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Presentation on SGS, Crystal Defects & Wafer Preparation
Guided By
MD. Mohiuddin Munna
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#Group Members#
Chinmoy Das (2010338012)
Nazmul Hossain (2010338016)
Niloy Bonik (2010338017)
Sohel Rana (2010338033)
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#Semiconductor Grade Silicon (SGS)#
The highly refined silicon used for wafer fabrication.
Also known as Electronic Grade Silicon.
Has ultra high purity.
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#Steps to obtaining SGS#
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#Steps to obtaining SGS#
Obtaining MGS
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#Steps to obtaining SGS#
Pure Silicon Producing System
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#Crystal Defects in Silicon#
Interruption in the repetitive nature of the unit cell crystal structure.
Aiso known as micro defect.
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#Types of Defects#
Point Defects: Localized crystal defect at the atomic level.
Dislocations: Displaced unit cells.
Gross Defects: Defects in crystal structure.
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#Point Defects#
Vacancy Defect
Interstitial Defect
Frenkel Defect
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#Vacancy Defect#
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#Interstitial Defect#
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#Frenkel Defect#
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#Dislocations#
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#Gross Defects#
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#Wafer Preparation#
A process of preparing wafer including-
Machining operations
Chemical operations
Surface polishing &
Quality measures.
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#Basic Process Flow#
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#Steps’ Introduction#
Crystal GrowthShapingWafer SlicingWafer lapping & edge grindEtchingPolishingCleaningInspectionPackaging
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#Shaping Operations#
End Removal
Diameter Grinding
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#Wafer Slicing#
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#Wafer Lapping#
Two-sided lapping operation to remove damage left by slicing.
Performed under rotational pressure with pads & mixture of alumina or silicon carbide & glycerin.
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#Edge Contour#
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#Etching#
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#Polishing#
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#Cleaning#
Wafers must be cleaned to achieve an ultraclean state.
Wafers should be free of particles & contamination.
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#Wafer Evaluation#
Wafers need to be inspected carefully before packaging.
Standard quality should be measured.
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#Packaging#
Finally wafers should be packaged carefully.
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Here is the END of our presentation
Thanks everyone for being with us