im Jahr
geschätzte Emissionen (Volumenwachstum 15% pro Jahr) Infineons Emissionen EU-weit Ziel basiert auf den freiwilligen Vereinbarungen der Industrie
0
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1995 1996 1997 1998 1999 2000 2001 2002 2003 2004 2005 2006 2007 2008 2009 2010 2011
CO
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te in
[%]
Europäische PFC-Emissionen in Prozent auf Basis des Ausgangswertes (100%) im Jahr
geschätzte Emissionen (Volumenwachstum 15% pro Jahr) Infineons Emissionen EU-weit Ziel basiert auf den freiwilligen Vereinbarungen der Industrie
0
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1995 1996 1997 1998 1999 2000 2001 2002 2003 2004 2005 2006 2007 2008 2009 2010 2011
CO
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[%]
Europäische PFC-Emissionen in Prozent auf Basis des Ausgangswertes (100%) im Jahr
geschätzte Emissionen (Volumenwachstum 15% pro Jahr) Infineons Emissionen EU-weit Ziel basiert auf den freiwilligen Vereinbarungen der Industrie
Estimated emissions (growth by volume 15% per year)
Actual emissions
Goalofvoluntaryself-commitment
44
As already described in the last Environmental Statement, SF6 is a process gas
that is essential to the semiconductor industry. Furthermore, due to its dielectric
propertiesitisusedworldwideinparticularinhigh-voltagetechnologyasan
insulation gas. Based on the current state of the art, there is no alternative to the
use of SF6 as a process gas for plasma etching in the production of
semiconductor components.
The proportion of SF6 used at the site as an insulation gas in the area of wafer
test to measure and test manufactured wafers was reduced to a minimum in the
most recent years thanks to targeted reduction programs. The remaining base
loadisaresultofthespecialdemandsofhigh-voltagemeasurementtechnology
and use as a dielectric material in implantation systems.
We have opted for sustainable reduction measures at the Villach site so as to
reduce the emissions of greenhouse gases as specified by the Kyoto Protocol, in
particular regarding exhaust gas cleaning. This has allowed us to maintain largely
constant the specific CO2 emissions related to manufactured silicon area at
largely constant levels.
The use of perfluorinated hydrocarbons at the Villach site is rigorously monitored
and reported on under the Austrian Ordinance for Industrial Gases (BGBl.II
Nr. 447/2002) and serves as a basis for the reporting required by that ordinance.
Emission
0,00
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1,0
02/03 03/04 04/05 05/06 06/07 07/08 08/09 09/10 10/11 11/12 Geschäftsjahr
CO2 - Emissionen in kg/cm² Siliziumfläche normiert je Geschäftsjahr
CO2 Äquivalente aus PFC CO2 Emissionen aus Erdgas
[kg/cm²] [kg/cm²]
CO2-Äquivalente PFC
CO2-Emissionen Heizung
[kg/cm2] CO2 equivalents PFC [kg/cm2] CO2 emissions heating
Wasserverbrauch und Abwassermenge aus der Produktion in m³/cm² Siliziumfläche normiert je Geschäftsjahr mit Zielen für 2010/11
0,000
0,005
0,010
0,015
0,020
00/01 01/02 02/03 03/04 04/05 05/06 06/07 07/08 08/09 09/10 10/11
Geschäftsjahr
Wasserverbrauch in m³/cm²
Abwasser aus der Produktionin m³/cm²
[m3/cm²]
Wasserverbrauch und Abwassermenge aus der Produktion in m³/cm² Siliziumfläche normiert je Geschäftsjahr mit Zielen für 2010/11
0,000
0,005
0,010
0,015
0,020
00/01 01/02 02/03 03/04 04/05 05/06 06/07 07/08 08/09 09/10 10/11
Geschäftsjahr
Wasserverbrauch in m³/cm²
Abwasser aus der Produktionin m³/cm²
[m3/cm²]
CO2 Äquivalente PFC CO2 Emissionen aus Erdgas
Based on the EMAS III Regulation, the emissions of CO2, CH4 (methane) and N2O (dinitrogen monoxide)
related to CO2 equivalents are additionally examined. Since the global warming potential of these
above-statedprocessgasesrelatedtoCO2 equivalents is again relatively low (only approximately
1 percent of total emissions in the fiscal year 2011/2012), and on the basis of the 2004/156/EC guideline,
thiscomponentwasnottakenintoaccountintheten-yeardiagramabove.Theconsumptionof
CO2-relevanthydrofluorocarbons(HFCs)asrefrigerant,whichaccountsforapproximately2.6%ofthe
given CO2 emissions, can also be disregarded.
The marked decline in direct CO2 emissions in the areas of heating and the cleaning of waste gases
(energy source natural gas) in the most recent years is a result of the changeover in site heating to
district heating starting in April 2011. The use of natural gas at the site is now limited to the operation
ofspecialwaste-gascleaningequipment,knownasburnboxes.Thishasresultedina76percentsaving
over the original natural gas consumption. The saving in CO2 is 3,560 t. The indirect CO2 emissions of
the district heating used amount to approximately 1,360 t, the CO2 equivalents for the electricity used
amount to approximately 49,130 t.
