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ade Products

The instrument shown on the left is a multipurpose 4-axis X-ray diffractometer system. This instrument was manufactured to observe on-the-spot proteins grown in a gravity-free state and a samples grown in an electric furnace. For X-rays generated by an X-ray generator, energy resolution can be increased by means of a double/quadruple crystal monochromator. Also the sample goniometer stage can be changed by removing the stage depending on the measurement mode: protein measurement or on-the-spot observation. Also the mode can be switched between one-time reflection and three-time reflection before the analyzer crystal.This instrument is now in service at the National Aeronautics and Space Administration (NASA).

Multipurpose X-Ray Diffractometer System For Laboratory Use

Inside of monochorometor

Multipurpose X-ray diffractometer

Detection analyzer unit

The instrument shown on the left is a κ goniometer type X-ray diffractometer. For the sample goniometer, a rotation stage like an χ circle is not used, and rotation stages tilted by 45° are combined and mounted. Since there is no object that cuts off the X-rays, such as an χφ circle, the degree of freedom for the angle of diffraction can be wide. For the θ-2θ axes, a direct-coupling rotary encoder is used. The rotation center displacement of the three axes can be reduced to 10μm. This instrument is now in service at the Production Engineering Laboratory of HITACHI CO., Ltd.

κ Goniometer Type X-Ray Diffractometer

This instrument is now in service at the 6G port of JRR-3M of the Japan Atomic Energy Agency and consists of a monochromator, goniometer for sample positioning, analyzer shield, and neutron detector inside a green shield. The overall instrument is controlled by an external computer. (Example of integration)

２．Neutron Diffraction Experiment InstrumentsNeutron scattering experiments are used for researching physical properties and structural analysis by using the characteristics of thermal neutrons extracted from an atomic reactor. We supply many diffractometers and positioning mechanisms to the Japan Atomic Energy Agency and High Energy Accelerator Research Organization.

Custom-Made Products / Scientific Research Instruments

311CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] info@kohzu.com [URL] www.kohzu.com

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This instrument is a focusing type monochromator for polarized neutrons. For high-intensity and monochrome polarized neutrons, a Cu2MnAl Heusler crystal is placed in a strong magnetic field of a samarium-cobalt magnet (Co5Sm) and a worm shaft and worm wheel is used to tilt the crystal symmetrically at a ratio of 1:2:3 with respect to the center so that focusing can be obtained by deflecting the horizontal light in a cylindrical shape.

This instrument is a focusing type neutron analyzer. PG is used as the analyzer crystal. Like the neutron monochromator described above, the crystal is tilted symmetrically at a ratio of 1:2:3:4 with respect to the center so that focusing can be obtained by deflecting the overall light in a cylindrical shape.

　２．１　Monochromator

A neutron monochromator extracts neutrons with the energy required for an experiment from a neutron source in a wide energy range emitted from an atomic reactor. Pyrolytic Graphite (PG) is frequently used for extracting unpolarized neutrons and a Cu2MnAl Heusler crystal is used for extracting polarized neutrons.

　２．２　Analyzers

A neutron analyzer extracts neutrons to be examined from neutrons with energy that are emitted from a sample. The principle is the same as the neutron monochromator.

This instrument consists of an XY translation stage for positioning the sample at the rotation center, and Rx and Ry tilt stages for adjusting the diffraction plane to a horizontal plane.A cryostat for high-load specification designs can also be mounted.

This instrument is a goniometer for positioning a superconducting magnet that generates a strong magnetic field.For mounting a superconducting magnet, the stage is made of nonmagnetic material and the motors are covered with silicon steel plates. The instrument is designed to withstand loads of up to 300 kg.

　２．３　Heavy-Duty Goniometer

Neutron diffraction experiments are performed under various extreme conditions. Since a sample is placed in a strong magnetic field, at an extremely low temperature, and under a high pressure, the sample goniometer itself must also withstand the load and conditions. We have developed and supplied many heavy-duty goniometers.

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Custom-Made Products / Industrial Automation Instruments VKM-12 / VKM-26

Custom-M

ade Products

Six-Axis Manipulator VKM-12This instrument is a six-axis manipulator for adjusting positions at submicron precision when joining to a prism three LCD or CCD devices that are essential for manufacturing three-color LCD projectors or three-color CCD cameras.Adjustment is performed to maintain the performance of each single axis as well as the optimum precision and rigidity in the assembled state of the six axes, Since displacement caused by curing when UV bonding or soldering is performed is minimum and reproducibility is very high, high reliability is obtained even in mass production conditions.

