capabilities in laser processing€¦ · linear stages and gantries rotary stages controls controls...
TRANSCRIPT
Cut t ing • Abla t ion • Mark ing • Micromachin ingWeld ing • Dr i l l ing • Scr ib ing
www.aerotech.com
Dedicated to theScience of Motion
CAPABILITIES IN
ADVANCED HIGH TECHNOLOGYMANUFACTURING SOLUTIONS FOR:Medical Device FabricationData Storage Components and SystemsSemiconductor Wafer and DevicesMilitary and Aerospace ComponentsAutomotive Parts FabricationPhotovoltaic and other Alternative Energy SourcesAdditive Manufacturing
LASERPROCESSINGand MICROMACHINING
3
4
5
6
10
11
12
13
14
15
16
17
19
20
21
22
23
24
26
28
30
32
32
34
36
38
39
40
42
43
Con
tent
s
2
www.aerotech.com WORLD HEADQUARTERS: Aerotech, Inc., Pittsburgh, PAPhone: 412-963-7470 Email: [email protected]
CONTENTSHigh-Throughput Laser Manufacturing
LASER CUTTING APPLICATIONS
Flat Sheet Processing
Ceramic Cutting/Diamond Cutting and Processing
LASER MICROMACHINING
Stents, Hypotubes, and Cylindrical Material Processing
Stencils and PCB Micromachining
Laser Micromachining Components
LASER WELDING
2D and 3D Welding
Hermetic Seam Welding
Fuel Cell Welding
Remote Laser Welding
LASER DRILLING
Laser Drilling
LASER ABLATION
Laser Ablation
Mask and Memory Repair
LASER SEMICONDUCTOR PROCESSING
Wafer Singulation
Flat-Panel Display Manufacturing
LASER SCRIBING
LED Scribing
LASER MARKING
PCB Marking
Nmark CLS/AGV
GENERAL LASER PROCESSING MECHANICS
PRO Series Linear Stages
Linear Stages and Gantries
Rotary Stages
CONTROLS
Controls Software
Controllers
ADVANCED LASER CONTROL
Firing Modes
COMPANY PROFILE
Aerotech at a Glance
Engineered Systems
Awards and Recognition
Capabilities in Other Markets
Bringing Value and Convenience to Our Customers
Worldwide Training and Support
SOLUTIONS FOR
SOLUTIONS FOR
SOLUTIONS FOR
SOLUTIONS FOR
SOLUTIONS FOR
SOLUTIONS FOR
SOLUTIONS FOR
SOLUTIONS FOR
SOLUTIONS FOR
SOLUTIONS FOR
SOLUTIONS FOR
Copyright © 2013, Aerotech, Inc.Information in this catalog is subject to change without notice.
Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: [email protected] GmbH, Germany • Phone: +49-911-9679370 • Email: [email protected]
Aerotech KK, Japan • Phone: +81-47-489-1741 • Email: [email protected] China • Phone: +852-3793-3488 • Email: [email protected]
High-Throughput Laser M
anufacturing
3
HIGH-THROUGHPUTLASERMANUFACTURINGSince 1970, Aerotech has been dedicated to developingsolutions for the laser processing industry. We continuallyenhance our existing product line and invest in new developmentsto address the most stringent customer requirements. This resultsin products that offer the highest accuracy, highest throughput,and highest reliability, ultimately leading to the lowest costof ownership for our customers.
Aerotech’s broad range of motion control products means we canprovide the optimal solution for your application. Our expertiseincludes systems for shop floor, R&D, vacuum, and cleanroomenvironments. Our ability to provide custom-engineered productsand systems to end users, integrators, and high-volume OEMs isunmatched, and our products deliver quality, performance,flexibility, and the highest return on investment.
Aerotech’s focused development has led to our state-of-the-artAutomation 3200 motion controller capable of synchronizing32 axes of motion, with advanced features such as PositionSynchronized Output (PSO) for precise laser control, coordinatedmotion between servomotors and galvos (Nmark™ SSaM andCLS), seamless integration of PLCs, and sophisticated plottingand diagnostic utilities that enable rapid debugging of processand motion parameters.
Coupling these advanced control features with mechanicsthat are designed for long life and low maintenance in harshenvironments provides laser machine manufacturers the means to build the best overall systems in the industry.
Laser ProcessesServed:
• Cutting
• Welding
• Marking and Engraving
• Drilling
• Ablation
• Micromachining
• Cladding
• Peening
Flat
She
et P
roce
ssin
g
4
www.aerotech.com WORLD HEADQUARTERS: Aerotech, Inc., Pittsburgh, PAPhone: 412-963-7470 Email: [email protected]
SOLUTIONS FOR
LASER CUTTING APPLICATIONSLaser cutting involves directing the focused light of a laser, which then either melts, burns, or vaporizes away material.There are numerous advantages of laser cutting over mechanical cutting, including higher cut quality, no blade wear(since it is a noncontact process), and a smaller heat-affected zone that minimizes part distortion. CO2 and Nd:YAGlasers are the most popular laser selections, depending on the materials being processed. Typical applications includeflat sheet processing, ceramic and diamond cutting, and tube processing.
FLAT SHEET PROCESSINGFlat sheet processing is typically accomplished with one of twoconfigurations: either with a moving laser over stationarymaterial, or moving material under a stationary laser. Bothhave advantages, and Aerotech’s products are specialized tomeet the most aggressive demands of both options.
XY Linear Motor Axes• Hardened protective covers and
tensioned side-seals protectinternal components
• Integrated multi-axis cablemanagement system for simplifiedaddition of customer cables andhoses
• Noncontact direct-drive motors forhighest accuracy contouring ofprecision components
Sealed Linear Motor Gantry• Sealed design protects linear motors
and encoders, allowing use in harshenvironments
• Low CG of the bridge coupled withdual linear motors/encoders and stiffmounting interfaces permit micron-leveldynamic accuracies on high-speedcutting applications
• Large bend radius cable managementsystem is sized for integration of alaser’s fiber delivery system for simpleand seamless integration of the laser
• Mounting surfaces on the bridgestructure enable attachment of opticsfor free-space laser delivery systems orgalvo scanners
Featuring/Recommendations:• A3200 controller
• High performance linear motor stages(ALS5000/ALS25000 stages)
• Sealed linear-motor gantries (ASGS15000)
ASGS15000 sealedlinear motor gantry isperfect for harshenvironments.
ALS25000XY linear motorstage system with hardcover.
Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: [email protected] GmbH, Germany • Phone: +49-911-9679370 • Email: [email protected]
Aerotech KK, Japan • Phone: +81-47-489-1741 • Email: [email protected] China • Phone: +852-3793-3488 • Email: [email protected]
Ceram
ic Cutting/D
iamond C
utting and Processing
5
XYθ Direct-Drive Axes• Extremely smooth velocity regulation
for higher surface quality anddecreased material waste
• Precise multi-axis contouring forprocessing complex profiles whilemaintaining high product yields
• Direct-drive stages for maintenance-free operation
CERAMIC CUTTINGLasers are ideal for cutting and drilling delicate ceramic materials without damaging the workpiece. However,additional care needs to be taken to protect against the fine debris generated. Aerotech’s stages are well suited tomeet the demanding requirements of ceramic processing while protecting against contamination for 24/7 worry-freeoperation.
DIAMOND CUTTING AND PROCESSINGDiamond cutting is one of the main processes involved in altering a diamond from rough stone into a valuable, facetedgem. Since diamonds are one of the hardest surfaces to cut, lasers are uniquely qualified to produce a higher yield ofprecise and distinctive profiles that are difficult to attain with traditional cutting methods.
XY Linear Motor Axes• Wide-body linear motor lower axis
provides increased roll stiffness formulti-head ceramic processing,increasing effective work area
• Low angular errors allow accurateplacement of part features over largeareas while high dynamic stiffnessholds tight tolerances on small partfeatures
• Optional air purge, in addition tostage hard cover and side seals, keepsa positive air pressure inside the stage,protecting it against debris and fineparticulates for increased system lifeand consistent quality
Linear-motor-driven ALS5000WBlower axis and ALS5000 upper axisin an XY configuration.
Sten
ts,
Hyp
otub
es,
and
Cyl
indr
ical
Mat
eria
l Pro
cess
ing
6
www.aerotech.com WORLD HEADQUARTERS: Aerotech, Inc., Pittsburgh, PAPhone: 412-963-7470 Email: [email protected]
SOLUTIONS FOR
LASER MICROMACHINING
STENTS, HYPOTUBES, AND CYLINDRICAL MATERIAL PROCESSINGMany laser cutting and welding processes require the handling of cylindrical or bar-stock-type materials.Aerotech’s extensive line of products includes component-level solutions as well as optimized, combinationlinear/rotary motion systems designed to automate the handling of these materials. Direct-drive technologycoupled with a frictionless rotary union for collet actuation enable speeds in excess of 600 rpm for high-throughput applications. ER collets are available for precision cylindrical-gripping applications, and a 3-jawconcentric gripper is available for I.D./O.D. and odd-form profiles.