The reduced CO2 emissions from natural gas consumption compared with last fiscal year are again the
result of the change over from natural gas to district heating.
Noise
Infineonkeepsanupdatednoiseregisterandnoise-generatingmachines,suchascompressors,
refrigerating machines and heat pumps, are housed in closed supply rooms. This avoids any exposure of
the residents living nearby to noise. The execution of the construction phases of the new office and
laboratory accommodation in Building 07 and the expansion of the cleanroom are as were also
accomplished with no significant impact on nearby neighbors.
CO2 equivalents PFC CO2 emissions heating
Fiscal Year
CO2 emissions in kg/cm2 silicon area normalized per fiscal year
46
4.3 Indirect Environmental Aspects
In addition to the direct environmental aspects, consideration also has to be paid
to the indirect aspects which might result in significant environmental impact over
which the organization has no or only limited control.
Energy-efficient products
One third of the energy consumed worldwide is electricity. The key energy source
of the future is therefore the efficient deployment of energy. An optimization in
electricity consumption is achieved by harnessing smart semiconductor technology:
Innovativechipsolutionsfine-tunecars,industrialplants,consumerand
household electronics to use less energy. And smart meters permit evaluation of
everykilowatthourwithto-the-minuteaccuracy,helpingtosaveelectricity.
Employing Infineon’s innovative semiconductor solutions means that electricity
comes from the socket with low losses. Our power electronics transmit energy
from the power station to the consumer efficiently, over thousands of kilometers.
From the solar cell, through the power grid, all the way to the washing machine
– Infineon’s power semiconductors, microcontrollers and sensors optimize the
entire energy chain.
Around 20% of global electricity consumption is used for lighting purposes.
A clear trend towards saving energy in lighting applications can be seen and
this needs correspondingly efficient light sources and electronic components.
Energy-savingproducts,e.g.fromtheCoolSETTM and CoolMOSTM family and from
theso-calledSmartBallastICproductrangeareproducedattheVillachsite.
Consumers benefit directly from the Infineon developments by saving energy costs.
Environmental Conduct
According to IMS Research data, Infineon Technologies has been the number 1 in the power
semiconductormarketfornineconsecutiveyears.AconsiderablepartoftheGroup-wideknow-how
inenergy-efficientpowersemiconductorsliesinAustria.
Thelatestsemiconductortechnologiesarevitalforadvancingelectromobilitywherepowersemi-
conductors attend to converting and distributing the electric current to the motor and other auxiliaries.
Semiconductor solutions from Infineon help to accelerate the technological breakthrough in all areas
of electromobility – costs, battery range, charging infrastructure and smart grid with all its aspects.
Infineon Austria is involved together with top industry, research and energy management companies
inthenationwide“AustrianMobilePower”platform.
These examples show that Infineon is committed to responsible use of natural resources not only in
production. The company also conducts ongoing research into more efficient use of the energy flows
in the semiconductors produced. Longer service life and improved recycling properties of the
products are factors defining the design of Infineon chips. Furthermore there is a development
manual specifically geared to environmentally sound product design.
Environmental Conduct of Contractors (Purchasing) and Outside Companies
Alongside the company’s process descriptions for environmentally sound procurement of services
and equipment, the suppliers’ environmental performance is appraised using a rating scheme.
Consideration is also paid to whether suppliers have an environmental management system.
Almost 90% of our site’s suppliers have a certified environmental management system in place.
Service providers and suppliers are also obliged to meet our standards in environmental protection,
safety and health, and in working and social conditions. To support them in this quest, the Infineon
Group has formulated principles which are based on our globally applicable “Business Conduct
Guidelines”andformthebasisforsuccessfulcollaborationwithoursuppliers.Inadditiontothese
principles and the environmental and occupational safety aspects in the master purchase agreements,
wehaveformulatedtherequirementstobemetbysuppliersinso-called“TechnicalTermsofDelivery”.
48
Logistics and Transport
Constant optimization in dispatch and close attention to certified or validated
logistics partners ensure environmentally benign transportation. Furthermore,
the company supports carpooling by an Intranet option allowing coordination of
carpooling for business travel to save fuel consumption and travel costs.
4.4 Environmental Aspects and Focal Points
In assessing the most important direct and indirect environmental aspects of
facilities, goals are defined and measures to prevent or mitigate significant envi-
ronmental impact are adopted.
Direct aspects that are under the company’s control are assessed using a
detailed analysis. Indirect environmental aspects are estimated qualitatively as
either the quality of the data is generally insufficient or the indirect aspects are
not under the control of the Villach site of Infineon Technologies Austria AG.
Summary: The assessment of the environmental aspects at Infineon Technologies
Austria AG on the Villach site, again confirmed the positive environmental
situation for the 2011/12 fiscal year. Focal areas were the recycling of chemicals
(solvents) and safety concepts.
