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Nanotechnology Cleanroom Nanotechnology Cleanroom Design Considerations Design Considerations
Scott Mackler Tim Loughran
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OutlineOutline
How to Define the User Requirements?Basic Contaminate ControlDesign Concepts?Case Studies?Outline Requirements?
First- Tell us about your level of expertise and understanding.
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What is Nanotechnology?What is Nanotechnology?
Research and technology development at the atomic, molecular or macromolecular levels
Ability to control or manipulate on the atomic scale
Creating and using structures, devices and systems that have novel properties due to their small and/or intermediate sizes
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Size of NanometerSize of Nanometer 1 Nanometer = One-Billionth of a Meter Nanometer sized particles are smaller than
a living cell and can be seen only with the most powerful microscopes
Width of human hair is approx. 80,000 nanometers
The average human can see in the 80,000 nanometer range
One small dust particle seen in a ray of sun equates to approx. 60,000 nanometers
DNA is in the 2.5 nanometer range
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Nanotechnology ApplicationsNanotechnology Applications
Creation of new materials w/ superior strength, electrical conductivity, resistance to heat and other properties
Microscopic machines, including probes that could be injected into the body for medical diagnosis and repair
Creation of “bio-chips” that detect food-borne contamination, dangerous substances in the blood or chemical warfare agents in the air
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Defining a CleanroomDefining a Cleanroom
Designed, built, and operated to provide cleanliness, control, and/or isolation
Built with smooth, hard, cleanable surfaces
Air filtration system is critical – HEPA filters (High Efficiency Particulate Air)
Strict procedures control operation, personnel, process and materials
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Why have a Cleanroom?Why have a Cleanroom?
To protect the product or process from contamination
To restrict access to the product or process
To contain hazards located within the cleanroom
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What is Contamination?What is Contamination?
Contamination is anything (material, substance, or energy) which corrupts the process or makes the product impure by either touching or mixing with it
Solid / Liquid / GasOrganic / Non-OrganicAirborne / SurfaceChemical MakeupSize and ShapeStatic Charge + / -
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How is Cleanroom How is Cleanroom Contamination Measured?Contamination Measured?
Measured in microns or micrometers1 micron = One millionth of a meterThere are 25,400 microns in an inchA human hair is approx. 75 microns in
diameterHuman eye can see particles down to
about 50 micronsBacteria is approx. 2 to 10 microns in
size
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How is Cleanroom How is Cleanroom Contamination Measured?Contamination Measured?
Cleanrooms are measured in the amount of ½ micron size particles in one cubic foot of sampled air. (½ micron particle = .00001968”)
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What Creates Contamination?What Creates Contamination?
Personnel activity within the cleanroom generates and transports contamination
MovingTalkingBreathingScratchingSneezing
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What Creates Contamination?What Creates Contamination?
People Contaminate!
Activity PPM
Motionless 100,000 PPM
Walking @ 2mph 5,000,000 PPM
Walking @ 3.5mph
7,000,000 PPM
Walking @ 5mph 10,000,000 PPM
Horseplay 100,000,000 PPM
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What Creates Contamination?What Creates Contamination?
People generate contamination
Skin flakes and oilSpittle (smokers especially)HairPerspirationClothing debris (lint, fibers, etc.)
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What Creates Contamination?What Creates Contamination?
Materials generate contamination
Wood productsConstruction materials (drywall, concrete dust,
etc.)PencilsDuct tapeCardboard and paperPaint and coatings
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What Creates Contamination?What Creates Contamination?
Equipment generates contamination
Electric motorsScaffoldsLaddersGang boxesBrooms, mops and dusters
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What are Cleanroom What are Cleanroom Classifications?Classifications?
All cleanrooms are not built or operated to the same cleanliness standard due to the size of the devices that are being built or handled at each customers location.
ISO 14644-1, which replaces Federal Standard 209E, is the basis of Cleanroom Classification.
ISO 14644 classifies a Cleanroom based on the size and number of airborne particles
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What are Cleanroom What are Cleanroom Classifications?Classifications?
