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Surface Measurement 101 – Non-contact 3D Optical Metrology Dr. Joanna Schmit
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Surfaces and devices
Surface metrology plays an important role in the production and functioning of machined, etched, molded parts in different market areas like
• automotive/aerospace
• bearing surfaces
• shafts
• dynamic seals
• solar
• semiconductor
• medical devices
6/26/2014 2 Bruker Confidential
Heraeus
“If you can’t measure it, you can’t make it”
- 3D metrology is essential to understand how
the surface will work or if its produced properly
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Overview of webinar material
• Benefits of 3D non-contact metrology with interferometry
• Theory of interferometry – how fringes are created in
monochromatic and
white light illumination
• Easy fringe interpretation
• Measurement of your sample type
Smooth surfaces - monochromatic illumination
Rough surfaces – white light illumination
• Data display
6/26/2014 3 Bruker Confidential
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Bruker 3D microscope technology White Light Interferometry
• Easy measurement--
Focus and go!
• WLI 3D microscope provides
• most precise
• non-contact
• fast
• repeatable
• areal topography including
shape, waviness and
roughness
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What are these fringes?
Why fringes are useful in surface
metrology?
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http://www.compassdude.com/contour-quiz.shtml
• Contour lines that are very close together indicate an extremely steep slope
• Values by the contour lines tell us that the surface rises from about 4500 feet to 5100 feet
• A perfect bulls-eye shape indicates a circular mountain.
• The open center circle inside the 5100 contour line indicates that the top of the mountain is a flat plateau.
Why a contour map is useful h photo object this TOPO map is representing
TOPOGRAPHIC MAP
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Now take a test and see if you “feel“ the fringes
Match the measurement result
with the fringes
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Interferometry, Interferometer
Interferometer is an optical device that divides a beam of light exiting
a single source (like a laser or LED) into two beams and then recombines them to create an interference pattern. The combined pattern can be analyzed to determine the difference in paths the two beams traveled.
interference
Foundation built from “interference” and “meter”
So…metering, or measurement, based on
interference
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Wave front
•Wave front - surface connecting all points that light traveled the same
optical length from the source.
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Typical Interferometer
•The expanded beam
exiting from the light
source is divided by a
Beamsplitter into two
beams.
•One beam is reflected
from the Reference
Mirror, and the other one
from the Sample.
•These two beams are
recombined by the
Beamsplitter to interfere.
•The imaging lens
images the Interferogram
onto the CCD camera.
CCD
Sample
Reference Mirror
Beamsplitter Test arm
Reference arm
Optical Path Difference (OPD)
- difference in optical path lengths that
beams travel in Reference and Test arms.
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Tilt of one of mirrors in interferometer
If one of the mirrors is
slightly tilted,
then the reflected beam
(wavefront) also is tilted.
For two tilted and flat wavefronts, an interferogram of
straight and parallel light and dark bands will be formed
CCD
Reference Mirror
Beamsplitter
Sample
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Interferogram for flat wavefronts with tilt and monochromatic light source
Two interfering
wavefronts
Interference between two wavefronts is constructive at these multiple points, destructive at others, forming an interferogram.
Intensity profile
of interferogram.
Fringe spacing
corresponds to path
difference between
wavefronts.
Tested beam
(wavefront)
Reference beam (wavefront).
Multiple distances
between wavefronts,
where is the wavelength
of the source.
4 2 3
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Change in tilt causes change in # of fringes
The number and spacing of fringes
changes with tilt.
NULL FRINGES
When wavefronts are parallel, then the fringes
are nulled and an almost uniform intensity is
visible in the field of view.
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Change in arms length shifts fringes
Change in length of one of the arms introduces a phase shift between
interfering wavefronts causing fringes to shift to a new location.
Note that number of fringes and their orientation remains the same.
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Wavefront reflected of the surface
tested object
Incident beam Reflected wavefront
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Interferograms for spherical object
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When one wavefront is spherical and the other is flat, and in addition there is
some tilt between interfering wavefronts, then the fringes will be curved.
When tilt is not present, the fringes are circular.