A
C
Due to tenable environmental impact, no immediate action is required; measures for reduction have already been taken or correspond to the state of the art
Due to measures taken, no action is required or the environmental impact cannot be influenced
B
Assessment of the Environmental Relevance:
The high environmental impact of the plant or activity or its group requires measures for reducing its impact
B/C No immediate action required - measures are already being taken (ongoing improvement programs, dynamic process)
Plausibility Check of the Environmental Aspects of Infineon Technologies Austria AG
Impact on the environment Yes No Measures defined/started
Emissions into the atmosphere • C B/C B/C P/M
Continuing optimization of the company exhaust air cleaning systems, taking into account the Kyoto aspectsBased on the site expansion and corresponding production ramp-up, expansion of the exhaust air purification capacity required
Waste water • C B/C B/C P/M
Adaptation and expansion of the waste water plant to operational requirements and state-of-the-art technologyBased on the site expansion and corresponding production ramp-up, increase of the volume thresholds required
Non-hazardous waste • B B/C B/C M Main fractions of non-hazardous waste are channeled to recycling
Hazardous waste • B B/C B/C M Main fractions are recycled and reused
Noise emissions • C C C M No need for action in normal operationPreventive measurements to safeguard against building site emissions
Odor emissions • C C C M Analysis of problems when required (very rarely)
Formation of dust • B/C B/C B/C M Regular dust measurements by ext. institute, all requirements imposed by authorities met
Consumption of resources
Water consumption / fully de-ionized water • B/C B/C B/C P/M Permanent optimization of consumption (waste water reduction) in the
production process
Consumables, auxiliary materials • B/C B/C B/C M Continuous optimization of resources, processes and consumption
Chemicals, gases • B B B M Continuous optimization of resources, processes and consumption, input and output analysis
Demand for other hazardous substances • B/C B/C B P/M
Due to increased complexity of technologies in production and the resultant technical problems with separation, collection and treatment of spent solvents,reduction in typical recyclingrate from40% to 25% (spent solvents are collected and recycled through distillation)
Media consumption • B/C B/C B/C P/MPermanent reduction in transportation of hazardous materials through prepara-tion of oxygen or nitrogen from the on-site fractionation plant Dilution of chemicals on site, central supply systems
Energy demand, lost heat • B/C B/C B/C P/MHeat recovery and lost heat utilization of approx. 20% of the total amount of energy used Extensive energy reduction programs (Energy Efficiency Project)
Ground / Groundwater • C C C M Ground monitoring through regular groundwater tests
Other
Impacts on the environment in operation other than specified • B/C B/C B/C P/M
Continuation of the Disaster Prevention Organization (DPO)Maintaining a multi-site safety function plan and business continuity concepts Explosion zone concept (VEXAT)Extensive safety analyses in the sphere of facilities relevant to radiation Running a validated environmental protection laboratory Planning and conceptual design of a new fire station
Legal Compliance • B/C B/C B/C P/M
Keeping a legal databaseConsistent continuation of consolidationExtended safety concepts (VEXAT, ADR, radiation protection, industrial accident regulations)
Sustainable Development • B/C B/C B/C M
Segregation and recycling concepts in various areas Training and education concepts in the areas of the environment, safety, health and energyCommissioning of projects, master thesesPromoting the YIP company suggestion schemeInnovations relating to e-mobility and solar technology: establishing a company e-charging station and providing an e-car for official trips
New company premises • B/C B/C B/C P Based on the site expansion, timely administrative procedures to ensure legal compliance
Process innovations • B/C B/C B/C P
Consistent and systematic evaluation of environmental and safety aspects and securing new technologies in various areas including ion implantation Forward-looking technologies including electro-chemical plating, silicon carbide, gallium nitride and e-mobility
Health Activities • B/C B/C B/C P/M
Continuation of company health promotion with an integrated approachCarrying out activities as required and in line with internal requirements, focusing on health care
exercise mental health (burn-out prophylaxis)
Best Ageing
2009/1
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/11
2011
/12
Pro
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/M)
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Environmental Aspects ESHEnrelevance
Assessment of the environmental
relevanceMeasures
• • •
Measures
5 Overview of Environmental Programs for 2009/10, 2010/11, 2011/12 and Environmental Goals for 2012/13
The environmental protection, safety, health and energy program at the Villach
site is founded on the occupational safety, health, environmental and energy
management goals of Infineon Technologies AG. On the basis of the respective
input and output analyses and the site aspects evaluated as being significant, the
package of goals and measures is reviewed, adjusted and established once a year.
In the process, the measures, schedules and parties responsible for the respective
projects are fixed.
In the Environmental Statements over the last years, Infineon Technologies Austria
AG has focused conceptually on disclosing major strategic projects in the field of
waste water, exhaust air and recycling. Consideration is given to the state of the
art in new equipment for innovation, increases in capacity and replacement invest-
ments. Extracts of environmentally relevant project activities which have
contributed significantly to improving the environmental performance of the site,
or will do so, are set out below.
