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ECE520 - Lecture 2 Slide: 1 University of New Mexico Office: ECE Bldg. 230B Office hours: Wednesday 2:00-3:00PM or by appointment E-mail: [email protected] Payman Zarkesh-Ha ECE520 – VLSI Design Lecture 2: Basic MOS Physics

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Page 1: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 1University of New Mexico

Office: ECE Bldg. 230BOffice hours: Wednesday 2:00-3:00PM or by appointment

E-mail: [email protected]

Payman Zarkesh-Ha

ECE520 – VLSI Design

Lecture 2: Basic MOS Physics

Page 2: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 2University of New Mexico

Review of Last Lecture Semiconductor technology trend and Moor’s law

Benefits of transistor scaling:● More functionality in the same foot print● Faster device● Devices with less switching energy● Less cost/function

Challenges of transistor scaling:● Device size reaching quantum level● Power dissipation and heat removal concerns● Interconnect worsen by scaling● Manufacturing yield issues

Page 3: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 3University of New Mexico

Today’s Lecture

Overview of Diode Physics

BASIC MOS Physics:● Understanding of device operation● Basic device equations for long channel MOSFET● Long channel MOS models for manual analysis

Page 4: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 4University of New Mexico

Reading Assignment

Today we will review Chapter 3 (MOS Physics)● Skim through Diodes but focus on Section 3.2.3 (diode transient behavior)● Study Section 3.3 (MOS transistor) thoroughly

Page 5: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 5University of New Mexico

The Diode

n

p

p

n

B A SiO2Al

A

B

Al

A

B

Cross-section of pn -junction in an IC process

One-dimensionalrepresentation diode symbol

Page 6: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 6University of New Mexico

Depletion Region

hole diffusionelectron diffusion

p n

hole driftelectron drift

ChargeDensity

Distancex+

-

ElectricalxField

x

PotentialV

W2-W1

(a) Current flow.

(b) Charge density.

(c) Electric field.

(d) Electrostaticpotential.

Built-in potential

Page 7: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 7University of New Mexico

Forward Bias Diode

x

pn0

np0

-W1 W20p n

(W2)

n-regionp-region

Lp

diffusion

Typically avoided in Digital ICs

Page 8: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 8University of New Mexico

Reverse Bias Diode

x

pn0

np0

-W1 W20n-regionp-region

diffusion

The Dominant Operation Mode

Page 9: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 9University of New Mexico

Diode IV Curve

Page 10: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 10University of New Mexico

Junction Capacitance

2

i

DA0 n

NNLnq

KT10

DA

DAsiD0j NN

NN2qAC

Built-in potential

Page 11: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 11University of New Mexico

Diffusion Capacitance

qKT

T

Thermal Potential

Page 12: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 12University of New Mexico

What is a Transistor?

VGS VT

RonS D

A Switch!

|VGS|

An MOS Transistor

Page 13: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 13University of New Mexico

MOSFET Top & Cross Section View

Metal Oxide Semiconductor Field Effect Transistor

Page 14: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 14University of New Mexico

NMOS Device Cross-Section

Source Drain

Gate

Bulk

IDS is Defined as “from Drain to Source” Current● Majority carriers are electrons● NMOS device conducts when “gate-to-source” voltage is positive

IDS is as a function of:● Channel width (W)● Inverse of channel length (1/L)● Gate-to-source potential (VGS)

Page 15: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 15University of New Mexico

PMOS Device Cross-Section

Source Drain

Gate

Bulk

Complement of NMOS

Built inside an N-well implant in substrate

Majority carriers are holes, not electrons

Conducts when gate-source voltage is negative

Page 16: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 16University of New Mexico

Device Operation: Cutoff

Cutoff region (VGS = 0 )● The Source to Drain connection looks like two back to back

series connected diode

Therefore ideally IDS = 0● 1st order approximation only

VGS=0

Page 17: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 17University of New Mexico

Polysilicon gate forms a conductive top plate of a capacitor● Gate oxide forms the dielectric of a parallel plate capacitor● P-doped substrate forms the conductive bottom plate of a capacitor

Gate Oxide Capacitance

Page 18: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 18University of New Mexico