Axis

X

Y

Z

θx

θy

θz

Model Number

XA16A-R1

SA07A-RT

SA07A-RM

RA10-05-1D

Motion Range

±25mm

±10°

Maximum Speed

10mm / sec

7.65° / sec

6° / sec

2° / sec

Resolution

0.05μｍ

(Micro-step 40 division)

SA07A-RT

SA07A-RM

RA10-05-1D

θyAxis SA07A-RM

θxAxis SA07A-RT

Rotation Center

For M6 tap screw × 6

θzAxis RA10-05-1D

YAxis XA16A-R1XAxis XA16A-R1ZAxis XA16A-R1

10 10180200

377 290 240230

105 10510

70

10

210

450

313CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] info@kohzu.com [URL] www.kohzu.com

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Three-Color LCD Panel Pasting Unit VKM-26This system attaches three channel RGB LCD panels to an optical block using three six-axis manipulators.A test pattern for adjustment that is projected on the screen is captured by five CCD color cameras (four near the perimeter, one at the center), and the image is loaded into the frame memory inside the image processing unit. Image processing calculations are performed by the CPU for each camera and the positions of the LCD panels are automatically adjusted. Then the LCD panels are adhered to the optical block by UV bonding by means of a UV irradiator.

Manipulator Mechanism Unit

■Specifications

Appearance of Instruments

Panel Size

Irradiation Method

Bonding Method

Detection Accuracy

Detection Method

Adjustment Time

Lens Method

Panel Chuck

other

From 0.55 inch (Actual Showing at March,2004)

Transmissive type or reflection type

UV bonding or soldered joint

Registration : 1/20～1/50 picture element degree

Focus : ≦10μm

Note : Depend on the User's condition, tact et al.

Image processing method (Five point in total : Four point in corner and one point in center)

About two minutes (exclusive of bonding time)

Note : Depend on the User's condition, accuracy et al.

Master lens method or product lens method

Manual or motorized

That is designed in optimal method by panel shape

Each parameters can be set freely by user which includes bonding time,

adjustment accuracy, field angle adjustment factor, offset adjustment factor et al.

Inspection of complete product and that of data processing. Data transfer function

to host-computer.

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Custom-Made Products / Industrial Automation Instruments PMA-3 / TKI

Custom-M

ade Products

Polygon Mirror Apex Angle Measurement StageThis positioning stage measures the apex angle of a polygon mirror. Although manual operation is required, this stage features a sensitive θ stage with rotation angle of 1 second or less.

●A two-axis oblique stage is used to compensate the plane tilt.●A rotation stage, including a high-precision 1-arcsec reading rotary 　encoder, allows precise measurement of the vertical angle.●Use of a coarse adjustment rotation mechanism and a fine 　adjustment mechanism (fine pitch positioner) enables smooth 　rotational movement in a narrow to a wide angle range.

Load Stiffness・Weight・A 1-arcsec reading counter is provided・Optional BCD output is possible

Model Number of Axis

ST07A-S3T

ST07A-S3M

RM16A-B1-1B

Coarse Motion Range

±3°

±3°

360°

Fine Motion Range

±0.1°

±0.08°

±0.1°

Minimum Readout

1.26″ (Scale)

0.97″ (Scale)

1.15″ (Scale)

1″ (Counter)

4-F4-E

A

4-D rotation center

□15

0

4-Z

70

240

ST07A-S3T

ST07A-S3M

Fine Pitch Positioner（FPP3-13）

Rotary encoder

RM16A-B1-1B

A φ 5H7Size Depth

□ 40 M3□ 60 M3

□ 30 M3DEFZ For M5 cap screw

7666

□16

0

□17

0

315CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] info@kohzu.com [URL] www.kohzu.com

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Heavy-Duty GoniometerThis goniometer allows alignment of a sample using the same rotation center. stainless steel is used as main material and our original fitting technology is used to achieve high rigidity. In the specifications shown in the photo, there are two operating axes: swivel (goniometer) and θ. The XY axes can be added as required.

Table Size

Actuator

Motion Range

Guide Mechanism

Reduction Ratio

Material

Load Capacity

Swivel Stage

130mm×130mm

Dove-tail slide

1° / One revolution of Handle Wheel

θStage

φ160mm

Bearing Guides

2° / One revolution of Handle Wheel

±5°

Worm shaft & Worm wheel

Brass, Stainless Steel

50kg

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Custom-Made Products / Industrial Automation Instruments KZ400 / 600, RSY-150 / 300

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XYθ Stage For Multipurpose Three-Dimensional Measurement KZ400 / KZ600 Series The KZ series is a multipurpose XYθ stage for shape measurement, image observation, and image processing. The system can be configured with an optional SC-200 motor controller, portal frame, and vibration isolation table.Also an XY stage can be selected from two types: stroke 200 mm (KZ-400) and 300 mm (KZ-600).