Not yet implemented Partially implemented Project successfully implemented
50
Measures
5.1 Implemented Measures 2009/10, 2010/11 and 2011/12
Not yet implemented Partially implemented Project successfully implemented
IMPRES Program 2010/11 - Implemented Measures
Area Goal Measure Result 2010
Waste / waste water
Treatment / recycling of waste waterOptimization study on treatment / recycling of waste water from ECD area completed
Exhaust airReplacement of two outmoded exhaust air purificationplantsbystate-of-the-artplants
Replacement of old exhaust air purification plants gas tower Hall 15 andspecial gas chambers Hall 16 using new technologies
Health Healthy and capable staff
Continuation of company health promotion with an integrated approach, carrying out activities as needed and in line with internal guidelines and focusing on: health care, exercise, nutrition and mental health (stressmanagement, mediation)
Workplace safety / Production
Provision of more extensive safety information at the workplace
Conceptual reworking ofoperating instructions and workplace rules completed
Optimization of energy consumption in production, periphery and office areas (Energy Efficiency Management)
A comprehensive concept study in the area of energy efficiency in production launched for optimization of energy management. Basis for subsequent Implementation projects.
Optimization of the energy consumption of sub-equipment
Feasibilitystudyforsub-equipment(vacuumpumpsandabatement) launched for synchronization with the operating hours of production equipment
Optimization of lightingVarious LED technologies were evaluated in selected test areas of production and the periphery. Qualification of appropriate LED lighting for transport routes and cleanroom.
Reduction in electricity consumption for production of compressed air
Based on a concept study, improved process control was installedforenergy-optimizedoperationoftheindividualair compressors.
Green IT
Afundamentalanalysiswasperformedintoenergy-optimized cooling of servers and server rooms. The schedule for the completion of the project postponed due to changed framework conditions.
Recycling/reuse of exhaust gases containing hydrogen
A study on the conversion to electricity or recycling of used hydrocarbons, or the treatment and reuse in the process was performed. The study on conversion to electricity was put on hold. Currently preference is given to the reuse of hydrogen in the process. Indepth analyses started on this.
Hazardous materials
Reduction in the transport of hazardous goodsConcept study on the dilution of MF 320 on site completed, release of financing and implementation project in preparation stage
Raising environmental and energy awareness
An action program was carried out in the area of suggestions for improvements thatfocused on saving energy.
“InnovationDays”focusingon“NewTechnologies”;for Infineon products, developments and processes; three events tied in to energy efficiency planned forthe current fiscal year. In addition a Family Day was held
Providing information to employees and the wider public
Cooperation with external partners (Federation of Industries, print and TV media); various publications on energy efficiency, special exhibition for Family Day
Provision of measurement technology for electromagnetic fields
Procurement of a qualif ied measuring instrument and fundamental evaluation on site completed
Deployment of environmentally friendly heat pumps with superior energy efficiency
Replacementofheatpumpno.1withastate-of-the-artsystem with optimizedenergy recycling rate (COP = 5.16), andoperation of the system with environmentally friendly coolant (R 134a), processing of the existing R22 from heat pump no. 1
E-mobilityInnovation projects on the integration of electric vehicles into an overall mobility and energy provision concept
Technology projects with leading automotive and power supply companies to increase the energy efficiency in e-mobility,includingtestchipforraisingtheefficiencyinlithium-ionbatteriesbyintelligentbatterymanagementand balancing system and start of development of a highly efficientAC/DCon-boardchargingdevice
Energy
Internal/External Communication
Environmental technology
Implementation FY 2010/11
Implementation FY 2010/11
Area Goal Measure Result 2011
Waste / waste water
Treatment of ECD waste waterProject for treating waste water from the ECD area pre-sented to the authorities, application for trial operation filed with the authorities.
