cci mp-hs - f-dif-di.hu/wp-content/uploads/pdf/3d felulet kiertekeles/cci mp hs...robust design...

12
CCI MP-HS Next generation interferometry at >100 microns/sec.

Upload: vannga

Post on 15-Jul-2018

213 views

Category:

Documents


0 download

TRANSCRIPT

1

CCI MP-HSNext generation interferometry at >100 microns/sec.

2

Understanding structured surfacesThe large field of view and high resolution of

the CCI MP-HS enable the understanding

of complex structured surfaces.

CCI MP-HS: Non-contact 3D optical profiler

High speed metrology without compromise • Scanspeedupto100microns/secondwithoutanylossofdataquality

• 1024x1024pixelarrayforlargeFOVwithhighresolution

• 2.2mmverticalrangewithclosedlooppiezolessZaxisscanner

• AutoStitchasstandard,measureslargepartsathighresolution

Industry leading data quality • 0.1ångstrom resolution over the entire measurement range

• <0.2ångstromRMSrepeatability,<0.1%stepheightrepeatability

• Integratedantivibrationforoptimumnoiseperformance

• NewClaritas20lightconditioning,increasedanglesensitivityimprovesdataquality

Robust design ensures low cost of ownership • PiezolessZaxisscannereliminatesexpensiverepairbills

• Automaticsurfacedetectionpreventscrashdamagetolens

• NewXLoptionforlargerpartswithoutlossofdataquality

• Easeofoperationreducesthepossibilityofoperatorerror

Windows® 7 (64-bit) software • Multi-languagesupportincludingChineseandJapanese

• Advanced64-bitAutoStitchoffersfaststitchingoverlargeareas

• Newtoolsincluding4Danalysisof3Dsurfacesastheyevolveovertime

• Automaticreportgenerationbasedonbatchesofmeasurementdata

3

’’‘‘

Threeelementsofsurfaces–dimension,formandtexture–arecriticaltothefunctionofacomponent.Exceptionalroughnesscapabilitycoupledwithlargeareameasurement,advanceddataanalysis(2Dand3D)andTaylorHobson'sexpertiseprovidesindustryleadingmetrology.

ManyuserslooktoCCIMP-HSforsolvingmeasurementproblemsthatotherinstrumentssimplycannothandle.Withoutstandingrange,resolutionandeaseofoperation,theCCIMP-HScaneasilybecomeyouridealtoolforR&Dandqualityassuranceinawidevarietyofapplications.

Unlimited application possibilities

Grinding stones

Ball bearings

Crankshafts

• Materialresearch

• Bearingroughness

• Polishedoptics

• Texturedsteel

• Diamondturnedsurfaces

• Automotiveinjectors

• Structuredsurfaces

• Medicalimplants

• Sealingsurfaces

• Crankshaftfinish

• Fluidretention(bearingratio)

• Paper/toner

• Phonehandsetfinish

• Toothwear

• SIMScraters

• Waferroughness

• Waferetchdepth

• Solarcells

• LEDs

• MEMS

• Datastorage

LaptopdiffuseroptimizationControllingtheuniformityofthepits

improvesthedisplayquality.Highspeed

measurement allows efficient process

control of the diffuser manufacture.

The CCI has proven highly valuable. The instrument

utilizes Coherence Correlation Interferometry, a Taylor

Hobson-patented technique, to provide both long

scan ranges and high-resolution surface

measurement with a single mode of operation. Professor Manasreh

University of Arkansas, USA

TheCCIMP-HSXLisoptimizedfor the measurement of large components without compromising the resolution

4

Speed, range, resolution, accuracy, reliability – our formula for your success Whateverthecomponent,howeverquicklyyoumustanalyseit,confidenceinyour3DarealmeasurementresultisassuredwiththerevolutionaryCCIMP-HSnon-contactopticalprofiler. Ahighspeed1MPcameracombineswith1/10ångstromverticalresolutionandtheClaritas20lightconditioningtodeliverincrediblydetailedanalysisofallsurfacetypesfromveryroughtoextremelysmooth.

Versatile – ready for a production run or a research project Keepingpacewiththeexpertiseofresearchersandscientists,theCCIMP-HSisreadyforyourmostdemandingmeasurementrequirementsincludingdevelopingfields.Advancedstitchingincreasesthevalueoftheinstrumentbyextendingtherangeofcomponentsthatcanbemeasured.

Ease-of-use reduces the cost of operator training Designedforeaseofusebyscientists,students,developersorproductioninspectors, CCIMP-HShasinnovativefeaturessuchasAutoRange,AutoFringeFindandmulti-sitemeasurmentthatsimplifysettingupandstagingofcomponents.Savevaluabletime,reduceerrorsandquicklygettheresultsyouneed.

