ee42/100, spring 2006week 15, r. white1 micro- and nanotechnology

EE42/100, Spring 2006 Week 15, R. White 1

Micro- and Nanotechnology


The Sizes of Things

MACRO

MICRO

NANO


Polla dimension slide

Carbon Nanotube~2 nm diameter

The Macro to Nano WorldThe Macro to Nano WorldThings Natural

(Carbon Chemistry)

Things Manmade(Silicon Chemistry)

DNA~2-1/2 nm diameter

Fly ash~ 10-20m

Human hair~ 70-100m wide

Ant~ 5 mm

Quantum corral of 48 iron atoms on copper surface positioned one at a time with an STM tip

Corral diameter 14 nm

Atoms of siliconspacing ~tenths of nm

Head of a pin1-2 mm

Microworld

1 nanometer (nm) 1 micrometer (m) 1 millimeter (mm)

10-2 m10-3 m10-4 m10-5 m10-6 m10-7 m10-8 m10-9 m10-10 m

Visible

Nanoworld

InfraredUltraviolet MicrowaveSoft x-ray

Dust mite200 m

MicroElectroMechanical devices10 -100 m wide

Macroworld

Transistor gate60 nm

Approved for Public Release, Distribution Unlimited


C60 -- Buckeyball


HP STM AFM


HP computer


Will Device Size Keep Shrinking? Carbon nanotubes

1

10

100

1000

10000

Tra

nsis

tor

Size

(nm

)

2040202020001980

Year

Optical Lithography

Extreme UV

??

DNA

DNA

Nanowires


Early MEMS (Micro-Electro-Mechanical Systems) structures and devices


Early micromachined device: Ink-jet nozzle –A thin-film heater behind each nozzle vaporizes the ink and ejects a droplet of ink


Micro-guitar from Cornell University(the strings actually vibrate when plucked)


Early micromachine (with dead mite)


Laser scanning micromachine with electrostatic motors, gears, and mirror


Micromachine: Safety lock for nuclear bomb


Digital Light Projector (Texas Instruments)


16-micron-square tilting mirrors built over CMOS drive circuit


5. MEMS Are Reliable

DLP™ projection systems display anoriginal-quality picture time and timeagain with zero hassle and minimalmaintenance. With more than 5million systems shipped to more than75 manufacturers since 1996, DLP™technology has a proven track recordfor outstanding dependability.

The physical fatigue and failure mechanismsthat govern mechanical behavior in macro-scale materials don’t seem to be as prominentin MEMS devices. Some of thesedevices have been cycled up and down 1016

times without failure.



Microstructures etched in Teflon -- useful in BioMEMS applications


Size Benefits of MEMSSize Benefits of MEMSTransistor

Chips

TransistorChips

QuartzCrystal

QuartzCrystal

IF Filter(SAW)

IF Filter(SAW)

InductorsCapacitorsResistors

InductorsCapacitorsResistors

IF Filter(SAW)

IF Filter(SAW)

RF Filter(ceramic)

RF Filter(ceramic)

MEMSMEMSTechnologyTechnology

Single-ChipTransceiver

Inductor

IF Filter

ReferenceResonator

RF Switch

RF FilterApproved for Public Release, Distribution Unlimited


Where Do We Go From Here?Where Do We Go From Here?

Nanoelectromechanical Systems (NEMS)

NEMS are like MEMS, only one or more key enablingcomponents or structures has a physical dimensionof less than 1 micrometer in size and can beintegrated with another dissimilar components.

NEMS is the integration of sensors, actuators,electronics, photonics, energy, fluidics, chemistry,and biology into a meaningful system enabled bysub-micrometer science and engineering precision. We are now beginning the Age of NEMS.


ee42/100, spring 2006week 15, r. white1 micro- and nanotechnology

Documents

public release

distribution unlimited

prominentin mems devices

droplet of ink microguitar

inkjet nozzle

reliabledlp projection

bysubmicrometer science

mechanical behavior