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Kobe University Repository : Thesis学位論文題目Tit le
高周波アナログ・デジタル混載LSIのための基板結合解析と評価技術に関する研究
氏名Author 小坂, 大輔
専攻分野Degree 博士(工学)
学位授与の日付Date of Degree 2007-09-25
資源タイプResource Type Thesis or Dissertat ion / 学位論文
報告番号Report Number 甲4075
権利Rights
URL http://www.lib.kobe-u.ac.jp/handle_kernel/D1004075
※当コンテンツは神戸大学の学術成果です。無断複製・不正使用等を禁じます。著作権法で認められている範囲内で、適切にご利用ください。
Create Date: 2017-12-20
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15
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16 h 2O pDkg,j;Q
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2.2. CMOS _C/9H70Jk LSI K*1kpDkgHc:Pv 17
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18 h 2O pDkg,j;Q
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(b)SOI =$"(c)(T=$
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2.3. pDkg,j 19
Figure 2.4: 4<R!Khk>3NNDC q3,j
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20 h 2O pDkg,j;Q
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2.3. pDkg,j 21
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22 h 2O pDkg,j;Q
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2.4. k@ 23
Figure 2.8: SF+LC ?pD(;!Po
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24 h 2O pDkg,j;Q
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7j3spDO.f, 10A20GHz J<N~HtG"lPchJq3
aC7eHM(FbGk=9k3H,G-k#b:YJbGkr8.9
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g7"~V39H"abjHQL,C7F7^&#=3G"=arOK
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26 h 3 O IjNhpDkgrO
Figure 3.1: F Tsi;KhkpDbGjs0
Q$kN<IN_r@(*KXj7">NN<IOTsi;GM89k
3HKhCF"rO:Yrt=5;k3H5/pD$sT<@s9yA
s)bGkNN<Itro:9k#Tsi;KO F Tsi;!r,Q9
k [75]#FTsi;rQ$k3HG"pDeN0i&sI[~"ZSpD
3s?/HrbGkfKH_~‘3H,G-k?a"pDXNN$:m
~dABrb:YKrOG-k#
F TsO~O<RNE5HE. (V1, I1)"ZSPO<RNE5HE.
(V2, I2)rQ$F0 3.1Nh&KjA5lk#[
V1
I1
]
= F
[
V2
I2
]
(3.1)
Figure 3.1K(9h&K"e?~"b>~Nq3VNFTsr=l>
l (Fh1, Fh2, Fh3)"(Fv1, Fv2)H9kH"0 3.1hj"pD=LNE5HE
. (Vtop, Itop)"pD"LNE5HE. (Vbtm, Ibtm)NVKO0 3.2NX8,
.j)D#[
Vtop
Itop
]
= Ftotal
[
Vbtm
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(3.2)
^?"F TsGOs)VN?JD3\3rTsNQG=93H,G-k
?a"Ftotal O0 3.3G=93H,G-k#
Ftotal = Fh1Fv1Fh2Fv2Fh3 (3.3)
0 3.2Ni;KhCF"\3psr:&3H5/ACWbNN<Ir,Z
Ko:G-k#^?"s)7_el<7gsK*$F,WHJkN<I
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3.2. pDkgyAs)bGk8.j! 27
Figure 3.2: IjNhrOUm<
O"N$:;+ipDXNm~N<I"!PN<IH$C?SPICE7_e
l<7gsK*$F@(*KjA5lkN<IN_G"k#ACW"L
N4N<Ide-J0NACW=LN<IOUm<F#s0G"j"E
.,0tX.P7?j"0t+i.~9k3HOJ$HM(ilk?a"
3liNN<IK*1kE.MO 0 H9k#JeNrorU^(?eG
TsQ9rT&3HKhCF"F Ts+irON<IN_N Y TsKQ
9G-k#YTs+i,WJ 2 N<IVNq3rjP9k3HKhCF"
SPICE _9N,Oro:7? 2!5bGk,8.G-k#
3.2.2 pDkgyAs)bGk8.Um<
F Tsi;j!KhkpDq3bGk8.j!O"s)l$"&H+
is)NE;?0i&sI[~Q?<sr1L7"3!5N[~+pDb
Gk+i 2!5NpDyAs)bGkr8.9kbNG"k#7+7"I
j*JrOK*1k[~Q?<sO#(GOJ/ (Fig. 2.6(a))"BQ*
JACWKfYFH6NLQ,=,g-/"pD=LKBlPa?k[
~H=l[IQoiJ$#=3G"\OGRYkIjNhrOGO"a
?kQ?<sr5k9k#
Figure 3.2O"l$"&H+is)7_el<? SPICE _9NMCH
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28 h 3 O IjNhpDkgrO
Figure 3.3: (a) Q,@N[V"ZS (b) ;m"(c)+|
j9Hr8.9kUm<G"k#P]r 3XK,d7"=liKP7FF
Tsi;r,Q7F5VbGkr8.9k#F5VbGkK “Short/Cut”
!r,Q7"GeK5VbGkrkg7F4NNbGkr8.9k#\
OGO"Fig. 3.3(a) K(9h&KQ,@rH6NAur=9@HjA9
k#^:"H6NAur=9h&KH6NQ"f@KQ,@r[V9k#
,<Ijs0Nh&KI<JDuNNhKD$FO"b&NQ,@H&
K0&NQ,@b[V9k3HG",<Ijs0Nr==9k#1~
KP]H9kpDNq3(r0RNpDyAs)bGk8.D<kK?
