470 Commerce Way, Livermore, CA 94551 925.373.8201 Voice 925.373.8202 Fax www.semicore.com
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SYSTEM DESCRIPTION: Manufacture: Temescal (BOC Edwards)
Model: FC 1800 (Fast- Cycle) E-beam Evaporation System PICTURES: Additional photographs available upon request. System has been upgraded to a Telemark TT-10 power supply, sweep control and indexer.
CONFIGURATION:
SYSTEM FACRICATION
Cabinet, Steel Framework Fully-enclosed system cabinet with full opening service
door DEPOSITION CHAMBER:
20-inch diameter x 9-inch high stainless steel, deposition chamber designed for waist high substrate loading and unloading.
18-inch diameter stainless steel, evaporation source chamber with viewport
Isolation valve between substrate and source chambers. PUMPING SYSTEM: Cryogenic pump
CTI-8 cryo with SC helium compressor ROUGHING PUMP
27 cfm roughing pump
470 Commerce Way, Livermore, CA 94551 925.373.8201 Voice 925.373.8202 Fax www.semicore.com
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HIGH VACUUM VALVES High Vacuum poppet valve
Roughing, Leak-check, Backing, and Vent Valves VACUUM CONTROLLER:
Temescal Auto/Manual vacuum sequence controller. CHAMBER GAUGING:
Granville Phillips combination ionization and TC gauge. DEPOSITION: E-beam
4 pocket Electron Beam Gun 4 pocket crucible indexer. TT-10 power supply with X-Y beam sweep controller. 3 cm Ion gun and power supply with single gas
controller. DEPOSITION SOURCE SHUTTER:
Electro-pneumatic source shutter: DEPOSITION Controller
Inficon IC4 plus Quartz crystal deposition controller Single quartz crystal sensor (water-cooled)
SUBSTRATE HEAT: Optional SUBSTRATE FIXTURING:
Planetary or Lift-off tooling available. Substrate rotation assembly with variable speed drive
motor. SYSTEM DOCUMENTATION:OEM manuals.
CONDITION: Fully operational at time of shut down.
DELIVERY: Immediate.
PRICE: Call for pricing.
Note: All equipment listed above is subject to prior sale or other disposition.