c251-e028a xslicer smx-6000seamless fusion of x-ray fluoroscopy and ct imaging the xslicer smx-6000...

C251-E028A

Microfocus X-Ray Inspection System

Xslicer SMX-6000

Seamless Fus ion o f X -RayF luoroscopy and CT Imag ing

The Xslicer SMX-6000 is an X-ray inspection system equipped with a Shimadzu microfocus

X-ray generator and high-sensitivity flat panel detector and featuring CT scanning capabil ity.

Smooth and quick switching is now enabled between viewing fluoroscopic and cross-section

images. In addition, the system includes a new Xslicer CT image processing engine used to

fully automate calibration and provide high-speed scanning and reconstruction.

The system can be used to observe distortion-free, high-magnification, and high-resolution

images of detailed internal structures and defects in flat samples, such as electronic devices.

Xslicer SMX-6000M i c r o f o c u s X - R a y I n s p e c t i o n S y s t e m

Easy Operation

The new user interface is simple and intuitive, enabling inspections to be started as soon as the door

is closed. This makes X-ray inspections easy to perform, even for operators using the system for the

first time.

Easy CT Imaging

Switching from fluoroscopy to CT imaging requires simply switching tabs. As a result, cross-section

images of complex 3D structures that are difficult to differentiate using fluoroscopy can be viewed

immediately with a simple operation.

High-Speed Scan & Reconstruction

The included Xslicer unit enables fully automated calibration and provides high-speed scanning and

reconstruction. Cross-section images can be displayed in as little as three minutes after starting CT

scans (in the [Simple] mode).

C o n t e n t s Intuitive Operabil ity

Simple Workflow

Easy CT Imaging

Smooth Switching

High-Speed Scan and Reconstruction

Principle of CT Imaging

Advantages of Oblique View Cone Beam Tomography (OVCBT)

System Configuration

Ample Safety Measures

Measurement Functions

Various Features for Facil itating Inspections

Applications

Optional Software

Specifications

P. 4

P. 6

P. 8

P. 9

P. 9

P. 10

P. 11

P. 12

P. 13

P. 14

P. 16

P. 18

P. 19

P. 20

Intuitive Operability

A large monitor screen and simple button layout provide excellent visibility for intuitive operability.

Therefore, X-ray inspections can be performed easily, even by operators using the system for the first time.

Stage Positioning Via the X-Ray ImageSimply click on any point in an X-ray image to control all stage movements,

such as changing the XY position, tilt, rotation, or field-of-view size.

4

Large MonitorThe system is equipped with a large 27-inch monitor. The simple button layout and large

high-resolution detector provides excellent visibility for observing details.

Using Exterior Images for Stage PositioningAn included dedicated camera obtains sample exterior images that capture the entire stage area. The stage position can be specified by

simply clicking on any position in the exterior image. Zooming is also possible in the exterior image, so that the stage position can be

specified in detail, at the part level. It also allows the user to operate the stage without looking away from the monitor.

Xslicer SMX-6000Microfocus X-Ray Inspection System 5

Simple Workflow

After placing the work, fluoroscopic images can be obtained in just three steps.

STEP 1Replace the previous sample.

Click the [Change Sample] button.

Stops X-ray irradiation.

Unlocks the electromagnetic lock on the front door.

The stage automatically moves to a position

where it is easier to replace the sample.

STEP 2Start the inspection.

Close the front door and click [Start].

Irradiates X-rays.

Captures an exterior image of the entire stage area.

STEP 3Position the stage.

Click on the exterior image to roughly position the stage.

Then click on the X-ray image to move the stage to the target observation point.

6

The new user interface enables all stage movement operations by simply clicking and dragging on the X-ray image.

Consequently, the user can move the stage quickly without looking away from the monitor.

Moving the Center Point

Click anywhere on the displayed X-ray image area to display that point at the center of the displayed image area.

Zoom In

Drag the pointer left to right across the displayed X-ray image area to magnify the specified area so it fills the screen.

Zoom Out

Drag the pointer right to left across the displayed X-ray image area to zoom out a given percentage.


Easy CT Imaging

CT imaging can display cross-section images of complex 3D structures, which may be difficult to differentiate using

fluoroscopy, separated into separate layers.

Example 1

Example 2

CT images can be obtained at any portion within 350 mm × 350 mm area.

300 mm

300

mm

8

Smooth Switching

Switch between X-ray fluoroscopy and CT imaging simply clicking on the menu tab. Settings for CT imaging involve only

selecting the scan mode, scan angle, and scan field-of-view. A seamless switching feature ensures that CT images can be

obtained seamlessly for any point of interest in fluoroscopic inspections.

X-ray fluoroscopic X-ray CTSimply select the mode ([Simple], [Normal], or [Fine]) and the tilt angle.

