delivering value through innovation...tmcv = top mount check valves 1 = 1 2 = 2 3 = 3 1 = c-seal 2 =...

Delivering ValueThrough InnovationSurface Mount Gas DeliveryAccessories from Talon

www.taloneng.com

A decade of innovation and value

For ten years, Talon Innovations has providedthe semiconductor industry with precisioncomponents and assemblies for the manufactureof integrated circuits. Committed to innovation,our proprietary processes and tooling allowus to make superior components, which inturn help integrators and OEM manufactures,and Semiconductor Fabricators operate moreefficiently.

Talon now operates 24,000 square feet ofultra-clean manufacturing space, handling all phases of production from raw stockthrough electro-polishing, to clean roomassembly, inspection and packaging. A singlesource supplier, Talon eliminates the need for multiple vendors, reducing costs andensuring quality and reliability. Talon provides a full line of standard components

and fittings, as well as custom componentsand assemblies developed to meet even themost challenging requirements. If you needconsulting help, our engineers have the toolsand expertise to help you rapidly bring yourconcepts to life, right through full-scale production.

Sandwich Check Valve

2

c

o

3

Purity specifications

Material Type

316L VAR Stainless Steel,Surface Chemistry meets or

exceeds SEMI E49.9 for Ultra-High Purity applications

Other Materials Available Upon Request

316L VAR Stainless Steel

Other Materials Available Upon Request

Purity Characteristics

316L in accordance withASTM A276 and A479

Chromium-to-iron atomic percentage ratio equal to or greater than 1.5 within the first 20 Angstroms of

the surface layer

Chemically Passivated

All “H” and “U” parts areelectropolished

316L in accordance withASTM A276 and A479

Sulfur Content %: ‹0.015

Carbon Content %: ‹0.030

Chemically Passivated

“S” Level parts are notelectropolished

Material Traceability

Heat lot traceability is maintained throughout the

process and can be marked onproduct at customer request.

Heat lot traceability is maintained throughout the

process and can be marked onproduct at customer request.

Surface Finish Level

Level “H” 6-10 RaLevel “U” 3-6 Ra

Inspected in accordance with the ISO 4288 Profilmetry

specification

Level “S” is less than or equal to 16 Ra

Cleaning and Packaging

Clean-Room CertifiedPackaging

Individually Double Bagged

Internal Electropolished/BathElectropolish/D.I. Rinse

Bulk or Special Packaging Available

Ultrasonic Clean and Rinse

Individually Bagged

Bulk or Special Packaging Available

Ultra-High Purity “H” and “U” Standard “S” Level

SPECIAL SIZES, CONFIGURATIONS, MATERIALS, AND PACKAGING ARE AVAILABLE UPON REQUEST.

MaterialsSpecifications

4

How to order

Part Type Size Seal Number of Material PurityType Ports Type Level

Configuration

18 = 1.125"

24 = 1.500"

24HF = 1.500" High Flow

MTC = Modular Flow Thru Caps

MCP = Modular Component Ports

MTP = Modular Top Plug

MFC-Caps = MFC Flow Thru Caps

MFC-Plug = MFC Plugs

MFCV = Manifold Tube Check Valves

MFR = Modular Flow Restrictors

MMV = Modular Metering Valves

MCV = Modular Check Valves

TMCV = Top Mount Check Valves

1 = 1

2 = 2

3 = 3

1 = C-Seal

2 = W-Seal

Refer to

individual parts

page/location

for options.

NNOOTTEE:: Special sizes, configurations and materials are available upon request.