System Components of Mechanical Unit

Motorized XY

Linear Stage

Manual θStage

Motion Range

Maximum Speed

Ideal Resolution

Repeatability

Motion Range

Weight of XYθ Stage

KZ-600

300mm

±3°

100kg

40mm / sec

4μm / step (Half-step)

±2μm

KZ-400

200mm

±5°

50kg

317CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] info@kohzu.com [URL] www.kohzu.com

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Layer Profiling System VertScan○R

The VertScan○R layer profiling system performs layer structural analysis by generating tomographic images of a specified cutting location from optical microscope images that are obtained by moving sequentially in the vertical direction.

■Specifications of Stage

Super depth measurementA Ryoka Linnik interference objective lens equipped with an optical path compensation plate insertion mechanism allows measurement of the layer section under a transparent layer to a maximum depth 3 mm. This system is very useful for defect analysis after manufacturing of flat display panels such as plasma displays.

Very weak interference fringe patterns can be capturedSince our original VSI interference image creation software enables image creation from very weak interference fringe patterns that cannot be visually recognized, foreign particle locations in multilayer film can be identified.

100 magnification interference is achievedA Ryoka Linnik interference objective lens allows easy adjustment and observation for 100 magnification interference figures for which alignment and adjustment have been difficult.

NSIMAGIK compatible systemNSIMAGIK specifications common to various image creation systems and image processing systems are fully supported. The required NSIMAGIK software can be freely selected, and future expansion of functions is possible.

Features

Development and Distribution : Ryoka Systems Inc.

Item

Compressed Air

Power Saurce

Clean Room Response

Stage Unit Size

Stage Unit Weight

Control Rack Unit Size

Control Rack Unit Weight

X-Y Stage

X Valid Stroke

Y Valid Stroke

Maximum Speed

Actuator

Stage Resolution

Repeatability

Z axis

Valid Stroke

Actuator

Z Axis Resolution

Jog-Dial

Joy-Stick

RSY-300

1200 (W) ×800 (D) ×1500 (H)

About 300kg

5700 (W) ×750 (D) ×1850 (H)

±150mm

±150mm

RSY-150

600 (W) ×500 (D) ×1400 (H)

About 200kg

570 (W) ×750 (D) ×1850 (H)

±75mm

±75mm

≧ 0.5Mpa

Tube : Internal diameter 4mm, External diameter 6mm

Single-phase 100V 4KVA

Response to Class 1000

About 180kg

10mm / sec

Ball screw, Open-loop control

1μm / step

±1μm

±50mm

Grand screw, Open-loop control

1μm / step (Half-step)

100μm / Revolution

Hi-speed setting ： 8000pps, Low-speed setting ： 200pps

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Custom-Made Products / Industrial Automation Instruments Various Components

Custom-M

ade Products

Heavy-Duty Goniometer (MAX-G)The MAX-G series of heavy-duty goniometers comprises components with large X-ray diffractometers. Since the MAX-G series supports both horizontal and vertical orientation, various types of equipment can be easily configured. Also an optional encoder can be mounted, and our SC series controllers can be used together for feedback control.

RDM-10 large surface diffractometer (SPring-8 BL13XU)A prototype of the MAX-G series is used for the ω axis of this diffractometer.

Custom NASA Diffractometer NZD-1 Custom SPring-8 Diffractometer NZD-2

319CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] info@kohzu.com [URL] www.kohzu.com

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■Specifications

■Electrical Specifications

MAX-G-800*

φ800mm (φ400) **

204mm**

15" / 360°, 1" / 1°**

0.002°**

2"**

5"**

5μm**

15μrad**

10° / sec**

5t**

MAX-G-400

φ400mm (φ230)

145mm

15" / 360°, 1" / 1°

0.002°

2" (1.4")

5" (1"***)

5μm (2μm)

30μrad (15μrad)

10° / sec

2t

MAX-G-600

φ600mm (φ350)

172mm

15" / 360°, 1" / 1°

0.002°

2" (1.4")

5" (1"***)

5μm (3μm)

20μrad (5μrad)

10° / sec

5t

Model Number

Diameter (Internal Diameter)

Height Size

Accuracy

Resolution (Full-Step)

Repeatability (Measurement Value)

Backlash (Measured Value)

Eccentricity (Measured Value)

wobble Out (Measured Value)

Maximum Speed (Full-Step)

Load Stiffness (Horizontally)

PK599-A

SS-5GL2

PM-U24

PM-R24

NJC24 24-RM

NJC20 10-RM

Motor

Limit Switch

Origin Sensor

Near Origin Sensor

Connector (For Motor)

Connector (For Encoder)

* The MAX-G-800 specifications are under review.** These are target values.*** The backlash value is obtained when an SC controller is used.

Note : Specifications and dimensions are subject to change without prior notice.

Note : Various inspection and measurement methods are used for the specifications of the MAX-G series. These

methods are different from those described in the inspection system (P. 293 - 301). Please contact us for details.