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Cleanroom Product Range

2nd edition

Cleanroom Product Range

Issue 05/03, 2nd edition

Printed on paper free of

chlorine and acids, for the

benefit of our environment.

All technical data applies at

the time of going to print. All

texts, representations,

illustrations and drawings

included in this catalogue are

the intellectual property of

Festo AG & Co., and are

protected by copyright law. All

rights re-served, including

translation rights. No part of

this publication may be

reproduced or transmitted in

any form or by any means,

electronic, mechanical,

photocopying or otherwise,

without the prior written

permission of Festo AG & Co.

All technical data subject to

change according to technical

update.

Festo AG & Co.

P.O. Box

D-73726 Esslingen, Germany

Ruiter Strasse 82

D-73734 Esslingen, Germany

Foreword

Cleanroom Product Range from Festo

Changes in industrial production

have also resulted in changes in

the prevailing environmental

conditions. The demand for

quality has risen and the

reduction of costs has now

become the essential criterion.

Cleanroom production offers

considerable potential

here – as long as it is used

properly.

The more sensitive the item to be

produced, the “cleaner” the

production method required.

Production in cleanroom or using

cleanroom technology has

become increasingly popular.

However, it is not always

immediately obvious what

is actually behind it, never mind

how it should be used. Even the

concepts used to describe it are

often difficult to understand and

unclear.

Let us start with the concept of

the cleanroom. The only possible

method of cleanroom comparison

is based on the number of

airborne particles relative to a

volume equivalent. The VDI

Guideline 2083, the ISO 14644-1

and the US Federal Standard

209E have made a start by

defining international standards

for cleanliness classes.

One of the main factors that

influences air cleanliness is the

equipment installed in a

cleanroom. As a supplier of

automation expertise Festo has

been concerned with this subject

for over ten years. Back then the

number of customers in this

specialized area was small. That

has since changed.

The propagation of high-tech

chip development facilities, for

example, has resulted in a clear

increase in cleanroom

production.

Festo pneumatic products that

are suitable for used in

cleanroom ISO class 4

(FS209E class 10) and ISO

class 5 (FS209E class 100)

This catalogue cover both

standard Festo pneumatic

products and products that are

slightly modified to meet the

stringent requirements of

cleanroom ISO class 4 and

cleanroom ISO class 5 (i.e. US

Federal Standard 209E, class

10 and class 100).

Generally these products are

classified in the following

categories:

– Type RR: Are standard prod-

uct that are clean and pack.

Ready for cleanroom applica-

tion or replacement

– Type RR-SA: Are products

with slight modification

(usually come with a vacuum

suction port). They are clean

and pack, ready for clean-

room application or replace-

ment

All the products in this

catalogue are tested and

certified that the particle

emission level are within the

guideline and test procedures,

as stated in Chapter 4.

The products are then cleaned

and double packed before in-

house sending to the user.

The user is advised to remove

the first layer of packaging in a

clean area and the final

packaging inside the cleanroom

Festo pneumatic products that

are suitable for cleanroom ISO

class 6 (FS209E class 1000)

These standard products,

without any modification

needed, are tested and found

to be suitable for cleanroom

ISO class 6 (i.e. S Federal

Standard 209E class 1000).

Since they are standard

products, they can be order at

any Festo companies.

They are available in standard

packaging, the user are advice

to clean them before

introducing them into the

cleanroom.

These products are mentioned

only in the content pages but

the detail technical data are not

included in this catalogue, as

they are standard products.

The detail information of these

cleanroom ISO class 6 products

can be obtain on the CD-ROM

catalogue or any Festo

catalogue and brochure that

bears the information of the

products. User can also obtain

the necessary information on

the website: www.Festo.com

User are advice to use this

catalogue together with the

handbook “Fundamentals of

Cleanroom Technology”, part

no: 54078GB to gain more in

depth with cleanroom

technologies and qualifying

products for cleanroom

applications. The handbook

is available in all Festo

companies, worldwide.

What are the points to bear

in mind when using Festo

Cleanroom product range?

The specified values for

pressures, speeds, loads, lateral

forces, actuating forces, voltages,

magnetic fields and temperatures

should be adhered to at all times

and at any operational note

observed by the user to ensure

the correct functioning of the

equipment.

What are the points to bear

in mind when using this

catalogue?

All texts, representations,

illustrations and drawings

included in this publication are

the intellectual property of

Festo AG & Co., and are protected

by copyright law.

All rights reserved, including

translation rights. No part of this

publication may be reproduced or

transmitted in any form or by any

means, electronic, mechanical,

photocopying or otherwise,

without the prior written

permission of Festo AG & Co. All

technical data subject to change

according to technical update.

Festo AG & Co. shall not be held

liable for any damage, loss of

profit, consequential loss and/or

any other financial or technical

problems arising out of or in

connection with the use of the

products in this catalogue, if such

use is not in accordance within

the technical specification, the

manual and/or description in this

catalogue or in any other cases of

misuse of the products.

We wish you much success with

the Festo cleanroom product

range.

The Editor

Festo cleanroom product team

The cleanroom project initiated

by Festo is a collaboration among

Fraunhofer Institute for

Manufacturing Engineering and

Automation in Germany, Nanyang

Polytechnic (NYP) of Singapore

and Festo Singapore.

The objective is to work together

in the field of particle emission of

Festo products.

Furthermore, it is Festo’s

intention to improve the

experience in the field of particle

measurements, contamination

control as well as cleanroom

applications in general.

Introduction The Festo cleanroom project– a collaboration amongst 3 parties

Cleanroom Product Range from Festo AG & Co

Festo is doing the measure-

ment according the VDI 2083-8

guideline which is described on

page 82 and the following

pages. Fraunhofer Institute

approved this measurement

principle and attested this in a

‘Certificate of qualification’.

The certification covers: The

support for the performance of

testing the cleanroom suitabil-

ity of pneumatic components of

the company Festo AG & Co.

A sample of the product test

certificate, DGPL double acting

rodless cylinder is displayed.

Cleanroom Product Range Contents Overview

Introduction to cleanroom International standard of cleanroom Basic principles for designing cleanroom equip-ment Qualifying equipment for cleanroom used Measurement of airborne particle in cleanroom

The principle of measuring contamination level of pneumatic components Festo cleanroom project Test procedure of cleanroom components Conditions at which components are tested Benefits of Festo cleanroom components

Information

498 99 101

102 103

104

105 106 110 112

Drives

1Compact cylinders ADVU-…-RR-SA ISO standard cylinders CDN-…-RR-SA Twin piston rotary actuators DRQD-…-ZW-RR (spigot) Twin piston rotary actuators DRQD-…--FW-RR (Flange) ISO standard cylinders DSNU-…-RR-SA

Precision gripper HGPP-RR-SA Proximity sensors, SME-8-…-RR, SMT-8-…-RR Pneumatic linear, rodless cylinder DGPL-…-RR-SA Clamping modules EV-…-RR ISO standard cylinders DNC-…-RR-SA Electromechanical drive DGE-…-ZR-RR-SA Electromechanical drive DGE-…-SP-RR-SA Fluid muscle MAS-…-RR

18 20

22

23 28

30 32 3437 38 40 42 46

Valves

2Miniature valves MH...1-…-RR CP individual valve CPA-SC-…-RR CP valve terminal CPA-SC-…-RR Clean design valve terminal CDVI-…-RR

Flow control valves GRL…-…-RR Corrosion resistant flow control valves CRGRLA-...RR Flow control valves GR-…-RR

50 54 56 58

60

60 62

Air preparation & accessories

3Filter for D-Micro series LF-…-5M-Micro-RR Microfilter LFMA-…-RR, LFMB-…-RR, LFMBA-…-RR Manual on/off valves HE-…-RR Precision regulator LRP-…-RR-SA, gauge MAP-…-RR Regulator for D-Micro series LR-…-Micro-RR-SA Branching modules FRZ-…-RR, FRM-…-RR Filter regulator D-Micro series LFR-…-Micro-RR-SA Filter regulator LFR-…-RR-SA

Corrosion resistant air reservoir CRVZS-…-RR Tubing PUN-…-RR Fitting series QS-F-…-RR Fitting series CN-…-RR Fitting series CK-…-RR Sealing rings OL-…-RR Pressure sensor SDE5-…-RR Vacuum generator VN-…-RR

64 66 70 71 72 74 76 78

80 82 83 8488 92 93 94

Festo Worldwide

5Sales and service network The company

The history DCI (Digital Catalogue Information)

113 114

0Table of content

Drives for cleanroom ISO class 4 and 5 Drives for cleanroom ISO class 6 Valves for cleanroom ISO class 4, 5 and 6

Air preparation units for cleanroom ISO class 4, 5 and 6 Fitting and accessories for cleanroom ISO class 4 Fitting and accessories for cleanroom ISO class 6

06 08 10

12 1415

115 117

Table of content

Drives

Drives for cleanroom ISO Class 4 and 5(FS209E class 10 and class 100)

Type Function Piston Ø (mm) Stroke (mm) Variant Cleanroom Class Page

ADVU-…-RR-SA Compact cylinder

16, 20, 25 32, 40

5...100 5...200

P-A: Internal rod thread A-P-A: Exter-nal rod thread

ISO 4 (FS209E class 10)

18

CDN-…-RR-SA ISO stan-dard, double acting cylin-der

32, 40, 50 10...500 PPV: Adj. cushioning PPV-A: Adj. cushioning and mag-netic sensing


20

DRQD-…-ZW-RR DRQD-…-FW-RR

Rotary actua-tor with spigot or flange

16, 20, 25, 32 90°, 180, 360°

PPV: Adj. cushioning YSRJ: Hy-draulic cush-ioning AL, AR: air on left or right


22 23

DSNU-…-RR-SA ISO stan-dard, double acting cylin-der

8, 10 12, 16 20 25

10...100 10...200 10...320 10...500

P-A: Damp-ing and mag-netic sensing PPV-A: Adj. cushioning and mag-netic sensing


28

HGPP-…-RR-SA Precision parallel grip-per

12 16 20

2.5 5.0 7.5

- ISO 4 (FS209E class 10)

30

SME-8-…-RR SMT-8-…-RR

Proximity sensor for cylinders with 8 mm slot

- - Contact type Electronic type With cable With plug


32

DGPL-…-KF-RR-SA

Double act-ing linear, rodless cylin-der

25, 32, 40 10...1000 KF: With recirculating ball bearing slide

ISO 4 or 5 (FS209E class 10 or 100)

34

Table of content Drives

Drives for cleanroom ISO Class 4 and 5(FS209E class 10 and class 100)

Type Function Piston Ø (mm) Stroke (mm) Variant Cleanroom Class Page

EV-…-RR Single acting clamping module

12 16, 20, 25 32, 40, 50, 63

345

- ISO 5 (FS209E class 100)

37

DNC-…-RR-SA ISO standard, double acting cylinder

32, 40, 50 10...500 PPV: Adj. cushioning PPV-A: Adj. cushioning and magnetic sensing


38

Electromechanical drives

DGE-25-...-ZR-LK-RV-KG-KF-RR-SA

Electromechanical axes Tooth belt drives

25, 40 100...1000 ZR: Tooth belt drive LK: No drive on left RV: Drive shaft on right, front KG: Drive come with coupling housing KF: With recirculating ball bearing guides


40

DGE-...-SP-KG-KF-RR-SA

Electromechanical axes Spindle drives units

25, 40 100...1000 SP: Spindle drive KG: Drive come with coupling housing KF: With recirculating ball bearing


42

Fluid muscle

MAS-…-RR Tensile actuator

10, 20, 40 Nominal length: 40...4500

Muscle open at both ends

Muscle open at one end


46


Drives for cleanroom ISO Class 6 (FS209E class 1000)

Type Function Piston Ø (mm) Stroke (mm) Variant Cleanroom class Page

ADVC Compact cylinder

6, 10, 12, 16, 20, 25, 32

5...25 P-A: External rod thread A-P-A: Inter-nal rod thread


Refer to DCI on page 117

ADVU Compact cylinder

16, 20, 25 32, 40, 50

5...100 5...200

P-A: External rod thread A-P-A: Inter-nal rod thread



CDN ISO stan-dard, double acting cylin-der




DFC Compact guided drive

6, 10 5...30 KF: With recirculating ball bearing guide



DFM Guided drive 12, 16, 20, 25, 32

10...200 KF: With recirculating ball bearing guide



DMM Multimount cylinder

10, 16, 20, 25, 32

5...50 P-A: With damping and magnetic sensing



DNC ISO stan-dard, double acting cylin-der




DSNU ISO stan-dard, double acting cylin-der

8, 10 12, 16 20 25

10...100 10...200 10...320 10...500

P-A: Damp-ing and mag-netic sensing PPV-A: Adj. cushioning and mag-netic sensing




Drives for cleanroom ISO Class 6 (FS209E class 1000)

Type Function Piston Ø (mm) Stroke (mm) Variant Cleanroom class Page

DRQD Rotary actua-tor

6, 8, 12, 16, 20, 25, 32

90°, 180, 360°

PPV: Adj. cushioning YSRJ: Hy-draulic cush-ioningAL, AR: air on left or right



DSM Swivel actua-tor

12, 16, 16, 25, 32, 40

0...270° Standard: With spigot shaft FW: With flanged shaft



EV Single acting clamping module

12, 16, 20, 25, 32, 40, 50, 63

3, 4, 5 - ISO 6 (FS209E class 1000)


SLG Mini slide rodless

12 100...700 P-A: With damping and magnetic sensing



SLF Mini slide double act-ing

10 10...50 YSR: Hydrau-lic shock absorbers in both ends



SLS Mini slide double act-ing

10 5...30 P-A: With damping and magnetic sensing



SLT Mini slide double act-ing

6, 10, 16, 20, 25 10...200 P-A: With damping and magnetic sensing P-A-CC: With shock ab-sorber



Type Valve function Width (mm) Connections Flowrate (l/min) Cleanroom class Page

Micro valves

MHP1-…-RR In-line valve 3/2 way, NO 3/2 way, NC Single solenoid Individual con-nection Manifold mount-ing

10 M3 10 ISO 4 (FS209E class 10)

50

MHA1-…-RR Sub-base valve 3/2 NO 3/2 NC Single solenoid Individual con-nection Manifold mount-ing

10 M3 10 ISO 4 (FS209E class 10)

50

Compact performance valve

CPA-SC-…-RR 2 x 2/2 way, NC 1 x 3/2 way, with ext. air supply 2 x 3/2 way, NO 2 x 3/2 way, NC 2 x 3/2 way, NO & NC 5/2 way 5/3 way Single solenoid Double solenoid

10 M5 150 ISO 4 (FS209E class 10)

54

CPA-SC-…-RR 2 x 2/2 way, NC 1 x 3/2 way, with ext. air supply 2 x 3/2 way, NO 2 x 3/2 way, NC 2 x 3/2 way, NO & NC 5/2 way 5/3 way Single solenoid Double solenoid

10 Port 1, 3, 5: G1/8

Port 12, 14, 82, 84: M5

Port 2, 4: M5

150 ISO 4 (FS209E class 10)

56

Clean design valve terminal

CDVI-…-RR 2 x 3/2 way, NO 2 x 3/2 way, NC 2 x 3/2 way, NO & NC 5/2 way 5/3 way Single solenoid Double solenoid

24 Port 1, 3, 5: G3/8

Port 12, 14, 82, 84: G1/8

Port 2, 4: G1/8

300...650 ISO 5 (FS209E class 100)

58

Table of content Valves

Valves for cleanroom ISO Class 4, 5 and 6 (FS209E class 10, class 100 and class 1000)

Type Valve function Width (mm) Connections Flowrate (l/min) Cleanroom class Page

Compact performance valve

CPV-SC 2 x 3/2 way, NO 2 x 3/2 way, NC 2 x 3/2 way, NO & NC 5/2 way 5/3 way Single solenoid Double solenoid

10 M5 150...170 ISO 6 (FS209E class 1000)

Refer to DCI on page117

GRLA-…-RR GRLZ-…-RR GRLO-…-RR

Throttle out Throttle in Without check valve

- M3 M5 G1/8 G1/4 PK-3 PK-4 PK-6

0...750 ISO 4 (FS209E class 10)

60

CRGRLA-…-RR Throttle out - M3 M5 G1/8 G1/4

0...610 ISO 4 (FS209E class 10)

60

GR-…-RR GRA-…-RR

In-line - M3 M5 G1/8 G1/4

0...420 ISO 4 (FS209E class 10)

62

Flow control valve

CPE 3/2 way 5/2 way 5/3 way Single solenoid Double solenoid Individual connection Manifold mounting

Micro 10 Mini 14

M5 G1/8

180...800 ISO 6 (FS209E class 1000)


CPV10 2 x 2/2 way, NC 2 x 2/2 way, NO & NC 2 x 3/2 way, NO 2 x 3/2 way, NC 2 x 3/2 way, NO & NC 5/2 way 5/3 way Single solenoid Double solenoid Fast switching valve Vacuum generator

10 Port 1, 11: G1/8

Port 3, 5: G3/8

Port 12, 14, 82, 84: M5

Port 2, 4: M7

400 ISO 6 (FS209E class 1000)


Table of content Valves

Valves for cleanroom ISO Class 4, 5 and 6 (FS209E class 10, class 100 and class 1000)

Table of content Air preparation units

Air preparation units for cleanroom ISO Class 4 (FS209E class 10)

Type Features Connections Variants Specifications Cleanroom class Page

Filter for D-Micro series

LF-…-5M-Micro-RR

5.0 µm M5 M7 G1/8

MICRO (M5. M7, G1/8)

170...280 l/min ISO 4 (FS209E class 10)

64

Micro filter

LFMA-…-RR LFMB-…-RR LFMBA-…-RR

0.01 µm1.0 µmCombine both sizes

G1/8 G1/4 G3/8 G1/2 G3/4

MINI (1/8, 1/4, 3/8) MIDI (1/4, 3/8, 1/2, 3/4) MAXI (1/2, 3/4, 1)

130...950 l/min 250...1250 l/min 125...600 l/min


66 66 67

Manual on/off valve

HE-…-RR Twist knob for on/off Lockable

G1/8 G1/4 G3/8 G1/2 G3/4

MINI (1/8, 1/4, 3/8) MIDI (1/4, 3/8, 1/2, 3/4) MAXI (1/2, 3/4, 1)

1000...6500 l/min


70

Precision regulator

LRP-…-RR-SA With dia-phragm pilot con-trol

G1/4 0,7 2,5 410

0.05...0.7 bar 0.05...2.5 bar 0.05...4 bar 0.1...10 bar


71

Precision gauge

MAP-…-RR Ø 40 mm G1/8 14616

0...1 bar 0...4 bar 0...6 bar 0...16 bar


71

Regulator for D-Micro series

LR-…-Micro-RR-SA

Locking at the rotary knob

M5 M7 G1/8



72

Table of content Air preparation units

Air preparation units for cleanroom ISO Class 4, 5 and 6 (FS209E class 10, class 100 and class 1000)

Type Features Connections Variants Specifications Cleanroom class Page

Branching module

FRZ-…-RR FRM-…-RR FRM-H-…-RR

With or without check valve

M5 G1/8 G1/4 G3/8 G1/2 G3/4

MICRO (M5) MINI (1/8, 1/4, 3/8) MIDI (1/4, 3/8, 1/2, 3/4) MAXI (1/2, 3/4, 1)

210...580 l/min 1300...17400 l/min


74 74 74

LFR-…-MICRO-RR-SA

Locking at the rotary knob

M5 M7 G1/8

MICRO (M5, M7, G1/8)


76

Filter regulator

LFR-…-RR-SA Turn knob to adjust pressure

G1/8 G1/4 G3/8 G1/2 G3/4

MINI (1/8, 1/4, 3/8) MIDI (1/4, 3/8, 1/2, 3/4) MAXI (1/2, 3/4, 1)

750...10000 l/min


78

Filter for D-Micro series

LF-…-5M-Micro

5.0 µm M5 M7 G1/8




Micro filter

LFMALFMBLFMBA

0.01 µm1.0 µmCombine both sizes

G1/8 G1/4 G3/8 G1/2 G3/4

MINI (1/8, 1/4, 3/8) MIDI (1/4, 3/8, 1/2, 3/4) MAXI (1/2, 3/4, 1)

130...950 l/min 250...1250 l/min 125...600 l/min



Manual on/off valve

HE Twist knob for on/off Lockable

G1/8 G1/4 G3/8 G1/2 G3/4

MINI (1/8, 1/4, 3/8) MIDI (1/4, 3/8, 1/2, 3/4) MAXI (1/2, 3/4, 1)

1000...6500 l/min



Branching module

FRZ-…-RR FRM FRM-H

With or without check valve

M5 G1/8 G1/4 G3/8 G1/2 G3/4

MICRO (M5, 1/8) MINI (1/8, 1/4, 3/8) MIDI (1/4, 3/8, 1/2, 3/4) MAXI (1/2, 3/4, 1)

210...580 l/min 1300...17400 l/min



Filter regulator for D-Micro series

Table of content Fitting and accessories

Fitting and accessories for cleanroom ISO Class 4 (FS209E class 10)

Type Function Connections Specification Material Cleanroom class Page

Air reservoir

CRVZS-…-RR Capacity: 0.1l 0.4l 0.75l 2.0l 5.0l 10.0l

G1/8 G1/4 G1/2 G3/8 G1

Operating pressure: -0.95…+16 bar

X5CrNi18 10 ISO 4 (FS209E class 10)

80

Tubing

PUN-…-RR Type: 346810 12 16

Outside Ø: 3.0 mm 4.0 mm 6.0 mm 8.0 mm 10.0 mm 12.0 mm 16.0 mm

Inside Ø: 2.1 mm 2.6 mm 4.0 mm 5.7 mm 7.0 mm 8.0 mm 11.2 mm

Polyurethane in colour: BL: Blue SW: Black


82

Fitting

QS-F-…-RR Push in fitting range, O.D. of tube calibrated

For thread: M5 G1/8 G1/4 G3/8 G1/2

Can be connected with PUN tubing

Brass fitting, nickel plated.


83

CN-…-RR Barbed fitting range, I.D. of tube calibrated

For thread: M5 G1/8 G1/4 G3/8 G1/2 G3/4


Brass Aluminum Die-cast zinc


84

CK-…-RR Quick connector range, I.D. of tube calibrated



Die-cast zinc and Aluminum, blue anodised


88

Sealing ring

OL-…-RR O-ring for sealing connection


Max. tightening: 2 Nm 4 Nm 11 Nm 40 Nm 50 Nm 100 Nm

Stainless steel Aluminum NBR


92

Sensor

SDE5-D10-…-RR

SDE5-V1-…-RR

Pressure switch

Vacuum switch

QS-3 QS-4 QS-6

0...10 bar

-1...0 bar

Polymer ISO 4 (FS209E class 10)

93

Vacuum generator

VN-…-RR High vacuum High suction volume flow

G1/8 G1/4

-0.8 bar -0.5 bar


94

Table of content Fitting and accessories

Fitting and accessories for cleanroom ISO 6 (FS209E class 1000)

Type Function Connections Specification Material Cleanroom class Page

Air reservoir

CRVZS-… Capacity: 0.1l 0.4l 0.75l 2.0l 5.0l 10.0l

G1/8 G1/4 G1/2 G3/8 G1

Operating pressure: -0.95…+16 bar

X5CrNi18 10 ISO 6 (FS209E class 1000)


Tubing

PUN-… Type: 346810 12 16

Outside Ø: 3.0 mm 4.0 mm 6.0 mm 8.0 mm 10.0 mm 12.0 mm 16.0 mm

Inside Ø: 2.1 mm 2.6 mm 4.0 mm 5.7 mm 7.0 mm 8.0 mm 11.2 mm

Polyurethane in colour: BL: Blue SW: Black



Fitting

QS-F-… Push in fitting range, O.D. of tube calibrated



Brass fitting, nickel plated.



CN-… Barbed fitting range, I.D. of tube calibrated



Brass Aluminum Die-cast zinc



CK-… Quick connector range, I.D. of tube calibrated



Die-cast zinc and Aluminum, blue anodised



Sealing ring

OL-… O-ring for sealing connection


Max. tightening: 2 Nm 4 Nm 11 Nm 40 Nm 50 Nm 100 Nm

Stainless steel Aluminum NBR



Sensor

SDE5-D10-…

SDE5-V1-…

Pressure switch

Vacuum switch

QS-3 QS-4 QS-6

0...10 bar

-1...0 bar



Vacuum generator

VN-… High vacuum High suction volume flow

G1/8 G1/4

-0.8 bar -0.5 bar



Drives

Double acting cylinder with flexi-

ble cushioning rings in the end

positions and contact-less sens-

ing. The cylinder come with inter-

nal piston rod thread.

ADVU-…-P-A-RR-SA




ing. The cylinder come with exter-

nal piston rod thread.

ADVU-…-A-P-A-RR-SA

Proximity sensor for fitting in 8

mm slot

SME-8.../SMT-8-...

Compact cylinders ADVU permit

space saving of 50% in com-

parison with standard cylinder

of similar power while offering

the same force

As with all standard drives, the

proximity sensor SME-8 can be

used in the profile slot in the

compact cylinder

Order example:

Order no: 15024226

Type: ADVU-25-80-P-A-RR-SA

Double acting cylinder, diame-

ter 25 mm, stroke 80 mm with

internal piston rod thread.

Mounting options

Swivel flange

Ø 16, 20, 25, 32, 40

SUA-…

Flange mounting

Ø 16, 20, 25, 32, 40

FUA-…

Cleanroom class ISO 4 (FS209E class 10)

Compact cylinders ADVU-…-RR-SA Ø 16, 20, 25, 32, 40, stroke 10 to 200 mm

Type [Internal rod thread]

Part No. Type [external rod thread]

Part No. Piston Ø [mm]

Stroke [mm]

Thrust at 6 bar [N]

Return force [N]

Connection

ADVU-16-…-P-A-RR-SA 15024223 ADVU-16-…-A-P-A-RR-SA 15024230 16 1 … 100 121 90 M5



ADVU-32-…-P-A-RR-SA 15024227 ADVU-32-…-A-P-A-RR-SA 15024234 32 1 … 200 483 415 G1/8

ADVU-40-…-P-A-RR-SA 15024228 ADVU-40-…-A-P-A-RR-SA 15024235 40 1 … 200 754 686 G1/8

Technical data

Medium Compressed air, filtered (lubricated or unlubricated)

Max. operating pressure 10 bar

Temperature range –20 ... +80 °C (note operating range of proximity sen-sor)

Cylinder barrel and cover Anodised aluminium

Piston rod Stainless steel

Seals Polyurethane

Materials


Compact cylinders ADVU-…-RR-SA Ø 16, 20, 25, 32, 40, stroke 10 to 200 mm

Ø AF BG D1 DD E EE H KF L2 L3 L4

[mm] Ø H9 Ø

16 10 18.5 6 6 29 M5 1 M4 38 3 16

20 12 18.5 6 7 36 M5 1.5 M5 38 4 18

25 12 18.5 6 7 40 M5 1.5 M5 39.5 4 18

32 14 21.5 6 8 50 G1/8 2 M6 44.5 5 20

40 14 21.5 6 8 60 G1/8 2.5 M6 45.5 5 20

Ø MM PL RT T2 T4 TG WH ZJ SW1 PL1 LL2

[mm] Ø –0.2 h13

16 8 8 M4 4 1.5 18 4.5 52.5 7 5 10

20 10 8 M5 4 2 22 4.5 52.5 9 5 10

25 10 8 M5 4 2 26 5.5 55 9 5 10

32 12 8 M6 4 2.6 32 6 64.5 10 7 14

40 12 8 M6 4 2.6 42 6.5 66 10 7 14

Ø AM KK MM ZJ EE PL1 LL2

[mm] Ø

16 20 M8 8 52.5 M5 5 10

20 22 M10x1.25 10 52.5 M5 5 10

25 22 M10x1.25 10 55 M5 5 10

32 22 M10x1.25 12 64.5 G1/8 7 14

40 22 M10x1.25 12 66 G1/8 7 14

Sensor slot for proximity

switches

Minimum screw in depth

Vacuum suction port

1

2

3

+ = plus stroke length

Cylinder with adjustable end

cushioning, without sensor at the

end

CDN-…-PPV –RR-SA

Cylinder with adjustable end

cushioning and sensor at the two

ends

CDN-…-PPV –A-RR-SA

Order example:

Order no: 15024283

Type: CDN-32-200-PPV-A-RR-SA

Double acting cylinder, diameter

32 mm, stroke 200 mm with ad-

justable cushioning and sensor at

the ends . Sensor cables are not

included in the scope of delivery

Accessories

Straight connector cable

SIM-K-GD-…-CDN-RR

Swivel flange

Ø 32, 40, 50

SNCB-…

Trunnion flange

Ø 32, 40, 50

CRZNG-…

Easy to clean, double-acting

cylinders suitable for the most

demanding of anti-corrosion

and special design require-

ments.

Proximity sensors for the end

positions can be integrated in

the housing.

– Dimensions and connection

sizes as per ISO 6431, DIN

ISO 6431, VDMA 24 562, NF

E 49 003.1, and UNI 10 290

– Corrosion and acid resistant

– Adjustable end-position

cushioning at both ends

– Contact-less end-position

sensing with electronic prox-

imity sensor or reed contact

– End-position sensing on both

sides

Angled connector cable

SIM-K-WD-…-CDN-RR

Mounting options

Foot mounting

Ø 32, 40, 50

CRHNA-…

Flange mounting

Ø 32, 40, 50

CRFNG-…


Standard cylinders CDN-…-RR-SA Ø 32, 40, 50, stroke 10 to 500 mm

Type Part No. Type Part No. Piston Ø Stroke Thrust at 6 bar

Return force

Cushioning length

Connection

[without magnet] [with magnet] [mm] [N] [N] [mm]

CDN-32-…-PPV-RR-SA 15024278 CDN-32-…-PPV-A-RR-SA 15023418 32 10 …500 483 415 20 G1/8



M8 plug with cable [m] Type Part No.

