electronic autocollimators for precise angle measurement · autocollimator the triangle ®...

TriAngle®

Electronic Autocollimators forPrecise Angle Measurement

Angle Measurement Solutions

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PageContents

Highly Flexible Angle Measurement Solutions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5

TriAngle® - The Most Versatile Electronic Autocollimator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5

TriAngle® UltraSpec - Ultra Precision Angle Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6

TriAngle® HiSpeed - High Speed Angle Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8

TriAngle® LASER - Measures at Low Reflectivity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9

Customized TriAngle® Solutions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10

The Complete Software Package for Angle Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11

Software Features und Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12

Easy Integration of Customized Measurement Solutions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .13

OptiAngle® Programming Interface (API) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .13

Typical TriAngle® Measurement Applications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .13

Straightness Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .14

Wedge Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .15

Calibration of Index Tables and Rotary Encoders . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .16

Order Information TriAngle® . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .17

Delivery Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .17

Measurement Capabilities and Recommendations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .18

TriAngle® Configurations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .18

Opto-mechanical Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .18

Order Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .20

Measurement Applications 13

Accessories 18

OptiAngle® Software for TriAngle® 11

TriAngle® Angle Measurement Solutions 3

Operating Principle 4

TriAngle® Product Range 5

Technical Data and Order Information 17

The TriAngle® electronic autocollimators arenon-contact optical test tools for the high-pre-cision measurement of angular displace-

ments of specular reflective surfaces and theaccurate angular alignment of optical or me-chanical parts.

TriAngle® autocollimators are available in sixapplication specific variants:


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TriAngle®


TriAngle® the most versatile electronic autocollimator for standard applications

TriAngle® UltraSpec enhanced sensor technology for highest resolution and ultra precise measurement results

TriAngle® HiSpeed for high speed angular measurements

TriAngle® LASER for small or low-reflectivity samples or long distance measurements

TriAngle® Focus employs focusing objective tubes for contact-free optical radius measurements

TriAngle® NIR are used for applications that require measurements at the NIR range

• Straightness measurement• Flatness measurement• Squareness measurement

User defined measurement procedures canbe added into the standard software by aplug-in mechanism. In addition there is anopen programming interface for the integra-tion of the TriAngle® measurement functionsinto other applications.

Upon request, TRIOPTICS offers customized Tri-Angle® instruments, as for example

• Increased measurement ranges • Larger apertures• Vacuum compatibility• Focusing objectives• Customized illumination• Customized sensor technology

The operating principle of an autocollimatorcombines the functions of a collimator and atelescope in a single instrument. The collima-

tor part projects an illumi-nated reticle to infinityand the telescope partreceives this image backafter reflection at a mirrorsur face. Both opticalpaths are separated bya beam splitter. The re-ceived image is broughtto the focus of the ob-jective lens in which theCCD of an electroniccamera or some otherposition sensor is locat-ed.

TriAngle® autocollimators have a versatilemodular design which allows the fitting of alarge selection of objective tubes, differentsensors, reticles and light sources. With objec-tive tubes of different focal lengths and aper-tures the optimum measurement solution re-garding angle resolution and measurementrange is easily found. The digital camera in-terface enables the use of a notebook ordesktop PC, or a mobile touch-screen displayunit for measurements in the field.

The comprehensive OptiAngle® softwarerecords, analyzes, stores and reports themeasurement results for later reference. A comprehensive set of predefined measure-ment programs cover all standard applica-tions. It includes

• Absolute and relative angle measure-ments of mirror surfaces

• Absolute and relative angle measure-ments of collimated sources

• Wedge angle measurement• 90° prism errors• 45° prism errors• Wobble (run-out) measurement of rotat-ing samples


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Autocollimator Operating Principle

Operating Principle

Illumination

Objective Lens

Object Reticle

ImagePlane

MirrorSurface

Beam Splitter

Focal Length

2α

α

d

f

In this arrangement the illuminated reticleand the CCD plane are conjugate. When thecollimated beam falls on a mirror which is al-most perpendicular to the beam axis, thecrosshair image will be located somewhatnear the center of the CCD. If the reflector isnow tilted by an angle α the reflected im-age will be laterally displaced by the amountd with respect to the original position. This dis-placement d is a function of the tilt angle αand the focal length f of the objective lens: d = 2 × α × f. When d is measured on theCCD the tilt angle α of the mirror can be cal-culated by

This displacement is linear with the tilt angle(small angles assumed) and the measure-ment result is independent from the instru-ment’s distance to the mirror.