("bGkr8.9k#!K"FNhNK-K~8FQ,@r;mb7
/O+|9k#3N‘nKX9k\YO!aK(9#^?"pDN<5
~NTc*WmU!$krF=9k?aK"<54HKL9NpDy
As)bGkr8.7"GeKOjgo;k?XQXbGjs0j!r
+/7?#\j!KX9k\YO 3.2.4aK(9#GeK"8.7?MC
Hj9HrQ$F SPICE Khk SQia<?rOrT&#
3.2.3 Short/Cut
\aGO"IjNhGNpDkgrOK*1k"7j3spDeKA
.5l? p?? n?NhNbGk=j!rsF9k#Figure 3.3K(9F
9H=$K*$F"b>~NTc*)YOljG"kH>j9k#3
N~"0RN,’K’CF S1+i S4N~OKQ,@r[V7"FTsi
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3.2. pDkgyAs)bGk8.j! 29
Figure 3.4: (a) ?XQXbGjs0"(b) Tc*;Y,[
;"F-Y TsQ9KhCF"Q,@VNq3N_G=.5lkpDyA
s),8.5lk#
b7 S1"S2"S3"ZS S4NFNh,*r*Jb;YNTc*m~da
?k[~GA.5l?"3E-NKaFb$vXG$olF$kH-"3
NNhbNQ,@O9YF1ELG"kH>jG-k#3Nh&Jlg"
Fig. 3.3(b) K(9h&KFNhN4FNQ,@r;m7"yAs)GO
P~9k]<Hr1lN<IK^Hak3H,G-k#3lr”short” H
FV#
l"FNh,PpD\gFLG4Nr$olF$klg"S1"S2"S3"ZS S4Nh+ipDXNDC.fN3l~_O04Kdo5lk3
H,|TG-k#3Nlg"Fig. 3.3(c)K(9h&KNhbNFQ,@r
Zjhj"P~9kN<IryAs)+i|n9k#l"pDKL7?
NhN~ONQ,@O"LNN<IH7F^HaF*/#3lr"”cut”
HFV#
3.2.4 Multi-Layer Stacking
CMOSWm;9N7j3spDNTc*;YO"lLK 300µmJeN
|5N&(OGO"pD=LNt µm @1,soKb;YG"=lhj
<$t,Oc;YG"k#F Tsi;KpD=LNI<Ts0WmU!
$kr*NK?G9k?aK"Fig. 3.4(a) K(9h&K"F9H=$r
b>~NACW=L"&’k"p?Pk/N 3DN5VbGkK,d9
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30 h 3 O IjNhpDkgrO
k#ACW=LbGkOAcMk9HCWm~d p+/n+H6H18<5"
&’kbGkO p&’kd n&’kN<5"p?Pk/bGkODkAC
W"L^GN<5G"k#=LbGkNl$"&HK*$FjA5l?
S1"S2"S3ZS S4 NQ,@O"&’k"p?Pk/Gb1MKjA7"
^?b>~NTc*;YO"Fig. 3.4(b) NLjH>j9k#
3li 3DNbGkN=l>lK*1k 3!5FTsND3\3GO"
Tc*;YOQlH+J93H,G-k#0 3.3NFTsi;HFTs-Y
TsQ9KhCF 2 !5NyAs),8.5l"^?0RNroK7?
