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    COLLEGE OF ENGINEERING

    DEPARTMENT OF ELECTRICAL ENGINEERING

    MICROELECTRONIC DEVICES SECTION 1

    Design and Fabrication of aBJT

    NAME: ID#

    ABDULLAH ALSAWAD 33811

    AHMAD MHD SAID AL HAMWI 35566

    NIZAR DADOUCH 27120

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    Introduction

    BJTs come in two types, or polarities, known as PNP and NPN based on the doping types of the

    three main terminal regions. An NPN transistor comprises two semiconductor junctions that

    share a thin p-doped anode region, and a PNP transistor comprises two semiconductor

    junctions that share a thin n-doped cathode region.

    In typical operation, the base emitter junction is forward biased, which means that the p-

    doped side of the junction is at a more positive potential than the n-doped side, and the base

    collector junction is reverse biased. In an NPN transistor, when positive bias is applied to the

    base emitter junction, the equilibrium is disturbed between the thermally generated carriers

    and the repelling electric field of the n-doped emitter depletion region. This allows thermally

    excited electrons to inject from the emitter into the base region. These electrons diffuse

    through the base from the region of high concentration near the emitter towards the region of

    low concentration near the collector. The electrons in the base are called minority carriers

    because the base is doped p-type, which makes holes the majority carrier in the base.

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    Background and History

    A bipolar junction transistor (BJT or bipolar transistor) is a type of transistor that relies on the

    contact of two types of semiconductor for its operation. BJTs can be used as amplifiers,

    switches, or in oscillators. BJTs can be found either as individual discrete components, or in

    large numbers as parts of integrated circuits.

    Bipolar transistors are so named because their operation involves both electrons and holes.

    These two kinds of charge carriers are characteristic of the two kinds of doped semiconductor

    material. In contrast, unipolar transistors such as the field-effect transistors have only one kind

    of charge carrier.

    Charge flow in a BJT is due to bidirectional diffusion of charge carriers across a junction

    between two regions of different charge concentrations. The regions of a BJT are called emitter,

    collector, and base. A discrete transistor has three leads for connection to these regions. By

    design, most of the BJT collector current is due to the flow of charges injected from a high-

    concentration emitter into the base where there are minority carriers that diffuse toward the

    collector, and so BJTs are classified as minority-carrier devices.

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    Method and Theory:

    In order to manufacture a good Bipolar Junction Transistor (BJT) three important criteria must

    be taken into consideration:

    1. Emitter Injection efficiency: the ratio of the injected emitter current to the total emitter

    current. In order to improve it, the device must be designed such as the base neutral

    width is smaller than the electron diffusion length L e.

    2. Base transport factor: The ratio of the electron current reaching the base-collector

    junction to the current injected at the emitter-base junction. In order to make it

    approach unity the neutral base width must be small without falling into the trap of

    base width modulation and punch though.

    3. Collector efficiency: it can be improved by reducing the lateral and vertical resistance of

    the collector (n+ buried layer).

    These criteria suggest that the base width must be small. Furthermore to avoid punch through,

    the collector doping must be low compared to the base doping. And of course the emitter

    doping must be high. Hence: Ne>>Nb>>NC .

    Another important factor in the design of BJTs is the base intrinsic resistance (near the base

    contact) the area under the base contact must be heavily doped (P+) in order to minimize it.

    With these concepts in mind, a good BJT silicon transistor can be fabricated.

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    Design Criteria:

    Simulate the fabrication of a silicon npn transistor with the following parameters.Device length = 2.2 mEmitter width = 0.2 mBase width = 0.1 mCollector width = 0.7 mDoping concentrationEmitter = 4x1020 atoms cm-3Base = 1x1018 atoms cm-3Collector = 2x1016 atoms cm-3

    Plot the donor and acceptor concentration profiles in the emitter, base, and collectorregions of the transistor.Using device simulator Atlas, plot the VBE-IB characteristics of the BJT and extract hie of

    the transistorPlot the VCE-IC characteristics of the BJT and extract hfe of the transistor.Modify the device structure to increase hfe to be 5 times the present value.

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    Doping Profile:

    As discussed previously, Ne>>Nb>>NC . hence the doping profile must resemble figure 1.

    Figure 1

    This type of profile can be achieved using either diffusing or implantation. Since the design

    criteria require a fairly small device, using implantation proved to be a difficult task. Hence

    diffusion was used instead.

    The first step is to diffuse boron into the substrate in a nitrogen environment to prevent

    oxidation, and then a thin emitter layer is deposited by implanting a layer of poly silicon with

    arsenic and slowly diffusing it onto the substrate. Further detail will follow in the next section of

    the project report.