Laser micromachining can be loosely defined as the manufacturing of parts with geometries in the 100s of microns withgeometric tolerances in the 1- to 10-micron range. Working with these small feature sizes does not necessarily implycorrespondingly small net part size. Large parts composed of many small features, such as stencils, can be consideredfor a micromachining process. Likewise, applications such as laser cutting of stents, resistor trimming, and 3Dprototyping also fall into this category. Aerotech can provide a wide range of motion platforms with optimized controlarchitectures capable of maintaining micron-level part geometries for parts ranging in size from 1 to 1000 mm.
Featuring/Recommendations:• A3200 controller
• Integrated mechanical packages(LaserTurn® 1, LaserTurn® 2, LaserTurn® 5)
• Direct-drive, high-torque, rotary axis withintegral pneumatic collet adapter or 3-jawgripper (ACS, ACS LP)
LaserTurn® 1• Tube capacity from 0.1 micron
to 5 mm
• Combined low inertia rotary axisand low mass moving stageprovides the highest throughput inthe LaserTurn series
• Collet system with moving taperdesign limits axial tube motion forunattended manufacturing ofunlimited length parts
• Wet-cutting option available to limitbackwall and thermal damage tothe material under process
Configuration Options:• Front and rear tooling platforms for easy
integration of material handling
• Pneumatic activated, seal-less rotaryunion provides years of maintenance-freeoperation
• Parallel jaw gripper for automated tubeadvance
• Bushing alignment platform with Y/Z micrometer adjustment reduces tubeTIR at the cut point
LaserTurn® 1 is a winner of the 2008Control Engineering Engineer’sChoice Award.
Stents, Hypotubes, and C
ylindrical Material Processing
7
LaserTurn® 2• Tube capacity from 0.5 micron to 10 mm
• Highest torque-to-inertia ratio in theLaserTurn series reduces processing time incomplex contours
• Low TIR ER collet system minimizesmechanical positioning induced errorsduring the laser cutting process
• Wet-cutting option available to limitbackwall and thermal damage to thematerial under process
STENTS, HYPOTUBES, AND CYLINDRICAL MATERIAL PROCESSING
LaserTurn® 5• Interchangeable ER25 and ER40
collet system provides the widestmaterial handling range of theLaserTurn series (0.5 mm to 30 mm)
• Optional 3-jaw gripper for insidegripping of large diameter materialsor for handling odd-form components
• Largest linear motor in the LaserTurnseries for high duty-cycle, high-loadapplications
• Wet-cutting option available to limitbackwall and thermal damage to thematerial under process
CCS Mechanical-BearingDirect-Drive Rotary Stage • Integral pneumatic collet chuck
• Captive collet design minimizes axial tubemotion during clamp/unclamp cycles
• Clear aperture for product feed-through
• Integral mounting features support customer-supplied wet-cutting accessories
• Direct-drive brushless motor and encoder
Aerotech’s CCS series rotarystages with integrated capturedcollet chucks provide automatedmaterial handling capability for awide range of materials andapplications.
LaserTurn® 5 is for high duty-cycle,high-load applications.
LaserTurn® 2 high torque-to-inertiaratio reduces processing time incomplex contours.
Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: [email protected] GmbH, Germany • Phone: +49-911-9679370 • Email: [email protected]
Aerotech KK, Japan • Phone: +81-47-489-1741 • Email: [email protected] China • Phone: +852-3793-3488 • Email: [email protected]
STENTS, HYPOTUBES, AND CYLINDRICAL MATERIAL PROCESSINGVascuLathe® represents a revolutionary approach to satisfying the demanding requirements of stent manufacturingapplications. The fully integrated motion system couples automated material handling functionality with highperformance direct-drive linear and rotary motion capability. The integral linear/rotary design increases throughput by2 to 5 times when compared to traditional screw-based or other manufacturing approaches, while still maintainingsubmicron tolerances on tight part geometries.
The increased throughput gives much needed flexibility in the extremely competitive stent-manufacturing environment.The higher throughput of the VascuLathe implies that fewer machines are required to produce an equivalent number ofstents, resulting in lower total labor costs and reduced floor space requirements. Alternatively, the VascuLathe can beused to meet increased and varied product demand within the existing manufacturing space, saving the costsassociated with facility expansion.
Stainless roll covers protectbearings and feedback fromcontamination
Optional wet cutting withcoolant return
Integral frictionless rotaryunion optimized for stentmanufacture provides alifetime of maintenance-free operation
Simplified, reliable cablemanagement system ensures trouble-free operation
Precision ER16, ER25, or ER40 collets support0.5 mm to 30 mm O.D. tubing, enabling theVascuLathe to support the manufacture of awide array of peripheral, cardiovascular, andneurovascular stents
Parallel jaw gripper for automated advance oftubing material
Manual alignment fixture with precisionreference surface and locating pins for rapidreplacement of bushing material
Lower material centerline reduces machineheight and fixture sizes giving a lower profile,more rigid system
Sophisticated machine structure facilitates easyalignment, maintenance, and operation
Threaded tooling areas located at the frontand back of the VascuLathe ease integration ofcustom material handling features
Sten
ts,
Hyp
otub
es,
and
Cyl
indr
ical
Mat
eria
l Pro
cess
ing
8
www.aerotech.com WORLD HEADQUARTERS: Aerotech, Inc., Pittsburgh, PAPhone: 412-963-7470 Email: [email protected]
U.S. Patent 7,038,334U.S. Patent 7,105,956U.S. Patent 7,420,298
1
2
3
4
5
6
7
8
9
10
VascuLathe DS uses a dual spindleconfiguration to produce twice theoutput of the standard VascuLathe.For a 10% increase in space(approximate finished machine size)the DS provides a 100%improvement in capacity, furtherreducing floor space, facility, andmanpower requirements. TheVascuLathe DS is also very effectiveat increasing throughput forprocesses that are intrinsically slowdue to laser power or materialprocessing limitations.
Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: [email protected] GmbH, Germany • Phone: +49-911-9679370 • Email: [email protected]
Aerotech KK, Japan • Phone: +81-47-489-1741 • Email: [email protected] China • Phone: +852-3793-3488 • Email: [email protected]
Stents, Hypotubes, and C
ylindrical Material Processing
9
STENTS, HYPOTUBES, AND CYLINDRICAL MATERIAL PROCESSING
For a given partmanufacturing tolerance,the VascuLathe produces13 times as many partsper hour when comparedto the entry-levelLaserTurn 2.
When cutting speeds and cycletimes are fixed by processvariables, the VascuLathe canprovide a 3X improvement incontour accuracy when comparedto the LaserTurn product family.
Maximum ContinuousCut Part Length
LaserTurn 1
LaserTurn 2
LaserTurn 5
VascuLathe
100 mm
300 mm
300 mm
300 mm
Throughput Comparison
Part
s Pe
r H
our
Aerotech Motion Platforms
10
www.aerotech.com WORLD HEADQUARTERS: Aerotech, Inc., Pittsburgh, PAPhone: 412-963-7470 Email: [email protected]
STENCILS AND PCB MICROMACHININGThe manufacture of stencils and PCBs presents unique challenges for a laser micromachining system. The relativelylarge size of the parts coupled with high feature density requires a positioning system with long travel, high rms forceoutput, and a stiff mechanical structure to ensure micron-level form accuracy. Aerotech’s AGS15000 series gantry hasbeen optimized for stencil and other high-accuracy, high-throughput, laser machining processes. The bridge height isreduced to minimize final working height of the optics, significantly reducing parasitic error motion, and dual linearmotors and linear encoders eliminate yaw errors over the full travel.
Sten
cils
and
PC
B M
icro
mac
hini
ng
AGS15000 • Bridge axis driven through its
center of gravity to greatlyincrease the resonant frequency ofthe system, improving geometrictolerances of the stencil apertures
• Custom cable managementsystems support Z axes, autofocusheight-sensing heads, and fiber-laser beam delivery
CADFusion CADFusion bridges the gap between partdrawings and motion control. Users needonly import a vector-based DXF drawing intothis easy-to-use environment to see theresulting tool-path graphically onCADFusion’s canvas. Part optimization iseasy and intuitive with shape re-ordering,feature scaling, and rotational/translationalfeatures at your fingertips. Overall processmanagement, including local and globalfeedrate control and lead in/out moves, canbe automatically configured in advance sothat every import file produces a consistentmotion control program.