S = Standard FinishH = High PurityU = Ultra-High Purity

S = 316L VAR

A = 316L

B = 316L VIM/VAR

N = Nickel 200

M = Monel 400

H = Hastelloy C-22

How To

Order

5

Modular Flow ThruCaps

ModularComponentPorts

Talon surface mount gas accessories

Modular Flow Thru Caps

2 – MTC-18-1-2

1.125" C-Seal 3 Connected MTC-18-1-3-C

1.12"3 Blank MTC-18-1-3-B

2 – MTC-18-2-2

1.125" W-Seal 3 Connected MTC-18-2-3C

3 Blank MTC-18-2-3B

2 – MTC-24-1-2

1.50" C-Seal 3 Connected MTC-24-1-3C

3 Blank MTC-24-1-3B

2 – MTC-24-2-2

1.50" 1.50" W-Seal 3 Connected MTC-24-2-3C

3 Blank MTC-24-2-3B

2 – MTC-24HF-1-2

1.50" HF C-Seal 3 Connected MTC-24HF-1-3C

3 Blank MTC-24HF-1-3B

MTC-18-1-2

MTC-24-1-3C

ModularFlow Thru Cap

PART TYPE SIZE (SQ.) SEAL TYPE # OF PORTS 3RD PORT CONFIG. PART NUMBER

Modular Component Ports

ModularComponent Port


MCP-18-1-1-1

MCP-24-1-1-2

p

1 1/4" Tube Stub MCP-18-1-1-1

1/4" Male VCR MCP-18-1-1-2

1.125" C-Seal 2 1/4" Tube Stub MCP-18-1-2-1

1/4" Male VCR MCP-18-1-2-2

3 1/4" Tube Stub MCP-18-1-3-1

1.12"1/4" Male VCR MCP-18-1-3-2

1 1/4" Tube Stub MCP-18-2-1-1

1/4" Male VCR MCP-18-2-1-2

1.125" W-Seal 2 1/4" Tube Stub MCP-18-2-2-1

1/4" Male VCR MCP-18-2-2-2

3 1/4" Tube Stub MCP-18-2-3-1

1/4" Male VCR MCP-18-2-3-2

1 1/4" Tube Stub MCP-24-1-1-1

1/4" Male VCR MCP-24-1-1-2

1.50" C-Seal 2 1/4" Tube Stub MCP-24-1-2-1

1/4" Male VCR MCP-24-1-2-2

3 1/4" Tube Stub MCP-24-1-3-1

1/4" Male VCR MCP-24-1-3-2

1 1/4" Tube Stub MCP-24-2-1-1

1/4" Male VCR MCP-24-2-1-2

1.50" 1.50" W-Seal 2 1/4" Tube Stub MCP-24-2-2-1

1/4" Male VCR MCP-24-2-2-2

3 1/4" Tube Stub MCP-24-2-3-1

1/4" Male VCR MCP-24-2-3-2

1 1/4" Tube Stub MCP-24HF-1-1-1

1/4" Male VCR MCP-24HF-1-1-2

1.50" HF C-Seal 2 1/4" Tube Stub MCP-24HF-1-2-1


3 1/4" Tube Stub MCP-24HF-1-3-1


6


Modular Top Plug

1.125" C-Seal2 MTP-18-12

1.12"3 MTP-18-1-3

1.125" W-Seal2 MTP-18-2-2

3 MTP-18-2-3

2 MTP-24-1-21.50" C-Seal

3 MTP-24-1-3

1.50"2 MTP-24-2-2

1.50" W-Seal3 MTP-24-2-3

2 MTP-24HF-1-21.50" HF CSeal

3 MTP-24HF-1-3

MTP-18-1-2

MTP-24-1-3

ModularTop Plug

PART TYPE SIZE (SQ.) SEAL TYPE # OF PORTS PART NUMBER

MFC Plugs

1.12"1.125" C-Seal 1 MFC-PLUG-18-1-1

1.125" W-Seal 1 MFC-PLUG-18-2-1

1.50"1.50" C-Seal 1 MFC-PLUG-24-1-2

1.50" W-Seal 1 MFC-PLUG-24-2-2

MFC-PLUG-18-1-1

MFC Plugs

PART TYPE SIZE (SQ.) SEAL TYPE # OF PORTS PART NUMBER

MFC Flow Thru Caps

1.12"1.125" C-Seal MFC-CAP-18-1

1.125" W-Seal MFC-CAP-18-2

1.50"1.500" C-Seal MFC-CAP-24-1

1.500" W-Seal MFC-CAP-24-2MFC-CAP-18-2

MFC Flow Thru Cap

PART TYPE SIZE (SQ.) SEAL TYPE PART NUMBER

Manifold Tube Check Valves

1.40" MFCV-4-1.40

1/4" 1.60" MFCV-4-1.60

1.70” MFCV-4-1.70

3/8"1.60" MFCV-6-1.60

1.70" MFCV-6-1.70MFCV-4-1-40

Manifold TubeCheck Valve

PART TYPE TUBE O.D. LENGTH PART NUMBER

Er

Modular Top Plug

Modular Flow Thru

Cap

MFC Plug

7

Modular FlowRestrictors


Modular Flow Restrictors

Ordering Example

2 Side MFR-18-1-2-1

1.125" C-SealCenter MFR-18-1-2-2

3 Side MFR-18-1-3-1

1.12"Center MFR-18-1-3-2

2 Side MFR-18-2-2-1

1.125" W-SealCenter MFR-18-2-2-2

3 Side MFR-18-2-3-1

Center MFR-18-2-3-2

2 Side MFR-24-1-2-1

1.50" C-SealCenter MFR-24-1-2-2

3 Side MFR-24 1-3-1

Center MFR-24-1-3-2

2 Side MFR-24-2-2-1

1.50" 1.50" W-SealCenter MFR-24-2-2-2

3 Side MFR-24-2-3-1

Center MFR-24-2-3-2

2 Side MFR-24HF-1-2-1

1.50" HF C-SealCenter MFR-24HF-1-2-2

3 Side MFR-24HF-1-3-1

Center MFR-24HF-1-3-2

MFR-24-1-2-1

ModularFlow Restrictor

PART TYPE

Example Flow Restrictor Characteristics

SIZE (SQ.) SEAL TYPE # OF PORTS 3RD PORT CONFIG. PART NUMBER

N

MFR-18-1-3-2

A center port 1.125” c-seal modular flow restrictor manufacturedto flow 15 SLM of nitrogen at an inlet pressure of 30 PSIG and anoutlet pressure of 0 PSIG.