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    Fabrication process:

    Figure 2

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    The first step is to define a wafer with back ground doping such as Arsenic. This wafer is then

    mirrored vertically and an N+ region is created for the collector. This layer reduces the collector

    resistance and improves the collector efficiency:

    Figure 3

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    The second step is to implant boron into the wafer in order to create a p-region. The doping of

    this region must be greater than the background doping and less than the emitter doping by at

    least one magnitude:

    Figure 4

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    After creating the P-region, poly silicon was deposited onto the wafer to act as the emitter. This

    reduces contact resistance and improves the efficiency of the emitter. Furthermore this

    technique is very useful when a shallow emitter is required (figure 4). The poly silicon is

    implanted with arsenic. Etched and then diffused. (figure 5)

    Figure 5

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    The final step is to anneal the device from defects reflect it across the Y axis and place and

    ohmic contacts for testing.

    Figure 6

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    Testing the device

    A good way to check the gain of a BJT and inspect whether the device is behaving in an ideal

    manner is to utilize a gummel-poon plot. The plot shows the recombination effects at low bias

    and the kirk/auger effects at high transport. This allows the designer to quickly realize a

    working device (figure 7).

    Figure 7

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    Figure 10

    The original gain is 10V/V at VCE=3V (close up available in the appendix)

    While after modifications the gain is 69V/V

    An improvement of 10x was not achieved due to the non-ideal effects (kirk/auger) and

    the base width modulation. A heterojunction bjt may be more suitable due to the

    difference in the bandgaps of the the materials.

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    Appendix

    CODE:

    go athena

    # Establish initial grid and substrate material

    line x location=0.0 spacing=0.08line x location=0.5 spacing=0.05line x location=0.7 spacing=0.05line x location=1.2 spacing=0.08line x location=2.2 spacing=0.18#line y location=0.0 spacing=0.01line y location=0.1 spacing=0.02line y location=0.5 spacing=0.05line y location=.6 spacing=0.15#

    init orientation=100 silicon c.arsenic=2e15 two.dstructure outf=tmpr1.str two.dinit inf=tmpr1.str flip.yimplant arsenic energy=20 dose=1e16diffuse time=3 temp=1000struct outf=tempinit inf=temp flip.yimplant boron energy=1.5 dose=.60e14diffuse time=2.0 temp=1000 t.final=920 nitrogen# Mask and implant the emitterdeposit poly thick=.12 divis=5implant arsenic energy=42 dose=10.5e15etch poly right p1.x=1.4deposite oxide thick=.12 divis=5etch oxide righ p1.x=1.6

    diffuse time=2.5 temp=950 t.final =960 c.boron=2e21diffuse time=180 temp=600 nitrogen c.boron=2e21

    etch oxide# Deposit and pattern the contact metal

    deposit aluminum thick=0.1 div=2

    etch aluminum start x=1.4 y=10.etch cont x=1.4 y=-10.etch cont x=1.6 y=-10.etch done x=1.6 y=10.

    structure reflect left

    # Define the electrodeselectrode name=emitter x=0.0electrode name=base x=2.0electrode name=collector backsideelectrode name=base1 x=-2.0# Define impurity characteristics in each material

    structure outfile=BJT.str

    go atlas

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    contact name=base1 common=base short# Material parameter and model specification

    material material=Si taun0=1e-7 taup0=1e-7model bgn consrh auger fldmob conmob

    # Initial solutionsolve init

    save outf=bjtex04_0.str

    tonyplot bjtex04_0.str -set bjtex04_0.set

    # Gummel plot

    method newton autonr trapsolve vcollector=0.025solve vcollector=0.1solve vcollector=0.25 vstep=0.25 vfinal=2 name=collector

    solve vbase=0.025solve vbase=0.1solve vbase=0.2

    log outf=InputChara.logsolve vbase=0.3 vstep=0.05 vfinal=1 name=base

    tonyplot InputChara.log

    #IC/VCE with constant IB

    #ramp Vb

    log offsolve init

    solve vbase=0.025solve vbase=0.05

    solve vbase=0.1 vstep=0.1 vfinal=0.7 name=base

    # switch to current boundary conditions

    contact name=base current

    # ramp IB and save solutionssolve ibase=1.e-6save outf=bjt_1.str mastersolve ibase=2.e-6

    save outf=bjt_2.str mastersolve ibase=3.e-6save outf=bjt_3.str master

    # load in each initial guess file and ramp VCEload inf=bjt_1.str masterlog outf=bjtout_1.logsolve vcollector=0.0 vstep=0.25 vfinal=5.0 name=collector

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    load inf=bjt_2.str masterlog outf=bjtout_2.logsolve vcollector=0.0 vstep=0.25 vfinal=5.0 name=collector

    load inf=bjt_3.str masterlog outf=bjtout_3.logsolve vcollector=0.0 vstep=0.25 vfinal=5.0 name=collector

    # plot resultstonyplot -overlay bjtout_1.log bjtout_2.log bjtout_3.logquit

    Beta extraction:

    BETA=6.97 E-5/1 E-6= 69.7