ca-dr mems servo accelerometer - sensor-test.de · ca-dr mems servo accelerometer 0(06 surfhvvlqj...
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CA-DR MEMS SERVO Accelerometer
MEMS processing craft manufacture Single power 15V
High Accuracy
Modal output
Static or dynamic acceleration response
High linearity
DesciptionCA - DR - 50 MEMS accelerometer is a newest design of high precision inertial sensor, it compose
by MEMS sensitive unit and control circuit. MEMS sensitive unit uses comb capacitance structure
and body silicon deep etching technology processing, high precisio , good consistency. The System
adopts high precision closed loop feedback control circuit, this type of accelerator have good stability
and linearity performance.The internal design of over range structure limit, can endure high impact and
acceleration load affect, 15V operating voltage, low output impedance, strong drive capability.
ApplicationsInertial navigation: inertial guidance, integrated navigation, stable platform
Short-term navigation: flight control, trajectory correction, telemetry remote control
Attitude control: Ships, aircraft, missiles, vehicle unmanned aerial vehicle (uav)
Structure
Red
Black
White
Green
Vdd
GND
OUT
NC
+PWR
GND
Output signal
Min.
24.6
19.6
18.6
13.6
10.8
≥100
Typ.
25.0
20.0
M2.5
19
14
11.2
Max.
25.4
20.4
19.4
14.4
11.6
Specifications
*All values are typical at Vdd=15V±1V,TA=25℃±5℃ unless otherwise statement
±50
1000×10-6@±50g
100×10-6@±30g
±0.5
0.085±0.015
5×10-4
5×10-3
5000×10-6
5×10-3
1×10-3
100
≥100
Remark:
1.The direction of acceleration sensitive is paralleled with acceleration installation surface
2.Use, packaging and transportation process must have the electrostatic protection measures
3. Limit operationg voltage: 17V
±30
1000×10-6
100×10-6
±0.5
0.085±0.015
5×10-4
5×10-3
5000×10-6
5×10-3
1×10-3
100
≥100
-45～85
-55～100
200g，2ms，Half-sine wave
0.04g2/Hz，20～2000Hz，Random Vibration，30min/Direction，Three directions
4572
Level 2，HBM 2000V
14