Comprehensive platform simplifies ISO-17025 integrationGreatlyexpandyouranalysiscapabilitieswithoutincreasingthecomplexityofyouranalysisprograms.Abroadrangeofcomponentsandsurfacescanbemeasuredwithout the complication of switching between measurement modes or the extra burdenofintermediatelenscalibration.Standardizedmethods,proceduresandreportingeasetheintegrationofCCIMP-HSintoyourqualitymanagementsystem.

CCI MP-HS high speed performance for research and manufacturing

Bearing surface flatnessFlatnessofbearingsurfaceshasadramaticimpact

onbothperformanceandlifetime.Acombination

of advanced stitching and high speed measurement

gives results in minutes rather than hours.

5

’’‘‘

21st century optical profiling

One measurement mode Streamlineyourinspectionprogrambyeliminatingmultipleinspectionroutinesandincompatiblemeasurementreports.OurpatentedCoherenceCorrelationalgorithm provides sub-ångstrom resolution regardless of scanning range so that allsurfacesatanystageinproductioncanbemeasuredonthesameinstrumentanddirectlycompared.

Improved sensitivityThenewClaritas20lightconditioningoffersunrivalleddataquality.Increasedsensitivityprovideslessmissingdataonhardtomeasuresurfacesandanincreaseinmaximumanglecapability,improvingdataqualityandopeningupnewexcitingapplication opportunities.

Coating measurement ThickfilmmeasurementcapabilityisanexcitingadditiontotheCCIMP-HSByaddingawhiteLEDtothesystemcoatingthicknessesdownto1.5micronscanbeanalysedeasilyextendingtherangeofsamplesthatcanbemeasured.TheuniquehighresolutionmeasurementoftheCCIgivesindustryleadingthicknessandstepheightinformationfromsingleandmultilayersamples.

Save valuable time, reduce errors

and quickly get the results you need.

Grinding wheel roughness Difficulttomeasureroughsurfacesneedthe

highresolutioncapabilityoftheCCIMP-HS.

High speed measurement and stitching will

improvetheanalysisbylookingatlargerareas.

6

Next generation 3D camera technology

Higher resolutionCCIMP-HSimagesensorswithhighspeed1024x1024pixelarraysarevastlysuperiortooldVGAvideocameratechnologywhere640x480pixelarraysgrosslylimitlateralresolution.Nowyoucanmeasurelargeareaswithoutthecomplexityorpotentialdistortioncausedbyfieldofviewmultipliers.

Faster measurementsAhighspeedsensorandlargerfieldofview(FOV)meansfewerset-ups,fasterinspectionspeedandbetterutilizationofequipmentandoperators.Costeffectivenessismuchimprovednowthatyoucaninspectmorepartsmorethoroughlyandingreaterdetailwithoutadditionalexpense.

Good results quickly With>1milliondatapointsandtheClaritas20lightconditioning,themeasuredsurfaceisdefinedinsuperbdetail.YoucanidentifysurfaceflawsorpotentialareasofconcernanywhereinthewideFOVandusesoftwareto“zoomin”fordetailedanalysiswithouthavingtowastetimere-measuringthecomponent.

New camera technology High speed with high resolution provides an essential tool for monitoring and improvingyourmanufacturingprocess.Stunning3Dimageswithsub-microndetailcan also be used to gain a better understanding of the sample properties.

Lastcentury640x480

CCIMP-HS1024x1024

Understanding curved surfacesRoughness and form of shallow curved

surfacescanbemeasuredquicklyand

analysedwithoutcontactingthesurface.

7

Powerful automation features

AutoStitch XYZstitchingincreasestheeaseofuseandflexibilityoftheinstruments.Aswellasthestandardstitchingoptionslargecircular,sphericalandannularsurfacesareeasilymeasuredwiththeminimumofeffort.TheXYstitchingcanbecombinedwithZstitchingandotherautomationoptionstomeasurelargecomplexsampleswithhighresolutionquicklygivingtheuserhighqualitydatawiththeminimumofcomplications.

Multi-site measurement Automaticmeasurementofmultiplepartsormultiplesitesonasinglepartwithoutoperatorinterventioncangreatlyincreaseefficiencywhetherinproductionorresearchenvironments.FeaturessuchasAutoRange,AutoFringeFind,AutoCentreandAutoStitchofferadvancedautomationoptionstogivequick,accurateandrepeatable,savingtheuservaluabletimeandeffort.