,CF S1"S2"S3"ZS S4NhNQ,@r;m"b7/O+|9k#F
5VbGkNyAs)O]<Hr<RH7?5V5<-CHH7F-R
5lk#G**K"F9H=$4NOF5VbGkrQX"9JoA 3D
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7"1DNyAs)bGkr@k#
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pDkg"ZS,%=$KOM9JbN,"k#=li4Fr>A9
kNO$qG"j"^?=,K&f5lF$k=$b"k3H+i"J
<N‘\KD$FN_>AD=J TEG r+/7?#
3.2.5.1 GL=$
p+-p+ with p+GR (Fig. 2.2(a)) Gbp\*JQ?<sG"S1-S2 V
K pn\g,8_7J$"q3-kgP)r>A9k#S1&KN_
p ?,<Ijs0r[V7"p ?pDeGN p ?,<Ijs0Nz
Lr>A9k#
n+-p+ with p+GR S1r n?KQ("=NlL"ZS&LK\gFL,
"kQ?<sG"k#FL-kg,pDNdo-K?(kFAd"
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-r>A9k#^?"S1N~OKO p?,<Ijs0r[V9k#
p+-p+ with n+GR (Fig. 2.2(b)) p\Q?<sN,<Ijs0r n?
KQ(?Q?<sG"k#,<Ijs0NK-Nc$KhkzLN
c$"CKb~HGNzLNc$r>A9k#
p+-p+ (S1:covered by deep n-well) (Fig. 2.2(c)) S1 ]<Hr n &
’k"ZSG#<W n&’kG$C?=$G"k#S14Lr$&3
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3.2. pDkgyAs)bGk8.j! 31
Figure 3.5: l$"&HM8->Aj9H
HKhCF"pD</r*s5;kNGOJ/"pDXN3l~_
rc:9k=$G"k#
p+-p+ with deep n-well GR (Fig. 2.2(d)) n ?,<Ijs0rhj
</^GA.7?Q?<sG"k#,<Ijs0rhjpD</^
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3.2.5.2 ?L=$ (l$"&HM8-)
3.2.6 ,Qc
3.2.4aNh&K"F Tsi;KhCF8.7?bGkK;m?+|r
,Q7"3DN5VbGkVr,ZJkg$sT<@s9G\39k3H
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bGkKO"b>~N$sT<@s9,^^lF*j"5VbGkb
N 3!5*JE.N.lriBKF=7F$k#\aGO"pDkgyA
s)bGk8.NqNcH7F"2OG(7? p+,<Ijs0"n+,<
Ijs0"G#<W n&’k,<Ijs0"G#<W n&’k]1CH=
$rbGk=9k#33G"F9H=$NGL=$O Fig. 3.4G(9h
&K"=LXNq3(r 0.1Ωcm"&’kXO 1Ωcm H9k#p?Pk/
bGkNq3(O"pDq3(NxNMKgo;FQ05;kbNH7"
10"100"1kΩcm N 3DH9k#
Figure 3.6O"p+,<Ijs0=$NbGk=j!G"k#=LbG
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32 h 3 O IjNhpDkgrO
Figure 3.6: p+,<Ijs0=$NbGjs0
Figure 3.7: n+,<Ijs0=$NbGjs0
kGO S1"S2"S3"ZS S4O p+G"j"FNhOFig. 3.3(b)K(9h
&KQ,@r;m7F1l]<HK^Hailk#p&’k? p?Pk/
bGkb=LbGkH18 S1"S2"S3"S4NhrA"FNhObGk
NF]<HK=l>lP~9k#,<Ijs0HpDNkg,cq3-
G"k?a"3DN5VbGkObtNkg$sT<@s957G\39
k (Fig. 3.3(b))#Figure 3.7O"n+
,<Ijs0=$NbGk=j!G"k#Figure 3.3(b)
G(7?h&K"=LbGkN S3N n+NQ,@rZjhj"S3Nb&
H0&N~ONQ,@r"=l>l S3inner H S3outer H$&]<HK^H
ak#=7F"/jL$? n+NhKP~7?]<HH7F S3top rFj
A9k#&’kbGkGO"S1"S2"S3"ZS S4O p+,<Ijs0=
$N=LbGkH1MKjA5lk#FNhO4F p?G"k?a"=l
>lP~9k]<HK^Hail"CK S3]<Hr S3bottom H9k#n+
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3.2. pDkgyAs)bGk8.j! 33
Figure 3.8: G#<W n&’k]1CH=$NbGjs0
Figure 3.9: G#<W n &’k,<Ijs0=$NbGjs0
,<Ijs0rMCHj9HG==9k?aK (Fig. 3.7(b))"S3KX"
9k3liN]<H (S3inner"S3outer"S3bottom) O"H6&LFL Cper"
ZSH6lLFL Cbtm rp7F S3top K\35lk#
Figure 3.8O"G#<W n &’k]1CH=$NbGk=j!G"k#