U.S. Patent 7,401,412The AGS15000 series Cartesian gantry system isdesigned for ultra-precision, high-dynamic contouring.
CADFusion easily imports vector-based drawing files and produces G-code motion programs.
Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: [email protected] GmbH, Germany • Phone: +49-911-9679370 • Email: [email protected]
Aerotech KK, Japan • Phone: +81-47-489-1741 • Email: [email protected] China • Phone: +852-3793-3488 • Email: [email protected]
Laser Microm
achining Com
ponents
11
LASER MICROMACHINING COMPONENTSThe majority of laser micromachining applications involve components on the order of 100 x100 x100 mm and smaller.Aerotech offers component stages and preconfigured one- to three-axis assemblies that are well suited for theseoperational volumes. The recommended platforms are all direct-drive, direct-feedback devices that have the submicronresolution and accuracy required for this application space.
ANT95-L-Z and ANT130-L-Z • Nanometer performance in a large travel format
• High resolution (2 nm), repeatability (75 nm)and accuracy (300 nm)
• In-position stability of <2 nm
• Anti-creep crossed-roller bearings
• High dynamic performance
ANT-20G Goniometers• Noncontact, non-cogging, frictionless direct-drive
for zero backlash or hysteresis
• High speed (150°/s)
• High resolution (0.05 arc second)
• Excellent in-position stability
• Large angular range – 20° of travel
• Orthogonal mounting of two cradles providesrotation about the same point
• No maintenance
• Compact design
ANT95-L Single-Axis Linear Stage• Noncontact, non-cogging, frictionless direct-
drive – zero backlash or hysteresis
• High resolution (1 nm), repeatability (75 nm)and accuracy (250 nm)
• In-position stability of <1 nm
• Anti-creep crossed-roller bearings
• High dynamic performance
• Available in X, XY, XYZ and many othercombinations
The ANT-20G series offersa 20° rotation angle.
The ANT95-L series offers 25, 50, 75 or 100 mm travel.
The ANT130-L-Z is availablewith 35 or 60 mm travel.
The ANT95-L-Z is availablewith 25 or 50 mm travel.
2D
and
3D
Wel
ding
12
www.aerotech.com WORLD HEADQUARTERS: Aerotech, Inc., Pittsburgh, PAPhone: 412-963-7470 Email: [email protected]
SOLUTIONS FOR
LASER WELDING2D AND 3D WELDING2D and 3D laser welding processes are used in a variety of industries for a vast array of products. Lasers provide asignificant advantage in terms of throughput, speed, and weld quality. Aerotech has successfully designed and built amultitude of systems for the most demanding of these applications. The combination of our award-winning controllersand reliable mechanical components results in an edge over any competing technology.
Precision Multi-AxisAssemblies • Combining linear and rotary
axes ensures that the laser beamdelivery is perpendicular to thepart, providing maximum controlover quality and consistency
• Systems can be precision-alignedto maintain tight tolerances andsealed to protect your capitalinvestment
Multi-AxisLinear/RotaryCombinations• Low profile, direct-drive
configurations feature highresolution and a compactform factor, a combinationthat maximizes productivityper unit of space
Direct-drive linear and rotary stagesmake up this four-axis linear/rotarycombination system.
Sealed gantry with largeoffset in the AB rotary axisassembly for offsetwelding applications.
Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: [email protected] GmbH, Germany • Phone: +49-911-9679370 • Email: [email protected]
Aerotech KK, Japan • Phone: +81-47-489-1741 • Email: [email protected] China • Phone: +852-3793-3488 • Email: [email protected]
Herm
etic Seam W
elding
13
HERMETIC SEAM WELDINGThe market for implantable medical devices, such as pacemakers, defibrillators, and neurostimulators, is expanding.As technology advances, the processes required to make these devices safe and effective are becoming increasinglycomplex. Laser welding, in particular, has allowed the processes to keep pace with the demands of the market.Aerotech has the expertise and experience in medical device manufacturing requirements to provide an optimalsolution with maximum return on investment.
HermeSys™: A SpeciallyDesigned System forHermetic Seam Welding• The integrated multi-axis mechanical
structure has very high stiffness, whichallows high accelerations with minimalfollowing error during the rapidstarts/stops and direction changesduring the welding process
• Optional dual-driven rotary clampassembly ensures consistent contactbetween the half-shells during thewelding process
• Three linear axes (X/Y/Z) for weldingaround case penetrations
• Supports laser heads from multiplevendors with various focal lengths formaximum process flexibility
Real-Time Kinematics inAerotech's A3200 Controller • The weld profile is programmed in
linear/arc segments or points on acubic spline interpolated path,removing the need for complex post-processing tools to create multi-axislaser weld paths
• Part geometry and welding speedscan be optimized on the machinewithout re-posting the weld profile,increasing productivity
HermeSys was designed specifically toimprove the hermetic seam-welding process.
Fuel
Cel
l Wel
ding
14
www.aerotech.com WORLD HEADQUARTERS: Aerotech, Inc., Pittsburgh, PAPhone: 412-963-7470 Email: [email protected]
FUEL CELL WELDINGFuel cells are poised to become a significant part of the global transition to renewable energy sources. Their potential isparticularly promising for automotive applications, but the requirements for economic production of fuel cells are nottrivial. Laser welding is one of the key technologies in the development of this production process. Aerotech has theanswers to these challenges.
Aerotech Controllers• Position Synchronized Output (PSO)
for precision laser programming andcontrol on the weld paths in the fuelcell stacks
• Extensive component and application-level diagnostics for easy optimization,such as part path vector errormeasurement for path programoptimization to avoid cumulative errors
Extruded View ofFuel Cell
Typical Fuel CellStack Assembly
Laser weld path
Aerotech Linear Motor Gantries • High speed of up to 1 m/s to
achieve economical productionthroughput
• High accuracy and repeatability tomaintain tight tolerance and avoidcumulative errors in the fuel cellstacks at those high speeds
The AGS1000 Cartesian gantry provides thehigh accuracy and repeatability necessaryfor fuel cell welding applications.
Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: [email protected] GmbH, Germany • Phone: +49-911-9679370 • Email: [email protected]
Aerotech KK, Japan • Phone: +81-47-489-1741 • Email: [email protected] China • Phone: +852-3793-3488 • Email: [email protected]
Remote Laser W
elding
15
AMG LP Series Direct-Drive Gimbals• High-accuracy angular positioning
and high stiffness for precise,repeatable pointing
• Direct drive, brushless servomotorsresult in zero backlash and arc-secondaccuracy
• Cog-free design for outstandingvelocity stability
• Continuous 360° rotation of azimuthand elevation including built-in slipring for unlimited application flexibility
• Large mirror capacity well suited forhigh-power laser applications
A3200 ControllerUtilizing transformation functions inAerotech’s A3200 controller totransform rotational motion into X/YCartesian space allows for simplifiedprogramming in linear dimensions orimport from CAD drawings.
REMOTE LASER WELDINGRemote laser welding involves scanning a fixed-focus laser beam over a workpiece from a distance using a mirrormounted on a gimbal. Since minimal setup time is required to position the laser, and the beam may be quickly scannedover a large area with minimal motion, cycle time is significantly reduced.
AMG LP (Low Profile) gimbals provide precise angularmotion with the high performance customers expectfrom Aerotech products.
Lase
r D
rilli
ng
16
www.aerotech.com WORLD HEADQUARTERS: Aerotech, Inc., Pittsburgh, PAPhone: 412-963-7470 Email: [email protected]
SOLUTIONS FOR
LASER DRILLINGNd:Yag and Q-Switched lasers are typically used in laserdrilling applications. Laser drilling is usually accomplishedusing one of two methods: either with percussion laser drillingor trepanning the beam. While percussion drilling is often afaster process, trepanning the beam results in a lower heat-affected zone and allows for complex hole geometries. In bothcases, precise contouring of the motion axes is required tomaintain tolerances.
Featuring/Recommendations:• A3200 controller
• High-performance linear motor stages(ALS5000/ALS5000WB)
• Direct drive, high-torque rotary tilt axis (ADRT)
• Direct drive, low-profile rotary axis (ADR)
3D Hole Drilling forTurbines and Fuel InjectorsTurbine blade and fuel injector hole-drilling requires a complex multi-axis motion platform to ensure the correctorientation and shape of the hole relative to the surface of the part. Depending on the size of the part and requiredfeature accuracy, platforms can be set up as a 5-axis gantry system or split-axis configuration with X/Y/A/B on themachine base and a bridge-mounted Z axis.