Utilization of sludge from the company waste water treatment plant
Comprehensive study launched on utilization on the Austrian market
AbluftAdaptation of exhaust air purification system to new technologies
Pilot studies and implementation projects for gallium nitride, silicon carbide and the 300 mm pilot line
Optimized use of resources / materials in ex-haust air purification
Thesis on the durability of plastics in the exhaust air sector
Replacement of outmoded exhaust air purifica-tion plants by state-of-the-art plants
Concept study and implementation project for repla-cing outmoded systems in the area of Hall 16 by more resource-efficient burner/scrubber technologies
Health Healthy and capable staff
Continuation of company health promotion with an integrated approach, carrying out activities based on the annual review of the in-house steering group, focusing on: health care, exercise, mental health and burn-out prophylaxis
Workplace safety / Production
Ensuring compliance with the statutory guidelines for VOPST (ordinance on optical radiation) and GHS
In-house evaluation of necessities and implementation study
Renewable energy
District heating projectSite use of renewables
Connection of site to Villach district heating network, biomass-fired energy supply by the regional provider Kelag, approx. 77% reduction of gas consumption
Evaluation Ö-Norm EN16001
Evaluation of an organizational energy management system for sustainably increasing energy efficiency as part of a thesis, mirroring with integrated management system
Optimization of the energy consumption of sub-equipment
Pilot project for sub-equipment (vacuum pumps and abatement) launched for synchronization with the operating hours of production equipment
Optimization of lighting Installation of LED technology for selective areas in production and periphery
Recycling/reuse of exhaust gases containing hydrogen
Selection of the variants evaluated in preliminary stu-dies, feasibility study on the recycling of the hydrogen to the process
Redundant resource-optimized exhaust air purification plant
Evaluation of an alternative exhaust air purification system on adsorption/desorption basis (further reduction in natural gas)
Hazardous materials
Revision of the acquisition process for hazardous materials
Update and extension of the procedural rule and addition of the aspects export and dual use
Internal /External Communication
Raising environmental and energy awareness Portrayal of energy efficiency and EMAS in the new site brochure
Recycling Recycling of spent solvents Recycling and qualification study for PGMEA in the facilities sector
Continuation of the innovation projects on the integration of electric vehicles into an overall mobility and energy provision concept
Technology projects with leading automotive and power supply companies to increase the energy efficiency in e-mobility, including
ASIC development for raising the efficiency in lithium-ion batteries by intelligent battery management and balancing systemdemonstrator of a highly efficient AC/DC on-board battery chargerstart of development of an efficient battery master switch with power electronics
R&D test case (PV, smart grid, e-car & charging station)
Set-up of an R&D test case at the site in collaboration with regional energy provider and research companies
Energy
E-mobility
Waste / waste water
Exhaust air
•
•
•
IMPRES Program 2010/11 - Implemented Measures
52
Umweltleistungen
Area Goal Measure Result 2012
Abfall/ Abwasser
Revalidation of in-house environmental laboratory
Extension of the validation to include waste and spent solvent analysis, apart from waste water
State-of-the-art backup for production and site expansion
Integration and disposal of the additional waste water volumes using the existing waste water plant, expansion of plant capacity
AbluftExpansion of capacity for cleaning exhaust air containing solvents in the area of Hall 14
Ramp-up of a further thermal combustion plant for solvents to clean exhaust air
State-of-the-art backup for production and site expansion (technical guidelines on air quality control - TA-Luft)
Integration and disposal of additional exhaust air volume using additional exhaust air purification equipment, increased use of new exhaust air purification technologies (MAT)
Health Healthy and capable staff
Continuation of company health promotion with an integrated approach, carrying out activities based on the annual review of the in-house steering group, focusing on: health care, exercise, mental health and burn-out prophylaxis
Workplace safety / Production
Increased safety backup of the site expansion and building activities underway
Deployment of an external safety expert with special building site experience for raising the safety standard across the board
Renewable energy
Implementation phase of district heating project Site use of renewable energy
Full supply of the site and extended areas with biomass-fired heating from the regional energy provider Kelag, planned reduction of gas consumption by approx. 70 to 80%. (Achieved: 76%)
Emergencymanagement
Raising the safety standard for emergency crews
Construction of a new fire station as the operations center for the company fire service with efficient safety technology at a traffic-optimized location on the periphery of the site
Component FY 11/12 planning and allocation of land Completion 03.2013
Certification under ÖNORM ISO 50001 Pre-audit of an energy management system for sustainably increasing energy efficiency, incorporation into existing integrated management system
Optimization of the energy consumption of sub-equipment
Pilot project for sub-equipment (vacuum pumps and abatement) for synchronization with the operating hours of production equipment; will be extended to further systems for long-duration tests
Optimization of lighting Installation of LED technology for selective areas in production and periphery will be extended
Recycling / reuse of exhaust gases containing hydrogen
Preference given to reuse variant and evaluation will be continued as to feasibility
Building 07 as energy efficiency pilot project for “sustainable building”
Certification of the building as “Klimaaktivhaus Klasse A”
E-mobility Raising awareness of e-mobilityMobility Days @ IFAT: presentation of IFX product port-folio for all employees, presentation and testing of e-cars, e-scooters, e-bikes, joint event with external parties
IMPRES Program2011/12 - Implemented Measures
Energy eff iciency
Waste / Waste water
Exhaust air
Not yet implemented Partially implemented Project successfully implemented
54
5.2 Planned Measures 2012/13
Area Goal Measure Status date
Certification under ISO 50001 Implementation of the energy management system
Site audit for matrix certification 11/2012 successfully performed
09/13
Optimization of the energy consumption of sub-equipment Connect selected equipment
Implementation planned after successful pilot project
09/13
Optimization of lightingInstallation of LED technology for selective areas in production and periphery will be extended
Further implementation as part of maintenance measures in lighting technology
09/13
Recycling / reuse of exhaust gases containing hydrogen
Preference given to reuse variant and evaluation will be continued as to feasibility
Currently continuing assessment with external partners
09/13
"Free cooling" for process chilled water 15°C
Cooling of process chilled water with cooling towers at an ambient temperature > 15°C instead of chillers
Preliminary studies completed, planning for overall concept begun 09/13
Renewable energy
Use of photovoltaics Evaluation of the use of a photovoltaic farm
Initial discussions with potential partners 09/13
Waste/Recyclable material
Increased recycling of materials
Concept study on increased solvent recycling (500 t,or plus 20%); securing delivery logistics of recyclable metals
Determination of basic data and strategic analysis; legal analysisand logistics
09/13
Emergency management
Raising the safety standardat the siteConstruction and commissioning of a new fire station on the peri-phery ofthe site
Completion of structural work 03/13
HealthContinuation of health promotion usingan integrated approach
Priorities for FY 12/13 are again the topics of exercise, nutrition and mental health.