Device Operation: Depletion

As gate potential increases● Positive majority carriers (holes) in the substrate repelled

from the surface (depleting the material of carriers)● A depletion region is formed under the surface of the gate● This depletion region is formed as potential at the silicon

surface underneath the gate reaches φF

i

AF n

NLnq

KT

small VGS

Page 19: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 19University of New Mexico

Device Operation: Inversion As the surface potential beneath the gate increases

beyond φF● Electrons from heavily doped source and drain are attracted to

the gate and move into the channel● When the surface potential reaches 2φF the charge density of

electrons in the channel equals the original doping density of the P-substrate

● At this time the channel is inverted● Therefore, a conductive path is formed between source and drain

Large VGS

Page 20: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 20University of New Mexico

Device Operation: Inversion

Inversion region is simply a resistor

We need an applied VDS to get current flow

When drain voltage is applied the depletion region grows at the drain junction

Large VGS

Page 21: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 21University of New Mexico

MOSFET Band Diagram

Page 22: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 22University of New Mexico

MOSFET Threshold Voltage

– VGS component accounted for threshold adjustment implant

five

Page 23: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 23University of New Mexico

MOSFET Threshold Voltage Components

i

AF n

NLnq

KT

?

ox

I

ox

SS

ox

BFmsT C

QCQ

CQV 20

Page 24: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 24University of New Mexico

MOSFET Threshold Voltage Components

Qox

Page 25: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 25University of New Mexico

ox

I

ox

SS

ox

BFmsT C

QCQ

CQV 20

MOSFET Threshold Voltage Components

?

i

AF n

NLnq

KT

Page 26: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 26University of New Mexico

MOSFET Threshold Voltage Components

ox

FsiAB C

qNV

22

QB =

Page 27: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 27University of New Mexico

MOSFET Threshold Voltage Components

ox

ox

ox

FsiAFmsT C

QC

qNV

2220

ox

oxox t

C

i

AF n

NLnq

KTWhere: and

But what happen Bulk and Source are at different potential?

Page 28: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 28University of New Mexico

Body Effect

ox

SBFsiAB C

VqNV

22

Page 29: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 29University of New Mexico

Body Effect

-2.5 -2 -1.5 -1 -0.5 00.4

0.45

0.5

0.55

0.6

0.65

0.7

0.75

0.8

0.85

0.9

VBS

(V)

VT (V

)

Key Point: Body effect raises VT

Why does this matter?● In a stack (such as NMOS in a NAND

gate) the sources of higher devices in the stack do not equal 0V due to resistance of the lower transistors - this results in lower current drive (lower Ids) due to higher apparent VT

● Single polarity pass gates can only bring the drain to VDD-VT

● Body bias can be purposely created to lower standby power by modulating IOFF

FBSFTT VVV 220

Page 30: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 30University of New Mexico

ID = -vnQ(x)W

Current Voltage Relation

Page 31: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 31University of New Mexico

Current Voltage Relation

W

Page 32: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 32University of New Mexico

Device Operation: Linear Region

Page 33: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 33University of New Mexico

Device Operation: Saturation

Page 34: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 34University of New Mexico

Device Operation: Saturation

Page 35: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 35University of New Mexico

Device Operation: Saturation

Page 36: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 36University of New Mexico

Linear into Saturation

Page 37: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 37University of New Mexico

Saturation Region

Page 38: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 38University of New Mexico

Saturation Region

Page 39: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 39University of New Mexico

Saturation Region Analogy

Page 40: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 40University of New Mexico

MOSFET Parameter Measurement

Page 41: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 41University of New Mexico

MOSFET Parameter Measurement

Page 42: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 42University of New Mexico

Channel Length Modulation

Page 43: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 43University of New Mexico

Channel Length Modulation

Page 44: ECE520 – VLSI Designpzarkesh/ECE520/lectures/lecture2.pdf · ECE520 - Lecture 2 University of New Mexico Slide: 19 Device Operation: Inversion As the surface potential beneath the

ECE520 - Lecture 2 Slide: 44University of New Mexico

Device Operation: I-V curves

DSDS

DSTGSnDS VVVVVL

WKI

1

2

2

TGSDS VVV

DSTGSn

DS VVVL

WKI

12

2

TGSDS VVV

I DS

[mA]

VDS [V]