Z step and measure CombiningtheinnovativeCCIclosedloopscannerandauniquealgorithmthez-stepandmeasuresoftwareallowsyoutomaximisethemeasurementrangewithoutcompromisingresolution.Measurementrangesof40mmorgreaterarenowpossiblewiththisuniquefeatureincreasingtherangeofsamplesbenefitingfrom the high resolution of the CCI instruments.

Automatic range settingSignificant reductions in measurement time are achieved with our exclusive AutoRangefeaturewhichautomaticallysetstheoptimumscanrangebasedonthesamplesurface.Manualsettingofthescanrangeistypicallyaguessinggamethatoftenresultsinoverscanning,longermeasurementtimesandfrustrationforeventhemostskillfuloperators.

Automatic surface detection AutoFringeFindwillincreaseinspectionthroughputbyeliminatingmanualset-upandtheneedtore-takemeasurementscausedbyfalseidentificationofthesamplesurface.Unlikecommonautofocusroutineswhichrequireaflatandsmoothsurface,thisinnovativecouplingofsoftwareandopticalexpertisecandetectalltypesofsurfacesquicklyandautomatically.

Stitched measurement of an annular sealing surfaceAswellasflatnessthefinedetailisidealfor

lookingatroughnessandsurfacedefects.

8

Unrivalled application possibilities CCI single measurement mode gives unbeatable range resolution and accuracy

Injector flatness

CCIisidealforlookingatdieselinjectorassemblies.Thelargefieldofviewandhighdatadensityallowthe flatness and dimensions of the component to be measured and therefore controlled. The high measurementspeedmakesitidealforproductionenvironments.

Curved surfaces

Curvedsurfacessuchascamsandcrankshaftpinscan be slow to measure because of the curvature of the surface. The high speed and high resolution of the CCI MP-HS improves measurement throughput whilekeepingtightprocesscontrol.

Diamond turned surfaces

Faultssuchastoolheighterrorscanbeidentifiedandrectified.Roughnessandwavinessanalysistoolsforcuttingperformanceevaluationandfeedback(chatter,spoke,color,etc)willoptimiseopticalperformance.AdvancedPSDandslope-errortoolsareidealfordiagnosticevaluationoffrequencyerrors.

Super smooth surfaces

CCI MP-HS is able to scan at high speed while still maintainingindustryleadingperformance.Thehighresolutionenablestightertolerances,improvingprocess control. Measurement of sub ångstrom roughnesswithveryhighthroughputisnowpossible.

Optimising PV cell efficiency

Uniform trench depth prevents conducting material flowing out of the trench leading to reduced efficiency.Thehighspeedofmeasurementallowsrapidmeasurementoftrenchdepthandwidth,helping to control the dimensions and therefore improve cell performance.

Rough surfaces

Becauseroughsurfacesscatterlighttheyareoftendifficulttomeasure.TheuniqueCCIalgorithm,highspeedandhighsensitivitycameragiveslessmissingdatathananyofourleadingcompetitorswhile measuring at high speed.

9

CCI MP-HS offers a wide range of advanced analysis

Thick film measurement

Controlling surface roughness

Measurement of honed surface

Fluid retention analysis

Using a white light source it is possible to measure filmthicknessofmultilayerthickfilms.TheCCIalgorithmgivesunrivalledthicknessandinterfaceresolution.

CCIisidealforlookingattheroughnessofverysmoothsurfaces.PSDanalysiscanbeusedtoidentifyanyissuesinsilicon wafer polishing.

High lateral resolution over large areas is perfect for3Dtexturedirectionanalysis.Acombinationoffinedetailandadvancedanalysisofferscriticalassessment of advanced engineered surfaces.

Manyengineeringsurfaces are designed to encourage fluid retention. The bearing ratio of the surface is used to optimizethenumberandshapeofpits,optimizingperformance.

3D honed surface

Ball bearing surface

Texture direction Surface parameters

Bearing ratio analysis

Film thickness

Average profile PSD

Form removed surface

Form removed surface

Top surface

Bottom surface

Silicon surfaces

Air

Film

Substrate

Top surface

Bottom surface

10

Powerful new software features

Key features

Control software Nowwith64bitprocessing,theCCIcontrolsoftwarefeaturesgreaterflexibility,fasteroperatingspeedandimprovedoverallperformance.Compatibilitywithmostmainstreamplatformsoffersthepossibilityofcollaborativeresearchprojectsanddevelopmentofadvancedapplications.

Multi-languagesupportisnowavailabletokeeppacewiththeglobaleconomyand international manufacturing partnerships.

