CMP at Tufts

Dan Apone

Issue #1 Cameras had had

enough Random dots on

images So old that to fix them

would require all new internals

New cameras researched

Firewire Cameras Evolution VF digital

camera 12 bit Firewire connection to

PC Prewritten Labview

VI’s to control camera

Camera Mounting New cams didn’t fit on old camera rig Picture taken from severe angle; only part of

image would be in focus Solution:

New mounting pointAttached to 80/20 beam, not rickety drum stand

Actual Images

Newest camera location

Wafer mount updates Allows placement of

mirror for new camera location

Good temp solution, could be more rugged

Laser info Laser wouldn’t fire,

called Big Sky Laser for help

Our thermal sensor was busted

Ordered new piece Thanks to Scott’s

technical skills, it was installed within a few hours

Even more laser fun… Laser still wouldn’t fire Laser wanted pulses sent at 10 Hz Pulses sent at 10 Hz, still nothing Big Sky Laser said “use serial connection” Serial worked well but we would now have to

listen for output pulse from laser

Solution: circuits

Calibrations Leftover slides

seemed sloppily assembled

Severe curvature of slides would be nice to avoid

Newest calibration? 1mm thick microscope

slide props up edge of wafer

Allows for typical downforce

Slurry interacts with asperities as during polishing run

Software Updates Labview controls it all

now: laser + cameras Programs now

calculate image ratio, standard deviation, friction value, and time of laser pulses

All functions updated to Labview 7

Most recent questions… What effect is the pad having on our measurements?

Setup Concerns

Drill press getting a bit sticky Force table instead of separate downforce

and friction measurements Camera views only a dime sized portion of

the wafer…(460 pixels per cm on wafer/platen)

To Infinity…and Beyond!

Future work: Solder circuit together Change wafer mount…? Leave out Calcein…?

Questions?