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White light fringes
Interferogram can be obtained with a white light source, such as LED
blue light green light yellow light
red light
Fringes for:
• Beams at different wavelengths interfere
• Sets of fringes for different wavelengths are created
• Spacing between fringes depends on wavelength
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• The sum of all interference signals is observed forming a fringe
pattern with quickly decreasing modulation
• Fringe modulation achieves a maximum for equal optical paths
of both beams (there OPD=0).
White light fringes
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White light interference for spherical object
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When tilt is not present, the fringes for a spherical surface are circular.
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Interference microscope
Interference microscope
combines an interferometer and microscope into one instrument.
It is used for measuring engineering surfaces that demand testing with
high resolving power.
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Microscope Diagram
Digitized Intensity Data
Beamsplitter
Detector Array
Microscope Objective
Translator
Mirau
Interferometer
LED Source
Aperture Stop
Field Stop
Interference
Sample
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Michelson interferometer
Microscope
Objective
Sample
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Tilt between wavefronts introduced via tilt of the objective
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Mirau interferometer
Reference (small central obscuration)
Microscope
Objective
Sample
Beamsplitter
Plate
10X, 20X, 50X, 115X
medium divergence of beam
medium working distance
Area
1mm x 1mm – 60um x 60um
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Linnik interferometer
Sample
Reference
Mirror
5X, ………. 20X
smaller divergence of beam
the longer working distance
Working distance over 20mm
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6/26/2014 26 Bruker Confidential
Linnik
objective
Michelson
and Mirau
objectives
Extended
length
interferometric
objective
Interferometric objectives on different systems
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6/26/2014 27 Bruker Confidential
Michelson interferometer for looking at the sidewalls of i.e. deep large cylinder
Measured
area
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Interference objectives
• Michelson (2X-5X)
• Low magnification
• Large field-of-view
• Mirau (10X- 100X)
• Medium to high magnification
• Medium to small field-of-view
• Linnik (any magnification)
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Principles of Interferometry
Difference in optical paths will cause a difference in phase
Interference will be constructive at some points, destructive at others, forming an interferogram.
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MONOCHROMATIC ILLUMINATION PHASE SHIFTING INTERFEROMETRY
PSI
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Two-beam interference fringes
I=Ibackground+2Iamplitudecos(f + f(t))
When we change f(t) in constant fashion over the full
field, the fringes will shift.
phase shift
measured object phase
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Four Step Method
I1(x,y) = Ibackground + Iamplitude cos [f (x,y)] f (t)=0 (0°) I2(x,y) = Ibackground - Iamplitude sin [f (x,y)] =p/2 (90°) I3(x,y) = Ibackground - Iamplitude cos [f (x,y)] =p (180°) I4(x,y) = Ibackground + Iamplitude sin [f (x,y)] =3p/2 (270°)
I(x,y) = Ibackground + Iamplitude cos[f(x,y)+ f (t)]
f
f
ff
ff
f
cos
sin
coscos
sinsin,
31
24
abab
abab
IIII
IIII
II
IIyxTan
phase shift
measured object phase
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Computerized interferogram analysis
Phase Shifting Interferometry
PSI
Used for testing smooth objects with very high precision
Vertical resolution 0.1 nm
Typically monochromatic light used to illuminate sample.
31
24)(II
IITan
f
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Testing Flat Surfaces
• Is the reference mirror really flat?
Fringes
- visually seem to be perfectly
straight
Phase map
- reveals that interfering wavefronts are not perfectly flat. Here the peak-to-valley (Rt) is on
order of a few nm.
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Principles of PSI Operation
• The fringes are shifted by fringe/4 (corresponds to
changing optical path by 1 8 effective wavelength)
• Resultant arrays of intensity used to solved for phase
• Phase is converted to surface height given known illumination wavelength
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• Is my sample smooth? Is the rms less than 30nm?
• Visual assessment – Is my sample shiny?
• Does my sample have steps? Are they less than 130nm?
Can my sample be measured with PSI mode?