Straight 2.5 SIM-K-GD-2,5-CDN-RR 15025008

5 SIM-K-GD-5-CDN-RR 15025009

Angled 2.5 SIM-K-WD-2,5-CDN-RR 15025010

5 SIM-K-WD-5-CDN-RR 15025011



Standard cylinders CDN-…-RR-SA Ø 32, 40, 50, stroke 10 to 500 mm

Ø AM B BG E EE EE1 J1 J2 J3 KK L1 L2 LL1 LL2

[mm] Ø d11

32 22 30 16 50 G1/8 G1/8 6.2 6.3 5.3 M10x1.25 18.5 94 ±0.4 22 18

40 24 35 16 58 G1/4 G1/8 9.9 8 6 M12x1.25 21 104.8 ±0.4 26.5 20

50 32 40 17 70 G1/4 G1/8 9.7 10.4 8.5 M16x1.50 27 105.9 ±0.5 34 26

Ø L3 L4 L7 MM PL PL1 RT TG VA VD WH ZJ SW1 SW2 SW3

[mm] Ø f8

32 19.8 38 4.1 12 13.8 8 M6 32.5 4 4 26.7 ±1 120.7 10 17 6

40 24.3 42 1.9 16 15.5 8 M6 38 4 6.5 30.8 ±1 135.6 13 19 6

50 24.3 47 1.9 20 14 8 M8 46.5 4 8 38.1 ±1.2 144 17 24 8

Socket head screws with

female threads for mounting

attachments

Regulating screw for adjust-

able end-position cushioning

1

2

Miniature plug connector, 3-

pin, for integrated proximity

sensors SME/SMT; suitable

for plug socket with cable

SIM-K-...-CDN

Vacuum suction port

3

4

Accessories


mm slot

SME-8.../SMT-8-...

Double acting, twin piston rotary

actuator with spigot rotating

shaft

DRQD-…-ZW-RR

Defined interfaces, high accuracy

and extremely good torsional

rigidity make this rotary actuator

the perfect choice for Festo’s

modular system for handling and

assembly technology.

– 90° rotation angle



– Contact-less end-position sens-

ing

– Twin-piston principle: Back-

lash-free, dynamic and pow-

erful

– Adjustable end-position

cushioning with precision

adjustment for end position

rotation angle with

– PPVJ: Pneumatic end-

position cushioning

– YSRJ: Hydraulic shock

absorbers

– Compressed air supply at

one end cap

– AL: Air connection on left

– AR: Air connection on right

– Pinion variants

– ZW: Spigot shaft

– FW: Flanged shaft

– Variable mounting options,

direct via centering sleeves

Order example:

Order no: 15024480

Type: DRQD-20-180-YSRJ-A-AL-

FW-RR

Rotary actuator with hydraulic

shock absorbers, magnetic

sensing, air connection on left

and flange shaft


Twin piston rotary actuators DRQD-…-ZW-RR (Spigot) Ø 16, 20, 25, 32, angle 90°, 180° and 360°

Left

Right

Type Part No. Torque at 6 bar [Nm]

Description

DRQD-16-...-PPVJ-A-AL-ZW-RR 15024475 1.6 PPVJ: Pneumatic end-position cushioning A: Magnetic sensing AL: Air connec-tion on left ZW: Spigot shaft

DRQD-20-...-PPVJ-A-AL-ZW-RR 15024480 3.1



DRQD-16-...-YSRJ-A-AL-ZW-RR 15024475 1.6 YSRJ: Hydraulic shock absorbers A: Magnetic sensing AL: Air connec-tion on left ZW: Spigot shaft

DRQD-20-...-YSRJ-A-AL-ZW-RR 15024480 3.1



DRQD-16-...-PPVJ-A-AR-ZW-RR 15024475 1.6 PPVJ: Pneumatic end-position cushioning A: Magnetic sensing AR: Air connec-tion on right ZW: Spigot shaft

DRQD-20-...-PPVJ-A-AR-ZW-RR 15024480 3.1



DRQD-16-...-YSRJ-A-AR-ZW-RR 15024475 1.6 YSRJ: Hydraulic shock absorbers A: Magnetic sensing AR: Air connec-tion on right ZW: Spigot shaft

DRQD-20-...-YSRJ-A-AR-ZW-RR 15024480 3.1



Type Part No. Torque at 6 bar [Nm]

Description

DRQD-16-...-PPVJ-A-AL-FW-RR 15024475 1.6 PPVJ: Pneumatic end-position cushioning A: Magnetic sensing AL: Air connec-tion on left FW: Flange shaft

DRQD-20-...-PPVJ-A-AL-FW-RR 15024480 3.1



DRQD-16-...-YSRJ-A-AL-FW-RR 15024475 1.6 YSRJ: Hydraulic shock absorbers A: Magnetic sensing AL: Air connec-tion on left FW: Flange shaft

DRQD-20-...-YSRJ-A-AL-FW-RR 15024480 3.1



DRQD-16-...-PPVJ-A-AR-FW-RR 15024475 1.6 PPVJ: Pneumatic end-position cushioning A: Magnetic sensing AR: Air connec-tion on right FW: Flange shaft

DRQD-20-...-PPVJ-A-AR-FW-RR 15024480 3.1



DRQD-16-...-YSRJ-A-AR-FW-RR 15024475 1.6 YSRJ: Hydraulic shock absorbers A: Magnetic sensing AR: Air connec-tion on right FW: Flange shaft

DRQD-20-...-YSRJ-A-AR-FW-RR 15024480 3.1



Double acting, twin piston rotary

actuator with rotating flange

DRQD-…-FW-RR


Twin piston rotary actuators DRQD-…-FW-RR (Flange) Ø 16, 20, 25, 32, angle 90°, 180° and 360°

Technical data 16 20 25 32

Ø 16 mm 20 mm 25 mm 32 mm

Design Rotary drive system in accordance with the rack and pinion principle

Mounting position Any

Pneumatic connection M5 G1/8

Operating pressure range DRQD-...-PPVJ 1 ... 10 bar

DRQD-...-YSRJ

Max. permissible frequency (for completed cycle of motion)

DRQD-...-PPVJ 90 ° 4.0 Hz 3.0 Hz 2.0 Hz 1.2 Hz

180 ° 3.0 Hz 2.2 Hz 1.3 Hz 0.8 Hz

360 ° 1.5 Hz 1.2 Hz 0.8 Hz 0.5 Hz

DRQD-...-YSRJ* 90 ° 2.0 Hz 2.0 Hz 1.5 Hz 1.2 Hz

180 ° 1.8 Hz 1.8 Hz 1.5 Hz 1.2 Hz

360 ° 1.0 Hz 1.0 Hz 0.9 Hz 0.8 Hz

* At temperatures of less than 0 °C, a maximum frequency of 1 Hz always applies to all YSRJ models.

Max. permissible mass mo-ments of inertia on the drive shaft

DRQD-...-PPVJ 5 x 10p kgm² 10 x 10p kgm² 20 x 10p kgm² 40 x 10p kgm²

DRQD-...-YSRJ 300 x 10p kgm² 400 x 10p kgm² 700 x 10p kgm² 1500 x 10p kgm²

Rotation angle range min./max. DRQD-...-PPVJ Nominal rotation angle: -20° +6° (per end position)

DRQD-...-YSRJ

Repetition accuracy DRQD-... < 0.05°

Temperature range –10°…+60

Materials Spiral tubing Polyurethane

Cylinder barrel, slip disc Anodised aluminium

Cap, SD transfer plate

Gear rack X 5 CrNi 18 9, hardened, milled teeth

Pinion X 14 CrMoS 17, hardened, treated surfaces, stamped teeth

Piston seal Polyurethane

Screws Galvanised steel

O-rings BUNA-N

Threaded pin Galvanised steel

Centring sleeves X 8 CrNi 18 9

2 ... 10 bar


Twin piston rotary actuators DRQD-…-ZW-RR (Spigot) Ø 16, 20, 25, 32, angle 90°, 180° and 360°

Sensor slots for type SME-/

SMT-8-... proximity sensors

Self-adjusting shock absorb-

ers for end position cushion-

ing

Adjustable sleeve for end

position cushioning with type

DRQD-...YSRJ

1

2

3

Internal hex-head screw for

end position adjustment

with integral regulating

screw for end position

cushioning

Model PPVJ: Both air con-

nections on one cap, op-

tionally at

front or side.

Model YSRJ: Both air con-

nections on one cap, at

side only.

Woodruff key position at 0°

Centering sleeves (2 ea.

Included in scope of deliv-

ery)

4

5

6

7

aJ


Twin piston rotary actuators DRQD-…-RR (Spigot) Ø 16, 20, 25, 32, angle 90°, 180° and 360°

Type B1 B2 B3 B4 B5 B6 B7 B8 D1 Øg6

D2 Ø

D3 Ø

D4 D7 D8 Ø

H13

D9 Ø

D10 D11 Ø

H7

EE H1 H2 L1 L2

DRQD-16-90-... 30 25.5 23 17.8 4 14.8 22 23.5 10 12 18 M3 M4 8 4.2 M5 9 M5 50 11.2 71 35.5

DRQD-16-180-... 93 46.5

DRQD-16-360-... 137 68.5

DRQD-20-90-... 36 32.5 30 21.8 4 19.8 26 30.5 12 15 24 M4 M4 8 4.2 M5 9 M5 56 13.5 78.4 39.2

DRQD-20-180-... 104.8 52.4

DRQD-20-360-... 157.6 78.8

DRQD-25-90-... 42 42.5 40 24.8 4 24.8 30 40.5 16 20 30 M5 M5 10 5.3 M6 9 M5 67 18 91.2 45.6

DRQD-25-180-... 124 62

DRQD-25-360-... 189.2 94.6

DRQD-32-90-... 51 52.5 50 29.8 2 29.8 36 50.5 20 25 35 M6 M5 10 5.3 M6 9 G 79 22.5 114.8 57.4

DRQD-32-180-... 155.6 77.8

DRQD-32-360-... 237.4 118.7

Type L3 L4 L5 L6 L8 ±0.03

L9 ±0.03

L10 L11 N1 P9

T1 T2 T3 T4 T5 T6 T7 ß1 ß2 ß3 ß4

min max min max

DRQD-16-90-... 10 24 20.8 1.7 5.7 23.4 28.2 60 – 7.6 5.3 3 18.1 9 3.5 5 10 2 2 4 9 13 17

DRQD-16-180-... –

DRQD-16-360-... 20

DRQD-20-90-... 10 31.5 27 2.4 7 28.6 35.9 60 – 8 5 4 25.1 10 3.5 5 12 2 2 7 11 15 19

DRQD-20-180-... –

DRQD-20-360-... 20

DRQD-25-90-... 11 36.5 33 2.6 8.9 42 50.2 60 – 11 5 5 36.1 12.5 5 6 12 2 2 7 15 19 24

DRQD-25-180-... –

DRQD-25-360-... 20

DRQD-32-90-... 16 39 39 4.3 11.8 59.4 70.1 80 – 13.1 8 6 45.1 16 5 6 14 2 2 8 20 27 32

DRQD-32-180-... –

DRQD-32-360-... 20

L7



Sensor slots for type SME-/

SMT-8-... proximity sensors

Self-adjusting shock absorb-

ers for end position cushion-

ing

Adjustable sleeve for end

position cushioning with type

DRQD-...YSRJ

1

2

3

Internal hex-head screw for

end position adjustment

with integral regulating

screw for end position

cushioning

Model PPVJ: Both air con-

nections on one cap, op-

tionally at

front or side.

Model YSRJ: Both air con-

nections on one cap, at

side only.

Woodruff key position at 0°

Centering sleeves (2 ea.

Included in scope of deliv-

ery)

Centering sleeves (not

included in scope of deliv-

ery)

4

5

6

7

aJ

aA



Type B1 B2 B3 B4 B5 B6 B7 D1 Ø

D2 Ø ±0.025

D3 Ø

H8

D4 Ø

D5 D6 Ø

H7

D7 D8 Ø

H13

D9 Ø

D10 D11 Ø

H7

EE H1 L1 L2

DRQD-16-90-... 30 6.5 6 17.8 4 14.8 22 34 25 14 9 M4 7 M4 8 4.2 M5 9 M5 50 71 35.5

DRQD-16-180-... 93 46.5

DRQD-16-360-... 137 68.5

DRQD-20-90-... 36 6.5 6 21.8 4 19.8 26 38 28 16 11 M4 7 M4 8 4.2 M5 9 M5 56 78.4 39.2

DRQD-20-180-... 104.8 52.4

DRQD-20-360-... 157.6 78.8

DRQD-25-90-... 42 9.5 9 24.8 4 24.8 30 48 34 16 12 M6 9 M5 10 5.3 M6 9 M5 67 91.2 45.6

DRQD-25-180-... 124 62

DRQD-25-360-... 189.2 94.6

DRQD-32-90-... 51 9.5 9 29.8 2 29.8 36 58 45 19 14 M6 9 M5 10 5.3 M6 9 G 79 114.8 57.4

DRQD-32-180-... 155.6 77.8

DRQD-32-360-... 237.4 118.7

Type L3 L4 L5 L6 L7 L8 ±0.03

L9 ±0.03

L10 L11 T1 T2 T3 T4 T5 T6 T7 ß1 ß2 ß3 ß4

min max min max

DRQD-16-90-... 10 24 20.8 1.7 5.7 23.4 28.2 60 – 7.6 5.3 3 1.6 3.5 5 10 2 2 4 9 13 17

DRQD-16-180-... – 13 17

DRQD-16-360-... 20

DRQD-20-90-... 10 31.5 27 2.4 7 28.6 35.9 60 – 8 5 3 1.6 3.5 5 12 2 2 7 11 15 19

DRQD-20-180-... –

DRQD-20-360-... 20

DRQD-25-90-... 11 36.5 33 2.6 8.9 42 50.2 60 – 11 5 3 2 5 6 12 2 2 7 15 19 24

DRQD-25-180-... –

DRQD-25-360-... 20

DRQD-32-90-... 16 39 39 4.3 11.8 59.4 70.1 80 – 13.1 8 3 2 5 6 14 2 2 8 20 27 32

DRQD-32-180-... –

DRQD-32-360-... 20

T8

1.4

1.4

2

2




ing.

DSNU-…-P-A-RR-SA

Double acting cylinder with ad-

justable cushioning rings in the

end positions and contact-less

sensing.

DSNU-…-PPV-A-RR-SA

Order example:

Part no: 15024262

Type: DSNU-20-100-PPV-A-RR-SA

Double acting cylinder Ø 20 mm,

stroke 200 mm, with adjustable

cushioning rings in the end posi-

tions and contact-less sensing.

Accessories


mm slot

SME-8.../SMT-8-...

Swivel mounting

WBN-...

Clevis foot

LBN-...

– Optimum graded range of

piston diameters and stroke

lengths

– Quick reacting thanks to

minimal break-away force

which is effective at approx.

0.6 bar.

– Good running performance

and long service life thanks

to smooth, hard cylinder

bore

– Piston rod and cylinder bar-

rel made of stainless steel

– With flexible cushioning

rings in the end positions

– With adjustable end-position

cushioning at both ends

– With or without contact less

end position sensing

Mounting bracket for proximity

sensor

SMBR-8-...

Mounting options

Foot mounting

HBN-… x1

HBN-… x2

Flange mounting

FBN-...


Standard cylinders DSNU-…-RR-SA Ø 8, 10, 16, 20, 25 mm, stroke 10 to 500 mm

Type Part no. Pis-ton Ø

Stroke [mm]

Thrust at 6 bar

Return force

Air cushioning Con-nection

Bracket for SME-8/SMT-8 sensor

Part no.

[mm] [N] [N] [cushioning length]

DSNU-8-…-P-A-RR-SA 15024250 8 10…100 30 23 Damper M5 SMBR-8-8-RR 15025013

DSNU-10-…-P-A-RR-SA 15024251 10 10 …100 47 40 Damper M5 SMBR-8-10-RR 15025014

DSNU-12-…-P-A-RR-SA 15024256 12 10 …200 68 51 Damper M5 SMBR-8-12-RR 15025015

DSNU-16-…-PPV-A-RR-SA 15024260 16 10 …200 121 104 Adjustable [14 mm] M5 SMBR-8-16-RR 15025016

DSNU-20-…-PPV-A-RR-SA 15024262 20 10 …320 189 158 Adjustable [17 mm] G1/8 SMBR-8-20-RR 15025017

DSNU-25-…-PPV-A-RR-SA 15024265 25 10 …500 295 247 Adjustable [17 mm] G1/8 SMBR-8-25-RR 15025018



Standard cylinders DSNU-…-RR-SA Ø 8, 10, 16, 20, 25 mm, stroke 10 to 500 mm

Ø AM B BE BF BF1 CD D D4 EE EW KK KV KW

[mm] h9 Ø Ø Ø

8 12 12 M12x1.25 12 15 4 15 9.3 M5 8 M4 19 6

10 12 12 M12x1.25 12 15 4 15 11.3 M5 8 M4 19 6

12 16 16 M16x1.5 17 16 6 20 13.3 M5 12 M6 24 8

16 16 16 M16x1.5 17 17 6 20 17.3 M5 12 M6 24 8

20 20 22 M22x1.5 20 20 8 27 21.3 G1/8 16 M8 32 11

25 22 22 M22x1.5 22 22 8 27 26.5 G1/8 16 M10x1.25 32 11

Ø L L2 MM PL PL1 PL2 PC VD WF1 XC ZJ ZM SW

[mm] Ø f8

8 6 68.5 4 6 8 22.5 20.5 2 19 86.5 84.5 74 –

10 6 68.5 4 6 8 22.5 20.5 2 19 86.5 84.5 74 –

12 9 77.5 6 6 8 27.5 25.5 2 21 102.5 99.5 94 5

16 9 82 6 6 6 26 26 2 22 108 104 110 5

20 12 102 8 8.2 8.2 34 34 2 24 129 126 116.4 7

25 12 105.5 10 8.2 8.2 36 36 2 28 140 133.5 124.4 9

Vacuum suction port 1

Double acting precision gripper

HGPP-…-RR-SA

– Wide ranging variants for flexi-

ble use:

– Double-acting piston drive

HGPP-...-A.

– High precision gripper jaw

guide.

– Variable gripping action:

– External gripping

– Internal gripping

– Multiple compressed air

connections

– Integrated Hall sensor

– Highly flexible thanks to

versatile attachment, mount-

ing and application options:

– Drives

– Externally adaptable grip-

per finger

– Guide late

Precision gripper HGPP-…-RR-SA Ø 12, 16, 20mm, opening stroke 2.5 to 7.5 mm


Type Part No. Ø Opening stroke per jaw

Con-nection

Gripping force per gripper at 6 bar

Max. applied load for additional gripper fingers

Operat-ing pres-sure

Repeti-tion accu-racy

Max. inter-changeability

Max. fre-quency

[mm] [mm] [N] [N] [bar] [mm] [mm] [Hz]

HGPP-12-A-RR-SA 15043419 12 2.5 M3 67.6 < 1 2...8 < 0.02 0.1 4

HGPP-16-A-RR-SA 15044334 16 5 M5 120.6 < 1.5

HGPP-20-A-RR-SA 15024276 20 7.5 M5 188.4 < 2

Technical data Size 12 16 20

Max. permissible static characteristic load values

Forces Fz Gripper jaw [N] 70 130 220

Fz Housing [N] 400 600 800

Torques Mx [Nm] 3 7 14

My [Nm] 3 7 14

Mz [Nm] 3 7 14

Mass moments of inertia [kgm² x10p ] 0.73 2.39 6.22

Opening and closing times with gripper fingers at 6 bar3)

open [ms] 27 40 44

close [ms] 40 53 59

Opening and closing times with additional gripper fingers

related to applied load

2 N [ms] 100 50 –

3 N [ms] 200 100 50

4 N [ms] 300 200 100

5 N [ms] – 300 200

Weights [g] 172 315 604

Materials Body Anodised aluminium

Gripper jaws Nickel plated aluminium

Cover cap Anodised aluminium

Ambient conditions [°C] +5 ... + 60 Temperature range

Precision gripper HGPP-…-RR-SA Ø 12, 16, 20mm, opening stroke 2.5 to 7.5 mm


Ø B1 B2 B3 B4 B5 B6 B7 B8 D1 D2 D4

[mm] +0.3 +0.3 ±0.1 ±0.1 ±0.02 ±0.1 ±0.1 Ø

HGPP-12-... 38 38 13 30 8 12.5 30 24±0.02 M4 3.3 M3

HGPP-16-... 42 42 17 32 10 16 32 25±0.02 M4 3.3 M3

HGPP-20-... 48 48 20 40 12 20 40 31+0.1 M5 4.2 M4

Ø D5 D6 D7 D8 EE EE1 H1 H2 H3 H4 H5

[mm] Ø H8 Ø H8 Ø +0.2 ±0.1 ±0.1 ±0.02

HGPP-12-... 2 2 M3 6 M3 M3 40.2 +0.2 35.5 8.5 ±0.3 4.7 2

HGPP-16-... 2.5 2.5 M3 8 M5 M5 51.5 +0.3 40.9 8.3 ±0.2 6.8 3

HGPP-20-... 3 3 M3 8 M5 M5 57.5 +0.3 53.48 15.5 ±0.2 8 3

Ø H6 H7 L1 L2 L3 L4 L5 L6 L7 L8 L9

[mm] ±0.12 ±0.5 ±0.5 ±0.25 ±0.05 ±0.1 ±0.1 ±0.1 ±0.02

HGPP-12-... 5 32.7 +0.2 67 62 60 51.4 8 30 6 9 14

HGPP-16-... 5 37.1 +0.3 98 88 86 76 13 40 6 14 17.5

HGPP-20-... 7 48.5 +0.3 120 105 103 92 13 40 8 ±0.1 20 21

Ø L10 L11 T1 T2 T3 T4 T5 T6 T7 T8 T9

[mm] ±0.05 ±0.1 ±0.1 ±0.1 0.1

HGPP-12-... 8.5 18 8 16 +0.4/–0.2 6 7.5 5 4 6 5.5 1.2

HGPP-16-... 11.5 24 10 19.5 +0.5/–0.2 7 ±0.1 8 6 4.5 6 5 1.2

HGPP-20-... 13.5 26 12 28.5 +0.5/–0.2 7 ±0.1 10 8 ±0.1 7 ±0.1 8 ±0.1 6 1.2

Supply port, opening

Supply port, closing

Hole for locating pin

(Locating pins are not in-

cluded in scope of delivery.)

Gripper jaws open

Gripper jaws closed

Hole for sensor

Gripper

Adapter example for direct air

supply

O-ring for precision grippers:

HGPP-12: 3x1.5

HGPP-16: 5x1.5

HGPP-20: 5x1.5

Set screw for securing the

Hall sensor

Vacuum suction port

1

23

45

6

7

8

9

aJ

aA

SME-8-K-LED-230-RR

SME-8-O-K-LED-24-RR

SMT-8-PS-K-LED-24-B-RR

SMT-8-PS-S-LED-24-B-RR

SMT-8-NS-K-LED-24-B-RR

SMT-8-NS-S-LED-24-B-RR

Proximity sensors for cylinders

with 8 mm slot. Contact-type

(reed switch)

SME-8-…-RR

Proximity sensors for cylinders

with 8 mm slot. Contact-less

(electronic switch)

SMT-8-…-RR

– with LED

– With plug

– With cable (2x0.14 mm²)

– CE

– Compact design

– Suitable for a wide variety of

Festo cylinders

– Fast and reliable due to simple

clamping into the sensor slot

– System optimised

– Can also be mounted on round

section cylinders using special

mounting kit

SME-8-K-LED-24-RR

SME-8-S-LED-24-RR

Sensor with plug version

SME-8-S-...

SMT-8-S-...

Angled plug with cable

SIM-M8-3WD-…

Sensor with 2.5 m cable version

SME-8-K-...

SME-8-K-…

Straight plug with cable

SIM-M8-3GD-...


Proximity sensors SME-8-…-RR, SMT-8-…-RR Cable and plug version

Type Part No. Version Connection Contact rating

Switching current

Switching voltage

Contact resistance

Switching frequency

Weight

SME contact-type, reed switch

SME-8-S-LED-24-RR 15024688 M8 Plug 3-pin M8 10 W 500 mA 12...30 V DC 0.09 800 Hz 0.01 kg

SME-8-K-LED-24-RR 15024689 Cable 2.5 m 3-core ca-ble, 2.5 m

10 W 500 mA 12...30 V DC 0.13 800 Hz 0.05 kg

SME-8-K-LED-230-RR 15024692 230 V 2-core ca-ble, 2.5 m

10 W AC: 200 mA DC: 120 mA

3...250 V 0.15 500 Hz 0.06 kg

SME-8-O-K-LED-24-RR 15024695 NC contact 3-core ca-ble, 2.5 m

2 W 50 mA 12...30 V DC 32 500 Hz 0.085 kg

SMT contact-less type, electronic switch

SMT-8-PS-S-LED-24-B-RR 15024702 M8 Plug 3-pin M8 3 W 100 mA 12...30 V DC - PNP 0.02 kg

SMT-8-PS-K-LED-24-B-RR 15024707 Cable 2.5 m 3-core ca-ble, 2.5 m

3 W 100 mA 12...30 V DC - PNP 0.08 kg

SMT-8-NS-S-LED-24-B-RR 15024709 M8 Plug 3-pin M8 3 W 100 mA 12...30 V DC - NPN 0.02 kg

SMT-8-NS-K-LED-24-B- RR 15024710 Cable 2.5 m 3-core ca-ble, 2.5 m

3 W 100 mA 12...30 V DC - NPN 0.08 kg

M8 plug socket with cable (3 pins) Type Part no.

Straight plug socket 2.5 m SIM-M8-3GD-2,5-PU-RR 15024996

5 m SIM-M8-3GD-5-PU-RR 15024997

10 m SIM-M8-3GD-10-PU-RR 15024998

2.5 m SIM-M8-3WD-2,5-PU-RR 15024999

5 m SIM-M8-3WD-5-PU-RR 15025002

10 m SIM-M8-3WD-10-PU-RR 15025003

Angled plug socket

SME-8-K-LED-24-RR

SME-8-O-K-LED-24-RR

SME-8-K-LED-230-RR

SME-8-S-LED-24-RR

SMT-8-PS-K-LED-24-B-RR

SMT-8-NS-K-LED-24-B-RR

SMT-8-PS-S-LED-24-B-RR

SMT-8-NS-S-LED-24-B-RR

Proximity sensors SME-8-…-RR, SMT-8-…-RR Cable and plug version


SMT-8-...-K-LED-24-B

3-core cable, 2.5 m long

(3x0,14 mm²)

SMT-8-...-S-LED-24-B

3-core cable, 0.3 m long

(3x0.14 mm²)

Yellow LED

Max. tightening torque 0.2

Nm (threaded pin M3 x 5)

Suitable for plug socket

SIM-M8-...

1

2

3

4

SME-8-K-LED-24, 3-core ca-

ble, 2.5 m long (3x0.14 mm²)

SME-8-O-K-LED, 3-core cable,

7.5 m long (3x0.14 mm²)

SME-8-S-LED-24, 3-core ca-

ble, 0 3 m long (3x0 14 mm²)

SME-8-K-LED-230, 2-core

cable, 2.5 m long (2x0.25

mm²)

Yellow LED

Max. tightening torque 0.2

Nm (threaded pin M3 x 5)

1

2

3

Important technical data:

– For used in Cleanroom class

ISO 4 (FS209E class 10),

max. speed should be less

than 0.3 m/s



max. speed should be less

than 1.0 m/s

– To achieved the least parti-

cle emission during clean-

room application it is recom-

mended to ensure sufficient

damping when the rodless

cylinder come to the end of

the stroke. This can be

achieved by optimising the

in-build pneumatic end

cushioning or to attach a

external shock absorber.

