Quartz Glass for Optics
Quartz glass is especially superior in its optical characteristics, such as its light transmission characteristics. Also, since quartz glass is of high purity, at the same time it also provides high heat-resistance and radiation-resistance characteristics. Thus, quartz glass is an extremely pure optical material.On the solid foundation of its advanced research and development system, Shin-Etsu Quartz Products Co., Ltd. manufactures and markets the "SUPRASIL-P" series of ultra-pure, highly homogeneous synthetic quartz glass. The "SUPRASIL-P" series is a synthetic quartz glass for optics applications developed at home in Japan, on the basis of the optics-use quartz glass manufacturing technologies imported from Heraeus, and the outstanding synthesizing technologies of the Shin-Etsu Group. The "SUPRASIL-P" series of synthetic quartz glass is chiefly used as lens material for the exposure devices employed in the semiconductor manufacturing process, but it is also suitable as an optical material for prisms, glass, lenses, mirrors and so on. In addition to "SUPRASIL-P", the Company also handles the "HOMOSIL", "HERASIL", and "INFRASIL" series of optics-use natural quartz glass of Heraeus.
Shin-Etsu Quartz Products Co., Ltd.
1, Product Lineup
Product Types
Synthetic Quartz Glass / "SUPRASIL-P" SeriesThe "SUPRASIL-P" Series is ultra-high quality synthetic quartz glass that is used as lens material for the aligner used in semiconductor manufacture. In tandem with the further miniaturization of processes, this series is constantly being developed with even further capabilities, and it can be used with conventional i-line systems as well as up to the most-advanced ArF applications. 8 product grades are available, each of which has unique characteristics in terms of light transmission rates, laser-resistance properties, whether they have striae or are striae free, etc.
Natural Quartz Glass / "HOMOSIL", "HERASIL", and "INFRASIL"Each of these brands consists of quartz glass for optics applications made by Heraeus, using natural quartz crystal as raw material. A wide range of product types are offered, from optics materials for ordinary applications to high-grade products, in accordance with the purity and homogeneity rates of each, as well as their light transmission rates, etc.
Shape and Size
Our quartz glass for optics comes in a variety of shapes, including blocks, plates, prisms, lenses, rods, and so on.For detailed information regarding the sizes and characteristics that can be manufactured, please contact the sales department in charge. On the last page, you can find the contact information for the relevant sales department.
- 1 - Quartz Glass for Optics PC-OPT-GEN-009-E
SUPRASIL-F300 F300 has the same high IR transmission as optical fiber and also the high homogeneity ofquartz glass for optical use.
This is striae-free in one direction, and more homogeneous than P20.
The optical characteristics conform to those of P310, and the laser resistance propertieshave been improved for its use in ArF excimer lithography applications.
This is appropriate for general optical element applications where a high light transmissionrate is required.
SUPRASIL-P210
SUPRASIL-P30
SUPRASIL-P700
SUPRASIL-P20
SUPRASIL-P310
SUPRASIL-P710C
Type Grade
This is optics-use quartz glass for which only carefully selected crystal are usedas raw material. It has no particulate structure, and has extremely favorable homogeneityproperties, as well as high light transmission in ultraviolet ranges.According to its purpose, 3D striae free material and 1D striae free material are available.
Characteristics
This is high purity optical-use quartz glass that is striae free in all directions,and thus is highly suited for high-precision optics applications.
The optical characteristics are superior to those of P248, the laser resistance propertieshave been improved for its use in ArF excimer lithography applications.
Large optics more than diameter 600mm are available.
This is striae-free in one direction, and is appropriate for optical element,such as windows and lens materials, etc.