No problem measuring even 1nm steps
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WHITE LIGHT ILLUMINATION VERTICAL SCANNING
INTERFEROMETRY
VSI
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Red Light White Light
Flat reference
profile Grating
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Operation of 3D WLI microscope
VSI
White Light
illumination
For rough, tall and discontinuous surfaces
Vertical resolution 1-5 nm
for each objective
Sample always measured at the best focus
Fringes are like a focus sensor
Max height 10mm
Scanner speed 5 to 80 um/sec
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Focus
• Noise floor – 3 nm
for every objective 2X-115x!!!
• Max heights - 10mm
• Slope – 60deg + • Low reflectance <0.5%
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Typical white light fringes for rough surface
Focus Position A Focus Position A
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Principles of vertical scanning interferometry
Fringes are localized around the best focus
Measure the intensity at each pixel as the objective is moving vertically.
Algorithm finds position of fringes to determine the height of the surface at each pixel.
Measure changes in surface height up to 10mm (depends on working distance of given objective).
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Advantages of VSI
True 3D measurement of surface area.
Ability to measure non-specular, rough surfaces.
Good results with low contrast fringes.
Results independent of intensity variations across field of view.
Vertical height limited only by scanner and objective working distance.
No step height ambiguities.
Tested area always in focus.
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A high resolution VSI (VXI) mode for smooth/rough surfaces and with possible steps
VXI VSI
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Which fringes can be analyzed with PSI and which with VSI?
Focus Position B
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Machined Surfaces examples Method of manufacture changes texture
• Various methods of manufacture create different resultant textures
• Texture residuals aside from roughness matter (texture is multi-scale phenomenon)
6/26/2014 46 Bruker Confidential
Horizontal Milling Vertical Milling
Turning
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Texture and Roughness Surfaces have different characteristics, same Ra (Sa)
6/26/2014 47
These two surfaces have virtually identical Ra
Surfaces are different functionally
3D areal parameters (S-parameters) have been developed to
capture the differences in a quantifiable way
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Semiconductor Applications example Helping in solving industry problems
• Broad range of applications including
• Laser probe mark depth
• Sensor dimensions and frequency performance (MEMS, DMEMS)
• Cu wire bonding (bond force optimization, near line inspection)
• Multichip Module HDI production inspection
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Data display: Contour map with intensity shading
26. Juni 2014 49
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Data display: 3D display
26. Juni 2014 50
i.e. lighting
i.e. color palette
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“True” color object images on systems with color CCD
2D and 3D color image from 3D WLI microscope
26. Juni 2014 51
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3D Microscopy – Versatile Rough and Smooth Samples
• Vertical resolution ~3 nm
• Steps or surface variations up to 10 mm
• Surfaces with rough/steep surfaces
• VXI option, 0.1nm, and smoother surfaces (can be set as automatic
option for best result)
• Vertical resolution <0.1 nm
• Smoothly varying surfaces
• Polished materials, small height differences
• Phase Shifting Interferometry – PSI
Vertical Scanning Interferometry – VSI
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Gravure Roll Cotton cloth, 1mm x 1mm.
Grasshopper Eye
230um x 300um.
Compact disk data pits
11µm x 13µm.
Hard disk suspension arm.
3D WLI
microscope
Bumped printed circuit board.
Skin
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WLI 3D microscopes…
• …are fast, non-contact, easy to set up measurement
• …have resolution and accuracy independent of used objective
• …measure surface topography and roughness of variety of samples:
• smooth
• rough
• 60°+ slopes
• <0.05% reflectance
• …can image in 3D with color CCD*
6/26/2014 54 Bruker Confidential
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Bruker Optical Metrology Our Products Broad Overview
6/26/2014 55
ContourGT-K
ContourGT-IM
ContourGT-X NPFLEX
NPFLEX-LA
SP9900+
ContourGT Auto-Ready
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+1 520 741 1044 x 1018
Joanna Schmit, Ph.D.
Senior Staff Optical Engineer
Bruker NSD, SOM
www.bruker.com For more information on fringe analysis go to:
Optical Shop Testing Edited by: Malacara, Daniel © 2007 John Wiley & Sons
Or come to the SPIE conference in San Diego
Optics and Photonics
THANK YOU!!!
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