Corresponding Part Number: MFR-18-1-3-2-S-H-N2-15SLM-30-0

Where, N2 is the gas type15 SLM is the flow rate in either SLM or SCCM30 is the inlet pressure in PSIG, and0 is the outlet pressure is PSIG

8

Modular Metering

Valve


Modular Metering Valves

2 Low MMV-18-1-2-LF

1.125" C-SealHigh MMV-18-1-2-HF

3 Low MMV-18-1-3-LF

High MMV-18-1-3-HF

2 Low MMV-18-2-2-LF

1.12" 1.125" W-SealHigh MMV-18-2-2-HF

3 Low MMV-18-2-3-LF

High MMV-18-2-3-HF

2 Low MMV-24-1-2-LF

1.50" C-SealHigh MMV-24-1-2-HF

3 Low MMV-24-1-3-LF

High MMV-24-1-3-HF

2 Low MMV-24-2-2-LF

1.50" W-SealHigh MMV-24-2-2-HF

3 Low MMV-24-2-3-LF

1.50"High MMV-24-2-3-HF

2 Low MMV-24HF-1-2-LF

1.50" HF C-Seal High MMV-24HF-1-2-HF

3 Low MMV-24HF-1-3-LF

High MMV-24HF-1-3-HF

ModularMetering Valve

PART TYPE SIZE (SQ.) SEAL TYPE # OF PORTS FLOW RATE PART NUMBER

MMV-18-1-2-F

Please contact a Talon representative for specific flow rate and Cv information.I

9


Modular Check Valves

2 Side MCV-18-1-2-1

1.125" C-SealCenter MCV-18-1-2-2

3 Side MCV-18-1-3-1

1.12"Center MCV-18-1-3-2

2 Side MCV-18-2-2-1

1.125" W-SealCenter MCV-18-2-2-2

3 Side MCV-18-2-3-1

Center MCV-18-2-3-2

2 Side MCV-24-1-2-1

1.50" C-SealCenter MCV-24-1-2-2

3 Side MCV-24-1-3-1

Center MCV-24-1-3-2

2 Side MCV-24-2-2-1

1.50" 1.50" W-SealCenter MCV-24-2-2-2

3 Side MCV-24-2-3-1

Center MCV-24-2-3-2

2 Side MCV-24HF-1-2-1

1.50" HF C-SealCenter MCV-24HF-1-2-2

3 Side MCV-24HF-1-3-1

Center MCV-24HF-1-3-2

MCV-24HF-1-3-2

MCV-18-1-3-2

ModularCheck Valve


Top Mount Check Valve

2 Center TMCV-18-1-2-21.125" C-Seal

3 Center TMCV-18-1-3-2

1.12" 2 Center TMCV-18-2-2-21.125" W-Seal


2 Center TMCV-24-1-2-21.50" C-Seal


2 Center TMCV-24-2-2-21.50" 1.50" W-Seal


2 Center TMCV-24HF-1-2-21.50" HF C-Seal

3 Center TMCV-24HF-1-3-2

TMCV-18-1-2-S-H

TMCV-24-1-2-S-H


Top MountCheck Valve

C

Modular Check Valves

ManifoldTube CheckValve

10

W-Seal specifications

1.125" W-Seal Interface

1.500" W-Seal Interface

1.125"W-Seal

Interface

1.500"W-Seal

Interface

Typical dimensions shown. For specific sealing feature specifications contact Talon Innovations Corp.

u

11

C-Seal specifications

1.125" C-Seal Interface

1.500" C-Seal Interface

1.500" High Flow C-Seal Interface

1.125" C-SealInterface1.500" C-SealInterface1.500" HighFlow C-SealInterface

Typical dimensions shown. For specific sealing feature specifications contact Talon Innovations Corp.

s

Rely on Talon expertise

No matter what your requirements,

Talon Innovations has the tools and expertise

to provide you with solutions that deliver

precision, innovation, and real value.

We now possess a decade of experience

developing products proven to help

semiconductor manufacturers reduce costs

and increase productivity. We are

committed to helping our customers

achieve even greater performance

and value in the decades to come.

Contact a Talon representative today

to learn more about our modular gas

delivery systems, or any of our

other quality products.

Talon Innovations

1003 Industrial Drive South

Sauk Rapids, MN 56379

Phone: 320-251-0390

Fax: 320-251-5810

www.taloneng.com

[email protected]

delivering value through innovation...tmcv = top mount check valves 1 = 1 2 = 2 3 = 3 1 = c-seal 2 =...

Documents