• High resolution direct-drive axes allow micron-level dynamic tolerances fordrilling complex contour, deep aspect-ratioholes
• Powerful, noncontact linear motors enablehigh accelerations for rapid directionreversals of complex contours, increasingthroughput
• Wide-body lower axis minimizes cantilever load effects
• Increased bearing separation of tilt axisallows for greater system stiffness andimproved part tolerances
• Counterbalanced, direct-drivetilt/rotary axes allow arc-secondprecision positioning of the part in3D space
ALS5000 wide-bodylinear motor stage
ADR160 direct-driverotary stage
Aerotech’s direct-drive linear and rotary stages offer theaccuracy, speed, and resolution required for today’s laserdrilling applications.
Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: [email protected] GmbH, Germany • Phone: +49-911-9679370 • Email: [email protected]
Aerotech KK, Japan • Phone: +81-47-489-1741 • Email: [email protected] China • Phone: +852-3793-3488 • Email: [email protected]
Laser Ablation
17
SOLUTIONS FOR
LASER ABLATIONUltra-fast lasers and excimer lasers are traditionally used inapplications where material ablation is required. Ablation is anathermal process where the photon energy of the light issufficient to break the chemical bonds at the atomic level,converting the material directly from a solid into a plasma. Thetime duration of the pulse for ultra-fast lasers is shorter than theheat diffusion time in the material, which results in no thermaldamage, recasting, or heat-affected zone. The short pulseduration also produces material removal rates that are quitelow (nanometers per pulse) when compared to microsecond-regime IR lasers. This small depth of ablation per pulse can beused to create 3D structures on a nanometer scale.
Excimer lasers also work through an ablation process. However, the beam profile is square or rectangular as opposedto the circular pattern typical of ultra-fast lasers. The excimer beam is passed through a mask that clips the beam energyinto a pattern defined by the geometry of the mask. This masking technique makes it easy to ablate complex patterns.Feature sizes projected onto the material through the mask can be adjusted by defocusing the laser, and it is possible tobuild complex three-dimensional patterns in materials using multiple masks and the defocusing technique.
X/Y/RotaryMask Alignment Platform• Low profile X/Y/Rotary combination eases
integration into existing optical systems whilereducing pitch/roll induced positioning errors
• Large, clear 120 mm aperture allows forexposure of large features or placement ofmultiple beam profiles on a single mask
• Direct-drive linear motor stage has excellentvelocity regulation for moving maskapplications
• Very stiff mechanical structure with shortsettling time for high throughput, repeatedmove and expose sequences
Featur ing/Recommendat ions :• A3200 controller
• High-performance linear motor, open-framestages (ALS3600)
• Direct drive, open-aperture rotary axis (ADRT)
• Direct drive, low-profile rotary axis (ADRS)
MaskAlign can meet the needs of even themost demanding applications with linearresolution options to 10 nm and rotaryresolution of 0.017 arc sec.
Lase
r A
blat
ion
18
www.aerotech.com WORLD HEADQUARTERS: Aerotech, Inc., Pittsburgh, PAPhone: 412-963-7470 Email: [email protected]
SOLUTIONS FOR
LASER ABLATIONCustom Large-Profile Z-Lift Stage• Large-aperture Z stage provides a stable
platform for focal adjustment
• High-speed linear motors allow for fast focalplane changes to quickly modify mask aspectratios for 2D and 3D applications
• Standard and custom solutions available to suitmost any focal plane adjustment requirements
3D Ultra-Fast Laser Processing• High-resolution (4.5 nm) lift stage to precisely
set focal position in ablation applications
• X/Y air bearings with extremely flat travelmaintain consistent focal position over theoperating envelope
• Direct-drive linear motors and encoders coupledwith the air-bearing linear axes are capable ofextremely small step size (10 nm) over largetravel areas (100 mm) for the accurateplacement of sub-micron part features
AVL125 verticallift stage
ABL1000XY air-bearing stage
Aerotech can manufacture acustom system to meet yourexact application requirements.
Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: [email protected] GmbH, Germany • Phone: +49-911-9679370 • Email: [email protected]
Aerotech KK, Japan • Phone: +81-47-489-1741 • Email: [email protected] China • Phone: +852-3793-3488 • Email: [email protected]
Mask and M
emory Repair
19
MASK AND MEMORY REPAIRLaser ablation is ideal for the repair of photomasks used inlithography processes as well as the repair of defects infinished semiconductor devices. The increasing density andcomplexity of the patterns used in modern semiconductormanufacturing processes require precise control of the laserfiring position. Precise focal position must also be maintained tolimit the variation in spot size. Aerotech’s Position SynchronizedOutput feature ensures that the laser is triggered in the preciselocation required to ablate the part defects. Firing can betriggered on the fly from an array of positions that represent part defects found during the inspection process. Planarair-bearing stages are used to position the part because their low working height minimizes Abbe errors at the workpoint, and flat travel minimizes variations of focal position. Two-axis laser interferometer feedback ensures directmeasurement of the part location with sub-nanometer resolution.
Planar X/Y Air-Bearing withLaser Interferometer Feedback• Planar X/Y air-bearing configuration maintains
focal position with extremely flat travelcharacteristics
• Excellent straightness for repeatable rasterscanning operations
• 2D planar laser interferometer feedback directlymeasures part displacement withsub-nanometer resolution
• Optional precision multi-zone vacuum chucksupports different material sizes
Featuring/Recommendations:• A3200 motion controller
• Position Synchronized Output
• ABL9000 planar air-bearing withinterferometer feedback
This system features air-bearing stages and two-axis laserinterferometer feedback to provide sub-nanometerresolution.
Waf
er S
ingu
latio
n
20
www.aerotech.com WORLD HEADQUARTERS: Aerotech, Inc., Pittsburgh, PAPhone: 412-963-7470 Email: [email protected]
SOLUTIONS FOR
LASER SEMICONDUCTOR PROCESSINGSemiconductors are present in nearly every modern electronic device. Developing techniques to maximize yield andminimize cost during manufacturing is essential to remain competitive and successful in today’s marketplace. Lasershave added flexibility during the semiconductor manufacturing process and, coupled with Aerotech’s leading-edgemotion developments, will allow your process to remain at the forefront of innovation and efficiency.
WAFER SINGULATIONWafer singulation (dicing) involves separating the individual silicon chips from a wafer following the processing of thewafer. Singulation with a laser has distinct advantages over a mechanical dicing saw due to the smaller width of the cut,minimized cracking, and reduced heat-affected zone, all of which increase the usable process area of the costly wafer.
Open-Frame Linear Motor Axes• Large aperture allows for operations
on the top and bottom of the substrate
• Minimized planar flatness eliminatesthe need for autofocus
• Exceptional geometrical tolerancesand inherent orthogonality ensure high tolerances are maintained at high speeds
Precision integration ofthe wafer chuck allowsfor reduced start-up costs
Direct-drivetechnologyguaranteesconsistentperformanceover the life ofthe product
Optional Z andθ mechanicsallow forvarying waferthickness andorientations
Patented braking mechanismprevents dither on rotary axisduring mechanical scribing
150-200 μm die spacing
The ALS3600 is available in travels from 100 mm x 100 mm to 400 mm x 400 mm.
XYZθ Linear Motor Axes• High accuracy, minimized dynamic
yaw, and excellent dynamicstraightness allow narrow streetsfor wafer dicing
• Optional Z and θ mechanics allowfor varying wafer thickness andorientations; scalable mechanicsallow handling of multiple wafersizes
Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: [email protected] GmbH, Germany • Phone: +49-911-9679370 • Email: [email protected]
Aerotech KK, Japan • Phone: +81-47-489-1741 • Email: [email protected] China • Phone: +852-3793-3488 • Email: [email protected]
Flat-Panel Display M
anufacturing
21
FLAT-PANEL DISPLAY MANUFACTURINGFlat-panel display manufacturing applications present several challenges for motion systems, including optimizing thedynamic characteristics of the system while accommodating increasingly longer travels. To meet these demands,Aerotech has applied our patented technologies to design systems ideally suited for flat-panel display applications.
Planar Air-Bearing• Optimized dynamic straightness and
yaw characteristics to ensure scan-lineparallelism throughout full travel
• Granite reference ensures optimalflatness
• Simplified integration of additionalprocess related systems onto custombridge structures
• Scalable mechanics canaccommodate various panel sizes
• Optional direct-drive rotary stageprovides high accuracy rotationalmotion for fiducial alignment
• Optional high-stiffness Z axis providesfocus adjustment to accommodatepanel thickness variations whileminimizing angular errors inducedduring XY turns
This gantry-style FPD inspection stationfeatures a travel of 1800 x 800 x 200 mm.