Flexible, user-friendly, all-inclusive software ThelatestgenerationofTalyMapsoftwareassuresconformitywiththelatest3Dstandard,ISO25178,aswellasfullmetrologicaltraceability.Newanalyticalfunctionsinclude4Danalysisof3Dsurfacesastheyevolveovertime,pressureorotherphysicalproperties.Alongwithphoto-realisticfullcolourimages,TalyMapalsoincludesenhancedproductivitytoolssuchastemplatesforrepetitiveworkandautomaticreportgenerationbasedonbatchesofmeasurement data.

Researchfacilities,factoriesanduniversitiesworldwidehavemadeTalyMaptheirpreferredsurfaceanalysissoftware.Itisusedforproductdevelopment,processimprovement,predictivebehaviouranalysisandroutineinspectioninmanysectors.TalyMapiscontinuouslyevolvedbyamulti-disciplinaryteamofspecialistsinmetrology,softwareengineeringandautomationinordertomeetpresentandfuturesurfacemetrologyneeds.

Full metrological traceability Newanalysisworkflowenablessteptraceabilityinananalysisdocument.Newstepscanbeadded,fine-tunedordeletedatanytime.

Statistics for quality control Newstatisticsoptionmakesitpossibletotrackandgeneratestatisticsonparametersacrossmultiplemeasurementdatasets.

Multi-language support TalyMapcanbeconfiguredtoworkinoneofsixEuropeanlanguages,Japanese,Chinese,KoreanorBrazilianPortuguese.

Quick results Minidocfunctionsignificantlyspeedsupreportpreparationbycreatingshortcutstocommonsequences

Customization Addcompanylogos,measurementidentitycards,screennotesandillustrationsincludingbitmaps,textblocksandarrows.

Advanced modules TalyMapadvancedmodulesenhancefunctionalitybyprovidingadditionalanalysisorpresentationcapabilities.

11

†Allparametersmarkedwithanasteriskaresuitableforuser-assignedsingleormultiplequalifiers,e.g.,materialratio(mr)maybeassessedatoneormore slice levels within a single measurement.

Flexible, user-friendly, all-inclusive software

ThelatestgenerationofTalyMapsoftwareassuresconformitywiththe3DstandardISO25178aswellasfullmetrologicaltraceability.Idealforresearchanddevelopmentproducts,thelatest2Dand3Dparameterswillbecritical for future developments.

Alongwithphoto-realisticfullcolourimages,TalyMapalsoincludesenhancedproductivitytoolssuchastemplatesforrepetitiveworkandautomaticreportgeneration based on batches of measurement data.

TaylorHobsonhasawell-deservedreputationforindustry-leadingdataprocessing. Analysisparametersandsoftwaremodulesavailableinclude:

2D parameters 3D parameters

Primary (unfiltered)Pa,Pc,Pdc,Pdq,PHSC,PHtp,Pku,Plo,Plq,Pmr,Pp,PPc,Pq,Prms,Psk,PSm,Pt,Ptp,Pv,Py,Pz,Pz(JIS),P3z,Pfd,Pda,Pla,PH,PD,PS,Pvo

AmplitudeSa,Sq,Sp,Sv,St,Ssk,Sku,Sz

Waviness (filtered)Wa,Wc,Wdc,Wdq,WHSC†,WHtp,Wku,Wlo,Wlq,Wmr†,Wp,WPc†,Wq,Wrms,Wsk,WSm,Wt,Wtm,Wtp,Wv,Wy,Wz,Wz(JIS),W3z,Wda,Wla,Wmax,WH,WD,WS,Wvo

Area & volumeStp,SHtp,Smmr,Smvr,Smr,Sdc

Roughness (filtered)Ra,Rc,Rdc,Rdq,RHSC,RHtp,Rku,Rlo,Rlq,Rmr†,Rp,RPc,Rq,Rrms,Rsk,RSm,Rt,Rtm,Rtp,Rv,Ry,Rz,Rz(JIS),R3z,Rfd,Rda,Rla,Rmax,RH,RD,RS,Rvo

Data analysisStepheight,LateralDistance,Pitch,AngleMeasurement,PeakCount,InteractiveAbbott-FirestoneCurve,VolumeofIslands,FractalAnalysis,MotifsAnalysis,FrequencyAnalysis,DataPatching

