Highly Parallel Fabrication of Nanopatterned Surfaces with Nanoscale Orthogonal Biofunctionalization Imprint LithographyH. E. Gaubert and W. Frey, Nanotechnology 18 (2007) 135101

Devang Parekh

3/21/07

EE235

Devang Parekh EE235

Overview

Motivation Fabrication Results Conclusion

Devang Parekh EE235

Motivation

Nanopatterned surfaces Biosensors Tissue engineering scaffolds Bio-Mems

Self-assembly techniques Pattern parameters Pattern defects Lack of dual functionality

E-beam and Ion-beam Serial Cost prohibitive

Devang Parekh EE235

Fabrication

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Step and Flash (SFIL) Quartz template Bottom Antireflective Coating

(BARC) planarization layer BARC spin-coated 45nm Low-viscosity resist Photoresist fills template Harden PR with UV exposure Step

M. Stewart, et. al, J. Microlith., Microfab., Microsyst. 4, 011002 (2005)

Devang Parekh EE235

Fabrication

O2 etch residual photoresist

2nd O2 etch to transfer pattern to BARC

Evaporate 3nm of Cr Evaporate 17nm of Au Lift-off

Devang Parekh EE235

Fabrication

O2 plasma remove residual organics

Hexadecanethiol (HDT) Polyethylene Glycol-silane

(PEG-silane) Fibronectin Human umbilical vein

endothelial cells (HUVECs)

Devang Parekh EE235

Results

AFM physico-chemical mapping

Force is random for untreated

HDT is hydrophobic PEG is less hydrophilic than

clean wafer nm-resolution of physico-

chemical differences

Devang Parekh EE235

Results

Devang Parekh EE235

Results

Devang Parekh EE235

Conclusion

Soft litho->micro NOBIL->nano Orthogonal functionalization shown Simple and cheap fabrication Possible extension to glass or polymer substrates