AVL1000Optional high-stiffness Z axis provides focusadjustment to accommodate panel thicknessvariations while at the same time minimizingangular errors induced during XY turns.
ARA1000Optional direct-drive rotary stageprovides highly accurate rotationalmotion for fiducial/pattern alignment.
LED
Scr
ibin
g
22
www.aerotech.com WORLD HEADQUARTERS: Aerotech, Inc., Pittsburgh, PAPhone: 412-963-7470 Email: [email protected]
SOLUTIONS FOR
LASER SCRIBINGLaser scribing is the process of ablating and removing thin film-materials in a variety of patterns. Lasers offer a numberof advantages over mechanical scribing including higher precision processing, greater control during the patterning,smaller kerf width, and quicker processing speeds. Aerotech systems are engineered to take advantage of these capabilities.
LED SCRIBINGLEDs continue to be utilized in an increasing range ofapplications including backlighting of electronicdevices such as mobile phones, televisions and tabletPCs, automobiles and general lighting. Improvingthroughput and yield through manufacturingefficiencies will be vital to reduce product cost.
• Various travels and configurationsavailable
• Excellent dynamic straightnessallows high yield even when narrowstreet widths are required
• High precision combined with highspeed in special scribe operations
• Tightly coordinated control ofstages and laser ensures uniformspot overlapping
• Various direct-drive rotary optionsfor precision wafer alignment andaccurate dual-direction scribing
• Optional machine base and bridgestructure ensure precision alignmentand system-level performance
• Optional open-frame designs fordual-sided scribing
Machine base andbridge structuresensure precision.
Open-frame designsallow dual-sided scribing.
Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: [email protected] GmbH, Germany • Phone: +49-911-9679370 • Email: [email protected]
Aerotech KK, Japan • Phone: +81-47-489-1741 • Email: [email protected] China • Phone: +852-3793-3488 • Email: [email protected]
PCB M
arking
23
SOLUTIONS FOR
LASER MARKINGLaser marking applications use high-speed rotational mirror assemblies, typically referred to as scanners, to direct alaser onto a workpiece. The technology is deployed in a wide array of applications due to its low cost and high speed.
Scanner resolution and accuracy is fixed over the full angular travel of the mirrors. As the field of view of the scannerincreases, the effective marking resolution and accuracy decreases. In many applications the scanner is combined withtraditional linear or rotary servo axes to mark regions larger than the field of view. The marking sequence consists of amovement by the servo stage followed by a marking operation with the scanner. Using this approach, repetitivemarking patterns that fit within a single field of view can be distributed over a large area.
PCB MARKINGPCB marking applications involve the writing of barcodes, symbols, and other character-type data. Multiple PCBs aregrouped in pallets and presented to the machine for marking. The small size of the features being marked requires acorrespondingly small field of view to ensure legible results. The scanner must be moved over the pallets with an X/Ypositioning system to access all the regions to be marked.
Cartesius Standard Duty• Cartesian gantry configuration eases
integration of conveyor systems forautomated marking processes
• High-pitch screw option supportsspeeds in excess of 1000 mm/s formaximum throughput
• Multiple system configurationsoptimized for various load capacities
• Optional Z axis (shown) for automatedfocal adjustment
The Cartesius gantry is available in bothstandard duty (shown) and heavy dutyversions to match your application.
Nm
ark
CLS
/AG
V
24
www.aerotech.com WORLD HEADQUARTERS: Aerotech, Inc., Pittsburgh, PAPhone: 412-963-7470 Email: [email protected]
Nmark CLS Features• Micro-amp/degree and sin/cos primary
feedback inputs
• Two channels of 40 MHz line driver quadratureencoder inputs for marking on the fly or IFoV
• Eight optically-isolated digital inputs (5/24 V)
• Eight optically-isolated digital outputs, sinking orsourcing (5/24 V)
• Four 16-bit differential analog inputs
• Three 16-bit analog outputs
• Eight digital inputs
• Two digital outputs
• Three optically-isolated laser outputs
• Three differential laser outputs
• Three FireWire® ports
• Dedicated 5-24 V emergency stop sense input
• Internal power supply
• 5 VDC, 500 mA user output power for encoder
• Laser outputs configurable as sinking or sourcing
AGV Specifications
A3200 Nmark CLS (CLOSED-LOOP SCANNER)
AGV GALVANOMETER
Electrical Specifications AGV-10HP AGV-14HP AGV-20HP
Drive System Brushless Direct-Drive Galvano Motor
Feedback Noncontact Rotary Encoder
Mechanical Specifications AGV-10HP AGV-14HP AGV-20HP
Beam Aperture 10 mm 14 mm 20 mm
Maximum Scan Angle (Optical) ±20°
Beam Displacement 13.0 mm 18.00 mm 25.1 mm
Resolution 0.05 μrad (>23 bit) 0.03 μrad (>24 bit) 0.03 μrad (>24 bit)
EnvironmentOperating 0 to 50°C; 90% RH maximum (no condensation)
Storage -20 to 60°C; 90% RH maximum (no condensation)
Material Aluminum (Black Anodize Base/Blue Powder Coat Cover)
MTBF (Mean Time Between Failure) 20,000 hours
Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: [email protected] GmbH, Germany • Phone: +49-911-9679370 • Email: [email protected]
Aerotech KK, Japan • Phone: +81-47-489-1741 • Email: [email protected] China • Phone: +852-3793-3488 • Email: [email protected]
Nm
ark CLS/A
GV
25
Continuing Excellence in Combined Scanner/Servo MotionAerotech’s Nmark CLS closed-loop scanner module for the Automation3200 motion platform allows direct control of galvo scanner servo motionfor marking parts of unlimited size and complexity. The 100% digitalscanner control removes the need for programmable delays in the markingsequence, and allows laser firing (PSO) based on real-time scannerpositional feedback.
Infinite Scanner Field of View (IFoV)Scanners have been used with servo axes to mark objects that exceed theoperating envelope of the scanner. Applications were previouslyimplemented using a move and expose sequence where the scanner wouldmark the part and the servo would reposition the part for a subsequentmarking operation. This approach has limitations when a feature beingmarked exceeds the field-of-view of the scanner. Small angular and linearoffsets in the servo axes produce discontinuities in the features that cross theboundary between adjacent marking fields. By combining the servo andscanner control into a single platform, it is now possible to mark largefeatures with continuous motion of the servo axis and simultaneous markingby the scanner.
Making the Difficult EasyDirect, coordinated control of scanner and servo axes in one integratedsoftware environment eliminates the programming overhead associatedwith interfacing two separate control systems, resulting in reducedimplementation time and increased marking efficiency. Scanner motion canbe combined with rotary axis motion to mark on the face or edge ofcylindrical profiles. Rectangular bitmaps that exceed the scanner field-of-view width can be marked in one continuous operation. Complexoperations comprised of many small features distributed across a largearea can be marked in a continuous fashion with a significant reduction inprocessing time.
Full Featured I/O
Nmark CLS has support for CO2 and YAG lasers with specialized functionssuch as first-pulse suppression and tickle frequency outputs. Control signalscan be configured as sinking or sourcing, 5-24 VDC, allowing for easyinterface to many different laser manufacturers. General purpose analogand digital I/O is also provided for control or monitoring functions such aslaser power, door interlocks, pump operation, and material handling. Twohigh-speed encoder inputs are available for synchronization with movingmaterial applications (marking on the fly).
Design Choices10, 14 and 20 mm apertures with standard F-Theta lens interfaces providemaximum application flexibility. The AGV can be configured toaccommodate 1064, 532, and 355 nm wavelengths with others available.Furthermore, a variety of focal lengths are available as standard, withcorrection files provided to remove lens distortion effects.
• Expand scanner field-of-view withoutsacrificing effective pixel resolution
• Mark long vectors with one continuouspass
• Draw large-scale graphics withoutstitching multiple exposures
• Mark on a tube or other irregularlyshaped object without manuallyrepositioning
• Single programming environment forboth scanner and servo axesminimizes application complexity
• Laser firing based on real-time scannerposition
• Optical feedback device offersoutstanding thermal stability
• Industry-best resolution of >24 bits when used with Aerotech’sNmark CLS controller
• Wide range of apertures and focallengths
• Many choices of mirror surfacetreatments for a variety of laserwavelengths
PRO
Ser
ies
Line
ar S
tage
s
26
www.aerotech.com WORLD HEADQUARTERS: Aerotech, Inc., Pittsburgh, PAPhone: 412-963-7470 Email: [email protected]
SOLUTIONS FOR
GENERAL LASER PROCESSINGAdvanced laser processes demand an equally advanced set of mechanical components to meet today’s demandingspecifications. Aerotech’s robust, complete line of linear and rotary stages is designed to take on all environments andapplications. Aerotech mechanical systems will outperform any other in laboratory, production, vacuum, and cleanroomenvironments.
