cmos-based single photon detectors and potential...

21
1/21 CMOS-based Single Photon Detectors and Potential Applications Dr A. Rochas, Project Leader, idQuantique SA (Switzerland) A. Pauchard, O. Guinnard, L. Monat, and A. Matteo

Upload: others

Post on 02-Oct-2020

15 views

Category:

Documents


0 download

TRANSCRIPT

Page 1: CMOS-based Single Photon Detectors and Potential Applicationsndip.in2p3.fr/beaune05/cdrom/Sessions/rochas.pdf · 1/21 CMOS-based Single Photon Detectors and Potential Applications

1/21

CMOS-based

Single Photon

Detectors and

Potential ApplicationsDr A. Rochas, Project Leader, idQuantique SA (Switzerland)

A. Pauchard, O. Guinnard, L. Monat, and A. Matteo

Page 2: CMOS-based Single Photon Detectors and Potential Applicationsndip.in2p3.fr/beaune05/cdrom/Sessions/rochas.pdf · 1/21 CMOS-based Single Photon Detectors and Potential Applications

2/21www.idquantique.com

Outline

- idQuantique presentation

- Motivations: limits of the present products, applications

- CMOS technology

- Single photon detector presentation

- Main features: - dead time,

- dark counts,

- afterpulsing,

- detection probability,

- timing resolution.

- Conclusion and Outlook

Page 3: CMOS-based Single Photon Detectors and Potential Applicationsndip.in2p3.fr/beaune05/cdrom/Sessions/rochas.pdf · 1/21 CMOS-based Single Photon Detectors and Potential Applications

3/21www.idquantique.com

Company at a glance

Spun-out of University of Geneva in 2001

Strategic focus on opportunities offered by Quantum Photonics

Serve network security

and optical instrumentation markets

Page 4: CMOS-based Single Photon Detectors and Potential Applicationsndip.in2p3.fr/beaune05/cdrom/Sessions/rochas.pdf · 1/21 CMOS-based Single Photon Detectors and Potential Applications

4/21www.idquantique.com

Optical Instrumentation

short pulse LASER source (850nm; 1.31µm; 1.55µm)

single photon counter: infrared (0.9µm to 1.6µm)

single photon counters: visible spectrum

Page 5: CMOS-based Single Photon Detectors and Potential Applicationsndip.in2p3.fr/beaune05/cdrom/Sessions/rochas.pdf · 1/21 CMOS-based Single Photon Detectors and Potential Applications

5/21www.idquantique.com

The Present Limits

Silicon Single Photon Avalanche Diodes (Geiger Mode)Photomultiplier Tubes

High internal gain (106): single photon counting☺ ☺

Low noise level(dark counts and afterpulses)☺☺

Detection probability< 20% in the visible

Detection probability> 70% at λ = 650nm ☺

BUT:Difficult to integrate in arrays

Poor timing resolution: 500ps for PMTs, 350ps for SPADs Bulky, easily damaged

Page 6: CMOS-based Single Photon Detectors and Potential Applicationsndip.in2p3.fr/beaune05/cdrom/Sessions/rochas.pdf · 1/21 CMOS-based Single Photon Detectors and Potential Applications

6/21www.idquantique.com

The Motivation

- a compact, solid-state,

single photon detector

- with low timing resolution

- and array integration capability.

Need for:

Page 7: CMOS-based Single Photon Detectors and Potential Applicationsndip.in2p3.fr/beaune05/cdrom/Sessions/rochas.pdf · 1/21 CMOS-based Single Photon Detectors and Potential Applications

7/21www.idquantique.com

The Motivation

Single molecule detection: Fluorescence correlation spectroscopyor fluorescence decay time measurements

Laser ranging in space applications and telemetry

Quantum cryptography, random numbers generation

Optical fiber testing (Optical time domain reflectometry)

Laser diode characterization

Page 8: CMOS-based Single Photon Detectors and Potential Applicationsndip.in2p3.fr/beaune05/cdrom/Sessions/rochas.pdf · 1/21 CMOS-based Single Photon Detectors and Potential Applications

8/21www.idquantique.com

Single Photon Detector

id100-20-MMFid100-20

Optical Fiber

InputFree Space

sensing part:CMOS (complementarymetal-oxide-semiconductor) chip

Page 9: CMOS-based Single Photon Detectors and Potential Applicationsndip.in2p3.fr/beaune05/cdrom/Sessions/rochas.pdf · 1/21 CMOS-based Single Photon Detectors and Potential Applications

9/21www.idquantique.com

CMOS Technology

PC Microprocessor

- low cost fabrication- integration of electronic circuits on the same silicon chip with the SPADs- mature technology

Page 10: CMOS-based Single Photon Detectors and Potential Applicationsndip.in2p3.fr/beaune05/cdrom/Sessions/rochas.pdf · 1/21 CMOS-based Single Photon Detectors and Potential Applications

10/21www.idquantique.com

Single Photon Detector

100µmCO OUT

GND

VDD=+5V

CMOS chip

INN

INP

VREFRq

VH

- Geiger mode: VDD + VH > Vbd

- Passive quenching

Comparator QuenchingResistor

SPAD

VDD

Ve

VREF

OUT

Time

Page 11: CMOS-based Single Photon Detectors and Potential Applicationsndip.in2p3.fr/beaune05/cdrom/Sessions/rochas.pdf · 1/21 CMOS-based Single Photon Detectors and Potential Applications

