conex-lds - newport · if the value of the focal length of the collimating lens is “f”, then...

Electronic Autocollimatorfor Metrology and Industrial Applications

For Motion, Think Newport™

CONEX-LDSCONEX-LDS

Electronic Autocollimator2

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3Electronic Autocollimator

Emai l : sa les@newpor t .com • Web: newpor t .com/mot ion

HIGH RESOLUTION AUTOCOLLIMATOR

The CONEX-LDS is a versatile electronicautocollimator traditionally used in non-contactalignment or measurement of angular variations.Using as much commercially available, but proven,optics and electronics technologies that simplifiedthe design, the CONEX-LDS offers a high level ofreliability for demanding metrology and industrialapplications. With features like the integratedeyepiece and mounting accessories, the CONEX-LDS is easy to setup on site and on the productionfloor. The advantage of the CONEX-LDS issignificant reduction in set-up time while stillproviding metrology-level features.

The light source is a visible red Laser diode, whosebeam is perfectly collimated for use up to 5 m. Thesensor is a dual axis analog silicon-based sensorchosen for its fast response time. With an RMSsignal to noise ratio of 0.003 µrad/√Hz, theCONEX-LDS autocollimator is sensitive to evenvery small angular variations, enabling extremelyaccurate alignment procedures.

Sensor measurements are made at 5 kHz, whichcan be filtered (2nd order low pass filter) between 1to 2000 Hz, for noise reduction.

KEY FEATURES

Compact and Portable Design

0.01 µrad Sensitivity

Analog Outputs at 2 kHz SamplingFrequency Ideal for VibrationMeasurements

Easy Alignment with an Integrated,±0.85° Field of View, Eyepiece andMounting Accessories

RS-422 interface for USB communication

The embedded controller supports RS-422 communication and can be connected to a computer throughUSB using the CONEX-USB-RS422 converter.

Analog outputs are included, with programmable gains and the instrument can be connected to a datalogger, like the XPS Universal Motion controller which has data gathering capability.

Precision Measurement forMetrology and Industrial Applications

Precision Measurement forMetrology and Industrial Applications


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DETAILS AND SPECIFICATIONS Sensitivity (µrad) 0.01Accuracy (µrad) ±5 ±(0.02 x measurement) (±5 µrad around 0: [-250 µrad; +250 µrad]) (i.e. 2%)Beam Diameter (mm) 22.5Beam Divergence (µrad) 100Beam Direction (µrad) 500Equivalent Focal Length (mm) 250Measuring Range (m ) 5Measurement Field (µrad) ±2000Ocular Field - Eyepiece (mrad) ±15 (±0.85°)Min. Reflectivity 2% reflectivityNoise RMS (µrad/√Hz) 0.003 (at 100% reflectivity)Weight (kg) 1.1Communication Interface RS-422 accessible through a USB to RS-422 converter or Ethernet to RS-422 converter (available soon)Protocol ASCII16-Bit Analog Outputs ±5 V; adjustable filter and gainData Acquisition Frequency (Hz) 20002nd Order Low Pass Frequency Adjustable from 1 to 2000 HzSource Visible laser diode modulated at 5 kHz; circular polarizedWavelength (nm) 670Peak Power (mW) <1 (Class II)Operating Temperature Range (°C) +15 to +25Storage Temperature Range (°C) -10 to +50Power Supply 90/264 V, 50/60 Hz, 30 VA

RAYONNEMENT LASERNE PAS REGARDER DANS LE FAISCEAU

LASER RADIATIONDO NOT STARE INTO BEAM

APPAREIL A LASER DE CLASSE 2CLASS II LASER PRODUCT

P <1 mW; λ = 670 nmIEC60825

ATTENTION RAYONNEMENT LASEREN CAS D'OUVERTURE, EXPOSITION

DANGEREUSE AU FAISCEAUDANGER. LASER RADIATION

WHEN OPEN, AVOIDDIRECT EXPOSURE TO BEAM

Complies with CFR 21 Subchapter J

SURFACE FLATNESS Flatness Measurement

Reflector: Mirror on a 150 mm granite stand

Filter setting: 1 Hz

Acquisition: point to point

20

10

00

30

250 500 750 1000

Pitch Measurement

Position in millimeters

Angl

e in

µra

d

1250 1500 1750 2000

0

-50

5

250 500 750 1000

Calculated Flatness

Position in millimeters

Heig

ht in

µm

1250 1500 1750 2000

This is a classical application for autocollimators.To obtain flatness measurements, theautocollimator beam is reflected off a mirror. Byindexing the mirror along the beam path at knowndistances, linear position vs. the pitch angle isobtained and is used to determine verticaldisplacement.