Available options on linear and rotary stages:• Direct drive or ball screw
• Mechanical bearing or air bearing
• Vacuum preparation
• Cleanroom assembly and preparation
PRO SERIES LINEAR STAGESThe PRO Series is designed to operate in demanding production environments. Four different models with multiple basewidths are available to provide maximum flexibility for a wide range of manufacturing applications. Many models of thePRO Series are stocked in the Aerotech Fast Delivery Service program, allowing for shipment in 1-2 weeks or less fortime-critical applications.
Key PRO Series features include:• External mounting features for quick system assembly
• Hardcover design with side seals provides years of maintenance-free operation
• Multiple frame sizes and large travel selection supports a wide range of load requirements
• NEMA motor interface allows for the attachment of standard brush, brushless, and stepper motors
The PRO Series consists of the PRO115, PRO165, PRO225, and PRO280 (not shown). These hardcover, side-sealed stages are well-suited for many different laserprocessing applications.
Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: [email protected] GmbH, Germany • Phone: +49-911-9679370 • Email: [email protected]
Aerotech KK, Japan • Phone: +81-47-489-1741 • Email: [email protected] China • Phone: +852-3793-3488 • Email: [email protected]
PRO Series Linear Stages
27
PRO Series XY• Micron-level accuracy and
repeatability matches up well withYAG-based laser processingapplications
• 5 mm/rev screw suitable for verticalaxis applications
• Foldback option available for space-constrained applications
PRO-HS Series• Higher pitch ball-screw allows for
speeds up to 1400 mm/s for high-speed machining operations
• Large diameter screw supportstravels up to 1500 mm
• Can be combined with standard PRO Series stages to optimize speedand load capacity on a per-axisbasis
PRO-LM Series• Direct-drive linear motor with linear
encoder provides higher top speedand acceleration than the PRO-HSseries with improved positioningaccuracy
• No ball-screw-related critical speedlimitation allows for maximum velocityacross the full travel range
• Standard cable managementconfigurations ease the assembly ofmulti-axis systems
• Multiple frame sizes for maximumsystem configuration flexibility
The PRO-LM includes hardcoverand side-seal benefits with thehigher speed and accuracyavailable from a linear motor.
PRO-HS Series uses a higherpitch ball-screw to attain speedsup to 1400 mm/s.
The PRO Series is available in alarge range of travels, with manymodels part of the Aerotech FastDelivery Service program.
Line
ar S
tage
s an
d G
antr
ies
28
www.aerotech.com WORLD HEADQUARTERS: Aerotech, Inc., Pittsburgh, PAPhone: 412-963-7470 Email: [email protected]
ALS Series• External mounting
features for quicksystem assembly
• Hardcover andside-seal designfor years ofmaintenance-freeoperation
• Stiffer bearingsthan the PROseries allow forincreased loadcapacity
• High accuracylinear encoderoption forapplications thatrequire excellentvelocity regulation
• Multiple framesizes and travellengths providesystemconfigurationflexibility
ABL1000• Noncontact
air-bearingtechnology withmagneticpreload yields asmall footprintfor space-constrainedapplications
• Excellent flatnessof motion forsmall focal depthsystems
• Optimized forsingle axis orshort travel X/Yconfigurations
ABL1500• Full air preload
for increased rollstiffness andhigher loadcarryingcapability
• Two frame sizesallow forincreased loadcarryingcapacity in X/Yconfigurations
• Optional high-accuracyencoder forimprovedvelocity stability
ABL2000• Wide cross-
section magneticpreload air-bearing allowsfor higher loadsthan the ABL1000series
• Proprietarymanufacturingtechniques result in excellentpitch, roll, andyawcharacteristics
• Optimized cablemanagementsystem for yearsof maintenance-free operation
ABL8000• Active air-
bearing preloadon all surfacesprovides highstiffness forheavy loads
• Wide footprintideally suited forX/Y applications
• Choice ofstandard, high accuracy,and laserinterferometerfeedbackdevices
LINEAR STAGES AND GANTRIES
Visit www.aerotech.com for
Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: [email protected] GmbH, Germany • Phone: +49-911-9679370 • Email: [email protected]
Aerotech KK, Japan • Phone: +81-47-489-1741 • Email: [email protected] China • Phone: +852-3793-3488 • Email: [email protected]
Linear Stages and Gantries
29
ABL9000• Full air preload
on all surfacesfor increased rollstiffness andload carryingcapacity
• Co-planar X/Yaxes reduceworking height tominimize roll andpitch errors
• Exceptionalstraightnesscharacteristicsfor high-accuracylaser scribingapplications
AGS1000• Compact design
minimizes floorspace
• Well suited formarking “moveand expose”operations
• CMSexpandable tointegrate fiber-laser beamdelivery
• Optionalmachine baseand risers easesystemintegration
AGS10000• Large format
gantry with highforce linearmotors wellsuited for lasercutting andweldingapplications
• Stacked X/Yconfigurationprovidesclearance forlaser optics andmaterialhandling withinthe operatingenvelope
• Scalable cablemanagementsystem allows forintegration offocus axis andfiber-laser beamdelivery
AGS15000• Planar X/Y
design improvessystem stiffnessto minimizecontour errors inhigh-speedcutting andweldingprocesses
• Planar designeasily supportsthe integration ofcomponents for“flying optics”applications
• Scalable cablemanagementsystem allows forintegration offocus axis andfiber-laser beamdelivery
Cartesius• T-style gantry
allows for clearaccess on theside of themachine formaterialload/unloadoperations
• Standardconfigurationsinclude left- andright-handed, XY,XYZ, and XZsystems
• Multiple stagewidths availableto optimizefootprint andload capacity fora wide range ofapplications
our complete product lines.
Rota
ry S
tage
s
30
www.aerotech.com WORLD HEADQUARTERS: Aerotech, Inc., Pittsburgh, PAPhone: 412-963-7470 Email: [email protected]
ADRS• Ultra-low profile
minimizesworking height
• Cog-free slotlessmotor design foroutstandingvelocity stability
• Direct-coupledencoder foraccuratemeasurement oftable position
• Multiple framesizes forapplicationflexibility
ADRT• Large diameter
clear aperturefor product feed-through or laserbeam delivery
• Wide bearingseparation forimprovedmoment loadcapability
• Outstandingwobble andrunoutcharacteristics
• Four differentframe sizes withmultiple stackheights provide awide range ofload carryingcapabilities andoutput torques
ACS• Integral
pneumatic ERcollet holder or 3-jaw chuck forautomatedmaterialhandling
• Clear aperturefor product feed-through
• Normally openor normallyclosed gripperoptions for fail-safe materialholding
• Frictionlessrotary unionprovides alifetime ofmaintenance-freeoperation
ALAR• Direct-drive,
large-aperturerotary stageeases integrationof laser beamdelivery orcustom partfixtures
• Limited-travelversionsavailable tosupportspecializedmachineconfigurations
• Large bearingsprovide highpayload andmoment loadcapability
• Five differentaperture sizesranging from100 mm to 325 mm formaximumflexibility
ROTARY STAGES
Visit www.aerotech.com for
Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: [email protected] GmbH, Germany • Phone: +49-911-9679370 • Email: [email protected]
Aerotech KK, Japan • Phone: +81-47-489-1741 • Email: [email protected] China • Phone: +852-3793-3488 • Email: [email protected]
Rotary Stages
31
AGR• Gear-driven
rotary stage withlarge apertureeases integrationof laser beamdelivery orcustom partfixtures
• Direct-coupledoutput encoderfor improvedpositioningaccuracy
• Innovativepreloadingdesign lengthensworm-gear life
• Range ofgearing optionsand aperturesizes providesconfigurationflexibility
CCS• Integral
pneumatic colletchuck
• Captive colletdesign minimizesaxial tube motionduringclamp/unclampcycles
• Clear aperturefor product feed-through
• Integralmountingfeatures supportcustomer-supplied wet-cuttingaccessories
• Direct-drivebrushless motorand encoder
ABRS• Low profile
air-bearingminimizes stack-up related errorsin multi-axissystems
• Zero cogging,direct-drivemotor for ultra-smooth velocityregulation
• Large air-bearingsurfaces providehigh stiffness andload capacitywith excellentaxial and radialerror motions
• Clear aperturefor product feed-through
ABRT• Fully constrained
rotary air-bearingdesign for high-moment-loadapplications
• Large diameterclear aperturefor product feed-through
• Zero cogging,direct-drivemotor for ultra-smooth velocityregulation
• Three differentframe sizes for systemconfigurationflexibility
our complete product lines.