Accessories

Foot mounting

HNC-40 for DGE-25-…-RR-SA

HNC-63 for DGPL-32-…-RR-SA

and DGE-40-…-RR-SA

Sensor cable

SIM-M8-3…-RR

(Refer to page 32)

Double acting, pneumatic linear

drive units with slide, adjustable

end-position cushioning and re-

circulating ball bearing guides

DGPL-...-KF-RR-SA

– Precision, rigid guide

– Greater flexibility thanks to

wide choice of mounting and

assembly options

– Variable end-position cushion-

ing systems

– Wide range of options for

mounting on drive units

– System product for position-

ing, handling and assembly

technology

Order example:

Part no: 15059878

Type DGPL-32-500-PPV-A-B-KF-

RR-SA

Double acting linear drive, Ø 32

mm, stroke 500 mm, with adjust-

able end-position cushioning and

recirculating ball bearing guides

Cleanroom class ISO 4 or 5 (FS209E class 10 or 100)

Pneumatic linear drives DGPL-…-KF-RR-SA Ø 25, 32, 40 mm, stroke 100 to 1000 mm

Type Part No. Piston Ø [mm]

Stroke [mm]

Theoretical force at 6 bar [N]

Cushioning length [mm]

Connection

DGPL-25-…-PPV-A-B-KF-RR-SA 15059877 25 100…1000 295 18 G1/8



Part no: 15060241

– Shock absorber package for

DGPL-32-…-RR-SA and DGPL-

40-…-RR-SA

– Shock absorber: 2 x YSR-16-

20-C

– Shock absorber retainer: 2 x

KYP-40-SA

Optional packages:

Part no: 15060240

Shock absorber package for

DGPL-25-…-RR-SA


12-C (2x)


KYP-25-SA



Technical data Type DGPL

Size 25 32 40

Pneumatic data Min. operating pressure [bar] 2 2 1.5

Max. operating pressure [bar] 8 8 8

Connections G1/8 G1/8 G1/4

Mechanical data Design Pneumatic linear drive unit with slide

Guide Recirculating ball bearing guide (KF)

Size Piston Ø [mm] 25 32 40

Stroke length [mm] 100 ... 1000

Cushioning length [mm] 18 20 30

Effective force at 6 bar (theoretical) [N] 295 483 754

Max. speed DGPL-...-KF [m/s] 1

Weights Basic weight DGPL-...-KF [kg] 1.52 2.72 4.48

Per 10 mm stroke DGPL-...-KF [g] 53 69 97

Materials Drive unit Profile barrel Anodised aluminium

End cap Anodised aluminium

Cover strip Stainless steel

Driver Anodised aluminium

Seals –

Guide unit Profile –

End cap –

Slide Anodised aluminium

Guide rail KF Corrosion resistant steel

Ambient conditions Temperature range [°C] –10 …60

Tube Profile Aluminium, nickel plated

End cover Aluminium, nickel plated

Part no: 15060239

Proximity Sensor package (NPN)

– Proximity Sensor: 2 x SIEN-

M8NB-PS-S-L

– Switching Lug on slide: SF-25

– Sensor brackets: 2 x HW-

18/25-M8

– Slot nuts: 2 x ZVB-8

Optional packages:

Part no: 15060238

Proximity Sensor package (PNP)


M8B-PS-S-L



18/25-M8


1

2

3

4

5

6

Seal

End cap

Cover strip

Profile barrel

Driver

Slide

1

23

4

5

6



Ø [mm] B1 B2 B3 B4 B5 B6 B7 B8 B9 B10 B11 B12 B13 B14

25 103.2 86 76.2 43 31 9.5 32 12 16.5 12.5 41.2 32 38 10

32 128.6 112 101.6 55 45 12 47 12 19 9.5 52.4 20 56.5 12

40 128.6 112 101.6 55 45 9 55 12 22 12.5 51.6 20 56.5 12

Ø [mm] B15 B16 B17 B18 D1 D2 D3 D4 D5 D6 D7 H1 H2 H3

25 5 18.2 49.5 29 6 M6 M6 G1/8 M4 14 M4 98.2 95.2 38

32 5 20.8 60 29 6 M8 M6 G1/8 M4 25 M6 129.6 120.6 56.5

40 5 20.8 60 29 6 M8 M6 G1/4 M4 25 M6 129.6 120.6 56.5

Ø [mm] H4 H5 H6 H7 L1 L2 L3 L4 L5 L6 L7 L8 L9 L10

25 76.2 9.5 9 25.3 244 220 105 88 232 140 73 43 40 50

32 101.6 12 8 29 294 270 131 88 282 190 120 40 60 60

40 101.6 9 10 34 344 320 167 88 332 220 120 40 60 60

For foot mounting HNC-40/63

Sensor package

For mounting of switch lug

SF-25

For mounting of shock ab-

sorber retainer

For centering sleeve

Vacuum suction port G1/8

Shock absorber retainer

Air connections

1

2

3

4

56

8

9


Clamping module

EV-…-RR

– Single-acting

– Flat space-saving construction

– Hermetically sealed

– Ideal for clamping tasks

– Pressure plate to protect dia-

phragm

– For application against abra-

sive surfaces, a metal pressure

plate can be snap-fitted to the

diaphragm to protect it against

external damage. Type; EV-…-

DP.

– Housing; Al die-cast. Dia-

phragm; polyurethane

For rapid clamping of sensitive

and slightly uneven workpieces

with small dimensional devia-

tions. This cylinder series is

suitable for installation in all

types of handling devices.

The flat design and relatively

high clamping forces make the

cylinders particularly suitable

for clamping block-shaped

workpieces.

As the cylinders

do not have any stroke limita-

tion, they should be operated

only against a workpiece. The

return force is provided by the

pre-tensioned diaphragm.


Clamping modules EV-…-RR Ø 12, 16, 20, 25, 32, 40, 50, 63 mm, stroke 3 to 5 mm

Type Part No. Piston Ø Stroke Clamping force at 6 bar [N]

[mm] [mm] Stroke 1mm Stroke max.

EV-12-3-RR 15024495 12 3 55 56

EV-16-4-RR 15024496 16 4 102 125

EV-20-4-RR 15024497 20 4 162 187

EV-25-4-RR 15024498 25 4 226 271

EV-32-5-RR 15024499 32 5 376 456

EV-40-5-RR 15024500 40 5 680 675

EV-50-5-RR 15024501 50 5 1090 1075

EV-63-5-RR 15024502 63 5 1660 1640

Type B1 B2 B3 D1 Ø D2 Ø D3 D4 Ø D5 Ø D6 Ø H1 H2 H3 H4 H5 L1 L2

EV-12-3-RR 29 16.5 13 3.5 2 M3 6.5 3 11 10.5 3 4 3.5 1.5 25 18

EV-16-4-RR 33 18.5 15 3.5 2 M3 6.5 7 15 10.5 4 4 3.5 1.5 29 22

EV-20-4-RR 37 20.5 16.5 4.5 2 M3 6.5 11 19 10.5 4 4 3.5 1.5 33 25

EV-25-4-RR 42 23 18.5 5.5 2 M3 6.5 16 24 10.5 4 4 3.5 1.5 38 28

EV-32-5-RR 49 26.5 21 5.5 2 M3 6.5 23 31 10.5 5 4 3.5 1.5 45 34

EV-40-5-RR 57 30.5 25 5.5 2 M3 6.5 31 39 10.5 5 4 2.5 1.6 53 42

EV-50-5-RR 67 35.5 29 5.5 2 M3 6.5 41 49 10.5 5 4 2.5 1.6 63 49

EV-63-5-RR 80 42 34 5.5 2 M3 6.5 54 62 10.5 5 4 2.5 1.6 76 60

Max. permissible stroke

against stop (workpiece)

Clamping area

The pressure plate can be

snap fitted onto the dia-

phragm of the clamping mod-

ule

1

2

3

Trunnion mounting

ZNCM-…, LNZG-...

Swivel mounting

SNCL-…, SNCB-...

Swivel mounting

SNCB-…, LNG-..., LSN-...

Trunnion flange mounting

ZNCF-…, LNZG-...

Swivel mounting

SNC-…, LSNG-...

Swivel mounting

SNCS-…, LBG-...

Double-acting standard cylinders

with adjustable end-position

cushioning

DNC-...-PPV-RR-SA

Double-acting standard cylinders

with contactless end-position

sensing and adjustable end-

position cushioning

DNC-...-PPV-A-RR-SA

– The modern design and con-

struction saves up to 11%

more space compared to ordi-

nary standard cylinders.

– The proximity sensors sit flush

in the profile slot. There is

therefore no need for an addi-

tional mounting kit.

– An extensive range of mount-

ing accessories makes it possi-

ble to install the solution virtu-

ally anywhere.

– The widest range of variants on

the market provides the right

DNC cylinder for every applica-

tion.

– These standard cylinders com-

ply with the following stan-

dards:

– ISO 6431 (international)

– DIN ISO 6431 and

– VDMA 24 562 (Germany)

– NF E 49 003.1 (France)

– UNI 10 290 (Italy)

Order example:

Part no: 15024244

Type: DNC-50-500-PPV-A-RR-

SA

Double-acting standard cylin-

ders, diameter 50 mm, stroke

500 mm, with contactless end-

position sensing and adjust-


Mounting options

Foot mounting

HNC-…

Flange mounting

FNC-…

Proximity sensor

SME-8-…, SMT-8-...

Standard cylinders DNC-…-RR-SA Ø 32, 40, 50 mm, stroke 10 to 1000 mm


Type [without mag-netic piston]

Part No. Type [with magnetic piston]

Part No. Piston Ø [mm]

Stroke [mm]

Thrust at 6 bar [N]

Return force [N]

Cushioning length [mm]

Connec-tion

DNC-32-…-PPV-RR-SA 15024237 DNC-32-…-PPV-A-RR-SA 15024157 32 10 …1000 483 415 20 G1/8




Standard cylinders DNC-…-RR-SA Ø 32, 40, 50 mm, stroke 10 to 1000 mm


Ø AM B BG E EE EE1 J2 J3 KK L1 L2 LL1 LL2

[mm] Ø d11

32 22 30 16 45 G 1/8 M5 6 5.2 M10x1.25 18 94 22 18

40 24 35 16 54 G 1/4 G 1/8 8 6 M12x1.25 21.5 105 26.5 20

50 32 40 17 64 G 1/4 G 1/8 10.4 8.5 M16x1.5 28 106 33 26

Ø L7 MM PL PL1 RT TG VA VD WH ZJ SW1 SW2 SW3

[mm] Ø f 8

32 3.3 12 15.6 5.5 M6 32.5 4 10 26 120 10 16 6

40 3.6 16 14 7 M6 38 4 10.5 30 135 13 18 6

50 5.1 20 14 7.5 M8 46.5 4 11.5 37 143 17 24 8

Socket head screw with fe-

male thread for mounting

attachments

Regulating screw for adjust-


Sensor slot for proximity

sensor SME/SMT-8

Vacuum suction port

1

2

3

4

Standard servo motor

MTR-AC-...




max. speed should be 0.5

m/s and max. acceleration 1

m/s²





m/s²

– Repetition accuracy: ± 0.1

mm

– Ambient temperature: 0…

+40°C

– Protection class on cover

strip: IP 40

– To simplify ordering only

one type is included in the

Cleanroom product range.

Please contact Festo for

other variations

Accessories:

Single phase motor controller

(for used with PNP sensors)

SEC-AC-305/PO1

Electromechanical axes

Tooth belt drives units with slide,

and recirculating ball bearing

guides housed into a tube profile

with end cover plates.

DGE-25-...-ZR-LK-RV-KG-KF-RR-SA


– Greater flexibility thanks to wide

choice of mounting and assem-

bly options



– Comprehensive range of mount-

ing accessories for multi-axis

combinations

– Optimally adapted motor con-

troller combinations

Order example:

Part no: 15059855

Type DGE-25-500-ZR-LK-RV-KG-KF-

RR-SA

Electrical axes, tooth belt linear

drive, Ø 25 mm, stroke 500 mm

ZR: With tooth belt

LK: No drive on left

RV: Drive shaft on right, front

KG: Drive come with coupling hous-

ing and motor flange

KF: Recirculating ball bearing

guides

RR-SA: Product modified for clean-

room use

Material:

Drive profile barrel: Anodised alu-

minium

Tube with end plates: Aluminium,

nickel plated


Toothed belt drives DGE-...-ZR-LK-RV-KG-KF-RR-SA Ø 25, 40 mm, stroke 100 to 1000 mm

Type Part No. Piston Ø Stroke Max. feed force

[mm] [mm] [N] Type Indexing [mm]

Width [mm]

Effective radius [mm]

Feed constant [mm/rev]

DGE-25-...-ZR-LK-RV-KG-KF-RR-SA 15059855 25 100…1000 260 15LL-3MR-35M-610

3 15 20.05 63

DGE-40-...-ZR-LK-RV-KG-KF-RR-SA 15059856 40 100…1000 610 25LL-5MR-30M-610

5 25 31.83 100

Toothed belt

Foot mounting

HNC-40 for DGE-25-…-RR


Sensor cable

SIM-M8-…-RR

(Refer to page 32)

Optional packages:

Part no: 15060234 Basic servo motor package (used with PNP sensors) for DGE-25-…-ZR-…-RR consisted of: – Motor controller: SEC-AC-305/PO1 – Standard servo motor: MTR-AC-70-3S-AA – Coupling: KSE-30-D08-D11

– Cable set (5 m): KSEC-AC-5

Part no: 15060235 Basic servo motor package (used with PNP sensors) for DGE-40-…-ZR-…-RR consisted of: – Motor controller: SEC-AC-305/PO1 – Standard servo motor: MTR-AC-100-3S-AA – Coupling: KSE-40-D15-D19




1

2

3

4

5

6

Toothed belt Drive shaft/trunnion Coupling housing Profile barrel Driver Slide

1

2

3

45

6

Part no: 15060238 Proximity Sensor package (PNP) – Proximity Sensor: 2 x SIEN-

M8B-PS-S-L – Switching Lug on slide: SF-25

– Sensor brackets: 2 x HW-18/25-M8


Part no: 15060239 Proximity Sensor package (NPN) – Proximity Sensor: 2 x SIEN-

M8NB-PS-S-L – Switching Lug on slide: SF-25

– Sensor brackets: 2 x HW-18/25-M8


Part no: 15060240 Shock absorber package for DGE-25-…-RR-SA – Shock absorber: 2 x YSR-12-

12-C (2x) – Shock absorber retainer: 2 x

KYP-25-SA

Part no: 15060241 Shock absorber package for DGE-40-…-RR-SA – Shock absorber: 2 x YSR-16-

20-C – Shock absorber retainer: 2 x

KYP-40-SA






m/s²





m/s²

– Repetition accuracy: ± 0.02

mm

– Ambient temperature: 0…

+40°C

– Protection class on cover

strip: IP 40

– For x-stroke, please contact

Festo

– To simplify ordering only

one type is included in the


Please contact Festo for

other variations

Accessories:

Single phase motor controller

(for used with PNP sensors)

SEC-AC-305/PO1

Electromechanical axes

Spindle drives units with slide,

and recirculating ball bearing

guides housed into a tube profile

with end cover plates.

DGE-...-SP-KG-KF-RR-SA


– Greater flexibility thanks to

wide choice of mounting and

assembly options



– Comprehensive range of

mounting accessories for

multi-axis combinations

– Optimally adapted motor con-

troller combinations

Order example:

Part no: 15059857

Type DGE-25-500-SP-KG-KF-RR-

SA

Electrical axes, spindle drive, Ø

25 mm, stroke 500 mm

SP: With spindle drive

KG: Drive come with coupling

housing and motor flange

KF: Recirculating ball bearing

guides

RR-SA: Product modified for

cleanroom use

Material:

Drive profile barrel: Anodised

aluminium

Tube with end plates: Aluminium,

nickel plated

Standard servo motor

MTR-AC-...


Spindle drives DGE-…-SP-KG-KF-RR-SA Ø 25, 40 mm, stroke 100 to 1000 mm

Type Part No. Piston Ø

Stroke Max. feed force Spindle Speed

[mm] [mm] [N] Diameter [mm]

Feed pitch [mm/rev]

[rpm] Max speed [m/s]

DGE-25-…-SP-KG-KF-RR-SA 15059857 25 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000

250 12 10 3000 0.5

DGE-40-…-SP-KG-KF-RR-SA 15059858 40 200, 300, 400, 500, 600, 800, 1000

600 20 20 3000 1.0

Foot mounting



Sensor cable

SIM-M8-…-RR

(Refer to page 32)

1

2

3

4

5

6

Toothed belt

Drive shaft/trunnion

Coupling housing

Profile barrel

Driver

Slide

1

2

3

45

6



Optional packages:

Part no: 15060236

Basic servo motor package (used

with PNP sensors) for DGE-25-…-

SP-…-RR-SA consisted of:

– Motor controller:

SEC-AC-305/PO1

– Standard servo motor:

MTR-AC-55-3S-AA

– Coupling: KSE-30-D06-D09


Part no: 15060237

Basic servo motor package (used

with PNP sensors) for DGE-40-…-

SP-…-RR-SA consisted of:

– Motor controller:

SEC-AC-305/PO1

– Standard servo motor:

MTR-AC-70-3S-AA

– Coupling: KSE-30-D11-D12


Part no: 15060238

Proximity Sensor package (PNP)


M8B-PS-S-L



18/25-M8


Part no: 15060239

Proximity Sensor package (NPN)


M8NB-PS-S-L



18/25-M8


Part no: 15060240

Shock absorber package for DGE-

25-…-RR-SA


12-C (2x)


KYP-25-SA

Part no: 15060241

Shock absorber package for DGE-

40-…-RR-SA


20-C


KYP-40-SA




Sensor package


SF-25


sorber retainer



For slot nut NSTL-25


1

2

3

4

5

67

8


Ø [mm] B1 B2 B3 B4 B5 B6 B7 B8 B9 B10 B11 B12 B13 B14 B15

25 103.2 86 76.2 32 9.5 43 31 38 12.5 70 10 5 18.2 49.5 32

40 128.6 112 101.6 55 9 55 45 56.5 12.5 100 12 5 20.8 60 20

Ø [mm] B16 D1 D2 D3 D4 D5 D6 D7 H1 H2 H3 H4 H5 H6 H7

25 29 M6 M6 M4 M4 14 M6 32 98.2 95.2 76.2 38 25.7 9.5 39.2

40 29 M8 M8 M4 M6 25 M6 48 129.6 120.6 101.6 56.5 32.6 9 63

Ø [mm] H8 L1 L2 L3 L4 L5 L6 L7 L8 L9 L10 L11 L12

25 50.2 416 392 105 88 402 312 73 43 40 46 70 50

40 83 613 589 167 88 601 489 120 40 60 56 100 60



Ø [mm] B1 B2 B3 B4 B5 B6 B7 B8 B9 B10 B11 B12 B13 B14 B15 B16 B17

25 103 88.2 86 43 32 9 44.5 16.7 37.5 8.5 10 5 18.2 49.5 35 76.2 55

40 129 114 112 57 55 9 53 19 50 8.5 12 5 20.8 60 50 102 70

Ø [mm] B18 B19 D1 D2 D3 D4 D5 D6 D7 D8 D9 D10 H1 H2 H3 H4 H5

25 32 29 6 M6 M5 M6 M4 G1/8 M6 14 M4 M6 98.2 95.2 38 9 6.1

40 20 29 6 M8 M5 M6 M4 G1/8 M6 25 M6 M6 130 121 56.5 9 7.5

Ø [mm] H6 H7 H8 H9 L1 L2 L3 L4 L5 L6 L7 L8 L9 L10 L11

25 44.5 76.2 25.3 55 257 233 105 88 245 153 73 43 40 50 31.5

40 53 102 34 70 359 335 167 88 347 235 120 40 60 60 64


Sensor package


SF-25


sorber retainer



For slot nut NSTL-25


1

2

3

4

5

67

8


Fluid muscle:

MAS-…-RR

Fluidic Muscle is a tensile actua-

tor which mimics the action of

biological muscles. When pres-

sure is applied, the muscle ex-

tends in its peripheral direction.

This creates a tensile force and a

contraction motion in the longitu-

dinal direction. The areas of ap-

plication are:

– Single-acting actuator

– Pneumatic spring

The features of the muscle are:

– Initial force up to 10 times

higher

– than a cylinder of the same

diameter

– Highly dynamic characteristics

– No stick/slip effect

– Robust design

– Low weight

– Hermetically sealed

Radial adapter

MXAC-R…

Treaded rod

MXAD-T...

Order example:

Order no:

Type: MAS-20-N200-AA-MOHK

Fluid muscle, diameter 20 mm,

stroke 200 mm, muscle open at

both ends with integrated force

compensator and female

thread M16 x1.5

Sizing software

You should select a muscle of

suitable size using the Fluidic

Muscle sizing software.

This software is included in the

DCI attached on this catalogue.

You can also download the

software from the Festo home

page www.festo.com

Mounting options

Axial adapter

MXAC-A…

Blanking adapter

MXAC-B...


Fluid muscle MAS-…-RR Ø 10, 20, 40 mm, stroke 40 to 4500 mm

Type Part no Description Nominal length

Contraction (stroke)

Lifting force

Useful load, freely suspended

Operating pressure

Muscle weight

[mm] Max. Max. [N] Max. [bar] [kg/m]

MAS-10-N...-AA-MCFK-RR

15060444 Muscle open at one end with integrated force compensator and female thread M10 x1.25

40...4500 20% of Nominal length

400 30 8 0.09

MAS-10-N...-AA-MOFK-RR

15060445 Muscle open at both ends with integrated force compensator and female thread M10 x1.25

MAS-20-N...-AA-MCHK-RR


60...4500 1200 60 6 0.16

MAS-20-N...-AA-MOHK-RR

15060447 Muscle open at both ends with integrated force compensator and female thread M16 x1.5

MAS-20-N...-AA-MCGK-RR


MAS-40-N...-AA-MCKK-RR


90...4500 4000 120 6 0.36

MAS-40-N...-AA-MOKK-RR

15060450 Muscle open at both ends with integrated force compensator and female thread M20x1.5

MAS-40-N...-AA-MCIK-RR

15060451 Muscle open at one end with integrated force compensator and female thread M16x1.5

25% of Nominal length


Type D1 D2 L1 L2 L3 L4 L5 Ln T1 T2 X ß1 ß2

±1.0 ±1.0 ±0.3 ±0.4 min. max. min. min.

MAS-10-N...-AA-MCFK-RR M10 x 1.25 M10 x 1.25 24.1 34.1 10 3.5 ±0.2 2.5 40 4500* 15 15 40 27 17

MAS-10-N...-AA-MOFK-RR

MAS-20-N...-AA-MCHK-RR M16 x 1.5 M16 x 1.25 31.5 42.5 11 3.5 ±0.2 5.5 60 24 24 50 41 24

MAS-20-N...-AA-MOHK-RR

MAS-20-N...-AA-MCGK-RR M10 x 1.25 15

MAS-40-N...-AA-MCKK-RR M20 x 1.5 M20 x 1.5 42.5 55.5 13 3.5 ±0.3 6.5 120 30 30 70 60 41

MAS-40-N...-AA-MOKK-RR

MAS-40-N...-AA-MCIK-RR M16 x 1.5 24

Blanking adapter for connect-

ing the cylinder peripherals

and sealing the muscle

Radial adapter for connecting

the cylinder peripherals and

the compressed air supply in

a radial direction

Axial adapter for connecting

the cylinder peripherals and

the compressed air supply in

an axial direction

One-way flow control valve

GRLA

Quick connector CK for the

tubing connection

Quick Star push-in fitting

QS –F for the tubing connec-

tion

Barbed fitting N for the tub-

ing connection

Threaded rod for connecting

the cylinder accessories

Foot mounting HBN for

clamping the muscle

Rod clevis SG for rod eye SGS

Rod eye SGS with spherical

bearing

Coupling pieces KSG/KSZ for

compensating radial devia-

tions

Rod clevis SGA with threaded

rod for direct mounting on

1

2

3

4

5

6

7

8

9

aJ

aA

aB

aC

2

45

6

7

8

9

aJ

aA

aB

1

3

aC

9

aJ

aA

aB

8

45

6

7

1

3

aC

2

4

56

7

Fluid muscle MAS-…-RR Ø 10, 20, 40 mm, stroke 40 to 4500 mm

Valves

In-line valve

MHP1-…-RR

Sub-base valve

MHA1-…-RR

3/2G: Normally close

3/2O: Normally open MHP1-M1H-3/2G-M3-PI-RR

Extremely compact valve series

for the semiconductor and elec-

tronics industries. Directly actu-

ated valves with response

times under 8 ms.

Optimised installation.

– 100% duty cycle and con-

tinuous three shift operation

and guaranteed even on a

manifold block

– Short cycle times

– Precise cycle times

MHA1-M1H-3/2G-0,6-HC-RR

Design flexibility with valve

manifold construction:

– Suitable for expansion up to

22 valves

– Various electrical and pneu-

matic connection options

– Mounting and electrical con-

nection directly on a printed

circuit board

MHP1-M1H-3/2G-M3-TC-RR


Miniature valves MH...1-…-RR 3/2 way solenoid valve

Type [sub-base valve] Part No. Description

Individual valve with M3 connection on sub base

MHA1-M1H-3/2G-0,6-HC-RR 15024913 3/2G; NC 3/2O; NO HC; Horizontal connect TC; Top connect PI; Underneath connect

MHA1-M1H-3/2G-0,6-TC-RR 15024914

MHA1-M1H-3/2G-0,6-PI-RR 15024915

MHA1-M1H-3/2O-0,6-HC-RR 15024916

MHA1-M1H-3/2O-0,6-TC-RR 15024917

MHA1-M1H-3/2O-0,6-PI-RR 15024918

Individual sub base

MHA1-AS-3-M3-RR 15024919 With plug connection

MHA1-AS-3-M3-PI-RR 15024921 With base plug

MHA1-PR2-3-M3-RR 15024922 In-line manifold block, plug connection for 2, 4, 6, 8, 10 valves MHA1-PR4-3-M3-RR 15024923

MHA1-PR6-3-M3-RR 15024924

MHA1-PR8-3-M3-RR 15024925

MHA1-PR10-3-M3-RR 15024926

MHA1-PR2-3-M3-PI-RR 15024927 In-line manifold block with base plugs for 2, 4, 6, 8, 10 valves MHA1-PR4-3-M3-PI-RR 15024928

MHA1-PR6-3-M3-PI-RR 15024929

MHA1-PR8-3-M3-PI-RR 15024936

MHA1-PR10-3-M3-PI-RR 15024937

MHA1-PR4-3-M3-PI-D9-RR 15024938

MHA1-PR6-3-M3-PI-D9-RR 15024940

MHA1-PR8-3-M3-PI-D9-RR 15024941

MHA1-PR10-3--M3-PI-D25-RR 15024942

Multi-pin connector, in-line manifold block with base plugs for 4, 6, 8, 10 valves

Type [In-line valve] Part No. Description

Individual valve with M3 connection on valve body

MHP1-M1H-3/2G-M3-HC-RR 15024883 3/2G; NC 3/2O; NO HC; Horizontal connect TC; Top connect PI; Underneath connect

MHP1-M1H-3/2G-M3-TC-RR 15024884

MHP1-M1H-3/2G-M3-PI-RR 15024885

MHP1-M1H-3/2O-M3-HC-RR 15024886

MHP1-M1H-3/2O-M3-TC-RR 15024887

MHP1-M1H-3/2O-M3-PI-RR 15024888

Individual sub base

MHP1-AS-3-M3-RR 15024889 With plug connection

MHP1-AS-3-M3-PI-RR 15024890 With base plug

MHP1-PR2-3-RR 15024892 In-line manifold block, plug connection for 2, 4, 6, 8, 10 valves MHP1-PR4-3-RR 15024893

MHP1-PR6-3-RR 15024894

MHP1-PR8-3-RR 15024895

MHP1-PR10-3-RR 15024897

MHP1-PR2-3-PI-RR 15024898 In-line manifold block with base plugs for 2, 4, 6, 8, 10 valves MHP1-PR4-3-PI-RR 15024900

MHP1-PR6-3-PI-RR 15024901

MHP1-PR8-3-PI-RR 15024902

MHP1-PR10-3-PI-RR 15024903

MHP1-PR4-3-PI-D9-RR 15024904

MHP1-PR6-3-PI-D9-RR 15024905

MHP1-PR8-3-PI-D9-RR 15024907

MHP1-PR10-3-PI-D25-RR 15024909

Multi-pin connector, in-line manifold block with base plugs for 4, 6, 8, 10 valves

Individual valve with sub base

Sub-base valve (MHA1-…-RR)

Individual sub-base (MHA1-AS-…-RR)

Accessories

In-line valve (MHP1-…)

Individual sub-base (MHP1-AS-…-RR)



Technical data 3/2 way valve

Medium Compressed air, filtered

Nominal flowrate 10 l/min

Design Poppet valve, direct actuated

Width 10 mm

Type of mounting Mounting screw M1.6 x 15

Pneumatic connection

Individual valve 1, 2, 3, 11, 33

M3

Manifold mount 1, 3, 11, 33

M7

2 M3

Nominal size 0.65 mm

Technical data 3/2 way valve

Operating pressure

Normally open 0...6 bar

Normally close 0...8 bar

Response time on/off 4/5 ms

Switching frequency 20 Hz

Temperature range

Individual mount -5…+50°C

Manifold mount -4…+40°C

Material Die-cast zinc

Weight 0.05 kg

Operating voltage 24 V DC ±10%

Power consumption 1W

Duty cycle 100%

Protection class IP 40

Connection type Crimping

Type Part no.

Blanking plug Plug connection MHAP1-BP-3-RR 15024950

Base plug MHAP1-BP-3-PI-RR 15024951

Base plug Plug-in MHAP-PI-RR 15024954

Plug socket with cable

0.5m KMH-0,5-RR 15024955

1.0m KMH-1-RR 15024956

Designation

Base plug MHAP-PI-RR

Plug connection TC

Plug connector HC

Plug connection PI

1

3

4

5

Manifold mounting


Manifold block with base plug

(MHA1-PR-…-M3-PI-RR)

In-line valve (MHP1-…-RR)

Manifold block with base plug

(MHP1-PR-…-M3-PI-RR)



No. of valve position L1 ±0.15 mm L2 ±0.1 mm L3

2 35 27 10

3 45 37 20

4 55 47 30

5 65 57 40

6 75 67 50

7 85 77 60

8 95 87 70

9 105 97 80

10 115 107 90

11 125 117 100

12 135 127 110

13 145 137 120

14 155 147 130

15 165 157 140

16 175 167 150

17 185 177 160

18 195 187 170

19 205 197 180

20 215 207 190

21 225 217 200

22 235 227 210


Blanking plate MHAP1-RR

Plug connection TC

Plug connection HC

Plug connection PI

12

5

6

7

Manifold mounting


Multi-pin, manifold block with base

plug (MHA1-PR-…-M3-PI-D9-RR)

In-line valve (MHP1-…-RR)

Multi-pin manifold block with base

plug (MHP1-PR-…-M3-PI-D9-RR)



No. of valve position L1 ±0.1 mm L2 ±0.15 mm L3

2 70 63 10

4 90 83 30

6 110 103 50

8 130 123 70

10 172 165 90

12 192 185 110

14 212 205 130

16 232 225 150

18 252 245 170

20 272 265 190

22 292 285 210


Sub-D plug 9/25 pins

Blanking plate MHAP1-RR

12

3

Compact performance valve ter-

minal

CPA-SC-…-RR

The CPA-SC Smart Cubic is a com-

pact valve terminal for a wide

range of pneumatic applications.