Ongoing courses, seminars, workshops and counseling on the priority topics with active participation
09/13
IMPRES Program 2012/13 - Goals for 2013
Energy eff iciency
Based on the energy certification according to ISO 50001 initiated in FY 11/12, the planned measures for 2012/13 focus
primarily on projects relating to energy efficiency. The construction and commissioning of a new fire station was carried
over from FY 11/12.
Not yet implemented Partially implemented Project successfully implemented
5.3 Special Environmental Achievements2009-2012
In the area of special environmental achievements, the Villach site has displayed strong innovative
powerandaforward-lookingapproach.Afewimportantexamplesarelistedbelow:
Area Goal Measure Status date
Certification under ISO 50001 Implementation of the energy management system
Site audit for matrix certification 11/2012 successfully performed
09/13
Optimization of the energy consumption of sub-equipment Connect selected equipment
Implementation planned after successful pilot project
09/13
Optimization of lightingInstallation of LED technology for selective areas in production and periphery will be extended
Further implementation as part of maintenance measures in lighting technology
09/13
Recycling / reuse of exhaust gases containing hydrogen
Preference given to reuse variant and evaluation will be continued as to feasibility
Currently continuing assessment with external partners
09/13
"Free cooling" for process chilled water 15°C
Cooling of process chilled water with cooling towers at an ambient temperature > 15°C instead of chillers
Preliminary studies completed, planning for overall concept begun 09/13
Renewable energy
Use of photovoltaics Evaluation of the use of a photovoltaic farm
Initial discussions with potential partners 09/13
Waste/Recyclable material
Increased recycling of materials
Concept study on increased solvent recycling (500 t,or plus 20%); securing delivery logistics of recyclable metals
Determination of basic data and strategic analysis; legal analysisand logistics
09/13
Emergency management
Raising the safety standardat the siteConstruction and commissioning of a new fire station on the peri-phery ofthe site
Completion of structural work 03/13
HealthContinuation of health promotion usingan integrated approach
Priorities for FY 12/13 are again the topics of exercise, nutrition and mental health.
Ongoing courses, seminars, workshops and counseling on the priority topics with active participation
09/13
Area Projects
Renewable energy carriers
Building on years of successful experience with heat exchangers and heat pumps,
Villach was again able to achieve savings in the amount of energy
required amounting to approximately 20% based on the total amount of energy used.
Energy-efficient site expansion
Building 07, a new building for research and development, is also supplied district
heating andcan be assigned to efficiency class B in accordance with OIB (Austrian
Institute of Construction Engineering) guideline no. 6. It has a specific heat demand
approximately 30% below the level currently required, and it is fitted with optimized
thermal insulation and solar protection glazing. In addition, a thermal solar energy
system for heating water was installed on the roof. The building therefore conforms
tostate-of-the-artstandardsrelatingtoenergydemand.
district heating
Changeover from natural gas to district heating: the Villach site heating system of
InfineonTechnologiesAustriaAGwasswitchedfromgastobiomass(wood)-fireddistrict
heating in the interest of using local renewable bio resources. This not only permits
optimization of the site’s carbon footprint, but also achieves greater independence
from the international gas market and hence increased security of supply.
The successful use of renewable energy sources (biogenic resources) is reflected in a
reduction in natural gas consumption of 76%.
Recycling
In the last three fiscal years, 15% to 30% of the DMF and PGMEA solvents could be
recycled through internal distillation measures.
The most recently reduced recycling rate results from increased demands on the
separationprocessesarisingfromtechnology-relatedprocess-specificimpurities.
Thus,two-thirdsoftheamountofrecycling,inparticularcyclopentanoneandNMP,
was processed on a contract distillation basis by a German materials recycling
company, with a yield of 50% to 65%.
Exhaust air
Expansionoftheon-sitepurificationsystemforexhaustaircontainingsolventsthrough
theadditionofanewsysteminHall14,increaseduseofnewgas-freeexhaustair
purification technologiesfor cleaning perfluorinated hydrocarbons and safeguarding
productionandsiteexpansionbymeansofthreehigh-volumescrubbersunderTALuft.
56
Fiscal Year Changes
2009/10
InfineonTechnologiesAustriaAG,Villachsite,firstEMASIII-certifiedplant
(visit of Mr. Berlakovich, Minister of the Environment, and presentation of the
EMAS III certificate)
First positive implementation and results of the Energy Efficiency Project
Underthecentralthemeofa“breathingfactory”,numerousmeasuresweretakento
reduce energy consumption in periods of lower utilization of production capacity.