Chart of ISO-14644 & FED-STD-209E classifications
ISO 14644-1 Class
FED-STD-209E Class
0.5µm particles per meter
cubed
0.5µ particles per foot cubed
8 100,000 3,520,000 100,000
7 10,000 352,000 10,000
6 1,000 35,200 1,000
5 100 3,520 100
4 10 352 10
3 1 35 1
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Clean-Build Goals and Clean-Build Goals and MethodsMethods
Minimize and remove contaminants from the environment
Don’t allow contaminate into the cleanroomControl behaviors in the clean roomContinual clean-up and removal of debrisVacuuming, wet mopping, wipe downs
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Clean-Build Goals and Clean-Build Goals and MethodsMethods
Neutralize the threat within the environment
Grounding (Electro-Static Discharge control)
Safety Immediate spill cleanup
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Case StudiesCase Studies
Purdue University- Birck Nanotechnology Center Brookhaven National Laboratory (BNL)- Center for
Functional Nanomaterials University of North Carolina and North Carolina
AT&T- Joint School of Nanoscience and Nanoengineering (JSNN)
Iberian National Laboratory (INL)- Brage Portugal
Purdue Birck Nanotechnology CenterPurdue Birck Nanotechnology Center
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Purdue Birck Nanotechnology Center Purdue Birck Nanotechnology Center Cleanroom Floor PlanCleanroom Floor Plan
C2 C2
C2
C2
C2
C2 C2
C2
C2
C2
C2
C2
C2
(4 SIDES) (4 SIDES) (4 SIDES) (4 SIDES) (4 SIDES)
(4 SIDES)(4 SIDES) (4 SIDES) (4 SIDES)
(4 SIDES) (4 SIDES)
C2
(4 WALLS)
(3 WALLS) (3 WALLS)
(3 WALLS)
C2
AIRLOCKCL2015
DIFFUSION / IMPLANTCLASS 100
CL2013CHASECL2014
CHASECL2012
OXIDATION WET CHEMCLASS 100
CL2011CHASECL2010
DEPOSITIONCLASS 1000
CL2009CHASECL2008
GOWNINGCLASS 1000
CL2003
CLEAN HOUSKEEPINGCLASS 1000
CL2007
AIR
SH
OW
ER
CL2
004
AIR
LO
CK
CL2
005
CLE
AN
HO
USEK
EEPIN
GC
LASS 1
000
CL2
039
AIR
SH
OW
ER
CL2
001
VESTI
BU
LEC
L200
0
AIR
LO
CK
CL2
002
CHASECL2038
BAYCLASS 1000
CL2037CHASECL2036
WET CHEMCLASS 1000
CL2035CHASECL2034
CHASECL2016
LITHOGRAPHYCLASS 10CL2017
CHASECL2018
LITHOGRAPHYCLASS 10CL2019
CHASECL2020
CLUSTERCLASS 1000
CL2021CHASECL2022
DEPOSITIONCLASS 1000
CL2023CHASECL2024
DRY ETCHCLASS 1000
CL2025CHASECL2026
BAYCLASS 1000
CL2027CHASECL2028 BAY
CLASS 1000CL2029
CHASECL2030
QUARTZ CLEANCLASS 1000
CL2031
CENTER AISLECLASS 1000
CL2006CENTER AISLECLASS 1000
CL2006
CHEM BIOCLASS 1000
CL2033
BACTERIACLASS 1000
CL2033H
MAMALLIANCLASS 1000
CL2033JHSKP
CLASS 1000CL2033B
CL SUPPLYCLASS 1000
CL2033C
CHEM BIO GOWNINGCLASS 1000
CL2033A
AIR SHOWERCLASS 1000
CL2033D
DEGOWNCLASS 1000
CL2033E
CHEMISTRYCLASS 1000
CL2033G
CLASS BCLASS 1000
CL2033F
CENTER AISLECLASS 1000
CL2006
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Brookhaven National LaboratoriesBrookhaven National Laboratories
BNL Center for Functional BNL Center for Functional Nanomaterials Cleanroom Nanomaterials Cleanroom
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BNL Center for Functional BNL Center for Functional Nanomaterials Cleanroom Floor PlanNanomaterials Cleanroom Floor Plan
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UNC and NC A&T Joint School of Nanoscience UNC and NC A&T Joint School of Nanoscience and Nanoengineering (JSNN) Cleanroom and Nanoengineering (JSNN) Cleanroom
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UNC and NC A&T Joint School of Nanoscience UNC and NC A&T Joint School of Nanoscience and Nanoengineering (JSNN) Cleanroom and Nanoengineering (JSNN) Cleanroom
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Iberian National Laboratory (INL)Cleanroom Iberian National Laboratory (INL)Cleanroom
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Iberian National Laboratory (INL) Cleanroom Iberian National Laboratory (INL) Cleanroom
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Define RequirementsDefine Requirements
Functions/Processes Control Parameters Type of Room- Bay Chase vs. Ballroom Type of Systems- Air Delivery Vibration Criteria EMI Requirements Nano Bio Functions and Interface
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Define RequirementsDefine Requirements
Functional Processes:– Wet Process/Etch– Dry Etch– Photolithography– Thermal– Deposition– MBE– Inspection– Characterization– Nano Bio
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Define RequirementsDefine Requirements
Control Parameters:– ISO Class– Temperature/RH– Process Services– Exhaust Streams
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Define RequirementsDefine Requirements
Type of Rooms:– Bay/Chase– Ballroom
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Define RequirementsDefine Requirements
Type of Systems- Air Delivery:– Fan Filters– Duct Supply/Open Return– Ducted Supply/Ducted Return– Make Up Air Introduction
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Define RequirementsDefine Requirements
Vibration Criteria:– Equipment Requirements– Location within building– Adjacent spaces– Parameters (Millimeters per Second):
• 125 MPS Areas• 200 to 500 MPS Areas• Over 500 MPS Areas
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Define RequirementsDefine Requirements
EMI Requirements:– Equipment Requirements– Fields AC and/or DC (milliGAUSS)– 0.1 mG peak-to-peak
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Define RequirementsDefine Requirements
Nano Bio Functions– What is different?– How does it interface with the function fab?