Master’s of Science in Applied PhysicsInternship in Semiconductor Industry

•Program started in 1996.•Strong support from industry.•Closely affiliated with PSPE in Electrical Engineering.

Charley MylesDepartment of PhysicsTexas Tech University

Lubbock, Texas 79409-1051

Purposes

• Provide excellent education and training for Texas Tech students in microelectronics.• Emphasize fundamental, analytical, and practical degree work.• Produce strong programs, alternative to traditional M.S. and Ph.D. programs, which offer advanced training.• Relieve human resources crunch in semiconductor industry.• Serve as national prototype for university-industry educational programs.

• Prior to internship (two semesters)*

– Quantum Mechanics

– Semiconductor Processing– Processing and

Characterization Laboratory

– Device Physics

– Semiconductor Physics– Computational Physics

• Electives base (one semester following internship)– Electromagnetic Theory– Statistical Mechanics– Solid State Physics

– Advanced Semiconductor Processing Laboratory

– VLSI Design– Failure Analysis

– ...* 5 of 6 required.

Summer & FallInternship

Year 1

Year 2

2x2x PP--5000 Cluster Tools5000 Cluster ToolsCVDCVDETCHETCH

Canon Proximity Printer

Spin Coater

Bake Ovens

Hitachi S-5000 SEM Phillips X’Pert XRD

“STRATEGY FOR IMPROVING LITHOGRAPHY LAYERS”Duke Phasirakul (1999)

“MOS GATE PATTERNING USING DEEP UV STEP-AND-SCAN LITHOGRAPHY” and “PATTERN FIDELITY OPTIMIZATION IN 0.35 �m OPTICAL LITHOGRAPHY”

Jerome deGuzman (1998)“INLINE USE OF IN-FAB AMRAY SEM” and

“THE USE OF OPTICAL PROXIMITY CORRECTION (OPC) IN RESOLVING METAL LINE PULLBACK ISSUES OF SIMICONDUCTOR LITHOGRPHY”

Marvin Partin (1998)“AIRBORNE CONTAMINATION OF CHEMICALLY AMPLIFIED PHOTORESIST”

Brian Weber (1998)“INTEGRATAION AND ELECTRICAL TEST”

Yvonne Emil (1998)“GATE OXIDE CHARACTERIZATION FOR MOS DEVICES”

Ric Justus (1997)

“MOBILE ION CONTAMINATION: DETECTION METHODS”David Bunch (1999)

“CHALLENGES IN RESOLUTION FOR MICROELECTRONICS FAILURE ANALYSIS”Nick A. Martinez (1999)

“FAILURE ANYLYSIS AND MECHANICS IN INTEGRATED CIRCUITS”Jianbai Zhu (1999)

“FLIP CHIP FAILURE ANALYSIS”Chris Carty (1998)

“FAILURE ANALYSIS TECHNIQUE DEVELOPMENTS:LOCALIZED DELAYING AND FOCUSSED ION BEAM MICRO-MACHINING” and

“INVESTIGATIONS INTO DEEP SILICON TRENCH ETCHING FOR FLIPCHIP PACKAGE FAILURE ANALYSIS”

Preston Scott (1998)“PHOTOMETRIC EVALUATION OF THIN FILM OPTICAL CONSTANTS” and

“MEASUREMENT OF COMPLEX REFRACTIVE INDICES”David Bessire(1997)

“EFFECT OF ARRAY IMPLANT DOSE ON FLASH MEMORY PROGRAMMABILITY”Richard Lawrence (1997)

Kilby Center - Kari Copeland, Jon Vanbuskirk(May - December, 2000)

“HIGH FREQUENCY MODELING OF BIPOLAR TANSISTORS” and“ELECTRICAL TESTING AND CHARACTERIZATION OF BICMOS

Michel Baker (1998)“QUALIFICATION OF AN ASYST WAFER MANAGEMENT SYSTEM FOR FAB USE”and “INVESTIGATION OF DEFECTS FROM PLASMA OXIDE ETCHES AND PLASMA

PHOTORESIST ASHERS AND CHARACTERISTIC X-RAY ANALYSIS”Jeremy O’Dell (1997)

“INTEGRATION AND SPC IN DRAM PRODUCTION”William A. Turmel (1999)

“DIAGNOSTIC MEASUREMENT BATTERY IN FA”Paul D. Gamble

“DEVICE MODLING OF DRAM CAPACITORS WITH TCAD SOFTWARE” and

“INTERFACE EFFECTS AND IONIC CONDITION OF BARIUM TITANATE CAPACITORS”

Dan Janson (1999)

“THE HV5 PROCESS AND PROPERTIES OF POWER BIPOLAR TRANSISTORS”

Chad E. Cox (1999)

• INFRASTRUCTURE– National Science

Foundation

– Texas Instruments

– Applied Materials

– Texas Tech University

• STUDENT SUPPORT– National Science

Foundation

– Texas Tech University

– Texas Instruments

– Applied Materials (2000)

– Intel

– AMD

– Motorola

Students interested in pursuing an advanced technical degree to prepare for a fast-paced career in microelectronics.

B.S. degree in Electrical or Chemical Engineering, Physics, Applied Physics, or a closely related field such as Chemistry or Mathematics.

Good academic record.GRE general exams.Apply before March 1

Transcripts to Graduate School.GRE scores to Graduate School.Letters of recommendation to the Physics/EE Department.

Dr. Charley MylesDepartment of PhysicsTexas Tech University

Lubbock, TX 79409-1051Phone: 806-742-3768

email: CMyles@gordian.phys.ttu.edu