It permits a high degree of flexi-

bility during planning, installation

and system operation.

– Dimensions: All valves have

the same length of 100 mm

and width of 10 mm. Ultra flat

variants with a height of 40

mm are also available.

– Valve functions: Wide choice,

with 5/2- and 5/3-way func-

tions and double functions

with 2 x 3/2-way valves in one

housing with flow rate of 150

l/min. Special functions are

also available to expand the

range of possible applications.

– Plug-in type electrical connec-

tion.

– Flexibility during installation

and easy servicing, thanks to

the fact that valve are screw

mounted onto metallic mani-

folds.

– Long-lasting spool valves, with

robust metallic housings and

threaded connections


Compact performance individual valve CPA-SC-…-RR 2/2, 3/2, 5/2 and 5/3 way solenoid valve

Type Part No. Description Connections (on aluminum sub-base)

Operating pressure

Electrical data

Electrical connections

Protection class

CPASC82P-10-1SP-AB-N-VLB- ...-RR

15060300 M5: 1, 3, 5

M5: 12, 14, 82, 84

M5: 2, 4

3...8 bar Operating voltage: 24 V DC

Power: 1.0 W per valve

Individual sub-base, plug-in, 0.5 m cable

IP 40 Individual valve for 1 position

Fill in the blank space with the appropriate letters .

Order example:

Part no: 15060300

Type: CPASC82P-10-1SH-AB-N-

VLB-...-RR

CPVSC82P: Compact perform-

ance valve terminal

10: Valve width is 10 mm

1: Valve voltage 24 V DC

SP: Individual sub-base, plug-

in, 0.5 m cable

AB: Working ports on sub-base

with M5 thread connection

N: Manual override not con-

cealed

V: Internal pilot air, ducted

exhaust

LB: Pneumatic supply and ex-

haust ports on left side, with

M5 thread connection

M: 5/2 way single solenoid

valve (160 l/min)

RR: Suitable for cleanroom

application

Important:

To simplify ordering only the

above type is included in the


Please contact Festo for other

variations.

If supply pressure is less than 4

bar or greater than 8 bar, a

separate air supply must be

used for pilot air. To order valve

terminal with external auxiliary

pilot port, please contact Festo.


Compact performance individual valve CPA-SC-…-RR 2/2, 3/2, 5/2 and 5/3 way solenoid valve

The CPA-SC offers the following

valve options. When ordering,

fill in the blank space with the

appropriate letters:

B: 5/3 way mid position pres-

surised valve (160 l/min)

E: 5/3 way mid position ex-

hausted valve (160 l/min)


valve (160 l/min)

N: 2 x 3/2 way valve normally

open (140 l/min)

X: 1 x 3/2 way valve, external

compressed air supply, nor-

mally closed (100 l/min)

G: 5/3 way mid position closed

valve (140 l/min)

I: 2 x 2/2 way valve, normally

close, for vacuum (140 l/min)

J: 5/2 way double solenoid

valve (160 l/min)

K: 2 x 3/2 way valve normally

close (140 l/min)

Compact performance valve ter-

minal

CPA-SC-…-RR

The CPA-SC Smart Cubic is a com-

pact valve terminal for a wide

range of pneumatic applications.

It permits a high degree of flexi-

bility during planning, installation

and system operation.

– Dimensions: All valves have

the same length of 100 mm

and width of 10 mm. Ultra flat

variants with a height of 40

mm are also available.

– Valve functions: Wide choice,

with 5/2 and 5/3 way func-

tions and double functions

with 2 x 3/2-way valves in one

housing with flow rate of 150

l/min. Special functions are

also available to expand the

range of possible applications.

– Electrical connection using

multi-pins sub-D plug connec-

tor.

– Flexibility during installation

and easy servicing, thanks to

the fact that valve are screw

mounted onto metallic mani-

folds.

– Long-lasting spool valves, with

robust metallic housings and

threaded connections

– Plenty of scope for expansions

with 4 to 20 valve positions

possible, with max. 20 valve

coils on one terminal.


Compact performance valve terminal CPA-SC-…-RR 2/2, 3/2, 5/2 and 5/3 way solenoid valve

Type Part No. Description Connections Operating pressure

Electrical data


Protection class

CPASC82P-10-1MS-AB-N-VLD- … -E+CP-RR

15060299 G1/8: 1, 3, 5 (on left, end plate)

M5: 12, 14, 82, 84 (on left, end plate)

M5: 2, 4 (in aluminum sub-base)


Power: 1.0 W per solenoid coil

Sub-D connector with multi-core cable with 20 wires prefabricated at 2.5 m

IP 40 Terminal from 4 to 20 valve positions, in step of 2 valve positions with max. 20 valve coils.

Fill in the blank space with the appropriate letters .

Order example:

Part no: 15060299

Type: CPASC82P-10-1MS-AB-N-

VLD- MMMM-E +CP-RR

CPVSC82P: Compact performance

valve terminal

10: Valve width is 10 mm

1: Valve voltage 24 V DC

MS: Multi-pin with sub-D, 25 pin

connector

AB: Working ports on sub-base

with M5 thread connection

N: Manual override not concealed

V: Internal pilot air, ducted ex-

haust

LD: Pneumatic supply and ex-

haust ports on left side, with

G1/8 thread connection

MMMM: 4 x 5/2 way single sole-

noid valve (160 l/min)

E: English manual included

CP: 2.5 m long connecting cable

for sub-D multi-pin connector

RR: Suitable for cleanroom appli-

cation

Important:

To simplify ordering only one type

is included in the Cleanroom

product range. Please contact

Festo for other variations.


bar or greater than 8 bar, a sepa-

rate air supply must be used for

pilot air. To order valve terminal

with external auxiliary pilot port,

please contact Festo.


Compact performance valve terminal CPA-SC-…-RR 2/2, 3/2, 5/2 and 5/3 way solenoid valve

The CPA-SC offers the following valve options. When ordering, fill in the blank space with the appropriate letters:

B: 5/3 way mid position pres-surised valve (160 l/min)

E: 5/3 way mid position ex-hausted valve (160 l/min)

G: 5/3 way mid position closed valve (140 l/min)

I: 2 x 2/2 way valve, normally close, for vacuum (140 l/min)

J: 5/2 way double solenoid valve (160 l/min)

K: 2 x 3/2 way valve normally close (140 l/min)

positions available for valves with two coils is reduced as shown in the table

Example: With 16 valve positions, the first four positions can be equipped with valves with one or two solenoid coils. At positions 5 to 16, it is possible to fit single-solenoid valves only.

L: Blanking plate

M: 5/2 way single solenoid valve (160 l/min)

N: 2 x 3/2 way valve normally open (140 l/min)

X: 1 x 3/2 way valve, external compressed air supply, nor-mally closed (100 l/min)

Special note when ordering:

Depending on the number of valves configured at any par-ticular time, it is possible to address and trigger valves with one or two solenoid coils. If the number of valve positions is less than 10, it is always possi-ble to address 2 valve coils. With 12 valve positions and more, the number of valve

Valve position

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20

coils

20 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1

20 2 2 2 2 1 1 1 1 1 1 1 1 1 1 1 1

20 2 2 2 2 2 2 2 2 1 1 1 1

20 2 2 2 2 2 2 2 2 2 2

16 2 2 2 2 2 2 2 2

12 2 2 2 2 2 2

8 2 2 2 2

Order example:

Part no: 15059882

Type: CDVI15P-K05-4G-UR-

MMMM-E-Y-RR

CDVI15P: Clean design valve

terminal

K05: Multi-core cable of 5 m

4G: 4 positions with G1/8

pneumatic connections

U: Supply on left side, internal

pilot air supply

R: Resistant to cleaning agents

MMMM: 4 x 5/2 way single

solenoid valve (650 l/min)

E: English manual included

Y: 4 x spacing bolt included

RR: Suitable for cleanroom

application

Important:

To simplify ordering only one

type is included in the Clean-

room product range. Please

contact Festo for other varia-

tions.


bar or greater than 6 bar, a

separate air supply must be

used for pilot air. To order valve

terminal with external auxiliary

pilot port, please contact Festo.

Clean design valve terminal

CDVI15P-…-RR

The basic version of the CDVI

valve terminal is available with

4 or 8 positions. Contrary to

the standard non-cleanroom

version, the cleanroom version

cannot be expanded with 2

position modules for additional

positions.

– Easy to clean as a result of

no shape edges, no small

radius and no corners where

dirt can be trapped

– Ample space between valves

to allow for laminar air flow

– Corrosion resistant material

– The terminals include com-

mon supply lines and ex-

haust for all valves

– The electrical bus lines are

connected to the end plate

– Protection class IP65 and

IP67

Material:

Housing: Polypropylene (PP)

Seal: EPDM

Subbase: Aluminum anodised

Cable: PVC (Chemical resistant)


Clean design valve terminal CDVI15P-…-RR 3/2, 5/2 and 5/3 way solenoid valve

Type Part No. Description Connections Operating pressure

Electrical data


Mounting

CDVI15P-K05-4G-UR-…-E-Y-RR 15059882 Terminal for 4 valves positions .

Fill in the blank space with 4 appropriate letters.

G3/8: 1, 3, 5 (in end plate)

G1/8: 12, 14, 82, 84 (in end plate)

G1/8: 2, 4 (in aluminum profile)


Power: 1.5 W per valve; holding current reduced to 50% after 20 ms.

Multi-core cable with 26 wires prefabricated at 5 m

CDVI15P-K05-8G-UR-...-E-Y-RR 15060242 Terminal for 8 valves positions.

Fill in the blank space with 8 appropriate letters.

Mounting with 2 screw at end plate or use spacer both provided

Mounting:

With spacer bolt provided


Clean design valve terminal CDVI15P-…-RR 3/2, 5/2 and 5/3 way solenoid valve

The CDVI offers the following

valve combination options.

When ordering, fill in the blank

space with the appropriate

letters:

A: Blanking plate for double

positions

B: 5/3 way mid position pres-

surised valve (500 l/min)

C: Blanking plate for single

position

E: 5/3 way mid position ex-

hausted valve (400 l/min)

G: 5/3 way mid position closed

valve (600 l/min)

H: 2 x 3/2 way valve, 1 nor-

mally open and 1 normally

close (300 l/min)

J: 5/2 way double solenoid

valve (650 l/min)

K: 2 x 3/2 way valve normally

close (300 l/min)


valve (650 l/min)

N: 2 x 3/2 way valve normally

open (300 l/min)

One-way flow control valves with

exhaust-air flow control

GRLA-…-RR

are used to regulate exhaust air

flow rates with double-acting

cylinders. In the reverse direction,

the air flows freely through the

non-return valve with full cross-

sectional flow.

Technical data:

Operating pressure: 0.2...10 bar

Temperature range: -10…+60 °C

Material:

GRL… : Die-cast zinc

CRGLRA-…: X5 CrNiMoNb 18 10

GRLA-M5-PK…-RR GRLZ-M5-PK-…-RR GRLO-M5-PK-…-RR

CRGRLA-…-RR

One-way flow control valves

with supply air flow control

GRLZ-…-RR

are used to regulate flow rates

with single-acting cylinders. In

the reverse direction, the air

flows freely through the non-

return valve with full cross-

sectional flow.

Flow control valve

GRLO-…-RR

are used to regulate flow rates.

The flow control action is op-

erative in both directions.

GRLA-...-RR GRLZ-…-RR GRLO-…-RR

GRLA-…-PK-…-RR GRLZ-…-PK-…-RR


Flow control valves GRL…-…-RR, CRGRLA-…-RR Flowrate: 0...610 l/min

Type Part No. Connec-tion

Std nominal flowrate [l/min]

GRLZ-M3-RR 15024862 M3 0..18

GRLZ-M5-B-RR 15024863 M5 0...95

GRLZ-1/8-B-RR 15024864 G1/8 0...360

GRLZ-1/4-B-RR 15024865 G1/4 0...610

GRLZ-M5-PK-3-B-RR 15024867 M5 0...83

GRLZ-M5-PK-4-B-RR 15024868 M5 0...83

GRLZ-1/8-PK-3-B-RR 15024869 G1/8 0...110

GRLZ-1/8-PK-4-B-RR 15024870 G1/8 0...230

GRLZ-1/8-PK-6-B-RR 15024871 G1/8 0...300

GRLZ-1/4-PK-4-B-RR 15024872 G1/4 0...260

GRLZ-1/4-PK-6-B-RR 15024873 G1/4 0...540



GRLO-M3-RR 15024875 M3 0...18

GRLO-M5-B-RR 15024876 M5 0...95

GRLO-M5-PK-3-B-RR 15024877 M5 0...83

Type Part No. Connection


GRLA-M3-RR 15024847 M3 0..18

GRLA-M5-B-RR 15024848 M5 0...95

GRLA-1/8-B-RR 15024849 G1/8 0...340

GRLA-1/4-B-RR 15024851 G1/4 0...610

GRLA-M5-PK-3-B-RR 15024855 M5 0...83

GRLA-M5-PK-4-B-RR 15024856 M5 0...83

GRLA-1/8-PK-3-B-RR 15024857 G1/8 0...110

GRLA-1/8-PK-4-B-RR 15024858 G1/8 0...230

GRLA-1/8-PK-6-B-RR 15024859 G1/8 0...300

GRLA-1/4-PK-4-B-RR 15024860 G1/4 0...260

GRLA-1/4-PK-6-B-RR 15024861 G1/4 0...540



CRGRLA-M5-B-RR 15024852 M5 0...95

CRGRLA-1/8-B-RR 15024853 G1/8 0...340

CRGRLA-1/4-B-RR 15024854 G1/4 0...610

Connection Tightening torque [Nm]

M3 0.3

M5 1.5

G1/8 5.5

G1/4 11

GRLA-...-RR GRLZ-…-RR GRLO-…-RR

GRLA-…-PK-…-RR GRLZ-…-PK-…-RR

GRLA-M5-PK…-RR GRLZ-M5-PK-…-RR GRLO-M5-PK-…-RR

CRGRLA-…-RR


Flow control valves GR…-…-RR, CRGRLA-…-RR Flowrate: 0...610 l/min

Type B D H H1 L L1 L2 ß

GRL...-M3-RR 5 M3 9 6.5 13.3 2.5 6.4 4.5

GRL...-M5-B-RR 10 M5 17.5 12.5 17.6 4 7.1 9

GRL...-1/8-B-RR 16 G 28 20 25.2 5.3 10.3 14

GRL...-1/4-B-RR 20 G 36 26 30.8 8.2 13.2 17


GRL...-M5-PK-3-B-RR

10 M5 19.7 14.7 17.6 4 8.5 9

GRL...-M5-PK-4-B-RR

10 M5 21.7 16.7 17.6 4 8.5 9


GRL...-1/8-PK-3-B-RR

16 G1/8 27.1 19.1 25.2 5.3 13.4 14


16 G1/8 30.2 22.2 25.2 5.3 13.4 14


16 G1/8 30.3 22.3 25.2 5.3 12 14


20 G1/4 34.2 24.2 30.8 8.2 16.9 17


20 G1/4 34.3 24.3 30.8 8.2 17.2 17

Type B D H H1 L L1 L2 L3 ß

CRGRLA-M5-B-RR

10 M5 17.5 12.5 23.2 4 7.1 2.5 9

CRGRLA-1/8-B-RR

16 G1/8 28 20 33.7 5.3 10.3 3.5 14

CRGRLA-1/4-B-RR

20 G1/4 36 26 38.8 8.3 13.2 3.5 17


One way flow control valve

GR-…-RR

GR-M3-RR

GR-1/8-B-RR

These valves are used to regu-

late air flow, e.g. to control the

piston speeds of single and

double-acting cylinders, or as a

flow control valve for back pres-

sure nozzles.. A non-return

valve blocks air flow in one

direction. Air is only able to

flow via the cross section which

is adjusted with the throttle

screw. Air flows freely in the

other direction through the

open non-return valve.

– Tamper-proof cap for secur-

ing against inadvertent read-

justment

– Hex nut for panel mounting

– Precision thread for accurate

flow rate adjustment

GR-M5-B-RR

GRA-1/4-B-RR

Flow control valves GR-…-RR Flowrate: 0...420 l/min


Nominal size [mm]


Full flow [l/min]

Pressure range [bar]

Temperature range [°C]

Material Weight [kg]

GR-M3-RR 15024878 M3 1 0...29 - 0.3...8 -10…+60 Al 0.002

GR-M5-B-RR 15024879 M5 2 0...94 115 0.5...10 -20…+60 Al 0.020

GR-1/8-B-RR 15024880 G1/8 3 0...220 217 0.5...10 -20…+60 Al 0.035

GRA-1/4-B-RR 15024881 G1/4 4.5 0...420 780 0.1...10 -20…+75 ZnAl, brass 0.180

1 Tamper-proof cap

2 Hex nut for panel mount

Air Preparation units and accessories

Filter 5.0 µm with manual con-

densate drain

LF-…-D-5M-MICRO-RR

– Sintered filter with condensate

separator

– Vertical mounting position, ±5°

– Good particle and condensate

separation

– High flow rate with minimal

pressure drop

– 5 µm filter cartridges


Filter for D-Micro series LF-…-D-M5-MICRO-RR Flowrate: 170...290 l/min

Type Part No. Connection Std nominal flowrate at 7 bar

Weight Input pressure

Temperature range

Condensate volume

[5.0 µm] [l/min] [kg] [bar] [°C] [ml]

LF-M5-D-5M-MICRO-RR 15059897 M5 (Thread screw in housing)

170 0.044 0...10 -10…+60 3

LF-M7-D-5M-MICRO-RR 15059898 M7 (Thread in connection plate)

280 0.064

LF-1/8-D-5M-MICRO-RR 15059899 G1/8 (Thread in connection plate)

290 0.064

LF-M5-D-M5-MICRO-RR

LF-M7-D-M5-MICRO-RR

LF-1/8-D-M5-MICRO-RR

Accessories

Mounting bracket

HFOE-D-MICRO

Connecting plate kit

PBL-M7-D-MICRO

PBL-1/8-D-MICRO

Threaded pin set

FRB-D-MICRO

LF-M5-D-M5-MICRO-RR

LF-M7-D-M5-MICRO-RR LF-1/8-D-M5-MICRO-RR

Type B1 D1 H1

LF-M7-D-5M-MICRO-RR - M7 -

LF-1/8-D-5M-MICRO-RR - G1/8 -

Filter for D-Micro series LF-…-D-M5-MICRO-RR Flowrate: 170...290 l/min

Retainer set HFOE-D-MICRO

(not included in scope of deliv-

ery)

Barbed fitting for plastic tubing

of I.D. 3 mm

1

2


Micro filter 0.01 µm with manual

condensate drain

LFMA-…-D-…-RR

Micro filter 1 µm with manual

condensate drain

LFMB-…-D-…-RR

– High efficiency filter for special

requirements

– Optional filter cartridges 1 µm

or 0.01 µm

– Air quality to ISO 8573-1

– Available as pre-assembled

filter combination

– Optional manual condensate

drain, or integrated, automatic

condensate drain Sate

– Operating pressure; 1...16 bar

– Temperature range; -10…+60°C

– Mounting position; Vertical ±5°

– Filter housing of die-cast zinc

or aluminium

LFMA:

ISO class 1: for particles

ISO class 2: for oil aerosols

Residual oil content 0.01 mg/m³

Filter efficiency 99.9999 %

LFMB:

ISO class 2: for particles

ISO class 3: for oil aerosols

Residual oil content 0.5 mg/m³

Filter efficiency 99.99 %

Characteristic curve for flow

rate

LFMB-1/4-D-MINI

LFMB-1/2-D-MIDI

LFMB-1-D-MAXI


rate

LFMA-1/4-D-MINI

LFMA-1/2-D-MIDI

LFMA-1-D-MAXI

Microfilter LFMA-…-RR and LFMB-…-RR Flowrate: 130...1250 l/min


Std nominal flowrate



Condensate volume

Weight

[0.01 µm] [l/min] [1 µm] [l/min] [ml] [kg]

LFMA-1/8-D-MINI-RR 15024732 G1/8 130 LFMB-1/8-D-MINI-RR 15024743 G1/8 250 22 0.250

LFMA-1/4-D-MINI-RR 15024733 G1/4 160 LFMB-1/4-D-MINI-RR 15024744 G1/4 300

LFMA-3/8-D-MINI-RR 15024734 G3/8 180 LFMB-3/8-D-MINI-RR 15024748 G3/8 310

LFMA-1/4-D-MIDI-RR 15024735 G1/4 350 LFMB-1/4-D-MIDI-RR 15024749 G1/4 500 43 0.650

LFMA-3/8-D-MIDI-RR 15024736 G3/8 380 LFMB-3/8-D-MIDI-RR 15024750 G3/8 700



LFMA-1/2-D-MAXI-RR 15024740 G1/2 750 LFMB-1/2-D-MAXI-RR 15024755 G1/2 1150 80 1.2

LFMA-3/4-D-MAXI-RR 15024741 G3/4 900 LFMB-3/4-D-MAXI-RR 15024756 G3/4 1200

LFMA-1-D-MAXI-RR 15024742 G1 950 LFMB-1-D-MAXI-RR 15024757 G1 1250

Standard flow rate Standard flow rate



Dif

fere

nti

al

pre

ssu

re

Dif

fere

nti

al

pre

ssu

re

Dif

fere

nti

al

pre

ssu

re

Dif

fere

nti

al p

ress

ure

Dif

fere

nti

al p

ress

ure

Dif

fere

nti

al p

ress

ure


Micro filter 1 µm followed by 0.01

µm with manual condensate drain

LFMBA-…-D-…-RR

– Available as pre-assembled filter

combination

– Available with manual conden-

sate drain, or integrated, auto-

matic condensate drain

– High efficiency filter for special

requirements

– Optional filter cartridges with 1

and 0.01m µ

– Air quality to ISO 8573-1

– ISO class 1: for particles

– ISO class 2: for oil aerosols

– Filter efficiency 99.9999%

– Residual oil content 0.01 mg/m³

– Operating pressure; 1...16 bar

– Temperature range; -10…+60°C

– Mounting position; Vertical ±5°

– Filter housing of die-cast zinc or

aluminium


rate

LFMBA-1/4-D-MINI

LFMBA-1/2-D-MIDI

LFMBA-1-D-MAXI


Microfilter LFMBA-…-RR Flowrate: 125...600 l/min

Type [1 µm followed by 0.01 µm]

Part No. Connection Std nominal flowrate Condensate volume

Weight

[l/min] [ml] [kg]

LFMBA-1/8-D-MINI-RR 15024758 G1/8 125 22 0.5

LFMBA-1/4-D-MINI-RR 15024762 G1/4 130

LFMBA-3/8-D-MINI-RR 15024763 G3/8 140

LFMBA-1/4-D-MIDI-RR 15024764 G1/4 300 43 1.3

LFMBA-3/8-D-MIDI-RR 15024765 G3/8 350

LFMBA-1/2-D-MIDI-RR 15024766 G1/2 350

LFMBA-3/4-D-MIDI-RR 15024767 G3/4 350

LFMBA-1/2-D-MAXI-RR 15024769 G1/2 550 80 2.4

LFMBA-3/4-D-MAXI-RR 15024770 G3/4 550

LFMBA-1-D-MAXI-RR 15024772 G1 600

1 2

Standard flow rate

Standard flow rate

Standard flow rate

Dif

fere

nti

al

pre

ssu

re

Dif

fere

nti

al p

ress

ure

D

iffe

ren

tia

l p

ress

ure

Accessories

Mounting bracket

HFOE-D-MINI

HFOE-D-MIDI/MAXI


Microfilter LFMA-…-RR and LFMB-…-RR Grade of filteration: 0.01 µm or 1 µm

Type B1 B2 B3 B6 B7 D1 D4 D5 D7 H1 H2 H3 H4 H5 L1 L3 L5 T1 ß2

LFMA/B-1/8-D-MINI-RR 64 52 40 39 2 G1/8 M4 4.3 38 20 43 35 11 17.5 144 124 60 7 22

LFMA/B-1/4-D-MINI-RR 64 52 40 39 2 G1/4 M4 4.3 38 20 43 35 11 17.5 144 124 60 7 22

LFMA/B-3/8-D-MINI-RR 70 52 40 39 2 G3/8 M4 4.3 38 20 43 35 11 17.5 144 124 60 7 22

LFMA/B-1/4-D-MIDI-RR 85 70 55 47 3 G1/4 M5 5.3 52 32 70 60 22 24.5 179 151 80 8 24

LFMA/B-3/8-D-MIDI-RR 85 70 55 47 3 G3/8 M5 5.3 52 32 70 60 22 24.5 179 151 80 8 24

LFMA/B-1/2-D-MIDI-RR 85 70 55 47 3 G1/2 M5 5.3 52 32 70 60 22 24.5 179 151 80 8 24

LFMA/B-3/4-D-MIDI-RR 85 70 55 47 3 G3/4 M5 5.3 52 32 70 60 22 24.5 179 151 80 8 24

LFMA/B-1/2-D-MAXI-RR 96 80 66 53 3 G1/2 M5 5.3 65 32 70 60 22 24.5 203 170 90 8 24

LFMA/B-3/4-D-MAXI-RR 96 80 66 53 3 G3/4 M5 5.3 65 32 70 60 22 24.5 203 170 90 8 24

LFMA/B-1-D-MAXI-RR 116 91 66 53 3 G1 M5 5.3 65 40 70 60 22 24.5 203 170 90 8 24

1

2

Barbed fittings for plastic tub-

ing (order code 7134 PCN-4)

Metal bowl guard

Mounting bracket HFOE (not

included in scope of delivery)

Installation dimensions

3

4


Microfilter LFMBA-…-RR Grade of filteration: 0.01 µm and 1 µm

Type B1 B2 B3 B4 B6 B7 D1 D4 D5 D7 H1 H2 H3 H4 H5 L1 L3 L5 T1 ß2

LFMBA-1/8-D-MINI-RR 104 92 40 80 39 2 G1/8 M4 4,3 38 20 43 35 11 17.5 144 124 60 7 22

LFMBA-1/4-D-MINI-RR 104 92 40 80 39 2 G1/4 M4 4.3 38 20 43 35 11 17.5 144 124 60 7 22

LFMBA-3/8-D-MINI-RR 110 92 40 80 39 2 G3/8 M4 4.3 38 20 43 35 11 17.5 144 124 60 7 22

LFMBA-1/4-D-MIDI-RR 140 125 55 110 47 3 G1/4 M5 5.3 52 32 70 60 22 24.5 179 151 80 8 24

LFMBA-3/8-D-MIDI-RR 140 125 55 110 47 3 G3/8 M5 5.3 52 32 70 60 22 24.5 179 151 80 8 24

LFMBA-1/2-D-MIDI-RR 140 125 55 110 47 3 G1/2 M5 5.3 52 32 70 60 22 24.5 179 151 80 8 24

LFMBA-3/4-D-MIDI-RR 140 125 55 110 47 3 G3/4 M5 5.3 52 32 70 60 22 24.5 179 151 80 8 24

LFMBA-1/2D-MAXI-RR 162 146 66 132 53 3 G1/2 M5 5.3 65 32 70 60 22 24.5 203 170 90 8 24

LFMBA-3/4D-MAXI-RR 162 146 66 132 53 3 G3/4 M5 5.3 65 32 70 60 22 24.5 203 170 90 8 24

LFMBA-1-D-MAXI-RR 182 157 66 132 53 3 G1 M5 5.3 65 40 70 60 22 24.5 203 170 90 8 24

Barbed fittings for plastic tub-

ing (order code 7134 PCN-4)

Metal bowl guard

1

2

Mounting bracket HFOE (not

included in scope of delivery)


3

4

– The valve can be combined with

service units of series D

– Input pressure; 0...16 bar

– Temperature range; -10...+60 °C

– Material; Die-cast zinc / alumin-

ium

Accessories

Mounting bracket

HFOE-D-MINI

HFOE-D-MIDI/MAXI

Manual on/off valve with

threaded connection plate

HE-...-D-…-RR

– 3/2-way manual non-return

valve

– The system is exhausted when

the valve is switched off.

– Ducted exhaust air is possible

via a threaded connection.

– The switching position is im-

mediately discernable.