High-Speed Scan and Reconstruction

The new Xslicer CT image processing engine completely automates the calibration process, resulting in high-speed imaging.

Cross-section images are displayed in as little as two minutes after starting CT scans (in the [Simple] mode).

Xslicer dramatically increases reconstruction speeds as well, with cross-section images displayed only five seconds after data

acquisition is finished.

Xslicer SMX-6000 CT Imaging Process Flow

Positionsample

Scan

Reconstruct

Display

2 min 5 to 13 times higher throughput

Conventional CT Imaging Process Flow

Positionsample

Switch to CT mode

Calibrate Scan Reconstruct Display

15 to 40 min


Principle of CT Imaging

Oblique View Cone Beam Tomography (OVCBT)

X-ray fluoroscopic images are captured by tilting the flat panel detector and rotating it 360 degrees.

The resulting fluoroscopic images are then combined by a reconstruction process to create cross-section images.

X-ray detector

XY stage

X-ray generator

Reference Normal Cone Beam Tomography (NCBT)

X-rays are irradiated in a direction orthogonal to the rotation direction.

Fluoroscopic images are taken from various directions, and are then reconstructed to obtain cross-section

images of the sample.

X-ray generator

Exterior camera

CT stage

X-ray detector

10

Advantages of Oblique View Cone Beam Tomography (OVCBT)

Enables High Magnification Scans of Flat Sample

Oblique View Cone Beam Tomography (OVCBT)

X-ray detector

XY stage

X-ray generator

Explanation

When large substrates are scanned

with an OVCBT, the work is on the XY

stage, so high magnification scans

can be obtained by bringing it close

to the X-ray generator.

Normal Cone Beam Tomography (NCBT)

Obstructed

X-ray generator

Maximum trajectory for the work

Rotating table

Sample (Large substrate)

X-ray detector

View of NCBT from above the rotation table

Explanation

When large substrates are scanned

with an orthogonal CT, if the work is

brought closer to the X-ray generator

in order to increase the magnification,

they will be obstructed by the X-ray

generator during the CT scan, making

high magnification scans impossible.

Example

Normal Cone Beam Tomography (NCBT) Xslicer SMX-6000


System Configuration

Drive System Facilitating InspectionsHigh-speed XYZ-stage

Quickly moves to inspection points with ±180-degree rotation and 0 to 60-degree tilting.

X-ray tubeTurbo molecularpump

High-voltagetransformer

Equipped with Microfocus X-ray Generator Unit Made by ShimadzuEquipped with an open X-ray generator with 160 kV tube voltage and 1 μm resolution.

Due to the integrated high-voltage transformer, no greasing is necessary.

Automated adjustment simplifies the filament replacement process.

* 1 μm resolution: JIMA chart resolution

Ample Safety Measures

Prevents X-Ray Leakage Outside the SystemProtective barrier blocks X-rays from escaping outside the system

(1 μSv/h external X-ray leakage).

Collision Sensor

A collision sensor around the X-ray detector stops the drive

system in the event of an emergency (a collision with the

sample).

Front Door Lock MechanismThe front door lock mechanism locks the front door during

X-ray irradiation.

The interlock system also ensures safety by disabling X-ray

irradiation and the drive system when the door is open.

Software Limits

The software limit function prevents collisions with the flat panel

detector by specifying settings based on the sample height.

Xslicer SMX-6000Microfocus X-Ray Inspection System12 13

ROI

Static image

ROI area

Object area

Wire

Maximum bend point

L2

L1

Sweep ratio = L2 / L1×100 (%)

Measurement Functions

Wire Flow Ratio MeasurementsBGA Measurements

The system can measure ball grid array (BGA) bump diameters and void ratios.

Thanks to our proprietary image processing algorithm, complex parameter settings are not required.*

Measurements can also be performed by storing multiple settings in advance, and then calling up

different settings for each target examined.

Wire flow ratios can be measured by specifying both ends of a bonding

wire and the maximum bend point.

Pass/fail decisions can be performed based on the wire flow ratio.

(Measurable items)

Total void ratio

Maximum void ratio

Bump diameter

Bump roundness*: Manual adjustments may be required depending on the sample.

*: Manual adjustments may be required depending on the sample.

Area Ratio MeasurementsArea ratios for die bonds and solder paste wettability can be measured.

Thanks to our proprietary image processing algorithm, complex parameter settings are not required.*

Measurements can also be performed by storing multiple settings in advance, and then calling up different

settings for each target examined. Pass/fail decisions can be performed based on the area ratios.

Distance Measurements

The system can perform two-point and three point measurements.

With this system, calibration data is calculated internally in synch with the fluoroscopy magnification ratio,

enabling efficient distance measurements.

nt Fu

Each measurement function includes both fluoroscopic and cross-section calculation.


Various Features for Facilitating Inspections

Teaching

By registering inspection points in

advance, sample inspections can

be repeated efficiently.

