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ECE520 - Lecture 2 Slide: 1University of New Mexico
Office: ECE Bldg. 230BOffice hours: Wednesday 2:00-3:00PM or by appointment
E-mail: [email protected]
Payman Zarkesh-Ha
ECE520 – VLSI Design
Lecture 2: Basic MOS Physics
ECE520 - Lecture 2 Slide: 2University of New Mexico
Review of Last Lecture Semiconductor technology trend and Moor’s law
Benefits of transistor scaling:● More functionality in the same foot print● Faster device● Devices with less switching energy● Less cost/function
Challenges of transistor scaling:● Device size reaching quantum level● Power dissipation and heat removal concerns● Interconnect worsen by scaling● Manufacturing yield issues
ECE520 - Lecture 2 Slide: 3University of New Mexico
Today’s Lecture
Overview of Diode Physics
BASIC MOS Physics:● Understanding of device operation● Basic device equations for long channel MOSFET● Long channel MOS models for manual analysis
ECE520 - Lecture 2 Slide: 4University of New Mexico
Reading Assignment
Today we will review Chapter 3 (MOS Physics)● Skim through Diodes but focus on Section 3.2.3 (diode transient behavior)● Study Section 3.3 (MOS transistor) thoroughly
ECE520 - Lecture 2 Slide: 5University of New Mexico
The Diode
n
p
p
n
B A SiO2Al
A
B
Al
A
B
Cross-section of pn -junction in an IC process
One-dimensionalrepresentation diode symbol
ECE520 - Lecture 2 Slide: 6University of New Mexico
Depletion Region
hole diffusionelectron diffusion
p n
hole driftelectron drift
ChargeDensity
Distancex+
-
ElectricalxField
x
PotentialV
W2-W1
(a) Current flow.
(b) Charge density.
(c) Electric field.
(d) Electrostaticpotential.
Built-in potential
ECE520 - Lecture 2 Slide: 7University of New Mexico
Forward Bias Diode
x
pn0
np0
-W1 W20p n
(W2)
n-regionp-region
Lp
diffusion
Typically avoided in Digital ICs
ECE520 - Lecture 2 Slide: 8University of New Mexico
Reverse Bias Diode
x
pn0
np0
-W1 W20n-regionp-region
diffusion
The Dominant Operation Mode
ECE520 - Lecture 2 Slide: 9University of New Mexico
Diode IV Curve
ECE520 - Lecture 2 Slide: 10University of New Mexico
Junction Capacitance
2
i
DA0 n
NNLnq
KT10
DA
DAsiD0j NN
NN2qAC
Built-in potential
ECE520 - Lecture 2 Slide: 11University of New Mexico
Diffusion Capacitance
qKT
T
Thermal Potential
ECE520 - Lecture 2 Slide: 12University of New Mexico
What is a Transistor?
VGS VT
RonS D
A Switch!
|VGS|
An MOS Transistor
ECE520 - Lecture 2 Slide: 13University of New Mexico
MOSFET Top & Cross Section View
Metal Oxide Semiconductor Field Effect Transistor
ECE520 - Lecture 2 Slide: 14University of New Mexico
NMOS Device Cross-Section
Source Drain
Gate
Bulk
IDS is Defined as “from Drain to Source” Current● Majority carriers are electrons● NMOS device conducts when “gate-to-source” voltage is positive
IDS is as a function of:● Channel width (W)● Inverse of channel length (1/L)● Gate-to-source potential (VGS)
ECE520 - Lecture 2 Slide: 15University of New Mexico
PMOS Device Cross-Section
Source Drain
Gate
Bulk
Complement of NMOS
Built inside an N-well implant in substrate
Majority carriers are holes, not electrons
Conducts when gate-source voltage is negative
ECE520 - Lecture 2 Slide: 16University of New Mexico
Device Operation: Cutoff
Cutoff region (VGS = 0 )● The Source to Drain connection looks like two back to back
series connected diode
Therefore ideally IDS = 0● 1st order approximation only
VGS=0
ECE520 - Lecture 2 Slide: 17University of New Mexico
Polysilicon gate forms a conductive top plate of a capacitor● Gate oxide forms the dielectric of a parallel plate capacitor● P-doped substrate forms the conductive bottom plate of a capacitor
Gate Oxide Capacitance
ECE520 - Lecture 2 Slide: 18University of New Mexico
Device Operation: Depletion
As gate potential increases● Positive majority carriers (holes) in the substrate repelled
from the surface (depleting the material of carriers)● A depletion region is formed under the surface of the gate● This depletion region is formed as potential at the silicon
surface underneath the gate reaches φF
i
AF n
NLnq
KT
small VGS
ECE520 - Lecture 2 Slide: 19University of New Mexico
Device Operation: Inversion As the surface potential beneath the gate increases
beyond φF● Electrons from heavily doped source and drain are attracted to
the gate and move into the channel● When the surface potential reaches 2φF the charge density of
electrons in the channel equals the original doping density of the P-substrate
● At this time the channel is inverted● Therefore, a conductive path is formed between source and drain
Large VGS
ECE520 - Lecture 2 Slide: 20University of New Mexico
Device Operation: Inversion
Inversion region is simply a resistor
We need an applied VDS to get current flow
When drain voltage is applied the depletion region grows at the drain junction
Large VGS
ECE520 - Lecture 2 Slide: 21University of New Mexico
MOSFET Band Diagram
ECE520 - Lecture 2 Slide: 22University of New Mexico
MOSFET Threshold Voltage
– VGS component accounted for threshold adjustment implant
five
ECE520 - Lecture 2 Slide: 23University of New Mexico
MOSFET Threshold Voltage Components
i
AF n
NLnq
KT
?