11/21www.idquantique.com

Comparator QuenchingResistor

SPAD

100µmCO OUT

GND

VDD=+5V

CMOS chip

INN

INP

VREFRq

VH

VDD

Ve

VREF

OUT

Low C

Single Photon Detector

Time

Page 12: CMOS-based Single Photon Detectors and Potential Applicationsndip.in2p3.fr/beaune05/cdrom/Sessions/rochas.pdf · 1/21 CMOS-based Single Photon Detectors and Potential Applications

12/21www.idquantique.com

Full Integration

Vop

npulse =C.Ve

q

Vbd

Time

IA Vop

Rq

C RdIA VVd

dead time ~ ∆trecharge α RqC

0

V

dead time < 70ns

Page 13: CMOS-based Single Photon Detectors and Potential Applicationsndip.in2p3.fr/beaune05/cdrom/Sessions/rochas.pdf · 1/21 CMOS-based Single Photon Detectors and Potential Applications

13/21www.idquantique.com

The Noise

Unwanted counts:

- dark counts

- afterpulses

Page 14: CMOS-based Single Photon Detectors and Potential Applicationsndip.in2p3.fr/beaune05/cdrom/Sessions/rochas.pdf · 1/21 CMOS-based Single Photon Detectors and Potential Applications

14/21www.idquantique.com

Trap-assisted

thermal generation

p+ undepleted region depletion region n-tub undepleted

region

z0 zw z

Ec

EV

TRAP

α process cleanliness: concentration and energylevel of traps

α temperature T

α excess bias voltage:probability for avalanchebreakdown

Page 15: CMOS-based Single Photon Detectors and Potential Applicationsndip.in2p3.fr/beaune05/cdrom/Sessions/rochas.pdf · 1/21 CMOS-based Single Photon Detectors and Potential Applications

15/21www.idquantique.com

Dark Count Rate

At room temperature, for 20µm diameter:- typically < 200Hz- production yield > 90%

diameter

DCR α surface

yield

Cooling is required for larger SPADs or arrays

Page 16: CMOS-based Single Photon Detectors and Potential Applicationsndip.in2p3.fr/beaune05/cdrom/Sessions/rochas.pdf · 1/21 CMOS-based Single Photon Detectors and Potential Applications

16/21www.idquantique.com

Afterpulsing

α process cleanliness: concentration and energy levelsof traps in the forbidden band

npulse =C.Ve

Low C

p+ undepleted region depletion region n-tub undepleted

region

z0 zw z

Ec

EV

TRAP

α excess bias voltage:probability for avalanchebreakdown

Page 17: CMOS-based Single Photon Detectors and Potential Applicationsndip.in2p3.fr/beaune05/cdrom/Sessions/rochas.pdf · 1/21 CMOS-based Single Photon Detectors and Potential Applications

17/21www.idquantique.com

Afterpulsing

Autocorrelation of a constant laser signalat a count rate of 10kHz

Becker and Hickl

Integral afterpulsing < 1%

At room temp, afterpulses in the first µs

Page 18: CMOS-based Single Photon Detectors and Potential Applicationsndip.in2p3.fr/beaune05/cdrom/Sessions/rochas.pdf · 1/21 CMOS-based Single Photon Detectors and Potential Applications

18/21www.idquantique.com

Detection Probability

Peak in blue and decrease in the red / IR:CMOS process shallow depletion region width

junction close to the surfacep+

n

depletionregion

Photon Detection Probabilityλ=400nm, PDP=18%λ=500nm, PDP=35%λ=600nm, PDP=25%λ=700nm, PDP=20%λ=900nm, PDP=4%

Page 19: CMOS-based Single Photon Detectors and Potential Applicationsndip.in2p3.fr/beaune05/cdrom/Sessions/rochas.pdf · 1/21 CMOS-based Single Photon Detectors and Potential Applications

19/21www.idquantique.com

Timing Resolution

p+

n

depletionregion

CMOS process: depletion region width ~1µm

40ps timing resolution (FWHM)

stable at high counting rate

Instrument Response Function at 5MHz, 2.7MHz, 62kHz

Page 20: CMOS-based Single Photon Detectors and Potential Applicationsndip.in2p3.fr/beaune05/cdrom/Sessions/rochas.pdf · 1/21 CMOS-based Single Photon Detectors and Potential Applications

20/21www.idquantique.com

Conclusion

Technology CMOSDiameter 20µm / MMFDead Time 70ns (up to 15ns)

Detection Proba. up to 35% at 500nm

Dark Count Rate <200Hz at room T.Afterpulsing <1%

Timing Resolution 40ps FWHM / stable

id100-20

Free Space

Page 21: CMOS-based Single Photon Detectors and Potential Applicationsndip.in2p3.fr/beaune05/cdrom/Sessions/rochas.pdf · 1/21 CMOS-based Single Photon Detectors and Potential Applications

21/21www.idquantique.com

Outlook

Large diameter single photon avalanche diodesCooling required

Development of application-oriented smart sensorsand smart sensors arrays32x32 SPADs array

smart: data processing, additional functionalities on the silicon chip

id150

by courtesy of E.Charbon-EPFL

1x10 SPADs array