Synt
hetic
Qua
rtz G
lass
SUPRASIL-P248
Nat
ural
Qua
rtz G
lass HOMOSIL
INFRASIL-301
HERASIL
This is optics-use quartz glass manufactured from specially selected crystals andproduced with low OH content. It shows high homogeneity and high light transmissioncharacteristics all the way from visible to near infrared ranges.According to its purpose, 3D striae free material and 1D striae free material is available.INFRASIL-302
2, Data and Properties
- 2 - Quartz Glass for Optics PC-OPT-GEN-009-E
*1 *1 *2 *3 *4 *5
Type Grade Striae Striae Max Bubble Fluorescence Excimer laser
grade intensity size Nominal Onrequest grade tolerance
< 200 2×10-6 1×10-6 2
< 300 3×10-6 2×10-6 3
< 200 1×10-6 0.5×10-6 2
< 300 2×10-6 1×10-6 2
3D A < 600 5×10-6 - 8
1D A < 750 8×10-6 - 10
< 150 20×10-6 - 8
< 400 20×10-6 - 10
< 150 5×10-6 2×10-6 8
< 400 10×10-6 4×10-6 10
< 150 5×10-6 1×10-6 8
< 300 10×10-6 2×10-6 10
< 200 4×10-6 2×10-6 8
< 300 6×10-6 4×10-6 10
< 150 5×10-6 2×10-6 8
< 400 10×10-6 4×10-6 10
Note: Values shown in this chart are not specification (i.e., guaranteed) values. Please also refer to the notes listed below. For detailed information regarding the sizes and characteristics that can be manufactured, please contact the sales department incharge. On the last page, you can find the contact information for the relevant sales department.
Notes regarding the List of Characteristics table *1: 3D means striae free in all 3 directions. 1D means striae free in one direction. According to the MIL-G-174 standard of the U.S. Military. Evaluation made via the main surface. *2: This value is valid for 90% of the diameter. In the outer area the actual value may exceed this stated value. *3: For large-sized products this value may be slightly higher in the edge zone, which is the outer 20% of the diameter. *4: Conforms to DIN 58927. *5: Excitation wavelength is 253.7nm. For quartz glass, there is almost never excitation at wavelength of 290 nm and above. *6: The transmission loss is less than 0.2%/cm after1.8×107 pulses of KrF excimer laser (λ=248nm,100mJ/cm2/pulse ) irradiation. *7: The transmission loss is less than 1%/cm after 6×106 pulses of ArF excimer laser (λ=193nm,20mJ/cm2/pulse ) irradiation.
Residualstrain
(nm/cm)
-
0
-
0 free
0 free
0
0
-
SUPRASIL-P248 3D A
ArF(193nm)*7freeSUPRASIL-P700 3D A
KrF(248nm)*6free
free
0
-
SUPRASIL-P20 KrF(248nm)*6
KrF(248nm)*6
0
SUPRASIL-P310 1D A
free
free
-
-
0
1D A ArF(193nm)*7
-
4×10-6 <1×10-6 5…15
5…15<1×10-6A
INFRASIL-302 1D A
HERASIL 1D A
3D blue-violet
-
<2×10-6 5…15 0
0
-blue-violet
blue-violet
Synt
hetic
Qua
rtz G
lass
1D A
-
SUPRASIL-P210
SUPRASIL-P30 - B-C -
SUPRASIL-P710C
SUPRASIL-F300 slight blue
0
0
A
3D A
1D
Nat
ural
Qua
rtz G
lass HOMOSIL 3×10-6
6×10-6
5×10-6INFRASIL-301 3D A
Homogeneity(⊿n)
0~1<3×10-6 5…15 -blue-violet
3, Ultraviolet & Infrared Light Initial Transmission Rates
- 3 - Quartz Glass for Optics PC-OPT-GEN-009-E
4, Refractive index at 20℃ and 1 barMeasurement accuracy ±3×10-5
HOMOSIL HOMOSIL HOMOSILHERASIL HERASIL HERASILINFRASIL INFRASIL INFRASIL
