cressington 208 hr sputter coater

Cressington 208 HRCressington 208 HRSputter coaterSputter coater

08/18/0608/18/06mgberschmgbersch

OverviewOverview


Argon OnArgon On

Check to see if the Check to see if the Argon tank (bottle) Argon tank (bottle) main valve is on.main valve is on.

Do NOT turn the Do NOT turn the pressure adjust pressure adjust needle valve on the needle valve on the regulator.regulator.


Argon On Number 2Argon On Number 2

Normally the Normally the specimen chamber is specimen chamber is left under vacuum.left under vacuum.

Open the inline valve Open the inline valve on the argon line. on the argon line. This will vent the This will vent the chamber. Give it a chamber. Give it a few seconds.few seconds.


Open Sample ChamberOpen Sample Chamber

Open chamber by Open chamber by lifting the Target lifting the Target Assembly. Do not Assembly. Do not place your fingers on place your fingers on the target.the target.


Remove Glass JarRemove Glass Jar

To load samples, To load samples, remove the glass remove the glass cylinder and place it cylinder and place it on clean aluminum on clean aluminum foil.foil.


Place samples in chamberPlace samples in chamber

The stage has a The stage has a various holders for various holders for the different types of the different types of samples stubssamples stubs

Load samples on Load samples on stage.stage.


Close ChamberClose Chamber

Replace the glass jar Replace the glass jar making sure that the making sure that the o-ring is clean.o-ring is clean.

Close Chamber top Close Chamber top (target assembly) making (target assembly) making sure that the top is seated sure that the top is seated properly on the glass jar. properly on the glass jar.

DO NOT DROP THE DO NOT DROP THE TARGET ASSEMBLY, lift TARGET ASSEMBLY, lift slightly and pull gently slightly and pull gently outward to fit top on jar.outward to fit top on jar.


Power UpPower Up

Flip the POWER toggle switch.Flip the POWER toggle switch. The unit will start up in the AUTO mode.The unit will start up in the AUTO mode.


Move ShutterMove Shutter

Move the shutter out Move the shutter out of the way.of the way.

The shutter is used The shutter is used for deposition onto for deposition onto thermally sensitive thermally sensitive samples.samples.


Presets for AUTO Mode - 1Presets for AUTO Mode - 1

Preset the deposition time by pressing the Preset the deposition time by pressing the PAUSE/TEST button and adjusting the SET PAUSE/TEST button and adjusting the SET buttons in the TIMER/current area.buttons in the TIMER/current area.


Presets for AUTO Mode - 2Presets for AUTO Mode - 2

Preset the plasma current by pressing the Preset the plasma current by pressing the SETma button and adjusting the SET buttons in SETma button and adjusting the SET buttons in the TIMER/current area.the TIMER/current area.


Starting the Sputter CycleStarting the Sputter Cycle

Press the CYCLE/STOP button in the AUTO Press the CYCLE/STOP button in the AUTO areaarea

This will start the sputter cycle.This will start the sputter cycle.


What does the Cycle Do?What does the Cycle Do?

The Cycle mode will then:The Cycle mode will then: Pump the chamber to 0.05 mbar;Pump the chamber to 0.05 mbar; Open argon flush then close;Open argon flush then close; Pump to 0.15 mbar;Pump to 0.15 mbar; Open argon flush then close;Open argon flush then close; Open leak valveOpen leak valve Pump to 0.15 mbarPump to 0.15 mbar Switch on HV;Switch on HV; Sputter at preselected current for preselected Sputter at preselected current for preselected

time/thicknesstime/thickness


Remove samplesRemove samples

Lift the Target Lift the Target assembly.assembly.

CAREFUL the glass CAREFUL the glass jar may stick to the jar may stick to the top O-ring. HOLD top O-ring. HOLD THE GLASS while THE GLASS while lifting the target lifting the target assembly.assembly.

Remove samplesRemove samples


ShutdownShutdown

Replace glass jar;Replace glass jar;Close lid (target assembly)Close lid (target assembly)Close inline valve on argon lineClose inline valve on argon lineTurn on Power and let chamber pump for Turn on Power and let chamber pump for

a minute.a minute.Turn off PowerTurn off PowerClose Valve on top of Argon Bottle.Close Valve on top of Argon Bottle.


Film Thickness Monitor (FTM)Film Thickness Monitor (FTM)

Coatings can also be deposited using the FTM.Coatings can also be deposited using the FTM. Density and Tooling factors currently in memory Density and Tooling factors currently in memory

can be displayed by pressing the relevant can be displayed by pressing the relevant button.button.


FTM - 2FTM - 2

To adjust a value, hold the button for 2 seconds To adjust a value, hold the button for 2 seconds until the period begins to flash. Scroll up or until the period begins to flash. Scroll up or down with the arrow buttons.down with the arrow buttons.

Zero resets the display to zero after a Zero resets the display to zero after a measurementmeasurement


FTM - 3FTM - 3

To display the current FTM termination To display the current FTM termination thickness, press TERMINATOR and hold for thickness, press TERMINATOR and hold for two seconds. To adjust use the arrow buttons.two seconds. To adjust use the arrow buttons.


FTM – Target DensityFTM – Target Density


FTM - Tooling FactorFTM - Tooling Factor


OtherOther

Cressington has a number of options.Cressington has a number of options.Multi targetsMulti targetsDifferent size jars.Different size jars.

Check with CAF personnel before using Check with CAF personnel before using these.these.

cressington 208 hr sputter coater

Documents

argon bottle

argon lineturn

place samples

auto mode

glass cylinder

mbaropen argon flush

glass jarto load samples

cycle mode