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20120202
Nano Functional Ceramic Lab.
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•前言
•實驗步驟
•結果與討論
•結論
•未來工作
Outline
2
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前言
3
· Recently, a variety of onedimensional (1D) nanostructures including nanowires, nanorods, nanobelts, nanosprings and nanorings have been produced.
· These 1D nanostructures show very high surface-to-volume ratios and great surface activities, which could translate to better gas response and selectivity properties in terms of chemical sensing.
· As an n-type semiconductor, SnO2 has been extensively exploited in applications related to gas sensing.
· Recently, a hybrid structure of SnO2 nanorod thin films consisting of Q1D SnO2 nanorods embedded in a 2D SnO2 thin film matrix. The SnO2 nanorod thin film exhibited better sensing properties with faster response and shorter recovery time at lower operating temperatures.
· In this paper, single SnO2 nanorod gas sensors have been fabricated by a focused ion beam (FIB). The sensing properties of the single SnO2 nanorod sensors towards H2 gas were studied.
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實驗步驟
4
Precursor : (C4H9)2Sn(OOCCH3)2 二醋酸二丁基錫
The precursor vapor was carried into the deposition chamber by argon
The wafer was inserted in a quartz boat perpendicularly. Oxygen was used as the reaction gas.
· No catalyst and additional substrate heating during deposition was performed.
· 製備 SnO2 nanorod
Substrate : A 4 inch SiO2/Si wafer
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實驗步驟
· 製備 SnO2 single-nanorod gas sensors
首先,把先前在 SiO2/Si wafer 上生成的的 SnO2 nanorod 刮下來
放進乙醇中,以超音波震盪分散
The Au/Ti electrodes (Au/Ti = 300/20 nm) were deposited on the SiO2/Si wafer by e-beam evaporation
利用微球管,把 SnO2 nanorod suspension 滴在兩端電極中央,會形成一個電場,以 AC dielectrophoresis (5V, 1MHz) , until the
suspension completely dried out.
The SnO2 single-nanorod gas sensors were fabricated by connecting individual SnO2 nanorods to a pair of Au/Ti electrodes with Pt stripes deposited by focused ion beam.
XRD SEM TEM I-V curve
And were patterned by standard UV lithographic and liftoff processes.
liftoff processes:剝離製程,為一種常見的金屬圖案成形法。
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實驗步驟
· Gas sensing
參考氣體 : Air
帶測氣體 : H2 , 100 ppm (dry air with total flow of 500 sccm)
溫度 : 25 ℃ , 200 , 25 ~350 ℃ ℃ ℃
Response: R air
R H2