– Standard padlock as shut off

protection


Manual on/off valves HE-…-RR Flowrate: 1000...6500 l/min

Type Part No. Con-nection


Weight [kg]

HE-1/8-MINI-RR 15024804 G1/8 1000 0.192

HE-1/4-MINI-RR 15024805 G1/4 1500

HE-3/8-MINI-RR 15024807 G3/8 1600

HE-1/4-MIDI-RR 15024808 G1/4 2600 0.511

HE-3/8-MIDI-RR 15024810 G3/8 3200

HE-1/2-MIDI-RR 15024811 G1/2 3600

HE-3/4-MIDI-RR 15024814 G3/4 3800

HE-1/2-MAXI-RR 15024815 G1/2 5600 0.796

HE-3/4-MAXI-RR 15024816 G3/4 6000

HE-1-MAXI-RR 15024819 G1 6500

Type B1 B2 B3 B4 B5 B6 D1 D2 D3 D4 D5 H1 H2 H3 H4 H5 L1 L2 T1

HE-...-D-MINI-RR 64 52 40 39 2 32 G1/8 24 M4 4.3 G1/8 20 43 35 11 17.5 98 128 7

G1/4

70 G3/8

HE-...-D-MIDI-RR 85 70 55 47 3 44 G1/4 34 M5 5.3 G1/4 32 70 60 22 24.5 119 169 8

G3/8

G1/2

G3/4

HE-...-D-MAXI-RR 96 80 66 53 3 44 G1/2 38 M5 5.3 G3/8 32 70 60 22 24.5 132 203

G3/4

116 91 G1 40

8

2

31

Mounting bracket HFOE-D-

… (not included in scope of

delivery)

1 Hole for pad lock 3

Precision pressure regulator with-

out pressure gauge and mounting

bracket

LRP-…-RR-SA

– Precision pressure adjustment

possible both in static and dy-

namic applications

– Pressure hysteresis of character-

istic flow rate curve < 0.02 bar

– Good response characteristics

during rapid modification of input

pressure or flow rate

– Input pressure fluctuations are

almost entirely compensated

– Connection; G1/4

– Input pressure; 1 to 12 bar

– Temperature range; -10…+60 °C

The precision pressure regulator

regulates the operating pressure

(secondary side) via a diaphragm

pilot control, which acts upon the

main seat, thereby achieving better

regulating characteristics.

Internal air consumption as a func-

tion of internal pressure.

No internal air consumption during

flow.

(air consumption at output)

Precision pressure gauge, di-

ameter 40 mm, for direct

mounting on to LRP

MAP-…-RR

– These precision pressure

gauges are used for pressure

measurement (e.g. for preci-

sion pressure regulators type

LRP-�-...) and display in con-

trol systems.

– Compared to standard pres-

sure gauges, these gauges

offer a higher precision class

and a bar/psi scale with fine

graduations.

– They do not contain any

paint-wetting impairment

substances.

– Pressure gauges should only

be operated at up to 3/4 of

their full scale value during

continuous operation (dead

load).


Precision pressure regulator and gauge LRP-…-RR-SA, MAP-…-RR Flowrate: 800...2300 l/min

Type Part No. Std nominal flowrate [l/min]

Control pres-sure [bar]

LRP-1/4-0,7-RR-SA 15024451 800 0.05...0.7

LRP-1/4-2,5-RR-SA 15024452 1800 0.05...2.5

LRP-1/4-4-RR-SA 15024453 2000 0.05...4

LRP-1/4-10-RR-SA 15024454 2300 0.1...10


Dia. [mm]

MAP-40-1-1/8-EN-RR [for LRP-0,7-RR-SA] 15024977 G1/8 40

MAP-40-4-1/8 EN-RR [for LRP-2,5-RR-SA] 15024980 G1/8 40

MAP-40-6-1/8-EN-RR [for LRP-4-RR-SA] 15024986 G1/8 40

MAP-40-16-1/8-EN-RR [for LRP-10-RR-SA] 15024988 G1/8 40

Mounting bracket HR-1/4-P

(not included in scope of

delivery)

Precision pressure gauge

MAP-40-...-1/8-EN (not in-

cluded

in scope of delivery)

Filter throttle

Vacuum suction port

Air release port

1

2

34

5Input pressure

Inte

rna

l a

ir c

on

sum

pti

on

The micro regulator come with 27

mm diameter gauge. It has a grid

width dimension of 25 mm and

connection size of M5. With con-

nection plate at both ends, M7

and G1/8 female thread is possi-

ble.

LR-…-D-7-MICRO-RR-SA

The micro size regulator is a new

family with many accessories.

This range optimised the used of

compressed air supply solutions

for the miniaturised pneumatic

components used in the electron-

ics industry.

– Also suitable for installation

into panel

– Two pressure gauge connec-

tions for different fitting op-

tions

– Size: Directly actuated dia-

phragm regulator (without

internal air consumption or

primary pressure compensa-

tion)

– Good regulator characteristics

with minimal pressure hystere-

sis

– High flow rate

– Pressure range: 7 bar

– Setting values are secured by

locking the rotary knob

Accessories

Mounting bracket

HFOE-D-MICRO


PBL-M7-D-MICRO

PBL-1/8-D-MICRO

Threaded pin set

FRB-D-MICRO


Regulator and gauge for D-Micro series LR-…-D-7-MICRO-RR-SA Flowrate: 120...300 l/min

Type Part No. Connection Std nominal flowrate at 7 bar


Output pressure

Temperature range

[5.0 µm] [l/min] [kg] [bar] [bar] [°C]

LR-M5-D-7-MICRO-RR-SA 15059884 M5 (Thread screw in housing)

120 0.07 0...10 0.5...7 -10…+60

LR-M7-D-7-MICRO-RR-SA 15059886 M7 (Thread in connection plate)

300 0.09

LR-1/8-D-7-MICRO-RR-SA 15059888 G1/8 (Thread in connection plate)

280 0.09

LR-M5-D-7-MICRO-RR-SA

LR-M7-D-7-MICRO-RR-SA

LR-1/8-D-7-MICRO-RR-SA

LR-M5-D-7-MICRO-RR

LR-M7-D-7-MICRO-RR LR-1/8-D-7-MICRO-RR


Regulator and gauge for D-Micro series LR-…-D-7-MICRO-RR-SA Flowrate: 120...300 l/min

Type A

LR-M7-D-5M-MICRO-RR M7

LR-1/8-D-5M-MICRO-RR G1/8

Second pressure gauge con-

nection

Vacuum suction port M5

1

2

Second pressure gauge con-

nection


1

2

Branching module, without

non-return valve, with threaded

connection plate

FRM-...-D-…-RR

– Branching module for com-

pressed air distribution for

attachment of additional

modules (pressure regulat-

ing valve, pressure switch...).

– Several additional air con-

nections for more flexibility.

– Can be used as an intermedi-

ate outlet for different air

qualities.

– Any mounting position

– Temperature range; -10…+60

°C

– Material; Die-cast zinc

Branching module, without

non-return valve, without

threaded connection plate for

D-Micro series

FRZ-D-MICRO-RR

– This branching module is

mounted after the regulator

type LR-…-MICRO-RR-SA or

after the filter regulator type

LFR-…-MICRO-RR-SA

Accessories

Mounting bracket

HFOE-D-MICRO


PBL-M7-D-MICRO

PBL-1/8-D-MICRO

Branching module, with non-

return valve and threaded con-

nection plate

FRM-H-...-D-…-RR

– An integrated non-return

valve prevents return flow of

lubricated compressed air.

– The branching module can

be combined with service

units of series D.

– Any mounting position

– Temperature range; -10…+60

°C

– Material; Die-cast zinc

Accessories

Mounting bracket

HFOE-D-MINI

HFOE-D-MIDI/MAXI


Branching modules FRZ-…-RR and FRM-…-RR Flowrate: 250...17400 l/min



Input pressure



Input pressure

Weight

[l/min] [bar] [l/min] [bar] [kg]

FRZ-D-MICRO-RR 15059911 M5 250 0...10 - - - - - -

FRM-1/8-D-MINI-RR 15024773 G1/8 1500 0...16 FRM-H-1/8-D-MINI-RR 15024790 G1/8 1300 0.15...16 0.210

FRM-1/4-D-MINI-RR 15024775 G1/4 3300 FRM-H-1/4-D-MINI-RR 15024793 G1/4 2000

FRM-3/8-D-MINI-RR 15024776 G3/8 3300 FRM-H-3/8-D-MINI-RR 15024794 G3/8 2100

FRM-1/4-D-MIDI-RR 15024779 G1/4 3500 0.2...16 FRM-H-1/4-D-MIDI-RR 15024795 G1/4 3400 0.2...16 0.520

FRM-3/8-D-MIDI-RR 15024780 G3/8 7000 FRM-H-3/8-D-MIDI-RR 15024797 G3/8 5500



FRM-1/2-D-MAXI-RR 15024786 G1/2 11700 0.25...16 FRM-H-1/2-D-MAXI-RR 15024800 G1/2 9600 0.25...16 0.900

FRM-3/4-D-MAXI-RR 15024787 G3/4 20000 FRM-H-3/4-D-MAXI-RR 15024801 G3/4 15000

FRM-1-D-MAXI-RR 15024789 G1 17400 FRM-H-1-D-MAXI-RR 15024802 G1 13400

G1/8

M5 M5

M5

1

2

2

21

2

2

2


Branching modules FRZ-…-RR and FRM-…-RR Flowrate: 250...17400 l/min

Type B1 B2 B3 B4 B5 D1 D3 D4 D5 D6 H1 H2 H3 H4 H5 L1 T1

FRM-...-H-...-D-MINI-RR 64 52 40 39 2 G1/8 M4 4,3 G1/4 G1/4 20 43 35 11 17.5 42 7

G1/4

70 G3/8

FRM-...-H-...-D-MIDI-RR 85 70 55 47 3 G1/4 M5 5.3 G1/2 G1/4 32 70 60 22 24.5 59 8

G3/8

G1/2

G3/4

FRM-...-H-...-D-MAXI-RR 96 80 66 53 3 G1/2 M5 5.3 G3/4 G1/4 32 70 60 22 24.5 70 8

G3/4

116 G1

FRM-...

Mounting bracket HFOE –D-...

(not included in scope of

delivery)

1FRZ-D-MICRO-RR

Filter regulator with manual con-

densate drain with 5 µm filter

cartridges and gauge

LFR-…-D-5M-MICRO-RR-SA

– Pressure range: 7 bar


tions for flexible installation

– 5 µm filter cartridges

– Available with manual conden-

sate drain

– Space saving design with filter

and regulator in a single unit

– Good particle separation and

high flow rate

– Good regulating characteristics

with minimal hysteresis

– Setting values are secured by

locking the rotary knob

LFR-M5-D-7-5M-MICRO-RR-SA

LFR-M7-D-7-5M-MICRO-RR-SA

LFR-1/8-D-7-5M-MICRO-RR-SA

Filter regulator for D-Micro series LFR-…-D-5M-MICRO-RR-SA Flowrate: 110...280 l/min

Cleanroom class ISO 45(FS209E class 100)

Type Part No. Connection Std nominal flow rate at 7 bar


Temperature range

Condensate volume

[5.0 µm] [l/min] [kg] [bar] [°C] [ml]

LFR-M5-D-5M-MICRO-RR-SA 15059901 M5 (Thread screw in housing)

110 0.08 1...10 -10…+60 3

LFR-M7-D-5M-MICRO-RR-SA 15059904 M7 (Thread in connection plate)

280 0.09

LFR-1/8-D-5M-MICRO-RR-SA 15059905 G1/8 (Thread in connection plate)

250 0.09

Output pressure

[bar]

0.5...7

Accessories

Mounting bracket

HFOE-D-MICRO


PBL-M7-D-MICRO

PBL-1/8-D-MICRO

Threaded pin set

FRB-D-MICRO

LFR-M5-D-M5-MICRO-RR

LFR-M7-D-M5-MICRO-RR LFR-1/8-D-M5-MICRO-RR

Filter regulator for D-Micro series LFR-…-D-5M-MICRO-RR-SA Flowrate: 110...280 l/min


Type A

LR-M7-D-5M-MICRO-RR M7

LR-1/8-D-5M-MICRO-RR G1/8

Barbed fitting for plastic

tubing

Second pressure gauge

connection

Installation dimension

above ground level


1

2

3

4


tubing


connection

Installation dimension

above ground level


1

2

3

4




LFR-...-D-…-RR-SA



cartridges but without gauge

LFR-...-D-O-…-RR-SA




LFR-...-D-5M-…-RR-SA


tions for flexible installation

– Sintered filter with water

separator

– Usual 40 µm filter cartridges.

Optional with 5 µm filter

cartridges

– Space-saving design with

filter and regulator in a sin-

gle unit

– Good particle separation and

high flow rate

– Good regulating characteris-

tics with minimal hysteresis

– Setting values are secured

by rotary knob.

– Input pressure; 1...16 bar

– Operating pressure;

0.5 ...12 bar

– Temperature range;

-10…+60 °C

– Mounting; Vertical ±5°

MINI and MIDI sizes

Directly actuated diaphragm

regulator valve

MAXI size

Pilot-actuated piston regulating

valve

Accessories

Mounting bracket

HFOE-D-MINI

HFOE-D-MIDI/MAXI

Filter regulator LFR-…-RR-SA Flowrate: 750...10000 l/min


Type Part No. Type Part No. Connec-tion

Std nominal flowrate Condensate volume

Weight

LFR-1/8-D-MINI-RR-SA 15024394 LFR-1/8-D-O-MINI-RR-SA 15024425 G1/8 750 22 0.460

LFR-1/4-D-MINI-RR-SA 15024396 LFR-1/4-D-O-MINI-RR-SA 15024426 G1/4 1400

LFR-3/8-D-MINI-RR-SA 15024397 LFR-3/8-D-O-MINI-RR-SA 15024428 G3/8 1600

LFR-1/4-D-MIDI-RR-SA 15024398 LFR-1/4-D-O-MIDI-RR-SA 15024429 G1/4 2000 43 0.920

LFR-3/8-D-MIDI-RR-SA 15024399 LFR-3/8-D-O-MIDI-RR-SA 15024430 G3/8 3100



LFR-1/2-D-MAXI-RR-SA 15024382 LFR-1/2-D-O-MAXI-RR-SA 15024387 G1/2 9400 80 1.470

LFR-3/4-D-MAXI-RR-SA 15024385 LFR-3/4-D-O-MAXI-RR-SA 15024388 G3/4 9700

LFR-1-D-MAXI-RR-SA 15024386 LFR-1-D-O-MAXI-RR-SA 15024391 G1 10000

LFR-1/8-D-5M-MINI-RR-SA 15024440 LFR-1/8-D-5M-O-MINI-RR-SA 15024458 G1/8 650 22 0.460

LFR-1/4-D-5M-MINI-RR-SA 15024441 LFR-1/4-D-5M-O-MINI-RR-SA 15024459 G1/4 1200

LFR-3/8-D-5M-MINI-RR-SA 15024442 LFR-3/8-D-5M-O-MINI-RR-SA 15024460 G3/8 1350

LFR-1/4-D-5M-MIDI-RR-SA 15024443 LFR-1/4-D-5M-O-MIDI-RR-SA 15024461 G1/4 1600 43 0.920

LFR-3/8-D-5M-MIDI-RR-SA 15024444 LFR-3/8-D-5M-O-MIDI-RR-SA 15024462 G3/8 2400



LFR-1/2-D-5M-MAXI-RR-SA 15024436 LFR-1/2-D-5M-O-MAXI-RR-SA 15024455 G1/2 7580 80

LFR-3/4-D-5M-MAXI-RR-SA 15024438 LFR-3/4-D-5M-O-MAXI-RR-SA 15024456 G3/4 7600

LFR-1-D-5M-MAXI-RR-SA 15024439 LFR-1-D-5M-O-MAXI-RR-SA 15024457 G1 8000

1.470

]l/min] [ml] [kg]

Filter regulator LFR-…-RR-SA Flowrate: 750...10000 l/min


Type B1 B2 B3 B4 B5 B6 B7 D1 D2 D3 D4 D5

LFR-1/8-D-MINI-RR-SA 64 28 40 92 76 36 75 G1/8 31 43 M4 41

LFR-1/4-D-MINI-RR-SA G1/4

LFR-3/8-D-MINI-RR-SA 70 G3/8

LFR-1/4-D-MIDI-RR-SA 85 46 55 111,5 95 44 91 G1/4 50 58 M5 49

LFR-3/8-D-MIDI-RR-SA G3/8



LFR-1/2-D-MAXI-RR-SA 96 51 66 124 107 50 100 G1/2 31 43 M5 49

LFR-3/4-D-MAXI-RR-SA G3/4

LFR-1-D-MAXI-RR-SA 116 G1

Type D6 H1 H2 H3 H4 L1 L2 L3 T1 SW1 SW2

LFR-1/8-D-MINI-RR-SA 38 20 38 35 9 193 69 60 7 14

LFR-1/4-D-MINI-RR-SA

LFR-3/8-D-MINI-RR-SA

LFR-1/4-D-MIDI-RR-SA 52 32 45,5 60 13 250 99 80 8 14 24

LFR-3/8-D-MIDI-RR-SA



LFR-1/2-D-MAXI-RR-SA 65 32 51 60 9 252 82 90 8 14 24

LFR-3/4-D-MAXI-RR-SA

LFR-1-D-MAXI-RR-SA 40

24

Barbed fittings for plastic

tubing

Metal bowl guard


Connection

Pressure sensor SDE1- ... -R

Mounting bracket HFOE-D-

… (not included in scope of

delivery)


Vacuum suction port

1

2

3

4

5

6

7

Corrosion and acid resistant air

reservoir tested in accordance with

EC directive 87/404 and designed

to EC standard EN 286-2.

CRVZS-…-RR

When these reservoirs are com-

bined with time-delay and flow con-

trol valves, it is possible to achieve

very long delay times.

The reservoirs can be used to

compensate for pressure fluc-

tuations, and act as accumula-

tors in cases of sudden air con-

sumption.

The retaining clamps required

for mounting are included.

Air reservoir CRVZS-…-RR Capacity: 0.1, 0.4, 0.75, 2, 5, 10, 20 l


Type Part No. Connection Volume ± 10% Material Medium Design Weight

CRVZS-0,1-RR 15024675 G1/8 0.1l X5 CrNi 18 10, retainer: X12 CrNi 17 7

Air or Nitrogen Seamless vessel 0.226 kg

CRVZS-0,4-RR 15024677 G1/4 0.4l 0.543 kg

CRVZS-0,75-RR 15024678 G1/4 0.75l 0.736 kg

CRVZS-2-RR 15024681 G1/2 2l 1.681 kg

CRVZS-5-RR 15024682 G1, G3/8 5l 3.581 kg

CRVZS-10-RR 15024684 G1, G3/8 10l 6.459 kg

Type B B1 B2 D D1 D2 D3 H H1 L L2 L3

±2 ±2 ±1 ±1 ±1 min. max.

CRVZS-0,1-RR 51 14 – 40 G1/8 15 42 43 28 132 13 50 10 6 19

CRVZS-0,4-RR 54 14 – 52 G1/4 19 54 50 34 240 13 150 14 9 27

CRVZS-0,75-RR 60 20 79 70 G1/4 19 72 61 34 248 13 140 14 9 27

L1

CRVZS-2-RR

CRVZS-5-RR

CRVZS-10-RR

Air reservoir CRVZS-…-RR


Capacity: 0.1, 0.4, 0.75, 2, 5, 10, 20 l

Polyurethane tubing is highly

resistant to abrasion, pressure

and wear, offers outstanding

resistance to kinks, excellent

tensile and tear propagation

strength, very good cushioning

capacity and temperature flexibil-

ity.

PUN-…-RR

It is also highly resistant to oil,

grease, oxygen and ozone. The

level of deformation remains low

even with long term stress. Each

of the different polyurethane

types has different characteris-

tics.

These tubing are suitable for CN,

CK and QS-F range of fittings.

The PUN tubing is approved for

the following use:

– Outside diameter conform to

Cetop RP 54 P

– Halogen free

– Free of paint-wetting impair-

ment substances to FN 942

010 Part 1

– German Technical Control

Board (TUV) tested

Media

Compressed air and vacuum


Tubing PUN-…-RR Polyurethane tubing

Type Part No. Outside Ø Inside Ø Material Min. bending radius Weight Tubing colour

[mm] [mm] [mm] [kg/m]

PUN-3x0,5-BL-RR 15059981 3.0 2.1 12.5 0.004 Blue

PUN-3x0,5-SW-RR 15059982 Black

PUN-4x0,75-BL-RR 15059983 4.0 2.6 17.0 0.009 Blue


PUN-6x1-BL-RR 15060055 6.0 4.0 26.5 0.019 Blue

PUN-6x1-SW-RR 15060056 Black

PUN-8x1,25-BL-RR 15060057 8.0 5.7 37.0 0.030 Blue


PUN-10x1,5-BL-RR 15060059 10.0 7.0 54.0 0.049 Blue


PUN-12x2-BL-RR 15060061 12.0 8.0 62.0 0.077 Blue

PUN-12x2-SW-RR 15060062 Black

PUN-16x2,5-BL-RR 15060063 16.0 11.0 88.0 0.129 Blue


Polyurethane

Resistance

Chemicals Not suitable

Micobes Not suitable

UV radiation Good (Black version)

Hydrolysis Restricted

Stress cracks Good suitable

Shore hard-ness (D)

52

Operating pressure

Max. operating temperature

[bar] [°C]

0 60

2 60

4 60

6 60

8 50

10 30

Push in fitting range

Threaded connection: M5 to G1/2

Tubing O.D.: 3 to 12 mm

Push in connector with male

straight thread

QS-F-…-RR

– Wide variety of variants, e.g.

rotatable

– Brass fitting, nickel plated

– With sealing ring or

moulded-on sealing rim

– Operating pressure –

0.95...10 bar

– Ambient temperature:

0...150 °C

– Material on collet: Stainless

high alloy steel

– Material: Brass with nickel

and chrome plated

– Approved for used in food

processing


Push in fitting series QS-F-…-RR


For tubing Nominal size]

Material

Ø D1 Type NW Ø D4 L L3 L4 L5 SW1 ß SW2 ß

QS-F-M5-4-RR 15059957 M5 PUN-4-... 2.6 Brass fitting, nickel and chrome plated

8.0 20.5 1.2 4.0 15.0 9 2.5

QS-F-M5-6-RR 15059958 M5 PUN-6-... 2.6 8.0 23.0 1.2 4.0 17.3 11 2.5

QS-F-M7-4-RR 15059851 M7 PUN-4-... 2.6 10.2 22.0 2.5 5.5 15.0 9 2.5

QS-F-M7-6-RR 15059852 M7 PUN-6-... 3.6 11.0 25.3 1.2 5.5 17.3 11 3.5

QS-F-1/8-4-RR 15059828 G1/8 PUN-4-... 2.6 13.5 19.5 3.5 5.5 15.0 9 2.5

QS-F1/8-6-RR 15059832 G1/8 PUN-6-... 4.2 13.5 24.8 5.0 5.5 17.3 11 4

QS-F1/8-8-RR 15059833 G1/8 PUN-8-... 5.2 12.8 26.5 1.5 5.5 18.5 13 5

QS-F-1/4-6-RR 15059834 G1/4 PUN-6-... 4.2 17.0 22.8 4.0 6.5 17.3 11 4

QS-F-1/4-8-RR 15059835 G1/4 PUN-8-... 6.2 17.0 24.0 3.0 6.5 18.5 13 6

QS-F-1/4-10-RR 15059837 G1/4 PUN-10-... 7.3 16.0 28.9 4.0 6.5 20.4 16 7

QS-F-1/4-12-RR 15059853 G1/4 PUN-12-... 7.3 16.0 31.9 4.0 6.5 22.1 19 7

QS-F-3/8-8-RR 15059838 G3/8 PUN-8-... 6.2 20.0 24.0 3.0 7.5 18.5 13 6

QS-F-3/8-10-RR 15059839 G3/8 PUN-10-... 8.3 21.0 29.4 3.0 7.5 20.4 16 8

QS-F-3/8-12-RR 15059841 G3/8 PUN-12-... 10.3 22.0 31.0 3.0 7.5 22.1 19 10

QS-F-1/2-10-RR 15059842 G1/2 PUN-10-... 8.3 24.0 28.9 3.0 9.0 20.4 16 8

QS-F-1/2-12-RR 15059843 G1/2 PUN-12-... 10.3 24.0 31.4 3.0 9.0 22.1 19 10

Dimensions

Barbed fitting range

Threaded connection: M3 to G3

Tubing I.D.: 2 to 6 mm

Barbed fitting with sealing ring

CN-…-RR

A wide variety of variants:

– with sealing ring

– with sealing with barbed

fitting for plastic tubing PP

PU PP

– corrosion and acid-resistant

variants rotatable

Tubing connectors with barbed

fitting . These connectors make

tubing connection easier, par-

ticularly when assembling con-

trol cabinets or mounting

frames.


Barbed fitting series CN-…-RR

Type Part No. Connection For tubing Nominal size Material Dimensions

D Type [mm] L L1 L2 ß

CN-M3-PK-2-RR 15024571 M3 PUN-3-... 1.5 X 5 CrNi 18 9 10 2.7 5 4.5

CN-M3-PK-3-RR 15024572 M3 PUN-4-... 1.9 11 2.7 6 4.5

CN-M5-PK-2-RR 15024573 M5 PUN-3-... 1.5 Steel 14.5 3.5 6 8

CN-M5-PK-3-RR 15024574 M5 PUN-4-... 2.5 18.2 3.5 9.7 8

CN-M5-PK-4-RR 15024577 M5 PUN-6-... 2.5 20.2 3.5 11.7 8

CN-1/8 -PK-3-RR 15024578 G1/8 PUN-4-... 2.5 Al 21.7 5 9.7 13

CN-1/8 -PK-4-RR 15024579 G1/8 PUN-6-... 3.2 23.7 5 11.7 13

CN-1/8-PK-6-RR 15024580 G1/8 PUN-8-... 5.3 26 5 14 13

CN-1/4-PK-4-RR 15024581 G1/4 PUN-6-... 3.2 26.2 6.5 11.7 17

CN-1/4-PK-6-RR 15024582 G1/4 PUN-8-... 5.3 28.5 6.5 14 17

CN-3/8-PK-6-RR 15024583 G3/8 PUN-8-... 5.3 30.5 8.5 14 19

CRCN-M5-PK-2-RR 15024600 M5 PUN-3-... 1.5 X 5 CrNi 18 9 13.5 3.5 6 7

CRCN-M5-PK-3-RR 15024602 M5 PUN-4-... 2.5 17.5 3.5 9.7 7

CRCN-M5-PK-4-RR 15024603 M5 PUN-6-... 2.5 19.2 3.5 11.7 7

CRCN-1/8 -PK-3-RR 15024604 G1/8 PUN-4-... 2.5 20.2 5 9.7 13

CRCN-1/8-PK-4-RR 15024605 G1/8 PUN-6-... 3.2 22.2 5 11.7 13

CRCN-1/8-PK-6-RR 15024606 G1/8 PUN-8-... 5.3 24 5 14 13

CRCN-1/4-PK-4-RR 15024607 G1/4 PUN-6-... 3.2 25.2 6.5 11.7 17

CRCN-1/4-PK-6-RR 15024608 G1/4 PUN-8-... 5.3 27.5 6.5 14 17

CRCN-1/4-PK-6-RR 15024609 G1/4 PUN-8-... 5.3 29.5 8.5 14 19


tubing

1

L-barbed fitting. Rotatble 360°

LCN-…-RR

L-barbed fitting. Rotatble 360°

LCNH-…-RR




For tubing Nominal size

Material Weight Dimensions

D Type [mm] [kg] H H1 L L1 L2 ß

LCN-M3-PK-2-B-RR 15024619 M3 PUN-3-... 1.3 X5 CrNi 189, die-cast zinc

0.002 12.8 8.1 9.6 2.7 6 4.5

LCN-M3-PK-3-RR 15024620 M3 PUN-4-... 2 0.002 14 8.7 13.3 2.7 9.7 4.5

LCN-M5-PK-2-RR 15024623 M5 PUN-3-... 1.3 Steel, die-cast zinc

0.004 15.3 9.1 9.6 3.5 6 8

LCN-M5-PK-3-RR 15024624 M5 PUN-4-... 2 0.005 19.4 13.3 14.7 3.5 9.7 8

LCN-M5-PK-4-RR 15024625 M5 PUN-6-... 2.9 0.006 20.9 13.9 16.7 3.5 11.7 8

LCN-1/8-PK-3-RR 15024626 G1/8 PUN-4-... 2 Al, die-cast zinc

0.009 21.2 13.6 17.5 5 9.7 13

LCN-1/8-PK-4-RR 15024627 G1/8 PUN-6-... 2.9 0.01 22.6 14.1 19.5 5 11.7 13

LCN-1/8-PK-6-RR 15024628 G1/8 PUN-8-... 4.9 0.011 24.6 15.1 22 5 14.2 13

LCN-1/4-PK-4-RR 15024629 G1/4 PUN-6-... 2.9 0.013 25.6 15.6 19.5 6.5 11.7 17

LCN-1/4-PK-6-RR 15024630 G1/4 PUN-8-... 4.9 0.015 27.5 16.6 22 6.5 14.2 17

LCN-3/8-PK-6-RR 15024631 G3/8 PUN-8-... 4.9 0.02 29.5 16.6 22 8.5 14.2 19

LCNH-M5-PK-2-RR 15024636 M5 PUN-3-... 1.3 Steel, die-cast zinc

0.008 26.2 20.7 9.6 3.5 6 8

LCNH-M5-PK-3-RR 15024637 M5 PUN-4-... 2 0.009 28 21.9 14.7 3.5 9.7 8

LCNH-M5-PK-4-RR 15024638 M5 PUN-6-... 2.9 0.01 29.5 22.5 16.7 3.5 11.7 8

LCNH-1/8-PK-3-RR 15024641 G1/8 PUN-4-... 2 Al, die-cast zinc

0.013 31.8 24.2 17.5 5 9.7 13

LCNH-1/8-PK-4-RR 15024642 G1/8 PUN-6-... 2.9 0.014 33.2 24.7 19.5 5 11.7 13

LCNH-1/8-PK-6-RR 15024643 G1/8 PUN-4-... 4.9 0.016 35.1 25.7 22 5 14.2 13

LCNH-1/4-PK-4-RR 15024644 G1/4 PUN-6-... 2.9 0.021 36.2 26.2 19.5 6.5 11.7 17

LCNH-1/4-PK-6-RR 15024645 G1/4 PUN-8-... 4.9 0.022 38.1 27.2 22 6.5 14.2 17

LCNH-3/8-PK-6-RR 15024646 G3/8 PUN-8-... 4.9 0.029 40.1 27.2 22 8.5 14.2 19


tubing

1


tubing

1

T-barbed fitting. Rotatble 360°

TCN-…-RR

Male bulkhead connector with

barbed fitting

SCN-...