3Nlg"=LbGkN S3 N n+NQ,@Ohj|+l"5iK&’k
bGkGbG#<W n &’k]1CHG$ol?NhNQ,@r4Fo
|9k#l"S3outer N]<HO"G#<W n&’k]1CH~ONQ,
@r;m7FjA5lk#p Pk/bGkGO"S3 OG#<W n &’k
]1CHNlLH18AuG S3bottom ]<HH7FjA5lk#
=7F"FjA5l?G#<Wn&’kN S3]<HOS3outer HS3bottom
K\35l"5iK"G#<W n&’k]1CHr=9?aK (Fig. 3.8)"
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34 h 3 O IjNhpDkgrO
Table 3.1: rO39H
h ~V (s)
Q,@[V 300
FTsi;"F-YQ9 1800
Q,@N;m?o|"5VbGkkg 30
7_el<7gs (SPICE) 30-120
S3bottom O S1]<HNlLNs8FLrp7F S1K\35lk#
Figure 3.9O"G#<W n&’k,<Ijs0=$NbGk=j!G"
k#bGk=j!O n+,<Ijs0=$H1M@,"=L?&’k>
NbGkG S3bNQ,@r|n7"S3inner H S3outer r8.9k#>N
bGkGS3top rFjA7"33GOG<tNp?Pk/bGkGS3bottom
rjA9k#5iK"G#<Wn&’k,<Ijs0rMCHj9HG==
9k?aK (Fig. 3.9(b))"S3KX"9k]<H (S3inner"S3outer"S3bottom)
O"FLG S3top K\35lk#
3.2.7 pDyAs)bGk8.39H
3liNFo,<Ijs0NdoC->AK++kW;39HO"0
n~Ht 750MHz"g-1 2GBNo</9F<7gs (Ultra SPARC III)
rHQ7?H-"H%7? F Tsi;Um<rQ$?F9H=$NyA
s)8.K?Qs 30 ,"SPICEKhk SQia<?7_el<7gsK
t,rW7?#
3.3 7_el<7gsKhk>A&rO
\aGO"M9JpDkg,%=$KD$F"l$"&HM8-"G
L=$KhkzLNc$"pDq3(Nc$r7_el<7gsKhC
F>A"rO9k#
3.3.1 l$"&HM8->A
Figure 3.10K"p+,<Ijs0NLVdg-5XNM8-rB,"Z
S7_el<7gs7?kLr(9#S1H S2]<HVNw%rQ=5;
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3.3. 7_el<7gsKhk>A&rO 35
Figure 3.10: (a) w%M8-"(b)LQM8-
?j"S1"ZS S2]<HNLQrQ(F (S3N,<Ijs0b91<j
s05;FQ=)>A7?#B,H7_el<7gskLOh/lW7F
*j",<Ijs0KhkdozLOLQKMi:s 10dBG"k3H,
o+k#
3.3.2 ,%=$&pDq3(KhkfS
Figures 3.11"3.12"3.13GO"p+"n+ZSG#<W n &’k,<I
js0=$H"G#<W n&’k]1CH=$Ndo-rfS7F$k#
B,H1MK"p+"n+,<Ijs0GOe\9k~HtShK*$F
30dBJ<NdozL7+?:"3lO"pDq3(KMiJ$#l"
G#<W n &’krQ$?=$GOhjb$dozL,|TG-k#C
K"G#<W n &’k,<Ijs0=$GOpDq3(,b/Jk[I
dozL,g-/Jk#3lO">hNG#<W n &’k]1CH=$
O-$lLQrD?aFL-kg,g-/"~HtKhkdo-c<
,x7$NKP7"G#<W n &’k,<Ijs0Ob~HtNN$:
bzL*KdoG-k?a@HM(ilk#
5iK"Fig. 3.14NXJkg,J$lgN,<Ijs0=$NzLr
+kH"n+,<Ijs0dG#<W n&’k]1CHGO"^jzLO
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36 h 3 O IjNhpDkgrO
Figure 3.11: F,<Ijs0=$Nq3(4HNzL (10Ωcm)
QoiJ$,"G#<W n &’k,<Ijs0=$GOb~HhN.f
KP9kdo-,g-/~e9k3H,o+k#
3.3.3 G#<Wn&’k=$NfS
Figure 3.15O"G#<W n&’k,<Ijs0"ZSG#<W n&’k
]1CHG@ilk"c~Hth (100MHz)H5~~Hth (2GHz)Nd
o-Nl$"&HM8-G"k#b~HNhGO"G#<W n&’k,<
Ijs0N,b$do-rD3HO@i+@,"S3H S1NLQ,g
-/Jk3HGFL-kg,g7"do-,c<9k#
3.4 k@
\OGO"ACWbNIj*J 2 @VNpDkg,%C-r>A9k
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F p+,<Ijs0"n+,<Ijs0"G#<W n &’k,<Ijs0"
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3.4. k@ 37
Figure 3.12: F,<Ijs0=$Nq3(4HNzL (100Ωcm)
@d!P@H7FQ,@,,WG"k#=3G"Q,@rF9HQ?<s
NH6NhNAuKP~7F[V9k3HG"m~]<HNLQd,<
Ijs0Nr==7"5iK;m?+|j!KhCFK-r==9k
;Qr+/7?#^?"lL*KpDO=LNt µmNq3(,soK.