Highly Flexible Angle Measurement Solu-tions

The TriAngle® series of electronic autocollima-tors is designed for outstanding performanceand flexibility. All TriAngle® instruments sharethe same form factor, depending on the cho-sen focal length, i.e. objective tube, for therequired measurement resolution. The com-prehensive and comfortable OptiAngle® soft-ware communicates with all TriAngle® auto-collimators.

TriAngle® - The Most Versatile ElectronicAutocollimator

The TriAngle® electronic autocollimator is thestandard and most universal instrument of theTriAngle® series offering a maximum set ofmeasurement functions including variouswedge and prism measurements. I t isequipped with a high brightness LED lightsource and a high-resolution CCD sensor. The

compatibility with objec-tive tubes of different fo-cal lengths leads to avariable measuringrange and accuracyperformance between2.5 and 0.2 arcsec de-pending on the focallength.

The TriAngle® autocolli-mators are ideally suitedfor standard angle mea-surement and alignmentpurposes in the laborato-ry, as well as for the pro-duction measurement ofprisms and wedges.

Operating Principle

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General setup of a TriAngle® autocollimator

TriAngle® Product Range

α = d2f

Illumination

FilterCondensor

DiffusorObject Reticle

Digital Camera CCD Sensor Beam Splitter

Objective Lens

Target Illumination

While a high power green LED of 530 nm cen-ter wavelength is the standard light source,other illumination types (NIR-LED, Laser, halo-gene white light source) are available for theadaption to specific sample characteristics.

Sensor

TriAngle® series autocollimators are equippedwith modern high resolution CCD camerasensors offering a maximum of image qualityand signal to noise ratio. They achieve a stan-dard measuring rate of 30 measurements persecond. Higher measurement rates are avail-able upon request. The following specificationfor field of view is given for standard sensorsizes. Please ask for other sensor sizes, de-pending on your requirements for field of viewand angle resolution.

TriAngle® Specification

TriAngle® UltraSpec - Ultra Precision AngleMeasurement

The electronic autocollimators of the TriAngle®

UltraSpec Series represent high-precision an-gle measurement systems for extremely highdemands on angle resolution and measuringaccuracy.

The application suite further includes straightness and f latness measurement tools for the mechanical engineering. The TriAngle® electronic autocollimator isavailable with 8 different objective tubes with focal lengths ranging from 100 mm to1000 mm.


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Objective Tube Identifier

Effective Focal Length(mm)

Clear Aperture (mm)

TA 100-38 100 30

TA 150-38 150 30

TA 200-38 200 30

TA 300-38 300 30

TA 300-57 300 50

TA 500-57 500 50

TA 1000-115 1000 100

TA 1000-140 1000 125

Order Code Type Field of Viewhor. (x) × vert. (y)(arcsec)

Resolution(arcsec)

Repeatability(arcsec)

Accuracy(arcsec)

3-103-061 TA 100-38 6630 × 49200.1 0.3

2.5

3-103-062 TA 150-38 4420 × 3280 1.7

3-103-063 TA 200-38 3310 × 2460

0.01

0.2 1.3

3-103-064 TA 300-382210 × 1640 0.1 0.75

3-103-065 TA 300-57

3-103-066 TA 500-57 1320 × 980 0.05 0.4

3-103-068 TA 1000-115660 × 490 0.025 0.2

3-103-069 TA 1000-140

LED illumination

Peak Wavelength 530 nm

Spectral Half-width 35 nm

Objective Tube Selection Guide

Applications include:

• Calibration laboratories• Semiconductor equipment manufactur-ing

• High-energy physics• Laser physics• Space science

Therefore, TriAngle® UltraSpec autocollimatorsare used for high-end measuring, testing andadjustment processes where highest precision

and reliability in angle determination are re-quired, for example:

• Adjustment and verification of the straightness of linear stages

• Run-out measurement of rotary tables• Measurement of large-area surface flat-ness

• Alignment of optical components• Alignment of machines and equipment• Stability studies


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TriAngle® UltraSpec

TriAngle® UltraSpec Application

TriAngle® HiSpeed - High Speed AngleMeasurement

The TriAngle® HiSpeed series of autocollima-tors take advantage of a high bandwidth po-sition sensitive photo detector for angle mea-surement rates up to 10 kHz. The analog sig-nal output of the angular data enables theclosed loop control operation for the fast ad-justment or angular control operation. Thestrong laser illumination allows the TriAngle®

HiSpeed to measure very small and low re-flectivity surfaces.