2010/11
Switchover of the energy supply in the area of heating from gas to district heating
Setupofaphotovoltaic-basede-chargingstationfore-cars,e-scootersande-bikes
Building activities to provide 2,000 m2 additional cleanroom area for 300mm and
200mmthin-wafertechnologyproduction
Building activities to provide a new building for research and development,
including laboratory opening: May 31, 2012)
2011/12
Operationalstart-upofthenewproductionfloor-Hall15-onMarch31,2012
(opening: March 1, 2012)
Openingofthenewhighlyenergy-efficientBuilding07forresearchand
development, includes laboratory
Opening of the International Day Care Centers (provisional) operated
by Verein Sonnenstrahl (Sunbeam Association) for children from one to six years
of age, focusing on English and technology (September 2012)
Decision on energy certification in accordance with ISO 50001 –
successful Initial Visit
5.4 Important Changes since the last Consolidated Environmental Statement
A review of the last three fiscal years reveals the following changes at the Villach site:
•
••
• •
•
•
•
•
• •
6.1 Validation
6 Annex
Validation
58
6.2 Glossary
AustrianWaste-WaterEmissionOrdinance(Abwasseremissionsverordnung) entities with more than 50 percent of their proprietary shares belonging to the company are called affiliated companies
is the systematic and documented verification process in the company by means of which data and processes are determined and assessed
AustrianSocialInsuranceforOccupationalRisks(AllgemeineUnfall-versicherungsanstalt)
comprehensive health project for employees aged 50+
used for the manufacture and inspection of micromechanical and electronic components and systems posing special requirements as regards, for example, freedom from particles
abbreviation for Chemical Mechanical Polishing
CO2, chemical formula for carbon dioxide; as the greenhouse gases have different effects on the climate, a common unit of measurement is needed so that they can be compared with one another; this unit is called CO2 equivalent and is calculated from the volume of the emissions of a certain gas multiplied by its impact factor
Productionequipmentiscompletelyturnedoff–“Poweroff”
organic solvent
DC conversion
abbreviation for the solvent dimethyl formamide
abbreviation for electrochemical deposition
abbreviation for Eco Management and Audit Scheme
termforinnovationprojectatInfineontosupportenergy-efficientelectricandhybridvehicles
the International Standardization Organization (ISO) developed the globally applicable standard EN ISO 14001 in order to support companies in developing and expanding company environmental management systems
comprises the surrounding in which the company, or parts of it, is/are active; this includes air, water, land and other natural resources, people and nature, as well as their interrelation
describe the portion of activities, products or services etc. of the company or its constituent parts or its sites which interactor can interact with the environment
each positive or negative change to the environment which is completely or partially the result of the activities, products, services etc. of the company or its constituent parts or its sites
environmental management is part of the organization’s management system; the environmental management system includes the organizational structure, planning activities, practices, processes and resources required for developing, implementing, achieving, assessing and maintaining the environmental policy
with this document, the company sites which are validated according to the ordinance (EC) No. 1221/2009, regularly report their activities,individualenvironmentaltargets,environmentally-focusedachievements,environmentalimpactsetc.tothewiderpublic
type of production where chips are made on the wafers
ultrapure water
substances and preparations with one or more of the following dangerous properties: explosive, oxidizing, highly or readily flammable, toxic, highly toxic, detrimental to health, caustic, irritating, sensitizing, carcinogenic, toxic for reproduction, mutagenic, chronically damaging in some other way, pathogenic, or harmful to the environment
gas chromatography / mass spectroscopy, analytical technique in the field of organic compounds
Globally Harmonized System of Classification, Labeling and Packaging of Chemicals
symbol for gigajoule
optimized air conditioning for servers
AEV Affiliated companies
Audit
AUVA
Best Ageing
Cleanroom
CMP
CO2 equivalent
Cold Steel mode
Cyclopentanone
dC/dC
dMF
ECd
EMAS
E-Mobility
En ISO 14001
Environment (based on En ISO 14001)
Environmental aspects
Environmental impact
Environmental management system (based on En ISO 14001)
Environmental Statement
Frontend
Fully deionized water
Hazardous material
GC/MS
GHS
Gj
Green IT
Glossary
Glossary
Inductively Coupled Plasma/ Mass Spectroscopy, analytical technique for determining metal InfineonIntegrated Management Program for Environment, Energy, Safety andHealth
Overall objective harmonized with the IMPRES policy, which the organization sets itself in the IMPRES manual
The organization’s collective aims and direction relating to its performance, as formulated at managerial level
isadescriptionoftheESHandenergy-relatedindividualgoalsoftheorganization’ssites
