Rigaku Innovative Technologies Europe
(RITE)
Presented by:
Dr.Peter Oberta
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Introducing Rigaku
Since its inception in Japan in 1951, Rigaku has been at
the forefront of analytical and industrial instrumentation
technology. In fact, Rigaku means physical science in
Japanese, the core of instrumentation.
Rigaku Facts:
• Over 1600 employees worldwide
• Consolidated worldwide sales 270M€
• Presence in 57 countries
• Explicitly focused on X-ray technologies
• Our expertise allows us to provide
complete X-ray analysis solutions – we
make everything from X-ray sources, to
optics and detectors.
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- Wholly Owned Subsidiaries
RIT NSI RAI
RRT ART RAC
RUK RESE
RITE
RBC
RAP
Japan
RLA
Yamanashi Plant
Osaka Factory
Rigaku Headquarters
Rigaku Americas Corp.
The Woodlands, Texas
Rigaku Beijing Corporation
Beijing, China
Rigaku Innovative Technologies Auburn Hills, MI
Rigaku Europe SE Ettlingen, Germany
Rigaku Global Operations
Copyright © 2014 — Rigaku Corporation and its Global Subsidiaries. All Rights Reserved.
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XRD XRF SMX SAXS Sources
Stress Analysers Optics
Rigaku product line
Detectors Raman
Despite Rigaku corporate nature, our strongest product are custom made solutions
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Short history of before RITE
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The founding members of the company were employees of the Academy of Sciences and the Czech Technical University. Involved in many Czechoslovak space projects:
• First replication optics, 1969 • First X-ray mirror (Wolter I, 50 mm), 1970 • Salyut 7 orbital station (Wolter I, 240 mm nested), 1981 • Applications for plasma physics, 1985 • First Micromirror (aperture less than 1 mm, Bede) , 1991 • Collaboration with SAO (Cambridge, USA), WF X-ray optics, 1993
Reflex s.r.o
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• Reflex s.r.o. company was founded, 1996 • First Lobster Eye optics • Soller Slit manufacturing, 2000 • Multi-Foil optics, 2001 • Multilayer micromirrors, 2002 • X-ray CCD cameras, 2003 • X-ray tube production, 2004 • KB collimators for soft X-rays, 2006
RITE s.r.o • Rigaku established Rigaku Innovative Technologies Europe s.r.o. (RITE), 2008 • RITE will move nearby the new HiLASE facility in 2017
RITE s.r.o.
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• Established in 1996 as Reflex company • Established in 2008 as Rigaku company • 13 full time employees (6x PhD in physics a chcemistry), 4x MSc degree and administrativ workpower • Rigaku X-ray instrumentation distributor for Czech Republic and Slovakia • European X-ray microscopy application lab for Rigaku (Nano3DX in Brno) • Very close collaboration with thin film deposition company TTS and surface processing lab of the Academy of Sciences
Surface processing (currently outsourced): RÖDERS RXP 500 DSC - a high-speed, 5-axis machining centre with the accuracy better than 5 µm. NANOTECH 350FG - an ultra-precision, 4-axis machine with the Single Point Diamond Turning technology. STX-1202 - a wire saw with 12" diameter cutting capability and wire diameter of 0.28 mm, designed to cut or slice all kinds of material such as sapphire, YAG, YAP, CaF2, LiNbO3, GaP, ZnSe and others.
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Product portfolio
Optics Detectors
Accessible for non-Rigaku companies Confidential R&D for Rigaku
RITE Detectors portfolio
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xPIN: • Precise metrology pA resolution nA meter • X-ray (air/vacuum) and EUV (continues/pulsed)
Xsight FC camera: • Fiber coupled (FC) CCD • FOV: 18 × 13.5 mm @ 16 m resolution • FOV: 7.2 × 5.4 mm @ 8 m resolution
FC technology: • Fiber optics coupling on 3rd party cameras • Magnification 1:1 or 2:1
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RITE Detectors portfolio
Xsight LC camera: • Lens coupled (LC) CCD • FOV: 0.9 × 0.7 mm @ 0.27 m resolution • FOV: 14.4 × 10.8 mm @ 4.32 m resolution • 3 keV – 30 keV
Xsight LC camera - sCMOS: • Lens coupled (LC) sCMOS • FOV: 13.3 × 13.3 mm @ 20 m resolution • 100 fps
RITE optics portfolio
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EUV optics: • Wavelength: 13.5 nm, 6.xx nm, 2.8 nm, ... • Shapes: elliptical, parabolic, collector, Schwarzschild objectives, illuminator • Coating: Au, Ru, Ni, Mo/Si, ... Replicated optics: • Metallic surface (Au, Ru, Ni, Mo, ...) • R 50% • Grazing angles: 0.2 - 20 • Surface roughness:Ra 0.2 – 2 nm • Dimensions: D = 5 – 250 mm L = 10 – 150 mm • Optical shapes: elliptical, parabolic, aspherical shapes upon request • Spectral range: EUV (60 – 200 eV) Soft X-ray (200 – 2000 eV) X-ray (2 - 20 keV)
FOM, Netherlands
Bede Ltd., UK
Stratchclyde University, UK
CYMER, USA
Laser Laboratorium Gottingen, Germany
Gottingen University, Germany
WAT Military University, Warsaw, Poland
Naval Research Labs, USA
NIST, Washington DC, USA
University of California, San Diego, USA
NTT Res. Labs, Japan
NSTR, Japan
Toyota Res. Labs., Japan
LG, Korea
BESSY II synchrotron, Germany, and others …
Customer references
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Multi-foil optics Wide FOV • Glass or silicon substrates • Planar or ellipsoidal mirrors • Foils 33 mm to 300300 mm • Thickness from 30 m – 1 mm • Wavelength: EUV – soft X-ray • Surface: Au, Ni, Mo, Pt, W, ...
Lobster Eye • 5 – 10 keV • Focal length: 1000 – 1200 mm • Imaging: 1:1 • Spot size: 0.5 mm • FOV: 2° MFO KB system • 80 – 120 eV • FOV: 20° • Spot size: 0.5 – 1.0 mm
University Göttingen, 19.03.2015
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Domo arigato!
Rigaku Innovative Technologies Europe s.r.o.