RoHSCompliant

ApplicationsApplications



PITCH AND YAW OR YAW AND ROLL MEASUREMENT

Pitch and Yaw Measurement

Reflector: λ/4 flat mirror


Dynamic acquisition at 10 Hz while the stage ismoving at 10 mm/s

Pitch and Yaw deviations during motion increasepositioning errors due to the Abbe effect, especiallyat a longer distance between the sample and thefeedback encoder. With the CONEX-LDSautocollimator, this type of error can be accuratelyidentified and used to calculate true position. Pitchand yaw can be measured concurrently using asimple flat mirror. In addition, these angularmeasurements can be used to derive the flatnessand straightness deviations of the linear bearing.

In manufacturing environments or metrology applications that utilize dividingheads or rotation stages with mechanical or air bearings, the CONEX-LDS is avery useful tool to verify the wobble of the bearings. In the manufacture ofball, thrust or air bearings, particularly those with large diameters, in-processor final verification of wobble specifications can be accomplished with theCONEX-LDS. In both cases, a simple mirror mounted perpendicular to therotation axis with the CONEX-LDS beam coincident to it, will provide highprecision measurements of wobble that will characterize the condition of thebearing. The results could indicate the need for maintenance, repair or rework. The graph on the rightillustrates a typical result of a wobble test of a bearing. Using the same CONEX-LDS setup, but with aprecision ball fixture rather than a mirror, it is possible to determine the axial eccentricity of a bearing.

t Upper axis yaw and rollmeasurement.

Lower axis pitch and yawmeasurement.

BEARING WOBBLE OR ECCENTRICITY MEASUREMENT

0

Y Angle (µrad)

5 10-5-10

0

5

10

-5

-10

Z An

gle

(µra

d)

Wobble of Stage

Wobble Measurement



Dynamic acquisition at 10 Hz for 2 turns of the stage


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Measurement During Displacement



Dynamic acquisition at 2000 Hz during displacement

SETTLING TIME AND STAGE DAMPING

The time required for settling into a position is animportant parameter in high-accuracy, high-throughput applications like semiconductorinspection. Fast settling times result in processesto be performed very quickly, thus increasingproductivity. In this case the CONEX-LDSautocollimator is used to measure the angulardisplacement at all stage positions, according tothe control parameters. The dynamicmeasurements reflect the stage performance at thegiven situation. Using Fourier analysis of the samedata enables understanding of the stage'sresonances.

500

Frequency (Hz)

150

Time (ms)

200 250 300100500

600 700 800 900 1000300 4002001000

390

Fourier Analysis

Settling Time: Yaw Angle vs Time

10

15

5

0

-50

50

100

-100

0

Yaw

(µra

d/√H

z)Ya

w (µ

rad)

ROTATION STAGE ACCURACY Indexation Measurement

Reflector: 8-facet mirror


Acquisition: point to point

180

Angle (°)

Positive rotation

13590450-45 225 270 315 360 405

10

0

-10

Erro

r (µr

ad)

Rotation Stage: Indexing Accuracy

Negative rotation

Rotation stage accuracy can be measured using aprecisely calibrated multifaceted mirror. TheCONEX-LDS autocollimator measures the angulardifference between the stage rotation and index ofthe calibrated standard. Absolute accuracy ismeasured directly, taking the index error andhysteresis into account. The measurement accuracyis better than 1 µrad.



AUTOCOLLIMATION PRINCIPLES ELECTRONIC AUTOCOLLIMATOR

A standard autocollimator uses a back illuminatedcross light reticle A, located behind the focal planeof a collimating lens B.

The resulting image is projected to infinity andreflected back to the instrument from a planereflecting mirror C.

The reflected image is focused on the back of thefocal plane of the collimating lens (beamsplitter D).Most instruments use a measuring eyepiece E witha dark cross reticle to observe this autocollimatedimage.

If the reflected image becomes coincident with theincident beam, that the mirror is in autocollimatingposition.

For each angular movement of mirror C, a lateraldisplacement of the image is reflected on the backof the focal plane of the collimating lens.

If the value of the focal length of the collimatinglens is “F”, then the lateral displacement will be:

∆Y = F x tan(2∆θ)

where ∆θ is the angular displacement of the mirror.

This displacement can be measured by using themeasuring eyepiece.

Autocollimation is a common method to check andalign optical elements, such as laser cavities,Fabry-Perot, and is used in optical workshops tomeasure prism characteristics and angulardeviations.

All these operations are typically done manually.

The advantage of the electronic autocollimator isthe automation of angular measurements.

In the CONEX-LDS autocollimator, the basicprinciples are the same, but use differentcomponents:

• The source reticle is a Laser diode(1 mW; l = 670 nm).

• The measuring eyepiece is a position sensingdevice.

This position sensing device sends analog signalsthat are proportional to the position Vx and Vy ofthe reflected beam and are used to calculate theangular deviations ∆θx and ∆θy.