Information Technology comprises all the methods, concepts and techniques for processing, storing, transmitting and providing access to information and data
protocol to the United Nations Framework Convention on Climate Change
symbol for liter
assurance that legal responsibilities are met
all units/sites of an organization certified by an expert are specified on a certificate
MF 320:production chemical
abbreviationforManufacturedLayer;product-specificnumberoflithographylayers
abbreviationformegawatt-hour
abbreviationforthesolventN-methyl-2-pyrrolidone
abbreviation for standard cubic kilometer
symbol for nanometer
(Occupational Health and Safety Assessment Series) is an international standard for the assessment and certificationof a respective management system
abbreviation for perfluorinated compounds
abbreviation for the solvent propylene glycol monomethyl ether acetate
a crystalline material displaying increasing electrical conductivity as temperature rises, examples of semiconductors are silicon or germanium; the term is also applied to ICs made of this material
Production equipment components are partially turned off
are suspensions of solids, in some cases with chemical additives, which are used in the CMP process
Productionequipment is ready for use in production
is the level of development of advanced processes, installations or operating methods which makes a measure seem fitforprotectinghealth,safeguardingemployeesandlimitingenvironmentaldamage.Comparable,tried-and-testedprocesses,
installations or operating methods should be used for determining the state of the art
symbol for a tonne (metric ton)
terawatt hour
Austrian Ordinance on Optical Radiation (Verordnung Optische Strahlung)
Disk of semiconductor material (silicon) with a diameter of up to 300 millimeters; in the production of ICs it is cut from monocrystalline silicon and serves as a substrate for integrated circuits
CompanyIdeaManagement“Yourideapays”
ICP/MS IMPRES
IMPRES-related objective
IMPRES policy
IMPRES program IT
Kyoto Protocol l
Legal Compliance
Matrix cer tif icate
MF 320
ML MWh
nMP nkm3
nm
OHSAS 18001
PFC
PGMEA
Semiconductor
Sleeping mode
Slurries Standby mode
State of the ar t
t:symbol
tWh
VOPSt
Wafer
YIP
60
6.4 Contact Persons
General Information: [email protected]
www.infineon.at
6.3 Date for Next Environmental Statement
The next environmental statement will be an Updated Environmental Statement which will
be presented at the beginning of 2014.
The following contact persons are available for further information on the subjects of
environmental protection, safety, health and energy:
Contact Person for Environmental Protection & Industrial Safety
Dr. Adolf Biedermann
Senior Manager Facility Management ES
Tel:+43(0)51777-2656
E-Mail:[email protected]
Contact Person for Energy Management
Josef Obiltschnig
Manager Energy Management
Tel:+43(0)51777-2750
E-Mail:[email protected]
Head of Public Relations
Dr. Ingrid Lawicka
Senior Manager Public Affairs and Communications
Tel:+43(0)51777-2004
E-Mail:[email protected]
Begriffserklärung
Environmental Statement
ThisenvironmentalstatementwasprintedonHello-SilkpaperwithPEFC-Declaration:
PEFC-Declarationsonwoodproductsinformontheirderivationf romsustainablycultivated forests, recycling and other controlled sources. The most important aim of thePEFCproofofproduct-chainistoprovidebuyersofwoodproductswithaccurateandverif iableinformationthatmaterialsoriginatedf romPEFC-cer tif ied,sustainably cultivated forests or recycling.
Inf ineon Technologies Austria AG
VillachSiemensstrasse 2A-9500 VillachTel.: +43 (0)517 77 - 0 Fax: +43 (0)517 77 - 3501E-Mail: info-austria@inf ineon.com
Other Sites in Austria:
GrazBabenberger Strasse 10A-8020 GrazTel.: +43 (0)517 77 - 0 Fax: +43 (0)517 77 - 5991
ViennaLinke Wienzeile 4/1/3 A-1060 WienTel.: +43 (0)1 /517 77 7 - 11111Fax: +43 (0)1 /517 77 - 11 500
DICE GmbH & CO KG LinzFreistädter Strasse 400A-4040 LinzTel.: +43 (0)517 77 - 15 151Fax: +43 (0)517 77 - 15 999
www.inf ineon.com/austria
Infineon Technologies Austria AG, March 2013, In co-operation with Infineon Technologies AG, Corporate Environmental Affairs & Operations Support
Order No. B192-H9798-X-X-7600
Innovative semiconductor solutions for energy efficiency, mobility and security.
ENERGY EFFICIENCYNot only are we actively working to reduce the carbon footprint of our production activities worldwide, we are also delivering the innovations required to shape a more sustainable society as we move forward.
MOBILITYIn an increasingly mobile world, we deliver a rich and deep set of technologies and solutions that raises the bar for safety, affordability and efficiency.
SECURITYGrowing mobility calls for more robust security solutions in communication, transport and IT applications. We have the industry’s largest portfolio of chips and interfaces to meet the most demanding security tasks.
Infineon Technologies IT Services GmbHLakeside B059020 KlagenfurtTel.: +43 (0)517 77 - 0 Fax: +43 (0)517 77 - 4666
Infineon Technologies Romania SCSBd. Dimitrie Pompeiu nr. 6Sector 2020337 BucharestRomaniaTel.: +40 (0)31 860 - 77 01Fax: +40 (0)31 860 - 78 64
Infineon Technologies (Kulim) Sdn BhdLot 10 & 11, Jalan High-Tech 7Industrial Zone Phase IIKulim Hi-Tech Park09000 KulimKedah Darul AmanMalaysiaTel.: +60 427 - 8888Fax: +60 427 - 8889