D Type [mm] H H1 L L1 L2 ß

TCN-M3-PK-2-RR 15024584 M3 PUN-3-... 1.5 X 5 CrNi189, die-cast zinc

12.8 8.1 19.2 2.7 6 4.5

TCN-M3-PK-3-RR 15024585 M3 PUN-4-... 2 14 8.7 26.6 2.7 9.7 4.5

TCN-M5-PK-2-RR 15024588 M5 PUN-3-... 1.3 Steel, die-cast zinc

15.3 9.1 19.2 3.5 6 8

TCN-M5-PK-3-RR 15024590 M5 PUN-4-... 2 19.4 13.3 29.4 3.5 9.7 8

TCN-M5-PK-4-RR 15024591 M5 PUN-6-... 2.9 20.9 13.9 33.4 3.5 11.7 8

TCN-1/8-PK-3-RR 15024592 G1/8 PUN-4-... 2 Al, die-cast zinc

21.2 13.6 35 5 9.7 13

TCN-1/8-PK-4-RR 15024593 G1/8 PUN-6-... 2.9 22.6 14.1 39 5 11.7 13

TCN-1/8-PK-6-RR 15024594 G1/8 PUN-8-... 4.9 24.6 15.1 44 5 14.2 13

TCN-1/4-PK-4-RR 15024595 G1/4 PUN-6-... 2.9 25.6 15.6 39 6.5 11.7 17

TCN-1/4-PK-6-RR 15024596 G1/4 PUN-8-... 4.9 27.5 16.6 44 6.5 14.2 17

TCN-3/8-PK-6-RR 15024597 G3/8 PUN-8-... 4.9 29.5 16.6 44 8.5 14.2 19

Type Part No. For tubing Nominal size Material Weight Dimensions

Type [mm] [kg] B D L L2 L3 ß

SCN-PK-2-RR 15024632 PUN-3-... 1.5 Al 0.001 2.2 M4 23.4 6 6 7

SCN-PK-3-RR 15024633 PUN-4-... 1.9 0.004 3.2 M6 x 0.75 35.3 9.7 8 10

SCN-PK-4-RR 15024634 PUN-6-... 2.8 0.007 3.5 M10 x 1 42.4 11.7 10 13

SCN-PK-6-RR 15024635 PUN-8-... 4.8 0.01 4 M12 x 1 48 14.2 10 17


tubing

1


tubing

1

Barbed T connector

FCN-…-RR



Type Part No. For tubing Type Nomi-nal size

Material Weight Dimensions

D1 D2 [mm] [kg] B B1 D3 H H1 H2 L L1 L2

FCN-3-PK-2-B-RR 15024611 PUN-3-... PUN-3-... 1.3 Die-cast zinc

0.005 4 6 3.2 15.7 3.1 2.6 28 8 6

FCN-3-PK-3-RR 15024612 PUN-4-... PUN-4-... 2 0.008 5.2 8.4 4.3 17.9 3.5 3.9 38.4 10 9.7

FCN-3-PK-3/2-RR 15024613 PUN-4-... PUN-3-... 2/1.3 0.008 5.2 8.4 4.3 21.6 3.5 3.9 38.4 10 9.7

FCN-3-PK-4-RR 15024614 PUN-6-... PUN-6-... 2.9 0.012 7 10.2 4.3 22 3.5 4.3 44.4 12 11.7

FCN-3-PK-4/3-RR 15024615 PUN-6-... PUN-4-... 2.9/2 0.012 7 10.2 4.3 24 3.5 4.3 44.4 12 11.7

FCN-3-PK-6-RR 15024616 PUN-8-... PUN-8-... 4.9 0.016 8.8 12 4.3 25.9 4.4 5.3 49.4 12 14.2

FCN-3-PK-6/4-RR 15024617 PUN-8-... PUN-6-... 4.9/2.9 0.016 8.8 12 4.3 28.4 4.4 5.3 49.4 12 14.2


tubing

1

Quick connector range

Threaded connection: M5 to G1/2

Tubing I.D.: 3 to 13 mm

– Wide variety of variants, e.g.

rotatable

– Aluminum or polymer design

– With sealing ring or moulded-

on sealing rim

Quick connector with male thread

CK-…-RR


Quick connector series CK-…-RR


D Type (mm) B L ß ß1

CK-M5-PK-3-RR 15024505 M5 PUN-4-... 2.4 Steel/Al with sealing ring

3.7 17.4 7 8

CK-M5-PK-4-RR 15024506 M5 PUN-6-... 2.4 3.7 18.7 10 –

CK-1/8-PK-3-RR 15024507 G1/8 PUN-4-... 2.4 Al, blue ano-dised with sealing ring

5 20.4 13 8

CK-1/8-PK-4-RR 15024508 G1/8 PUN-6-... 3.4 5 23.5 13 12

CK-1/8-PK6-RR 15024509 G1/8 PUN-8-... 5.4 5 23.6 13 14

CK-1/4-PK-4-RR 15024510 G1/4 PUN-6-... 3.4 6.5 26.5 17 12

CK-1/4-PK-6-RR 15024511 G1/4 PUN-8-... 5.4 6.5 26.6 17 14

CK-1/4-PK-9-RR 15024512 G1/4 PUN-12-... 8 6.5 29.9 17 19

CK-3/8-PK-6-RR 15024513 G3/8 PUN-8-... 5.3 8.5 28.6 19 14

CK-3/8-PK-9-RR 15024514 G3/8 PUN-12-... 8 8.5 31.9 19 19

CK-3/8-PK-13-RR 15024515 G3/8 PUN-16-... 12 8.5 34.7 24 24

CK-1/2-PK-13-RR 15024516 G1/2 PUN-16-... 12 11.5 37.7 24 24

Quick connector with female

thread and sealing ring

ACK-…-RR

L-quick connector. Rotatable

LCK-…-RR




D Type (mm)] B L ß ß1

ACK-1/8-PK-3-RR 15024528 G1/8 PUN-4-... 2.4 Al, blue ano-dised

9 23.9 13 8

ACK-1/8-PK-4-RR 15024529 G1/8 PUN-6-... 3.4 9 27 13 12

ACK-1/8-PK-6-RR 15024531 G1/8 PUN-8-... 5.3 9 27 13 14

ACK-1/4-PK-4-RR 15024532 G1/4 PUN-6-... 3.4 12 30 17 12

ACK-1/4-PK-6-RR 15024533 G1/4 PUN-8-... 5.3 12 30 17 14

ACK-3/8-PK-6-RR 15024534 G3/8 PUN-8-... 5.3 12 31 19 14

ACK-3/8-PK-9-RR 15024535 G3/8 PUN-12-... 8 15 37.4 19 19

ACK-1/2-PK-13-RR 15024539 G1/2 PUN-16-... 12 15 40.2 27 24



Material Dimensions

D Type [mm] B C H H1 L L1 ß

LCK-M5-PK-3-RR 15024545 M5 PUN-4-... 2 Die-cast zinc with 2 seal-ing rings

4.2 10 21.1 16.1 18.2 5.7 7

LCK-M5-PK-4-RR 15024546 M5 PUN-6-... 2.9 3.4 11 21.1 16.1 18.2 5.7 7

LCK-1/8-PK-3-RR 15024547 G1/8 PUN-4-... 2 6.4 16 27.1 19.1 22 6 13

LCK-1/8-PK-4-RR 15024548 G1/8 PUN-6-... 2.9 6 16 30.2 22.2 27.5 9 13

LCK-1/8-PK-6-RR 15024549 G1/8 PUN-8-... 4.9 6 16 30.3 22.3 27.5 9 13

LCK-1/4-PK-4-RR 15024550 G1/4 PUN-6-... 2.9 7 20 34.2 24.2 28.5 9 17

LCK-1/4-PK-4-RR 15024551 G1/4 PUN-6-... 4.9 6.8 20 34.3 24.3 28.5 9.1 17

LCK-1/4-PK-9-RR 15024552 G1/4 PUN-12-... 8 7.3 20 37.6 27.6 33.7 11.6 17

LCK-3/8-PK-6-RR 15024553 G3/8 PUN-8-... 4.9 8.6 25 39.3 26.8 31 9.1 22

LCK-3/8-PK-9-RR 15024554 G3/8 PUN-12-... 8 9.1 25 42.6 30.1 36.5 11.6 22

LCK-1/2-PK-13-RR 15024555 G1/2 PUN-16-... 11.7 12.7 30 49.2 34.2 50 16.5 27

L-quick connector. Rotatable with

sealing rings OL-…

LCKN-…-RR

T quick connector. Rotatable

TCK-…-RR

Type Part No. Conec-tion


Material Dimensions

D Type [mm] H H1 L L1 L2 ß

LCKN-M5-PK-3-RR 15024560 M5 PUN-4-... 1.7 Die-cast zinc/aluminium with sealing ring

22.2 15.2 20.1 3.1 16.1 7

LCKN-M5-PK-4-RR 15024561 M5 PUN-6-... 2.6 23.8 15.8 23.2 3.1 19.2 7

LCKN-1/8-PK-3-RR 15024562 G 1/8 PUN-4-... 1.7 24.6 15.9 25.4 4.7 18.9 13

LCKN-1/8-PK-4-RR 15024565 G1/8 PUN-6-... 2.6 27 16.3 28.5 4.7 22 13

LCKN-1/8-PK-6-RR 15024567 G1/8 PUN-4-... 4.6 30.3 18.6 28.6 4.7 22.1 13

LCKN-1/4-PK-4-RR 15024568 G1/4 PUN-6-... 2.6 30 17.7 28.5 6.3 22 17

LCKN-1/4-PK-6-RR 15024569 G1/4 PUN-8-... 4.6 33.3 20 28.6 6.3 22.1 17

LCKN-3/8-PK-6-RR 15024570 G3/8 PUN-8-... 4.6 35.3 20.8 28.6 7.5 22.1 19





Material Dimensions

D Type [mm] B C H L L1 ß

TCK-M5-PK-3-RR 15024517 M5 PUN-4-... 2.4 Die-cast zinc with 2 sealing rings

4.2 10 21.1 18.2 5.7 7

TCK-M5-PK-4-RR 15024520 M5 PUN-6-... 3.4 3.4 11 21.1 18.2 5.7 7

TCK-1/8-PK-3-RR 15024521 G1/8 PUN-4-... 2.4 6.4 16 38.2 22 6 13

TCK-1/8-PK-3-RR 15024522 G1/8 PUN-4-... 3.4 6 16 44.4 27.5 9 13

TCK-1/8-PK-6-RR 15024523 G1/8 PUN-8-... 5.3 6 16 44.6 27.5 9 13

TCK-1/4-PK-4-RR 15024524 G1/4 PUN-6-... 3.4 7 20 48.4 28.5 9 17

TCK-1/4-PK-6-RR 15024525 G1/4 PUN-8-... 5.3 6 20 48.6 28.5 9.1 17

TCK-3/8-PK-6-RR 15024526 G3/8 PUN-8-... 5.3 Al, blue anodised 9 25 53.6 31.5 9 22

TCK-3/8-PK-9-RR 15024527 G3/8 PUN-12-... 8 9.1 25 60.2 36.5 11.7 22

TCK-1/2-PK-13-RR 15024672 G1/2 PUN-16-... 12 12.5 30 68.4 50 16.7 27

Bulkhead quick connector

SCK-…-RR

Bulkhead quick connector with

female thread and sealing ring

QCK-…-RR



Type Part No. For tubing Nominal size Material Dimensions

Type [mm] B max. B1 D L ß

SCK-PK-3-RR 15024541 PUN-4-... 2.4 Al, blue ano-dised/steel

8 3.2 M6x0.75 34 10

SCK-PK-4-RR 15024542 PUN-6-... 3.4 10 3.5 M10x1 43 13

SCK-PK-6-RR 15024543 PUN-8-... 5.3 10 4 M12x1 44 17

SCK-PK-9-RR 15024544 PUN-12-... 8 10 5 M16x1 53 22



Mate-rial

Dimensions

D I.D. [mm] B B1 B2 B3 max.

D1 L1 ß ß1

QCK-M5-PK-3-B-RR 15024556 M5 PUN-4-... 2.4 Al,blue ano-dised/steel

6 3.2 10 8 M6x0.75 31 7 10

QCK-1/8-PK-4-B-RR 15024557 G1/8 PUN-6-... 3.4 8 3.5 13.5 10 M10x1 40 13 13

QCK-1/4-PK-6-B-RR 15024558 G1/4 PUN-8-... 5.3 12 4 18 10 M12x1 45 17 17

QCK-3/8-PK9-B-RR 15024559 G3/8 PUN-12-... 8 12 5 18.6 10 M16x1 50 19 22

This captive sealing ring is effective

even when only gently tightened, is

reusable and can be used at hy-

draulic pressures of up to 30 bar.

OL-…-RR

Operating pressure –1 ... +30 bar

Temperature range –30 ... +100 °C


Sealing rings OL-…-RR Ø M5, M10, M12, M14, M16, M22, G1/8, G1/4, G3/8, G1/2, G3/4

Type Part No. For thread Material Max. permissible tightening torque Weight [kg]

OL-M5-RR 15024659 M5 Stainless steel & NBR

2 Nm 0.001

OL-1/8-RR 15024660 G1/8 4 Nm

OL-1/4-RR 15024661 G1/4 11 Nm

OL-3/8-RR 15024662 G3/8 AI & NBR 40 Nm 0.002

OL-1/2-RR 15024663 G1/2 50 Nm

OL-3/4-RR 15024664 G3/4 100 Nm

OL-M6-RR 15024665 M6 St. steel & NBR - 0.001

OL-M10-RR 15024666 M10 Brass & NBR 12 Nm 0.006

OL-M12-RR 15024667 M12 20 Nm 0.007

OL-M14-RR 15024668 M14 35 Nm 0.008

OL-M16-RR 15024669 M16 - 0.096

OL-M22-RR 15024670 M22 - 0.025

Pressure and vacuum switch SDE-5-…-RR


Pressure switch: 0...10 bar

SDE5-D10-…-RR

Vacuum switch: 1-...0 bar

SDE-V1-…-RR

– The right pressure switch for

every application

– Increased functional reliabil-

ity thanks to simple, de-

pendable pressure monitor-

ing in pneumatic systems

– Festo plug and work

– Simple teach-in program-

ming

– Reduced costs thanks to

simple installation

– Modular system for opti-

mum configuration

For tubing of O.D. of 3 mm

Part No. For tubing of O.D. of 4 mm

Part No. For tubing of O.D. of 6 mm

Part No. Pneumatic connection

Overload pressure

SDE5-V1-O-Q3E-P-M8-RR

15060111 SDE5-V1-O-Q4E-P-M8-RR

15060125 SDE5-V1-O-Q6E-P-M8-RR

15060129 At one end 5 bar

SDE5-V1-O-Q3-P-M8-RR

15060112 SDE5-V1-O-Q4-P-M8-RR

15060126 SDE5-V1-O-Q6-P-M8-RR

15060130 At both ends

SDE5-D10-O-Q3E-P-M8-RR

15060113 SDE5-D10-O-Q4E-P-M8-RR

15060127 SDE5-D10-O-Q6E-P-M8-RR

15060131 At one end 15 bar

SDE5-D10-O-Q3-P-M8-RR

15060114 SDE5-D10-O-Q4-P-M8-RR

15060128 SDE5-D10-O-Q6-P-M8-RR

15060132 At both ends

Technical data

Constructional design Piezoresistive pressure sensor with display

Different between teach-in and switching pressure

±1.5% of the measuring range final value

Repeatability ±0.3% of the measuring range final value

Temperature range 0...50 °C

Temperature of medium 0...50 °C

Response time 4 ms

Electrical connection Normally open, M8 connector. Refer to SIM-M8…-RR cable on page 32

Pneumatic connection Push-in connector at one or both ends, 3, 4 or 6 mm O.D. tube

Type of mounting Using interlinking wall bracket provided

Operating voltage DC 15 … 30 V

Max. idle current 20 mA

Max. output current 100 mA

Protection class to EN 60529

IP40

Switching output Semiconductor switching element, positive switching (PNP)

Type of display LED, visible from all sides

Weight of sensor (bracket) 19 g (5.5 g)

Plug M8 x 1, 3-pin, pin allo-

cation to EN 60 947-5-2

Yellow LED display, visible

from all sides

Pneumatic connection QS-

3, QS-4 or QS-6

Pneumatic connection QS-

3, QS-4 or QS-6 or blanking

plug with SDE5-…- Q…E-…

1

2

3

4

Bracket for wall mounting

Through-hole for mounting

screw

Angled connection socket

SIM-M8- 3WD

Straight connection socket

SIM-M8-3GD

5

6

7

8

Voltage: 15...30 V DC, Pressure: -1...10 bar

Standard design:

With conventional configuration:

Supply and vacuum port turned

by 90°, since the drawn-in flow

from V to R is diverted by 90°.

Inline design:

With supply and vacuum port

arranged in a line. This design

allows the generator to be

mounted directly in a tubing line

to save space.

Technical data

Medium: Compressed air, filter 40

µm, unlubricated

Operating pressure: 1...8 bar

Max. vacuum: 0.89 bar

Max. suction rate: 90 l/min

Temperature range: 0...60 °C

High suction volume

Up to 90 l/min which results in very short evacuation times.

…… High vacuum ___ High suction volume


Vacuum generator VN-…-RR High vacuum of 0.89 vac bar or High suction rate at 90 l/min

– Vacuum generators for gen-

eration of vacuum in the

higher range to –0.89 bar

– Vacuum generators for high

suction rates resulting in

very short evacuation times

– Housing width 14 mm, 18

mm

– Plastic type

– Vacuum generators which

functions on the ejector prin-

ciple

– Simple, compact design

– Can be used directly in the

workplace, making them very

effective

– Versatile connection options:

– With screw in thread

– T-shaped housing

– Straight housing without

exhaust port for space-

saving assembly in a tubing

line or directly in the suction

cup holder

– Laval nozzles in four nominal

sizes:

– 0.45 mm

– 0.7 mm

– 0.95 mm

– 1.4 mm

High vacuum

Up to 0.89 bar

System comparison

High vacuum vs. High suction

volume

The first type of generator has

been optimised for the genera-

tion of high vacuum at com-

paratively low suction volume

rates. The second type of gen-

erator, on the other hand, can

achieve very short evacuation

times because of the high suc-

tion volume rate at relatively

low vacuum.

High vacuum High suction rate Nominal sizes

Housing width

Design

Type Part No. Type Part No. [mm] [mm] 1P [D1] 2V [D2] 3R [D3]

VN-05-H-T3-PI4-VI4-RI4-RR 15024717 VN-05-L-T3-PI4-VI4-RI4-RR 15024725 0.45 14 G1/8 G1/8 G1/8 Standard design

VN-07-H-T3-PI4-VI4-RI4-RR 15024718 VN-07-L-T3-PI4-VI4-RI4-RR 15024726 0.7 14 G1/8 G1/8 G1/8



VN-05-M-T3-PI4-VI4-RI4-RR 15024722 VN-05-N-T3-PI4-VI4-RI4-RR 15024730 0.45 14 G1/8 G1/8 G1/8 In-line design

VN-07-M-T3-PI4-VI4-RI4-RR 15024723 0.7 14 G1/8 G1/8 G1/8

Connection

Vacuum as a function of operat-

ing pressure


Vacuum generator VN-…-RR

Performance data for high vacuum generators Standard Inline

Size VN-05-H-... VN-07-H-... VN-10-H-... VN-14-H-... VN-05-M-... VN-07-M-...

Max. vacuum is at operating pressure [vac. bar] 0.88 0.88 0.89 0.88 0.86 0.86

[bar] 4.5 4.7 4.5 5 6 5.8

[l/min] 6.2 16 25 51.6 6.1 13.5

[bar] 2.1 2.1 3.1 5.1 6.3 7

Pressurisation time for 1 l volume at p1 = 6 bar evacuated at maximum vacuum

[s] 4.8 1.9 1.1 0.5 4.7 2.1

Performance data for high suction rate generators Standard Inline

Max. suction rate with respect to atmosphere [l/min] 15.3 38.8 52 88.4 12 –

at operating pressure [bar] 5.5 6.2 5.2 6.2 6 –

achieved with vacuum [vac. bar] 0.55 0.55 0.56 0.57 0.55 –

Pressurisation time for 1 l volume at p1 = 6 bar evacuated at maximum vacuum

[s] 1.7 0.5 0.46 0.25 1.57 –

Suction rate with respect to atmosphere max. at operating pressure

Size VN-05-L-... VN-07-L-... VN-10-L-... VN-14-L-... VN-05-N-... –

High vacuum of 0.89 vac bar or High suction rate at 90 l/min

Type

1 (P) 2 (V) 3 (R)

B1 D1 D2 D3 H1 H2 L1 L2 L3 ß1 ß2

VN-...-T3-PI4-VI4-RI4-RR 14 G1/8 G1/8 G1/8 35.7 26.2 70 9.5 25.5 13 13

VN-14-...-T4-PI4-VI5-RI5-RR 18 G1/8 G1/4 G1/4 45.5 32.7 81.9 13.1 22 13 17

Connections

VH-05-H-…-RR

VN-07-H-…-RR

VN-10-H-…-RR

VN-14-H-…-RR

VN-05-M-…-RR

VN-07-M-…-RR

VN-05-L-…-RR

VN-07-L-…-RR

VN-05-N-…-RR

VN-10-L-…-RR

VN-14-L-…-RR

1

4

56

7

8

9

aJ


Vacuum generator VN-…-RR High vacuum of 0.89 vac bar or High suction rate at 90 l/min

Suction flow rate

(with respect to atmosphere)

as a function of operating pres-

sure

High vacuum

Suction flow rate

(with respect to atmosphere)

as a function of operating pres-

sure

High suction rate

VH-05-H…-RR 1 VH-05-M-…-RR 5 VH-07-H…-RR 2 VH-07-M-…-RR 6

VH-10-H-…-RR 3 VH-14-H-…-RR 4

VH-05-L-…-RR 7 VH-05-N-…-RR aA VH-07-L-…-RR 8

VH-10-L-…-RR 9 VH-14-L-...-RR aJ

Information

Information General information

Introduction to Cleanroom

The term “Cleanroom” is some-

thing you associate with in

modern industries. However, the

root of cleanroom design goes

back more than a century. Think

of the need to control contamina-

tion in hospitals and you would

be able to imagine the first

cleanroom.

It can be seen that the require-

ment for cleanroom can be

broadly divided into two areas:

– That in which inanimate parti-

cles are a problem and where

their presence may prevent a

product functioning or reduce

its useful life.

– To ensure the absence of mi-

crobe carrying particles whose

growth could lead to human

infection.

Definition of cleanroom

It is clear that a cleanroom is a

room that is clean. However, a

cleanroom now has a special

meaning and it is defined in

ISO 144641 as:

“A room in which the concentra-

tion of airborne particles is con-

trolled and which contains one or

more clean zones.”

And in ISO 14644-1 as:

“A room in which the concentra-

tion of airborne particles is con-

trolled, and which is constructed

and used in a manner to minimise

the introduction, generation and

retention of particles inside the

room and in which other relevant

particles inside the room and in

which other relevant parameters

e.g. temperature, humidity and

pressure, are controlled as neces-

sary.”

Classification of cleanroom

Cleanroom are classified by the

cleanliness of their air. The

method most easily understood

and universally applied is the

one suggested in versions of

Federal Standard 209 up to

edition "D”.

The Federal Standard FS 209D

Table shows the simplified

classification of Cleanroom

Class according to the older

Federal Standard 209D. This

standard has now been super-

seded by the metric version;

Federal Standard 209E which

was published in 1992. The

basic unit of measurement

within a cleanroom is a micron

(µm) which is one millionth of a

metre.

To classify cleanroom, the num-

ber of particles equal to and

greater than 0.5 µm is meas-

ured in one cubic foot of air and

this count is used to identify

the Cleanroom Class.

However, because of the sim-

plicity and universal usage of

the Federal Standard 209D, it is

unlikely to be forgotten or

removed. It is also likely that

the Federal Standard 209E will

supersede it but by the new

International Standard Organi-

sation’s (ISO) standard ISO

14644-1.

Cleanroom for different

industries

The required standard of

cleanliness of a room is de-

pendent on the task performed

in it; the more susceptible the

product is to contamination,

the better the standard.

How small is a sub micro particle?

The Federal Standard FS 209D

The possible cleanroom

requirements for various tasks

Objects Approximate Size [µm]

Human hair 100

Rubbing or abrading an ordinary painted surface 90

Sliding metal surfaces (non-lubricated) 75

Crumpling or folding paper 65

Rubbing an epoxy painted surface 40

Belt drive (Conveyor) 30

Dust 25

Writing with ball pen on ordinary paper 20

Abrading of the skin 04

Oil smoke particles 0.1

Measured Particle Size [µm]

0.1 0.2 0.3 0.5 5.0

1 35 7.5 3 1 NA

10 350 75 30 10 NA

100 NA 750 300 100 NA

1000 NA NA NA 1000 7

10000 NA NA NA 10000 70

100000 NA NA NA 100000 7000

Class

ISO Class (FS 209E) Tasks

ISO Class 3 (Class 1) Integrated circuit manufacturers manufacturing sub-micron geometries only use these rooms.

ISO Class 4 (Class 10)

Semiconductor manufacturers producing integrated circuits with line widths below 2 µm use these rooms.


Used with a bacteria-free or particulate-free environment is required in the manufacture of aseptically produced injectable medicines. Required for implant or transplant surgical operations.


Manufacture of high quality optical equipment. Assembly and testing of precision gyroscopes. Assembly and testing of precision gyroscopes. Assembly of miniaturised bearings.


Assembly of precision of hydraulic or pneumatic equipment, servo-control valves, precision timing devices, high grade gearing.

ISO Class 8 Class 100000)

General optical work, assembly of electronic components, hydraulic and pneumatic assembly.


International standard of cleanroom

Introduction

The Federal Standard 209E have

long been the only definition of

cleanroom classification available

from a standard organisation. It is

from the U.S. General Service

Administration and approved for

use by all U.S. Agencies. In the

absence of an international

standard, FS 209E was broadly

used internationally.

The need for a new international

standard that covered more

cleanroom environmental

parameters and practices led to

the formation of a technical

committee of the International

Standards Organisation. The

technical committee is named TC

209 Cleanroom and Associated

Controlled Environments.

The goal of TC 209 is

standardization of equipment,

facilities and operational

methods for cleanroom and

associated controlled

environments. This includes

procedural limits and testing

procedures to achieve desired

attributes to minimise micro

contamination.”

The ISO committee will produce

11 new standards documents

that relate to cleanroom or clean

zones.

Cleanroom standard adopted by

different countries

Some countries completely

adopted FS 209, while others

made their own national version,

similar to FS 209. Some made

minor changes of the classes to

comply with the metric system,

but all changed the denomination

of the classes.

Because of the different naming

of the classes in different

countries, care must be taken not

to mix up the standards.

Germany standard: VDI2083

The German Engineering

Association, known as VDI, has

published the VDI 2083 as

"Cleanroom engineering"

guideline, for the first time in

1976. The various tasks and

measures associated with

cleanroom technology are

described the VDI guideline

series VDI 2083.

This guideline, which was

developed just recently, is the

only guideline, which can be used

for the classification of operating

materials. The aim of this

guideline is to provide a

standardized procedure for

qualifying or comparing operating

materials with regards to their

airborne particle emission.

FESTO is applying this guideline

for the particle emission tests it

conducts.

Country Standard Year Description

Australia AS 1386 1989 Cleanroom and clean work stations

France AFNOR X44101 1981 Definition of cleanroom levels

Germany VDI 2083.3 1993 Contamination control measuring technique for clean air rooms

Holland VCCN 1 1992 Dust and micro-organism classification of air

Japan JIS-B-9920 1989 Measuring methods for airborne particles in cleanroom and evaluating methods, etc.

Russia Gost-R 50766 1995 Cleanroom classification, General requirements

UK BS 5295 1989 Environmental cleanliness in enclosed spaces

US FS 209E 1992 Airborne particulate cleanliness classes in cleanroom and clean zones

USA 209E 1992

ISO 14644-1 1997

Japan B 9920 1989

France X44101 1981

Germany VDI 2083 1990

UK BS 5295 1989

Australia AS 1386 1989

ISO Class 1 1

ISO Class 2 2 0

1 ISO Class 3 3 1 C 0.035

10 ISO Class 4 4 2 D 0.35

100 ISO Class 5 5 4000 3 E,F 3.5

1000 ISO Class 6 6 - 4 G,H 35

10000 ISO Class 7 7 400000 5 J 350

100000 ISO Class 8 8 4000000 6 K 3500

ISO Class 9 7 L

Some major national stan-

dards exist today:

– British standard: BS5295

– Japanese standard: JIS B

9920

– Australian standard: AS

1386

– French standard: AFNOR X

44101

– Dutch standard: VCCN-RL-1

– Russian standard: GOST

R50766-95

The table shows major national

standards exist today.

A comparison of major

engineering cleanroom

classes in the world


Introduction

After 40 years, the FS 209E has

been officially retired. This

paves the way for worldwide

harmonisation promised by the

new cleanroom protocols from

the International Organisation

for Standardisation (ISO). The

Institute of Environmental Sci-

ences and Technology (IEST)

submitted a request to retire

the federal standard and it was

approved. The Federal Stan-

dard 209E was officially retired

by the US Government on 29

November 2001.