Rk (DIN 4776, ISO 13565-2)A1,A2,Mr1,Mr2,Rk,Rpk,Rvk,Rpk*,Rvk*

FunctionalSk,Spk,Svk,Sr1,Sr2,Sbi,Sci,Svi,Sm,Vv,Vm,Vmp,Vmc,Vvc,Vvv

R&W (ISO 12085)AR,AW,HTrc,Pt,R,Rke,Rpke,Rvke,Rx,Trc,W,Wte,Wx,Kr,Nr,SR,SAR,Kw,

FlatnessFLTt,FLTp,FLTs,FLTq,FLTv

Autocorrelation,Nw,SW,SAW

Hybrid & spatialSdq,Ssc,SdrSpc,Sds,Str,Sal,Std,Sfd

Straightness (ISO 12780)STRt,STRp,STRv,STRq

FiltersGaussian,RobustGaussian,Spline,Wavelet,RobustWaveletandMorphological

Copyright© 2013 • Taylor Hobson • CCI MP-HS_GB_V12_3 June

Taylor Hobson UK (Global Headquarters)

PO Box 36, 2 New Star RoadLeicester, LE4 9JQ, England

Tel: +44 116 276 3771 Fax: +44 116 246 0579 email: [email protected]

Taylor Hobson FranceRond Point de l’Epine Champs

Batiment D, 78990 Elancourt, FranceTel: +33 130 68 89 30 Fax: +33 130 68 89 39

[email protected]

Taylor Hobson GermanyPostfach 4827, Kreuzberger Ring 6

65205 Wiesbaden, GermanyTel: +49 611 973040 Fax: +49 611 97304600

[email protected]

Taylor Hobson India1st Floor, Prestige Featherlite Tech Park

148, EPIP II Phase, Whitefield, Bangalore – 560 006Tel: +91 1860 2662 468 Fax: +91 80 6782 3232

[email protected]

Taylor Hobson ItalyVia De Barzi

20087 Robecco sul Naviglio, Milan, ItalyTel: +39 02 946 93401 Fax: +39 02 946 93450

[email protected]

Taylor Hobson Japan3F Shiba NBF Tower, 1-1-30, Shiba Daimon Minato-ku

Tokyo 105-0012, JapanTel: +81 (0) 3 6809-2406 Fax: +81 (0) 3 6809-2410

[email protected]

Taylor Hobson Korea#310, Gyeonggi R&DB Center, 906-5, lui-dong

Yeongtong-gu, Suwon, Gyeonggi, 443-766, KoreaTel: +82 31 888 5255 Fax: +82 31 888 5256

[email protected]

Taylor Hobson China Beijing OfficeWestern Section, 2nd Floor, Jing Dong Fang Building (B10)

No.10, Jiu Xian Qiao Road, Chaoyang District, Beijing, 100015, ChinaTel: +86 10 8526 2111 Fax: +86 10 8526 2141

[email protected]

Taylor Hobson China Shanghai OfficePart A, 1st Floor, No. 460 North Fute Road

Waigaoqiao Free Trade Zone, Shanghai, 200131, ChinaTel: +86 21 5868 5111-110 Fax: +86 21 5866 0969-110

[email protected]

Taylor Hobson SingaporeAMETEK Singapore, 10 Ang Mo Kio Street 65

No. 05-12 Techpoint, Singapore 569059Tel: +65 6484 2388 Ext 120 Fax: +65 6484 2388 Ext 120

[email protected]

Taylor Hobson USA1725 Western Drive

West Chicago, Illinois 60185, USATel: +1 630 621 3099 Fax: +1 630 231 1739

[email protected]

www.taylor-hobson.com

© DiskArt™ 1988

TAYLOR HOBSONA8248 ISO9001

OPTIMA�UKAS

Serving a global marketTaylor Hobson is world renowned as a manufacturer of precision measuring instruments used for inspection in research and production facilities. Our equipment performs at nanometric levels of resolution and accuracy.

To complement our precision manufacturing capability we also offer a host of metrology support services to provide our customers with complete solutions to their measuring needs and total confidence in their results.

Contracted Services from Taylor Hobson

• Inspection services measurement of your production parts by skilled technicians using industry leading instruments in accord with ISO standards

• Metrology training practical, hands-on training courses for roundness and surface finish conducted by experienced metrologists • Operator training on-site instruction will lead to greater proficiency and higher productivity • UKAS Calibration and Testing certification for artifacts or instruments in our laboratory or at customer’s site

For the above services, contact our Center of Excellence:email: [email protected] or call: +44 116 276 3779

• Design engineering special purpose, dedicated metrology systems for demanding applications

• Precision manufacturing contract machining services for high precision applications and industries

• Preventative maintenance protect your metrology investment with a Talycare service cover plan

For the above services, contact our Sales Department:email: [email protected] or call: +44 116 246 2034

2624