Con
trol
s
32
www.aerotech.com WORLD HEADQUARTERS: Aerotech, Inc., Pittsburgh, PAPhone: 412-963-7470 Email: [email protected]
SOLUTIONS FOR
CONTROLS
SOFTWAREUse the libraries and SDK to develop yourown front-end and applications with .NET,C#, C++, and LabVIEW®.
• Easy setup with calculators and Autotune routine
• Use state-of-the-art IDE for developingyour motion program
• Second-to-none diagnostics toolkit
• Conditional 2D error plotting
CONTROLLERS
Diagnostics Loop Transmission
Automation 3200• Up to 32 tasks
• PC-based
• RS-274 G-code
• Advanced features fordemanding applications
• 1 to 32 axes ofcoordinated motion
• Scanner control for marking
• Tightly integrated laser functionality
• Retrofit package
Ensemble• Up to 4 tasks
• Stand-alone 1- to 10-axis controller
• Versatile, cost-effective,coordinated motion
• PWM or linear drives (10-150 A peak)
• Brushless, brush, orstepper motors
• Desktop or panel mount
• .NET, C++, or LabVIEW®
Linear and Rotary Servomotors
Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: [email protected] GmbH, Germany • Phone: +49-911-9679370 • Email: [email protected]
Aerotech KK, Japan • Phone: +81-47-489-1741 • Email: [email protected] China • Phone: +852-3793-3488 • Email: [email protected]
Controls
33
Autotune Encoder TuningPID Calculator
Soloist• Elegant, economical, single-axis
controller
• Stand-alone
• PWM or linear drives
(10-150 A peak)
• .NET, C#, VB.NET®, LabVIEW®
• Ethernet, USB
AccessoriesNetwork Connectivity• Ethernet/IP™
• Modbus®/TCP
• DeviceNET
• EthernetTCP/IP
• USB
• RS-232
• GPIB
CONFIGURE YOUR AUTOMATION SOLUTION WITH AEROTECH• Scalable • Flexible • Easy to use • Lowest cost of ownership
Lase
r Fi
ring
Mod
es
34
www.aerotech.com WORLD HEADQUARTERS: Aerotech, Inc., Pittsburgh, PAPhone: 412-963-7470 Email: [email protected]
SOLUTIONS FOR
ADVANCED LASER CONTROLHermetic welding, micromachining, and ablation require precise control and spacing of laser pulses on the materialbeing processed to provide consistent quality. When using a fixed-frequency laser, this is complicated by the need forconstant velocity, severely limiting processing speeds when faced with complicated geometries. Aerotech’s PSO solvesthis problem.
• Aerotech’s Position Synchronized Output (PSO) feature coordinates your motion subsystem with laser firing toproduce the highest quality parts and minimize cycle time
• Fully configurable to interface with lasers equipped with externally synchronized control, including CO2, YAG, andexcimer fiber lasers
• PSO functionality includes several easily programmed operation modes
FIRING MODES
Array-Based Firing• PSO fire points are defined in an array based on position
• Applications include grayscale marking of materials whereeach pixel has differing frequency and power characteristics,and processing of different materials in the same set of motioncommands
Windowing• Output pulses are restrained inside a user-defined window with the first
pulse relative to the edge of the window
• Excellent for when the processing of a part requires the axes to movebeyond the part for settling or direction reversal in applications such asflat-panel manufacturing or fuel injector drilling
Position
APPLICATIONSManufacturing• Stents• Hermetic Welding• Turbine Blade Holes• Flat Panel Manufacturing
• Fuel Injector Drilling• Grayscale Marking• High-Speed Data Acquisition• Camera Trigger• Sensor Trigger• Non-Destructive Tests
Benefits•Consistent cuts and welds
without burn spots
• Consistent processindependent of velocity andacceleration
Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: [email protected] GmbH, Germany • Phone: +49-911-9679370 • Email: [email protected]
Aerotech KK, Japan • Phone: +81-47-489-1741 • Email: [email protected] China • Phone: +852-3793-3488 • Email: [email protected]
Laser Firing Modes
35
Fixed Distance Firing• Single- or multiple-pulse output as a function of up to three axes’
position feedback
• Minimizes heat-affected zone in welding, cutting, and drilling
• Outstanding for stent manufacturing, hermetic welding, and drillingholes in turbine blades
User-Specified Pulse Train
User-Specified Pulse TrainPortion of Bitmap
Single Pulse Output Portion of Bitmap
User-Specified Pulse Train
Aer
otec
h at
a G
lanc
e
36
www.aerotech.com WORLD HEADQUARTERS: Aerotech, Inc., Pittsburgh, PAPhone: 412-963-7470 Email: [email protected]
Cor pora te Headquar te r s • P i t t sburgh , PA • USA
Worldwidestartup serviceand on-sitetraining
Fully equippedon-site trainingfacilities
AEROTECH AT A GLANCE
Worldwide Service and SupportHigh Volume Manufacturing
Over 100,000axes installed
worldwide
Aerotech United Kingdom Aerotech Germany Aerotech Japan Aerotech China Aerotech Taiwan
Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: [email protected] GmbH, Germany • Phone: +49-911-9679370 • Email: [email protected]
Aerotech KK, Japan • Phone: +81-47-489-1741 • Email: [email protected] China • Phone: +852-3793-3488 • Email: [email protected]
Aerotech at a G
lance
37
Technically Superior Components High Performance Sub-Assemblies
Best-in-Class Subsystems Comprehensive Technical Support Services
Custom softwareapplication support
Advanced analyticaltechniques foroptimization ofsystem geometry
3D models to facilitatefaster and more
accurate system layout
PRO SeriesLinear Stage
Highestperformancebrushlesslinear androtary motors
Award-winning Automation 3200 1-32 axis motion,vision, PLC, robotics, and I/O platform
Highly integrated motionsubsystems with machineframe, display, andpackaged electronics
Custom-engineeredvacuum- and cleanroom-compatible systems
Production-proven,large format air-bearingsystems for flat paneland semiconductorapplications
Ndrive® A3200 Npaq®
LaserTurn® 5 high-speedcylindrical laser cutting system
Highest throughput linear motorCartesian gantry systems
XYAB subsystemfor high dynamicaccuracypositioning inlaser drilling andmicromachiningapplicationsAGR rotary
stage
Engi
neer
ed S
yste
ms
38
www.aerotech.com WORLD HEADQUARTERS: Aerotech, Inc., Pittsburgh, PAPhone: 412-963-7470 Email: [email protected]
ENGINEERED SYSTEMS
Ion Beam Profiling in Vacuum
Advanced Laser Machining Discrete Part Milling Machine
Liquid-Cooled, Vacuum-Prepped System
Precision Optical Production High-Precision Air Bearings
Rapid Prototyping Advanced Pick-Place-Inspect Station
Patterned Media Inspection
High-Volume Production Inspection Station
4-Axis Coordinate Measuring Machine
Optical Lens FabricatingPrinthead Inspection Station High-Accuracy Laser Machining
Electronic Inspection High-Speed Optical Indexer
Aerotech engineers and manufactures specialtyhigh-performance subsystems. Our highly-trainedstaff of experienced software and hardwareengineers enables our customers to get toproduction readiness faster. Aerotech providesreal-time collaborative support — either at yourfacility, at our facility, or on the web.
Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: [email protected] GmbH, Germany • Phone: +49-911-9679370 • Email: [email protected]
Aerotech KK, Japan • Phone: +81-47-489-1741 • Email: [email protected] China • Phone: +852-3793-3488 • Email: [email protected]
Aw
ards and Recognition
39
AWARDS AND RECOGNITION
Semiconductor International 2007 Editors’Choice Best Product –
WaferMax T™
Semiconductor International 2008
Editors’ Choice Best Product –
Ensemble™
2008 Control EngineeringEngineers’ Choice Award
– LaserTurn® 1
2011 Control EngineeringEngineers’ Choice Award
– ANT130-XY
2012 Control Engineering Engineers’ Choice Award Finalist Product –
MotionPAC
2013 Prism Award Finalist –Nmark CLS, Nmark AGV
Design News2008 Golden Mousetrap Finalist Product –
Nmark™ SSaM
Design News2009 Golden Mousetrap Finalist Product– LaserTurn® 1, AGS15000, ANT95-XY
Design News 2010Golden Mousetrap Winner –
ANT130-XY
EuroAsia IC 2006 Industry Award– WaferMax Z™
Lightwave OFC 2001 Attendees’ Choice Award –
FiberAlign® 130
Design News 2002 Best Product Nominee –
Automation 3200
Machine Design Excellence in Manufacturing Technology –Slides/Ways 1998 and 2000
Aandrijftechniek 2002 Award –
FiberMax®
Product Design and Development 2002 Top 50 Product –
Automation 3200
Lightwave NFOEC 2002Attendees’ Choice Award –
FiberMax®
Cap
abili
ties
in O
ther
Mar
kets
40
www.aerotech.com WORLD HEADQUARTERS: Aerotech, Inc., Pittsburgh, PAPhone: 412-963-7470 Email: [email protected]
CAPABILITIES IN OTHER MARKETS
Photovoltaic, Fuel Cell and Alternative Energy
Extensive application experience and a broad array of motionproducts make Aerotech the perfect partner for your photovoltaic(solar cell), fuel cell and other alternative energy manufacturingand testing platforms. Our worldwide operation has engineeredand manufactured a multitude of motion platforms for thesemarkets and we continue to provide innovative solutions.
Control Systems
Aerotech motion controllers, motors and drives are utilized in our ownpositioning systems and by end users and OEMs worldwide. From ourAutomation 3200 software-based motion controller that can control upto 32 axes, to the Soloist single-axis servo controller, to the Ensemblemulti-axis stand-alone motion controller, we provide a variety of optionsto suit your application.
General Automation
Since 1970 Aerotech has been a manufacturer of top-quality automationproducts. The breadth of the our product line, including automatednanopositioners, planar air-bearing systems, high-speed gantries, linear androtary and lift stages, brushless linear and rotary servomotors and drives,single- and multi-axis motion controllers, goniometers and gimbals/opticalmounts makes Aerotech unique among motion control manufacturers.Aerotech is Dedicated to the Science of Motion.
Test and Inspection
Aerotech is involved in test and inspection across a wide array ofindustries with applications including CMMs, ultrasonic, eddy current,x-ray, optical, and electronic. All of these applications rely on Aerotechproducts’ unmatched precision, accuracy, and durability. Opticalinspection solutions range from high-end linear-motor-driven modelspackaged with all control elements in an optimized machine base, tomodular systems specifically designed for cost-sensitive applications.
Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: [email protected] GmbH, Germany • Phone: +49-911-9679370 • Email: [email protected]
Aerotech KK, Japan • Phone: +81-47-489-1741 • Email: [email protected] China • Phone: +852-3793-3488 • Email: [email protected]
41
Capabilities in O
ther Markets
Defense and Aerospace
Aerotech has manufactured hundreds of high-accuracy systems includingmany for high vacuum (10-6 torr) and cleanroom environments. Ourequipment is used for testing electro-optic systems, high-performance laserprocessing, materials testing and manufacturing, target tracking, satellitesensor calibration and verification, inertial guidance testing, scanning,optical pointing, repeatability and life-cycle testing for quality control.Custom systems are available with minimal development time.
Medical Device Manufacturing and Life Sciences
Aerotech manufactures high-performance motion systems andcomponents for medical and life sciences applications includingstent cutting, medical laser welding systems for cardiac pacemakersand catheters, IOL and contact lens manufacturing, DNAsequencing, blood sequencing, haptic mills and drills, x-raymachines, magnetic resonance scanners and CAT scanners. Wecan customize a medical laser welding system for any need.
Government and Educational Research and Development
The breadth of Aerotech’s product line offers solutions for the wide-rangingrequirements of academic and government R&D. Our nanopositionersprovide the accuracy required not only for photonics experiments, but alsofor micro- and nano-machining workstations. Aerotech’s multi-axis rotarypositioners and gimbals offer the high precision needed for defense, satelliteand space science research. Unique applications call for unique solutions,and Aerotech can provide custom-engineered systems to meet your needs.
Electronics Manufacturing and AssemblySpeed, accuracy and reliability are the key requirements for pick-and-placemachines, stencil cutting machines, printed circuit board assembly and otherelectronic manufacturing and assembly equipment. Since 1970 Aerotech hasexceeded the most stringent criteria used to judge electronic manufacturing andassembly equipment, and we continue to raise the standard with our advancedmotion technologies by addressing industry-specific challenges in pick-and-placemachines, stencil cutting machines and printed circuit board assembly systems.
Brin
ging
Val
ue a
nd C
onve
nien
ce to
Our
Cus
tom
ers
42
www.aerotech.com WORLD HEADQUARTERS: Aerotech, Inc., Pittsburgh, PAPhone: 412-963-7470 Email: [email protected]
BRINGING VALUE AND CONVENIENCETO OUR CUSTOMERS
Vertical IntegrationOur expertise in motors, amps,controls and stages enables us toprovide a complete optimizedsolution.
InterconnectabilityAerotech systems are designedto work together. This allows youto spend time and resources onyour process, not on systemintegration.
System CheckoutPrior to shipment, all systems arefully assembled and checked out.All system parameters are factory-set based on your specifications.
DocumentationAll systems are fully documented.System interconnect-drawings,specification sheets and stagecertification plots are includedwith every system.
Aerotech offers its customers a number ofimportant advantages as a single-source provider:
R&DOur engineering teams arededicated to product developmentand continuous improvement.
Technology LeaderAerotech engineers arecontinuously updating existingproducts and introducing newproducts. We are truly “Dedicatedto the Science of Motion.”
QualityAerotech is an ISO 9001 certifiedsupplier with a rigorous qualityprogram.
Worldwide PresenceAerotech is committed to supportingcustomers worldwide. We operatefull sales and service facilities in theUnited Kingdom, Germany, Japan,Taiwan and China. We also maintaina growing number of direct fieldsales and application engineeringoffices throughput North America,and work with representatives acrossthe globe.
Support & ServiceBecause all system elements aredesigned and manufactured byAerotech, we provide the highestlevel of technical knowledgeavailable. Unlike companies thatonly manufacture part of thesystem, Aerotech manufacturesall of the system components,minimizing service time.
Single-Source SolutionAerotech designs andmanufactures precision stages,motors, drives and controllersgiving you all of the componentsneeded for a complete system.
Application ExperienceSince 1970, Aerotech hascompleted thousands of motioncontrol projects, spanning anextensive range of applications.
Corporate Headquarters • Pittsburgh, PA • USA
AerotechUnited Kingdom
AerotechGermany
AerotechJapan
Aerotech China
AerotechTaiwan
Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: [email protected] GmbH, Germany • Phone: +49-911-9679370 • Email: [email protected]
Aerotech KK, Japan • Phone: +81-47-489-1741 • Email: [email protected] China • Phone: +852-3793-3488 • Email: [email protected]
Worldw
ide Training and Support
43
WORLDWIDE TRAINING AND SUPPORT
Aerotech offers comprehensive worldwide training andcustomer service either at customer facilities or at one of ourAerotech training centers.
Our Training Program Features:
• Standard and customized courses
• Hands-on training with Aerotech positioning systems
• Interactive training with experienced instructors
• Comfortable, spacious facilities
Installation and Start up (Commissioning)
Startup and commissioning services minimize startup times,reduce cost and accelerate time-to-production. By combiningour product knowledge with your process and applicationexpertise, new systems and applications can be completedfaster at a reduced overall cost.
Engineering Support
Aerotech provides complete engineering support for ourproducts, including on-site support and maintenance, andremote support via phone, fax, website and/or WebEx®
software. As a manufacturer staffed by engineers, weunderstand the unacceptability of downtime.
Training
Comprehensive training classes are designed to help ourcustomers realize the full potential of our products. Bydemonstrating all of a product’s features and how to usethem, customers have been able to reduce startup time andquickly optimize their applications. Our classes have beendeveloped, and continually upgraded, using feedback fromour customers.
Since 1970, Aerotech has designed motion control andpositioning systems and components with an unsurpassedtrack record of reliability. When you make the choice topurchase from Aerotech, we urge you to learn how to get themost from your new products. We provides both on-site (yourfacility) and/or in-house (our facility) training for ourcustomers’ convenience.
Aerotech Ltd (United Kingdom)
Aerotech GmbH (Germany)
Aerotech KK (Japan)
Aerotech Inc (U.S.A.)
AEROTECH’S WORLDWIDE SALES AND SERVICE LOCATIONS
★ - Aerotech Headquarters ● - Direct Field Sales Office ▲ - Aerotech Subsidiary ■ - Representative
Dedicated to the Science of Motion
www.aero tec h .comCA0213A