Basically, the quality of air in a

cleanroom has not changed,

what has changed is the meas-

uring system. ISO standards

use only the metric system.

Almost all countries now use

the new ISO 14644 standard.

ISO classification standard

Because of the large number of

cleanroom standards produced

by individual countries, it is

very desirable that one world-

wide standard of cleanroom

classification is produced. ISO

has set up a technical

committee (TC 209) and will

produce 10 new standards

documents that relate to

cleanroom or clean zones. The

first two standards have been

published: ISO 14644-1 and –2.

ISO 14644-1 classification of

air cleanliness

Cleanliness class designations

and quantity have changed

from FS 209E. Along with the

obvious change to metric

measure of air volume, ISO

14644-1 adds three additional

classes – two cleaner than

Class 10 and one dirtier than

Class 100,000.

ISO 14644-2 cleanroom testing

for compliance

ISO 14644-2 determines the

type and frequency of testing

required conforming to the

standard. Table 2.12 indicates

which tests are mandatory and

Table 2.13 indicates which

tests are optional.

Summary of FS 209E and ISO

14644-1 and –2

The cleanliness classification

levels defined by FS 209E and

ISO 14644-1 are approximately

equal, except the new ISO

standard uses new class

designations, a metric measure

of air volume and adds three

additional classes – two cleaner

than Class 10 and one dirtier

than Class 100,000. The second

new ISO standard, ISO 14644-

2, gives requirements for

monitoring a cleanroom or

clean zone to provide evidence

of its continued compliance

ISO 14644-1

ISO 14644-2

Table compares the FS 209E to

the new ISO 14644-1

classifications.

International standard for cleanroom

Airborne Particulate Cleanliness Classes ISO 14644-1

Number of Particles per Cubic Meter by Micrometer Size

0.1 mm 0.2 mm 0.3 mm 0.5 mm 1 mm 5 mm

ISO 1 10 2

ISO 2 100 24 10 4 8

ISO 3 1000 237 102 35 83

ISO 4 10000 2370 1020 352 832

ISO 5 100000 23700 10200 3520 8320 29

ISO 6 1000000 237000 102000 35200 83200 293

ISO 7 352000 832000 2930

ISO 8 3520000 8320000 29300

ISO 9 35200000 83200000 293000

Class

Schedule of Tests to Demonstrate Continuing Compliance

Test Parameter Class Maximum Time Interval

Test Procedure

ISO 5 6 months ISO 14644-1 Annex A

ISO 5 12 months

Air Pressure Test

All Classes 12 months ISO 14644-1 Annex B5

Air Flow All Classes 12 months ISO 14644-1 Annex B4

Particle Count Test

ISO 14644-1

ISO Class English Metric

1 - -

2 - -

3 1 M1.5

4 10 M2.5

5 100 M3.5

6 1000 M4.5

7 10000 M5.5

8 100000 M6.5

9 - -

FED STD 209E

Introduction

The design of cleanroom

equipment plays an important

role in cleanroom technology. It

would be wasteful to design a

state-of-the-art cleanroom and do

not place any importance on the

equipment used in the

cleanroom. When designing

cleanroom equipment, care must

be taken right from the initial

stage.

Using pneumatic cylinder in

cleanroom

When you lower the piston speed,

the particle count will greatly

reduce as the impact at the end

position is reduced.

To help reduce the impact,

cylinders with cushioning will

significantly help in the reduction

of particles generated.

When there is a need to have end

position stopping, do not use

rubber stoppers, use shock

absorbers as they generate lesser

particles.

Using rotary moving elements

Whenever possible rotary

movements should be employed,

as lesser particles are generated

by rotary moving elements.

Furthermore, it is easier to seal

rotating elements from the clean

environment.

Minimising sliding friction

The design should minimise

sliding friction. Do not use sliding

tracks, it is better if you could use

roller tracking. Lip sealing is also

not allowed and tries to avoid

unnecessary functional contact.

Principle of arranging task

integration

Reduce the number of

components used to a minimum,

if possible make use of single

components which can assume

several functions.

Magnetic influences

When handling components,

which are subject to magnetic

influences, care must be taken to

ensure that they are shielded

from the electromagnetic effects.

Another option would be keeping

critical products away from

Electric motors, permanent

magnets, coils and

electromagnetic fields.

Properties of materials

The properties of the materials

used in the equipment affects the

level of contamination. If the

wrong choice were made there

would be more particles emitted

and would greatly affect the

cleanroom.

Take note of the following points

when choosing the right material:

Know the emission of particles

from the material in use

– Constantly

– Sporadically

– Which size of particle, critical/

uncritical?

– Which combinations of

materials emit particles

– Know the life span of material

– Correlation between the wear

and tear of materials used and

tool life

Outgassing

When the equipment is under

extremes of temperature, there is

the likely occurrence of

"Outgassing" which is simply the

release of gases or volatile

substances from a material other

than a change of state of the

material.

Make sure that the emission

levels of volatile substances do

not exceed limits. They must not

be harmful to either the product

or the personnel working the

area. The materials chosen must

pass tests at extremes of

temperature.

Analysing ways of gripping

products

If you need to use a gripper in

the production, avoid gripping

in the same direction as the

direction of the first airflow.

Keep the product contact to a

minimum either by the

equipment or the operator.

If you grip either from the side

or from beneath the product,

the gripper does not affect the

airflow around the product and

the airflow obstruction caused

by the gripper is kept to a mini-

mum.

If the gripper can only be used

above the product, then keep

moving elements next to the

product and select the shape of

the gripper and its distance

away from the product in such

a way that stagnant areas do

not reach the product

Choice of materials / surface

finish

With regard to the choice of

materials, the following are

recommended:

– Use materials with low

electrostatic charge

properties

– Combination of materials:

plastic - metal: avoid

insulated partial systems

– Surfaces should be smooth

where possible, no sharp

edges

– Easier to clean, minimising

influence on airflow

– In semiconductor industry:

– No moving elements made of

copper of brass

– Better: special steel,

aluminium

Secondary measures and

alternatives

The following are some

additional guidelines, which

should be considered:

– Encapsulating components

– All moving parts enclosed

– Vacuum Suction

– Accurately aimed local

airflow direction

Unconventional sources of

contamination

In addition to dust and other

particles, surface

contamination can be any one

of the following – reaction

layers of chemical compounds,

absorbed

layers of mostly hydrocarbons

and moisture, or variable

composition contaminants due

to preferential diffusion of one

component through a

substrate.

ESD behavior of operating

materials

ESD stands for Electrostatic

Discharge. It is the rapid

transfer from static charged

bodies of materials to or from

Electrostatic Discharge

Sensitive Electronic Devices.

Virtually all electronic devices

are ESD sensitive; the

sensitivity is based on product

and design. ESD occurs when

charge is generated, stored on

an object and rapidly

transferred.

Materials become charged via:

– First air flowing onto them

– Friction from other materials

– Particles generated are not

removed by the first air flow

– Contamination adheres to

charged materials

– Formation of larger

agglomerates

– Sporadic, intermittent

detachment of very large

forms of contamination

ESD is harmful to the system

and must be removed.

Recommended ways of

removing of electrostatic

charges are:

Basic principles for designing cleanroom equipment

Information General Information

Qualification tests are carried out

to assess the cleanroom

suitability of operating materials

that include equipment.

It is very important to note here

that “No operating material may

be allocated to a cleanroom

class”. It is therefore wrong to say

that “Our product has the

Cleanroom ISO Class 3”

The reasons are:

– Cleanroom classes were drawn

up only for the acceptance and

classification of cleanroom.

– Operating materials do not

fulfil these fundamental

conditions.

– Missing of specifications for

the classification of operating

materials.

– Correlation of cleanroom

classification / air volume

– Air volume

– Defined degree of

cleanliness per volume of air

– Procedures for classification

standards are related to

cleanroom

Moreover we could not just

transfer the cleanroom

classifications to operating

materials, because these are

standards based on degree of

cleanliness per volume of air and

not for qualifying equipment used

in the cleanroom.

It is important to note that the

Federal Standard and ISO

standard does not cover this

area. VDI 2083 Part 8 "Cleanroom

suitability of equipment", which

was developed just recently, is

the only guideline, which can be

used for the classification of

operating materials.

The procedure for carrying out

cleanroom suitability tests in

accordance with regulating

bodies for assessing air

cleanliness may be summarized

as follows:

– Specification of operating

parameters;

– Localization of particle

sources;

– Classification measurements;

– Statistical analysis;

– Classification of the operating

material

Measurement classification

The parameters required for the

classification measurements are

either prescribed or have been

ascertained from the

measurements taken beforehand:

– Typical operating conditions of

the operating material during

the measurement procedure;

– Measuring points on the

operating material;

– Positions of the OPC sampling

probe at the operating

material measuring points.

Statistical analysis

The suitability of an operating

material for a given cleanroom

class is determined using a

statistical method. For this, all

particle size ranges measured

must be taken into consideration.

In order to obtain significant data

for all the statistical observations

to be carried out, there must be a

random distribution of particles in

the air.

This guideline is applicable to

operating materials which are

introduced into a cleanroom.

The aim of this guideline is to

provide a standardized

procedure for qualifying or

comparing operating materials

with regards to their airborne

particle emission.

FESTO is applying this

guideline for the particle

emission tests it conducts on

all Festo cleanroom products.

Introduction of VDI2083 Part 8

Operating materials are often

responsible for contaminating

the production environment in

cleanroom. An operating mate-

rial does not process a cleanli-

ness class, rather only a suit-

ability for use in cleanroom

classes. This means that an

operating material may only be

assessed with respect to its use

in cleanroom with a defined

level of particle cleanliness of

the air.

The design, construction and

operation of an operating

material (geometry and

dynamics) should be selected

in such a way that airflow

patterns in the cleanroom

environment are affected as

little as possible. This can also

checked by performing airflow

visualization tests.

The standardized assessment

of airborne particle emission,

supported by a statistical

analysis of the results, should

enable a comparison and

assessment of operating

materials. This should lend

transparency to the

assessment of operating

materials concerning their

suitability for use in cleanroom.

Cleanroom suitability

Cleanroom suitability assesses

the suitability of an operating

material for use in cleanroom

which have been specified in

accordance with a regulating

body for assessing air

cleanliness. The classification

criterion in this instance is the

emission of particles from the

operating material.

Measurement technology

Only optical particle counters

(OPC) have been used in this

guideline for measuring

airborne particles. Further

information concerning the use,

handling and method of

function of OPC’s can be found

in the guidelines VDI 3489 Part

3 and VDI 2083 Part 3.

Procedure

The highest concentration of

particulate contamination

emitted from the operating

material into the system or

product space is measured.

The size distribution of

particles emitted from the

operating material being

assessed for its cleanroom

suitability may vary

considerably. As the

distribution characteristics of

each operating material are not

always known, it does not

suffice to investigate only one

range of particle size.

Therefore, at least three

representative particle size

ranges are to be selected.

These must be as distant from

one another as possible.

The concentration measured is

then compared with the limiting

values given by the regulating

body concerned with air

cleanliness and thus an

assessment made of suitability

for use in a specific air

cleanliness class defined by

that regulating body.

Qualifying equipment for cleanroom used


One of the major sources of

contamination is operating

materials. Contamination caused

by operating materials can be

either:

– Chemical

– Physical

– Biological

– Radiological

– Ionic

Particle contamination falls under

the umbrella of physical

contamination. Particles is

caused by:

– When leakage from the

pneumatic components will

lead to particle contamination.

The air, which leaks, might

bring along particles with it.

– When operating materials

come into contact with one

another, there is bound to be

abrasion, make sure that the

abrasion is to a minimum as

particles are generated.

– When the pneumatic

components move from end to

end, there tend to be knocking

at the end position, this will

lead to minor vibration and

also cause particles to be

released.

The optical particle counter OPC

It is a microprocessor-based

instrument that detects airborne

particles, analyses and stores the

data in eight size classes, and

produces reports. It displays

real time data on a CRT and

contains a printer, which can be

used to produce hard copies of

reports.

During the airborne particle

emission measurements, the

operating parameters of the

optical particle counter are set

as follows:

Air volume : 1.0 cfm

Sampling time : 60 seconds

Delay time : 1 second

Measurement time : 5 minutes

The measurement time is 3

minutes, 1.0 ft³ and at maximum

airflow velocity of the MENV. The

measurement point used is the

center of MENV on operational

level of component.

The Climomaster is setup as

follows:

– Data sampling time : 60

seconds

– Data sampling interval : 1

second

– Number of sampling data : 1

– VTH measurement time : 3

minutes

Upon completion of the test, the

readings must be within the

parameters:

First airflow velocity :

0.45 ± 0.05 m/s

Temperature : 20.0 ± 2.0°C

Relative humidity : 55 ± 10%

Measuring the test

environment

In order to get correct particle

count results, the test

environment, in which the tests

are carried out should have

little or no influence on the

particle measurements. The

parameters, which influence

the particle count, are the

particle count in the:

– Environment

– Air velocity

– Degree of turbulence

– Relative humidity

The purpose of measuring the

test environment is to

determine whether the given

environment is suitable for

particle measurement.

Therefore, the ‘ground

contamination level’ of the test

environment has to be

measured for the cleanroom as

well as the Mini-environment

(MENV). The lower the "ground

contamination level", the more

accurate the particle

measurements will be.

Zero the count measurement

Before any test is done, a zero-

count measurement is made.

When doing a zero-count meas-

urement, it is a functional test.

For this test, a zero-filter is

attached to the OPC and the

counter takes measurement for

about 3 minutes. The reading

obtained should be zero. Then

the environment is ready for

use.

Base Measurement of Airborne

Particulate in MENV

Similar to the zero-count

measurement, which is used for

the OPC, the base

measurement is used for the

Mini-environment.

VTH Measurement

Three major environment

parameters:

– Air velocity (V)

– Air Temperature (T)

– Relative Humidity (H)

are measured in the cleanroom

and MENV to ensure the meet

the requirements. We obtain

these readings by using the

Kanomax Climomaster. This is a

precision measuring

instrument, which has velocity,

temperature and humidity

sensors.

Simultaneous measurements of

air velocity air temperature and

relative humidity can be

obtained with a single probe of

this instrument.

Measurement of airborne particle in cleanroom



The principle of measuring contamination level of pneumatic components

Introduction

Basically there are two different

measuring principles how to

assess the clean room suitability

of operating materials. One

principle is to localize the particle

source and to measure the

particle emission directly at its

source.

Another principle is to assess the

total particle emission, by

measuring the average particle

emission in the space

surrounding the operating

material.

The direct Measurement

Principle

Applying the direct measurement

the specimen is operated inside a

clean room or mini environment.

There should be laminar, vertical

air flow around the specimen.

While the specimen is operated

a particle counter with a

movable measurement probe is

used to screen the entire

product for sources of particles.

Subsequently, the particle

emission is measured for 100

minutes at every particle

source, which has been located

before, in order to establish the

particle emission behavior.

The major advantage of this

principle is that it can be

applied to operating equipment

of almost any size.

Furthermore, it provides some

information about the particle

distribution and concentration

around the operating material.

This measurement principle is

described in detail in the VDI

2083-8 guideline.

The average Measurement

Principle

Using the average

measurement principle, the

specimen is operated inside a

container. The container is then

supplied with a defined volume

of clean dry air.

Simultaneously, the particle

emission is measured inside

the container, by using an

optical particle counter. All air,

which does not flow through

the particle counter, is release

through an exhaust opening. In

order to get the measurement

results, the ration between the

exhaust air and the amount of

air flowing through the particle

counter has to be known.

The major disadvantages of

this method are that the result

largely depends on the

placement of the measurement

probe inside the container as

the particle emission is not

necessarily consistent.

This makes the measurement

principle also very unsuitable for

measuring larger operating

materials, as the particle

emission get more inconsistent

inside of larger containers.

The advantage of this method is

that it allows a direct comparison

among several test specimen.

Furthermore, it is a lot easier to

handle.

There is no guideline available

from any independent

organization, such as ISO, VDI,

DIN, FDA etc., describing this

measurement principle.

How does FESTO measure?

FESTO decided to apply the direct

measurement method, as this

measurement allows the user to

gain information about the

highest particle concentration

around the product. Furthermore,

this measurement method is

described in the VDI-2083-8

guideline, which gives FESTO the

possibility to have a neutral

reference for the measurements.

The Direct Measurement

Principle

The Average Measurement

Principle

Information Festo Cleanroom project

The cleanroom project initiated

by Festo is a collaboration among

Fraunhofer Institute for

Manufacturing Engineering and

Automation in Germany, Nanyang

Polytechnic (NYP) of Singapore

and Festo Singapore.

The objective is to work together

in the field of particle emission of

Festo products.

Furthermore, it is Festo’s

intention to improve the

experience in the field of particle

measurements, contamination

control as well as cleanroom

applications in general.

Cleanroom environment

The cleanroom environment in

Nanyang Polytechnic is ISO

Class 6 cleanroom. The design

of this cleanroom is shown.

This is a cleanroom typical

layout.

This is a “ballroom” type

cleanroom with the area of

120 m2. The air flows in a

unidirectional way from a

ceiling of High Efficiency

Particular Air (HEPA) filters

down to the floor of the

cleanroom. The return air

passes through a return air

plenum in the Grey Room. The

Grey Room, which is located

just beside the cleanroom,

where it is used for service.

Festo cleanroom project - A collaboration among 3 parties

Floor

Return Air

Plenum

CleanroomGrey Room

Utility andEquipment

Chase

Supply Air from Fans

Window

PanelReturn

Air

Ceiling

HEPA

Floor

Return Air

Plenum

CleanroomGrey Room

Utility andEquipment

Chase

Supply Air from Fans

Window

PanelReturn

Air

Ceiling

HEPA

We’re doing the measurement

according the VDI 2083-8

guideline which is described on

page 82 and the following

pages. Fraunhofer Institute

approved this measurement

principle and attested this in a

‘Certificate of qualification’.

The certification covers: The

support for the performance of

testing the cleanroom suitabil-

ity of pneumatic components of

the company Festo AG & Co.

Festo’s cooperation with

Fraunhofer of Germany and

Nanyang Polytechnic of

Singapore

The cleanroom environment in

Nanyang Polytechnic of

Singapore

Mini-environment (MENV)

A Class 1 clean Mini-Environment

(MENV) is used within a clean-

room to provide the high level of

protection to products against

contamination and ESD events.

The specification of MENV is

shown. This MENV is a cleanroom

test cabinet with one clear

antistatic front panel and three

side panels. The dimension of

MENV is 1.2m x 0.6m internal

area and with 2.2m height. In

order to achieve high cleanliness

class, Ultra Low Penetration Air

(ULPA) Fan Filter Unit (99.9995%

efficiency on 0.12 micron) is

installed on the ceiling of the

MENV. The unidirectional supply

of air flows vertically from the Fan

Filter Unit (FFU), and the air

velocity can be adjusted up from

0.2 m/s to 0.6 m/s.

Optical Particle Counter

The LASAIR 210 OPC is used to

detect the concentration of

particles. The flow volume of this

counter is 1.0 CFM (cubic foot per

minute) or 28.3 liters per minute.

The counter is able to detect

particle size from 0.2 µm to 5.0

µm. The particle counter has

eight channels.

The setting of OPC is:

– Data Sampling Time: 60

seconds

– Data Sampling Interval: 1

second

– Measurement Time: 120

minutes

Flow Meter

The flow meter – Model 6521

Climomaster is used to measure

the airflow parameters.

Simultaneous measurements of

air velocity, air temperature and

relative humidity can be obtained

with a single probe of this

precision instrument.

The setting of flow meter is

– Data Sampling Time: 60

seconds

– Data Sampling Interval: 1

second

– Number of Sampling Data: 1

– Measurement Time: 3 minutes

Test procedure of Festo cleanroom components


Summary specification of MENV

Vertical Laminar

Flow

1200 x 600 mm

ISO Class 3

0 … 0.6 m/s

infinitely

adjustable

800 … 1000 lux

Aluminium

Clear Front

Cover

230 V, single

phase 50 Hz

Design:

Internal

Dimensions:

Cleanliness:

Air Velocity:

Light

Intensity:

Main Body:

Front Design:

Power Supply:

In accordance with the US FED-

STD-209E, a cleanroom is

classified to be of Class 1 if only

one particle of the size of 0.5

µm or larger can be found in a

reference volume of one cubic

foot of the first air (filtered air

supplied).

In accordance with the ISO

14644-1, a cleanroom is

classified to be of Class 3 if only

35 particles of the size of 0.5

µm or larger can be found in a

reference volume of one cubic

meter of the first air (filtered air

supplied).

There is no tabletop installed in

the mini environment. Instead a

removable clean room trolley

with perforated tabletop is

used. The height of the trolley/

table is approx. 1.10 m

Measuring Instrument

The two most important test

instruments for the particle

measurements are Optical

Particle Counter (OPC) and Flow

Meter.

A LASAIR 210 Optical Particle

Counter, manufactured by

Particle Measuring Systems

Incorporation, and Model 6521

Climomaster (airflow, relative

humidity and temperature

measurement), manufactured

by KANOMAX Japan incorpora-

tion, are used in the particle

measurements.

Testing of Festo cleanroom

pneumatic product range

The VDI-2083-8 guideline

describes, how particle

measurements have to be carried

out, in order to establish the

particle emission of individual

equipment. If a whole range of

equipment is to be tested, it

becomes viable to define,

whether all types and sizes of the

equipment has to be tested or

whether it would be sufficient to

test a defined share and to apply

the results to the remaining

products. Such a procedure

becomes especially important if

extensive product ranges are

involved.

To achieve the above mentioned,

this guideline has been

developed. The guideline is

based on the measurement

procedures applied by F-SG. This

guideline is not a FESTO

Standard.

Subject of test

FESTO products, which are part of

the clean room product range. It

does not apply to the testing of

standard product or special

applications.

Specimen Selection

The number of specimen to be

tested is determined by the size

and the number of products in

one product range. In every

product range, the smallest and

the largest type is tested. The

terms small and large are defined

as follows:

– For cylinders, slide units, shock

absorbers and grippers, small

and large are defined by the

piston diameter.

– For valves and filters, service

units, small and large are

defined by the flow rate.

– For tubes and fittings, small

and large are defined by the

tube diameter.

Furthermore, at least, 25% of

all products within one product

range have to be tested.

Each test is conducted with a

number of two identical

specimens.

Definition of a Product Range

The selection of test samples

does apply only, if the product

design is consistently the

same, throughout a product

range. This is defined as

follows:

– The working principle of all

products within the product

range is identical.

– All materials of all products

within the product range are

identical, including all

lubricants.

– The geometry of all products

within the product range is

identical, especially the

geometry of all seals.

– The working pressure of all

products within the product

range is the same.

If not all products of a product

range fulfill the above-

mentioned requirement, all

products of that particular

product range have to be

tested.





Step 2: Testing of instrument

It is also important to note that

each time before the tests are

made the required zero count

measurement, base

measurement and VTH

measurement are carried out as

follows:

– OPC airflow

– OPC laser-reference

– OPC zero-particle-count

(measurement time: 3

minutes, with zero-filter

attached)

– MENV air flow velocity

(maximum power of FFU)



minute with measurement

intervals of 1 second)

– Airflow-velocity


minute with measurement

intervals of 1 second)

– Temperature (measurement

time: 1 minute with

measurement intervals of 1

second)

– Base measurements of

MENV, airborne particulate

contamination

(measurement time 3

minutes, 1.0 cft, at maximum

air flow velocity of MENV,

measurement point in the

center of MENV on

operational level of

component)

Standard operation procedure

(SOP) are done before actual

commencement of the test. These

procedure are standard

regardless of the type of test

specimen.

Step 1: Inward transfer of test

samples

Before any test is done, the

components need to be prepared.

The preparation for the

cleanroom suitability assessment

involves the cleaning of these

components according to the

Festo-SG guidelines "Operating

Conditions for Cleanroom Tests".

The cleaning sequence is outlined

below:

– Decontamination of test

samples (inner and outer parts)

with Isopropanol saturated

wipers and ultrapure

compressed dry air.

Sequence:

– Pre-cleaning by blowing

component surface with

ultra-pure compressed dry

air.

– Cleaning of component

surface using pre-saturated

wipers containing a blend of

Isopropyl alcohol.

– Final cleaning by blowing

component surface with

ultra-pure compressed dry

air.

– Bringing the test samples into

the CR-environment and MENV

– Arranging the test samples

(with gloves, intermediate

decontamination, cleaning)

Step 5: Classification

measurements

During the test, the airborne

particle generated by the

component is measured using a

discrete particle counter (DPC).

– Particle size is 0.2 mm, 0.7

mm, 1.0 mm, 2.0 mm, 3.0

mm, and 5.0 mm are

selected.

– Measurement time:

– standard-classification: 100

minutes (according to VDI

2083 part 8) at the

measurement points that

were found during the

Localization measurements

– lifecycle-test: several days,

up to months

– Documentation of

measurements points (sketch

or photograph)

Step 6: Statistical evaluation

Evaluation according to guideline

VDI 2083 part 8

Step 7: Visual inspection

Visual inspection of tested

components (e.g. wear and tear,

deposition of lubricants and

particles, product failure…)

Step 8: Classification

Classification of test specimen

according to statistical evaluation

and visual inspection (see

guideline VDI 2083 part 8)

Step 3: Adjustment of the

operating parameters for the

test sample

After mounting the component

on a test support fixture, it is

ready for the test.

– Adjustment of operating

parameters e.g. cushioning

on actuator, speed of

actuator

– Statement about performed

duty cycles at the time of

testing

– Documentation of

adjustment (sketch or

photograph)

Step 4: Localization

measurements

Determination of points of

highest concentrations of

particle emission (according to

VDI 2083 part 8)

– Coarse localization

measurement

– Localization measurement

– Description of measurement

points

– Sketches or photographs

– References to applied

standards and guidelines

– Documentation

– Particle concentration at

measurement points

– Graphical visualization of

particle emission

– Interpretation of results and

conclusion

– Classification related to

applied standards/

guidelines

– General Assessment

Potential for optimization

Operating condition for testing

Festo components in

cleanroom

Operating Conditions are

defined by Festo-SG

individually for different Festo

products. The guidelines for

product range, cylinders, rotary

actuators, valves, grippers and

service units are listed in page

88 and 89.

Preparing compressed air for

testing Festo components in

cleanroom

– Compressor

– Air storage

– Refrigeration dryer

– Prefilter regulator of 40 µm

– Fine filter 1 µm

– Micro filter 0.1 µm



Testing of DSNU-…-RR-SA cylinder

Testing of ADVU-…-RR-SA cylinder

Testing of CDN-…-RR-SA cylinder

Step 9: Documentation

Complete documentation

should contain the following

information

– Title, Date , Place of test

– Person responsible

– Test environment

– Operating Parameters

– Temperature


– Air flow velocity

– Particulate concentration

in test environment

– Measurement technology

– Type

– Model

– Detection limits

– Air flow

– Description of sample

technique

– Sample Characteristics

– Type

– Supplier

– Serial Number

– Component description

– Operating parameters of

components

– Break-in load

– Running-in time

– Mounting position

– Operating frequency

– Attached load

– Supply (air- power supply

etc.)

Air 40 µm 1µm 0.1 µminlet

1 2

Operating conditions for

Cleanroom tests - Cylinders

Pneumatic linear actuators:

– Single- and double-acting

cylinders with and without

piston rods

– Guide and slide units



specimens. The supply air should

be clean dry air. This clean dry air

is filtered with micro-filter which

eliminates 99.9999% of particles

bigger than 0.01 mm. The

operating pressure for all

samples is 6.0 ± 0.3 bar or

maximum pressure, for specimen,

whose operating pressure is less

than 6.0 bar. The ambient

temperature should be 20 ± 2 °C.

The medium temperature should

not exceed 30 °C. The max.

speed is defined as 0.2 m/s for all

kinds of cylinders. The speed is

adjusted by means of one-way

flow control valves, installed as

close as possible to the cylinder

ports. The adjustment is done in a

way, that the piston safely

reaches its end-position.

Tables below shows: A pulse/

interval ratio of 1:1 should be

used for all frequencies. On the

condition of the max. speed

0.2m/s, the different frequencies

are defined due to different

piston diameter., they are shown

as following table. The

frequencies can be adjusted by

changing PLC programming.

Whenever possible compression

fittings with sealing rings in

combination with polyurethane

tubes should be used for the for

the air supply. This is to ensure

minimum leakage.

For all cylinders with piston rod

the mounting position is defined

as horizontal, with the supply

ports on the bottom of the

sample, except for DGPL cylinder

and slide units. For the latter the

port orientation is determined by

the product design. Cylinders

without piston rod are tested in

horizontal and vertical mounting

positions. If possible, standard

mounting-accessories should be

used. To minimize turbulence, the

mounting accessories should

disturb the airflow as little as

possible.

Prior to every measurement the

supply pressure must be

checked. The pressure should be

6.0 +/- 0.3 bar.

Acoustic/visual/tactile check

under test conditions to see that

test specimens are operating

correctly and that there is not

sticking, jamming, stopping short

of end positions, jerky motion,

bottoming-out of cushioning or

leaks which can be felt or heard.

As any leakage leads to high

emission of particles, there

should be no detectable leakage.

If there is any leakage detected,

the test should be aborted.

As the amount of particles,

emitted by a cylinder, is not

constant throughout its service

life, particle measurements have

to be undertaken at different

stages of the service life.

Particle measurement should be

carried out after 20,000 duty

cycles have been completed

In the case of cylinders with

protection against torsion,

testing should be carried out

using 20% of the maximum

moment.