The employed position sen-sitive detector of TriAngle®

HiSpeed dissipates almostno heat and is vacuumcompatible. For specialapplications in space sci-ence and high-energyphysics, TRIOPTICS has de-veloped dedicated vacu-um compatible versions ofTriAngle® HiSpeed, to beused e.g. in thermal vacu-um chambers (TVC).

Each autocollimator of the TriAngle® UltraSpecseries is calibrated with PTB angle standardsand supplied with test certificates and individ-ual calibration curves. Traceability of themeasuring results to international standards ofthe angle measuring variable is consistentlyensured.

The mechanically and thermally optimizeddesign of the TriAngle® UltraSpec is availablewith the objective focal lengths 300 mm and500 mm and permits precise and reliablemeasurements even under difficult condi-tions. The optical system of the TriAngle® Ultra-Spec autocollimators comprises the superblycorrected objective lens of minimum distor-tion and a high-resolution digital CCD cam-era with extremely low sensor noise. The lightsource employs a stabilized high power LED il-luminating the newly developed sensor sys-tem for enhanced angle resolution.

TRIOPTICS offers the TriAngle® UltraSpec auto-collimator as a complete measurement sys-tem including a mobile touch-screen controlunit with the user-friendly OptiAngle® softwarepreinstalled.

TriAngle® UltraSpec Specification


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Vacuum compatible TriAngle® HiSpeed

Order Code 3-109-065 3-109-066

Type TA US 300-57 TA US 500-57

Focal Length 300 mm 500 mm

Measuring range (h × v) (1) 3010" × 2230" 1800" × 1340"

Resolution 0.005"

Clear aperture 45 mm

Measuring accuracy ±0.05" within 10" measuring range±0.10" within 20" measuring range±0.25" within the total measuring range

LED wavelength 530 nm, spectral half-width: 35 nm

Measuring rate > 10 measurements / sec

(1)within approx. 2 m measuring distance, diminishing beyond this

TriAngle® LASER - Measures at Low Reflec-tivity

The TriAngle® Laser is equipped with a laserlight source instead of a LED illuminated

reticle and employs a CCD camera for theangle measurement. It is ideally suited for themeasurement of small optical components,surfaces of low reflectivity, or long distancemeasurements.


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(1) sensors for enlarged field of view available (multiply value by 2.5)(2) within 80% field of view

Order Code Type Field of View(1)

(hor./vert.)(arcsec)

Resolution(arcsec)

Linearity(2) (%) Bandwidth (-3dB)

3-107-061 TA HS 100-38 4000 1.0

0.8 10 kHz

3-107-062 TA HS 150-38 2660 0.6

3-107-063 TA HS 200-38 2000 0.5

3-107-064 TA HS 300-381330 0.3

3-107-065 TA HS 300-57

3-107-066 TA HS 500-57 800 0.2

3-107-068 TA HS 1000-115 400 0.1

3-107-069 TA HS 1000-140

Laser illumination

Wavelength: 635 nm

Output Power: < 2 mW

TriAngle® HiSpeed Specification

Order Code Type Field of Viewhor. (x) × vert. (y)(arcsec)

Resolution(arcsec)

Repeatability(arcsec)

Accuracy(arcsec)

3-108-061 TA L 100-38 6630 × 49200,5 0.8

2.5

3-108-062 TA L 150-38 4420 × 3280 1.7

3-108-063 TA L 200-38 3310 × 2460

0,05

0.4 1.3

3-108-064 TA L 300-382210 × 1640 0.25 0.75

3-108-065 TA L 300-57

3-108-066 TA L 500-57 1320 × 980 0.15 0.4

3-108-068 TA L 1000-115660 × 490 0.08 0.2

3-108-069 TA L 1000-140

TriAngle® LASER Specification

measuring range without compromising themeasurement accuracy and resolution. Itcomes with a specially calibrated large fieldsensor and optimized imaging optics.