A2 Laser diode module F2 Alignment eyepiece

B2 Beamsplitter I G2 Magnifier

C2 Collimating lens H2 Position sensing device

D2 Mirror I2 Lighting LED (red)

E2 Beamsplitter II

A portion of the light from the diode is used forvisual alignment, while a circle indicates the zoneto start data recording.

Angular readings can be displayed using thesupplied applet via USB. Alternatively, angular datacan be obtained with a data logger. Note that theXPS Universal Motion Controller can be used togather and store analog data.

F2

B2

D2C2

A2

G2

I2

H2E2

A

B C

DE

Principle of OperationPrinciple of Operation


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HIGH RESOLUTION

With an outstanding signal to noise ratio, theCONEX-LDS autocollimator is sensitive toextremely small angular variations, such as theangle produced by a 0.1 µm dust particle locatedbeneath the end of a 1 m long bench.

FAST ACQUISITION

The CONEX-LDS autocollimator is equipped withan analog sensor which has been chosen for its fastresponse time. The architecture allows a samplingfrequency of 2000 Hz. The advantage is not only thepossibility of observing very rapid events, but alsothe ability to perform the maximum amount ofacquisitions in a given period of time, less affectedby noise.

The CONEX-LDS applet has an acquisition featurethat is dedicated to Newport's XPS MotionController. A 3rd party logger can also beconnected to the analog outputs.

WITHIN EVERYONE'S REACH

You do not need to be an expert in instrumentationto obtain accurate measurements with the CONEX-LDS autocollimator, nor do you need to spend afortune. Most operators can quickly learn how touse the CONEX-LDS to perform extremely accuratealignment operations, or simply to check thequality or movement of a structure, withoutwasting time and money.

LASER SAFETY

The CONEX-LDS autocollimator is a Class II device,producing a laser emission that is less than 1 mWat a wavelength of 670 nm. This means that safetygoggles are not required when using thisinstrument.

CALIBRATION & CE MARKING

Each autocollimator isindividually tested and comeswith a detailed calibrationcertificate. It also complieswith applicableEuropean directives andis delivered with a CECertificate of Conformity.

SIMPLE TO SET-UP, EASY TO USE

The intelligent design of the CONEX-LDS allowsusers to quickly set-up and obtain precisemeasurements. Alignment is easily performed by

CONEX-LDS Year mark affixed: 2012

EC Declaration of Conformity

The manufacturer: MICRO-CONTROLE Spectra-Physics, 9, rue du Bois Sauvage 91055 Évry CEDEX, FRANCE

Hereby declares that the product:

! Description: " CONEX-LDS " ! Function: Electronic Autocollimator ! Type of equipment: Electrical equipment for measurement, control and laboratory use

–complies with all the relevant provisions of the Directive 2004/108/EC relating to electro-magnetic compatibility (EMC). – was designed and built in accordance with the following harmonised standards:

! NF EN 61326-1:2006 « Electrical equipment for measurement, control and laboratory use – EMC requirements – Part 1: General requirements » ! NF EN 55011:2007 Class A ! CEI 60825-1:2008 « Safety of laser equipment radiation »

– was designed and built in accordance with the following other standards:

! NF EN 61000-4-2 ! NF EN 61000-4-3 ! NF EN 61000-4-4 ! NF EN 61000-4-6

Date : 09/07/2012 Dominique DEVIDAL Quality Director

MICRO-CONTROLE Spectra-Physics Zone Industrielle F-45340 Beaune La Rolande, France

DC2-EN rev:A

Av:

RAYONNEMENT LASERNE PAS REGARDER DANS LE FAISCEAU

LASER RADIATIONDO NOT STARE INTO BEAM

APPAREIL A LASER DE CLASSE 2CLASS II LASER PRODUCT

P <1 mW; λ = 670 nmIEC60825

ATTENTION RAYONNEMENT LASEREN CAS D'OUVERTURE, EXPOSITION

DANGEREUSE AU FAISCEAUDANGER. LASER RADIATION

WHEN OPEN, AVOIDDIRECT EXPOSURE TO BEAM

positioning the reflected visible beam in theintegrated eyepiece of the CONEX-LDS. Precisemeasurements can be read immediately from thededicated NStruct Applet or analog outputs.Compared to interferometers, the position sensingdevice provides absolute values, which are not lostif the beam is blocked during the measurement.

AdvantagesAdvantages



ORDERING REFERENCES

Model DescriptionCONEX-LDS Electronic AutocollimatorCONEX-LDS-VER (1) Verification KitCONEX-LDS-USB-422 USB/RS-422 AdapterCONEX-LDS-CABLE20 20 m CableCONEX-LDS-PS Power Supply

1) The verification kit is a stand alone kit which includes a calibrated optical wedge fitted intoa mechanical mount and all associated clamps and rod. The slide is delivered with acalibration certificate which provides the value of the angle of deviation which itproduces on the autocollimator's beam. This kit allows user to verify that the CONEX-LDSis still within its calibration limits set in the factory. The applet will guide you through theverification process.