Suction rate at vacuum port

Conditions at which Festo cleanroom components are tested


The end position cushioning

should be adjusted in such a

way that there is no hard

metallic impact in the end

positions and the piston does

not rebound.

For test sample of cylinders, the

following stroke lengths are

chosen for the various piston

rods as:

Cleanroom test of cylinders

should be carried out under

different load conditions.

However, because of short of

time, cylinders are only tested

under the condition of

horizontally mounted with a

load.

Table below shows: Load

parameters for piston-rod

cylinders without guide or

protection against torsion.

Type Piston diameter [mm]

Frequency [Hz]

6 to 8 2

10 to 20 1.5

25 to 50 1.0

63 to 100 0.3

Rodless cylinders

8 to 100 0.5

Piston rod cylinder

Piston diameter [mm]

Stroke length *[mm]

6 to 8 20 or max. stroke





Ø [mm] Additional Mass [kg] (3% theoretical effective

force)

Moment due to additional load [Nm]

M = m x g x s

6 0.057 0.0168

8 0.091 0.0357

10 0.145 0.0711

12 0.225 0.1324

16 0.360 0.2825

20 0.570 0.5592

25 0.910 1.1159

32 1.450 2.2759

40 2.225 4.4145

50 3.600 8.8290

63 5.700 16.7751

80 9.100 26.7813

100 14.500 42.6735

Piston Diameter [mm]

Additional Mass [kg] (20% theor. effective force)

8 0.570

10 0.910

12 1.450

16 2.250

20 3.600

25 5.700

32 9.100

40 14.500

50 22.500

63 36.000

80 36.000

100 36.000

Ø [mm] Min. vacuum flowrate [l/min]

Recommend Vacuum generator [Type]

12...25 23 VN-07-L-…

32...50 35 VN-07-L-…

Conditions at which Festo cleanroom components are tested



cleanroom tests - Valves

Pneumatic digital switching

valves as follows:

– Mechanically-actuated/

manually-operated digital

switching valves

– Pneumatically-actuated digital

switching valves

– Solenoid-actuated digital

switching valves



specimens. The supply air should

be clean dry air. This clean dry air

is filtered with micro-filter which

eliminates 99.9999% of particles

bigger than 0.01 µm. The

operating pressure for all

samples is 6.0 +/- 0.3 bar or

maximum pressure, for specimen,

whose operating pressure is less

than 6.0 bar. The ambient

temperature should be 20 +/- 2

degree Celsius. The medium

temperature should not exceed

30 degree Celsius.

Table shows: A pulse/interval

ratio of 1:1 should be used for all

frequencies. The additional

volumes should be connected to

the outputs of the test specimens

via pieces of tubing and

appropriate fittings.

The ambient temperature should

be 20 ± 2 °C. The medium

temperature should not exceed

30 °C. A minimum flow rate of 125

l/min is necessary for correct

operation. However, flow meas-

urement devices such as flow

sensors or flowmeters are need to

ensure this minimum flow rate.

The switch frequency for on-off

valves are 2 Hz. The mounting

position for is vertical ±5°. The

operating voltage for solenoid

actuated on-off valve is set as 24

± 10% V DC. For manual conden-

sate drain, plastic tubing is con-

nected to the barb fitting. This is

to ensure minimum leakage.

Prior to every measurement the

supply pressure must bechecked.

The pressure should be 7.0 ± 0.3

bar. Acoustic/visual/tactile check

under test conditions to see that

test specimens are operating

correctly. As any leakage leads to

high emission of particles, there

should be no detectable leakage.

If there is any leakage detected,

the test should be aborted.

Although, it should be avoided

that any medium such as air or

lubricant is leaking out of the

pneumatic system, it cannot be

entirely avoided if pneumatic

actuators are applied. In order to

minimize harmful contamination,

the medium, mostly compressed

air or nitrogen, should be dried

and filtered accordance to ISO

8573-1, Class 1.

Compressed Air Quality Standard:

ISO8573-1

Ensure that the tubing connect

does not increase the size of

the additional volume by more

than 20%. Tube size of supply

line with maximum length of

100 cm.

Whenever possible

compression or barbed fittings

in combination with

polyurethane tubes should be

used for the for the air supply.

This is to ensure minimum

leakage. For those valves that

barbed fittings are not

available, push-in fittings are

used in the test.

Acoustic/visual/tactile check

under test conditions to see

that test specimens (and pilot

valves) are operating correctly

and that there is no failure to

switch, sticking, incomplete

venting of outputs or leaks

which can be felt or heard. Any

departures from normal

operation should be

documented.

As any leakage leads to high

emission of particles, there

should be no detectable

leakage. If there is any leakage

detected, the test should be

aborted.


cleanroom tests - Air

preparation units

– Filter

– Filters

– Fine and micro filters

– Pressure regulators

– Manual on-off valve

– Solenoid actuated on-off

valve

– Soft start valves

The specifications of test

specimens are as:

– Pressure range: 0 to 7 bar

– Degree of filtration: refer to

filter type filter or micro-filter

connected

– Filter type LF or LFMA/B with

connector plates are used

– Pressure gauge connections

– Manual condensate drain

The supply air should be clean

dry air. This clean dry air is

filtered with micro-filter which

eliminates 99.9999% of

particles bigger than 0.01 mm.

The compressed air regulator is

connected with micro-filter to

adjust the pressure. The

working pressure during the

test is 7 bar. The air

preparation unites are

measured under the following

conditions:

– Primary pressure (input

pressure) p1=7 bar

– The controlled pressure

(output pressure) p2= 6 bar

– Pressure drop p=1 bar Valve port size Switching frequency [Hz]

Additional volume [ml]

Inner diameter of tube [mm]

M3 3 2 3

M5 3 10 3-4

M7 3 10 4-6

1/8” 3 10 4-6

1/4” 3 25 4-6

3/8” 2 25 6-9

1/2” 2 50 6-9

3/4” 1 100 13

1 1 400 13

Class Dust Oil

[um] [mg/m³] [DTP] [g/m³] [mg/m³]

1 0.1 0.1 -70 0.003 0.01

2 1 1 -40 0.12 0.1

3 5 5 -20 0.88 1

4 15 8 +3 6.0 5

5 40 10 +7 7.8 25

6 - - +10 9.4 -

7 - - - - -

Water

In all automation processes,

pneumatics plays an important

role. This is the same for

cleanroom, pneumatics are

used in cleanroom for the

following reasons:

– Automation of production se-

quence with pneumatics

– Lower space requirements with

pneumatics

– Lower levels of contamination

with pneumatics

– Laminar flow virtually unim-

paired by pneumatics

Benefits

– Avoidance or reduction of

particle emissions both with

stationary components and in

an operating sequences

– Minimization of disturbance

factors affecting laminar flow

– Counter measures against pos-

sible environmental influences

(e.g. acids, aggressive media)

Difference in comparison

with standard products

The following list is the difference

between the standard products

and those used in cleanroom.

– Generally suitable for

unlubricated operation

– Cleanroom compatible grease

used when necessary

– Cleanroom compatible

markings

– Ducted exhaust ports and

connections for air breather

ports

– Extraction by means of vacuum

where necessary

Production sequence of Festo

cleanroom product range

Basically, the manufacturing of

clean room pneumatics is not any

different from the design of any

other pneumatic component. It is

just, that special care is taken, to

avoid any kind of contamination

caused by the product.

Design office

Firstly the design of a standard

product is modified with a view to

cleanroom compatibility.

Assembly

All products are assembled

outside the cleanroom, according

to the standard assembly

procedures. In very special cases,

cleanroom grease is applied

instead of the standard lubricant.

Testing

Just as any standard product,

cleanroom products are tested,

concerning their functionality.

There is no particle emission test

conducted for every product.

Cleaning

Before packing all products are

cleaned under cleanroom

condition of ISO Class 7. The

cleaning is done either by means

of an ultrasonic bath or with

isopropanol wipers.

Packaging

Packaging is done in antistatic

plastic bags. Whereby each

product is double packed and

sealed. Just as the cleaning, the

packaging takes place under

cleanroom condition of ISO Class

7. When the product is ready for

shipment, it is transferred out of

the cleanroom through an airlock.

Basic principle of Festo

cleanroom product range

It is known that there isn’t

a standard or guideline for

cleanroom product design

available. In order to develop

products for cleanroom

application, we mainly base on

the principle of “avoiding

cleanroom contamination by

preventing particles generated

from the components”.

This principle includes the

following three aspects:

– Non-contaminant release

very low leakage construc-

tion

– Non-contaminant generation

special material, surface

treatment and special lubri-

cation specification

– Non-contaminant in produc-

tion processes – component

cleaning and double bag

packaging

The above three aspects can be

achieved for cleanroom com-

patibility by modifying our stan-

dard products to cleanroom

products with some special

features. The general principle

is to design an additional vac-

uum suction port so that air

leakage during operation can

be sucked back and extracted

by vacuum.

Non contaminants releasing:

Drives

– Air leakage from the piston

rod is sucked back and

extracted by vacuum via a

additional vacuum suction

port on the front cap or

barrel (housing)

– Leak-free design principle

Valves

– Exhaust air from both main

valve and pilot valve are

released via common ex-

haust ports

– Breather air from underside

of piston is removed via

exhaust ports

– Leak-free design principle

Air preparation unit

– Regulator: vent air in the

bonnet is sucked through a

vacuum connection on an

additional ring

– Air filter: drain is discharged

from cleanroom via drain

guide port

Grippers

– Air leakage is extracted via

vacuum suction port

Vacuum and other components

– Exhaust air is ported to the

outside of cleanroom

– Shock absorber: replace-

ment of a new housing with a

vacuum port

– Fittings & tubing: air leakage

is minimized by using the

barbed fittings

Non contaminant generating

Piston rod is made of corrosion

resistant steel

Non contaminant in production

process

– Cleaning individual compo-

nents by ultrasonic cleaning

bath

– All components are cleaned

and assembled in a

cleanroom

– Functional test in a

cleanroom

– Double-packed in plastic

bags in a cleanroom

Benefits of using Festo cleanroom components


Festo Worldwide

Sales and Service Network—International

Festo Worldwide

Algeria

Argentina

Australia

Austria

Bahrain

Bangladesh

Belarus

Belgium

Bolivia

Brasilia

Bulgaria

Canada

Chile

China

Columbia

Costa Rica

Croatia

Cyprus

Czech Republic

Denmark

Dominican Republic

Ecuador

Egypt

El Salvador

Estonia

Finland

France

Germany

Great Britain

Greece

Guatemala

Honduras

Hong Kong

Hungary

Iceland

India

Indonesia

Iran

Ireland

Israel

Ivory Coast

Italy

Japan

Jordan

Kenya

Kuwait

Latvia

Lebanon

Lithuania

Malaysia

Malta

Morocco

Mexico

Myanmar

Netherlands

New Zealand

Nicaragua

Nigeria

Norway

Oman

Pakistan

Paraguay

Peru

Philippines

Poland

Portugal

Republic Korea

Romania

Russia

Saudi Arabia

Singapore

Slovakia

Slovenia

South Africa

Spain

Sri Lanka

Sweden

Switzerland

Syria

Taiwan

Thailand

Tunisia

Turkey

Ukraine

United Arab Emirates

United States of America

Uruguay

Venezuela

Viet Nam

Yugoslavia

Festo Worldwide

The Company

Festo Group:

Year of foundation:

Name of company:

Board of Directors:

Supervisory Board:

Number of employees (Festo Group):

Trainees (in Germany):

Locations in Germany:

Number of Festo companies:

Number of agencies:

Service world-wide:

R&D investment as % of turnover:

Quality certificates held by Festo AG & Co.:

Environmental certificates held by Festo AG & Co.:

Quality and environmental certificates:

Festo customers:

Festo AG & Co.

Festo Didactic GmbH & Co.

Beck IPC GmbH

FCC GmbH Marketing, Werbung, Messen

Festo AG & Co.

1925

Festo AG & Co.

Personally responsible shareholder:

Festo Aktiengesellschaft

Dr. Wilfried Stoll (Chairman)

Dr. Ekkehard Gericke

Dipl.-Ing. Rudi Menrad

Dr. Thomas Rubbe

Dr. Eberhard Veit

Dr. Ulrich Walker

Dr. h.c. Kurt Stoll (Chairman)

Dr. Mark Binz

Dipl.-Kfm. Manfred Kalmbach

10,050 world-wide

6.2 % of workforce (in Germany)

Festo HQ in Esslingen Berkheim:

Festo AG & Co.

Postfach

73726 Esslingen

Ruiter Straße 82

73734 Esslingen

Customer Service Center, St. Ingbert-Rohrbach

Cylinder production works, St. Ingbert-Rohrbach

Festo Saar Learning Center, St. Ingbert-Rohrbach

52 independent Festo companies with over 250 branch offices

Authorised Festo agencies in a further 36 countries

In 176 countries

6,5 %

DQS certificate as per DIN ISO 9001 since 1990

DQS certificate as per VDA 6.1 since 1999

DQS certificate as per VDA 6.4 since 2000

Best Factory Award 1997

Eco certificate as per EMAS since 1996

Eco certificate as per ISO 14001 since 2000

41 companies world-wide certified as per ISO 9001/9002.

held by Festo companies One company certified as per ISO 14001.

Over 300,000 in 176 countries

Festo Worldwide

The History

History – An overview of Festo’s milestones 1956 Festo S.p.A. Milano, Italy Festo AG Zürich, Switzerland

1958 Festo S.A.R.L. Sarreguemines, France

1959 Festo Maschinenfabrik Ges.m.b.H. Vienna, Austria

1963 Festo Elgi Private Ltd. Coimbatore, India

1964 Festo AB Malmö, Sweden Festo Pneumatic Belgium S.P.R.L., Brussels, Belgium

1966 Festo Pty. Ltd. Melbourne, Australia

1967 Festo Pneumatic Holland B.V., Delfgauw, Netherlands

1968 Festo Ltd. Fleet, Great Britain Festo Ltd. Northhampton, Great Britain Festo Maquinas e Equipamentos Pneumaticos Ltda., Santo André, Brazil

1970 Festo Pneumatic ApS, Copenhagen, Denmark

1971 Festo Pneumatic S.A., Barcelona, Spain

1972 Festo Corporation, Hauppauge , USA

1973 Festo Ltd., Johannesburg, South Africa

1974 Festo Pneumatic S.A., Edo. De México, Mexico

1975 Festo Pneumatic S.K., Teheran, Iran

1976 Festo Pneumatic Ltd., Kowloon, Hong Kong

1977 Festo Inc., Toronto, Canada Festo Pneumatic S.A., Buenos Aires, Argentina Festo OY AB, Helsinki, Finland

1978 Festo Inc., Manila, Philippines

1979 Festo Pneumatic Sdn. Bhd., Kuala Lumpur, Malaysia Festo Co. Ltd., Taipei, Taiwan

1980 Festo Korea Co. Ltd., Seoul, Korea Festo Pte. Ltd., Singapore

1983 Festo Kft., Budapest, Hungary

1986 Festo Controls Pvt. Ltd., Bangalore, India Festo K.K., Yokohama, Japan Festo Autoamação, São Paulo, Brazil Festo Machinex (ab 1993 Festo Bulgaria EOOD), Sofia, Bulgaria

1987 Festo Ltd., Athens, Greece

1988 Festo RF 000, Moscow, Russia Festo Pnevmoavtomatic, Simferopol, Ukraine

1989 Festo Ltda., Bogotá, Colombia Festo Sp.z o.o., Warsaw, Poland Festo San. ve Tic. A.S., Istanbul, Turkey Festo PT, Jakarta, Indonesia 1990 Festo spol.sr.o., Prag, Chechnya Festo S.R.L., Bucharest, Romania

1991 Festo Ltd., Dublin, Ireland Festo Ltd. Auckland, New Zealand Festo Ukraina, Kiew, Ukraine Festo d.o.o., Zagreb, Croatia

1992 Festo Ltd., Bangkok, Thailand Festo d.o.o., Ljubljana, Slovenia

1993 Festo Bulgaria EOOD (bis 1993 Festo Machinex), Sofia, Bulgaria Festo UAB, Kaunas, Lithuania Festo Ltd., Shanghai, China

1994 Festo spol. s r.o., Bratislava, Slovakia

1995 Festo C.A., Maracaibo, Venezuela

1996 Festo OY AB Eesti Filiaal, Tallinn, Estonia

1997 Festo SIA, Riga, Latvia

2001 Festo Chile, Santiago, Chile

Digital Catalogue Information

Minimum configuration:

PII with 500 MHz

32 MB RAM

CD-ROM drive

Monitor with 800x600 pixel

Windows 95/98/NT 4.0/ 2000/ME

Windows 95/98/NT 4.0/2000/ME

1. Insert CD-ROM inappropriate

drive. If the setup-program

starts on its own continue

with point 5. If not…

2. Select the Run command in the

start menu.

3. Enter the code name for your

CD-ROM drive followed by

setup.exe. Example: d;\setup.

exe.

4. Click the Button OK or press

Enter.

5. Follow the Instructions on the

screen.

Networks

The Festo catalogue on CD-

ROM is suitable for network

operation. Please notice the file

Network.txt in the main direc-

tory of this CD- ROM.

Festo is pleased to provide this

software free of charge to as-

sist you in selecting and order-

ing your Festo equipment.

Festo cannot guarantee the

suitability of any equipment

ordered pursuant to the use of

this software for any particular

purpose unless that purpose

has been fully explained to

Festo.

The on line version of the DCI

is available on :

www.festo.com

Further, this software should

not be relied upon in respect of

any matters which are capable

of independent verification.

Festo's liability is expressly ex-

eluded in respect of the matters

referred to in this notice.

The installation of this CD-ROM

does not involve any changes

to your Windows system envi-

ronment.

Your registry data base and the

files WIN.IN1.SYSTEM.INI,

CON-FIG.SYS and AUOTEXEC.

BAT will remain unchanged.

The uninstall program will

completely remove any objects

added during installation.

email: [email protected]

Start page

After inserting the digital pneu-

matic catalogue into your CD-

ROM drive you will automatically

get to the start page.

The main menu on the right hand

side of your screen provides the

following functions: Products,

Software, About Festo, Service,

Order, Information and Settings.

The link [Products] in the main

menu provides access to Festo's

product range, with over 18.000

items. Useful software tools can

be found under [Software].

[About Festo] contains further

information. Clicking on [Service]

will open an interactive world

map with all Festo companies and

branch offices. The link [Order]

takes you into the Order folder.

Technical information, sales con-

ditions and the software license

agreement can be found under

[Information]. The link [Settings]

allows you to choose between the

different languages available, as

well as to update your user's

profile.

The catalogue uses standard

Windows facilities such as scroll-

ing, the right hand mouse key

and the usual tools for adjusting

the window size. For further

information consult your

Windows user's manual or the

online help.

The main menu link [Products]

provides you with various selec-

tion tools which link you to the

window “Search results”.

Place for DCI

Please contact Festo company near you or visit www.Festo.com for the on-line version.

Festo worldwide

Argentina Festo S.A. Edison 2392 RA-1640 Martinez Pcia. de Buenos Aires Tel. ++54 (0)11/47 17 82 14, Fax 47 17 82 15 E-mail: [email protected]

Australia Festo Pty. Ltd. P.O. Box 261 179-187 Browns Road Noble Park North VIC. 3174 Tel. ++61 (0)3/97 95 95 55, Fax 97 95 97 87 E-mail: [email protected]

Austria Festo Gesellschaft m.b.H. Lutzowgasse 14 A-1141 Wien Tel. ++43 (0)1/91 07 50, Fax 91 07 52 50 E-mail: [email protected]

Belgium Festo Belgium nv/sa Rue Colonel Bourgstraat 101 B-Brussel 1030 Bruxelles Tel. ++32 (0)2/702 32 11 Fax 726 90 11 E-mail: [email protected]

Brazil Festo Automacao Ltda. Rua Giuseppe Crespi, 76 Jardim Santa Emilia BR-04183-080 Sao Paulo-SP Tel. ++55 (0)11/69 69 95 00, Fax 69 47 73 11 E-mail: [email protected]

Bulgaria Festo Bulgaria EOOD Tintjava 15-17 BG-1113 Sofia Tel. ++359 (0)2/962 53 06, Fax 962 52 36 E-mail: [email protected]

Canada Festo Inc. 5300 Explorer Drive CON-Mississauga, Ontario L4W 5G4 Tel. ++1(0)905/624 90 00, Fax 624 90 01 E-mail: [email protected]

Chile Festo Chile Mapocho 1901 6500151 Santiago Tel. ++56 (0)2/6 98 46 55, Fax 6 97 07 96

China Festo (China) Ltd. 1156 Yunqiao Road Jinqiao Export Processing Zone 201206 Pudong, Shanghai, PRC Tel. ++86 (0)21/58 54 90 01, Fax 58 54 03 00 E-mail: [email protected]

Colombia Festo Ltda. Avenida Eldorado No. 98-43 CO-Santafe de Bogota D.C. Tel. ++57 (0)1/413 00 88, Fax 415 30 51

Croatia Festo d.o.o. Nova Cesta 181 HR-10 000 Zagreb Tel. ++385 (0)1/619 19 69, Fax 619 18 18 E-mail: [email protected]

Czech Republic Festo spol. s r.o. Pod Belarii 784 C2-143 00 Praha 4-Modrany Tel. ++420 (0)2/61 09 96 11, Fax 61 09 36 34 E-mail: [email protected]

Denmark Festo A/S Islevdalvej 180 DK-2610 Rødovre Tel.++4570211090 Fax 88 8110 E-mail: [email protected]

Singapore Festo Pte. Ltd. 6 Kian Teck Way SGP-Singapore 628 754 Tel. ++65 (0)6264 01 52, Fax 6261 10 26 E-mail: [email protected]

Slovakia Festo spol. sr. o. Gavlovicova ul.l SK-83103 Bratislava Tel. ++421 (0)7/44 25 02 68. Fax 44 45 38 76 E-mail: [email protected]

Slovenia Festo d.o.o. Ljubljana IC Trzin, Blatnica 8 SLO-1236 Trzin Tel. ++386 (0)1/530 21 00, Fax 530 21 25 E-mail: [email protected]

South Africa Festo (Pty.) Ltd. 22-26 Electron Ave. ZA-lsando 1600 Tel. ++27 (0)11/971 55 00, Fax 974 21 57 E-mail; [email protected]

Spain Festo Pneumatic, S.A. Avda.de la Gran Via, 159 (Poligono Gran Via Sur) E-08908 Hospitalet de Llobregat-Barcelona Tel. ++34 (9)3/261 64 00, Fax 261 64 20 E-mail: [email protected]

Sweden Festo AB Stillmansgatan 1 S-20021 Malmo Tel. ++46 (0)40/38 38 00, Fax 18 97 68 E-mail: [email protected]

Switzerland Festo AG Moosmattstrasse 24 CH-8953 Dietikon/Zurich Tel. ++41 (0)1/744 55 44, Fax 744 55 00 E-mail: [email protected]

Taiwan Festo Co.. Ltd. 9, Kung 8th Road Linkou 2nd Industrial Zone, 244 Taipei Hsien, Taiwan, ROC Tel. ++886 (0)2/2601 92 81, Fax 2601 92 87 E-mail: [email protected]

Thailand Festo Ltd. 67/1 Phaholyothin Road. Moo 6, Klong 1, Amphur Klong Luang Pathumthani 12120. Thailand Tel. ++66 (0)2/901 88 00, Fax 901 88 33 E-mail: [email protected]

Turkey Festo San. ve Tic. A.S. Fahrettin Kerim Gokay Cad. No. 281, Ozcelik han - Sahray cedid TR-81080 Kadikoy/lstanbul Tel. ++90 (0)216/411 44 66, Fax 411 44 74 E-mail: [email protected]

Ukraine Festo Ukraina ul. Borissoglebskaja, 11 UA-254070 Kiev Tel. ++380 (0)44/239 24 34, Fax 463 70 96 E-mail: [email protected]

USA Festo Corporation 395 Moreland Road USA-Hauppauge, N.Y. 11788 Tel. ++1 (0)631/435 08 00. Fax 435 80 26 E-mail: [email protected]

Venezuela Festo C.A. Av. 23, Esquina calle 71, No. 22 - 62 Maracaibo. Edo. Zulia Tel. ++58 (0)261/7 59 09 44 , Fax 7 59 04 55 E-mail: [email protected]

Estonia Festo OY AB Eesti Fillaal Turi 10 EE-11313 Tallinn Tel. ++372(0)6/5016 40, Fax 55 81 26 E-mail: [email protected]

Finland Festo OY Makituvantie 9 FIN-01511 Vantaa Tel. ++358 (0)9/87 06 51, Fax 87 06 52 00 E-mail: [email protected]

France Festo E.U.R.L. 5, rue Montgolfier F-93116 Rosny-sous-Bois Cedex Tel. ++33 (0)1/49 35 23 23, Fax 49 35 23 33 E-mail: [email protected]

Germany Festo AG & Co. Postfach D-73726 Esslingen Ruiter Strasse 82 D-73734 Esslingen Tel. ++49 (0)711/347-0, Fax 347-2144 E-mail: [email protected]

Great Britain Festo Limited Automation House Harvest Crescent, Ancells Business Park GB-Fleet, Hampshire 6U13 8XP Tel. ++44 (0)12 52/77 50 00, Fax 77 50 01 E-mail: [email protected]

Greece Festo Ltd. 40 Homosternas Av. GR-11853 Athens Tel. ++30 (0)1/34 12 90 04, Fax 341 29 05 E-mail: [email protected]

Hong Kong Festo Ltd. Unit C&D, 7/F, Leroy Plaza, 15 Cheung Shun Street. Cheung Sha Wan, Kowloon, Hong Kong Tel. ++852/ 27 43 83 79. Fax 27 86 21 73 E-mail: [email protected]

Hungary Festo Kft. Becsi ut 100 H-1034 Budapest Tel. ++36 (0)1/250 00 55, Fax 250 15 93 E-mail: [email protected]

India Festo Controls Private Ltd. Plot No. 226, Bommasandra Industrial Area IND-Bangalore 562 158 Tel. ++91 (0)8110/3 33 59, Fax 3 20 58 E-mail: [email protected]

Indonesia PT. Festo Jl. Sultan Iskandar Muda No. 68 (Arteri Pondok Indah) Jakarta 12240 Tel. ++62 (0)21/2750 7900, Fax 726 73 86 E-mail: [email protected]

Iran Festo Pneumatic S.K. Kh. Ramsar, Ko. Behbahan No. 1 IR-15 Teheran Tel. ++98 (0)21/882 92 25. Fax 882 21 62 E-mail: [email protected]

Ireland Festo Limited Unit 5, Sandyford Park Sandyford Industrial Estate IRL-Dublin 18 Tel. ++353 (0)1/295 49 55, Fax 295 56 80 E-mail: [email protected]

Italy Festo S.p.A. Via Enrico Fermi 36/38 I-20090 Assago (Ml) Tel. ++39 (0)2/45 78 81, Fax 488 06 20 E-mait: [email protected]

Japan Festo K.K. 1-26 10 Hayabuchi, Tsuzuki-ku J-Yokohama 224-0025 Tel. ++81 (0)45/593 56 10, Fax 593 56 78 E-mail: [email protected]

Korea Festo Korea Co. Ltd. 470-9 Kasan-dong Kumchun-ku ROK Seoul 153053 Tel. ++82 (0)2/850 7114, Fax 864 70 40 E-mail: [email protected]

Latvia Festo SIA Deglava iela 60 LV-1035 Riga Tel. ++371 (0)2/57 78 64, Fax 57 79 46 E-mail: [email protected]

Lithuania Festo UAB Karaliaus Mindaugo pr. 22 LT-3000 Kaunas Tel. ++370 (0)7/32 13 14, Fax 32 13 15 E-mail: [email protected]

Malaysia Festo Sdn, Berhad 10, Persiaran Industri Bandar Sri Damansara Wilayah Persekutuan MAL-52200 Kuala Lumpur Tel. ++60 (0)3/632 81 22. Fax 635 64 12 E-mail; [email protected]

Mexico Festo Pneumatic S.A. Av. Ceylan 3 Col. Tequesquinahuac MEX-54020 Tlalnepantla. Edo. de Mex. Tel. ++52 (01)5/321 66 00, Fax 321 66 65 E-mail: [email protected]

Netherlands Pesto B.V. Schieweg62 NL-2627 AN Delft Tel. ++31 (0)15/251 88 99, Fax 26110 20 E-mail: [email protected]

New Zealand Festo Limited 20 Fisher Crescent. MT. Wellington NZ-Auckland Tel. ++64 (0)9/574 10 94, Fax 574 10 99 E-mail: [email protected]

Norway Festo AB Østensjøveien 27 N-0661 Oslo Tel. ++47 (0)22/72 89 50, Fax 72 89 51 E-mail: [email protected]

Philippines Festo Inc. Km. 18, West Service Road, South Superhighway 1700 Paranaque City Tel. ++63 (0)2/7 76 68 88, Fax 8 23 42 19 E-mail: [email protected]

Poland Festo Sp.zo.o. Janki k/Warszawy, ul. Mszczonowska 7 PL-05090 Raszyn Tel. ++48 (02)22/720 41 66, Fax 720 44 76 E-mail: [email protected]

Rumania Festo S.R.L. Str. SfintuI Constantin No. 17 RO-70751 BucurestI Tel. ++40 (0)1/310 29 83, Fax 310 24 09 E-mail: [email protected]

Russia Festo RF 000 Mitschurinskji prosp., 49 RUS-117607Moskwa Tel. ++7 (0)95/737 34 85, Fax 737 34 83 E-mail: [email protected]

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