Customized TriAngle® Solutions

TriAngle® LF with large field of view

The TriAngle® LF autocollimator has been designed for applications requiring a large


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Laser illumination

Wavelength: 635 nm

Output Power: < 2 mW

TriAngle® LF Specification

Order Code 3-103-061-LF

Type TA LF 100-38

Focal Length 100 mm

Measuring range (h × v) (1) 4° × 4°

Resolution 0.08"

Clear aperture 30 mm

Measuring accuracy ±1.0" within 80% measuring range

LED wavelength 530 nm, spectral half-width: 35 nm

Measuring rate > 10 measurements / sec.

Order Code Type Focal Length (mm) Focus Range (mm)

3-104-061 TA F 100-38±10 100 ±10

3-104-062 TA F 150-38±10 150 ±10

3-104-065 TA F 300-57±25 300 ±25

3-104-066 TA F 500-57±50 500 ±50

3-104-068 TA F 1000-115±50 1000 ±50

3-104-069 TA F 1000-140±50 1000 ±50

TriAngle® F Order Information

TriAngle® F

The TriAngle® F series is based on the standardTriAngle® design but employs focusing objec-

tive tubes for the measurement of slightlyspherical mirror sur faces or some other systems with optical power.

TriAngle® NIR

The TriAngle NIR electronic autocollimatorsemploy LED lights which emit in the NIR range.It is used for measurements on material whichonly transmit light in the NIR range, such asare used in night vision devices. Another ap-plication is the laser beam alignment of lasersthat emit light at a wavelength in the NIRspectral range.

The specific wavelength can be individuallyselected.

Standard wavelength: 1064 nm (other wave-lengths available on request)

Order Code: 3-105-061...069

The Complete Software Package for AngleMeasurement

The software OptiAngle® is a powerful toolcovering all aspects of accurate angle mea-surement with the TriAngle® electronic auto-collimators in terms of measurement, controland analysis of the angular data. The well or-ganized and modern menu-guided user in-terface assists even the inexperienced opera-tor to perform accurate measurements andto obtain repeatable results. A large set ofpre-defined standard measurement applica-tions is integrated into OptiAngle® which coverall established measurement techniques in

OptiAngle® Software

11Main screen of OptiAngle® Software

OptiAngle® Softwarefor TriAngle®

• User defined graphical scales or indica-tors inside the camera window

• Simultaneous measurement with multi-ple (up to 12) autocollimators

• Simultaneous measurement of multiple surface reflections (up to 12)

• Comprehensive data reporting functions• ASCII (CSV) data export • Selectable angle units for screen display and measurement certificate

• Software remote control by host com-puter via RS232 interface

• Programming interface by MS OLE Au-tomation or via DLL

• Plug-in mechanism for customized mea-surement programs

• User defined measurement certificate layout

• Demo programming examples for Excel, MatLab, LabView, VBA

optical and mechanical industry. In addition,customized measurement routines can beeasily developed and embedded either byTRIOPTICS or the experienced end user. AllOptiAngle® measurement functions can befurther used in other common applicationslike MatLab, LabView or Visual Basic (Excel).

Software Features und Functions

The TriAngle® software provides many featuresto simplify the daily use of TriAngle® autocolli-mators whether in the laboratory or in the pro-duction environment.