185.41 - 1.57464 298.06 1.48837 1.48859 700 1.45529 1.45539193.53 - 1.56071 307.59 1.48575 - 800 1.45332 1.45341202.54 1.54717 1.54729 313.17 1.48433 - 900 1.45175 1.45185206.20 1.54266 1.54269 328.36 - 1.48183 1000 1.45042 1.45051213.85 1.53434 - 334.15 1.47976 - 1200 1.44805 1.44815214.45 - 1.53385 340.36 1.47860 1.47877 1400 1.44578 1.44589226.50 1.52299 1.52318 346.69 1.47748 1.47766 1600 1.44342 1.44353232.94 - 1.51834 361.17 1.47503 1.47513 1800 1.44087 1.44099237.83 1.51473 - 365.48 1.47448 - 2000 1.43809 1.43821248.20 1.50841 - 398.84 - 1.47028 2200 1.43501 1.43515250.20 - 1.50762 404.65 1.46961 2400 1.43163 1.43177253.70 1.50555 1.5059 435.83 1.46669 1.46679 2600 1.42789 1.42804257.62 1.50351 1.50397 486.13 1.46314 1.46324 2800 1.42377 1.42393265.36 1.49994 - 546.07 1.46007 1.46021 3000 1.41925 1.41941274.87 - 1.49634 587.56 1.45847 1.45857 3200 1.41427 1.41444280.35 1.49403 - 589.00 1.45843 1.45853 3400 1.40881 1.40897289.36 1.49098 - 656.27 1.45637 1.45646 Without SUPRASIL-F300
SUPRASIL-PWavelength(nm)
Wavelength(nm)
Wavelength(nm)
SUPRASIL-P SUPRASIL-P
0
10
20
30
40
50
60
70
80
90
100
150 200 250 300
Tran
smis
sion
(inc
ludi
ng re
flect
ion
loss
) (%
)
P248/P310
P20/P30
HOMOSIL / HERASIL
Reflection loss at the surface
1000 2000 3000 4000
Wavelength (nm)
Measurement example at sample thickness 10mm
0
10
20
30
40
50
60
70
80
90
100
150 200 250 300
Tran
smis
sion
(inc
ludi
ng re
flect
ion
loss
) (%
)
P700/P210
P710C
F300
INFRASIL-301/302
Reflection loss at the surface
1000 2000 3000 4000
Wavelength (nm)
Measurement example at sample thickness 10mm
5, Typical Characteristics
- 4 - Quartz Glass for Optics PC-OPT-GEN-009-E
measurement accuracy : ±0.5×10-6
Relative temperature coefficients of the refractive index in 10-6 K-1 Thermal data
HOMOSIL
HERASIL
INFRASIL
nm 0~20℃ 20~40℃ 0~20℃ 20~40℃ Strain temperature ℃ 1000 1075
237.8 14.6 14.9 15.2 15.3 Annealing temperature ℃ 1100 1180
365.0 11.0 11.2 11.5 11.6 Softening temperature ℃ 1600 1730
546.1 9.9 10.1 10.6 10.7 Max. working temperature
587.6 9.8 10.0 10.5 10.6 continuous ℃ 950 1150
643.8 9.6 9.8 10.4 10.5 short-term ℃ 1200 1300
Mean specific heat J/kg・K
Abbe constant
Heat conductivity W/m・K
Birefringence constant @ 633nm
nm/cmkg/cm2
Typical trace impurities in quartz glass unit:ppm
HOMOSIL
HERASIL Mean thermal expansion coefficient K-1
Al 10 20
Ca 1 1
Cr 0.1 0.1
Cu 0.1 0.1
Fe 0.2 0.8
K 0.1 0.8
Li 1 1
Mg 0.1 0.1 Electrical data
Na 1 1 HOMOSIL
Ti 0.1 1 HERASIL
OH 130-200 <8 Resistivity in(Ω・m) INFRASIL
1.0×1016 1.0×1016
*The OH content of SUPRASIL-F300 is less than 1ppm. 1.0×106 1.0×1010
6.3×104 6.3×106
1.3×103 1.3×105
Mechanical data Dielectric loss angle tanδ
g/cm3
N / mm2
N / mm2
N / mm2
N / mm2
N / mm2 Dielectric constant ε
N / mm2
N / mm2
N / mm2 Dielectric strength in kV/mm (Layer thickness ≧ 5 mm)
m/s
Values shown in this chart are not specification (i.e., guaranteed) values.
23℃, 9×108Hz 3.77
20℃
400℃
800℃
1200℃
3.70
4.0×10-43×1010Hz
5.0×10-4
1.0×10-4
tanδ at 1MHz is nearly-constant up to 200℃, while itbecomes gradually higher above 200℃.tanδ at 1010Hz becomes gradually lower up to 350℃, while itbecomes gradually higher above 350℃.