ox
I
ox
SS
ox
BFmsT C
QCQ
CQV 20
ECE520 - Lecture 2 Slide: 24University of New Mexico
MOSFET Threshold Voltage Components
Qox
ECE520 - Lecture 2 Slide: 25University of New Mexico
ox
I
ox
SS
ox
BFmsT C
QCQ
CQV 20
MOSFET Threshold Voltage Components
?
i
AF n
NLnq
KT
ECE520 - Lecture 2 Slide: 26University of New Mexico
MOSFET Threshold Voltage Components
ox
FsiAB C
qNV
22
QB =
ECE520 - Lecture 2 Slide: 27University of New Mexico
MOSFET Threshold Voltage Components
ox
ox
ox
FsiAFmsT C
QC
qNV
2220
ox
oxox t
C
i
AF n
NLnq
KTWhere: and
But what happen Bulk and Source are at different potential?
ECE520 - Lecture 2 Slide: 28University of New Mexico
Body Effect
ox
SBFsiAB C
VqNV
22
ECE520 - Lecture 2 Slide: 29University of New Mexico
Body Effect
-2.5 -2 -1.5 -1 -0.5 00.4
0.45
0.5
0.55
0.6
0.65
0.7
0.75
0.8
0.85
0.9
VBS
(V)
VT (V
)
Key Point: Body effect raises VT
Why does this matter?● In a stack (such as NMOS in a NAND
gate) the sources of higher devices in the stack do not equal 0V due to resistance of the lower transistors - this results in lower current drive (lower Ids) due to higher apparent VT
● Single polarity pass gates can only bring the drain to VDD-VT
● Body bias can be purposely created to lower standby power by modulating IOFF
FBSFTT VVV 220
ECE520 - Lecture 2 Slide: 30University of New Mexico
ID = -vnQ(x)W
Current Voltage Relation
ECE520 - Lecture 2 Slide: 31University of New Mexico
Current Voltage Relation
W
ECE520 - Lecture 2 Slide: 32University of New Mexico
Device Operation: Linear Region
ECE520 - Lecture 2 Slide: 33University of New Mexico
Device Operation: Saturation
ECE520 - Lecture 2 Slide: 34University of New Mexico
Device Operation: Saturation
ECE520 - Lecture 2 Slide: 35University of New Mexico
Device Operation: Saturation
ECE520 - Lecture 2 Slide: 36University of New Mexico
Linear into Saturation
ECE520 - Lecture 2 Slide: 37University of New Mexico
Saturation Region
ECE520 - Lecture 2 Slide: 38University of New Mexico
Saturation Region
ECE520 - Lecture 2 Slide: 39University of New Mexico
Saturation Region Analogy
ECE520 - Lecture 2 Slide: 40University of New Mexico
MOSFET Parameter Measurement
ECE520 - Lecture 2 Slide: 41University of New Mexico
MOSFET Parameter Measurement
ECE520 - Lecture 2 Slide: 42University of New Mexico
Channel Length Modulation
ECE520 - Lecture 2 Slide: 43University of New Mexico
Channel Length Modulation
ECE520 - Lecture 2 Slide: 44University of New Mexico
Device Operation: I-V curves
DSDS
DSTGSnDS VVVVVL
WKI
1
2
2
TGSDS VVV
DSTGSn
DS VVVL
WKI
12
2
TGSDS VVV
I DS
[mA]
VDS [V]