5/"<$t,Oq3(,b$3Hr==9k?aK"?XQXbGk=
j!r7?K+/7"1kΩcm H$&bq3pDNbGk=rB=7?#
3liN;Qr,Q7F F Tsi;j!KhkpD$sT<@s9y
As)8.rH%7"B]K#tNpDkg,%=$KD$FbGk="
7_el<7gsKhjrO7?kL"B,HsoKh/lW7F$?#
sF9kpDyAs)8.j!O"\FGP]H7?GL=$@1GJ
/"G#<WHlsAd SOI =$NbGk=Kb,QD=G"k#
IjNhGNpDkgrOKhj"G#<W n &’k,<Ijs0H
bq3pDrH_go;k3HGb$dozL,@ilkH@(k#7
+7"bq3pDOsoKb39HJWm;9G"k?a"lL*J
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Figure 3.15: G#<W n &’k=$NfS#(a)100MHz"(b)2GHz
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42 h 4O ACWlYkpD(;,[rO
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4.4. k@ 53
Figure 4.8: 0.3µmF9HACWNB,"ZS7_el<7gskL#(a)
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4.4. k@ 55
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58 h 5 O b~HpDkg!P79F‘NsF
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5.2. !P79F‘N5W 59
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5.2. !P79F‘N5W 61
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5.3. !P79F‘_WUm< 63
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1.8 E.;"q3"FLbGkKhkpDN$:m~ . . . . . 10
1.9 -ShE53sQl<?rQ$?pDN$:,js) . . . 11
2.1 CMOS Wm;9K*1kpDkgP) . . . . . . . . . . . 16
2.2 lL*JpDkg,%=$#(a)p?,<Ijs0"(b)n?
,<Ijs0"(c)G#<Wn&’k]1CH (HjWk&’
k=$)"(d)G#<W n &’k,<Ijs0 . . . . . . . . 17
2.3 ClWm;9rQ$?pDkg,%=$#(a)bq3pD"
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2.5 DCq3,jkL . . . . . . . . . . . . . . . . . . . . . . . 20
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2.7 z-~_[~HpDVNFL-kg (XJkg)H7<kI
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3.7 n+,<Ijs0=$NbGjs0 . . . . . . . . . . . . . . 32
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3.12 F,<Ijs0=$Nq3(4HNzL (100Ωcm) . . . . . 37
3.13 F,<Ijs0=$Nq3(4HNzL (1kΩcm) . . . . . 38
3.14 XJkg,J$H-NF,<Ijs0=$NzL . . . . . 39
3.15 G#<W n &’k=$NfS#(a)100MHz"(b)2GHz . . . 40
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4.10 0.18µm F9HACWN,j"7_el<7gsHA . . . 55
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5.3 >hN_-5KhkpDN$:!P! . . . . . . . . . . 59
5.4 _-5Khk~HtQ9 . . . . . . . . . . . . . . . . . . . 60
5.5 !Ps)4N^ . . . . . . . . . . . . . . . . . . . . . . . . 61
5.6 *sACWpDkg,j79F‘N_W"ZSrOUm< 62
5.7 ACWlYkGN!Ps)7_el<7gsN?aNF9
H=$#(a) pDkg,j^"(b)F9H=$?L^ . . . . 63
5.8 7_el<7gskL#(a)pDkg"(b)!PoPO9Z
/Hk . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64
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5.9 ,jO"ZS7_el<7gsQN*UACWs8., . . 65
5.10 !PoNWmH?$W . . . . . . . . . . . . . . . . . . . . 66
5.11 WmH?$WACWN~PO.f/YNB,"ZS7_e
l<7gskLNfS . . . . . . . . . . . . . . . . . . . . 67
5.12 *sACWpDkg,jGbACW . . . . . . . . . . . . . 67
5.13 *sACWpDkg,jGbACWN>A . . . . . . . . . 68
5.14 B,H7_el<7gsN9Z/HkfS . . . . . . . . . 69
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92
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93
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3.1 rO39H . . . . . . . . . . . . . . . . . . . . . . . . . . 34
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