• Real-time camera display• Numerical and graphical display of measurement data

• Optional full screen camera window (vi-sual alignment mode)

OptiAngle® SOFTWARE

12TriAngle® software interface with time chart of angle results

• Multiple camera interface technology for IEEE 1394 (Firewire), USB, Gigabit Eth-ernet, CameraLink or Analog Video Cameras

• Production mode for batch/lot sample identification and result reporting

Easy Integration of Customized Measure-ment Solutions

The OptiAngle® software allows the integrationof customized measurement Plug-Ins with adedicated user interface for specialized tar-get applications. Custom specific measure-ment routines and display functions are quick-ly implemented to take care of specializedprocedures, e.g. in a production environ-ment. The advantages are

• User interface adapted to specialized applications• Increase of throughput• Avoidance of faulty operations in pro-duction processes

• Integration of external hardware and software possible

• Adaptation to familiar data processing and display

OptiAngle® Programming Interface (API)

In addition to the above Plug-In mechanism,the OptiAngle® functions can be embeddedinto a larger measurement framework whichthen can take control over the full functionali-ty of OptiAngle® measurement applications.OptiAngle® features an open software con-cept and programming interface which al-lows for the flexible and easy integration intoother software environments. The angle mea-surement functions of TriAngle® autocollima-tors can thus be integrated into almost anyexisting measurement application. In contrastto the Plug-In technology the user himself isenabled to develop the interfacing betweenthe TriAngle® autocollimator and his governingapplication.

OptiAngle® functions are executed either bysending commands via serial port (RS232) orMS OLE Automation communication, or di-rectly using the DLL based C++ program-ming interface (API). Existing sample applica-tions and the comprehensive documentationdemonstrate the control of TriAngle® autocolli-mators by MatLab, LabView, VBA, Excel. TRIOP-TICS will be happy to assist the user to inte-grate the TriAngle® functions into his own ap-plication.

Typical TriAngle® Measurement Applica-tions

The applications of TriAngle® autocollimatorsare mainly related to the detection and mea-surement of small angular displacements. TRI-OPTICS has successfully supported customersin a wide area of application fields.

• Assembly and adjustment of optical components like mirrors, prisms, win-dows, wedges etc.

• Alignment of machinery

Measurement Applications

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TriAngle® modular software concept


Straightness Measurement

The straightness measurement is the dailypractice of manufacturers of linear stages,guides and rails whether in precision me-chanics or machine tools. The travel of amoving carriage is investigated regarding an-gular motion errors square to the direction ofmovement, called yaw, pitch and roll errors.

A reference mirror mounted to the carriage ismoved with a constant step length b alongthe stage or rai l to be measured. For each step the angular output α i of TriAngle® autocollimator is recorded. The soft-ware displays the angular measurement dataas well as the straightness deviation δ in µmunits. Motor driver software modules for stan-dard DC- and stepper-motors are includedwhich makes the measurement of motorizedstages very convenient.

• Proof of straightness and flatness of ta-bles, rails, linear guides, etc.

• Measurement of yaw, pitch and roll er-rors of linear stages

• Characterization of rotation stages (wobble and run-out measurement)

• Measurement of wedge, prism and polygon angles

• Measurement of parallelism of reflecting surfaces

• CD/DVD ROM alignment (focusing and tracking)

• Thermal stability investigations• Analyzing the stability or deformation of mechanical or optical constructions

• Vibration analysis• Alignment of astronomical systems• Alignment of components for the beam control in high energy physics

• Inspection of solid state Laser rods• and many more ...

A few prominent examples will be given in thefollowing sections.


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TriAngle® autocollimator measuring pitch and yaw of a linear stage


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3D Straightness measurement

Wedge Measurement

The inspection of optical wedges with an au-tocollimator is the fastest and most conve-nient way of measuring wedge angles, espe-cially in production environments. When theparallel beam emerging from the TriAngle®

autocollimator is directed square to thewedge it is reflected back from both the frontand the back surface of the wedge. As theresult, two crosshairs are displayed on thecamera screen, with a distance d dependingon the wedge angle and the refractive index nof the material. The wedge angle δ is given by

Where

d = distance of both surface reflection images

n = refractive index of the wedge material

f = focal length of the auto-collimator

Straightness measurement with TriAngle®

δ (zn)=b tanα iΣn

i=1

δ = d2nf


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The wedge angle is automatically computedby the software according to the above formula.

The software further includes the program forthe wedge measurement in transmission(double pass) with reflection at a mirror be-hind the wedge. With this procedure the reso-lution is doubled by the double pass configu-ration.