To achieve optimum, performance, use highquality Newport optics with the CONEX-LDS.

For metrology applications, we recommend using50.8 mm (2") λ/10 mirrors. The SL51BD mirrormount provides the stability and adjustmentsensitivity required for precise measurements.

For other high quality optics, optical mounts andassembly hardware visit www.newport.com

ORDERING REFERENCES

Axis Height Angular Range Centering TravelModel Description (mm) (°) (mm)CONEX-LDS-SLXY Precision Adjustable Four Axis Mount, XYθxqy 100 ±2 ±12.5CONEX-LDS-SL Precision Adjustable Two Axis Mount, θxθy 75 ±2 –

SET-UP

Various mounts are available to facilitate setting upthe CONEX-LDS autocollimator. With two angularand two linear axes, the CONEX-LDS-SLXY is themost flexible mount. The CONEX-LDS-SL mountprovides only two angular adjustments.

CONEX-LDS-SL

CONEX-LDS-SLXY

VERIFICATION KIT

The CONEX-LDS-VER verification kit includes acalibrated optical wedge fitted into a mechanicalmount and all associated clamps and rods. Theslide is delivered with a calibration certificatewhich provides the value of the angle of deviationwhich it produces on the autocollimator's beam.

This kit enables the user to periodically verify thecalibration verification of the CONEX-LDSautocollimator.

The measurement is performed in the middle of therange with a 0.5% level of uncertainty.

FLANGEMOUNT

AUTOCOLLIMATORCONEX-LDS

CALIBRATEDOPTICAL WEDGE

MIRROR10D20ER.1-PF

MIRROR MOUNTU100-A-LH-2K

RAIL CARRIERSM-CN26-12

RAIL CARRIERM-CN26-40

SPACERRAILX26-384

Models & AccessoriesModels & Accessories


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CONEX-LDS

5.39(137)

1.89(48)

ø1.378 0

(35 0 )-0.1

-0.004

ø1.496-0.0008

(38-0.02)-0.1

-0.004

1.035”-40THD

HOLE

M3

THD

USAB

LE D

EPTH

: .12

(3)

FOR

GROU

NDIN

G

2.83(72)

.35(9)

SQR 1.57(40)

.32(8.1)

SQR 1.57(40)

10.60(269)

3.74(95)

4.72(120)

BM17.04N

M-UMR8.25XYZ

RANGE:±2°

RANGE: ±2°

4 HOLES ø.30 (7.5)ON 3.98 x 2.0 (101 x 50.4)

CONEX-LDS

ø4.88(124)

SL51 BODYBM17.25

DIMENSIONS IN INCHES(AND MILLIMETERS)

3.94 ±.49

(100 ±12.5)

7.52(191)

3.58(91)

3.23(82)

.98 ±.49

(25 ±12.5)3.15(80)

CONEX-LDS-SLXY

DimensionsDimensions



CONEX-LDS4 HOLES ø.30 (7.5)

ON 3.98 x 2.0 (101 x 50.4) 4.72(120)

RANGE: ±2°

BM17.04NRANGE: ±2°

3.74(95)

3.15(80)

2.11(53.5)

5.39(137)

DIMENSIONS IN INCHES(AND MILLIMETERS)

SL51 BODYø4.88(124)

2.95(75)

CONEX-LDS-SL

CONEX-LDS-VER(Optical Wedge Shown)

1.30(33)

ø1.32(33.5)

ø1.48(37.5)

.49(12.5)

ø1.97(50)

.18(4.5)

ø.94 (24)1,035”-40 THD

Complete listings for all global office locations are available online at www.newport.com/contact

www.newport.comNewport Corporation, Global Headquarters1791 Deere Avenue, Irvine, CA 92606, USA

PHONE: 1-800-222-6440 1-949-863-3144 FAX: 1-949-253-1680 EMAIL: [email protected]

PHONE EMAILBelgium +32-(0)0800-11 257 [email protected] +86-10-6267-0065 [email protected] +33-(0)1-60-91-68-68 [email protected] +81-3-3794-5511 [email protected] +886 -(0)2-2508-4977 [email protected]

PHONE EMAILIrvine, CA, USA +1-800-222-6440 [email protected] +31-(0)30 6592111 [email protected] Kingdom +44-1235-432-710 [email protected] / Austria / Switzerland +49-(0)6151-708-0 [email protected]


Newport Corporation, Irvine, California and Franklin, Massachusetts; Evry and Beaune-La-Rolande, France and Wuxi, China have all been certified compliant with ISO 9001 by the British Standards Institution. Santa Clara, California is DNV certified.

BR-081203-EN (02/13)

conex-lds - newport · if the value of the focal length of the collimating lens is “f”, then...

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