1KHz
1MHz
500℃
23℃, 3×1010Hz
25~40
4~5
3.81
20℃1×10-5
5720
Internal damping
Sound velocity
Micro-hardness
Knoop-hardness
Mohs-hardness 5.5~6.5
8600~9800
5800~6100
Tensile strength
Bending strength 67
Torsional strength
50
Compressive strength
2.20
3.0×104
7.0×104
0.17
1150
Modulus of elasticity
<0.04
<0.005
INFRASIL
Poisson's ratio
at 20℃
Wavelength
67.7±0.5 67.6±0.5
<0.005
20℃, 0~1×106Hz
<0.001
<0.001
<0.001
0~900℃
0~200℃
Density
Modulus of torsion
30
<0.001
Impurities
3.47±0.05 3.54±0.05
HOMOSIL
INFRASIL
SUPRASIL-P
1.38
1.47
772
964
1052
0~100℃
0~500℃
0~900℃
HERASIL
20℃
100℃
950℃
0~300℃
SUPRASIL-P
SUPRASIL-P
<0.005 0.27×10-6
0.58×10-6
0.59×10-6
0.48×10-6
<0.01
1-1000*
<0.001
0.51×10-6
2.68
0~600℃
0~100℃
SUPRASIL-P
200℃
0.54×10-6
-50~0℃
1.67300℃
400℃ 1.84
1.55
CF
dd nn
n−−
=1
ν
For Business ContactIf you have any questions or inquiries concerning company information about Shin-Etsu Quartz Products Co., Ltd. or about its products, please inquire to the following.
Shin-Etsu Quartz Products Co., Ltd. / Functional Materials Division Shinjuku San-ei Bldg., 1-22-2, Nishi-Shinjuku, Shinjuku-ku, Tokyo 160-0023, JapanTEL : +81-3-3348-1913 FAX : +81-3-3348-4919URL : http://www.sqp.co.jp/
Shin-Etsu Quartz Products Co., Ltd.
© Shin-Etsu Quartz Products Co., Ltd. 2013.9.1- 5 - Quartz Glass for Optics PC-OPT-GEN-009-E
Shin-Etsu Quartz Group & Heraeus Quartz Group (Main companies)Japan
Shin-Etsu Quartz Products Co., Ltd.Shinjuku San-ei Bldg., 1-22-2, Nishi-Shinjuku, Tokyo 160-0023, JapanTEL: +81-3-3348-1912 FAX: +81-3-3348-4919
Yamagata Shin-Etsu Quartz Co., Ltd.2-4-1,Shoge-higashi, Tendo-shi, Yamagata 994-0069, JapanTEL: +81-23-655-3221 FAX: +81-23-655-3220
Fukui Shin-Etsu Quartz Co., Ltd.1-4, Kayadani-cho 3-chome, Echizen-shi, Fukui 915-0037, JapanTEL: +81-778-27-2777 FAX: +81-778-27-2779
Asia
Young Shin Quartz Co.,Ltd. <Korea>149,Hoechuk-ri, Kwanghyewon-myon, Chinchon-Kun, Chungbuk Province 365-834TEL: +82-43-535-2338 FAX: +82-43-535-2337
Topco Quartz Products Co.,Ltd <Taiwan>No.8 Wen-Hua Road, Hsin-Chu Industrial ParkTEL: +886-3-598-5668 FAX: +886-3-598-3096
Heraeus Shin-Etsu Quartz (China) Inc. <P.R.China>No.17,Daminghu Street, Economic & Technical Development Zone, Shenyang, 110141TEL: +86-24-2536-2266 FAX: +86-24-2581-6079
Heraeus Shin-Etsu Quartz Singapore Pte. Ltd. <Singapore>26 Boon Lay Way, #01-90 Tradehub 21, Singapore 609970TEL: +65-6862-5025 FAX: +65-6862-5075
U.S.A.
Heraeus Quartz America, LLC.100 Heraeus Blvd. Buford, GA 30518 USATEL: +1-678.714-4350 FAX: +1-678.714-4358
Europe
Heraeus Quarzglas GmbH & Co.KG <Germany>Quarzstrasse 8 ,63450 Hanau TEL: +49-6181-35-6285 FAX: +49-6181-35-6270