Calibration of Index Tables and Rotary En-coders

The accuracy of goniometers and rotary ma-chine axes equipped with angular encodersis mainly determined by the run-out error ofthe mechanical axis, manufacturing errors ofthe encoder scale and the eccentricity be-

tween axis and encoder. The absolute cali-bration of the angular readings of goniome-ters and rotary encoders is often made by therosette technique. This procedure is based onmeasuring the difference of the angles be-tween two adjacent facets of a precisionpolygon mirror. By measuring all the facet an-gle differences a calibration curve is ob-tained which can be used to correct the an-gular readings of the encoder for the com-plete system, whether machine axis, go-niometer or index table. The calculations in-volved are quite cumbersome and complexwithout software assistance, but easily donewith the dedicated software Plug-In of theOptiAngle® software. The measurements canbe performed with manual axis rotation orwith motor control if available.

Measuring a wedge angle in reflection mode

Technical Data/Order Information

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OptiAngle® Plug-In for index table calibration

Order Information TriAngle®

Type: TA 100-38

Clear Aperture: TA...-38: 30 mmTA...-57: 50 mmTA...-57: 100 mmTA...-57: 125 mm

Delivery Kit

• TriAngle® Electronic Autocollimator• PCI interface card• OptiAngle® Software Package on CD• Protection Dongle• Interface cables• Individual Certificate of Calibration traceable to PTB angle standard

Technical Data and Order Information

Objective tube diameter

Focal length (mm)

Opto-mechanical Accessories

In addition to the TriAngle® electronic autocol-limator series, TRIOPTICS offers a large rangeof opto-mechanical accessories, often re-quired for certain standard applications.

Accessories

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Measurement Task TriAngle® TriAngle® UltraSpec TriAngle® HiSpeed TriAngle® LASER

Tilt angle

Analyzing more than one optical surface

Wedge angle in reflection

Wedge angle in double pass

45° prism error

90° prism error

Wobble

Vibrations

Low reflective surfaces

High precision measurement

Calibration tasks

Straightness measurement

Flatness measurement

TriAngle® TriAngle® UltraSpec

TriAngle®

HiSpeed TriAngle® LASER

Sensor CCD Camera CCD Camera PSD CCD Camera

Light Source LED LED Laser Laser

Interface IEEE 1394 IEEE 1394 Analog, USB IEEE 1394

Standard TriAngle® Configurations

TriAngle® TA 300 in 2-axis adjustable holder with referen-ce mirror

Different configurations are available upon request

Measurement Capabilities and Recommendations

Accessories

Accessories

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45° deflection mirrors D38 and D57 Clamp fixtures D57 and D38

2-axes tilt adjustable Holder with V-prism fixture D115 and D57

2-axes tilt adjustable Holder with V-prism fixture D 57 and D 38

Order Information

Accessories

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Order Code Type

3-300-001 Clamp fixture D 38 mm


3-300-008 Clamp fixture D 57 mm, with height adjustment


3-300-005 2-axes tilt adjustable Holder with V-prism D 38

3-300-006 2-axes tilt adjustable Holder with V-prism fixture D 57



3-300-021 2-axes tilt mount wit micrometers D 38

3-300-022 2-axes tilt mount wit micrometers D 57

3-300-094 LA 57 Laser Pre-Alignment Device



3-300-025 Iris Diaphragm D38

3-300-091 45° deflection mirror D38



3-400-071 Base mirror, D75, base length 100 mm

98-004-786 View finder autocollimator alignment tool

4-300-51 Calibration wedge in mount, accuracy 1 arcsec

3-400-063 Reference 90° prism, 40×40 mm, accuracy +/-0.5 arcsec

3-400-064 Reference 90° prism, 50×50 mm, accuracy +/-0.5 arcsec

3-400-066 Penta prism, accuracy 5 arcsec

GERMANY

FRANCE

BERLIN

TAIWAN

JAPAN

USA

CHINA

KOREA

FRANCE

GERMANY

BERLIN

TRIOPTICS GmbH . Optische InstrumenteHafenstrasse 35-39 . 22880 Wedel / Germany

Phone: +49-4103 -18006 -0Fax: +49-4103 -18006-20

E-mail: [email protected] . http://www.trioptics.com

© 2015 TRIOPTICS GmbH . All rights reserved

electronic autocollimators for precise angle measurement · autocollimator the triangle ®...

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