The status is displayed on screen.

"Pass" decisionDefer"Fail" decisionNot inspected or skippedCurrently being measured

12

11

10 73 2

69 84 1

5

With the teaching function, fluoroscopy and CT scans can be configured at various positions.

point 1

Fluoroscopic Observation

point 2

Fluoroscopic Observation

point 3

Cross-section Observation(CT Images)

Step Feed Movement

The step feed function is especially convenient for inspecting samples on a pallet or arranged in a grid pattern.

Specify the interval between feeding each sample, how many times to feed a sample, and the amount of vertical

and horizontal movement.

The stage repeats stepwise movements in a staggered pattern.

Observation direction: Horizontal Observation direction: Vertical

Preset

Observation points and observation conditions can be registered easily.

Preregistered imaging conditions can be reproduced by clicking on a

registered number.

22

1111

333

44

Automatic Image Quality Adjustment

This function sets the optimal observation conditions for each situation.

D e p e n d i n g o n t h e

changing conditions, the

optimal window level

and window width are

specified in real time.

AW ON

AW OFF

When selecting an area

of interest, the window

l e v e l a n d w i n d o w

width are optimized for

the specified range.

Area of Interest

Panorama Image

Optimal panoramic images can be

obtained easily by simply specifying the

image range on the exterior image.

an be

ng the

One field-of-view


Applications

Damaged IC

Fluoroscopic Image Cross-Section Image VR Image

Heat-Damaged Connector

Fluoroscopic Image VR Image

Pin-Connector on a Substrate

Cross-Section Image VR Image

Double Sided Circuit Board

Fluoroscopic Image Cross-Section Image, 35 mm field of view

Cross-Section Image, 45 mm field of view

Applications

Power Module

Fluoroscopic Image Cross-Section Image

BGA


Area Ratio


Optional Software

VGStudioThree-Dimensional Image Processing SoftwareP/N: S362-99444-01

This software uses volume rendering (VR) to display three

dimensional images from cross-section images obtained using

X-ray CT imaging. It includes functionality for creating basic

animation and simple measurements.


Xslicer SM

X-6000

Specif icat ions

Model

P/N

Spatial Resolution

Maximum Sample Size

Fluoroscopic Inspection Stroke

CT Scan Range

Laminographic Angle (CT Scan Angle)

X-Ray Output

Detector

Fluoroscopy FOV (on Carbon Plate)

CT FOV (on Carbon Plate)

Power Requirements

Weight

Operating Environment Conditions

External Leakage Dose

Xslicer SMX-6000

S362-86000

1 μm (JIMA chart resolution)

470 × 420 × 100 mm, max. 5 kg

X: 460 mm, Y: 410 mm, Z: 100 mm, ±180° rotation, 60° tilt

X: 350 mm, Y: 350 mm

45° or 60°

Max. tube voltage: 160 kV, Max. tube current: 100 μA, Rated output: 16 W

Flat panel detector

0.75 mm (vertical) × 1.3 mm (horizontal) to 21 mm (vertical) × 38 mm (horizontal)

3 to 30 mm (given 45° laminographic angle) / 3 to 14 mm (given 60° laminographic angle)

200 V AC ± 10%, 1.5 kVA (ground resistance 100 Ω max.)

Approx. 2,450 kg

Ambient temperature: 15 to 30 °C, Ambient humidity: 35 to 80 % (no condensation)

1 μSv/h max.

Layout and Dimensions (units : mm)

1,60

038

4

Rec

om

men

ded

mai

nte

nan

ce s

pac

e: A

t le

ast

2,7

00

(Min. 25)

Recommended maintenance space: At least 3,300

1,8

80

to

(1

,91

0)

(1,1

50

) to

(1

,35

0)

1,520 280

(100) to (150)

22

1,76

0

www.shimadzu.com/an/

For Research Use Only. Not for use in diagnostic procedures. This publication may contain references to products that are not available in your country. Please contact us to check the availability of these products in your country.Company names, products/service names and logos used in this publication are trademarks and trade names of Shimadzu Corporation, its subsidiaries or its affiliates, whether or not they are used with trademark symbol “TM” or “®”.Third-party trademarks and trade names may be used in this publication to refer to either the entities or their products/services, whether or not they are used with trademark symbol “TM” or “®”.Shimadzu disclaims any proprietary interest in trademarks and trade names other than its own.

The contents of this publication are provided to you “as is” without warranty of any kind, and are subject to change without notice. Shimadzu does not assume any responsibility or liability for any damage, whether direct or indirect, relating to the use of this publication.

© Shimadzu Corporation, 2017First Edition: January 2016, Printed in Japan 3655-01702-20ANS

c251-e028a xslicer smx-6000seamless fusion of x-ray fluoroscopy and ct imaging the xslicer smx-6000...

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